CN112917643B - Production method of large-size ITO plane target biscuit without intermediate defects - Google Patents

Production method of large-size ITO plane target biscuit without intermediate defects Download PDF

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Publication number
CN112917643B
CN112917643B CN202110345069.8A CN202110345069A CN112917643B CN 112917643 B CN112917643 B CN 112917643B CN 202110345069 A CN202110345069 A CN 202110345069A CN 112917643 B CN112917643 B CN 112917643B
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ito
air inlet
resin
plane target
pipe
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CN112917643A (en
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王玉军
杨建新
刘洪福
刘志猛
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Hebei Weixin Science And Technology Co ltd
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Hebei Weixin Science And Technology Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
    • B28B1/261—Moulds therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
    • B28B1/261—Moulds therefor
    • B28B1/262—Mould materials; Manufacture of moulds or parts thereof
    • B28B1/263—Plastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
    • B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
    • B28B11/243—Setting, e.g. drying, dehydrating or firing ceramic articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/0002—Auxiliary parts or elements of the mould
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/348—Moulds, cores, or mandrels of special material, e.g. destructible materials of plastic material or rubber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/40—Moulds; Cores; Mandrels characterised by means for modifying the properties of the moulding material
    • B28B7/42—Moulds; Cores; Mandrels characterised by means for modifying the properties of the moulding material for heating or cooling, e.g. steam jackets, by means of treating agents acting directly on the moulding material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/40—Moulds; Cores; Mandrels characterised by means for modifying the properties of the moulding material
    • B28B7/46—Moulds; Cores; Mandrels characterised by means for modifying the properties of the moulding material for humidifying or dehumidifying

Abstract

The invention discloses a method for producing a large-size ITO (indium tin oxide) plane target biscuit without intermediate defects, which specifically comprises the following steps: preparing ITO slurry; adding the prepared slurry into a porous resin mold to prepare an ITO plane target blank; and in a pure oxygen atmosphere, putting the ITO plane target blank into a sintering furnace for sintering to obtain the ITO plane target blank. According to the invention, by adopting the porous resin mould in the blank preparation stage and adopting a multilayer sintering air inlet method in the sintering process, the high-quality ITO plane target with high density and high qualified rate can be produced, the energy consumption is greatly reduced, the production cost is saved, the production efficiency is improved, and a feasible scheme is provided for the localization of the low-cost ITO plane target.

