CN112879295B - Vacuum pumping device - Google Patents

Vacuum pumping device Download PDF

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Publication number
CN112879295B
CN112879295B CN202110087290.8A CN202110087290A CN112879295B CN 112879295 B CN112879295 B CN 112879295B CN 202110087290 A CN202110087290 A CN 202110087290A CN 112879295 B CN112879295 B CN 112879295B
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China
Prior art keywords
oil
pipeline
port
valve
vacuumizing
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CN202110087290.8A
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Chinese (zh)
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CN112879295A (en
Inventor
肖小万
蔡力
潘科
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Chongqing Kaishan Fluid Machinery Co ltd
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Chongqing Kaishan Fluid Machinery Co ltd
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Priority to CN202110087290.8A priority Critical patent/CN112879295B/en
Publication of CN112879295A publication Critical patent/CN112879295A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • F04C29/021Control systems for the circulation of the lubricant
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • F04C29/026Lubricant separation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06Silencing

Abstract

The utility model provides an evacuating device, including the evacuation aircraft nose, oil-gas separation jar, the multiple-way solenoid valve, it is first, the second, the third, the fourth pipeline, flow control valve, the evacuation aircraft nose passes through oil piping system and links to each other with oil-gas separation jar, and link to each other with oil-gas separation jar through the air duct, flow control valve's downstream end is connected with the air inlet of evacuation aircraft nose, the one end of first pipeline links to each other with the A port of multiple-way solenoid valve, the other end links to each other with flow control valve control mechanism, the one end of second pipeline links to each other with the B port of multiple-way solenoid valve, the other end and air inlet intercommunication, the one end of third pipeline links to each other with the C port of multiple-way solenoid valve, the other end is with the interior empty intercommunication of the separation core of oil-gas separation jar, the one end of fourth pipeline links to each other with flow control valve's upstream end, the other end and second tube coupling, set up first check valve on this fourth pipeline. The invention has simple structure and low operation cost, can effectively avoid foreign matters from entering the system and ensures the long-time normal operation of the system.

Description

Vacuum pumping device
Technical Field
The invention relates to the field of vacuum equipment, in particular to a vacuumizing device.
Background
The vacuumizing device is widely applied to various industries and is used for vacuumizing a vacuumizing target source to form negative pressure.
As shown in the chinese invention CN201920639288.5, a machine head of the vacuum pumping device is connected to an air inlet through a normally closed air inlet valve, and the air inlet is used for pumping air to a target source to form negative pressure. And a control cylinder of the normally closed air inlet valve is connected with the atmospheric pressure through a normally open electromagnetic valve. When the normally open electromagnetic valve is closed, the air pressure in the control cylinder is reduced, a valve plate of the normally closed air inlet valve is separated from a valve seat of the normally closed air inlet valve, the air inlet is opened, the target source is connected with the machine head, and the air is pumped to the target source to form negative pressure; when the normally open electromagnetic valve is in an open state, the air pressure in the air cylinder is controlled to be atmospheric pressure, the valve plate of the normally closed air inlet valve is movably pressed on the valve seat of the normally closed air inlet valve, the air inlet is closed, and the connection between the target source and the machine head is disconnected.
However, in the vacuum-pumping device of this type, the normally closed air inlet valve is connected to the atmosphere through the normally open electromagnetic valve, and even if a filter is provided, there is still a risk that foreign matters such as dust and vapor enter the normally closed air inlet valve, which makes it difficult to ensure the service life of the vacuum-pumping device.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a vacuumizing device which is simple in structure and low in operation cost, can effectively prevent foreign matters from entering a system and ensures long-time normal operation of the system.
The technical scheme of the invention is as follows: the utility model provides an evacuating device, includes evacuation aircraft nose, oil-gas separation jar, multi-way solenoid valve, first pipeline, second pipeline, third pipeline, fourth pipeline, flow control valve, the evacuation aircraft nose passes through oil piping system and links to each other with the oil-gas separation jar, and the evacuation aircraft nose passes through the air duct and links to each other with the oil-gas separation jar, flow control valve's downstream end is connected with the air inlet of evacuation aircraft nose, and flow control valve's upstream end is used for being connected with the evacuation target source, the one end of first pipeline links to each other with the A port of multi-way solenoid valve, and the other end links to each other with the control mechanism of flow control valve, the one end of second pipeline links to each other with the B port of multi-way solenoid valve, and the other end communicates with the air inlet of evacuation aircraft nose, the one end of third pipeline links to each other with the C port of multi-way solenoid valve, and the other end is connected with the separation core's of oil-gas separation jar sky, the one end of fourth pipeline links to each other with the upstream end of flow control valve, and the second pipeline is connected, sets up a check valve on this fourth pipeline.
The oil-gas separation device is characterized by further comprising a fifth pipeline, wherein one end of the fifth pipeline is communicated with a machine cavity of the vacuumizing machine head, and the other end of the fifth pipeline is communicated with the inner space of the oil-gas separation tank and is positioned above the oil level.
The oil circuit system comprises an oil guide pipe and an oil return pipe, one end of the oil guide pipe is connected with the vacuumizing machine head, the other end of the oil guide pipe is communicated with the inside of the oil-gas separation tank, a second one-way valve is arranged on the oil guide pipe, one end of the oil return pipe is connected with the oil-gas separation tank and located below the liquid level, and the other end of the oil return pipe is connected with the vacuumizing machine head.
And the oil return pipe is provided with a temperature control valve and an oil filter.
The flow regulating valve is a pneumatic regulating valve.
The multi-way electromagnetic valve is a three-way electromagnetic valve.
Adopt above-mentioned technical scheme to have following beneficial effect:
1. the vacuumizing device comprises a vacuumizing machine head, an oil-gas separation tank, a multi-way electromagnetic valve, a first pipeline, a second pipeline, a third pipeline, a fourth pipeline, a fifth pipeline and a flow regulating valve. The vacuumizing machine head is connected with the oil-gas separation tank through an oil circuit system, is connected with the oil-gas separation tank through an air guide pipe, is used for providing vacuum and is matched with the oil-gas separation tank to separate oil from gas and return oil for recycling. The downstream end of the flow regulating valve is connected with an air inlet of the vacuumizing machine head, and the upstream end of the flow regulating valve is used for being connected with the vacuumizing target source, namely, the vacuumizing target source and the vacuumizing machine head are linearly communicated from disconnection by controlling the opening degree of the flow regulating valve, so that the linear vacuumizing of the vacuumizing target source is realized. One end of the first pipeline is connected with an A port of the multi-way electromagnetic valve, the other end of the first pipeline is connected with a control mechanism of the flow regulating valve, one end of the second pipeline is connected with a B port of the multi-way electromagnetic valve, the other end of the second pipeline is communicated with an air inlet of the vacuumizing machine head, one end of the third pipeline is connected with a C port of the multi-way electromagnetic valve, the other end of the third pipeline is communicated with the inside of a separating core of the oil-gas separating tank, namely, the A port of the multi-way electromagnetic valve corresponds to the air pressure of the control mechanism of the flow regulating valve, the B port adapts to the air pressure of the air inlet of the vacuumizing machine head, the C port adapts to the inside air pressure (atmospheric pressure) of the separating core of the oil-gas separating tank, and the A port, the B port and the C port of the multi-way electromagnetic valve are not directly communicated with the atmosphere or communicated with the atmosphere through a filter. Under a normal state, controlling the communication of a port B and a port C of the multi-way electromagnetic valve to ensure that an air inlet of the vacuumizing machine head is communicated with the inner space of a separation core of the oil-gas separation tank, keeping the pressure of a control mechanism of the flow regulating valve in a closed state without changing, circulating air flow between the vacuumizing machine head and the oil-gas separation tank, and ensuring that the vacuumizing device is in a standby state due to small load of the vacuumizing machine head; when the vacuumizing target source needs to be vacuumized to form negative pressure, the port A and the port B of the multi-way electromagnetic valve are controlled to be communicated, the port A and the port B have pressure difference, the control mechanism of the flow regulating valve forms driving force, the flow regulating valve is driven to be opened, the purpose that the vacuumizing head is controlled to vacuumize the vacuumizing target source to form the negative pressure is achieved, the connecting opening degree between the port A and the port B of the multi-way electromagnetic valve can be controlled, the opening degree of the flow regulating valve is controlled, the purpose that the vacuum degree of the vacuumizing target source is controlled by wires is achieved, and the actual requirements of enterprises can be effectively met. One end of the fourth pipeline is connected with the upstream end of the flow regulating valve, the other end of the fourth pipeline is connected with the second pipeline, a first one-way valve is arranged on the fourth pipeline, when the multi-way electromagnetic valve breaks down, the load of the vacuumizing machine head is too large, and when the load exceeds a threshold value, the first one-way valve is opened, the vacuumizing machine head directly vacuumizes the vacuumizing target source through the fourth pipeline to form negative pressure, the overload of the vacuumizing machine head is avoided, and the normal operation of the vacuumizing device can be effectively guaranteed.
2. Still include the fifth pipeline, the one end of fifth pipeline and the machine cavity intercommunication of evacuation aircraft nose, the other end and oil-gas separation jar's interior empty intercommunication, be located the top of oil level, be in the low vacuum (bleed earlier stage) when the evacuation aircraft nose, the evacuation aircraft nose exhales to oil-gas separation jar through the fifth pipeline, can effectively avoid the evacuation aircraft nose to compress excessively, reach energy-conserving purpose, be in the high vacuum (the later stage of bleeding) when the evacuation aircraft nose, the oil-gas mixture in the oil-gas separation jar admits air to the evacuation aircraft nose, avoid the evacuation aircraft nose vibration to appear, the trouble of noise increase, in addition, still can avoid external air and oil-gas mixture to mix, avoid external impurity to get into evacuating device, make evacuating device's adaptability wider.
The following further description is made with reference to the accompanying drawings and detailed description.
Drawings
FIG. 1 is a schematic view of the present invention.
In the attached drawing, 1 is the first pipeline, 2 is the second pipeline, 3 is the third pipeline, 4 is the fourth pipeline, 5 is the evacuation aircraft nose, 6 is the oil-gas separation jar, 7 is the multi-ported solenoid valve, 8 is flow control valve, 9 is oil piping, 10 is the air duct, 11 is first check valve, 12 is the fifth pipeline, 13 is leading oil pipe, 14 is returning oil pipe, 15 is the second check valve.
Detailed Description
Referring to fig. 1, a specific embodiment of a vacuum pumping apparatus is shown. The vacuumizing device comprises a vacuumizing machine head 5, an oil-gas separation tank 6, a multi-way electromagnetic valve 7, a first pipeline 1, a second pipeline 2, a third pipeline 3, a fourth pipeline 4 and a flow regulating valve 8, wherein the vacuumizing machine head and the oil-gas separation tank are conventional equipment or devices, the vacuumizing machine head is an oil injection screw type vacuum pump machine head and serves as a power input source through a motor, the oil injection screw type vacuum pump machine head is driven to operate, the multi-way electromagnetic valve selects a three-way electromagnetic valve, and the flow regulating valve selects a pneumatic regulating valve. The vacuumizing machine head 5 is connected with the oil-gas separation tank 6 through an oil circuit system 9, the vacuumizing machine head 5 is connected with the oil-gas separation tank 6 through an air guide pipe 10, the connecting modes are conventional connecting modes of an oil injection screw type vacuum pump machine head and the oil-gas separation tank, concretely, the oil circuit system 9 comprises an oil guide pipe 13 and an oil return pipe 14, one end of the oil guide pipe 13 is connected with the vacuumizing machine head 5, the other end of the oil guide pipe is communicated with the inner space of the oil-gas separation tank 6, a second one-way valve 15 is arranged on the oil guide pipe 13, one end of the oil return pipe 14 is connected with the oil-gas separation tank 6 and is located below the liquid level, the other end of the oil guide pipe is connected with the vacuumizing machine head 5, and a temperature control valve and an oil filter are arranged on the oil return pipe 14. The downstream end of the flow control valve 8 is connected with the air inlet of the vacuumizing machine head 5, the upstream end of the flow control valve 8 is used for being connected with a vacuumizing target source, and generally, an air inlet filter needs to be arranged at the upstream end of the flow control valve, so that foreign matters of the vacuumizing target source are prevented from being sucked into the vacuumizing machine head, and the normal operation of the vacuumizing machine head is guaranteed. One end of the first pipeline 1 is connected with an A port of the multi-way electromagnetic valve 7, the other end of the first pipeline is connected with a control mechanism of the flow regulating valve 8, one end of the second pipeline 2 is connected with a B port of the multi-way electromagnetic valve 7, the other end of the second pipeline is communicated with an air inlet of the vacuumizing machine head 5, one end of the third pipeline 3 is connected with a C port of the multi-way electromagnetic valve 7, and the other end of the third pipeline is communicated with the inner space of a separating core of the oil-gas separating tank 6. In order to ensure safety, a fourth pipeline is further provided, one end of the fourth pipeline 4 is connected with the upstream end of the flow regulating valve 8, specifically, one end of the fourth pipeline is located between the air inlet filter and the flow regulating valve, the other end of the fourth pipeline is connected with the second pipeline 2, and a first check valve 11 is arranged on the fourth pipeline 4. Furthermore, a fifth pipeline 12 is further arranged, one end of the fifth pipeline 12 is communicated with the cavity of the vacuumizing machine head 5, and the other end of the fifth pipeline 12 is communicated with the inside of the oil-gas separation tank 6 and is positioned above the oil level.
The working principle of the invention is that the device is connected with a vacuumizing target source through an air inlet filter, a vacuumizing machine head is driven to operate through a motor, a port B and a port C are communicated through a three-way electromagnetic valve, an oil-gas mixture sprayed by the vacuumizing machine head enters an inner cavity of an oil-gas separation tank through an air duct and is subjected to oil-gas separation, gas in the oil-gas separation tank is partially discharged through an air outlet of the oil-gas separation tank, partial gas returns to the vacuumizing machine head through a third pipeline and a second pipeline, mixed oil is collected to the bottom of the oil-gas separation tank, the sprayed oil enters the oil-gas separation tank through an oil guide pipe and is collected to the bottom of the oil-gas separation tank, and the oil returns to the vacuumizing machine head through a return pipe to form circulation. When the vacuumizing target source needs to be vacuumized to form negative pressure, the port A is controlled to be communicated with the port B through the three-way electromagnetic valve, the communication degree of the port A and the port B is controlled according to actual requirements, pressure difference exists between the port A and the port B, the control mechanism of the flow regulating valve forms driving force to drive the flow regulating valve to be opened, the opening degree of the flow regulating valve is related to the communication degree of the port A and the port B, the purpose that the upstream end of the flow regulating valve is communicated with the vacuumizing machine head is achieved, the vacuumizing target source is vacuumized to form negative pressure, the purpose that the vacuum degree of the vacuumizing target source is controlled by wire control can be achieved, and the actual requirements of enterprises can be effectively met. When the multi-way electromagnetic valve breaks down, the load of the vacuumizing machine head is too large, and when the load exceeds a threshold value, the first check valve is opened, the vacuumizing machine head directly vacuumizes the vacuumizing target source through the fourth pipeline to form negative pressure, the phenomenon that the load of the vacuumizing machine head is too large is avoided, and the normal operation of the vacuumizing device can be effectively guaranteed.

Claims (6)

1. An evacuating device, characterized in that: comprises a vacuumizing machine head (5), an oil-gas separation tank (6), a multi-way electromagnetic valve (7), a first pipeline (1), a second pipeline (2), a third pipeline (3), a fourth pipeline (4) and a flow regulating valve (8),
the vacuumizing machine head (5) is connected with the oil-gas separation tank (6) through an oil circuit system (9), the vacuumizing machine head (5) is connected with the oil-gas separation tank (6) through an air duct (10),
the downstream end of the flow regulating valve (8) is connected with the air inlet of the vacuumizing machine head (5), the upstream end of the flow regulating valve (8) is used for being connected with a vacuumizing target source,
one end of the first pipeline (1) is connected with an A port of the multi-way electromagnetic valve (7), the other end is connected with a control mechanism of the flow regulating valve (8),
one end of the second pipeline (2) is connected with the port B of the multi-way electromagnetic valve (7), the other end is communicated with the air inlet of the vacuumizing machine head (5),
one end of the third pipeline (3) is connected with the port C of the multi-way electromagnetic valve (7), the other end is communicated with the inner space of the separating core of the oil-gas separating tank (6),
controlling the communication of the port B and the port C of the multi-way electromagnetic valve to ensure that an air inlet of the vacuumizing machine head is communicated with the inner space of a separation core of an oil-gas separation tank, keeping the pressure of a control mechanism of the flow regulating valve in a closed state, circulating air flow between the vacuumizing machine head and the oil-gas separation tank, controlling the port A and the port B of the multi-way electromagnetic valve to be communicated, controlling the port A and the port B to have pressure difference, forming driving force for a control mechanism of the flow regulating valve to drive the flow regulating valve to be opened, realizing the purpose of controlling the vacuumizing machine head to vacuumize a vacuumizing target source to form negative pressure, controlling the opening of the flow regulating valve by controlling the connecting opening between the port A and the port B of the multi-way electromagnetic valve, and realizing the linear control of the vacuum degree of the vacuumizing target source,
one end of the fourth pipeline (4) is connected with the upstream end of the flow regulating valve (8), the other end of the fourth pipeline is connected with the second pipeline (2), and a first one-way valve (11) is arranged on the fourth pipeline (4).
2. The evacuation device of claim 1, wherein: the oil-gas separator further comprises a fifth pipeline (12), one end of the fifth pipeline (12) is communicated with the machine cavity of the vacuumizing machine head (5), and the other end of the fifth pipeline is communicated with the inner space of the oil-gas separation tank (6) and is located above the oil level.
3. The evacuation device of claim 1, wherein: oil piping system (9) are including leading oil pipe (13), returning oil pipe (14), the one end of leading oil pipe (13) is connected with evacuation aircraft nose (5), and the other end and the interior sky intercommunication of oil-gas separation jar (6), should lead and be equipped with second check valve (15) on oil pipe (13), the one end and the oil-gas separation jar (6) of returning oil pipe (14) are connected, are located the below of liquid level, and the other end is connected with evacuation aircraft nose (5).
4. The evacuation device of claim 3, wherein: and a temperature control valve and an oil filter are arranged on the oil return pipe (14).
5. The evacuation device of claim 1, wherein: the flow regulating valve (8) is a pneumatic regulating valve.
6. The evacuation device of claim 1, wherein: the multi-way electromagnetic valve (7) is a three-way electromagnetic valve.
CN202110087290.8A 2021-01-22 2021-01-22 Vacuum pumping device Active CN112879295B (en)

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Application Number Priority Date Filing Date Title
CN202110087290.8A CN112879295B (en) 2021-01-22 2021-01-22 Vacuum pumping device

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Application Number Priority Date Filing Date Title
CN202110087290.8A CN112879295B (en) 2021-01-22 2021-01-22 Vacuum pumping device

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CN112879295B true CN112879295B (en) 2023-03-14

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6357890A (en) * 1986-08-28 1988-03-12 Hokuetsu Kogyo Co Ltd Control device for rotary compressor
CN102654118A (en) * 2012-05-06 2012-09-05 江苏有能电力自动化有限公司 Vacuumizing device of expansion type oil-gas separation pipeline
CN103398009A (en) * 2013-07-16 2013-11-20 深圳寿力亚洲实业有限公司 Vacuum pump and air pumping adjustment system thereof
CN204827931U (en) * 2015-07-31 2015-12-02 济南压缩机厂有限公司 Vacuum control device is prevented to screw rod host computer
CN111279078A (en) * 2017-11-09 2020-06-12 株式会社神户制钢所 Air compressor and control method thereof
CN214464897U (en) * 2021-01-22 2021-10-22 重庆开山流体机械有限公司 Vacuum pumping device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6357890A (en) * 1986-08-28 1988-03-12 Hokuetsu Kogyo Co Ltd Control device for rotary compressor
CN102654118A (en) * 2012-05-06 2012-09-05 江苏有能电力自动化有限公司 Vacuumizing device of expansion type oil-gas separation pipeline
CN103398009A (en) * 2013-07-16 2013-11-20 深圳寿力亚洲实业有限公司 Vacuum pump and air pumping adjustment system thereof
CN204827931U (en) * 2015-07-31 2015-12-02 济南压缩机厂有限公司 Vacuum control device is prevented to screw rod host computer
CN111279078A (en) * 2017-11-09 2020-06-12 株式会社神户制钢所 Air compressor and control method thereof
CN214464897U (en) * 2021-01-22 2021-10-22 重庆开山流体机械有限公司 Vacuum pumping device

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