CN112904464B

CN112904464B - Dual-liquid zoom lens based on electrostatic force driving and manufacturing method thereof

Info

Publication number: CN112904464B
Application number: CN202110050027.1A
Authority: CN
Inventors: 张红霞; 宋晓敏; 张紫菱; 贾大功; 刘铁根
Original assignee: Tianjin University
Current assignee: Tianjin University
Priority date: 2021-01-14
Filing date: 2021-01-14
Publication date: 2022-05-03
Anticipated expiration: 2041-01-14
Also published as: CN112904464A

Abstract

The invention discloses a double-liquid zoom lens based on electrostatic force driving and a manufacturing method thereof, wherein the zoom lens structure consists of a gel chamber (1), deionized water (2), white oil (3), an indium tin oxide electrode (5), a glass substrate (6) and a metal cylinder (7); wherein: the white oil (3) fills the deionized water (2) in the gel chamber (1); an indium tin oxide electrode (5) is plated on the glass substrate (6); a deionized water/white oil interface (4) is formed between the deionized water (2) and the white oil (3); an external voltage is applied to the indium tin oxide electrode (5), so that the curvature radius of the deionized water/white oil interface (4) changes from negative to positive. Compared with the prior art, the invention (1) is suitable for the condition of a large liquid volume system, and the threshold driving voltage is still lower; (2) the preparation method is simple and convenient.

Description

Dual-liquid zoom lens based on electrostatic force driving and manufacturing method thereof

Technical Field

The invention belongs to the field of optical devices, and particularly relates to a double-liquid zoom lens and a manufacturing method thereof.

Background

The development of life science presents a challenge to the optical fluorescence microscopic imaging technology, the analysis of biological phenomena needs to obtain the three-dimensional information of biological samples, and particularly for dynamic biological tissues, the three-dimensional imaging needs to be carried out in order to avoid damaging the samples. In order to realize the three-dimensional imaging of the biological sample, the biological sample or the imaging microscope objective is moved, and the sample is damaged by light in the moving process of the sample; the moving imaging microscope objective reduces the body imaging speed of the system due to the coupling problem of the object plane and the light sheet position of the imaging system. Therefore, the liquid zoom lens is introduced into the optical sheet fluorescence microscopic imaging system, and the position of the object main plane of the imaging system is changed by changing the focal length of the liquid zoom lens, so as to realize the axial scanning of the biological sample. The tuning range of the liquid zoom lens determines the axial scanning range, and the imaging depth of each layer is the thickness of the optical sheet, so that the liquid zoom lens is required to have a large focal length tuning range and high zooming precision in order to realize imaging of thick biological samples.

The utility model patent CN205049771U discloses a device of a diaphragm-adjustable aspheric double-liquid zoom lens, which can realize the tuning of focal length under the effect of electrowetting effect. The lens uses transparent conductive liquid and lens insulating liquid with different densities and refractive indexes, and the surface type is known to be an aspheric surface, so that the aberration of the lens is reduced, and the lens has a larger field of view. The invention patent CN 111123416A discloses a single-drive liquid zoom lens, a manufacturing method thereof and a zoom imaging method, wherein the single-drive liquid zoom lens adopts a dielectric elastomer material to manufacture a circular truncated cone-shaped dielectric elastomer film, voltage is applied to two ends of an outer flexible electrode to drive the film to deform, and thus the curvature radius of liquid changes. The invention patent CN108680971A discloses a method for realizing an aspheric lens, which changes the interface surface shape between the conductive liquid and the insulating liquid by changing the applied voltage, so as to form a three-layer liquid lens system, wherein the selected conductive liquid and the selected insulating liquid have density difference, so that the interface surface shape is aspheric. The invention provides a double-liquid zoom lens based on electrostatic force driving, which consists of gel, optical liquid, an Indium Tin Oxide (ITO) electrode and a glass substrate; the optical liquid is deionized water and white oil. Under the action of surface tension, the gel forms an ellipsoidal chamber in which the optical liquid is placed. Under the action of electrostatic force, a large amount of anions are gathered on a gel interface, so that the wetting performance of liquid is changed, the curvature of the interface between deionized water and white oil paper is changed, and the focal length of the lens is further changed.

Disclosure of Invention

The invention aims to provide a double-liquid zoom lens based on electrostatic force driving and a manufacturing method thereof.

The invention relates to a double-liquid zoom lens based on electrostatic force driving, which is structurally composed of a gel chamber 1, deionized water 2, white oil 3, an indium tin oxide electrode 5, a glass substrate 6 and a metal cylinder 7; wherein:

the white oil 3 fills the deionized water 2 into the gel chamber 1, and the gel chamber 1 is positioned on the glass substrate 6; the metal cylinder 7 is arranged at the periphery of the gel chamber 1; an indium tin oxide electrode 5 is plated on the glass substrate 6; a deionized water/white oil interface 4 is formed between the deionized water 2 and the white oil 3; an applied voltage is applied to the indium tin oxide electrode 5, so that the radius of curvature of the deionized water/white oil interface 4 changes from negative to positive.

The invention discloses a method for manufacturing a double-liquid zoom lens based on electrostatic force driving, which comprises the following steps of:

an indium tin oxide electrode is plated on the glass substrate; placing a metal cylinder on a glass substrate, and dropwise adding deionized water on the glass substrate; slowly dripping the gel in the liquid along the metal cylinder wall, and constructing a gel cavity by utilizing the surface tension difference of the gel and the deionized water, wherein the gel cavity is not completely immersed in the deionized water; deionized water was bound in the gel chamber and filled with white oil; the lens is encapsulated with a glass substrate.

Compared with the prior art, the invention has the following advantages:

(1) the threshold driving voltage is still lower under the condition of being suitable for a large liquid volume system; (2) the preparation method is simple and convenient.

Drawings

FIG. 1 is a schematic diagram of a dual liquid zoom lens based on electrostatic force actuation according to the present invention;

FIG. 2 is a schematic diagram of an Indium Tin Oxide (ITO) electrode structure used;

FIG. 3 is a schematic diagram of output optical paths of the dual liquid zoom lens of the present invention under different applied voltages V; (a) when V is 0V, the two-liquid zoom lens in the present invention is a concave lens; (b) when V is 65V, the two-liquid zoom lens of the present invention corresponds to a parallel flat plate; (c) when V is 280V, the dual-liquid zoom lens in the present invention is a convex lens;

reference numerals:

1. ellipsoidal gel chamber, 2, deionized water, 3, white oil, 4, deionized water/white oil interface, 5, indium tin oxide electrode, 6, glass substrate, 7, metal cylinder, 8, 9 positive and negative electrodes of indium tin oxide electrode, 10, optical path of double liquid zoom lens: when the lens shows the concave lens property, the parallel light diverges after passing through the lens; when the lens shows the property of a parallel flat plate, the parallel light still becomes parallel light after passing through the lens; when the lens exhibits a convex lens property, the parallel light is focused after passing through the lens.

Detailed Description

The technical solution of the present invention will be described in detail below with reference to the accompanying drawings and examples.

Fig. 1 is a schematic diagram of a dual-liquid zoom lens based on electrostatic force actuation according to the present invention. The zoom lens consists of a gel chamber 1, deionized water 2, white oil 3, Indium Tin Oxide (ITO) electrodes 5, a glass substrate 6, and a metal cylinder 7. Wherein a non-spherical gel chamber 1, which is constructed due to a difference in surface tension of gel and deionized water 2, is placed on a glass substrate 6, and an Indium Tin Oxide (ITO) electrode 5 is plated on the glass substrate 6, the deionized water 2 is bound in the gel chamber 1, filled with white oil 3, and encapsulated with the glass substrate 6. The gel chamber 1 is ellipsoidal in shape. The periphery of the gel chamber 1 is provided with a metal cylinder 7.

The lens aperture was about 1cm and the volume of deionized water was 80. mu.l. The threshold value of the driving voltage applied to the Indium Tin Oxide (ITO) electrode 5 is about 10V.

The deionized water and the white oil form a deionized water/white oil interface 4, and the radius of curvature can be from negative to positive.

Fig. 2 is a schematic diagram of a structure of an Indium Tin Oxide (ITO) electrode used.

As shown in fig. 3, when an external voltage is applied to an Indium Tin Oxide (ITO) electrode 5, an interface formed by deionized water 2 and white oil 3 deforms, and when the external voltage V is 0V, the deionized water/white oil interface 4 is a convex surface, and since the refractive index of deionized water is smaller than that of white oil, the lens exhibits the property of a concave lens; when the applied voltage is 65V, the interface of the deionized water 2 and the white oil 3 is a plane, and the lens shows the property of a parallel flat plate; when the applied voltage V is 280V, the interface of the deionized water 2 and the white oil 3 is a concave surface, the lens shows the property of a convex lens,

to verify the driving manner of the lens, firstly, the gel was spin-coated on the glass substrate by using a spin coater, and the change of the wetting property of the deionized water on the gel film was observed, and it was found that:

i. with the continuous increase of the electrostatic force, the contact angle of the deionized water drop is continuously increased, which shows that the anion focused on the gel surface causes the change of the wetting property of the liquid;

the gel chamber is imaged as an ellipsoid due to the difference in surface tension of the deionized water and the gel. Because the densities of the deionized water and the white oil are different, the meniscus interface of the lens is spherical, and the aberration of the lens is effectively reduced. The magnitude of the electrostatic force of the gel is characterized by the value of the applied voltage: when the applied voltage is 0V, the curvature radius of the meniscus is positive, and when the density of water is less than that of white oil, the lens system takes on the properties of a concave lens; the curvature radius of the lens is gradually increased along with the gradual increase of the voltage; when the applied voltage is increased to 65V, the curvature of the meniscus is infinity, and the lens shows the property of a parallel plate; continuing to increase the voltage, the radius of curvature of the meniscus becomes negative, at which time the lens behaves as a convex lens;

ii. Under the drive of an external voltage, the curvature radius of the interface of the deionized water and the white oil is continuously changed due to the electrostatic force of the interface of the gel and the deionized water;

and iii, the gel interface and the deionized water interface simultaneously move slightly, so that the tuning range of the lens is effectively expanded.

Claims

1. A manufacturing method of a double-liquid zoom lens based on electrostatic force driving comprises the following steps that the structure of the zoom lens consists of a gel chamber (1), deionized water (2), white oil (3), an indium tin oxide electrode (5), a glass substrate (6) and a metal cylinder (7); wherein: the deionized water (2) is filled in the gel chamber (1), and the gel chamber (1) is positioned on the glass substrate (6); the metal cylinder (7) is at the periphery of the gel chamber (1); an indium tin oxide electrode (5) is plated on the glass substrate (6); the white oil (3) is used for filling other areas of the lens, and a deionized water/white oil interface (4) is formed between the deionized water (2) and the white oil (3); an external voltage is applied to the indium tin oxide electrode (5), and the radius of curvature of the deionized water/white oil interface (4) is changed from positive to negative by electrostatic force generated on the surface of the gel; the method is characterized by comprising the following steps: