CN112984245A - Flange applied to gas mass flow controller - Google Patents
Flange applied to gas mass flow controller Download PDFInfo
- Publication number
- CN112984245A CN112984245A CN202110180986.5A CN202110180986A CN112984245A CN 112984245 A CN112984245 A CN 112984245A CN 202110180986 A CN202110180986 A CN 202110180986A CN 112984245 A CN112984245 A CN 112984245A
- Authority
- CN
- China
- Prior art keywords
- gas
- flow controller
- flange
- mass flow
- gas mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/02—Flanged joints the flanges being connected by members tensioned axially
- F16L23/024—Flanged joints the flanges being connected by members tensioned axially characterised by how the flanges are joined to, or form an extension of, the pipes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
- B01D46/2403—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies characterised by the physical shape or structure of the filtering element
- B01D46/2411—Filter cartridges
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/16—Flanged joints characterised by the sealing means
- F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
- F16L23/20—Flanged joints characterised by the sealing means the sealing means being rings made exclusively of metal
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/16—Flanged joints characterised by the sealing means
- F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
- F16L23/22—Flanged joints characterised by the sealing means the sealing means being rings made exclusively of a material other than metal
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The application relates to the technical field of measurement and control, in particular to a flange applied to a gas mass flow controller, wherein a gas channel is arranged in a flange body, one end of the gas channel is provided with a pipeline joint, and the other end of the gas channel is provided with a filter screen; the filter screen is surrounded, and a bulge and a groove are arranged on the end surface of the flange body. The invention has simple structure and convenient installation, can simultaneously realize metal sealing, rubber sealing and gas filtration of the gas mass flow controller, and can select different sealing modes aiming at different gases; in the aspect of sealing, the design has only one more processing groove compared with the traditional flange, the additional processing cost is basically zero, the designed filter screen can be quickly formed by laser cutting, a redundant filter device is not needed, and the manufacturing cost and the maintenance cost are reduced.
Description
Technical Field
The application relates to the technical field of measurement and control, in particular to a flange applied to a gas mass flow controller.
Background
The gas mass flow controller has important application in the fields of chemical industry, semiconductors, coating technology, aerospace and the like, the pneumatic connector of the gas flow controller is a bridge for connecting the flow controller, a pressure gas cylinder and a pipeline, gas enters a gas passage in the flow controller through a flange, the key purpose of ensuring the tightness and filterability of the gas is the flange of the flow controller, and the key is the accurate measurement and no damage of the mass flow controller.
Aiming at the problem of gas sealing, the traditional sealing method of the flange of the flow controller comprises rubber sealing and metal sealing, wherein the metal sealing has the characteristics of long service life and corrosion resistance, the metal sealing method can only be used once, and the rubber sealing method has the characteristics of corrosion resistance and repeated use, and has the defects of short service life, long time, aging of the material of the sealing ring, poor air tightness of a flow control system and inaccurate system measurement. In order to take into account the different gases, which have different corrosiveness, the advantages of the metal seal and the rubber seal of the gas flow controller are considered: the long service life, corrosion resistance and repeated use of sealing materials are key steps of the universal flange of the gas mass flow controller by selecting proper sealing modes and sealing materials.
In addition, aiming at the problem of gas filtration, when gas flows in a pipeline, impurities on the inner wall of the pipeline are easy to fall off and mix into the gas, the impurities flow into a gas flow controller along with the gas and can block a capillary tube of the flow controller, so that a sensor of the flow controller fails or is damaged, the filtration of the gas is the key of the safe operation of the flow controller, a traditional filtration method is to add a filtration device into the gas pipeline, but the method needs to add redundant filtration devices, and the manufacturing cost and the maintenance cost of a flow control system are high.
Disclosure of Invention
Aiming at the problems in the background art, the invention provides the flange applied to the gas mass flow controller, which has a simple structure and can simultaneously realize the functions of metal sealing, rubber sealing and gas filtering of the gas mass flow controller.
According to the flange applied to the gas mass flow controller, a gas channel is arranged inside a flange body, a pipeline joint is arranged at one end of the gas channel, and a filter screen is arranged at the other end of the gas channel; the filter screen is surrounded, and a bulge and a groove are arranged on the end surface of the flange body.
Furthermore, the filter screen is of a thin-wall structure and is integrally formed with the flange body.
Furthermore, the bulge is an annular bulge and used for placing an extruded metal sealing ring.
Furthermore, all the grooves are annular and used for placing the extrusion rubber sealing rings.
Furthermore, the flange body is communicated with a gas pipeline of the pressure bottle through a pipeline joint.
Furthermore, the flange body is respectively fixed at the gas inlet end and the gas outlet end of the gas mass flow controller through bolts.
