CN112859452A - Display substrate, manufacturing method thereof, display panel and display device - Google Patents
Display substrate, manufacturing method thereof, display panel and display device Download PDFInfo
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- CN112859452A CN112859452A CN202110209399.4A CN202110209399A CN112859452A CN 112859452 A CN112859452 A CN 112859452A CN 202110209399 A CN202110209399 A CN 202110209399A CN 112859452 A CN112859452 A CN 112859452A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a display substrate, a manufacturing method of the display substrate, a display panel and a display device, and belongs to the technical field of display. The manufacturing method of the display substrate comprises the following steps: providing a driving substrate; forming a flat layer on the driving substrate, wherein the flat layer comprises a plurality of grooves arranged in an array; forming a spacer material layer on the planarization layer; exposing the spacer material layer by using a mask plate, wherein the mask plate comprises a first graph and a second graph except the first graph, the first graph is selected from one of a light-transmitting graph and a light-proof graph, the second graph is selected from the other of the light-transmitting graph and the light-proof graph, and the orthographic projection of the first graph on the driving substrate is superposed with the groove part; and forming a first spacer and a second spacer after development, wherein the first spacer is positioned in the groove, the second spacer is positioned outside the groove, and the horizontal height of the first spacer is different from that of the second spacer. The invention can improve the display quality of the display panel and reduce the production cost of the display panel.
Description
Technical Field
The invention relates to the technical field of display, in particular to a display substrate, a manufacturing method of the display substrate, a display panel and a display device.
Background
In order to maintain the thickness of a liquid crystal box and ensure LC Margin of a thin film transistor liquid crystal display panel (TFT-LCD), spacers with two different heights need to be arranged. Meanwhile, in order to simplify the process flow and reduce the number of masks (patterning process), a Main spacer (Main PS) and a Sub spacer (Sub PS) are generally manufactured by using a gray-tone Mask or a halftone Mask, but the uniformity of the Sub PS manufactured by the method is difficult to control, and the manufacturing cost is high.
Disclosure of Invention
The invention provides a display substrate, a manufacturing method thereof, a display panel and a display device, which can improve the display quality of the display panel and reduce the production cost of the display panel.
To solve the above technical problem, embodiments of the present invention provide the following technical solutions:
in one aspect, a method for manufacturing a display substrate is provided, including:
providing a driving substrate;
forming a flat layer on the driving substrate, wherein the flat layer comprises a plurality of grooves arranged in an array;
forming a spacer material layer on the planarization layer;
exposing the spacer material layer by using a mask plate, wherein the mask plate comprises a first pattern and a second pattern, the first pattern is used for forming a spacer, the second pattern is except for the first pattern, the first pattern is selected from one of a light-transmitting pattern and a light-tight pattern, the second pattern is selected from the other of the light-transmitting pattern and the light-tight pattern, and the orthographic projection of the first pattern on the driving substrate is superposed with the groove part;
and forming a first spacer and a second spacer after development, wherein the first spacer is positioned in the groove, the second spacer is positioned outside the groove, and the horizontal height of the first spacer is different from that of the second spacer.
In some embodiments, before forming a planarization layer on the driving substrate, the method further comprises:
forming a color filter layer on the driving substrate;
forming the planarization layer includes:
and forming a flat layer covering the color filter layer.
In some embodiments, the depth of the recess is equal to the thickness of the planar layer.
In some embodiments, forming the planarization layer comprises:
forming a planarization material layer on the driving substrate;
and patterning the planarization material layer to form a planarization material layer reserved area and a planarization material layer removing area, wherein the planarization material layer removing area forms the groove.
An embodiment of the present invention provides a display substrate, including:
a drive substrate;
the flat layer is positioned on the driving substrate and comprises a plurality of grooves arranged in an array manner;
the first shock insulator and the second shock insulator are positioned on the flat layer, the first shock insulator is positioned in the groove, the second shock insulator is positioned outside the groove, and the horizontal height of the first shock insulator is different from that of the second shock insulator.
In some embodiments, further comprising:
a color filter layer on the driving substrate;
the flat layer is positioned on one side of the color filter layer away from the driving substrate;
or
The color filter layer is multiplexed as the planarization layer.
In some embodiments, the depth of the recess is equal to the thickness of the planar layer.
In some embodiments, the first and second spacers are spaced apart.
An embodiment of the present invention provides a display panel, including the display substrate as described above and an opposite substrate disposed opposite to the display substrate, wherein a black matrix is disposed on the opposite substrate, and orthographic projections of the first spacer and the second spacer on the opposite substrate fall into the black matrix.
An embodiment of the present invention provides a display device including the display panel as described above.
The embodiment of the invention has the following beneficial effects:
in the above scheme, through forming the recess on the flat layer, make first shock insulator and second shock insulator through ordinary mask plate on the flat layer, because the position difference of first shock insulator and second shock insulator, first shock insulator is located the recess, the second shock insulator is located outside the recess, thereby make first shock insulator and second shock insulator have the level difference, form the shock insulator of co-altitude, this embodiment adopts ordinary mask plate to replace grey tone mask plate or half tone mask plate to make the first shock insulator and the second shock insulator of co-altitude, can guarantee the homogeneity of shock insulator, reduce the manufacturing cost of display substrates simultaneously.
Drawings
FIG. 1 is a schematic cross-sectional view of a display panel according to an embodiment of the present invention;
fig. 2 is a schematic plan view of a display substrate according to an embodiment of the invention.
Reference numerals
1 substrate base plate
2 thin film transistor array layer
31 red filter unit
32 green filter unit
33 blue filter unit
4 flat layer
51 first spacer
52 second spacer
6 substrate base plate
7 black matrix
8 flat layer
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.
Embodiments of the present invention provide a display substrate, a manufacturing method thereof, a display panel, and a display device, which can improve display quality of the display panel and reduce production cost of the display panel.
The embodiment of the invention provides a manufacturing method of a display substrate, which comprises the following steps:
providing a driving substrate;
forming a flat layer on the driving substrate, wherein the flat layer comprises a plurality of grooves arranged in an array;
forming a spacer material layer on the planarization layer;
exposing the spacer material layer by using a mask plate, wherein the mask plate comprises a first pattern and a second pattern, the first pattern is used for forming a spacer, the second pattern is except for the first pattern, the first pattern is selected from one of a light-transmitting pattern and a light-tight pattern, the second pattern is selected from the other of the light-transmitting pattern and the light-tight pattern, and the orthographic projection of the first pattern on the driving substrate is superposed with the groove part;
and forming a first spacer and a second spacer after development, wherein the first spacer is positioned in the groove, the second spacer is positioned outside the groove, and the horizontal height of the first spacer is different from that of the second spacer.
In this embodiment, the grooves are formed in the flat layer, and the first spacer and the second spacer are made on the flat layer through a common mask plate, because of the position difference between the first spacer and the second spacer, the first spacer is located in the grooves, and the second spacer is located outside the grooves, so that the first spacer and the second spacer have a horizontal height difference to form spacers of different heights.
The spacer material layer can be made of negative photosensitive material or positive photosensitive material.
If the spacer material layer adopts a negative photosensitive material, the first graph is a light-transmitting graph, the second graph is a light-tight graph, the orthographic projection of part of the first graph on the driving substrate is superposed with the groove, and after development, the part of the spacer material layer corresponding to the first graph is reserved to form a spacer; part of the shock insulator is positioned in the groove to form a first shock insulator, and part of the shock insulator is positioned outside the groove to form a second shock insulator; the thickness of the spacer material layer in different areas is basically equal, the thickness of the spacer is also basically equal, but the first spacer is positioned in the groove, the second spacer is positioned outside the groove, so that the horizontal heights of the first spacer and the second spacer are different, wherein the horizontal height of the first spacer can be measured by the distance between the surface of one side of the first spacer, which is far away from the driving substrate, and the surface of one side of the driving substrate, which is far away from the first spacer, and the horizontal height of the second spacer can be measured by the distance between the surface of one side of the second spacer, which is far away from the driving substrate, and the surface of one side of the driving substrate, which is far away from the second spacer.
If the spacer material layer adopts a positive photosensitive material, the first graph is an opaque graph, the second graph is a transparent graph, the orthographic projection of part of the first graph on the driving substrate is superposed with the groove, and after development, the part of the spacer material layer corresponding to the first graph is reserved to form a spacer; part of the shock insulator is positioned in the groove to form a first shock insulator, and part of the shock insulator is positioned outside the groove to form a second shock insulator; the thickness of the spacer material layer in different areas is basically equal, the thickness of the spacer is also basically equal, but the first spacer is positioned in the groove, the second spacer is positioned outside the groove, so that the horizontal heights of the first spacer and the second spacer are different, wherein the horizontal height of the first spacer can be measured by the distance between the surface of one side of the first spacer, which is far away from the driving substrate, and the surface of one side of the driving substrate, which is far away from the first spacer, and the horizontal height of the second spacer can be measured by the distance between the surface of one side of the second spacer, which is far away from the driving substrate, and the surface of one side of the driving substrate, which is far away from the second spacer.
As shown in fig. 1, the driving substrate includes a substrate 1 and a thin film transistor array layer 2 on the substrate 1, and a flat layer covers the thin film transistor array layer 2 and can provide a flat surface for forming spacers. The thickness of the flat layer can be 2-8um, can satisfy the requirement of the level difference of first shock insulator and second shock insulator, can adjust the level difference of first shock insulator and second shock insulator through the degree of depth of adjustment recess.
The thin film transistor array layer 2 includes a plurality of thin film transistors arranged in an array, a wire for driving the thin film transistors to work, and the like, and the thin film transistor array layer 2 may include a gate insulating layer, a gate metal layer, a source drain metal layer, an interlayer insulating layer, a passivation layer, an electrode layer, and the like, which are not described herein again.
In this embodiment, as shown in fig. 1, the first spacers 51 and the second spacers 52 are arranged at intervals, so that the first spacers 51 and the second spacers 52 are uniformly arranged on the substrate, the liquid crystal cell thickness is effectively maintained, and the liquid crystal margin is ensured. The first spacers 51 and the second spacers 52 may be arranged at intervals in the row direction, that is, the first spacer 51 columns and the second spacer 52 columns are arranged at intervals; or may be arranged at intervals in the column direction, that is, the first spacers 51 and the second spacers 52 are arranged at intervals; the spacers may be arranged at intervals in the row direction and the column direction, that is, the spacers closest to the first spacers 51 are all the second spacers 52, and the spacers closest to the second spacers 52 are all the first spacers 51.
In some embodiments, before forming a planarization layer on the driving substrate, the method further comprises:
forming a color filter layer on the driving substrate;
forming the planarization layer includes:
and forming a flat layer covering the color filter layer.
In this embodiment, a color filter layer may be further formed on the driving substrate, and the color filter layer is helpful to improve the flatness of the driving substrate. The color filter layer can be reused as the flat layer, so that the structure and the manufacturing process of the display substrate can be simplified, and the production cost is reduced.
In some embodiments, the depth of the recess may be equal to the thickness of the planar layer. Of course, the depth of the groove is not limited to be equal to the thickness of the flat layer, but may be smaller than the thickness of the flat layer.
In some embodiments, the forming a planarization layer comprises:
forming a planarization material layer on the driving substrate;
and patterning the planarization material layer to form a planarization material layer reserved area and a planarization material layer removing area, wherein the planarization material layer removing area forms the groove.
If the depth of the groove is equal to the thickness of the flat layer, after the flat material layer is formed, exposing the flat material layer by using a common mask plate, and after development, forming a flat material layer removing area and a flat material layer reserving area, wherein the flat material layer removing area can be used as the groove. The production cost can be reduced by using a common mask plate to perform a composition process.
As shown in fig. 2, a plurality of grooves 8 are formed on the display substrate, the first spacer 51 is positioned inside the grooves 8, and the second spacer 52 is positioned outside the grooves, such that the first spacer 51 and the second spacer 51 have a level difference. In order not to affect the display, the groove 8 may be disposed between adjacent pixel regions, and the first spacer 51 and the second spacer 51 are also disposed between the adjacent pixel regions.
An embodiment of the present invention provides a display substrate, including:
a drive substrate;
the flat layer is positioned on the driving substrate and comprises a plurality of grooves arranged in an array manner;
the first shock insulator and the second shock insulator are positioned on the flat layer, the first shock insulator is positioned in the groove, the second shock insulator is positioned outside the groove, and the horizontal height of the first shock insulator is different from that of the second shock insulator.
In this embodiment, through forming the recess on the flat layer, make first shock insulator and second shock insulator through ordinary mask plate on the flat layer, because the position difference of first shock insulator and second shock insulator, first shock insulator is located the recess, the second shock insulator is located outside the recess, thereby make first shock insulator and second shock insulator have the level difference, form the shock insulator of co-altitude, this embodiment adopts ordinary mask plate to replace grey tone mask plate or half tone mask plate to make the first shock insulator and the second shock insulator of co-altitude, can guarantee the homogeneity of shock insulator, reduce the manufacturing cost of display substrates simultaneously.
The horizontal height of the first spacer can be measured by the distance between the surface of the first spacer on the side far away from the driving substrate and the surface of the driving substrate on the side far away from the first spacer, and the horizontal height of the second spacer can be measured by the distance between the surface of the second spacer on the side far away from the driving substrate and the surface of the driving substrate on the side far away from the second spacer.
As shown in fig. 1, the driving substrate includes a substrate 1 and a thin film transistor array layer 2 on the substrate 1, and a flat layer covers the thin film transistor array layer 2 and can provide a flat surface for forming spacers. The thickness of the flat layer can be 2-8um, can satisfy the requirement of the level difference of first shock insulator and second shock insulator, can adjust the level difference of first shock insulator and second shock insulator through the degree of depth of adjustment recess.
The thin film transistor array layer 2 includes a plurality of thin film transistors arranged in an array, a wire for driving the thin film transistors to work, and the like, and the thin film transistor array layer 2 may include a gate insulating layer, a gate metal layer, a source drain metal layer, an interlayer insulating layer, a passivation layer, an electrode layer, and the like, which are not described herein again.
In this embodiment, as shown in fig. 1, the first spacers 51 and the second spacers 52 are arranged at intervals, so that the first spacers 51 and the second spacers 52 are uniformly arranged on the substrate, the liquid crystal cell thickness is effectively maintained, and the liquid crystal margin is ensured. The first spacers 51 and the second spacers 52 may be arranged at intervals in the row direction, that is, the first spacer 51 columns and the second spacer 52 columns are arranged at intervals; or may be arranged at intervals in the column direction, that is, the first spacers 51 and the second spacers 52 are arranged at intervals; the spacers may be arranged at intervals in the row direction and the column direction, that is, the spacers closest to the first spacers 51 are all the second spacers 52, and the spacers closest to the second spacers 52 are all the first spacers 51.
In some embodiments, the display substrate further comprises:
a color filter layer on the driving substrate, as shown in fig. 1 and 2, the color filter layer may include a red filter unit 31, a green filter unit 32, and a blue filter unit 33; the flat layer 4 is positioned on one side of the color filter layer far away from the driving substrate. The color filter layer contributes to further improving the flatness of the driving substrate.
Furthermore, the color filter layer can be reused as a flat layer, so that the structure and the manufacturing process of the display substrate can be simplified, and the production cost is reduced.
In some embodiments, the depth of the recess may be equal to the thickness of the planar layer. Of course, the depth of the groove is not limited to be equal to the thickness of the flat layer, but may be smaller than the thickness of the flat layer.
If the depth of the groove is equal to the thickness of the flat layer, after the flat material layer is formed, exposing the flat material layer by using a common mask plate, and after development, forming a flat material layer removing area and a flat material layer reserving area, wherein the flat material layer removing area can be used as the groove. The production cost can be reduced by using a common mask plate to perform a composition process.
As shown in fig. 2, a plurality of grooves 8 are formed on the display substrate, the first spacer 51 is positioned inside the grooves 8, and the second spacer 52 is positioned outside the grooves, such that the first spacer 51 and the second spacer 51 have a level difference. In order not to affect the display, the groove 8 may be disposed between the pixel regions, and the first spacer 51 and the second spacer 51 are also disposed between the adjacent pixel regions.
The embodiment of the invention provides a display panel, which comprises the display substrate as described above, and as shown in fig. 1, the display panel further comprises an opposite substrate arranged opposite to the display substrate, the opposite substrate comprises a substrate 6, and a black matrix 7 and a flat layer 8 arranged on the substrate 6, and the orthographic projections of the first spacer 51 and the second spacer 52 on the opposite substrate fall into the black matrix 7, so that the first spacer 51 and the second spacer 52 do not affect the display of the display panel.
In this embodiment, the color filter layer of the display panel may be disposed on the display substrate or on the opposite substrate. As shown in fig. 1, a color filter layer may be formed on a driving substrate of a display substrate, and the color filter layer may help to improve the flatness of the driving substrate. The color filter layer can be reused as the flat layer, so that the structure and the manufacturing process of the display substrate can be simplified, and the production cost is reduced. In addition, the color filter layer is arranged on the display substrate, and only the black matrix and the flat layer need to be manufactured on the opposite substrate, so that the manufacture process and the structure of the opposite substrate can be simplified.
An embodiment of the present invention provides a display device including the display panel as described above.
The display device includes but is not limited to: radio frequency unit, network module, audio output unit, input unit, sensor, display unit, user input unit, interface unit, memory, processor, and power supply. It will be appreciated by those skilled in the art that the above described configuration of the display device does not constitute a limitation of the display device, and that the display device may comprise more or less of the components described above, or some components may be combined, or a different arrangement of components. In the embodiment of the present invention, the display device includes, but is not limited to, a display, a mobile phone, a tablet computer, a television, a wearable electronic device, a navigation display device, and the like.
The display device may be: the display device comprises a television, a display, a digital photo frame, a mobile phone, a tablet personal computer and any other product or component with a display function, wherein the display device further comprises a flexible circuit board, a printed circuit board and a back plate.
It should be noted that, in the present specification, all the embodiments are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the embodiments, since they are substantially similar to the product embodiments, the description is simple, and the relevant points can be referred to the partial description of the product embodiments.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present.
In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present disclosure, and all the changes or substitutions should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.
Claims (10)
1. A method for manufacturing a display substrate is characterized by comprising the following steps:
providing a driving substrate;
forming a flat layer on the driving substrate, wherein the flat layer comprises a plurality of grooves arranged in an array;
forming a spacer material layer on the planarization layer;
exposing the spacer material layer by using a mask plate, wherein the mask plate comprises a first pattern and a second pattern, the first pattern is used for forming a spacer, the second pattern is except for the first pattern, the first pattern is selected from one of a light-transmitting pattern and a light-tight pattern, the second pattern is selected from the other of the light-transmitting pattern and the light-tight pattern, and the orthographic projection of the first pattern on the driving substrate is superposed with the groove part;
and forming a first spacer and a second spacer after development, wherein the first spacer is positioned in the groove, the second spacer is positioned outside the groove, and the horizontal height of the first spacer is different from that of the second spacer.
2. The method of claim 1, wherein before forming a planarization layer on the driving substrate, the method further comprises:
forming a color filter layer on the driving substrate;
forming the planarization layer includes:
and forming a flat layer covering the color filter layer.
3. The method of claim 1, wherein the depth of the groove is equal to the thickness of the planarization layer.
4. The method of claim 3, wherein forming the planarization layer comprises:
forming a planarization material layer on the driving substrate;
and patterning the planarization material layer to form a planarization material layer reserved area and a planarization material layer removing area, wherein the planarization material layer removing area forms the groove.
5. A display substrate, comprising:
a drive substrate;
the flat layer is positioned on the driving substrate and comprises a plurality of grooves arranged in an array manner;
the first shock insulator and the second shock insulator are positioned on the flat layer, the first shock insulator is positioned in the groove, the second shock insulator is positioned outside the groove, and the horizontal height of the first shock insulator is different from that of the second shock insulator.
6. The display substrate of claim 5, further comprising:
a color filter layer on the driving substrate;
the flat layer is positioned on one side of the color filter layer away from the driving substrate;
or
The color filter layer is multiplexed as the planarization layer.
7. The display substrate of claim 5, wherein the depth of the groove is equal to the thickness of the planarization layer.
8. The display substrate of claim 5, wherein the first spacers and the second spacers are spaced apart.
9. A display panel comprising the display substrate according to any one of claims 5 to 8 and a counter substrate disposed opposite to the display substrate, wherein a black matrix is disposed on the counter substrate, and orthographic projections of the first spacer and the second spacer on the counter substrate fall into the black matrix.
10. A display device characterized by comprising the display panel according to claim 9.
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| CN202110209399.4A CN112859452A (en) | 2021-02-24 | 2021-02-24 | Display substrate, manufacturing method thereof, display panel and display device |
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| CN202110209399.4A CN112859452A (en) | 2021-02-24 | 2021-02-24 | Display substrate, manufacturing method thereof, display panel and display device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023207904A1 (en) * | 2022-04-27 | 2023-11-02 | 京东方科技集团股份有限公司 | Display panel and display device |
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