Description

Production method of large-size ITO plane target biscuit without intermediate defects
Technical Field
The invention relates to the technical field of ITO target production, in particular to a method for slip casting of an ITO plane target biscuit.
Background
With the rapid development of technology, the electronic industry has a large share in the market, and many electronic products in the market of the electronic industry use flat panel displays, such as flat panel displays, liquid crystal computers, liquid crystal televisions, etc., which cannot be separated from the oxide conductive film in the manufacturing process. Among many oxide conductive films, an ITO (indium tin oxide) semiconductor thin film has excellent electrical and optical properties, a resistivity of 10-4 Ω · cm, a visible light transmittance of 85-90% or more, an ultraviolet light absorption rate of 85% or more, an infrared light reflectance of 80% or more, a film strength of high, and a processability, and is widely applied to products such as a Liquid Crystal Display (LCD), a Touch Panel (Touch Panel), a Plasma Display (PDP), and the like, so that the demand of the electronic industry for ITO targets is increasing day by day.
However, because of the limitations of the biscuit forming technology and the sintering equipment, the density of the ITO plane target product is low, and the surface has intermediate defects and other problems, so that the current domestic ITO plane target still mainly depends on import, and the cost is high. The concrete embodiment is as follows: for example, in the process of slip casting of a planar target, due to volume shrinkage after supplementary dehydration and solidification, a relatively long slurry flow channel always needs to be present inside a biscuit, but due to the fact that the channel is too long, slurry cannot be supplemented smoothly in time, so that relatively large and many hole defects are left, subsequent sintering densification is affected, particularly for biscuit forming with a length of 1500 × 300mm or more, the slurry flow channel usually reaches 2 meters or more, and a large number of defects cannot be avoided.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a method for producing an ITO plane target biscuit with large size and no intermediate defect, so as to reduce the production cost and improve the production efficiency and the qualification rate of the target.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows.
The production method of the large-size ITO plane target biscuit without the intermediate defects specifically comprises the following steps:
A. preparing ITO slurry;
B. adding the slurry prepared in the step A into a porous resin mold, and preparing an ITO plane target blank in a zone-controllable and distance-to-distance curing molding mode;
C. and in a pure oxygen atmosphere, putting the ITO plane target blank into a sintering furnace for sintering to obtain the ITO plane target blank.
According to the production method of the large-size ITO plane target biscuit without the intermediate defect, the porous resin mold in the step B is of a partitioned controllable drainage structure and comprises a resin male mold and a resin female mold which are vertically and mutually assembled, a cavity for preparing the ITO plane target biscuit is formed between the resin male mold and the resin female mold, and a slurry inlet pipe communicated with the cavity is arranged on one side of the resin female mold; the lower part of the inner cavity of the resin male die and the upper part of the inner cavity of the resin female die are respectively provided with a plurality of pieces of porous resin, the porous resin in the inner cavity of the resin male die and the porous resin in the inner cavity of the resin female die are vertically corresponding one by one, adjacent porous resins are separated by a waterproof plastic partition plate, and each piece of porous resin is respectively provided with a drainage pipe vertical to the porous resin; and the slurry inlet pipe and the water discharge pipe are both provided with switch valves.
The production method of the large-size ITO plane target biscuit without the intermediate defects comprises the following specific steps of:
B1. opening the switch valves on the slurry inlet pipe, closing the switch valves on all the drain pipes, and introducing the prepared ITO slurry into a cavity between the resin male die and the resin female die;
b2, when the ITO plane target blank is formed, firstly opening a drain valve which is farthest away from the position of a slurry inlet, so that the position of the far end is solidified and formed, then sequentially opening the drain valves which are closer to the slurry inlet, wherein the time interval for opening the drain valves each time is 10 to 15min; so that the subareas are fully solidified and formed from far to near.
According to the production method of the ITO plane target biscuit with the large size and no intermediate defects, the sintering furnace in the step C adopts a plurality of layers of air inlet pipelines for sintering, each air inlet pipeline comprises a horizontally arranged air inlet main pipe and an air inlet branch pipe which is vertically arranged and communicated with the air inlet main pipe, the top ends of the air inlet branch pipes are arranged in a closed mode, and a plurality of air inlet hole groups facing to a green body to be sintered on the burning table are arranged on the air inlet pipes from top to bottom.
