CN112836853A - 一种基于深度学习和热交换法的氧化镓制备方法及系统 - Google Patents
一种基于深度学习和热交换法的氧化镓制备方法及系统 Download PDFInfo
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- CN112836853A CN112836853A CN202011638983.3A CN202011638983A CN112836853A CN 112836853 A CN112836853 A CN 112836853A CN 202011638983 A CN202011638983 A CN 202011638983A CN 112836853 A CN112836853 A CN 112836853A
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- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011638983.3A CN112836853A (zh) | 2020-12-31 | 2020-12-31 | 一种基于深度学习和热交换法的氧化镓制备方法及系统 |
PCT/CN2021/075545 WO2022141750A1 (fr) | 2020-12-31 | 2021-02-05 | Procédé et système de préparation d'oxyde de gallium sur la base d'un apprentissage profond et procédé d'échange de chaleur |
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CN202011638983.3A CN112836853A (zh) | 2020-12-31 | 2020-12-31 | 一种基于深度学习和热交换法的氧化镓制备方法及系统 |
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CN112836853A true CN112836853A (zh) | 2021-05-25 |
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CN202011638983.3A Pending CN112836853A (zh) | 2020-12-31 | 2020-12-31 | 一种基于深度学习和热交换法的氧化镓制备方法及系统 |
Country Status (2)
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CN (1) | CN112836853A (fr) |
WO (1) | WO2022141750A1 (fr) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111695287A (zh) * | 2020-04-22 | 2020-09-22 | 山东天岳先进材料科技有限公司 | 一种预测SiC单晶炉内整体温度场的方法及设备 |
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JP2006273684A (ja) * | 2005-03-30 | 2006-10-12 | Koha Co Ltd | Iii族酸化物系単結晶の製造方法 |
CN103541008B (zh) * | 2013-11-12 | 2016-01-06 | 上海硅酸盐研究所中试基地 | 一种大尺寸氧化镓单晶的生长方法及生长装置 |
EP3042986A1 (fr) * | 2015-01-09 | 2016-07-13 | Forschungsverbund Berlin e.V. | Méthode pour la croissance de monocristaux de beta-Ga2O3 à partir de solidification de Ga2O3 en fusion contenue dans un creuset métallique, en controllant la pression partielle d'oxygène. |
CN107541776A (zh) * | 2017-08-14 | 2018-01-05 | 同济大学 | 一种大尺寸氧化镓单晶的生长设备及方法 |
CN109487334A (zh) * | 2018-11-22 | 2019-03-19 | 太原理工大学 | 一种基于随机分布的泡生法蓝宝石融晶接种态控制方法 |
JP7115688B2 (ja) * | 2019-01-25 | 2022-08-09 | 株式会社デンソー | 成膜装置及び半導体装置の製造方法 |
KR102012809B1 (ko) * | 2019-04-05 | 2019-08-21 | 충남대학교산학협력단 | 쌍정결함밀도의 평가방법 |
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2020
- 2020-12-31 CN CN202011638983.3A patent/CN112836853A/zh active Pending
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2021
- 2021-02-05 WO PCT/CN2021/075545 patent/WO2022141750A1/fr active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111695287A (zh) * | 2020-04-22 | 2020-09-22 | 山东天岳先进材料科技有限公司 | 一种预测SiC单晶炉内整体温度场的方法及设备 |
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WO2022141750A1 (fr) | 2022-07-07 |
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