CN112929797B - Waterproof sound-transmitting membrane assembly and MEMS (micro electro mechanical systems) with same - Google Patents
Waterproof sound-transmitting membrane assembly and MEMS (micro electro mechanical systems) with same Download PDFInfo
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- CN112929797B CN112929797B CN202110121973.0A CN202110121973A CN112929797B CN 112929797 B CN112929797 B CN 112929797B CN 202110121973 A CN202110121973 A CN 202110121973A CN 112929797 B CN112929797 B CN 112929797B
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Classifications
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- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
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Abstract
The invention discloses a waterproof sound-transmitting membrane assembly and MEMS (micro electro mechanical system) provided with the same, comprising a waterproof sound-transmitting membrane and a protective layer, wherein the protective layer is positioned on one side of the waterproof sound-transmitting membrane, which is close to the external environment, the sound blocking quantity of the waterproof sound-transmitting membrane assembly in the sound frequency range of 100-10000Hz is less than 3dB, and the waterproof performance is IP64 or IP65 or IP66 or IP67 or IP68; the protective layer is a high-temperature-resistant high-molecular polymer layer, and can resist the high temperature of 250 ℃ for 3min at least; a plurality of sound transmission holes are formed in the protective layer; the protective layer is low in price, is convenient for the integral installation and processing of the waterproof sound-transmitting membrane assembly, and can play a good role in protecting the waterproof sound-transmitting membrane; the whole waterproof sound-transmitting membrane component has higher waterproof sound-transmitting performance, is suitable for electronic products of 3C electronic products and underwater work, and is particularly suitable for being applied to micro-electromechanical systems such as MEMS and the like, thereby providing waterproof sound-transmitting effect for MEMS all the time and ensuring that the MEMS has longer service life.
Description
Technical Field
The invention relates to the technical field of membrane materials and the technical field of microelectronics, in particular to a waterproof sound-transmitting membrane component and an MEMS (micro electro mechanical system) with the same.
Background
With the progress of society, people have higher requirements on electronic products such as mobile phones, notebook computers and the like, so that the electronic products are expected to have higher performance, various working demands of people can be met, the electronic products are expected to have smaller size, and the electronic products are convenient for people to carry; the volume of electronic parts to be matched therewith is also required to be continuously reduced, and performance and uniformity are required to be continuously improved.
In the above background, MEMS, a type of electronic component, is attracting attention, and MEMS, i.e., microelectromechanical systems, also called microelectromechanical systems, refers to high-tech devices with dimensions of a few millimeters or less, and their internal structures are typically on the order of micrometers or nanometers, which are independent intelligent systems. Mainly comprises three parts of a sensor, an actuator and micro energy. The micro-electromechanical system relates to various subjects and engineering technologies such as physics, semiconductors, optics, bioengineering and the like, and opens up wide application in the fields of intelligent systems, consumer electronics, intelligent home furnishings and the like. Common products include MEMS accelerometers, MEMS microphones, MEMS pressure sensors, MEMS gyroscopes, MEMS humidity sensors, and the like, as well as their integrated products.
In the prior art, in order to prevent the influence of liquid such as external water on the service life of the MEMS in the process of applying the MEMS to electronic components such as microphones, sensors and the like, a layer of waterproof sound-transmitting film is often attached to the MEMS; meanwhile, a steel mesh is arranged on one side of the waterproof sound-transmitting membrane, which is close to the environment; for example, a protection cover for outdoor microphones is written in chinese patent application CN 201620390820.0: the waterproof net sheet is divided into two layers, wherein the upper layer is a stainless steel net sheet, a plurality of holes are formed in the stainless steel net sheet, the lower layer is a waterproof sound-transmitting film, and the waterproof sound-transmitting film is adhered to the stainless steel net sheet; therefore, the steel mesh can play a role in protecting the waterproof sound-transmitting membrane, so that the waterproof sound-transmitting membrane is prevented from being adversely affected by sharp objects such as chips in the processes of subsequent packaging, processing, mounting, using and the like, and the waterproof sound-transmitting membrane is ensured to have longer service life.
In the actual preparation and use process, research and development personnel find that the existence of the steel mesh can cause some adverse effects, for example, the steel mesh can increase a certain difficulty in the whole installation and processing of the waterproof sound-transmitting membrane assembly, because a certain burr exists on the steel mesh, and the existence of the burr can influence the processing and installation of the waterproof sound-transmitting membrane assembly; in addition, once the burrs are too long, the burrs are easy to contact with the waterproof sound-transmitting membrane, so that the waterproof sound-transmitting performance of the waterproof sound-transmitting membrane is adversely affected; even though the burrs are shorter, when the steel mesh is pressed by external force, the burrs still possibly contact the waterproof sound-transmitting membrane on one hand, and the steel mesh is difficult to recover after deformation on the other hand, so that the waterproof sound-transmitting performance of the waterproof sound-transmitting membrane is adversely affected; in addition, the steel mesh is expensive, the economic cost is high, and the steel mesh is made of metal, and belongs to non-renewable resources; the presence of the above drawbacks also limits to a certain extent the development of waterproof sound-transmitting membranes.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to provide a waterproof sound-transmitting membrane component and an MEMS (micro electro mechanical system) provided with the same, wherein the waterproof sound-transmitting membrane component has stronger waterproof sound-transmitting performance, is low in price, is convenient to install and process, and is suitable for being attached to the MEMS to play a waterproof sound-transmitting role for the MEMS for a long time.
In order to achieve the above purpose, the present invention provides the following technical solutions: the waterproof sound-transmitting membrane assembly comprises a waterproof sound-transmitting membrane and a protective layer, wherein the protective layer is positioned on one side of the waterproof sound-transmitting membrane, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane and the protective layer, the sound blocking amount of the waterproof sound-transmitting membrane component in the audio frequency range of 100-10000Hz is less than 3dB, and the waterproof performance is IP64 or IP65 or IP66 or IP67 or IP68; the protective layer is a high-temperature-resistant high-molecular polymer layer, and can resist the high temperature of 250 ℃ for 3min at least; and a plurality of sound transmission holes are formed in the protective layer.
The waterproof sound-transmitting membrane component comprises the waterproof sound-transmitting membrane and the protective layer, wherein the waterproof sound-transmitting membrane has excellent waterproof sound-transmitting performance, the protective layer is positioned on one side of the waterproof sound-transmitting membrane, which is close to the external environment, and the protective layer is used for protecting the waterproof sound-transmitting membrane, so that the waterproof sound-transmitting performance of the waterproof sound-transmitting membrane is prevented from being adversely affected by sharp objects such as chips and the like in the subsequent technological processes of packaging, processing and the like related to MEMS; the protective layer is a high-temperature-resistant high polymer layer, and compared with a steel mesh, the protective layer obtained from the high polymer has no burrs on one hand, so that the integral installation and processing of the waterproof sound-transmitting membrane assembly are facilitated; on the other hand, the price is low, the cost is only one tenth of that of a stainless steel net, and the economic cost is greatly reduced; in addition, the protective layer is provided with a plurality of sound transmission holes, so that the sound loss of the whole waterproof sound transmission membrane assembly can be greatly reduced, the lower sound blocking quantity of the whole waterproof sound transmission membrane assembly is further ensured, the sound blocking quantity (also called the insertion loss) in the sound frequency range of 100-10000Hz is less than 3dB, the sound transmission performance is good, and the waterproof sound transmission membrane assembly is particularly suitable for being applied to MEMS (micro electro mechanical systems) and the like; the integral waterproof performance of the waterproof sound-transmitting membrane component is not affected, and the waterproof performance of the waterproof sound-transmitting membrane component is IP64 or IP65 or IP66 or IP67 or IP68, so that the waterproof performance is good; in the process of the electronic manufacturing field, the most commonly used technology is reflow soldering technology, components such as MEMS (micro electro mechanical systems) are installed and fixed on corresponding main boards at a higher temperature, so that the protective layer is required to be resistant to the higher temperature, the protective layer in the invention can resist the high temperature of 250 ℃ for 3min at least, on one hand, the protective layer is ensured not to be damaged in the reflow soldering process, on the other hand, the protective layer can also perform a certain protection function on the waterproof sound-permeable membrane, the phenomenon that the thermal deformation degree of the waterproof sound-permeable membrane is too large due to gas (air or nitrogen) with higher temperature is avoided, the waterproof sound-permeable performance of the waterproof sound-permeable membrane is influenced (after the protection of the protective layer is performed, the thermal deformation degree of the waterproof sound-permeable membrane is smaller, the waterproof sound-permeable performance is hardly influenced), and finally after the installation is finished, the whole waterproof sound-permeable membrane component can play the role of the waterproof sound-permeable membrane to the MEMS, the normal play of the function of the MEMS is ensured, and the service life is longer. The waterproof sound-transmitting membrane component is suitable for MEMS, acoustic components of 3C electronic equipment such as mobile phone microphones, sound boxes and the like, and electronic equipment working underwater, so that the waterproof sound-transmitting membrane component has a strong waterproof sound-transmitting effect.
When sound passes through an object, certain loss occurs; this loss amount is actually also referred to as the sound blocking amount of the object, and the larger the sound blocking amount (also referred to as insertion loss) of the object, the larger the sound loss, the smaller the sound blocking amount of the object, and the smaller the sound loss; the sound blocking amount of the waterproof sound-transmitting membrane component is smaller than 3dB, namely the sound loss amount is smaller than 3dB when sound is transmitted through the waterproof sound-transmitting membrane component, so that the waterproof sound-transmitting membrane component has excellent sound-transmitting performance and a larger application range, and is particularly suitable for being applied to the technical field of micro-electronics such as MEMS (micro-electromechanical systems).
