CN112880542B - Method and system for rapidly detecting thickness and conductivity of ultrathin metal coating - Google Patents

Method and system for rapidly detecting thickness and conductivity of ultrathin metal coating Download PDF

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CN112880542B
CN112880542B CN202110011780.XA CN202110011780A CN112880542B CN 112880542 B CN112880542 B CN 112880542B CN 202110011780 A CN202110011780 A CN 202110011780A CN 112880542 B CN112880542 B CN 112880542B
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conductivity
impedance
metal coating
thickness
rapidly detecting
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CN112880542A (en
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吴静
潘春宇
谢天宇
王正楷
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Beihang University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/085—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Abstract

The invention discloses a method and a system for quickly detecting the thickness and the conductivity of an ultrathin metal coating, wherein the method comprises the following steps: s1, disposing the detection coils at a plurality of predetermined positions; s2, sinusoidal currents with a plurality of frequencies are added into the detection coils respectively to obtain a plurality of impedance values corresponding to preset positions; s3, converting the impedance value through a first preset formula to obtain a normalized impedance measurement value; s4, generating a plurality of wave impedance theoretical values corresponding to the detection coils according to the wave impedance theoretical expression, and converting the wave impedance theoretical values through a second preset formula to obtain normalized wave impedance theoretical values; and S5, constructing a detection formula according to the normalized impedance measurement value and the normalized wave impedance theoretical value, and calculating a plurality of parameter values corresponding to the detection formula at the minimum value through a preset algorithm. According to the method disclosed by the invention, the metal coating is detected more quickly, and the accuracy and the sensitivity are higher.

Description

Method and system for rapidly detecting thickness and conductivity of ultrathin metal coating
Technical Field
The invention relates to the technical field of detection of ultrathin metal coatings, in particular to a method and a system for quickly detecting the thickness and the conductivity of an ultrathin metal coating.
Background
The metal coating technology is widely applied to the fields of aerospace, medical clinic, ship equipment, power industry and the like, and can play roles in protecting and isolating equipment, prolonging the service life and the like.
The existing detection method of the metal ultrathin coating based on the eddy frequency sweeping method has the following defects: (1) one parameter, such as the coating thickness or the coating conductivity, needs to be known to accurately detect the other parameter, and simultaneous detection of the two parameters cannot be realized; (2) even under the condition that a certain coating parameter is known, a priori experiment is still needed, another parameter can be detected after a certain relation between the parameters is obtained, and once deviation occurs in the priori experiment, the detection accuracy of the other parameter is reduced; (3) the height of the coil from the coating is detected in the eddy current frequency sweeping method, namely the lifting of the coil cannot be ignored, and the size of the coil directly influences the size of the coil impedance, so that the detection sensitivity of the coating parameters is influenced; (4) in the detection process, the coil impedance series expression containing the special function needs to be repeatedly calculated, the calculation time is long, the number of detection parameters is increased along with the increase of the number of coating layers, and the time required by the detection process is long. In summary, there is room for improvement in the prior art.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, an object of the present invention is to provide a method for rapidly detecting the thickness and conductivity of an ultra-thin metal coating, which can rapidly detect the thickness and conductivity of the ultra-thin metal coating with high accuracy and sensitivity.
The invention also provides a system with the method for quickly detecting the thickness and the conductivity of the ultrathin metal coating.
The method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating comprises the following steps:
s1, disposing the detection coils at a plurality of predetermined positions;
s2, sinusoidal currents with a plurality of frequencies are added into the detection coils respectively to obtain a plurality of impedance values corresponding to preset positions;
s3, converting the impedance value through a first preset formula to obtain a normalized impedance measurement value;
s4, generating a plurality of wave impedance theoretical values corresponding to the detection coils according to the wave impedance theoretical expression, and converting the wave impedance theoretical values through a second preset formula to obtain normalized wave impedance theoretical values;
and S5, constructing a detection formula according to the normalized impedance measurement value and the normalized wave impedance theoretical value, and calculating a plurality of parameter values corresponding to the detection formula at the minimum value through a preset algorithm.