According to the production method of the large-size ITO plane target biscuit without the intermediate defect, the air inlet main pipes are provided with two opposite groups, each group of air inlet main pipes comprise the horizontal square-shaped pipes and the straight line pipes which are communicated, the horizontal square-shaped pipes are located between the two straight line pipes, and the upper end faces of the straight line pipes are provided with the openings communicated with the air inlet branch pipes.
According to the production method of the large-size ITO planar target biscuit without the intermediate defect, the bottom end of the air inlet branch pipe is hermetically connected with the opening on the linear pipe through the high-temperature connector.
In the method for producing the large-size ITO plane target biscuit without the intermediate defect, the air inlet hole group on the air inlet branch pipe comprises three air inlets which are horizontally arranged and have the same diameter, wherein the outlet direction of the intermediate hole is vertical to the side edge of the burning platform, and the included angle between the two side holes and the intermediate hole is 60 degrees.
Due to the adoption of the technical scheme, the technical progress of the invention is as follows.
According to the invention, the porous resin mold is adopted in the blank preparation stage, and the blank is gradually formed in a subarea manner, so that the large-size ITO planar target blank with no intermediate defect and the density of the biscuit is improved by 3% -5%, and the production requirements of large-size and high-quality planar targets of high-generation lines are met.
In addition, the multilayer sintering air inlet method in the sintering furnace can provide uniform oxygen atmosphere for target sintering to ensure the sintering quality, and the strengthened gas convection enables the heat of the heating rod to be quickly and uniformly transferred to the central position of the target, thereby shortening the sintering process time and reducing the energy consumption; and then, by setting reasonable size and position adjustment of air holes, the spacing between normal burning platform layers can be reduced to about 5cm from 8 to 10cm while a temperature field and an atmosphere field are fully ensured, the charging amount of 1 to 2 layers is increased, and the sintering cost is further reduced by about 20%.
Through the improvement of the two means, the invention not only can produce the high-quality ITO plane target with high density and high qualification rate, but also greatly reduces the energy consumption, saves the production cost, improves the production efficiency and provides a feasible scheme for the localization of the low-cost ITO plane target.
Drawings
FIG. 1 is a process flow diagram of the present invention;
FIG. 2 is a schematic view showing the structure of a porous resin mold according to the present invention;
FIG. 3 is a side view of the arrangement of the gas inlet pipes in the sintering furnace according to the present invention;
FIG. 4 is a top view of the arrangement of the air inlet pipes in the sintering furnace according to the present invention.
Wherein: 1. the device comprises a resin male die, a resin female die, a water discharge pipe, a slurry inlet pipe, a porous resin, a plastic partition plate, a furnace bottom heat insulation layer, an air inlet main pipe, an air inlet branch pipe and an air inlet hole, wherein the resin male die is 2, the resin female die is 3, the water discharge pipe is 4, the slurry inlet pipe is 5, the porous resin is 6, the plastic partition plate is 7, the air inlet branch pipe is 9, and the air inlet hole is 10.
Detailed Description
The invention will be described in further detail with reference to the drawings and the detailed description.
A production method of a large-size ITO plane target biscuit without intermediate defects comprises the following steps, wherein the process flow of the production method is shown in figure 1.
A. And preparing ITO slurry.
According to the ITO slurry prepared by a chemical coprecipitation method, deionized water, 1-2% by mass of dispersing agent PVP and 1-2% by mass of binder PVA are respectively added into ITO powder, and the mixture is uniformly stirred; then adding ammonia water to adjust ph to about 9; and finally, performing ball milling and sanding until the particle size is 0.2 to 0.3 micrometer. The prepared ITO slurry has a solid content (mass fraction) of 83-85% and a viscosity as low as 100-150mpa.s.
B. And B, adding the slurry prepared in the step A into a porous resin mold, and preparing the ITO plane target blank in a zone-controllable and distance-to-distance curing and forming mode.
The porous resin mold in the step is of a partitioned controllable drainage structure and comprises a resin male mold 1 and a resin female mold 2 which are vertically assembled with each other, a cavity for preparing an ITO plane target blank is formed between the resin male mold 1 and the resin female mold 2, and a slurry inlet pipe 4 communicated with the cavity is arranged on one side of the resin female mold 2; the lower part of the inner cavity of the resin male die 1 and the upper part of the inner cavity of the resin female die 2 are respectively provided with a plurality of pieces of porous resin 5, the porous resin in the inner cavity of the resin male die 1 and the porous resin in the inner cavity of the resin female die 2 are vertically corresponding one by one, adjacent porous resins are separated by an impermeable plastic partition plate 6, and each piece of porous resin is respectively provided with a drain pipe 3 vertical to the porous resin; and the slurry inlet pipe 4 and the water discharge pipe 3 are both provided with switch valves. In the embodiment, the width of each porous resin is 200 to 300mm, six porous resins which correspond to each other up and down are respectively arranged on the resin male die 1 and the resin female die 2, the drain pipe 3 is arranged on the outer end face of each porous resin and communicated with the inner cavity of the porous resin, and the porous resin is communicated with the cavity.