The IP protection level is composed of two numbers, wherein the 1 st number indicates the level of dust prevention and foreign object invasion prevention of the electric appliance (the foreign object contains tools, fingers of a person and the like can not contact the inner electrified part of the electric appliance to avoid electric shock), the 2 nd number indicates the airtight degree (waterproof performance) of moisture prevention and waterproof invasion of the electric appliance, and the larger the number indicates the higher the protection level; the waterproof performance is measured by an IP waterproof grade tester, and the object is generally considered to have good waterproof performance when the waterproof grade of the object is more than or equal to 4, so that the intrusion of liquid such as rainwater can be prevented; the waterproof performance of the waterproof sound-transmitting membrane component is IP64 or IP65 or IP66 or IP67 or IP68, the waterproof performance is strong, the waterproof effect is achieved for MEMS, and the MEMS is guaranteed to have a longer service life.
As a further improvement of the present invention, the waterproof sound-transmitting membrane includes a waterproof sound-transmitting segment D; the waterproof sound-transmitting membrane component is provided with a control-tone ratio H for ensuring that the sound tone is not changed, and the control-tone ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D;
the control and regulation ratio H is used for keeping the harmonic distortion increment of the waterproof sound-transmitting membrane component at most 10% under the conditions that the temperature is-40-80 ℃, the relative humidity of air is 20-80% and the sound frequency is 100-10000 Hz.
When sound encounters an object, the transmission modes mainly include the following two modes: if the object is a non-porous material, the transmission of sound is mainly carried out by the vibration of the object itself; if the object is made of porous material, the sound is transmitted mainly through air vibration in the hole of the object, and of course, the object may generate certain vibration to transmit, the amplitude of the porous material is mainly related to the ventilation rate of the porous material, and in general, the larger the ventilation rate of the porous material is, the smaller the vibration amplitude of the porous material is (even the porous material does not vibrate); thus, under the same conditions, the vibration amplitude of the porous material is generally smaller than that of the non-porous material (the air permeation rate is regarded as 0), and the acoustic resistance of the porous material is also generally smaller than that of the non-porous material; since the objects vibrate during the process of transmitting the same sound, if the two objects vibrate in opposite directions at a certain moment (when the phase difference of the two objects is pi under a certain frequency) during the process of transmitting the same sound, if the vibration amplitude of the two objects is overlarge and the distance between the two objects is smaller, the two objects can be contacted with each other, and after the two objects are contacted with each other, the distortion of the sound is overlarge, and the tone changes and is particularly expressed as noise;
The sound is transmitted by firstly sending out the sound and then causing internal air vibration, then causing the waterproof sound-transmitting membrane to transmit self vibration, and certainly, part of the sound is transmitted by air vibration in the holes of the waterproof sound-transmitting membrane, then transmitted by air vibration between the waterproof sound-transmitting membrane and the protective layer, and then transmitted mainly by air vibration in the sound-transmitting holes of the protective layer, and part of the sound is contacted with the solid part of the protective layer, so that the protective layer itself generates fine vibration to transmit, and finally, the relevant sound is heard by the human ear;
the protective layer made of the non-porous material is changed into the porous material through the plurality of sound-transmitting holes, so that the sound blocking capacity of the whole waterproof sound-transmitting membrane assembly is greatly reduced, but the sound transmitting performance is greatly improved, the possibility of noise occurrence caused by the contact of the protective layer and the waterproof sound-transmitting membrane in the sound transmission process is greatly increased, because a certain amount of air exists between the protective layer and the waterproof sound-transmitting membrane when the protective layer is made of the non-porous material, the air has poor flowability or almost cannot flow, and when the movement of the protective layer and the waterproof sound-transmitting membrane is opposite (opposite movement), the air has an extrusion effect on the air inside, and meanwhile, the air inside also generates a reactive force on the protective layer and the waterproof sound-transmitting membrane to prevent the continuous movement of the protective layer and the waterproof sound-transmitting membrane, and the distance between the protective layer and the waterproof sound-transmitting membrane is more similar, so that the noise is difficult to occur when the protective layer is made of the non-porous material; when the protective layer is made of porous materials, a certain amount of air exists between the protective layer and the waterproof sound-transmitting membrane, but the air has good fluidity, when the protective layer and the waterproof sound-transmitting membrane move oppositely (move oppositely), although the protective layer and the waterproof sound-transmitting membrane have a squeezing effect on the air in the protective layer, the air in the protective layer can move into the external environment through the sound-transmitting holes in the protective layer, so that the reaction force of the air in the protective layer to the protective layer and the waterproof sound-transmitting membrane is very small and even negligible, namely the protective layer and the waterproof sound-transmitting membrane are not prevented from continuously moving oppositely to be contacted; therefore, compared with the protective layer made of non-porous materials, the protective layer with the sound-transmitting holes is relatively easy to contact with the waterproof sound-transmitting membrane so as to generate noise;
In the invention, the proper control and regulation ratio H exists between the waterproof sound-transmitting membrane and the protective layer, so that the waterproof sound-transmitting membrane and the protective layer can not be contacted with each other in the sound transmission process, and the distortion amount is small after the sound passes through the whole waterproof sound-transmitting membrane assembly, namely noise can not occur; the control and adjustment ratio H is the ratio between the vibration interval D (the actual interval distance between the waterproof sound-transmitting membrane and the protective layer) and the length of the waterproof sound-transmitting section D, that is, the magnitude of the control and adjustment ratio is related to the two factors of the vibration interval D and the length of the waterproof sound-transmitting section D (if the surface of the waterproof sound-transmitting section is circular, the length of the waterproof sound-transmitting section D is the diameter of the circle, if the surface of the waterproof sound-transmitting section is rectangular, the length of the waterproof sound-transmitting section D is the diagonal length of the rectangle), and when the length of the waterproof sound-transmitting section D is determined, the larger the vibration interval D is, the larger the control and adjustment ratio H is; when the vibration interval D is determined, the larger the length of the waterproof sound-transmitting section D is, the smaller the control and adjustment ratio H is; the control and regulation ratio H is used for keeping the temperature at-40 ℃ to 80 ℃, the relative humidity of air is 20% -80%, and the harmonic distortion increment of the waterproof sound-transmitting membrane component is at most 10% under the condition that the audio frequency is 100-10000Hz (when the harmonic distortion increment exceeds 10%, the sound is relatively dull, hard and free of a sense of presence, and when the harmonic distortion increment is less than 10%, the sound is relatively smooth, fine and natural); the harmonic distortion increment is one of indexes commonly used at present for judging whether sound quality is good or bad or not; the harmonic distortion increment is the difference between the harmonic distortion degree after the diaphragm assembly is used and the harmonic distortion degree without the diaphragm assembly, and the harmonic distortion degree is measured by an audio analyzer; namely, in various environments, the waterproof sound-transmitting membrane and the protective layer are not contacted with each other in the sound transmission process, the tone is not changed, noise is not generated, and the high efficiency of sound transmission is ensured.
As a further improvement of the invention, the air permeability rate of the protective layer is 0.1-30L/(min cm < 2 >) @7kPa; the control and regulation ratio H is 0.005-0.05.
The air permeability rate of the protective layer is measured by an air permeability tester under the condition that the pressure is 7kPa; the air permeability of the protective layer is 0.1-30L/(min cm) 2 ) Has a good air permeability rate, in which case, during the transmission of sound, the sound is mainly transmitted through air vibration in the air holes of the protective layer, and the vibration amplitude of the protective layer is very small or even almost none; meanwhile, the control and regulation ratio H is 0.005-0.05, and under the synergistic interaction of the control and regulation ratio H and the ventilation rate of the protective layer, the harmonic distortion increment of the waterproof sound-transmitting membrane assembly is at most 10% under the conditions that the temperature is-40-80 ℃, the relative humidity of air is 20-80% and the sound frequency is 100-10000Hz, namely, the waterproof sound-transmitting membrane and the protective layer are not contacted with each other in the sound transmission process under various environments, the tone is not changed, noise is not generated, and the high efficiency of sound transmission is ensured.
As a further improvement of the invention, the aperture of the sound-transmitting holes on the protective layer is 0.1-0.5mm, and the area ratio of the sound-transmitting holes on the outer surface of the protective layer is 10-70%.
The aperture size and the aperture area ratio of the sound-transmitting holes not only can influence the amplitude of the protective layer in the sound transmission process, but also can influence the sound-transmitting performance and the waterproof performance of the whole waterproof sound-transmitting membrane assembly, and can also influence the elastic modulus and the mechanical performance of the protective layer; the sound-transmitting hole of the protective layer can be prepared by laser drilling or other suitable drilling modes, the aperture size of the sound-transmitting hole is 0.1-0.5mm, and the protective layer also has a certain waterproof effect under the aperture; the area ratio of the sound-transmitting holes on the outer surface of the protective layer is 10-70%, and under the synergistic effect of the mutual matching of the pore size and the area ratio of the sound-transmitting film, the self amplitude of the protective layer is very small or even almost motionless in the sound transmission process is ensured, so that the waterproof sound-transmitting film and the protective layer can not be contacted with each other only by smaller control and adjustment ratio; the protective layer is ensured to have good elastic modulus and mechanical property; meanwhile, the whole waterproof sound-transmitting membrane component is guaranteed to have excellent waterproof sound-transmitting performance.
As a further improvement of the invention, the surface energy of the surface of the protective layer close to one side of the external environment is 12-45mN/m.