The flange applied to the gas mass flow controller provided by the invention has the following beneficial effects:
the invention has simple structure and convenient installation, can simultaneously realize metal sealing, rubber sealing and gas filtration of the gas mass flow controller, and can select different sealing modes aiming at different gases; in the aspect of sealing, the design has only one more processing groove compared with the traditional flange, the additional processing cost is basically zero, the designed filter screen can be quickly formed by laser cutting, a redundant filter device is not needed, and the manufacturing cost and the maintenance cost are reduced.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, serve to provide a further understanding of the application and to enable other features, objects, and advantages of the application to be more apparent. The drawings and their description illustrate the embodiments of the invention and do not limit it. In the drawings:
FIG. 1 is a schematic structural view of a flange of the present application as applied to a gas mass flow controller;
FIG. 2 is a schematic view of a flange of a gas mass flow controller in mating connection with the gas mass flow controller according to the present application;
FIG. 3 is a first schematic view of a flange metal seal as applied to a gas mass flow controller according to the present application;
FIG. 4 is a second schematic view of a metal seal of a flange for use in a gas mass flow controller according to the present application;
FIG. 5 is a first schematic view of a flange rubber seal as applied to a gas mass flow controller according to the present application;
FIG. 6 is a second schematic view of a flange rubber seal for use in a gas mass flow controller according to the present application;
in the figure: 1-pipeline joint, 2-filter screen, 3-bulge, 4-groove, 5-metal sealing ring, 6-rubber sealing ring and 7-gas mass flow controller.
Detailed Description
In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
As shown in fig. 1 to 6, in the flange applied to the gas mass flow controller provided by the present application, a gas channel is arranged inside a flange body, a pipeline joint 1 is arranged at one end of the gas channel, and a filter screen 2 is arranged at the other end of the gas channel; the end surface of the flange body is provided with a bulge 3 and a groove 4 around the filter screen 2.
Specifically, the flange applied to the gas mass flow controller provided by the embodiment of the application is mainly used for connecting a pressure gas cylinder and the gas mass flow controller 7, so that gas in the pressure gas cylinder enters the gas mass flow controller 7 to be accurately measured and controlled. The flange sets up at the both ends of gas mass flow controller 7, and the flange body is inside to be provided with gas passage, the business turn over of mainly used gas, and gas in the pressure gas cylinder is observed and controled in getting into gas mass flow controller 7 after the flange filtration of left end, then gets into in follow-up generating device or the measuring device after the flange filtration through the right-hand member. The flange body is connected with the pressure gas cylinder through the pipeline joint 1, and the filter screen 2 mainly used filters the impurity in the gas, encircles the filter screen 2, has seted up annular arch 3 and recess 4 at the terminal surface of the flange body, and mainly used places sealing device.
Furthermore, the filter screen 2 is of a thin-wall structure and is integrally formed with the flange body. Filter screen 2 is the metal mesh, with flange formula structure as an organic whole, the terminal surface of metal mesh at first through CNC technology machine-shaping thin-walled structure, then, accomplishes the netted filtration of micro-flow gas through laser engraving, accomplishes filter screen 2 through polishing technology at last, and gaseous impurity in filter screen 2 mainly used filtration entering gas mass flow controller 7 avoids the capillary of controller to be blockked up to lead to the damage of controller.
Further, the protrusion 3 is an annular protrusion 3 for placing the extruded metal seal ring 5. The bulge 3 is mainly used for metal sealing, extruding the metal sealing ring 5, and the bulge 3 on the end face of the flange body is in contact extrusion with the metal sealing ring 5 by screwing the bolt connected between the flange body and the gas mass flow controller 7, so that the metal sealing ring 5 is extruded and attached to deform, and metal sealing is realized.
Furthermore, the grooves 4 are all annular grooves 4 for placing the extrusion rubber sealing rings 6. The groove 4 is mainly used for rubber sealing, the rubber sealing ring 6 is placed in the groove 4, and the groove 4 on the end face of the flange body is in contact extrusion with the rubber sealing ring 6 by screwing a bolt connected between the flange body and the gas mass flow controller 7, so that the rubber sealing ring 6 is extruded and attached tightly to deform, and rubber sealing is realized.
In the embodiment of the application, different sealing modes can be selected according to the working medium characteristics of the actual gas flow controller, and for acid gas, the groove 4 is selected to extrude the rubber sealing ring 6 to perform rubber sealing; for organic gas, the bulge 3 is selected to extrude the metal sealing ring 5 for metal sealing; for most common gases, either of two sealing means may be selected.
Further, the flange body is communicated with a gas pipeline of the pressure bottle through a pipeline joint 1. The gas of pressure bottle passes through gas line and pipeline joint 1 and enters into the gas passage of flange body, and after the purification of filter screen 2, the entering gas mass flow controller 7 observes and controls, and after observing and controlling finishes, the flange filters once more and enters into among subsequent generating device or the measuring device. The gas quality flow control system has the advantages that redundant filtering devices are not required to be added into a gas pipeline, the construction cost and the maintenance cost of the gas quality flow control system can be greatly reduced, the functions of high sealing, long service life, corrosion resistance and repeated use of sealing materials are realized with extremely low cost, and the gas quality flow control system is a universal flange.
