CN112849804A

CN112849804A - Chemical liquid leakage detection recovery unit

Info

Publication number: CN112849804A
Application number: CN202011468936.9A
Authority: CN
Inventors: 钟兴进
Original assignee: Individual
Current assignee: Individual
Priority date: 2020-12-15
Filing date: 2020-12-15
Publication date: 2021-05-28

Abstract

A chemical liquid leakage detection and recovery device comprises a shell, wherein a sealing cover is arranged at the top end of the shell, a liquid storage barrel is arranged inside the shell, a stirring rod is arranged inside the liquid storage barrel, the stirring rod is vertically arranged at the middle position of the liquid storage barrel, a motor is arranged at the top end of the sealing cover, the stirring rod penetrates out of the sealing cover and is fixedly connected with the motor, a liquid inlet pipe is arranged on the left side of the top end of the sealing cover, when chemical liquid in the liquid storage barrel leaks, the chemical liquid can flow to a groove at the bottom end of a hollow layer and can flow to the inside of a leaked liquid collection box through a liquid guide pipe communicated with the groove, when the chemical liquid is discharged into the leaked liquid collection box, a weight detector can detect the weight of the liquid and transmit a signal to a controller, the controller can process the chemical liquid and control a warning lamp through circuit connection to alarm, so that a user can be, prevent chemical liquid from leaking in a large area to cause waste.

Description

Chemical liquid leakage detection recovery unit

Technical Field

The invention relates to the technical field of chemical devices, in particular to a chemical liquid leakage detection and recovery device.

Background

Safe production and prevention. Safe production is a problem that every enterprise cannot neglect, and production can be promoted only by paying attention to safety. In work, people often find some potential safety hazards, and timely finding out safety problems is the responsibility of each employee. Along with the development of society, all become automatic, production efficiency has obtained the promotion, and product quality becomes more stable, and the safety problem also can obtain effectual foreknowledge detection through mechanical intellectuality.

For example, the patent publication "CN 201110332579.8" is named as: the patent of ' a chemical liquid recovery device ' discloses ' a wafer bearing table for fixing and rotating a wafer, a CUP (compute unified device for processing) a liquid receiving tank, a cylinder, a motor and a table board, wherein the liquid receiving tank is arranged on the table board, and the wafer bearing table driven by the motor is arranged in the liquid receiving tank; and a CUP driven by a cylinder to lift is arranged between the liquid receiving tank and the wafer bearing platform, the liquid receiving tank is divided into an outer tank for recovering chemical liquid and an inner tank for recovering cleaning liquid through the CUP, and each tank is provided with an outlet. Wherein: the upper limit position of the CUP movement is positioned above the wafer and the wafer bearing table, and the lower limit position is positioned below the wafer and the wafer bearing table; the motor is a hollow shaft motor and is arranged below the table panel, a hollow output shaft of the motor penetrates through the table panel to be connected with the bearing piece table, a compressed air inlet is formed in the hollow output shaft end of the motor, and a compressed air outlet communicated with the hollow output shaft is formed in the part, sleeved outside the output shaft, of the bearing piece table; the CUP is frustum-shaped and hollow inside, and a first through hole for the wafer bearing platform to pass through is formed in the upper surface of the CUP; a groove is formed in the CUP, a second bulge is arranged in the liquid receiving groove, and the second bulge is accommodated in the groove; the air cylinder is arranged on the lower surface of the table top plate, and the piston rod sequentially penetrates through the table top plate and the second bulge to be connected with the CUP; a first bulge and a second bulge which are hollow inside are sequentially arranged in the liquid receiving tank from inside to outside, and the sheet bearing platform and the output shaft of the motor penetrate through the first bulge; the first bulge and the second bulge divide the interior of the liquid receiving tank into an outer tank and an inner tank, the inner tank is arranged between the first bulge and the second bulge, the outer tank is arranged between the second bulge and the outer wall of the liquid receiving tank, the bottom of the inner tank is provided with a liquid discharge port for recovering cleaning liquid, and the bottom of the outer tank is provided with an acid discharge port for recovering chemical liquid; a baffle is arranged between the top end of the first bulge and the wafer bearing platform in the inner groove; the top of the liquid receiving tank is provided with a protective cover; the protective cover is frustum-shaped, and the upper surface of the protective cover is provided with a second through hole.

However, when the existing chemical liquid leakage detection and recovery device is used, the chemical liquid can leak in the storage process, when the material is improperly selected or the chemical agent leaks due to aging of the material, the leakage of the chemical agent can be found and effectively controlled as early as possible, and the device for storing the chemical liquid is troublesome in cleaning.

Disclosure of Invention

Technical problem to be solved

Aiming at the defects of the prior art, the invention provides the chemical liquid leakage detection and recovery device with good cleaning effect.

(II) technical scheme

In order to achieve the purpose, the invention provides the following technical scheme:

a chemical liquid leakage detection and recovery device comprises a shell, wherein a sealing cover is arranged at the top end of the shell, a liquid storage barrel is arranged in the shell, a stirring rod is arranged in the liquid storage barrel, the stirring rod is vertically arranged in the middle of the liquid storage barrel, a motor is arranged at the top end of the sealing cover, the stirring rod penetrates through the sealing cover and is fixedly connected with the motor, a liquid inlet pipe is arranged on the left side of the top end of the sealing cover, the liquid inlet pipe penetrates through the sealing cover and is communicated with the liquid storage barrel, a hollow layer is arranged between the shell and the liquid storage barrel, a groove is formed in the bottom of the hollow layer, a liquid guide pipe is arranged at the bottom of the liquid storage barrel, one end of the liquid guide pipe is communicated with the groove, a connecting pipe is arranged at the other end of the liquid guide pipe, an installation, the mounting seat is provided with a pump body, the pump body is provided with a drain pipe, the drain pipe passes through the mounting box and is communicated with the leaked liquid collecting box, the right side of the mounting box is provided with a box body, the inside of the box body is provided with a partition plate, the bottom of the partition plate is provided with a drainage pool, the upper part of the partition plate is provided with a water storage pool, the right side of the drainage pool is provided with a water outlet pipe, one side of the top end of the water storage pool is provided with a water inlet pipe, the other side of the top end of the water storage pool is provided with a water pump, one end of the water pump is provided with a water pumping pipe, the water pumping pipe passes through the top end of the box body and is connected with the water storage pool, the other end of the water pump is provided with a water guide pipe, the warning light is installed to controller one side, the bottom plate is installed to install bin and box bottom.

In order to improve the cleaning efficiency of the liquid storage tank, the invention improves that one end of the water guide pipe penetrates through the shell tank and is fixedly connected to the inner wall of the liquid storage tank, a plurality of spray heads are arranged on the water guide pipe at equal intervals, and the spray nozzle of each spray head faces the bottom of the liquid storage tank.

In order to facilitate the drainage treatment of users, the invention has the improvement that the drain pipe is provided with an electromagnetic valve, the electromagnetic valve is in circuit connection with the controller, and the water outlet pipe is provided with a valve.

In order to improve the water outlet efficiency of the drainage pool, the invention improves that a guide plate is arranged at the bottom in the drainage pool, the guide plate is of an inclined plane structure, the inclination angle of the guide plate is 25-30 degrees, and the lower surface of the bottom surface of the guide plate corresponds to the position of a water outlet pipe.

In order to improve the liquid leakage detection, the invention has the improvement that a weight detector is arranged on the bottom end in the liquid leakage collecting box, a circuit is arranged between the weight detector and the controller, and a circuit is arranged between the controller and the warning lamp.

In order to prolong the service life of the liquid inlet pipeline, the invention is improved in that an inner pipe is arranged in the liquid inlet pipe, the inner pipe is a hose made of polytetrafluoroethylene, the liquid inlet pipe is made of hard plastic, and an epoxy resin glue coating layer is coated on the surface of the liquid inlet pipe.

In order to facilitate the use of personnel for observing the interior of the shell, the invention has the improvement that the observation window is positioned at the bottom of the liquid storage barrel and is made of transparent toughened glass.

(III) advantageous effects

Compared with the prior art, the invention provides a chemical liquid leakage detection and recovery device, which has the following beneficial effects:

this chemical liquid leak testing recovery unit, when using, when the chemical liquid in the stock solution bucket is revealed, the groove department of hollow layer bottom can be flowed to the chemical liquid, and through inside flowing chemical liquid to the weeping collecting box with the communicating catheter of groove, when the chemical liquid discharges to the weeping collecting box in, the weight of liquid can be detected to the weight detector, and with signal transmission to the controller on, handle and carry out the police dispatch newspaper through circuit connection control warning light by the controller again, in time remind the user of service to handle or maintain, prevent that the chemical liquid from revealing by a large scale and causing the waste.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is an enlarged view of a portion of FIG. 1A;

FIG. 3 is a schematic external view of FIG. 1 according to the present invention;

FIG. 4 is a schematic view of the internal structure of FIG. 1 at 11 according to the present invention;

FIG. 5 is an enlarged view of FIG. 1 at 16 in accordance with the present invention;

in the figure: 1. a housing; 2. sealing the cover; 3. a liquid storage barrel; 4. installing a box; 5. a motor; 6. a stirring rod; 7. a catheter; 8. a hollow layer; 9. a groove; 10. a connecting pipe; 11. a liquid inlet pipe; 12. a liquid discharge pipe; 13. a mounting seat; 14. a pump body; 15. a base plate; 16. a leakage liquid collecting box; 17. a drain pipe; 18. an electromagnetic valve; 19. a box body; 20, a water storage tank; 21. a drainage basin; 22. a partition plate; 23. a baffle; 24. a water outlet pipe; 25. a valve; 26. a water inlet; 27. a water pump; 28. a water pumping pipe; 29. a water conduit; 30. a spray head; 31. an observation window; 32. a controller; an inner tube; 34. a weight detector; 35. a warning light.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-5, a chemical liquid leakage detecting and recycling device comprises a housing 1, a sealing cover 2 is arranged at the top end of the housing 1, a liquid storage barrel 3 is arranged inside the housing 1, a stirring rod 6 is arranged inside the liquid storage barrel 3, the stirring rod 6 is vertically arranged at the middle position of the liquid storage barrel 3, a motor 5 is arranged at the top end of the sealing cover 2, the stirring rod 6 penetrates through the sealing cover 2 and is fixedly connected with the motor 5, a liquid inlet pipe 14 is arranged on the left side of the top end of the sealing cover 2, the liquid inlet pipe 14 penetrates through the sealing cover 2 and is communicated with the liquid storage barrel 3, a hollow layer 10 is arranged between the housing 1 and the liquid storage barrel 3, a groove 12 is arranged at the bottom of the hollow layer 10, a liquid guide pipe 8 is arranged at the bottom of the liquid storage barrel 3, one end of the liquid guide pipe 8 is communicated with the groove 12, the other end, the other end of the connecting pipe 13 is communicated with the leaked liquid collecting box 22, the mounting seat 17 is installed on the left side of the mounting box 4, the pump body 18 is arranged on the mounting seat 17, the liquid discharge pipe 16 is arranged on the pump body 18, the liquid discharge pipe 16 penetrates through the mounting box 4 to be communicated with the leaked liquid collecting box 22, the box body 27 is arranged on the right side of the mounting box 4, the partition plate 33 is installed in the box body 27, the bottom of the partition plate 33 is provided with the drainage pool 31, the upper portion of the partition plate 33 is provided with the water storage pool 29, the right side of the drainage pool 31 is provided with the water outlet pipe 36, one side of the top end of the water storage pool 29 is provided with the water inlet pipe, the other side of the water pump 40 is provided with the water pumping pipe 41, the water pumping pipe 41 penetrates through the top end of the box body 27 to be connected with the water storage pool 29, drain pipe 24 is installed to 3 right sides bottoms of stock solution bucket, and drain pipe 24 passes box 27 and links to each other with drainage tank 31, casing 1 externally mounted has observation window 46, install controller 48 on the install bin 4 is outer, and warning light 53 is installed to controller 48 one side, bottom plate 20 is installed with box 27 bottom to install bin 4.

In summary, the working principle and working process of the chemical liquid leakage detecting and recycling device are that when in use, the chemical liquid is firstly discharged into the liquid storage barrel 3 through the liquid inlet pipe 14, one end of the stirring rod 6 penetrates through the sealing cover 2 to be connected with the motor 5, then the motor 5 is opened to drive the stirring rod 6 to stir in the liquid storage barrel 3, so as to avoid the chemical liquid from precipitating during long-time placement and influencing subsequent use, when the liquid storage barrel 3 leaks, the leaked chemical liquid flows to the groove 12 at the bottom end of the hollow layer 10, and the chemical liquid flows into the leaked liquid collecting box 22 through the liquid outlet pipe 16 communicated with the groove 12, when the chemical liquid flows into the leaked liquid collecting box 22, the weight detector 51 detects the weight of the chemical liquid, transmits a signal to the controller 48, is analyzed and processed by the controller 48, and controls the warning lamp 53 to give an alarm, the user has been reminded in time to handle or maintain, then can take out the chemical liquid through the pump body 18 with communicating fluid-discharge tube 16 of weeping collecting box 22, stock solution bucket 3 when wasing, fill the water source with the inside inlet tube that passes through of tank 29, water pump 40 has heard drinking-water pipe 41 and has taken out the water source in tank 29, aqueduct 43 sprays water in to stock solution bucket 3 through shower nozzle 45, open solenoid valve 26 through controller 48, flow the water source to drainage pond 31 in through drain pipe 24, discharge through outlet pipe 36.

In this embodiment, 1 case fixed connection of casing is passed to aqueduct 43 one end on the liquid reserve tank inner wall, shower nozzle 45 is provided with a plurality ofly to equidistant even the installing on aqueduct 43, shower nozzle 45 spout department makes the cleaning process more even effective facing the liquid reserve tank bottom, improves the efficiency of cleaning process.

In this embodiment, guide plate 35 is installed to the bottom in drainage pond 31, guide plate 35 is the inclined plane structure, guide plate 35 inclination is 25 ~ 30, guide plate 35 bottom surface low side is corresponding with outlet pipe 36 position, and the quick clean early outlet pipe 36 department of sewage that conveniently washs is discharged, improves the practicality.

In this embodiment, be provided with inner tube 49 in the feed liquor pipe 14, inner tube 49 is the hose of polytetrafluoroethylene material, feed liquor pipe 14 is the rigid plastic material to at feed liquor pipe 14 on the surface epoxy rubber coating, the inner tube 49 of polytetrafluoroethylene material can avoid chemical to cause the corruption to the pipeline, improves life, and the feed liquor pipe 14 of rigid plastic material is conveniently made, and reduce cost, epoxy rubber coating can avoid the direct solar radiation to lead to feed liquor pipe 14 to appear chapping, improves the practicality.

In this embodiment, observation window 46 is located stock solution bucket 3 bottom position, observation window 46 is transparent toughened glass, can make things convenient for the user to observe the condition of revealing and conveniently handle or maintain.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a chemical liquid leakage detection recovery unit which characterized in that: comprises a shell (1), a sealing cover (2) is arranged at the top end of the shell (1), a liquid storage barrel (3) is arranged inside the shell (1), a stirring rod (6) is arranged inside the liquid storage barrel (3), the stirring rod (6) is vertically arranged at the middle position of the liquid storage barrel (3), a motor (5) is arranged at the top end of the sealing cover (2), the stirring rod (6) penetrates out of the sealing cover (2) to be fixedly connected with the motor (5), a liquid inlet pipe (14) is arranged on the left side of the top end of the sealing cover (2), the liquid inlet pipe (14) penetrates through the sealing cover (2) to be communicated with the liquid storage barrel (3), a hollow layer (10) is arranged between the shell (1) and the liquid storage barrel (3), a groove (12) is arranged at the bottom of the hollow layer (10), a liquid guide pipe (8) is arranged at the bottom of the liquid storage barrel (3), one, a connecting pipe (13) is installed at the other end of the shell (1), an installation box (4) is installed at the bottom of the shell (1), a leakage collecting box (22) is installed inside the installation box (4), the other end of the connecting pipe (13) is communicated with the leakage collecting box (22), an installation seat (17) is installed on the left side of the installation box (4), a pump body (18) is arranged on the installation seat (17), a liquid discharge pipe (16) is arranged on the pump body (18), the liquid discharge pipe (16) penetrates through the installation box (4) to be communicated with the leakage collecting box (22), a box body (27) is arranged on the right side of the installation box (4), a partition plate (33) is installed in the box body (27), a drainage pool (31) is arranged at the bottom of the partition plate (33), a water storage pool (29) is arranged at the upper part of the partition plate (33), a water outlet pipe, a water pump (40) is installed on the other side, a water pumping pipe (41) is installed at one end of the water pump (40), the water pumping pipe (41) penetrates through the top end of the box body (27) to be connected with the water storage tank (29), a water guide pipe (43) is installed at the other end of the water pump (40), the water guide pipe (43) penetrates through the shell (1) and is arranged at the top end inside the liquid storage barrel (3), a spray head (45) is arranged on the water guide pipe (43) arranged in the liquid storage barrel (3), a drain pipe (24) is arranged at the bottom of the right side of the liquid storage barrel (3), the drain pipe (24) passes through the box body (27) and is connected with a drain pool (31), an observation window (46) is arranged outside the shell (1), a controller (48) is arranged outside the installation box (4), a warning lamp (53) is arranged on one side of the controller (48), and a bottom plate (20) is arranged at the bottom ends of the installation box (4) and the box body (27).

2. The chemical liquid leakage detection and recovery device according to claim 1, wherein: the utility model discloses a spray nozzle, including casing (1), shower nozzle (43), shower nozzle (45) spout department, casing (1) case fixed connection is passed to the shower nozzle (43) one end on the liquid reserve tank inner wall, shower nozzle (45) is provided with a plurality ofly to equidistant even the installation on water pipe (43), the liquid reserve tank bottom of being faced in the shower nozzle (45) spout department.

3. The chemical liquid leakage detection and recovery device according to claim 1, wherein: the water outlet pipe (24) is provided with an electromagnetic valve (26), the electromagnetic valve (26) is in circuit connection with the controller (48), and the water outlet pipe (36) is provided with a valve (37).

4. The chemical liquid leakage detection and recovery device according to claim 1, wherein: the bottom installs guide plate (35) in drainage basin (31), guide plate (35) are the inclined plane structure, guide plate (35) inclination is 25 ~ 30, guide plate (35) bottom surface low side corresponds with outlet pipe (36) position.

5. The chemical liquid leakage detection and recovery device according to claim 1, wherein: a weight detector (51) is installed on the bottom end inside the liquid leakage collecting box (22), a circuit is installed between the weight detector (51) and the controller (48), and a circuit is installed between the controller (48) and the warning lamp (53).

6. The chemical liquid leakage detection and recovery device according to claim 1, wherein: be provided with inner tube (49) in feed liquor pipe (14), inner tube (49) are the hose of polytetrafluoroethylene material, feed liquor pipe (14) are the rigid plastic material to at feed liquor pipe (14) surface coating epoxy rubber coating.

7. The chemical liquid leakage detection and recovery device according to claim 1, wherein: the observation window (46) is positioned at the bottom of the liquid storage barrel (3), and the observation window (46) is made of transparent toughened glass.