The protective layer is provided with the sound-transmitting holes with certain aperture size, so that the waterproof performance of the protective layer is reduced to a certain extent; the surface energy of the protective layer close to the surface of one side of the external environment is 12-45mN/m, namely the surface of the protective layer has good hydrophobicity, and the more hydrophobic the material is, the less water is easy to enter under the condition that the sound-transmitting holes have the same aperture, namely the protective layer also has good waterproof performance.
As a further improvement of the invention, the length of the waterproof sound-transmitting section D is 0.5-5mm; the vibration interval d between the waterproof sound-transmitting membrane and the protective layer is 20-80 mu m.
The waterproof sound-transmitting section is a region which mainly plays a role in waterproof sound-transmitting in the waterproof sound-transmitting membrane, and the waterproof sound-transmitting membrane component is generally attached in a groove of a MEMS or microphone and other parts, so that the length of the waterproof sound-transmitting section D is mainly related to the diameter of the groove, and the value of the length of the waterproof sound-transmitting section D is generally 0.5-5mm; when the inner diameter of the groove is determined, the length of the waterproof sound-transmitting section D is also basically determined, so that in the actual operation process, the control and adjustment ratio H can be changed by changing the vibration interval D, and the vibration interval D is 20-80 mu m; under the synergistic effect of the mutual cooperation of the waterproof sound-transmitting section D and the vibration interval D, the whole waterproof sound-transmitting membrane assembly is ensured to have proper control and adjustment ratio, the waterproof sound-transmitting membrane and the protective layer are not contacted with each other in the sound transmission process, the tone is not changed, noise is not generated, and the waterproof sound-transmitting membrane assembly is suitable for acoustic components of 3C electronic equipment such as mobile phone microphones, sound boxes and the like, and is particularly suitable for being applied to micro-electronic fields such as MEMS and the like.
As a further improvement of the invention, the sound-transmitting holes are uniformly distributed on the surface of the protective layer in a rectangular or annular distribution mode.
The sound-transmitting holes on the protective layer are mainly formed in a laser drilling mode, the raw materials are non-porous materials, and if the sound-transmitting holes are uniformly distributed (the sound-transmitting holes are regularly distributed) on the protective layer, the laser drilling is relatively easy, the operation is simple and convenient, and the required time is less; the uniform arrangement can be rectangular arrangement, annular arrangement or other modes of uniformly distributing sound transmission holes; when the sound-transmitting holes are uniformly distributed on the protective layer, if the distance between adjacent holes is too large, the number of the sound-transmitting holes is small, and the hole area of the protective layer is low, so that the integral sound-transmitting performance of the waterproof sound-transmitting film is affected; the spacing between adjacent holes is too small, and the solid part of the protective layer occupies smaller space, so that the elastic modulus and mechanical property of the protective layer are affected, the protective effect of the protective layer on the waterproof breathable film is affected, and the assembly and processing of the protective layer are affected; preferably, when the arrangement mode of the sound-transmitting holes on the protective layer is rectangular arrangement, the distance between the centers of two adjacent sound-transmitting holes is 0.2-0.9mm; or the arrangement mode of the sound-transmitting holes on the protective layer is annular arrangement, when the distance between the centers of two adjacent sound-transmitting holes on the same straight line is 0.2-0.9mm, the arrangement ensures that the sound-transmitting performance on the protective layer is basically the same everywhere on the one hand, and ensures that the sound loss of the whole waterproof sound-transmitting membrane assembly is lower and the sound-transmitting performance is good; on the other hand, the protective effect of the protective layer on the waterproof sound-transmitting membrane is basically the same everywhere, so that the waterproof sound-transmitting membrane is ensured to have longer service life, and the waterproof sound-transmitting effect can be always achieved for components such as MEMS (micro electro mechanical systems) and the like; in addition, the protective layer is guaranteed to have good elastic modulus and mechanical property, and the requirement of industrial production is met.
As a further improvement of the invention, the sound-transmitting holes are unevenly distributed on the surface of the protective layer in a mode of dense middle and sparse edges; alternatively, the middle is sparse and the edges are dense; alternatively, one side is dense and the other side is sparse.
In some special applications, it may be desirable to have some property of the protective layer locally relatively high, while not affecting the water repellency and acoustical transmission of the entire waterproof acoustical membrane assembly; so that the sound-transmitting holes are unevenly distributed on the protective layer at the moment; for example, when the distribution mode of the sound-transmitting holes on the surface of the protective layer is that the middle is dense and the edges are sparse, the ventilation quantity of the middle area of the protective layer is relatively high, and the sound-transmitting performance is relatively better; the support strength of the edge area of the protective layer is higher, the mechanical property is better, and the installation and the processing of the whole waterproof sound-transmitting membrane assembly are possibly facilitated; for example, when the distribution mode of the sound-transmitting holes on the surface of the protective layer is that the middle is sparse and the two sides are dense, the protective effect of the protective layer middle area on the waterproof sound-transmitting film is stronger, so that the service life of the waterproof sound-transmitting film can be prolonged; in addition, when the distribution mode of the sound-transmitting holes on the surface of the protective layer is that one side is dense and the other side is sparse, the side with the relatively dense sound-transmitting holes is more beneficial to sound transmission and less sound loss, and the side with the relatively sparse sound-transmitting holes is more beneficial to the protection of the waterproof sound-transmitting membrane, and is beneficial to the installation and processing of the whole waterproof sound-transmitting membrane assembly, and in addition, the waterproof performance of the local waterproof sound-transmitting membrane assembly can be possibly improved; the uneven distribution of the sound-transmitting holes on the protective layer is more beneficial to the improvement of the application range of the waterproof sound-transmitting membrane component.
As a further improvement of the invention, the sound-transmitting holes on the surface of the protective layer comprise sound-transmitting macropores and sound-transmitting pinholes, wherein the aperture of the sound-transmitting macropores is 0.3-0.5mm, and the aperture of the sound-transmitting pinholes is 0.1-0.3mm.
The sound-transmitting holes on the protective layer comprise sound-transmitting macropores and sound-transmitting pinholes, the pore sizes of the sound-transmitting macropores and the sound-transmitting pinholes are different, wherein the pore size of the sound-transmitting macropores is 0.3-0.5mm, and the pore size of the sound-transmitting pinholes is 0.1-0.3mm; the sound-transmitting macropores are formed to ensure sound-transmitting property, so that the whole waterproof sound-transmitting membrane assembly has lower sound loss; the existence of the sound-transmitting pore is in order to ensure that the local part of the protective layer has higher protection performance on the waterproof sound-transmitting membrane, the external object is less likely to damage the waterproof sound-transmitting membrane, in addition, the local part of the protective layer is ensured to have relatively higher elastic modulus, the protective layer is less likely to deform under the action of external force, the influence on the whole sound-transmitting performance of the waterproof sound-transmitting membrane component is less likely to be caused, and the whole waterproof sound-transmitting membrane component always has high sound-transmitting performance.
As a further improvement of the present invention, the aperture of the waterproof sound-transmitting membrane is 0.02 to 2 μm; the thickness is 2-20 mu m; the water pressure resistance is 20kPa to 600kPa; the sound blocking amount of the waterproof sound-transmitting membrane is not more than 1.3dB in the audio frequency range of 100-10000 Hz.
The waterproof sound-transmitting membrane is an ePTFE membrane, the aperture of the membrane is 0.02-2 mu m, the waterproof sound-transmitting membrane is guaranteed to have good waterproof performance, meanwhile, the membrane has high sound-transmitting performance, the sound loss is small, the sound blocking quantity of the waterproof sound-transmitting membrane in the sound frequency range of 100-10000Hz is found to be not more than 1.3dB through the test direction, the waterproof sound-transmitting membrane is further proved to have excellent sound-transmitting performance, and therefore the whole waterproof sound-transmitting membrane component is guaranteed to have excellent sound-transmitting performance, and the sound blocking quantity is small; if the thickness of the waterproof sound-transmitting membrane is too small, the mechanical property of the waterproof sound-transmitting membrane is poor, and if the thickness of the waterproof sound-transmitting membrane is too large, the thickness of the whole waterproof sound-transmitting membrane assembly is too large, so that the assembly and the processing are not facilitated; the thickness of the waterproof sound-transmitting membrane is 2-20 mu m, so that the waterproof sound-transmitting membrane is guaranteed to have good mechanical properties, the requirement of industrial production is met, and on the other hand, the whole waterproof sound-transmitting membrane component is guaranteed to have proper thickness, and subsequent assembly and processing are facilitated; in addition, the water pressure resistance of the waterproof sound-transmitting film is 20kPa to 600kPa, so that the waterproof sound-transmitting film can meet the water pressure resistance requirement of components such as MEMS and the like, can meet the water pressure resistance requirement of various electronic products for underwater work, has wide application range and has longer service life.
As a further improvement of the invention, the protective layer is a PI protective layer, the elastic modulus of the protective layer is 50-300MPa, and the elastic limit deformation amount of the protective layer is 5% -20%; the hardness of the protective layer is H-4H; the thickness of the protective layer is 0.02-0.08mm.
