CN112834429A - Gas humidity detection device and system - Google Patents
Gas humidity detection device and system Download PDFInfo
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- CN112834429A CN112834429A CN202011559402.7A CN202011559402A CN112834429A CN 112834429 A CN112834429 A CN 112834429A CN 202011559402 A CN202011559402 A CN 202011559402A CN 112834429 A CN112834429 A CN 112834429A
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- gas
- humidity
- material layer
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- 238000001514 detection method Methods 0.000 title claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 78
- 230000008859 change Effects 0.000 claims abstract description 16
- 238000009423 ventilation Methods 0.000 claims description 9
- 230000003595 spectral effect Effects 0.000 claims description 8
- 230000008602 contraction Effects 0.000 claims description 6
- 238000001228 spectrum Methods 0.000 abstract description 9
- 230000001678 irradiating effect Effects 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 4
- 230000009471 action Effects 0.000 abstract description 3
- 238000010895 photoacoustic effect Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000005281 excited state Effects 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000013022 venting Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1704—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
Abstract
The application relates to a detection device and a system for gas humidity, in particular to the field of gas humidity detection. The application provides a detection device of gas humidity includes: the grating structure comprises a cavity, a flexible material layer and a plurality of grating structures; when the humidity of the gas to be detected needs to be detected, the gas to be detected is filled into the cavity, the pulsed infrared light is used for irradiating the gas to be detected, the gas to be detected can release heat due to the photoacoustic effect, the gas to be detected expands under the action of heat, and further the flexible material layer deforms, so that the distance between a plurality of grating structures arranged on the flexible material layer changes, and further the resonance wavelength of the grating structures changes, the pulsed infrared light irradiates on the grating structures, and the resonance wavelength of the grating structures changes, so that the spectrum of the optical signals emitted by the grating structures changes, and the humidity of the gas to be detected is obtained according to the corresponding relation between the spectrum change and the humidity of the gas to be detected.
Description
Technical Field
The application relates to the field of gas humidity detection, in particular to a gas humidity detection device and system.
Background
Humidity, a physical quantity representing the degree of dryness of the atmosphere. The less water vapor contained in a certain volume of air at a certain temperature, the drier the air; the more water vapor, the more humid the air. The degree of dryness of air is called "humidity". In this sense, the physical quantities such as absolute humidity, relative humidity, comparative humidity, mixture ratio, saturation difference, and dew point are commonly used; if the weight of water vapor in the wet steam is expressed as a percentage of the total weight (volume) of the steam, it is referred to as the humidity of the steam. The humidity at which the human body feels comfortable is: the relative humidity is lower than 70%.
The prior art methods of detecting humidity include: wet and dry bulb measuring method, measuring method of dew point humidity, measuring method of change of geometric dimension of substance, coulometer, optical hygrometer, meteorological chromatography, chemical substance electrical characteristic method, and ionic crystal condensation hygrometer.
However, the above-mentioned method and apparatus for detecting humidity have large size of the used devices, complex structure of the devices, and high manufacturing and maintenance costs, and have large errors, so that the sensitivity of humidity measurement is not sufficient.
Disclosure of Invention
The present invention is directed to provide a device and a system for detecting humidity of a gas, so as to solve the problems of the prior art, such as large size of the used devices, complex structure of the devices, high manufacturing and maintenance costs, and large errors, resulting in poor sensitivity of humidity measurement.
In order to achieve the above purpose, the embodiment of the present invention adopts the following technical solutions:
in a first aspect, the present application provides a device for detecting humidity in a gas, the device comprising: the grating structure comprises a cavity, a flexible material layer and a plurality of grating structures; the cavity is sealed cavity, and flexible material layer and a plurality of grating structure all set up inside the cavity, and the flexible material layer sets up in the inside one end of cavity, and a plurality of grating structure cycle sets up the one side of keeping away from the chamber wall of the nearest cavity at the flexible material layer.
Optionally, the plurality of grating structures are arranged as a frustum, and a cross-sectional area of one end of the plurality of grating structures close to the flexible material layer is larger than a cross-sectional area of one end of the plurality of grating structures far away from the flexible material layer.
Optionally, the surfaces of the plurality of grating structures away from the flexible material layer are provided as concave surfaces.
Optionally, the detection device further comprises a ventilation hole, and the ventilation hole is arranged on the wall of the cavity.
Optionally, the sensing device further comprises a plug for controlling the opening or closing of the venting orifice.
Optionally, a cavity wall of the cavity at an end away from the flexible material layer is made of a light-transmitting material.
Optionally, the material of the flexible material layer is a non-thermal expansion and contraction material.
Optionally, the material of each of the plurality of grating structures is a non-thermal expansion and contraction material.
In a second aspect, the present application provides a detection system for gas humidity, the detection system comprising: the gas humidity detection device comprises a spectrometer, a computer and the gas humidity detection device of any one of the first aspect, wherein the spectrometer is used for detecting the spectral change emitted by the detection device, and the computer is used for obtaining the humidity of the gas to be detected according to the corresponding relation between the spectral change and the humidity of the gas to be detected.
The invention has the beneficial effects that:
the application provides a detection device of gas humidity includes: the grating structure comprises a cavity, a flexible material layer and a plurality of grating structures; the cavity is a sealed cavity, the flexible material layer and the grating structures are arranged in the cavity, the flexible material layer is arranged at one end in the cavity, and the grating structures are periodically arranged on one side, away from the cavity wall of the cavity with the closest distance, of the flexible material layer; when the humidity of the gas to be detected needs to be detected, the gas to be detected is filled into the cavity, the pulsed infrared light is used for irradiating the gas to be detected, the gas to be detected can release heat due to the acousto-optic effect, the gas to be detected expands under the action of heat, and further the flexible material layer deforms, so that the distance between a plurality of grating structures arranged on the flexible material layer changes, and further the resonance wavelength of the grating structures changes, the infrared light irradiating the grating structures at the pulses changes, and the resonance wavelength of the grating structures changes, so that the spectrum of the optical signals emitted by the grating structures changes, and the humidity of the gas to be detected is obtained according to the corresponding relation between the spectrum change and the humidity of the gas to be detected.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a device for detecting humidity of a gas according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another apparatus for detecting humidity in gas according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another apparatus for detecting humidity of gas according to an embodiment of the present invention.
Icon: 10-a cavity; 11-a ventilation hole; 20-a layer of flexible material; 30-grating structure.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are one embodiment of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In order to make the implementation of the present invention clearer, the following detailed description is made with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a device for detecting humidity of a gas according to an embodiment of the present invention; as shown in fig. 1, the present application provides a gas humidity detection apparatus, including: a cavity 10, a flexible material layer 20 and a plurality of grating structures 30; the cavity 10 is a sealed cavity 10, the flexible material layer 20 and the plurality of grating structures 30 are all arranged inside the cavity 10, the flexible material layer 20 is arranged at one end inside the cavity 10, and the plurality of grating structures 30 are periodically arranged on one side of the flexible material layer 20 away from the cavity wall of the cavity 10 with the shortest distance.
The shape of the cavity 10 may be a cuboid, or other shapes, which is not specifically limited herein, for convenience of description, the shape of the cavity 10 is described herein as a cuboid, a flexible material layer 20 is disposed in the cavity 10 of the cuboid, the flexible material layer 20 is made of a flexible material, a plurality of grating structures 30 are periodically disposed on the flexible material layer 20, the number of the grating structures 30 and the specific period of the grating structures are set according to actual requirements, which is not specifically limited herein, when the detection device in the application is used for measuring a gas to be measured, pulsed infrared light is used to irradiate the gas to be measured through the cavity 10, under irradiation of the pulsed infrared light, after the gas to be measured absorbs red light matched with the characteristic frequency of the gas molecule to be measured, electrons in the gas molecule to be measured realize energy level transition, and transition from a ground state to an excited state, stopping red light irradiation, returning molecules of the gas to be measured to a ground state or other energy levels in a non-radiative manner from an excited state, in the process, releasing energy in the form of heat, wherein the heat makes water vapor in the gas to be measured and the gas to be measured expand, and further makes the flexible material layer 20 deform, so that the distance between the grating structures 30 arranged on the flexible material layer 20 changes, further makes the resonance wavelength of the grating structures 30 change, pulsed infrared light irradiates the grating structures 30, and because the resonance wavelength of the grating structures 30 changes, the spectrum of the optical signal emitted by the grating structures 30 changes, and according to the corresponding relation between the spectrum change and the humidity of the gas to be measured, the humidity of the gas to be measured is obtained, it needs to be noted that the corresponding relation between the spectrum change and the humidity of the gas to be measured, the humidity of the gas to be measured is measured by measuring the amount of water vapor contained in the gas to be measured, and the gas to be measured has only one impurity gas, namely water vapor, and the type of the gas to be measured is known on the premise of measuring the humidity of the gas to be measured.
FIG. 2 is a schematic structural diagram of another apparatus for detecting humidity in gas according to an embodiment of the present invention; as shown in fig. 2, the plurality of grating structures 30 are optionally arranged as prisms, and the cross-sectional area of the plurality of grating structures 30 near the end of the flexible material layer 20 is larger than the cross-sectional area of the plurality of grating structures 30 far from the end of the flexible material layer 20.
This a plurality of grating structures 30 set up to the terrace with edge, and a plurality of grating structures 30 are greater than the cross-sectional area of keeping away from flexible material layer 20 one end near the cross-sectional area of flexible material layer 20 one end, and a plurality of this grating structures 30 are on this flexible material layer 20 upper portion promptly, and the cross section of this grating structure 30 perpendicular to horizontal plane is trapezoidal, and then increases the interval between grating structure 30 and the grating structure 30, is favorable to the entering of aqueous vapor in the gas, convenient detection.
Optionally, the side of the plurality of grating structures 30 facing away from the flexible material layer 20 is provided as a concave surface.
The surface that flexible material layer 20 was kept away from to grating structure 30 sets up to the concave surface, curved recess promptly, moisture condenses in the concave surface on grating structure 30 more easily, the change of the dielectric constant around grating structure 30 is bigger, the red-shift of spectral line is surveyed more obviously more easily, in addition, when gaseous inflation, the pressure grow, single grating structure 30 is because curved concave surface also expands to both sides, the resonant distance of single grating is elongated, the spectral line obviously red-shift, humidity in the air is surveyed more accurately.
FIG. 3 is a schematic structural diagram of another apparatus for detecting humidity in gas according to an embodiment of the present invention; as shown in fig. 3, the detecting device optionally further comprises a ventilation hole 11, and the ventilation hole 11 is arranged on the wall of the cavity 10.
The arrangement position and the arrangement number of the ventilation holes 11 are determined according to actual needs and are not particularly limited.
Optionally, the detection means further comprises a plug for controlling the opening or closing of the venting orifice 11.
The plug is used for controlling the air exchange of the cavity 10, when the air exchange is needed, the plug is opened, so that the gas in the cavity 10 flows out from the air exchange hole 11, and when the air exchange is finished, the plug is closed, so that the space in the cavity 10 is sealed.
Optionally, the cavity wall of the cavity 10 at the end away from the flexible material layer 20 is made of a light-transmitting material.
The gas to be measured in the cavity 10 is irradiated by using pulsed infrared light, and the cavity wall of the end of the cavity 10 away from the flexible material layer 20 is made of a light-transmitting material, so that the red light can enter the cavity 10 more easily.
Optionally, the material of the flexible material layer 20 is a non-thermal expansion and contraction material.
Optionally, the material of each of the plurality of grating structures 30 is a non-thermal expansion and contraction material.
Set up the material of this flexible material layer 20 and a plurality of grating structure 30 into non-expend with heat and contract with cold material, avoid under the irradiation of the infrared light of pulse, this gas that awaits measuring can release the heat, and this gas that awaits measuring takes place the inflation under thermal effect, this flexible material layer 20 and a plurality of grating structure 30 also take place the inflation under thermal effect, flexible material layer 20 and a plurality of grating structure 30 take place the inflation under thermal effect, can change to flexible material layer 20 because of gaseous volume and take place the inflation and mix up, produce the error, set up flexible material layer 20 and a plurality of grating structure 30's material into non-expend with heat and contract with cold material and avoided the existence of this error, the detection device who has this application detects the gas concentration's that awaits measuring accuracy has been increased.
The application provides a detection device of gas humidity includes: a cavity 10, a flexible material layer 20 and a plurality of grating structures 30; the cavity 10 is a sealed cavity 10, the flexible material layer 20 and the grating structures 30 are both arranged inside the cavity 10, the flexible material layer 20 is arranged at one end inside the cavity 10, and the grating structures 30 are periodically arranged on one side, away from the wall of the cavity 10 closest to the flexible material layer 20; when the humidity of the gas to be detected needs to be detected, the gas to be detected is filled into the cavity 10, the pulsed infrared light is used for irradiating the gas to be detected, the gas to be detected can release heat, the gas to be detected expands under the action of the heat, and the flexible material layer 20 is deformed, so that the distance between the grating structures 30 arranged on the flexible material layer 20 is changed, the resonance wavelength of the grating structures 30 is changed, the pulsed infrared light is irradiated on the grating structures 30, and due to the change of the resonance wavelength of the grating structures 30, the spectrum of the light signals emitted by the grating structures 30 is changed, and the humidity of the gas to be detected is obtained according to the corresponding relation between the spectrum change and the humidity of the gas to be detected.
The application provides a detection system of gas humidity, detection system includes: the system comprises a spectrometer, a computer and any one of the gas humidity detection devices, wherein the spectrometer is used for detecting the spectral change emitted by the detection device, and the computer is used for obtaining the humidity of the gas to be detected according to the corresponding relation between the spectral change and the humidity of the gas to be detected.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A device for detecting the humidity of a gas, said device comprising: the grating structure comprises a cavity, a flexible material layer and a plurality of grating structures; the cavity is a sealed cavity, the flexible material layer and the plurality of grating structures are arranged in the cavity, the flexible material layer is arranged at one end in the cavity, and the plurality of grating structures are periodically arranged on one side, away from the wall of the cavity, closest to the flexible material layer.
2. The apparatus of claim 1, wherein the plurality of grating structures are arranged as a prism, and a cross-sectional area of the plurality of grating structures near an end of the flexible material layer is larger than a cross-sectional area of the plurality of grating structures far from the end of the flexible material layer.
3. The apparatus for detecting moisture in a gas as claimed in claim 2, wherein a surface of the grating structures facing away from the flexible material layer is concave.
4. The apparatus for detecting gas humidity according to claim 1, further comprising a ventilation hole, wherein the ventilation hole is disposed on a wall of the chamber.
5. The gas humidity sensor as claimed in claim 4, wherein the sensor further comprises a plug for controlling the opening or closing of the ventilation holes.
6. A gas humidity sensor according to any one of claims 1 to 5, wherein the wall of the chamber at the end of the chamber remote from the flexible material layer is made of a light-transmitting material.
7. A gas humidity detection device according to any one of claims 1 to 5 wherein the flexible material layer is made of a non-thermal expansion and contraction material.
8. The apparatus for detecting humidity of claim 7, wherein the material of each of the plurality of grating structures is a non-thermal expansion and contraction material.
9. A gas humidity detection system, comprising: the gas humidity detection device comprises a spectrometer, a computer and the gas humidity detection device according to any one of claims 1 to 8, wherein the spectrometer is used for detecting the spectral change emitted by the detection device, and the computer is used for obtaining the humidity of the gas to be detected according to the corresponding relation between the spectral change and the humidity of the gas to be detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011559402.7A CN112834429A (en) | 2020-12-25 | 2020-12-25 | Gas humidity detection device and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011559402.7A CN112834429A (en) | 2020-12-25 | 2020-12-25 | Gas humidity detection device and system |
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| Publication Number | Publication Date |
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| CN112834429A true CN112834429A (en) | 2021-05-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011559402.7A Withdrawn CN112834429A (en) | 2020-12-25 | 2020-12-25 | Gas humidity detection device and system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113917243A (en) * | 2021-10-09 | 2022-01-11 | 重庆师范大学 | High-precision optical electroscope device and system based on surface plasmon |
-
2020
- 2020-12-25 CN CN202011559402.7A patent/CN112834429A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113917243A (en) * | 2021-10-09 | 2022-01-11 | 重庆师范大学 | High-precision optical electroscope device and system based on surface plasmon |
| CN113917243B (en) * | 2021-10-09 | 2023-07-25 | 重庆师范大学 | High-precision optical electroscope device and system based on surface plasmons |
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Application publication date: 20210525 |