When the ITO plane target blank is prepared, the forming process adopts a mode of gradually carrying out partition from the far end of the slurry inlet to the near end, and the specific method is as follows.
B1. Opening the switch valves on the slurry inlet pipe, closing the switch valves on all the drain pipes, introducing the prepared ITO slurry into a cavity between the resin male die 1 and the resin female die 2, and controlling the pressure to be 1-1.5 mpa in the grouting process.
B2, when the ITO plane target blank is molded, firstly opening a drain valve which is farthest away from the position of a slurry inlet to enable the position of the far end to be cured and molded, then sequentially opening drain valves which are closer to the slurry inlet, wherein the time interval for opening the drain valves each time is 10-15min, so that the partition is fully cured and molded; finally, the purpose of curing and molding the subareas from far to near is achieved.
In the process, the length of the slurry flow channel is determined only by the length of each subarea, and the slurry is supplemented timely and smoothly, so that the defect of holes in the blank is effectively avoided, and the density of the blank can be improved by 3-5%, thereby providing a foundation for sintering the target with high density, uniform tissue and large size.
C. And in a pure oxygen atmosphere, putting the ITO plane target blank into a sintering furnace for sintering to obtain the ITO plane target blank.
The sintering furnace in the step adopts a plurality of layers of air inlet pipelines for sintering, so that the air inlet pipelines are improved. The structure of the air inlet pipeline is shown in fig. 3 and 4, and comprises a horizontally arranged air inlet main pipe 8 and an air inlet branch pipe 9 which is vertically arranged and communicated with the air inlet main pipe, wherein the top end of the air inlet branch pipe is closed, and a plurality of air inlet hole groups facing the green body to be sintered on the burning platform are arranged on the air inlet pipe from top to bottom.
The air inlet main pipe is fixedly arranged above the furnace bottom heat insulation layer, and the heat dissipated by the heat insulation material is utilized to preheat the oxygen to 400-600 ℃. In the invention, the air inlet main pipes comprise two groups which are oppositely arranged, each group of air inlet main pipes comprise a horizontal square pipe and a straight pipe which are communicated, the horizontal square pipe is positioned between the two straight pipes, and the upper end surfaces of the straight pipes are provided with openings communicated with the air inlet branch pipes; the bottom end of the air inlet branch pipe 9 is connected with the opening on the straight line pipe in a sealing way through a high-temperature connector. In the embodiment, the hole distance of the holes on the air inlet branch pipe is preferably 30cm, and the high-temperature connector is embedded in the holes.
The height of the air inlet branch pipe is consistent with the total height of the charging furnace, the high-purity corundum pipe is adopted to lead the oxygen pipeline to the hearth, and the corundum pipe and the high-temperature connector are assembled in a detachable mode, so that the air inlet position can be flexibly adjusted according to the charging condition.
The air inlet hole group on the air inlet branch pipe 9 comprises three air inlet holes 10 which are horizontally arranged and have the same diameter, and the aperture of each air inlet hole is preferably phi 4mm; wherein the outlet direction of the middle hole is vertical to the side edge of the burning platform, and the included angle between the two side holes and the middle hole is 60 degrees, so that oxygen can be quickly, uniformly and fully diffused to each position of the target material.
According to the invention, by adopting the arrangement mode of the multilayer air inlet pipeline, the small air inlet enables oxygen to have larger flow velocity, the air inlet direction is dispersed at 120 degrees, the oxygen is rapidly and uniformly diffused to each position of the target, the heat of the heating rods at the periphery is brought into the middle target area by forced gas convection, and the uniformity of a temperature field and an atmosphere field can be fully ensured, so that the normal interlayer spacing can be reduced to about 5cm from 8-10cm during charging, the charging amount of 1-2 layers is increased, the heating rate can be increased by 30-50% under the original process parameters during sintering, the heat preservation time is shortened by 15-20%, the electric energy consumption can be saved by about 10%, and the purpose of reducing the electric energy consumption is achieved.
When sintering is carried out, firstly, the number of layers of the burning platform is set according to the size requirement of the ITO plane target blank, then, a proper air inlet branch pipe is selected according to the height of the burning platform, and the air inlet hole group on the air inlet branch pipe and the ITO plane target blank to be sintered on the burning platform are correspondingly arranged in the horizontal plane; after the assembly is finished, the ITO plane target blank to be sintered is placed on a burning bearing platform, and a sintering furnace is opened to carry out the sintering process.
And opening the furnace after sintering, taking out the ITO plane target, and mechanically processing to obtain an ITO plane target biscuit.

Claims (5)

1. The production method of the large-size ITO plane target biscuit without the intermediate defects is characterized by comprising the following steps:
A. preparing ITO slurry;
B. adding the slurry prepared in the step A into a porous resin mold, and preparing an ITO plane target blank in a zone-controllable and distance-to-distance curing molding mode;
C. in pure oxygen atmosphere, putting the ITO plane target blank into a sintering furnace for sintering to obtain an ITO plane target biscuit; the sintering furnace adopts a multilayer air inlet pipeline for sintering;
the porous resin mold in the step B is of a partitioned controllable drainage structure and comprises a resin male mold (1) and a resin female mold (2) which are assembled with each other from top to bottom, a cavity for preparing an ITO plane target blank is formed between the resin male mold (1) and the resin female mold (2), and a slurry inlet pipe (4) communicated with the cavity is arranged on one side of the resin female mold (2); the lower part of the inner cavity of the resin male die (1) and the upper part of the inner cavity of the resin female die (2) are respectively provided with a plurality of pieces of porous resin, the porous resin in the inner cavity of the resin male die (1) is vertically corresponding to the porous resin in the inner cavity of the resin female die (2) one by one, adjacent porous resins are separated by a waterproof plastic partition plate (6), and each piece of porous resin is respectively provided with a drain pipe (3) vertical to the porous resin; switch valves are arranged on the pulp inlet pipe (4) and the water outlet pipe (3);
the specific method for preparing the ITO plane target blank in the step B comprises the following steps:
B1. opening the switch valves on the slurry inlet pipe, closing the switch valves on all the water discharge pipes, and introducing the prepared ITO slurry into a cavity between the resin male die (1) and the resin female die (2);
and B2, when the ITO planar target blank is molded, firstly opening a drain valve which is farthest away from the slurry inlet to enable the far end position to be cured and molded, then sequentially opening drain valves which are nearer to the slurry inlet, wherein the time interval for opening the drain valves each time is 10-15min, and enabling the subareas to be fully cured and molded from far to near.
2. The method for producing large-size ITO planar target biscuit according to claim 1, wherein the air inlet pipeline in step C comprises a horizontally arranged main air inlet pipe (8) and a vertically arranged branch air inlet pipe (9) communicated with the main air inlet pipe, the top end of the branch air inlet pipe is closed, and a plurality of groups of air inlet holes facing the biscuit to be sintered on the sintering table are arranged on the branch air inlet pipe from top to bottom.
3. A large-size ITO plane target biscuit production method without intermediate defects according to claim 2, wherein the main gas inlet pipes are arranged in two opposite groups, each group of main gas inlet pipes comprises a horizontal square-shaped pipe and a straight pipe which are communicated, the horizontal square-shaped pipe is positioned between the two straight pipes, and the upper end faces of the straight pipes are provided with openings communicated with the gas inlet branch pipes.
4. The method for producing large-size ITO planar target blanks without intermediate defects according to claim 3, wherein the bottom end of the air inlet branch pipe (9) is hermetically connected with the opening on the straight pipe through a high-temperature connector.
5. A method for producing a large-size ITO planar target biscuit without intermediate defects according to claim 2, wherein the air inlet hole group on the air inlet branch pipe (9) comprises three air inlet holes (10) with the same diameter which are horizontally arranged, wherein the outlet direction of the intermediate hole is vertical to the side edge of the burning platform, and the included angle between the two side holes and the intermediate hole is 60 degrees.
CN202110345069.8A 2021-03-31 2021-03-31 Production method of large-size ITO plane target biscuit without intermediate defects Active CN112917643B (en)

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CN116462499A (en) * 2023-04-27 2023-07-21 芜湖映日科技股份有限公司 Method for stacking and burning planar ITO target

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FR2465584A1 (en) * 1979-09-21 1981-03-27 Incoe Corp Simultaneously injection moulding different size cavities - where cavity runners have valves closed in succession as cavities are filled (PT 16.4.80)
ITRE20010022A1 (en) * 2001-03-09 2002-09-09 Sacmi MOLD ELEMENT FOR THE FORMING OF OBJECTS BY MELTING WITH A CLAY HUMID DOUGH AND SIMILAR AND METHOD FOR ITS MANUFACTURE
WO2004113254A1 (en) * 2003-06-17 2004-12-29 Nikko Materials Co., Ltd. Method for sintering sputtering target
CN104355610B (en) * 2014-09-28 2017-02-15 中国船舶重工集团公司第七二五研究所 Method for preparing large-scale ITO (Indium Tin Oxide) target material by using automatic slip casting technology
CN104802284B (en) * 2015-03-31 2017-08-15 中国船舶重工集团公司第七二五研究所 A kind of method for preparing big specification ITO base substrates
CN104760118A (en) * 2015-04-20 2015-07-08 中国船舶重工集团公司第七二五研究所 Method for eliminating ITO blank interlayer during pressure slip casting
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CN107813418A (en) * 2017-10-31 2018-03-20 天津银龙预应力材料股份有限公司 A kind of steam-cured room of the uniform track plates of temperature
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CN109079963B (en) * 2018-07-11 2020-08-28 中国船舶重工集团公司第七二五研究所 Single-side pressure grouting forming mold and manufacturing method of ITO (indium tin oxide) plane target

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