Polyimide, PI for short, has excellent high temperature resistance, can be used for a long time at a temperature lower than 280 ℃, can resist a high temperature of 400 ℃ in a short time, ensures that a protective layer is not influenced by the high temperature in the reflow soldering process, ensures successful completion of the reflow soldering process, and further ensures that the whole waterproof sound-transmitting membrane assembly can play a waterproof sound-transmitting role for components such as MEMS (micro electro mechanical systems); the PI film (PI protective layer) used in the invention is originally non-porous, and the sound-transmitting holes required by the invention are formed on the PI protective layer through laser drilling; if the thickness of the protective layer is too small, the mechanical property of the protective layer is poor, and if the thickness of the protective layer is too large, the thickness of the whole waterproof sound-transmitting membrane assembly is too large, so that the assembly processing is not facilitated; the thickness of the protective layer is 0.02-0.08mm, so that the protective layer has good mechanical properties, the requirement of industrial production is met, and on the other hand, the whole waterproof sound-transmitting membrane component has proper thickness, and subsequent assembly and processing are facilitated; through researches, although the steel mesh has good protection effect on the waterproof sound-transmitting membrane, the steel mesh is easy to deform, has poor elastic modulus and very low elastic limit deformation quantity, namely cannot recover to an initial state after being deformed, and thus, the overall sound-transmitting performance of the waterproof sound-transmitting membrane assembly is adversely affected; the elastic modulus of the protective layer is 50-300MPa, the elastic limit deformation amount is 5% -20%, and the protective layer has excellent elastic modulus and excellent elastic limit deformation amount, so that the protective layer is strong in deformation resistance, is not easy to deform under the action of external force, and is in elastic deformation even if certain deformation occurs, and can be restored to an initial state, so that the integral sound transmission performance of the waterproof sound transmission membrane assembly is not adversely affected; meanwhile, the hardness of the protective layer is H-4H, the protective layer is better in hardness, sharp objects such as chips are not easy to influence the protective layer (such as scratches and even punctures), then the protective layer cannot play a protective role on the waterproof sound-transmitting membrane, even the integral sound-transmitting performance of the waterproof sound-transmitting membrane assembly is influenced, the protective layer can play a protective role on the waterproof sound-transmitting membrane all the time, and the whole waterproof sound-transmitting membrane assembly has high waterproof and high sound-transmitting performances all the time.
The elastic limit means that when the external force is applied to a certain limit, the deformation (elongation) of the material is eliminated and the material is restored to the original state if the external force is removed; however, if the external force is continuously increased, the material is subjected to plastic deformation, namely irreversible deformation, and even if the external force is removed, the material cannot be restored to the original state; the deformation amount of the material which can be deformed and then restored to the initial state is called the elastic limit deformation amount of the material;
as a further improvement of the invention, the sound blocking amount of the waterproof sound-transmitting membrane component in the audio frequency range of 100-10000Hz is not more than 1.5dB, and the waterproof performance is IP66 or IP67 or IP68.
As a further improvement of the invention, the sound blocking amount of the waterproof sound-transmitting membrane component is less than 4dB in the audio frequency range of 100-10000Hz under the action of the pressure of 20-500KPa and the time of 30 min.
After the water pressure resistance test of 20-500kPa is carried out on the whole waterproof sound-transmitting membrane assembly, the sound blocking capacity of the whole waterproof sound-transmitting membrane assembly is still small, and the waterproof sound-transmitting membrane assembly still has high sound-transmitting performance, which indicates that the waterproof sound-transmitting membrane assembly has good water pressure resistance.
As a further improvement of the invention, the difference of sound blocking amount of the waterproof sound-transmitting membrane component in the audio frequency range of 100-10000Hz is less than 1.5dB before and after the waterproof membrane component passes through 5 times of circulating waterproof test with the pressure of 20-500KPa and the time of 2 hours.
After the whole waterproof sound-transmitting membrane assembly is subjected to a plurality of water pressure resistance cycle tests, the sound loss of the whole waterproof sound-transmitting membrane assembly is found to be almost unchanged, and the waterproof sound-transmitting membrane assembly still has high sound-transmitting performance, so that the waterproof sound-transmitting membrane assembly has good water pressure resistance, and even if the waterproof sound-transmitting membrane assembly suddenly encounters special conditions such as high-pressure water gun impact, the normal use of the waterproof sound-transmitting membrane assembly is not influenced, namely, the waterproof sound-transmitting membrane assembly can play a role in waterproof sound transmission for MEMS for a long time.
As a further improvement of the invention, a supporting layer is arranged on one side of the waterproof sound-transmitting membrane, which is away from the protective layer, and the elastic modulus of the supporting layer is 40-400MPa; the thickness of the supporting layer is 0.01-0.1mm.
Because the protective layer is provided with the plurality of sound-transmitting holes, liquid such as water possibly enters between the protective layer and the waterproof sound-transmitting film through the sound-transmitting holes, so that a larger external force effect is generated on the waterproof sound-transmitting film, even a larger pressure effect is generated on the waterproof sound-transmitting film in a short time under extreme conditions (such as sudden impact of a high-pressure water gun), the deformation of the waterproof sound-transmitting film is possibly overlarge, the original state cannot be recovered, and the waterproof sound-transmitting effect can not be continuously provided for the MEMS; the waterproof sound-transmitting film is provided with the supporting layer, the supporting layer is positioned on one side of the waterproof sound-transmitting film, which is away from the protective layer, and the supporting layer and the waterproof sound-transmitting film can be bonded through an adhesive (such as thermosensitive adhesive); the elastic modulus of the supporting layer is 40-400MPa, the elastic modulus of the supporting layer is excellent, and the thickness of the supporting layer is 0.01-0.1mm, so that the supporting effect on the waterproof sound-transmitting membrane is facilitated, the pressure resistance (such as water pressure resistance) of the whole waterproof sound-transmitting membrane assembly is improved, the waterproof sound-transmitting membrane is prevented from being influenced by overlarge deformation, the application range is further increased, the service life is further prolonged, and meanwhile, the waterproof sound-transmitting membrane assembly is not only suitable for being applied to MEMS, but also can be applied to other electronic equipment.
As a further improvement of the invention, the support layer is a PI support layer; the support layer is provided with a plurality of support holes, the aperture of the support holes is 0.1-0.7mm, and the area ratio of the support holes on the outer surface of the support layer is 5% -75%.
The supporting layer is a PI supporting layer, so that the supporting layer has excellent elastic modulus, and is convenient for supporting the waterproof sound-transmitting membrane, thereby improving the pressure resistance (such as water pressure resistance) of the whole waterproof sound-transmitting membrane assembly, further increasing the application range, and ensuring that the waterproof sound-transmitting membrane assembly is not only suitable for being applied to MEMS, but also suitable for being applied to other electronic equipment such as microphones, sound boxes and the like; on the other hand, the waterproof sound-transmitting membrane has good high temperature resistance, cannot be influenced by high temperature in the reflow soldering process, ensures successful completion of the reflow soldering process, and then ensures that the whole waterproof sound-transmitting membrane assembly can play a role in preventing water and transmitting sound for MEMS; in addition, in order to ensure that the whole waterproof sound-transmitting membrane assembly has good sound-transmitting performance, the sound blocking quantity is small, a plurality of supporting holes are also formed in the supporting layer, the aperture of each supporting hole is 0.1-0.7mm, the area ratio of each supporting hole in the outer surface of the supporting layer is 5% -75%, on one hand, the whole waterproof sound-transmitting membrane is ensured to have good sound-transmitting performance, on the other hand, the supporting layer is also ensured to still have good elastic modulus, the waterproof sound-transmitting membrane can still play a supporting role, the overall water pressure resistance of the waterproof sound-transmitting membrane assembly is improved, and the application range is further improved.
As a further improvement of the present invention, the peripheries of the waterproof sound-transmitting membrane and the protective layer are provided with spacers so as to maintain a vibration interval d between the waterproof sound-transmitting membrane and the protective layer; the spacer is a first adhesive piece, and the adhesive strength of the first adhesive piece is 5-50N/cm; the first adhesive piece comprises a glue layer and a substrate layer, wherein the glue layer is positioned on two sides of the substrate layer, the elastic modulus of the substrate layer is 50-300MPa, and the elastic limit deformation amount is 0.5% -5%.
The first adhesive piece is a double faced adhesive tape, which can be thermosensitive adhesive tape or other types of double faced adhesive tape, and the thickness of the first adhesive piece is the vibration interval d; if the bonding strength of the first bonding piece is not high enough, the waterproof sound-transmitting membrane and the protective layer are easy to separate, the protective layer cannot provide a protective effect for the waterproof sound-transmitting membrane, the service life of the waterproof sound-transmitting membrane is influenced, and the waterproof sound-transmitting effect cannot be normally provided for the MEMS;
the bonding strength of the first bonding piece is 5-50N/cm, the bonding strength is high, the bonding between the waterproof sound-transmitting film and the protective layer is very tight, and the waterproof sound-transmitting film and the protective layer are not easy to separate; the protective layer can provide protective effect for the waterproof sound-transmitting membrane for a long time, so that the waterproof sound-transmitting membrane is ensured to have longer service life, and waterproof sound-transmitting effect can be provided for the MEMS all the time.
Meanwhile, the first bonding piece comprises a substrate layer and two glue layers, wherein the glue layers are positioned on two sides of the substrate layer, and the thickness of the two glue layers is basically the same; wherein the elastic modulus of the substrate layer is 50-300MPa, and the relative deformation of the elastic limit is 0.5-5%, which indicates that the substrate layer has good elastic modulus and proper elastic limit deformation, and then the first adhesive piece is ensured to have good elastic modulus and good elastic limit deformation; when the protective layer is subjected to a large external force, the first adhesive piece can provide a supporting effect for the protective layer besides the mechanical property of the protective layer, so that the protective layer is not easy to deform; even take place the deformation, the deformation volume of inoxidizing coating also can be less relatively, belongs to elastic deformation, and first bonding spare can further help the inoxidizing coating to resume initial position simultaneously, has guaranteed on the one hand that the inoxidizing coating can play the guard action to waterproof sound-transmitting membrane for a long time like this, and on the other hand has guaranteed that the sound loss of whole waterproof sound-transmitting membrane subassembly is still less, and harmonic distortion increment is also less simultaneously, can not appear the noise, guarantees high quality transmission sound.