Further, the flange body is fixed to the gas inlet end and the gas outlet end of the gas mass flow controller 7 by bolts, respectively. The four corners of the flange body are provided with through holes, the flange body is fixed at the air inlet end and the air outlet end of the gas mass flow controller 7 through bolts and used for air to enter and exit, and the metal sealing ring 5 and the rubber sealing ring 6 can be extruded by screwing the bolts, so that metal sealing and rubber sealing are realized.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art without departing from the spirit and principle of the present application, and any modifications, equivalents, improvements, etc. made therein are intended to be included within the scope of the present application.
Claims (6)
1. A flange applied to a gas mass flow controller is characterized in that a gas channel is arranged in a flange body, a pipeline joint is arranged at one end of the gas channel, and a filter screen is arranged at the other end of the gas channel; and the flange body surrounds the filter screen, and a bulge and a groove are arranged on the end surface of the flange body.
2. A flange for a gas mass flow controller according to claim 1 wherein said screen is of thin-walled construction and is formed integrally with said flange body.
3. A flange for a gas mass flow controller according to claim 1, wherein said projection is an annular projection for receiving a squeeze metal seal.
4. A flange for a gas mass flow controller according to claim 1, wherein said groove is an annular groove for receiving a squeeze rubber seal.
5. A flange for a gas mass flow controller according to claim 1, wherein said flange body communicates with a gas line of a pressure bottle through said line connection.
6. The flange for a gas mass flow controller of claim 5, wherein said flange body is bolted to the inlet end and the outlet end of the gas mass flow controller, respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110180986.5A CN112984245A (en) | 2021-02-09 | 2021-02-09 | Flange applied to gas mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110180986.5A CN112984245A (en) | 2021-02-09 | 2021-02-09 | Flange applied to gas mass flow controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112984245A true CN112984245A (en) | 2021-06-18 |
Family
ID=76393087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110180986.5A Pending CN112984245A (en) | 2021-02-09 | 2021-02-09 | Flange applied to gas mass flow controller |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112984245A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113351387A (en) * | 2021-07-01 | 2021-09-07 | 兰州空间技术物理研究所 | Integrated micro-nozzle for gas mass flow controller |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080073857A1 (en) * | 2006-09-27 | 2008-03-27 | Elringklinger Ag | Sealing system |
| CN103075588A (en) * | 2013-02-01 | 2013-05-01 | 南车长江车辆有限公司 | Dual-sealing flange joint for air braking pipe system of rail wagon |
| CN104344117A (en) * | 2013-08-10 | 2015-02-11 | 江苏科茵格特种沥青有限公司 | Connecting flange for asphalt pipelines |
| CN104676157A (en) * | 2013-12-03 | 2015-06-03 | 上海宇航系统工程研究所 | Pipeline sealing device |
| CN204942822U (en) * | 2015-08-06 | 2016-01-06 | 中国石油天然气股份有限公司 | Filtration formula measuring pump pipeline |
| CN106224670A (en) * | 2016-10-08 | 2016-12-14 | 湖北三江航天红林探控有限公司 | A kind of shock resistance anti-loosing type high-temperature sealing device |
| CN209361943U (en) * | 2018-11-09 | 2019-09-10 | 深圳中广核工程设计有限公司 | Nuclear power station reactor core strainer |
-
2021
- 2021-02-09 CN CN202110180986.5A patent/CN112984245A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080073857A1 (en) * | 2006-09-27 | 2008-03-27 | Elringklinger Ag | Sealing system |
| CN103075588A (en) * | 2013-02-01 | 2013-05-01 | 南车长江车辆有限公司 | Dual-sealing flange joint for air braking pipe system of rail wagon |
| CN104344117A (en) * | 2013-08-10 | 2015-02-11 | 江苏科茵格特种沥青有限公司 | Connecting flange for asphalt pipelines |
| CN104676157A (en) * | 2013-12-03 | 2015-06-03 | 上海宇航系统工程研究所 | Pipeline sealing device |
| CN204942822U (en) * | 2015-08-06 | 2016-01-06 | 中国石油天然气股份有限公司 | Filtration formula measuring pump pipeline |
| CN106224670A (en) * | 2016-10-08 | 2016-12-14 | 湖北三江航天红林探控有限公司 | A kind of shock resistance anti-loosing type high-temperature sealing device |
| CN209361943U (en) * | 2018-11-09 | 2019-09-10 | 深圳中广核工程设计有限公司 | Nuclear power station reactor core strainer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113351387A (en) * | 2021-07-01 | 2021-09-07 | 兰州空间技术物理研究所 | Integrated micro-nozzle for gas mass flow controller |
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