According to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, the detection speed of the metal coating is higher, and the accuracy and the sensitivity are higher.
According to the method for rapidly detecting the thickness and the conductivity of the ultra-thin metal coating in one embodiment of the present invention, in step S1, the plurality of predetermined locations include: above the first plate conductor M, above the second plate conductor N, above the third plate conductor T and above the first plate conductor M covered with the non-conductor plate L, wherein the third plate conductor T is provided with a metal coating.
According to the method for rapidly detecting the thickness and conductivity of the ultra-thin metal coating in one embodiment of the present invention, in step S2, the real part of the impedance value corresponds to a resistance, and the imaginary part of the impedance value corresponds to a reactance, and an impedance plane coordinate system can be constructed by the resistance and the reactance.
According to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, disclosed by the embodiment of the invention, the expression of a first preset formula is as follows:
Figure BDA0002885457100000021
wherein f denotes the frequency of the sinusoidal current, P*(f) Representing a normalized impedance measurement, ZM(f)、Z′N(f) And Z'T(f) Representing impedance values corresponding to points M, N 'and T' in the impedance plane coordinate system.
According to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, disclosed by the embodiment of the invention, the wave impedance theoretical expression is as follows:
Figure BDA0002885457100000022
wherein Z'M(f) Z 'represents a theoretical value of wave impedance corresponding to the first plate conductor M'N(f) Expressing the theoretical value, σ, of the wave impedance corresponding to the second plate conductor NMRepresenting the conductivity, σ, of the first plate conductor MNRepresenting the electrical conductivity of the second plate conductor N.
According to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, a second preset formula expression is as follows:
Figure BDA0002885457100000031
according to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, disclosed by the embodiment of the invention, the expression of the normalized wave impedance theoretical value is as follows:
Figure BDA0002885457100000032
according to the method for rapidly detecting the thickness and the conductivity of the ultra-thin metal coating in one embodiment of the present invention, in step S5, the expression of the detection formula is as follows:
Figure BDA0002885457100000033
where K is the number of frequencies of the current flowing through the coil detected in step S2.
According to the method for rapidly detecting the thickness and the conductivity of the ultra-thin metal coating in one embodiment of the invention, in step S5, the preset algorithm is a Levenberg-Marquardt algorithm.
According to the system for rapidly detecting the thickness and the conductivity of the ultrathin metal coating in the second aspect of the invention, the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating in any one of the first aspect is provided. The system has the same advantages as the above method for rapidly detecting the thickness and conductivity of the ultra-thin metal coating, compared with the prior art, and is not described herein again.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
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The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a flow chart of a method for rapid detection of thickness and conductivity of an ultra-thin metal coating in accordance with an embodiment of the present invention;
FIG. 2 is a diagram of an impedance plane coordinate system of resistive and reactive build-up according to an embodiment of the present invention;
fig. 3 is a diagram of a theoretical model in which a detection coil is placed on a conductor plate according to an embodiment of the present invention;
fig. 4 is a diagram of a theoretical model in which a detection coil is placed on a conductor flat plate according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.
The method for rapidly detecting the thickness and conductivity of the ultra-thin metal coating according to an embodiment of the present invention will be described with reference to fig. 1 to 4. As shown in fig. 1, the method for rapidly detecting the thickness and conductivity of the ultra-thin metal coating according to the embodiment of the present invention includes the following steps:
s1, disposing the detection coils at a plurality of predetermined positions;
s2, sinusoidal currents with a plurality of frequencies are added into the detection coils respectively to obtain a plurality of impedance values corresponding to preset positions;
s3, converting the impedance value through a first preset formula to obtain a normalized impedance measurement value;
s4, generating a plurality of wave impedance theoretical values corresponding to the detection coils according to the wave impedance theoretical expression, and converting the wave impedance theoretical values through a second preset formula to obtain normalized wave impedance theoretical values;
and S5, constructing a detection formula according to the normalized impedance measurement value and the normalized wave impedance theoretical value, and calculating a plurality of parameter values corresponding to the detection formula at the minimum value through a preset algorithm.
In the description of the present invention, "a plurality" means two or more.
According to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, the detection speed of the metal coating is higher, and the accuracy and the sensitivity are higher.
According to the method for rapidly detecting the thickness and the conductivity of the ultra-thin metal coating in one embodiment of the present invention, in step S1, the plurality of predetermined locations include: above the first plate conductor M, above the second plate conductor N, above the third plate conductor T with a metallic coating, and above the first plate conductor M covered with a non-conductive plate L. In the description of the present invention, the first feature being "on" or "under" the second feature may include the first and second features being in direct contact, and may also include the first and second features being in contact with each other not directly but through another feature therebetween.
Further, the parameters of the recording detection coil comprise height h and inner radius r1Outer radius r2N number of turns, and further the conductivity of record M, N is σM、σNRecording the thickness of L as L; further, the coating conductivity σ of the third plate conductor T1The thickness of the coating layer is d1Base layer conductor conductivity σ2The thickness of the base layer is d2. Specifically, d can be set2>100d1Further, the vector formed by the third flat plate conductor T is set to X ═ σ1,σ2,d1)。
Furthermore, a sinusoidal current with the frequency f is introduced into the detection coil and is placed above the first flat plate conductor M, and the impedance of the measurement coil is ZM(f) (ii) a Similarly, placed over a first plate conductor M covered with a non-conductive plate L, the impedance of the measuring coil is ZML(f) (ii) a Similarly, placed above the second plate conductor N, the impedance of the measuring coil is ZN(f) (ii) a Similarly, placed above the third plate conductor T, the impedance of the measuring coil is ZT(f) .1. the It should be noted that a plurality of Z groups can be obtained by changing the value of fM(f)、ZML(f)、ZN(f) And ZT(f)。
According to the method for rapidly detecting the thickness and conductivity of the ultra-thin metal coating in one embodiment of the present invention, in step S2, the real part of the impedance value corresponds to a resistance, and the imaginary part of the impedance value corresponds to a reactance, and an impedance plane coordinate system can be constructed by the resistance and the reactance.
Further, as shown in fig. 2, in an impedance plane having a resistance as an abscissa and a reactance as an ordinate, an impedance value Z at a frequency f is obtainedM(f)、ZML(f)、ZN(f)、ZT(f) The corresponding point M, L, N, T is further connected M, L to obtain a straight line l perpendicular to ML, where the perpendicular line is drawn from point N to l with the foot being N ', the perpendicular line is drawn from point T to l with the foot being T'. Assume that the impedance values corresponding to N ' and T ' are Z 'N(f) And Z'T(f) .1. the Further, Z isM(f)、Z′T(f) And Z'N(f) And substituting the normalized impedance into a first preset formula to obtain a normalized impedance measured value.
According to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, disclosed by the embodiment of the invention, the expression of a first preset formula is as follows:
Figure BDA0002885457100000051
wherein f denotes the frequency of the sinusoidal current, P*(f) Representing a normalized impedance measurement, ZM(f)、Z′N(f) And Z'T(f) Representing the impedance values corresponding to points M, N 'and T' in the impedance plane coordinate system. In this way, the influence of the distance between the bottom of the measuring coil and the flat conductor on the detection process can be removed through step S3, thereby improving the accuracy of the measurement result.
According to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, disclosed by the embodiment of the invention, the wave impedance theoretical expression is as follows:
Figure BDA0002885457100000052
wherein Z'M(f) Z 'represents a theoretical value of wave impedance corresponding to the first plate conductor M'N(f) Expressing the theoretical value, σ, of the wave impedance corresponding to the second plate conductor NMDenotes the electrical conductivity, σ, of the first plate conductor MNRepresenting the electrical conductivity of the second plate conductor N.
According to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, a second preset formula expression is as follows:
Figure BDA0002885457100000061
it should be noted that the second predetermined formula is a wave impedance theoretical value containing the vector X.
According to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, disclosed by the embodiment of the invention, the expression of the normalized wave impedance theoretical value is as follows:
Figure BDA0002885457100000062
through the processing in step S4, the detection speed can be improved without affecting the detection accuracy.
According to the method for rapidly detecting the thickness and the conductivity of the ultra-thin metal coating in one embodiment of the present invention, in step S5, the expression of the detection formula is as follows:
Figure BDA0002885457100000063
where K is the number of frequencies of the current flowing through the coil detected in step S2.
According to the method for rapidly detecting the thickness and the conductivity of the ultra-thin metal coating, in step S5, the preset algorithm is a Levenberg-Marquardt algorithm. Specifically, a vector X satisfying the set accuracy can be obtained by the Levenberg-Marquardt algorithm.
Further, for fast measurement of a multi-coated conductor plate, for example, a conductor plate with k coatings and a (k +1) th layer as a base layer, it is only necessary to change the measured parameter vector into X ═ σ1,L,σk+1,d1,L,dk) The second preset formula in step S4 is set as:
Figure BDA0002885457100000064
wherein the wave number
Figure BDA0002885457100000065
Characteristic impedance
Figure BDA0002885457100000066
Further, the comparison of the measurement results of the ultra-thin metal coating thickness and conductivity rapid detection method of the present invention on single-layer and double-layer coating flat plates is specifically set forth in table 1, as shown in table 1:
table 1
Figure BDA0002885457100000067
Figure BDA0002885457100000071
Further, in a specific embodiment, the parameters of the single-coated conductor plate with the coating layer of pure Ti and the base layer of TiAl6V4 alloy and the double-coated conductor plate with the top coating layer of pure Ti, the middle coating layer of Cu-Ni alloy and the base layer of 304 stainless steel are tested. Further, the detection coil is a PCB coil, and the parameters are as follows: height h 35 μm, inner radius r12.00mm, outer radius r24.70mm, and 14 turns. IntoIn one step, the conductivity values of the two reference plates M and N are respectively sigmaM＝0.65MS/m，σNThe thickness of the non-conductor flat plate L is 2.16MS/m, the thickness of the non-conductor flat plate L is 22 μm, and the thickness of the reference plate and the measured plate is about 3 mm.
Furthermore, the relative errors of the measurement of each parameter of the single coating are less than 8%, the relative errors of the double coatings are less than 18%, and the parameter detection time is less than 1 s. The parameter detection time does not include the time of step S1 and step S2. Therefore, the method can be obtained, the detection accuracy meets the industrial measurement requirement (lower than 20%) in the prior art, and the method has the advantage of higher detection speed.
Further, with reference to fig. 3 and 4, the method for rapidly detecting the thickness and conductivity of the ultra-thin metal coating according to the present invention is described in detail as follows:
firstly, a detection coil is placed on a semi-infinite conductor flat plate, and when the outer radius r of the detection coil is larger than the outer radius r of the semi-infinite conductor flat plate2Is far greater than the penetration depth delta, r, of the electromagnetic field generated by the electrified coil on the conductor plate2>>At 5 δ, the electromagnetic wave on the surface of the conductor can be approximated to a planar electromagnetic wave. Thus, the planar electromagnetic wave at any point on the surface of the conductor plate is utilized
Figure BDA0002885457100000072
H＝(H r0,0), the wave impedance is:
Figure BDA0002885457100000073
where ω is 2 pi f, and f is the frequency of the current in the coil; σ is the conductivity of the conductor plate, μ0＝4π×10-7H/m. Further, when the coil is lifted off z1With a slight change Δ l, z1→z1+ Δ l, origin of coordinates O → O ', wave impedance Z ' (0) → Z ' (- Δ l). In a coordinate system taking O' as an origin, according to the characteristics of the plane wave, the method can obtain
Figure BDA0002885457100000074
Further, Re [ Z '(- Δ l) -Z' (0) ] -0 was obtained.
Further, as shown in FIG. 4, when the thickness d of the measured object becomes the coating thickness1Coating conductivity σ1Base layer conductivity σ2When the conductor plate has a surface wave impedance of
Figure BDA0002885457100000081
Therefore, compared with the traditional technology, the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating has the advantages of higher detection speed, higher accuracy and higher sensitivity on the metal coating.
In conclusion, according to the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, the detection speed of the metal coating is higher, and the accuracy and the sensitivity are higher.
The invention also provides a system for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, and the system adopts the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating, so that the system has the advantages of higher detection speed, higher accuracy and sensitivity and the like on the metal coating.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (7)

1. A method for rapidly detecting the thickness and the conductivity of an ultrathin metal coating is characterized by comprising the following steps:
s1, disposing the detection coils at a plurality of predetermined positions;
s2, sinusoidal currents with a plurality of frequencies are added into the detection coils respectively to obtain a plurality of impedance values corresponding to preset positions;
s3, converting the impedance value through a first preset formula to obtain a normalized impedance measurement value;
s4, generating a plurality of wave impedance theoretical values corresponding to the detection coils according to the wave impedance theoretical expression, and converting the wave impedance theoretical values through a second preset formula to obtain normalized wave impedance theoretical values;
s5, constructing a detection formula according to the normalized impedance measurement value and the normalized wave impedance theoretical value, and calculating a plurality of parameter values corresponding to the detection formula at the minimum value through a preset algorithm;
the expression of the first preset formula is as follows:
Figure FDA0003496393200000011
wherein f denotes the frequency of the sinusoidal current, P*(f) Representing a normalized impedance measurement, ZM(f)、Z′N(f) And ZT' (f) indicates impedance values corresponding to points M, N ' and T ' in the impedance plane coordinate system;
the theoretical expression of wave impedance is:
Figure FDA0003496393200000012
wherein Z'M(f) Z 'represents a theoretical value of wave impedance corresponding to the first plate conductor M'N(f) Indicating that the second plate conductor N correspondsTheoretical value of wave impedance, σMRepresenting the conductivity, σ, of the first plate conductor MNDenotes the conductivity, μ, of the second plate conductor N0＝4π×10-7H/m；
The second preset formula expression is as follows:
Figure FDA0003496393200000013
wherein sigma1Indicates the coating conductivity, σ, of the third plate conductor T2The base conductor conductivity of the third plate conductor T is shown.
2. The method for rapidly detecting the thickness and conductivity of the ultra-thin metal coating according to claim 1, wherein in step S1, the plurality of predetermined locations comprises: above the first plate conductor M, above the second plate conductor N, above the third plate conductor T and above the first plate conductor M covered with the non-conductor plate L, wherein the third plate conductor T is provided with a metal coating.
3. The method for rapidly detecting the thickness and conductivity of ultra-thin metal coating as claimed in claim 2, wherein the real part of impedance value corresponds to resistance, the imaginary part of impedance value corresponds to reactance, and the impedance plane coordinate system is constructed by the resistance and the reactance in step S2.
4. The method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating as claimed in claim 1, wherein the expression of the normalized wave impedance theoretical value is as follows:
Figure FDA0003496393200000021
5. the method for rapidly detecting the thickness and the conductivity of the ultra-thin metal coating according to claim 4, wherein in step S5, the expression of the detection formula is as follows:
Figure FDA0003496393200000022
where K is the number of frequencies of the current flowing through the coil detected in step S2.
6. The method for rapidly detecting the thickness and the conductivity of the ultra-thin metal coating according to claim 5, wherein the preset algorithm is a Levenberg-Marquardt algorithm in step S5.
7. A system for rapidly detecting the thickness and the conductivity of an ultrathin metal coating, which is characterized in that the method for rapidly detecting the thickness and the conductivity of the ultrathin metal coating according to any one of claims 1 to 6 is adopted.
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