As a further improvement of the invention, the substrate layer is a PI or PET substrate, and the thickness of the substrate layer is 10-60 mu m.
The substrate layer of the first adhesive piece is PI substrate or PET, so that on one hand, the substrate layer is ensured to have excellent elastic modulus and good elastic limit deformation; on the other hand, the waterproof sound-transmitting membrane has good high temperature resistance, cannot be influenced by high temperature in the reflow soldering process, ensures successful completion of the reflow soldering process, and then ensures that the whole waterproof sound-transmitting membrane assembly can play a role in preventing water and transmitting sound for MEMS; the thickness of the base material layer can influence the overall mechanical property of the first adhesive piece, meanwhile, when the thickness of the first adhesive piece and the thickness of the base material layer are determined, the thickness of the glue layer is basically determined, the bonding strength of the first adhesive piece is weaker when the thickness of the glue layer is too small, the glue overflow phenomenon easily occurs when the thickness of the glue layer is too large, and the sound transmission performance of the waterproof sound transmission film is influenced; the thickness of the substrate layer is 10-60 mu m; on the one hand, the first adhesive piece is guaranteed to have good mechanical properties, the requirement of industrial production is met, meanwhile, the first adhesive piece is guaranteed to have good bonding strength, the waterproof sound-transmitting membrane and the protective layer cannot be separated easily, the phenomenon of glue overflow cannot occur, and the sound-transmitting performance of the waterproof sound-transmitting membrane cannot be influenced.
As a further improvement of the invention, a MEMS is provided with a waterproof sound-transmitting membrane assembly, which is provided with a groove, and the waterproof sound-transmitting membrane assembly is fixed on the inner wall of the groove.
The waterproof sound-transmitting membrane component is installed and fixed on the inner wall of the groove of the MEMS, the installation mode can be that the waterproof sound-transmitting membrane component is self-adhesive (if the waterproof sound-transmitting membrane component does not contain a supporting layer, one of the waterproof sound-transmitting membranes, which is far away from the protective layer, is provided with an adhesive, and if the waterproof sound-transmitting membrane component contains the supporting layer, one side of the supporting layer, which is far away from the protective layer, is provided with the adhesive), so that the waterproof sound-transmitting membrane component is adhered on the inner wall of the groove of the MEMS; the waterproof sound-transmitting membrane assembly can be placed at a proper position inside the groove, so that the waterproof sound-transmitting membrane assembly is fixed on the inner wall of the MEMS groove or in other proper installation and fixation modes through a dispensing process, the waterproof sound-transmitting membrane can provide waterproof effect for the MEMS for a long time, meanwhile, the blocking amount of sound is small, noise cannot occur, the transmission quality of the sound is effectively guaranteed, and the MEMS is guaranteed to have a longer service life.
The invention has the beneficial effects that: the waterproof sound-transmitting membrane component comprises a waterproof sound-transmitting membrane and a protective layer, wherein the protective layer is positioned on one side of the waterproof sound-transmitting membrane, which is close to the external environment, the sound blocking amount of the waterproof sound-transmitting membrane component in the audio frequency range of 100-10000Hz is less than 3dB, and the waterproof performance is IP64 or IP65 or IP66 or IP67 or IP68; the protective layer is a high-temperature-resistant high-molecular polymer layer, and can resist the high temperature of 250 ℃ for 3min at least; a plurality of sound transmission holes are formed in the protective layer; the protective layer is low in price, is convenient for the integral installation and processing of the waterproof sound-transmitting membrane assembly, and can play a good role in protecting the waterproof sound-transmitting membrane; the whole waterproof sound-transmitting membrane component has higher waterproof sound-transmitting performance, is suitable for not only 3C electronic products, but also electronic products working underwater, and is particularly suitable for being applied to micro-electromechanical systems such as MEMS and the like, thereby providing waterproof sound-transmitting effect for MEMS all the time and ensuring that the MEMS has longer service life.
Drawings
FIG. 1 is a schematic view of a waterproof acoustically transparent membrane assembly (without a support layer) of the present invention;
FIG. 2 is a schematic structural view of a waterproof acoustically transparent membrane module (comprising a support layer) of the present invention;
FIG. 3 is a schematic structural view of a protective layer when sound-transmitting holes are arranged in a rectangular shape on the protective layer;
FIG. 4 is a schematic structural view of a protective layer when sound-transmitting holes are annularly arranged on the protective layer;
FIG. 5 is a schematic diagram of the structure of the protective layer with sound-transmitting holes unevenly distributed on the protective layer and with dense middle and sparse edges;
FIG. 6 is a schematic diagram of the structure of the protective layer with sound-transmitting holes unevenly distributed on the protective layer and dense edges;
FIG. 7 is a schematic diagram of the structure of the protective layer with sound-transmitting holes unevenly distributed on the protective layer and with dense sides and sparse sides;
FIG. 8 is a schematic view of the structure of the protective layer when the sound-transmitting macropores and the sound-transmitting micropores are distributed on the protective layer;
FIG. 9 is a schematic view of a first adhesive member according to the present invention;
FIG. 10 is a schematic view of the structure of the waterproof sound-transparent membrane and the protective layer in contact during sound transmission;
reference numerals: 1. a waterproof sound-transmitting membrane; 11. a waterproof sound-transmitting section; 2. a protective layer; 21. a sound-transmitting hole; 211. a sound-permeable large hole; 212. a sound-transmitting aperture; 3. a support layer; 4. a first adhesive member; 41. a glue layer; 42. a substrate layer;
Detailed Description
The invention will now be described in further detail with reference to the drawings and examples.
Example 1
The waterproof sound-transmitting membrane assembly comprises a waterproof sound-transmitting membrane 1 and a protective layer 2, wherein the protective layer 2 is positioned on one side of the waterproof sound-transmitting membrane 1, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane 1 and the protective layer 2; the protective layer 2 is a PI protective layer 2, the elastic modulus of the protective layer 2 is 220MPa, and the elastic limit deformation amount of the protective layer 2 is 10%; the hardness of the protective layer 2 is 3H; the thickness of the protective layer 2 is 0.05mm; the protective layer 2 is provided with a plurality of sound-transmitting holes 21, the aperture of the sound-transmitting holes 21 on the protective layer 2 is 0.25mm, and the protective layer2 the area ratio of the sound-transmitting holes 21 on the outer surface is 23%; the arrangement mode of the sound-transmitting holes 21 on the protective layer 2 is rectangular arrangement, and the ventilation rate of the protective layer 2 is 6.7L/(min cm) 2 ) The method comprises the steps of carrying out a first treatment on the surface of the The surface energy of the surface of the protective layer 2, which is close to one side of the external environment, is 20mN/m; the waterproof sound-transmitting membrane 1 comprises a waterproof sound-transmitting section D11; a control and regulation ratio H is arranged between the waterproof sound-transmitting membrane 1 and the protective layer 2, and the control and regulation ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D11; the vibration interval D is 50 mu m, and the length of the waterproof sound-transmitting section D11 is 2.5mm; the control and regulation ratio H is 0.02; the aperture of the waterproof sound-transmitting membrane 1 is 1.0 mu m; the thickness is 12 mu m; the water pressure resistance is 60kPa; the sound blocking amount of the waterproof sound-transmitting membrane 1 in the audio frequency range of 100-10000Hz is 0.6-0.9dB; the bonding strength of the first adhesive member 4 is 25N/cm; the first adhesive member 4 comprises a glue layer 41 and a substrate layer 42, wherein the glue layer 41 is positioned on two sides of the substrate layer 42, the elastic modulus of the substrate layer 42 is 170MPa, and the elastic limit deformation amount is 2.5%; the substrate layer 42 is a PI substrate, and the thickness of the substrate layer 42 is 30 μm.
Example 2
The waterproof sound-transmitting membrane assembly comprises a waterproof sound-transmitting membrane 1 and a protective layer 2, wherein the protective layer 2 is positioned on one side of the waterproof sound-transmitting membrane 1, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane 1 and the protective layer 2; the protective layer 2 is a PI protective layer 2, the elastic modulus of the protective layer 2 is 140MPa, and the elastic limit deformation amount of the protective layer 2 is 18%; the hardness of the protective layer 2 is 2H; the thickness of the protective layer 2 is 0.06mm; the protective layer 2 is provided with a plurality of sound-transmitting holes 21, the aperture of the sound-transmitting holes 21 on the protective layer 2 is 0.30mm, and the area ratio of the sound-transmitting holes 21 on the outer surface of the protective layer 2 is 40%; the arrangement mode of the sound-transmitting holes 21 on the protective layer 2 is annular arrangement, and the ventilation rate of the protective layer 2 is 12.5L/(min cm) 2 ) The method comprises the steps of carrying out a first treatment on the surface of the The surface energy of the surface of the protective layer 2, which is close to one side of the external environment, is 25mN/m; the waterproof sound-transmitting membrane 1 comprises a waterproof sound-transmitting section D11; a control and regulation ratio H is arranged between the waterproof sound-transmitting membrane 1 and the protective layer 2, and the control and regulation ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D11; the vibration interval D is 55 mu m, and the length of the waterproof sound-transmitting section D11The degree is 2.0mm; the control and regulation ratio H is 0.0275; the aperture of the waterproof sound-transmitting membrane 1 is 0.6 mu m; the thickness is 8 mu m; the water pressure resistance is 40kPa; the sound blocking amount of the waterproof sound-transmitting membrane 1 in the audio frequency range of 100-10000Hz is 0.8-1.1dB; the bonding strength of the first adhesive member 4 is 30N/cm; the first adhesive member 4 comprises a glue layer 41 and a substrate layer 42, wherein the glue layer 41 is positioned on two sides of the substrate layer 42, the elastic modulus of the substrate layer 42 is 240MPa, and the elastic limit deformation amount is 1.5%; the substrate layer 42 is a PI substrate, and the thickness of the substrate layer 42 is 30 μm.
Example 3
The waterproof sound-transmitting membrane assembly comprises a waterproof sound-transmitting membrane 1 and a protective layer 2, wherein the protective layer 2 is positioned on one side of the waterproof sound-transmitting membrane 1, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane 1 and the protective layer 2; the protective layer 2 is a PI protective layer 2, the elastic modulus of the protective layer 2 is 260MPa, and the elastic limit deformation amount of the protective layer 2 is 8%; the hardness of the protective layer 2 is 3H; the thickness of the protective layer 2 is 0.04mm; the protective layer 2 is provided with a plurality of sound-transmitting holes 21, the aperture of the sound-transmitting holes 21 on the protective layer 2 is 0.20mm, and the area ratio of the sound-transmitting holes 21 on the outer surface of the protective layer 2 is 18%; the arrangement mode of the sound-transmitting holes 21 on the protective layer 2 is that the middle is sparse and the edges are dense, and the ventilation rate of the protective layer 2 is 5.1L/(min cm) 2 ) The method comprises the steps of carrying out a first treatment on the surface of the The surface energy of the surface of the protective layer 2, which is close to one side of the external environment, is 25mN/m; the waterproof sound-transmitting membrane 1 comprises a waterproof sound-transmitting section D11; a control and regulation ratio H is arranged between the waterproof sound-transmitting membrane 1 and the protective layer 2, and the control and regulation ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D11; the vibration interval D is 40 mu m, and the length of the waterproof sound-transmitting section D11 is 1.5mm; the control and regulation ratio H is 0.0267; the aperture of the waterproof sound-transmitting membrane 1 is 0.8 mu m; the thickness is 10 mu m; the water pressure resistance is 50kPa; the sound blocking amount of the waterproof sound-transmitting membrane 1 in the audio frequency range of 100-10000Hz is 0.7-1.0dB; the bonding strength of the first adhesive member 4 is 20N/cm; the first adhesive member 4 comprises a glue layer 41 and a substrate layer 42, wherein the glue layer 41 is positioned on two sides of the substrate layer 42, the elastic modulus of the substrate layer 42 is 120MPa, and the elastic limit deformation amount is 4%; the substrate layer 42 is a PET substrate, and the thickness of the substrate layer 42 is The degree was 20. Mu.m.
Example 4
The waterproof sound-transmitting membrane assembly comprises a waterproof sound-transmitting membrane 1 and a protective layer 2, wherein the protective layer 2 is positioned on one side of the waterproof sound-transmitting membrane 1, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane 1 and the protective layer 2; the protective layer 2 is a PI protective layer 2, the elastic modulus of the protective layer 2 is 180MPa, and the elastic limit deformation amount of the protective layer 2 is 15%; the hardness of the protective layer 2 is 2H; the thickness of the protective layer 2 is 0.055mm; the protective layer 2 is provided with a plurality of sound-transmitting holes 21, the aperture of the sound-transmitting holes 21 on the protective layer 2 is 0.4mm, and the area ratio of the sound-transmitting holes 21 on the outer surface of the protective layer 2 is 28%; the arrangement mode of the sound-transmitting holes 21 on the protective layer 2 is that one side is dense and the other side is sparse, and the ventilation rate of the protective layer 2 is 8.9L/(min cm) 2 ) The method comprises the steps of carrying out a first treatment on the surface of the The surface energy of the surface of the protective layer 2, which is close to one side of the external environment, is 15mN/m; the waterproof sound-transmitting membrane 1 comprises a waterproof sound-transmitting section D11; a control and regulation ratio H is arranged between the waterproof sound-transmitting membrane 1 and the protective layer 2, and the control and regulation ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D11; the vibration interval D is 60 mu m, and the length of the waterproof sound-transmitting section D11 is 3.5mm; the control and regulation ratio H is 0.0171;
The aperture of the waterproof sound-transmitting membrane 1 is 1.4 mu m; thickness is 17 μm; the water pressure resistance is 55kPa; the sound blocking amount of the waterproof sound-transmitting membrane 1 in the audio frequency range of 100-10000Hz is 0.4-0.7dB;
the bonding strength of the first adhesive member 4 is 35N/cm; the first adhesive member 4 comprises a glue layer 41 and a substrate layer 42, wherein the glue layer 41 is positioned on two sides of the substrate layer 42, the elastic modulus of the substrate layer 42 is 200MPa, and the elastic limit deformation amount is 2%; the substrate layer 42 is a PI substrate, and the thickness of the substrate layer 42 is 35 μm.
Example 5
The waterproof sound-transmitting membrane assembly comprises a waterproof sound-transmitting membrane 1 and a protective layer 2, wherein the protective layer 2 is positioned on one side of the waterproof sound-transmitting membrane 1, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane 1 and the protective layer 2; the protective layer 2 is a PI protective layer 2, the elastic modulus of the protective layer 2 is 200MPa, and the protective layer 2The elastic limit deformation amount is 13%; the hardness of the protective layer 2 is 3H; the thickness of the protective layer 2 is 0.045mm; the protective layer 2 is provided with a plurality of sound-transmitting holes 21, the sound-transmitting holes 21 comprise sound-transmitting macropores 211 and sound-transmitting pinholes 212, the aperture of the sound-transmitting macropores 211 is 0.35 mu m, the aperture of the sound-transmitting pinholes 212 is 0.25 mu m, and the area ratio of the sound-transmitting holes 21 on the outer surface of the protective layer 2 is 30%; the ventilation rate of the protective layer 2 was 10.2L/(min cm) 2 ) The method comprises the steps of carrying out a first treatment on the surface of the The surface energy of the surface of the protective layer 2, which is close to one side of the external environment, is 15mN/m; the waterproof sound-transmitting membrane 1 comprises a waterproof sound-transmitting section D11; a control and regulation ratio H is arranged between the waterproof sound-transmitting membrane 1 and the protective layer 2, and the control and regulation ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D11; the vibration interval D is 45 mu m, and the length of the waterproof sound-transmitting section D11 is 3.0mm; the control and regulation ratio H is 0.015; the aperture of the waterproof sound-transmitting membrane 1 is 1.2 mu m; the thickness is 14 mu m; the water pressure resistance is 70kPa; the sound blocking amount of the waterproof sound-transmitting membrane 1 in the audio frequency range of 100-10000Hz is 0.5-0.8dB; the bonding strength of the first adhesive member 4 is 40N/cm; the first adhesive member 4 comprises a glue layer 41 and a substrate layer 42, wherein the glue layer 41 is positioned on two sides of the substrate layer 42, the elastic modulus of the substrate layer 42 is 150MPa, and the elastic limit deformation amount is 3%; the substrate layer 42 is a PET substrate, and the thickness of the substrate layer 42 is 25 μm.
Example 6
The waterproof sound-transmitting membrane assembly comprises a waterproof sound-transmitting membrane 1 and a protective layer 2, wherein the protective layer 2 is positioned on one side of the waterproof sound-transmitting membrane 1, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane 1 and the protective layer 2; the protective layer 2 is a PI protective layer 2, the elastic modulus of the protective layer 2 is 210MPa, and the elastic limit deformation amount of the protective layer 2 is 12%; the hardness of the protective layer 2 is 3H; the thickness of the protective layer 2 is 0.045mm; the protective layer 2 is provided with a plurality of sound-transmitting holes 21, the aperture of the sound-transmitting holes 21 on the protective layer 2 is 0.30mm, and the area ratio of the sound-transmitting holes 21 on the outer surface of the protective layer 2 is 26%; the arrangement mode of the sound-transmitting holes 21 on the protective layer 2 is rectangular arrangement, and the ventilation rate of the protective layer 2 is 8.3L/(min cm) 2 ) The method comprises the steps of carrying out a first treatment on the surface of the The surface energy of the surface of the protective layer 2, which is close to one side of the external environment, is 40mN/m;
the waterproof sound-transmitting membrane 1 comprises a waterproof sound-transmitting section D11; a control and regulation ratio H is arranged between the waterproof sound-transmitting membrane 1 and the protective layer 2, and the control and regulation ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D11; the vibration interval D is 48 mu m, and the length of the waterproof sound-transmitting section D11 is 2.7mm; the control and regulation ratio H is 0.0178; the aperture of the waterproof sound-transmitting membrane 1 is 1.6 mu m; the thickness is 18 mu m; the water pressure resistance is 100kPa; the sound blocking amount of the waterproof sound-transmitting membrane 1 in the audio frequency range of 100-10000Hz is 0.5-1.0dB;
a supporting layer 3 is further arranged on one side, away from the protective layer 2, of the waterproof sound-transmitting membrane 1, and the elastic modulus of the supporting layer 3 is 200MPa; the thickness of the supporting layer 3 is 0.05mm; the supporting layer 3 is a PI supporting layer 3; a plurality of supporting holes are formed in the supporting layer 3, the aperture of each supporting hole is 0.4mm, and the area ratio of each supporting hole on the outer surface of the supporting layer 3 is 30%;
the bonding strength of the first adhesive member 4 is 28N/cm; the first adhesive member 4 comprises a glue layer 41 and a substrate layer 42, wherein the glue layer 41 is positioned on two sides of the substrate layer 42, the elastic modulus of the substrate layer 42 is 160MPa, and the elastic limit deformation amount is 2.7%; the substrate layer 42 is a PET substrate, and the thickness of the substrate layer 42 is 25 μm.
