CN112895718B - 流体喷射装置 - Google Patents
流体喷射装置 Download PDFInfo
- Publication number
- CN112895718B CN112895718B CN202110060536.2A CN202110060536A CN112895718B CN 112895718 B CN112895718 B CN 112895718B CN 202110060536 A CN202110060536 A CN 202110060536A CN 112895718 B CN112895718 B CN 112895718B
- Authority
- CN
- China
- Prior art keywords
- membrane
- fluid
- nozzle
- layer
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 256
- 239000012528 membrane Substances 0.000 claims abstract description 190
- 238000005086 pumping Methods 0.000 claims abstract description 52
- 239000000758 substrate Substances 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 45
- 238000004519 manufacturing process Methods 0.000 claims description 25
- 230000010355 oscillation Effects 0.000 claims description 8
- 229920000642 polymer Polymers 0.000 claims description 8
- 230000001419 dependent effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 336
- 235000012431 wafers Nutrition 0.000 description 122
- 239000010408 film Substances 0.000 description 38
- 238000005530 etching Methods 0.000 description 35
- 239000000463 material Substances 0.000 description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 20
- 239000010703 silicon Substances 0.000 description 20
- 238000001020 plasma etching Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 14
- 150000004767 nitrides Chemical class 0.000 description 13
- 238000000206 photolithography Methods 0.000 description 10
- 239000011148 porous material Substances 0.000 description 9
- 238000001039 wet etching Methods 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 6
- 238000000227 grinding Methods 0.000 description 6
- 238000005498 polishing Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000000678 plasma activation Methods 0.000 description 3
- -1 poly(methyl methacrylate) Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14459—Matrix arrangement of the pressure chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
- Nozzles (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562273891P | 2015-12-31 | 2015-12-31 | |
| US62/273,891 | 2015-12-31 | ||
| CN201680082235.7A CN108698405B (zh) | 2015-12-31 | 2016-12-30 | 流体喷射装置 |
| PCT/US2016/069462 WO2017117518A1 (en) | 2015-12-31 | 2016-12-30 | Fluid ejection devices |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680082235.7A Division CN108698405B (zh) | 2015-12-31 | 2016-12-30 | 流体喷射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112895718A CN112895718A (zh) | 2021-06-04 |
| CN112895718B true CN112895718B (zh) | 2022-09-13 |
Family
ID=59225466
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680082235.7A Active CN108698405B (zh) | 2015-12-31 | 2016-12-30 | 流体喷射装置 |
| CN202110060536.2A Active CN112895718B (zh) | 2015-12-31 | 2016-12-30 | 流体喷射装置 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680082235.7A Active CN108698405B (zh) | 2015-12-31 | 2016-12-30 | 流体喷射装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (4) | US10315421B2 (enExample) |
| EP (1) | EP3397493B1 (enExample) |
| JP (3) | JP6883042B2 (enExample) |
| CN (2) | CN108698405B (enExample) |
| WO (1) | WO2017117518A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6883042B2 (ja) | 2015-12-31 | 2021-06-02 | フジフィルム ディマティックス， インコーポレイテッド | 液体吐出装置 |
| EP3330329B1 (en) | 2016-12-02 | 2022-06-08 | Ricoh Company, Ltd. | Inkjet recording apparatus, printer, and method for manufacturing cured product |
| EP3634763B1 (en) | 2017-06-09 | 2023-12-13 | Fujifilm Dimatix, Inc. | Fluid ejection apparatus with reduced crosstalk, corresponding operating method and making method |
| JP7031376B2 (ja) * | 2018-03-04 | 2022-03-08 | 株式会社リコー | 液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置 |
| JP7106917B2 (ja) * | 2018-03-23 | 2022-07-27 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
| WO2019244227A1 (ja) * | 2018-06-19 | 2019-12-26 | コニカミノルタ株式会社 | インクジェットヘッド及びインクジェット記録装置 |
| US20210245151A1 (en) * | 2018-08-10 | 2021-08-12 | Hewlett-Packard Development Company, L.P. | Dual direction dispensers |
| US11104128B2 (en) * | 2018-12-21 | 2021-08-31 | Seiko Epson Corporation | Liquid ejecting head and liquid ejecting system |
| US11007789B2 (en) | 2018-12-21 | 2021-05-18 | Seiko Epson Corporation | Liquid ejecting head and liquid ejecting apparatus |
| JP2020100136A (ja) * | 2018-12-21 | 2020-07-02 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置及び液体噴射システム |
| JP7287042B2 (ja) * | 2018-12-21 | 2023-06-06 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射システム |
| JP7293670B2 (ja) * | 2019-01-29 | 2023-06-20 | ブラザー工業株式会社 | 液体吐出ヘッド |
| IT201900005808A1 (it) * | 2019-04-15 | 2020-10-15 | St Microelectronics Srl | Dispositivo mems a micropompa per la movimentazione o eiezione di un fluido, in particolare microsoffiante o flussimetro |
| IT201900007196A1 (it) * | 2019-05-24 | 2020-11-24 | St Microelectronics Srl | Dispositivo microfluidico per l'espulsione continua di fluidi, in particolare per la stampa con inchiostri, e relativo procedimento di fabbricazione |
| JP7302385B2 (ja) * | 2019-08-29 | 2023-07-04 | セイコーエプソン株式会社 | 液体吐出ヘッドユニットおよび液体吐出装置 |
| KR102778272B1 (ko) | 2019-12-16 | 2025-03-12 | 현대자동차주식회사 | 이젝터 노즐과 이를 포함한 이젝터 |
| JP7413864B2 (ja) | 2020-03-19 | 2024-01-16 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法、及び、流路部品の製造方法 |
| US12042991B2 (en) * | 2021-02-25 | 2024-07-23 | Xerox Corporation | Energy dissipative nozzles for drop-on-demand printing and methods thereof |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3958255A (en) * | 1974-12-31 | 1976-05-18 | International Business Machines Corporation | Ink jet nozzle structure |
| JPH0365352A (ja) | 1989-08-03 | 1991-03-20 | Canon Inc | インクジェット記録装置およびそのインク供給装置 |
| DE69120569T2 (de) | 1990-02-26 | 1997-01-09 | Canon Kk | Tintenstrahlaufzeichnungsgerät und Verfahren zum Reinigen des Aufzeichnungskopfes |
| US5828394A (en) * | 1995-09-20 | 1998-10-27 | The Board Of Trustees Of The Leland Stanford Junior University | Fluid drop ejector and method |
| JP3372765B2 (ja) | 1996-07-12 | 2003-02-04 | キヤノン株式会社 | 液体吐出ヘッド、ヘッドカートリッジ、液体吐出装置、記録システム、ヘッドキット、および液体吐出ヘッドの製造方法 |
| US7052117B2 (en) * | 2002-07-03 | 2006-05-30 | Dimatix, Inc. | Printhead having a thin pre-fired piezoelectric layer |
| EP1680279B1 (en) * | 2003-10-10 | 2014-04-23 | Dimatix, Inc. | Print head with thin membrane |
| US7347532B2 (en) * | 2004-08-05 | 2008-03-25 | Fujifilm Dimatix, Inc. | Print head nozzle formation |
| JP5003282B2 (ja) * | 2007-05-23 | 2012-08-15 | 富士ゼロックス株式会社 | 液滴吐出ヘッド及び画像形成装置 |
| CN103753957B (zh) * | 2008-05-23 | 2016-05-04 | 富士胶片株式会社 | 流体液滴喷射装置 |
| US8472916B2 (en) * | 2008-07-03 | 2013-06-25 | Centurylink Intellectual Property Llc | Preformatted emergency text message |
| JP5298790B2 (ja) * | 2008-11-12 | 2013-09-25 | セイコーエプソン株式会社 | 流体噴射装置、及び、流体噴射方法 |
| US8303082B2 (en) * | 2009-02-27 | 2012-11-06 | Fujifilm Corporation | Nozzle shape for fluid droplet ejection |
| EP2451647B1 (en) * | 2009-07-10 | 2019-04-24 | Fujifilm Dimatix, Inc. | Mems jetting structure for dense packing |
| US8210649B2 (en) * | 2009-11-06 | 2012-07-03 | Fujifilm Corporation | Thermal oxide coating on a fluid ejector |
| US8317302B2 (en) * | 2010-03-18 | 2012-11-27 | Fujifilm Corporation | Restriction of fluid ejector membrane |
| US8272717B2 (en) * | 2010-03-29 | 2012-09-25 | Fujifilm Corporation | Jetting device with reduced crosstalk |
| US8267504B2 (en) | 2010-04-27 | 2012-09-18 | Eastman Kodak Company | Printhead including integrated stimulator/filter device |
| US8657429B2 (en) | 2010-10-26 | 2014-02-25 | Eastman Kodak Company | Dispensing liquid using overlapping outlet/return dispenser |
| US20120098899A1 (en) | 2010-10-26 | 2012-04-26 | Yonglin Xie | Dispensing liquid using dispenser with return filter |
| JP2013116590A (ja) * | 2011-12-02 | 2013-06-13 | Ricoh Co Ltd | 液滴吐出ヘッド及び画像形成装置。 |
| EP2620286A1 (en) * | 2012-01-26 | 2013-07-31 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Continuous jet printing of a fluid material |
| CN104302483B (zh) * | 2012-07-03 | 2016-09-21 | 惠普发展公司，有限责任合伙企业 | 流体喷射设备 |
| JP2014061695A (ja) * | 2012-09-20 | 2014-04-10 | Samsung Electro-Mechanics Co Ltd | インクジェットプリントヘッド |
| KR20140076136A (ko) * | 2012-12-12 | 2014-06-20 | 삼성전기주식회사 | 잉크젯 프린트 헤드 |
| US9162454B2 (en) | 2013-04-11 | 2015-10-20 | Eastman Kodak Company | Printhead including acoustic dampening structure |
| JP6883042B2 (ja) | 2015-12-31 | 2021-06-02 | フジフィルム ディマティックス， インコーポレイテッド | 液体吐出装置 |
-
2016
- 2016-12-30 JP JP2018533915A patent/JP6883042B2/ja active Active
- 2016-12-30 WO PCT/US2016/069462 patent/WO2017117518A1/en not_active Ceased
- 2016-12-30 CN CN201680082235.7A patent/CN108698405B/zh active Active
- 2016-12-30 CN CN202110060536.2A patent/CN112895718B/zh active Active
- 2016-12-30 US US15/395,549 patent/US10315421B2/en active Active
- 2016-12-30 EP EP16882747.5A patent/EP3397493B1/en active Active
-
2019
- 2019-04-25 US US16/394,073 patent/US11001059B2/en active Active
-
2021
- 2021-04-28 US US17/242,621 patent/US11904610B2/en active Active
- 2021-05-07 JP JP2021079130A patent/JP7277508B2/ja active Active
-
2023
- 2023-05-08 JP JP2023076590A patent/JP7723465B2/ja active Active
-
2024
- 2024-01-26 US US18/423,505 patent/US12447743B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6883042B2 (ja) | 2021-06-02 |
| US20240157699A1 (en) | 2024-05-16 |
| CN112895718A (zh) | 2021-06-04 |
| JP7723465B2 (ja) | 2025-08-14 |
| JP7277508B2 (ja) | 2023-05-19 |
| WO2017117518A1 (en) | 2017-07-06 |
| CN108698405B (zh) | 2021-02-02 |
| EP3397493A1 (en) | 2018-11-07 |
| EP3397493A4 (en) | 2019-08-14 |
| US12447743B2 (en) | 2025-10-21 |
| US11001059B2 (en) | 2021-05-11 |
| US20170190179A1 (en) | 2017-07-06 |
| US11904610B2 (en) | 2024-02-20 |
| US10315421B2 (en) | 2019-06-11 |
| CN108698405A (zh) | 2018-10-23 |
| JP2023093768A (ja) | 2023-07-04 |
| EP3397493B1 (en) | 2025-04-30 |
| JP2019505411A (ja) | 2019-02-28 |
| US20210245508A1 (en) | 2021-08-12 |
| US20190248138A1 (en) | 2019-08-15 |
| JP2021175609A (ja) | 2021-11-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112895718B (zh) | 流体喷射装置 | |
| JP7663624B2 (ja) | 低減されたクロストークを有する流体吐出デバイス | |
| KR100438836B1 (ko) | 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법 | |
| EP1693206B1 (en) | Piezoelectric inkjet printhead and method of manufacturing the same | |
| JP4732416B2 (ja) | プリントヘッド | |
| CN108656747A (zh) | 流体喷射装置、打印头、打印机和用于制造喷射装置的方法 | |
| KR100682917B1 (ko) | 압전 방식의 잉크젯 프린트헤드 및 그 제조방법 | |
| CN110869216A (zh) | 具有减少的串扰的流体喷射设备 | |
| KR100528349B1 (ko) | 압전 방식의 잉크젯 프린트헤드 및 그 제조방법 | |
| US9004652B2 (en) | Thermo-pneumatic actuator fabricated using silicon-on-insulator (SOI) | |
| US9004651B2 (en) | Thermo-pneumatic actuator working fluid layer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |