CN112881609A - Miniature multichannel trace gas concentration analyzer - Google Patents
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N33/0004—Gaseous mixtures, e.g. polluted air
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Abstract
The invention discloses a miniature multi-channel trace gas concentration analyzer, which comprises: a gas adsorption channel; a gas enricher disposed on a path of the gas adsorption channel, the gas enricher including a gas adsorption part having a gas adsorption function and a heating unit for heating the gas adsorption part; the gas flow accelerating unit can accelerate gas in the external environment to enter the gas adsorption channel; gas sensor, gas sensor's sense terminal can detect gas adsorption portion quilt the gas that awaits measuring that releases after the heating unit heating, the gas flow accelerating unit accelerates gas entering gas adsorption passageway to let gas enrichment ware be in the low temperature state, accelerate gas adsorption portion adsorb the gas that awaits measuring, when adsorbing and reaching the certain degree, with the extremely fast temperature rise of heating unit to appointed high temperature, gas adsorption portion is heated the back, and the adsorbed gas is whole releases in the very short time, and it is low to have solved current gas sensor sensitivity, can not reach the problem of actual detection demand.
Description
Technical Field
The invention relates to the technical field of gas detection, in particular to a miniature multi-channel trace gas concentration analyzer.
Background
In various industries such as military affairs, medicine, food, chemical industry and the like, there is a great demand for being able to recognize a variety of gases at low concentrations, one reason is to reduce human consumption, and the other reason is that human nose smell is limited. In the military aspect, the placement point of the explosive can be found according to the smell of the explosive raw material, in the medical aspect, the concentration and the type of the characteristic gas in the breath can be detected according to the breath of a human body, and the effects of disease detection and prevention can be achieved. In the wine making industry, the grade of wine can be identified according to the smell of the produced wine.
For example, in the case of medical science, patients with diabetes, lung cancer, asthma, or nephropathy do not have obvious symptoms or organic lesions in their early stages, and the disease is found late. However, volatile organic compounds with disease characteristics in the gas exhaled by the early patient can be detected and analyzed in time, so that early disease diagnosis can be made and prevented in advance.
The exhaled breath detection mainly depends on a gas chromatography or mass spectrometry method, and the detection and analysis has high precision, but the process is complex and time-consuming, and the equipment is expensive and heavy, so that the detection is not favorable for clinical application, particularly for household use. Most of electronic nose researches are still in a laboratory stage, and have a plurality of problems, such as the gas sampling instrument and the sensor have relatively large volumes, and the portability and the wearability of the electronic nose are not easy to realize; the detection limit of the sensor is high, and detection cannot be realized for VOCs with lower concentration; the sensor has poor self-identification and cannot distinguish different pathological types, and the like, and the factors make the exhaled breath detection really used in clinic rarely.
At present, determining the accurate level of disease-related exhaled breath VOCs in different populations and improving the accuracy of disease discrimination using exhaled breath VOCs remains the biggest challenge in the study of exhaled breath disease diagnosis. In addition, wearable is a trend of electronic devices, and how to realize system miniaturization and integration is another important challenge facing an electronic nose system on the premise of maintaining the measurement accuracy of the electronic nose.
Although gas sensors have been developed for over 50 years from birth to the present, the state of the art still fails to meet the needs of reality. The current sensors are mainly divided into four categories, namely a semiconductor type sensor, an electrochemical type sensor, a catalytic combustion type sensor and an optical type sensor, wherein the optical type sensor has high sensitivity and good selectivity, but has high cost and huge volume, and is generally used in industrial occasions. The catalytic combustion type gas sensor is generally used for detecting combustible gas, has few detection types and has no selectivity. Electrochemical sensors have relatively high sensitivity and selectivity, but are also difficult to detect gases at lower concentrations, and have limited volume limits that cannot be integrated in a miniaturized form. The semiconductor type gas sensor has small volume, high sensitivity and low price, has the most potential of realizing systematic integration and miniaturization, but has poor selectivity and can not identify various gases with low concentration.
If a sensor which can satisfy the requirements of small volume, high sensitivity and strong resolving power and can respectively use various low-concentration gases like a dog nose is desired, the sensor is difficult to appear in the next decade only from the perspective of a single sensor and the current technical development level. Therefore, a new idea is needed to be adopted to achieve the purpose by innovating on the technical level of the existing sensor.
Disclosure of Invention
The invention aims to overcome the technical defects and provide a miniature multi-channel trace gas concentration analyzer, which solves at least one technical problem in the background art.
In order to achieve the technical purpose, the technical scheme of the invention provides a miniature multi-channel trace gas concentration analyzer, which comprises:
a gas adsorption channel;
a gas enricher disposed on a path of the gas adsorption channel, the gas enricher including a gas adsorption part having a gas adsorption function and a heating unit for heating the gas adsorption part;
the gas flow accelerating unit can accelerate gas in the external environment to enter the gas adsorption channel;
and the detection end of the gas sensor can detect the gas to be detected released after the gas adsorption part is heated by the heating unit.
Furthermore, the number of the gas adsorption channels is one, the number of the gas enrichers is multiple, and the gas enrichers are sequentially arranged at intervals along the path of the gas adsorption channels.
Furthermore, the gas adsorption channels are multiple, and the gas enrichers are arranged in the gas adsorption channels in a one-to-one correspondence manner.
Furthermore, the number of the gas sensors is one, the detection end of each gas sensor is arranged on the path of the gas adsorption channel, and the gas released by each gas concentrator can flow through the detection end of each gas sensor.
Furthermore, the gas sensors are multiple, and the detection ends of the multiple gas sensors are arranged adjacent to the multiple gas enrichers in a one-to-one correspondence manner.
Further, a plurality of the gas adsorption channels are integrated on the same chip.
Furthermore, the micro multi-channel trace gas concentration analyzer further comprises an interference gas adsorber, and the interference gas adsorber is arranged at the gas inlet end of the gas adsorption channel.
Further, the adsorbent material of the gas adsorption part is one or more of activated carbon, modified covalent organic framework material (COF) and metal organic framework Material (MOF) in combination.
Further, the adsorbent material of the interference gas adsorber is one or more of activated carbon, modified covalent organic framework material (COF), and metal organic framework Material (MOF).
Further, the heating unit is laser heating or electric heating wire heating.
Compared with the prior art, the invention has the beneficial effects that: this miniature multichannel trace gas concentration analysis appearance during operation lets the gas flow acceleration unit accelerate gas admission gas adsorption channel earlier, and let gas enrichment ware be in the low temperature state, accelerate gas adsorption portion adsorbs the gas that awaits measuring, when adsorbing and reaching the certain degree, with the extremely fast intensification of heating element to appointed high temperature, gas adsorption portion is heated the back, adsorbed gas is whole releases in the utmost point short time, and gas enrichment ware and gas sensor all are in gas adsorption channel, thereby can improve the concentration of gas several hundred times in the short time, thereby realize that enrichment detects after earlier, it is low to have solved current gas sensor sensitivity, can not reach the problem of actual detection demand.
Drawings
FIG. 1 is a schematic diagram of the control principle of one embodiment of the micro multi-channel trace gas concentration analyzer provided by the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, the present embodiment provides a micro multi-channel trace gas concentration analyzer, which includes: the device comprises a gas adsorption channel, a gas enricher 1, a gas flow accelerating unit 5 and a gas sensor 7.
The gas enricher 1 set up in on the route of gas adsorption passageway, gas enricher 1 is including the gas adsorption portion that has the gas adsorption function and be used for right the gas adsorption portion carries out the heating element that heats, gas flow accelerating unit can accelerate the gas among the external environment and get into the gas adsorption passageway, the sense terminal of gas sensor can detect the gas adsorption portion quilt the gas that awaits measuring that releases after the heating element heating.
This miniature multichannel trace gas concentration analysis appearance during operation lets airflow acceleration unit 5 accelerate gas admission gas adsorption channel earlier, and let gas enrichment ware 1 be in the low temperature state, accelerate gas adsorption portion adsorbs the gas that awaits measuring, when adsorbing and reaching the certain degree, with the extremely fast intensification of heating element to appointed high temperature, gas adsorption portion is heated the back, adsorbed gas is whole releases in the extremely short time, and gas enrichment ware and gas sensor all are in gas adsorption channel, thereby can improve the concentration of gas several hundred times in the short time, thereby realize gathering earlier the postdetection, current gas sensor sensitivity is low has been solved, can not reach the problem of actual detection demand.
This example provides four specific implementations:
the first embodiment: the number of the gas adsorption channels is one, the number of the gas enrichers 1 is multiple, the plurality of the gas enrichers 1 are sequentially arranged at intervals along the path of the gas adsorption channels, the structure ensures that the gas enricher 1 is in a serial connection state, the gas sensor 7 is one, the detection end of the gas sensor 7 is arranged on the path of the gas adsorption channel, and the gas released by each gas concentrator 1 can flow through the detection end of the gas sensor 7, a plurality of gas concentrators 1 are used for adsorbing a plurality of different gases, specifically, the gas outlet ends of a plurality of gas adsorption channels are connected in parallel with the same gas outlet channel, the detection end of the gas sensor 7 is arranged in the gas outlet channel, and each gas concentrator 1 sequentially heats and releases gas to be detected at intervals, so that mutual interference caused by simultaneous release is avoided.
The second embodiment: the gas adsorption channel is one, the gas enricher 1 is a plurality of, and is a plurality of the gas enricher 1 is along the route of gas adsorption channel sets up at interval in proper order, and this structure makes the gas enricher be in the state of establishing ties, gas sensor 7 is a plurality of, and is a plurality of the sense terminal one-to-one of gas sensor 7 is with a plurality of gas enricher 1 is adjacent to be arranged.
Third embodiment: the gas adsorption passageway is a plurality of, and is a plurality of place in the gas enricher 1 one-to-one in a plurality of the gas adsorption passageway, a plurality of gas enrichers 1 are in parallelly connected state this moment, gas sensor 7 is one, gas sensor 7's sense terminal set up in on the route of gas adsorption passageway, and each the gas that gas enricher 1 released all can flow through gas sensor 7's sense terminal, a plurality of gas enricher 1 are used for adsorbing the gas of multiple difference, and are specific, and it is a plurality of this moment the end of giving vent to anger of gas adsorption passageway is parallelly connected in same gas outlet channel, gas sensor 7's sense terminal set up with in the gas outlet channel, every gas enricher 1 all heats the release gas that awaits measuring at interval in proper order, avoids releasing simultaneously to cause mutual interference.
Fourth embodiment: the gas adsorption channels are multiple, the gas enrichers 1 are arranged in the gas adsorption channels in a one-to-one correspondence manner, at the moment, the gas enrichers 1 are in a parallel state, the gas sensors 7 are multiple, and the gas sensors 7 are multiple, the detection ends of the gas sensors 7 are in a one-to-one correspondence manner and multiple, and the gas enrichers 1 are arranged adjacently.
Further, the air inlet end of the gas adsorption channel is provided with an electromagnetic valve 3, and when the gas adsorption channel is multiple, each air inlet end of the gas adsorption channel can be provided with an electromagnetic valve 3.
Furthermore, a gas flowmeter 4 is arranged in the gas adsorption channel.
The gas adsorption channels are integrated on the same chip, the micro multichannel trace gas concentration analyzer further comprises an interference gas adsorber 2, the interference gas adsorber 2 is arranged at the gas inlet end of the gas adsorption channels, adsorbent materials of the gas adsorption part include but are not limited to activated carbon, modified covalent organic framework materials (COF) and metal organic framework Materials (MOF), adsorbent materials of the interference gas adsorber 2 include but are not limited to activated carbon, modified covalent organic framework materials (COF) and metal organic framework Materials (MOF), and the heating unit includes but is not limited to laser heating and electric heating wire heating.
Specifically, in this embodiment, the interference gas adsorber specifically employs an MEMS gas adsorber, the gas concentrator employs an MEMS gas concentrator (for implementing enrichment and separation of gas concentration), the gas flow meter employs an MEMS flow sensor (for detecting gas flow velocity in the micro flow channel and stabilizing working conditions of the electronic nose), the gas sensor employs an MEMS gas sensor array (for implementing gas detection), and the gas flow acceleration unit employs a speed regulation micro pump (for modulating gas flow velocity in the flow channel), the basic principle of the present invention is that the MEMS gas adsorber (for adsorbing interference gas), the MEMS gas concentrator (for implementing enrichment and separation of gas concentration), the MEMS flow sensor (for detecting gas flow velocity in the micro flow channel and stabilizing working conditions of the electronic nose), the MEMS gas sensor array (for implementing gas detection), and the speed regulation micro pump (for modulating gas flow velocity in the flow channel) are sequentially disposed in the micro flow channel, the interference gas adsorber and the MEMS gas enricher are both adsorbent materials with strong selectivity, high strength, multiple pores, large surface area and fast heat transfer, and commonly used materials comprise activated carbon, covalent organic framework materials and metal organic framework materials, but the difference is that the interference gas adsorber is generally used for adsorbing interference gas with higher activity, such as ethanol. The gas enricher can adsorb and desorb specific gas through various modifications, so as to achieve the effect of gas type selection, and generally achieve the effect of low-temperature adsorption and high-temperature desorption by a method of controlling the temperature of the enricher.
When the detection system is implemented specifically, a silicon substrate is adopted, the whole detection system is assembled by using a low-temperature bonding mode of an upper silicon wafer and a lower silicon wafer, an MEMS gas adsorber, an MEMS gas concentrator and an MEMS semiconductor gas sensor are mainly integrated on the lower silicon wafer, the upper wafer is mainly a microfluidic system and is provided with an electronic valve, a flowmeter, a microfluidic cavity, a speed regulating micropump and an integrated operation control chip 6, the technical key point is that the microfluidic cavity is in a half-open state at the bottom, and after the upper silicon wafer and the lower silicon wafer are bonded, a closed cavity can be formed with the lower silicon wafer and only an air inlet and an air outlet are.
The basic working flow of the analyzer is that gas to be tested enters a micro-flow cavity (gas adsorption channel) under the combined control of an electromagnetic valve, a speed-regulating micro pump and a flowmeter according to a proper flow rate, the gas is adsorbed by an interfering gas adsorber firstly, then the gas is selectively adsorbed by a target gas through an enricher, when the adsorption time is enough, the temperature of the enricher is controlled to be raised quickly, the target gas is released quickly, the concentration of the target gas in a tiny cavity is increased quickly, the flow of gas in the cavity is stopped by regulating the speed-regulating micro pump, the concentration of the target gas in the cavity is maintained to be stable, and then a gas sensor is used for concentration test. Through the simultaneous or time-sharing test of a plurality of channels, can obtain a plurality of groups of data, carry out pattern recognition and feature extraction discernment to the sensing data to can realize carrying out high selectivity, high reliability to the gas that awaits measuring and detect, the gas enrichment rate reaches more than 200 times, can improve sensor detection limit and selectivity by a wide margin on current sensor technical level, and reduce whole encapsulation size to 1cm2Size.
The above-described embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A miniature multi-channel trace gas concentration analyzer, comprising:
a gas adsorption channel;
a gas enricher disposed on a path of the gas adsorption channel, the gas enricher including a gas adsorption part having a gas adsorption function and a heating unit for heating the gas adsorption part;
the gas flow accelerating unit can accelerate gas in the external environment to enter the gas adsorption channel;
and the detection end of the gas sensor can detect the gas to be detected released after the gas adsorption part is heated by the heating unit.
2. The micro multi-channel trace gas concentration analyzer of claim 1, wherein the number of the gas adsorption channels is one, and the number of the gas enrichers is plural, and the plural gas enrichers are sequentially arranged at intervals along a path of the gas adsorption channels.
3. The micro multi-channel trace gas concentration analyzer according to claim 1, wherein the number of the gas adsorption channels is plural, and a plurality of the gas enrichers are built in the plurality of the gas adsorption channels in a one-to-one correspondence.
4. The micro multi-channel trace gas concentration analyzer according to claim 2 or 3, wherein the number of the gas sensors is one, the detection end of the gas sensor is disposed on the path of the gas adsorption channel, and the gas released from each of the gas enrichers can flow through the detection end of the gas sensor.
5. The micro multi-channel trace gas concentration analyzer according to claim 2 or 3, wherein the gas sensor is a plurality of sensors, and the detection ends of the plurality of gas sensors are arranged adjacent to the plurality of gas enrichers in a one-to-one correspondence.
6. The micro multi-channel trace gas concentration analyzer according to claim 3, wherein a plurality of the gas adsorption channels are integrated on a same chip.
7. The micro multi-channel trace gas concentration analyzer according to claim 1, further comprising an interference gas adsorber disposed at a gas inlet end of the gas adsorption channel.
8. The micro multi-channel trace gas concentration analyzer according to claim 1, wherein the adsorbent material of the gas adsorbing portion is a combination of one or more of activated carbon, modified covalent organic framework material (COF), metal organic framework Material (MOF).
9. The micro multi-channel trace gas concentration analyzer according to claim 7, wherein the adsorbent material of the interference gas adsorber is a combination of one or more of activated carbon, modified covalent organic framework material (COF), metal organic framework Material (MOF).
10. The enhanced gas detection sensor according to claim 1, wherein the heating unit is laser heating or heating wire heating.
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| CN114383925A (en) * | 2021-12-24 | 2022-04-22 | 同方威视技术股份有限公司 | Trace particle and vapor detection system |
| CN114487036A (en) * | 2022-01-10 | 2022-05-13 | 海宁微纳芯传感技术有限公司 | MEMS gas sensor with gas enrichment function and working method thereof |
| CN115389602A (en) * | 2022-04-10 | 2022-11-25 | 宁波华仪宁创智能科技有限公司 | Security inspection device and method with trace detection function |
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| CN115389602A (en) * | 2022-04-10 | 2022-11-25 | 宁波华仪宁创智能科技有限公司 | Security inspection device and method with trace detection function |
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Application publication date: 20210601 |