Example 7
The waterproof sound-transmitting membrane assembly comprises a waterproof sound-transmitting membrane 1 and a protective layer 2, wherein the protective layer 2 is positioned on one side of the waterproof sound-transmitting membrane 1, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane 1 and the protective layer 2;
the protective layer 2 is a PI protective layer 2, the elastic modulus of the protective layer 2 is 250MPa, and the elastic limit deformation amount of the protective layer 2 is 9%; the hardness of the protective layer 2 is 4H; the thickness of the protective layer 2 is 0.035mm; the protective layer 2 is provided with a plurality of sound-transmitting holes 21, the aperture of the sound-transmitting holes 21 on the protective layer 2 is 0.35mm, and the area ratio of the sound-transmitting holes 21 on the outer surface of the protective layer 2 is 20%; the arrangement mode of the sound-transmitting holes 21 on the protective layer 2 is that the middle is dense, the edges are sparse, and the ventilation rate of the protective layer 2 is 5.9L/(min cm) 2 ) The method comprises the steps of carrying out a first treatment on the surface of the The surface energy of the surface of the protective layer 2, which is close to one side of the external environment, is 15mN/m;
the waterproof sound-transmitting membrane 1 comprises a waterproof sound-transmitting section D11; a control and regulation ratio H is arranged between the waterproof sound-transmitting membrane 1 and the protective layer 2, and the control and regulation ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D11; the vibration interval D is 64 mu m, and the length of the waterproof sound-transmitting section D11 is 4.0mm; the control and regulation ratio H is 0.016; the aperture of the waterproof sound-transmitting membrane 1 is 1.1 mu m; the thickness is 13 μm; the water pressure resistance is 200kPa; the sound blocking amount of the waterproof sound-transmitting membrane 1 in the audio frequency range of 100-10000Hz is 0.6-1.2dB;
A supporting layer 3 is further arranged on one side, away from the protective layer 2, of the waterproof sound-transmitting membrane 1, and the elastic modulus of the supporting layer 3 is 100MPa; the thickness of the supporting layer 3 is 0.07mm; the supporting layer 3 is a PI supporting layer 3; a plurality of supporting holes are formed in the supporting layer 3, the aperture of each supporting hole is 0.55mm, and the area ratio of each supporting hole on the outer surface of the supporting layer 3 is 35%;
the bonding strength of the first adhesive member 4 is 32N/cm; the first adhesive member 4 comprises a glue layer 41 and a substrate layer 42, the glue layer 41 is positioned on two sides of the substrate layer 42, the elastic modulus of the substrate layer 42 is 140MPa, and the elastic limit deformation amount is 3.5%; the substrate layer 42 is a PI substrate, and the thickness of the substrate layer 42 is 32 μm.
Example 8
The waterproof sound-transmitting membrane assembly comprises a waterproof sound-transmitting membrane 1 and a protective layer 2, wherein the protective layer 2 is positioned on one side of the waterproof sound-transmitting membrane 1, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane 1 and the protective layer 2;
the protective layer 2 is a PI protective layer 2, the elastic modulus of the protective layer 2 is 150MPa, and the elastic limit deformation amount of the protective layer 2 is 17%; the hardness of the protective layer 2 is 2H; the thickness of the protective layer 2 is 0.065mm;
The protective layer 2 is provided with a plurality of sound-transmitting holes 21, the sound-transmitting holes 21 comprise sound-transmitting macropores 211 and sound-transmitting pinholes 212, the aperture of the sound-transmitting macropores 211 is 0.4 mu m, the aperture of the sound-transmitting pinholes 212 is 0.2 mu m, and the area ratio of the sound-transmitting holes 21 on the outer surface of the protective layer 2 is 47%; the air permeability of the protective layer 2 was 16.4L/(min cm) 2 ) The method comprises the steps of carrying out a first treatment on the surface of the The protective layer 2 is close to the outsideThe surface energy of the surface on one side of the environment is 20mN/m;
the waterproof sound-transmitting membrane 1 comprises a waterproof sound-transmitting section D11; a control and regulation ratio H is arranged between the waterproof sound-transmitting membrane 1 and the protective layer 2, and the control and regulation ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D11; the vibration interval D is 36 mu m, and the length of the waterproof sound-transmitting section D11 is 1.3mm; the control and regulation ratio H is 0.0277;
the aperture of the waterproof sound-transmitting membrane 1 is 0.9 mu m; thickness is 11 μm; the water pressure resistance is 80kPa; the sound blocking amount of the waterproof sound-transmitting membrane 1 in the audio frequency range of 100-10000Hz is 0.7-1.1dB;
a supporting layer 3 is further arranged on one side, away from the protective layer 2, of the waterproof sound-transmitting membrane 1, and the elastic modulus of the supporting layer 3 is 300MPa; the thickness of the supporting layer 3 is 0.03mm; the supporting layer 3 is a PI supporting layer 3; a plurality of supporting holes are formed in the supporting layer 3, the aperture of each supporting hole is 0.3mm, and the area ratio of each supporting hole on the outer surface of the supporting layer 3 is 25%;
The bonding strength of the first adhesive member 4 is 26N/cm; the first adhesive member 4 comprises a glue layer 41 and a substrate layer 42, wherein the glue layer 41 is positioned on two sides of the substrate layer 42, the elastic modulus of the substrate layer 42 is 210MPa, and the elastic limit deformation amount is 1.9%; the substrate layer 42 is a PI substrate, and the thickness of the substrate layer 42 is 16 μm.
Performance test:
the method for testing the sound blocking amount comprises the following steps: the object to be tested (the waterproof sound-transmitting membrane assembly prepared in examples 1-8) is punched into a circular sheet with the diameter of 5.0mm, the punched material to be tested and an annular double faced adhesive tape with the outer diameter of 5.0mm and the inner diameter of 1.7mm are concentrically stacked, the thickness of the double faced adhesive tape is 0.15mm, and finally the double faced adhesive tape is stuck on a microphone test board with an acoustic outlet with the diameter of 1mm and the depth of 0.8mm, so that the building SPA1687LR5H for microphone winnowing is simulated. And a manual mouth is arranged at a position 2cm away from the microphone tool. The analog microphone and the manual mouth are connected with an audio analyzer of model Audio Precision x and 525. The Audio test software of the Audio presentation is utilized to make the artificial mouth emit sound with the sound pressure level of 94dBSPL at the frequency of 100Hz-10000 Hz. And collecting response signals of the microphone end under the conditions that the test assembly is attached to the surface of the microphone tool and the test assembly is not attached to the surface of the microphone tool, and making difference to finally obtain the sound blocking quantity of the corresponding object.
Performing an IP-grade waterproof test on the waterproof sound-transmitting membrane assemblies prepared in examples 1 to 8;
harmonic distortion increment test; (harmonic distortion delta is the difference between the degree of harmonic distortion after use of the diaphragm assembly and the degree of harmonic distortion without use of the diaphragm assembly)
The object to be tested (the waterproof sound-transmitting membrane assembly prepared in examples 1-8) is punched into a circular sheet with the diameter of 5.0mm, the punched material to be tested and an annular double faced adhesive tape with the outer diameter of 5.0mm and the inner diameter of 1.7mm are concentrically stacked, the thickness of the double faced adhesive tape is 0.15mm, and finally the double faced adhesive tape is stuck on a microphone test board with an acoustic outlet with the diameter of 1mm and the depth of 0.8mm, so that the building SPA1687LR5H for microphone winnowing is simulated. And a manual mouth is arranged at a position 2cm away from the microphone tool. The analog microphone and the manual mouth are connected with an audio analyzer of model Audio Precision x and 525. The Audio test software of the Audio presentation is utilized to make the artificial mouth emit sound with the sound pressure level of 94dBSPL at the frequency of 100Hz-10000 Hz. Therefore, under the conditions that the temperature is-40 ℃ to 80 ℃, the relative humidity of air is 20% -80%, the audio frequency is 100Hz-10000Hz, harmonic distortion signals of a microphone end are collected and differenced under the conditions that a test component is attached to the surface of the microphone tool and the test component is not attached, and finally the harmonic distortion increment of a corresponding sample is obtained.
| Sample preparation | Sound blocking amount/dB | IP waterproof grade | Harmonic distortion delta |
| Example 1 | 0.9-1.2 | IP66 | At most 5% |
| Example 2 | 1.1-1.4 | IP68 | At most 5% |
| Example 3 | 1.0-1.3 | IP67 | At most 4% |
| Example 4 | 0.7-1.1 | IP65 | At most 7% |
| Example 5 | 0.8-1.2 | IP66 | At most 8% |
| Example 6 | 0.8-1.2 | IP64 | At most 7% |
| Example 7 | 0.9-1.5 | IP66 | At most 9% |
| Example 8 | 0.9-1.4 | IP67 | At most 6% |
As can be seen from the above table, the waterproof sound-transmitting membrane component prepared by the invention has higher waterproof property, lower acoustic resistance and good sound-transmitting performance; meanwhile, in the sound transmission process, the influence is small, the phenomena of noise and the like can not occur, the sound quality is guaranteed, and the method is suitable for acoustic components generated by 3C electrons, and particularly suitable for MEMS microelectronic components.
The waterproof sound-transmitting membrane assemblies prepared in examples 1 to 8 were subjected to sound blocking test under the corresponding pressure and the sound frequency range of 100 to 10000Hz for 30 min; (example 1 at 60kPa, example 2 at 40kPa, example 3 at 50kPa, example 4 at 55kPa, example 5 at 70kPa, example 6 at 200kPa, example 7 at 300kPa, example 8 at 100 kPa)
After relevant water pressure resistance tests are carried out on the whole waterproof sound-transmitting membrane assembly, the sound blocking quantity of the whole waterproof sound-transmitting membrane assembly is still small, and the waterproof sound-transmitting membrane assembly still has high sound-transmitting performance, so that the waterproof sound-transmitting membrane assembly has good water pressure resistance; meanwhile, the waterproof sound-transmitting membrane assembly in the embodiments 5-8 comprises the supporting layer, and the supporting layer can play a supporting role on the waterproof sound-transmitting membrane, so that the overall waterproof pressure resistance of the waterproof sound-transmitting membrane assembly is improved.
The waterproof sound-transmitting membrane assemblies prepared in examples 1 to 8 were tested at the corresponding pressures (example 1 at 60kPa, example 2 at 40kPa, example 3 at 50kPa, example 4 at 55kPa, example 5 at 70kPa, example 6 at 200kPa, example 7 at 300kPa, example 8 at 100 kPa), and the difference in sound blocking amounts in the audio frequency range of 100 to 10000Hz was smaller than 1.5dB both before and after the 5-cycle waterproof test for 2 hours.
After the whole waterproof sound-transmitting membrane assembly is subjected to a plurality of water pressure resistance cycle tests, the sound loss of the whole waterproof sound-transmitting membrane assembly is almost unchanged and the waterproof sound-transmitting membrane assembly still has high sound-transmitting performance, so that the waterproof sound-transmitting membrane assembly has good water pressure resistance, and even if the waterproof sound-transmitting membrane assembly suddenly encounters special conditions such as high-pressure water gun impact, the normal use of the waterproof sound-transmitting membrane assembly is not influenced, namely the waterproof sound-transmitting membrane assembly can play a role in waterproof sound transmission for MEMS for a long time; in addition, the waterproof sound-transmitting membrane assembly can be used in electronic equipment working under water, and has a very wide application range.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (18)
1. A waterproof sound-transmitting membrane assembly, characterized in that: the waterproof sound-transmitting membrane is positioned at one side of the waterproof sound-transmitting membrane, which is close to the external environment; a vibration interval d exists between the waterproof sound-transmitting membrane and the protective layer, the sound blocking amount of the waterproof sound-transmitting membrane component in the audio frequency range of 100-10000Hz is less than 3dB, and the waterproof performance is IP64 or IP65 or IP66 or IP67 or IP68; the protective layer is a high-temperature-resistant high-molecular polymer layer, and can resist the high temperature of 250 ℃ for 3min at least; a plurality of sound transmission holes are formed in the protective layer;
the waterproof sound-transmitting membrane comprises a waterproof sound-transmitting section D; the waterproof sound-transmitting membrane component is provided with a control-tone ratio H for ensuring that the sound tone is not changed, and the control-tone ratio H is the ratio of the length between the vibration interval D and the waterproof sound-transmitting section D;
the control and regulation ratio H is used for keeping the harmonic distortion increment of the waterproof sound-transmitting membrane component at most 10% under the conditions that the temperature is-40-80 ℃, the relative humidity of air is 20-80% and the sound frequency is 100-10000 Hz.
2. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: the air permeability of the protective layer is 0.1-30L/(min cm) 2 ) 7kPa; the control and regulation ratio H is 0.005-0.05.
3. A waterproof sound-transmitting membrane assembly according to claim 2, characterized in that: the aperture of the sound-transmitting hole on the protective layer is 0.1-0.5mm, and the area ratio of the sound-transmitting hole on the outer surface of the protective layer is 10-70%.
4. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: the surface energy of the surface of the protective layer, which is close to one side of the external environment, is 12-45mN/m.
5. A waterproof sound-transmitting membrane assembly according to claim 2, characterized in that: the length of the waterproof sound-transmitting section D is 0.5-5mm; the vibration interval d between the waterproof sound-transmitting membrane and the protective layer is 20-80 mu m.
6. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: the sound transmission holes are uniformly distributed on the surface of the protective layer, and the distribution mode is rectangular distribution or annular distribution.
7. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: the sound-transmitting holes are unevenly distributed on the surface of the protective layer in a mode of dense middle and sparse edges; alternatively, the middle is sparse and the edges are dense; alternatively, one side is dense and the other side is sparse.
8. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: the sound-transmitting holes comprise sound-transmitting macropores and sound-transmitting pinholes, the aperture of the sound-transmitting macropores is 0.3-0.5mm, and the aperture of the sound-transmitting pinholes is 0.1-0.3mm.
9. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: the aperture of the waterproof sound-transmitting membrane is 0.02-2 mu m; the thickness is 2-20 mu m; the water pressure resistance is 20kPa to 600kPa; the sound blocking amount of the waterproof sound-transmitting membrane is not more than 1.3dB in the audio frequency range of 100-10000 Hz.
10. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: the protective layer is a PI protective layer, the elastic modulus of the protective layer is 50-300MPa, and the elastic limit deformation amount of the protective layer is 5% -20%; the hardness of the protective layer is H-4H; the thickness of the protective layer is 0.02-0.08mm.
11. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: preferably, the sound blocking amount of the waterproof sound-transmitting membrane component in the audio frequency range of 100-10000Hz is not more than 1.5dB, and the waterproof performance is IP66 or IP67 or IP68.
12. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: the waterproof sound-transmitting membrane component has the sound blocking quantity smaller than 4dB in the audio frequency range of 100-10000Hz under the action of the pressure of 20-500KPa and the time of 30 min.
13. A water resistant acoustically transparent membrane assembly as claimed in claim 12, wherein: the difference of sound blocking quantity of the waterproof sound-transmitting membrane component under the audio frequency range of 100-10000Hz is less than 1.5dB after the waterproof sound-transmitting membrane component passes 5 times of circulating waterproof tests with the pressure of 20-500KPa and the time of 2 hours.
14. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: a supporting layer is further arranged on one side, away from the protective layer, of the waterproof sound-transmitting membrane, and the elastic modulus of the supporting layer is 40-400MPa; the thickness of the supporting layer is 0.01-0.1mm.
15. A water resistant acoustically transparent membrane assembly as claimed in claim 14, wherein: the supporting layer is a PI supporting layer; the support layer is provided with a plurality of support holes, the aperture of the support holes is 0.1-0.7mm, and the area ratio of the support holes on the outer surface of the support layer is 5% -75%.
16. A waterproof sound-transmitting membrane assembly according to claim 1, wherein: providing spacers at the peripheries of the waterproof sound-transmitting membrane and the protective layer so as to maintain a vibration interval d between the waterproof sound-transmitting membrane and the protective layer; the spacer is a first adhesive piece, and the adhesive strength of the first adhesive piece is 5-50N/cm; the first adhesive piece comprises a glue layer and a substrate layer, wherein the glue layer is positioned on two sides of the substrate layer, the elastic modulus of the substrate layer is 50-300MPa, and the elastic limit deformation amount is 0.5% -5%.
17. A water resistant acoustically transparent membrane assembly as claimed in claim 16, wherein: the substrate layer is a PI or PET substrate, and the thickness of the substrate layer is 10-60 mu m.
18. A MEMS element incorporating a waterproof acoustically transparent membrane assembly as claimed in any one of claims 1 to 3 and 5 to 17, wherein: the MEMS is provided with a groove, and the waterproof sound-transmitting membrane component is fixed on the inner wall of the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN101816187A (en) * | 2007-10-09 | 2010-08-25 | 日东电工株式会社 | Sound passing member utilizing waterproof sound passing membrane and process for manufacturing the same |
| CN207283789U (en) * | 2017-08-19 | 2018-04-27 | 施柏德（厦门）科技有限公司 | A kind of small-bore waterproof and breathable entrant sound element for portable electric subclass product |
| CN212231677U (en) * | 2020-05-22 | 2020-12-25 | 杭州安普鲁薄膜科技有限公司 | Electronic component with waterproof sound-transmitting membrane assembly |
| CN214070143U (en) * | 2021-01-29 | 2021-08-27 | 杭州安普鲁薄膜科技有限公司 | MEMS equipped with waterproof sound-transmitting membrane component |
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| KR101896366B1 (en) * | 2016-07-08 | 2018-09-10 | 주식회사 아모그린텍 | Waterproof sound-transmitting sheet |
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| CN101816187A (en) * | 2007-10-09 | 2010-08-25 | 日东电工株式会社 | Sound passing member utilizing waterproof sound passing membrane and process for manufacturing the same |
| CN207283789U (en) * | 2017-08-19 | 2018-04-27 | 施柏德（厦门）科技有限公司 | A kind of small-bore waterproof and breathable entrant sound element for portable electric subclass product |
| CN212231677U (en) * | 2020-05-22 | 2020-12-25 | 杭州安普鲁薄膜科技有限公司 | Electronic component with waterproof sound-transmitting membrane assembly |
| CN214070143U (en) * | 2021-01-29 | 2021-08-27 | 杭州安普鲁薄膜科技有限公司 | MEMS equipped with waterproof sound-transmitting membrane component |
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