CN112858172B - Device for clamping thin plate type optical element in optical detection device - Google Patents
Device for clamping thin plate type optical element in optical detection device Download PDFInfo
- Publication number
- CN112858172B CN112858172B CN202110219465.6A CN202110219465A CN112858172B CN 112858172 B CN112858172 B CN 112858172B CN 202110219465 A CN202110219465 A CN 202110219465A CN 112858172 B CN112858172 B CN 112858172B
- Authority
- CN
- China
- Prior art keywords
- frame
- container
- optical
- clamping
- optical element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 60
- 238000001514 detection method Methods 0.000 title claims abstract description 16
- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 238000009434 installation Methods 0.000 claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 3
- 239000011521 glass Substances 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 5
- 239000012530 fluid Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention discloses a device for clamping thin-plate type optical elements in an optical detection device, which comprises a container frame, a container and an element clamping mechanism, wherein the upper end surface of the container frame is provided with a mounting opening, the container is arranged in the container frame through the mounting opening, the element clamping mechanism is used for clamping the optical elements to be detected and then putting the optical elements into the container together, and the container is internally provided with refractive index matching liquid; the element clamping mechanism comprises an element fixing frame and a positioning frame which are connected by a hinge structure, wherein the element fixing frame is provided with an installation groove of which the shape is matched with that of an optical element to be tested, and the side length of the installation groove is slightly larger than that of the optical element to be tested; and the top of the element fixing frame and the long and narrow surfaces of the other three sides are provided with element light inlet grooves. The invention can effectively meet the clamping requirement of the optical element and can be effectively applied to an actual detection device.
Description
Technical Field
The invention belongs to the field of optical detection devices, and particularly relates to a device for clamping a thin plate type optical element in an optical detection device.
Background
With the rapid development of the application of lasers in modern industries, higher and higher requirements are put on optical elements for large optical systems. In order to effectively ensure that an optical element used in an optical system with high performance requirements can meet design requirements, simultaneously, the service life of the element is estimated, and the quality of the optical element under different processing modes is compared, precise defect detection needs to be carried out on the optical element.
In this context, the optical element detection is mainly classified into surface defects, subsurface defects, bulk defects, and the like, and a laser focal line scanning method for measuring bulk defects requires that an optical element is immersed in a refractive index matching fluid to remove the influence of scattering generated by a rough surface on the measurement. In order to fix the optical element in the container containing the refractive index matching fluid, an element holding device adapted to the size of the container is required.
According to the actual device design, the following requirements are made for the component holding device:
(1) in order to reduce the amount of matching fluid required, the clearance between the element and the container should be as small as possible; (2) the device has good sealing performance, and the condition that the matching liquid overflows is avoided in the detection process; (3) the actual device moves in the detection process, so that the clamping stability needs to be ensured; (4) the element is an unprocessed blank piece, the corresponding dimension error and the form and position error are extremely large, and the clamping adjustment within the error range needs to be considered; (5) in actual detection, a plurality of elements need to be detected, so that the elements need to be conveniently taken and placed; (6) the detection process requires laser to irradiate the component, and for this reason, the detection area of the component needs to be ensured to be light-transmitting.
Furthermore, since optical element blanks are usually square thin plates and the surfaces are extremely fragile, it is necessary for this purpose that the holding means cannot directly press the element surfaces, while the space occupied by the holding means is as small as possible. For these extremely demanding requirements, the clamping devices commonly used at present do not meet their specific requirements.
Disclosure of Invention
The present invention provides a device for holding a thin plate type optical element in an optical inspection device, which can effectively fulfill the holding requirement of the optical element and can be effectively applied to an actual inspection device.
A device for clamping thin-plate optical elements in an optical detection device comprises a container frame, a container and an element clamping mechanism, wherein the upper end face of the container frame is provided with a mounting opening, the container is mounted in the container frame through the mounting opening, the element clamping mechanism is used for clamping optical elements to be detected and then putting the optical elements into the container together, and refractive index matching fluid is arranged in the container;
the element clamping mechanism comprises an element fixing frame and a positioning frame which are connected by a hinge structure, wherein the element fixing frame is provided with an installation groove of which the shape is matched with that of an optical element to be tested, and the side length of the installation groove is slightly larger than that of the optical element to be tested;
and the top of the element fixing frame and the long and narrow surfaces of the other three sides are provided with element light inlet grooves.
In the invention, the container frame, the container and the element clamping mechanism form a three-layer nested structure, and the container is made of full-transparent glass and is used for containing the refractive index matching fluid and simultaneously does not shield the light entering of the internal optical element. After the installation, have splendid light permeability, the container frame all has the dead slot of large tracts of land scanning shooting usefulness around, and the frame also is equipped with light inlet groove all around for laser entering in the testing process.
The shape of the container is determined by the optical element to be measured, the size of the inner cavity in all directions is a little bit bigger than the element by a few millimeters, and the thickness is also the thickness of the element clamping mechanism. The container is installed inside the container frame, and is not taken out any more, and the size of the inner cavity of the container frame is determined by the outer size of the container, so that a tight clearance fit is formed, the container is not subjected to inward pressure, and the container is not easy to separate from the outer frame.
Preferably, the positioning frame and the element fixing frame are provided with square pressing corners matched with each other at positions close to four corners. The square pressure angle is the main position of actual and optical element contact, and the clamp force balance is guaranteed in the four corners distribution, the condition of angularity does not appear.
Further, the element fixing frame is provided with a spring pressing plate at the position of the square pressing angle. The spring pressing plate can be arranged inside the two frames at the optical element, the elements are reversely extruded, the stability of the elements clamped is guaranteed, and meanwhile, the fixing requirements of different gap sizes can be dynamically met by adopting the spring extrusion mode.
Preferably, the element fixing frame is hinged and matched with the bottom of the positioning frame, and two corners of the top are fixed through locking bolts.
Preferably, handles are arranged at two ends of the top of the element fixing frame and are used for facilitating the taking and placing of the element clamping mechanism into and out of the container.
The container does not have any hole except the top opening, and in order to guarantee leakproofness and light permeability, the glass gag is installed to the component light inlet groove at the fixed frame top of component, and the glass gag has played sealed container and non-light tight effect.
Compared with the prior art, the invention has the following beneficial effects:
1. in the invention, the container frame, the container and the element clamping mechanism form a three-layer nested structure, the structure and the appearance are matched with each other, the required space is extremely small, the gap between the optical element and the inner wall of the container is extremely small after the installation, and the using amount of the refractive index matching fluid is effectively reduced.
2. The element fixing frame and the positioning frame are connected in a hinge mode, so that the optical element is conveniently clamped and disassembled; the square pressing angles are arranged at the four corners of the element fixing frame and the positioning frame, so that the contact surface between the frame and an element is increased, and the clamping stability is ensured; further, the spring pressing plate and the square pressing corner are matched, so that the element can be tightly pressed on the movable frame, and a gap between the element and the frame caused by the dimension error of the element is avoided.
Drawings
FIG. 1 is a schematic view of an apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a component holding mechanism according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a spring pressing plate in an embodiment of the invention.
Detailed Description
The invention will be described in further detail below with reference to the drawings and examples, which are intended to facilitate the understanding of the invention without limiting it in any way.
As shown in fig. 1 to 3, in the present embodiment, an apparatus for clamping a thin-plate optical element in an optical inspection apparatus includes a container frame 1, a container 2, and an element clamping mechanism, wherein an installation opening is formed in an upper end surface of the container frame 1, the container 2 is installed in the container frame 1 through the installation opening, the element clamping mechanism is configured to clamp an optical element 4 to be inspected and then place the optical element into the container 2, and a refractive index matching fluid is provided in the container 2.
The element clamping mechanism comprises an element fixing frame 6 and a positioning frame 3 which are connected through a hinge structure, wherein a mounting groove matched with the optical element 4 in shape is formed in the element fixing frame 6, and the side length of the mounting groove is slightly larger than the optical element to be measured. The bottom and the long and narrow surfaces of the two sides of the container frame 1 are provided with container light inlet grooves, and the top and the long and narrow surfaces of the other three sides of the element fixing frame 6 are provided with element light inlet grooves.
The component clamping mechanism further comprises a frame fixing screw 7, a transparent glass plug cover 8, a locking bolt 9, a locking nut 10 and a spring pressing plate 11.
In this embodiment, the component clamping mechanism is hinged by a hinge, and the rotating shaft 120 is arranged at the bottom of the component fixing frame 6 and the positioning frame 3 and is matched with the locking bolt 9 at the top for fixing.
The positioning frame 3 and the element fixing frame 6 are provided with square pressing corners matched with each other at positions close to four corners. Wherein, the element fixing frame 6 is also provided with a spring pressing plate 11 at the position of the square pressing angle.
The actual operation process is that, arrange optical element 4 in the square pressure angle 113 in the fixed frame 6 four corners of component earlier, close the location frame 3 again, lock location frame 3 and the fixed frame 6 of component with locking bolt 9 and lock nut 10, can accomplish the installation of optical element 4, fill in whole component fixture in container 2 again, it is fixed with container frame 1 with the frame set screw 7 of the fixed frame 6 top both sides of component with the component fixture, fill in the container light inlet groove 115 at top with transparent glass stopper lid 8 at last, realize sealedly, the installation of whole device is accomplished.
When taking out, the frame fixing screw 7 is loosened, the element clamping mechanism is lifted out of the container 2 by the handle 118, the locking nut 10 and the locking bolt 9 are loosened, the positioning frame 3 can be opened, and the optical element 4 and the transparent glass plug cover 8 can be taken out.
Structure of spring clip referring to fig. 3, which is an enlargement of area a of fig. 2, the element fixing frame 6 is provided with spring clips 11 at four corners. In the installation process, the optical element 4 is arranged on the spring pressing plates 11 at the four corners, when the positioning frame 3 is closed, the optical element 4 extrudes the spring pressing plates 11 to tightly press the element on the positioning frame 3, and the element is ensured not to be loosened in the detection process. The square pressure angle 114 is arranged at the four corners of the positioning frame 3 to improve the contact area between the positioning frame 3 and the element, and the contact surface is designed at the four corners to ensure the stress balance of the element and avoid the corner-raising.
Referring to fig. 1 and 2, the container frame 1 and the component holding mechanism are provided with light inlet grooves around, including the container light inlet groove 115 and the container light inlet groove 116 around the container frame 1, and the component light inlet groove 119 and the component light inlet groove 117 around the component holding mechanism, so as to ensure that after the device is completely installed, laser can still irradiate into the interior from the light inlet grooves and irradiate on the components. Meanwhile, the container frame 1 and the component holding mechanism are both frame-type in shape, and a large hole is provided in the center for the camera to photograph the defect image.
The container 2 and the transparent glass plug 8 in the device are made of glass materials with good light transmittance, and specific materials are selected according to parameters such as actually used laser frequency power.
The embodiments described above are intended to illustrate the technical solutions and advantages of the present invention, and it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention, and any modifications, additions and equivalents made within the scope of the principles of the present invention should be included in the scope of the present invention.
Claims (3)
1. A device for clamping thin-plate type optical elements in an optical detection device is characterized by comprising a container frame, a container and an element clamping mechanism, wherein the upper end surface of the container frame is provided with a mounting opening, the container is mounted in the container frame through the mounting opening, the element clamping mechanism is used for clamping optical elements to be detected and then putting the optical elements into the container together, and the container is internally provided with refractive index matching liquid;
the element clamping mechanism comprises an element fixing frame and a positioning frame which are connected by a hinge structure, wherein the element fixing frame is provided with an installation groove of which the shape is matched with that of an optical element to be tested, and the side length of the installation groove is slightly larger than that of the optical element to be tested;
the bottom and the long and narrow surfaces at two sides of the container frame are provided with container light inlet grooves, and the top of the element fixing frame and the long and narrow surfaces at the other three sides are provided with element light inlet grooves;
the fixed frame of location frame and component all is equipped with the square angle of pressing that matches each other in the position that is close to four angles, the fixed frame of component is equipped with spring clamp plate on the position at square angle of pressing, the articulated cooperation in bottom of the fixed frame of component and location frame, two angles at top are passed through locking bolt and are fixed.
2. The apparatus for holding a thin plate-type optical element in an optical inspection device as claimed in claim 1, wherein handles are provided at both ends of the top of the element holding frame.
3. The apparatus for holding a thin plate-type optical element in an optical inspection device as claimed in claim 1, wherein a glass plug is fitted in the element light-entering groove at the top of the element holding frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110219465.6A CN112858172B (en) | 2021-02-26 | 2021-02-26 | Device for clamping thin plate type optical element in optical detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110219465.6A CN112858172B (en) | 2021-02-26 | 2021-02-26 | Device for clamping thin plate type optical element in optical detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112858172A CN112858172A (en) | 2021-05-28 |
| CN112858172B true CN112858172B (en) | 2022-03-08 |
Family
ID=75990378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110219465.6A Active CN112858172B (en) | 2021-02-26 | 2021-02-26 | Device for clamping thin plate type optical element in optical detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112858172B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103837096A (en) * | 2014-03-19 | 2014-06-04 | 中国科学院光电技术研究所 | Device and method for detecting surface shape error of flat optical element |
| CN206515534U (en) * | 2017-01-19 | 2017-09-22 | 中国工程物理研究院激光聚变研究中心 | Large-aperture KDP crystal clamping device |
| CN110297302A (en) * | 2019-07-31 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | A kind of optical elements of large caliber clamping device |
| CN209624003U (en) * | 2019-04-29 | 2019-11-12 | 中国工程物理研究院激光聚变研究中心 | A kind of optical element multi-pose detection universal fixture |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201015230A (en) * | 2008-10-03 | 2010-04-16 | Univ Nat Chiao Tung | Immersion inclined lithography apparatus and tank thereof |
| CN113203686B (en) * | 2021-04-16 | 2023-02-14 | 中国科学院上海光学精密机械研究所 | Polarization characteristic detection device and detection method for non-planar transparent element |
-
2021
- 2021-02-26 CN CN202110219465.6A patent/CN112858172B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103837096A (en) * | 2014-03-19 | 2014-06-04 | 中国科学院光电技术研究所 | Device and method for detecting surface shape error of flat optical element |
| CN206515534U (en) * | 2017-01-19 | 2017-09-22 | 中国工程物理研究院激光聚变研究中心 | Large-aperture KDP crystal clamping device |
| CN209624003U (en) * | 2019-04-29 | 2019-11-12 | 中国工程物理研究院激光聚变研究中心 | A kind of optical element multi-pose detection universal fixture |
| CN110297302A (en) * | 2019-07-31 | 2019-10-01 | 中国工程物理研究院机械制造工艺研究所 | A kind of optical elements of large caliber clamping device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112858172A (en) | 2021-05-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112858172B (en) | Device for clamping thin plate type optical element in optical detection device | |
| KR100279260B1 (en) | Liquid crystal injection and liquid crystal injection opening inspection system of liquid crystal cell | |
| CN110927175A (en) | Detection device and method for realizing equal-illumination and equal-optical-path imaging of two adjacent surfaces of object | |
| CN106644204B (en) | Intensive toughened glass surface stress instrument | |
| CN213148772U (en) | Liquid crystal glass edge-tracking detection mechanism | |
| CN106679757B (en) | A kind of visual volume metering mechanism for high pressure property analyzer | |
| JP2014173885A (en) | Installation structure of length meter | |
| CN114813750A (en) | Clamping device for detecting defects of small-caliber optical elements with different sizes | |
| CN108872263B (en) | Lens front side face edge explosion detection device and method based on ship-shaped light source | |
| CN114216398B (en) | Automatic detection device for high-speed transmission wire harness | |
| CN211825660U (en) | Portable mobile phone colorimetric determination device | |
| CN210346557U (en) | Utensil is examined to packing ring | |
| TWI400501B (en) | Method for assembling the optical module | |
| CN211552792U (en) | Piston rod bending measuring device | |
| TWM512704U (en) | Embedded relay lenses high spectral camera system | |
| US20040017564A1 (en) | Flow cell clamp | |
| CN218646256U (en) | Automatic thickness gauge is used in PE membrane production | |
| CN206609501U (en) | A kind of visual volume metering mechanism for high pressure property analyzer | |
| CN211426157U (en) | High-temperature and high-pressure shale isothermal adsorption instrument sample cylinder sealing structure | |
| CN217359569U (en) | Multifunctional optical detection module | |
| CN217331063U (en) | TFT-LCD liquid crystal glass substrate warpage detection mechanism | |
| CN214310178U (en) | Tool structure of inspection small object rule outer wall | |
| CN211425663U (en) | Paint color matching box | |
| CN114264218B (en) | Method for installing and adjusting lifting mechanism with four lead screws to lift in high straightness in full stroke | |
| CN218380860U (en) | Auxiliary measuring jig |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |