CN112833691B - Dead volume-free vacuumizing and filling device for flat micro heat pipe - Google Patents
Dead volume-free vacuumizing and filling device for flat micro heat pipe Download PDFInfo
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- CN112833691B CN112833691B CN202110025759.5A CN202110025759A CN112833691B CN 112833691 B CN112833691 B CN 112833691B CN 202110025759 A CN202110025759 A CN 202110025759A CN 112833691 B CN112833691 B CN 112833691B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0283—Means for filling or sealing heat pipes
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Abstract
The invention discloses a non-dead-volume vacuumizing and filling device for a flat micro heat pipe, wherein a filling end and a vacuumizing end are both formed by a fixed shell sleeve and a body, and the fixed shell sleeve is matched with the body through threads; the fixed shell is provided with first channels distributed in an array manner, second channels are arranged in the body along the radial direction, a pumping channel is arranged along the axial direction of the body, the bottom end of the pumping channel is communicated with the second channels, and the top end of the body at the pumping end is connected with a vacuum pump; inserting a micro sample injector into the injection end sampling channel, and injecting the working medium into the micro heat pipe through the micro sample injector; the vacuum pump realizes filling and vacuum pumping of dull and stereotyped miniature heat pipe through filling the cooperation work of filling end and evacuation end, realizes filling repeatedly and can reduce by a wide margin and fill near the dead volume of notes hole dull and stereotyped miniature heat pipe.
Description
Technical Field
The invention belongs to the technical field of filling and packaging of flat micro heat pipes, and particularly relates to a dead-volume-free vacuumizing and filling device for a flat micro heat pipe.
Background
The heat pipe is a heat transfer element which mainly utilizes the phase change heat transfer of a working medium to transfer heat, and the heat transfer capacity of the heat pipe can reach dozens of or even hundreds of times of that of a common solid metal material, so the heat pipe is also called as a thermal superconductor. Meanwhile, the heat pipe can realize long-distance heat transmission, so that the heat pipe is widely applied to the engineering field. In 1984, Cotter firstly proposes the concept of a micro heat pipe, the working principle of the micro heat pipe is similar to that of the traditional heat pipe, and the micro heat pipe is used as a gas-liquid two-phase-change heat exchange device and has the characteristics of small structure and capability of carrying out larger heat transmission in a smaller temperature gradient. The micro heat pipe manufactured based on the MEMS technology can be directly connected and even integrated on the semiconductor chip, so that the compatibility problem of a chip heat dissipation material is solved, the temperature of a hot spot part can be reduced to the maximum extent, and the temperature uniformity of the chip is enhanced. At present, the micro heat pipe represented by a micro channel heat pipe, a micro pulsating heat pipe, a micro vapor chamber and a micro loop heat pipe has wide application prospect in the aspects of cooling and temperature control of smart phones, solar cells, infrared detectors, lasers and the like.
Taking a micro-channel heat pipe as an example, the working process of the traditional micro-channel heat pipe is similar to that of a common heat pipe, but no capillary wick exists in the heat pipe, and the section of a channel of the heat pipe is non-circular and has a sharp corner. The working medium is changed into steam in the evaporation section, and the steam is diffused to the condensation section through the heat insulation section and then condensed to release a large amount of heat, and then the condensate flows back to the evaporation section by virtue of the capillary action of the sharp corner of the section of the channel, and the operation is repeated in such a way. The long-term test research aiming at the micro-channel heat pipe usually needs to repeatedly change the working medium type or the liquid filling rate, and the internal volume space of the micro-heat pipe is extremely limited (10-100 mu L), so that the extra liquid phase volume in the residual dead volume at the filling hole has a great influence on the performance of the heat pipe, even influences the reliability of the test result, and the method is one of the obvious differences between the micro-heat pipe and the common heat pipe. Similar problems exist in other types of flat plate micro heat pipes, so that the filling and sealing device which can be conveniently and repeatedly filled and can greatly reduce the dead volume near the filling hole is developed for the micro heat pipes, and the filling and sealing device has important significance in application.
Disclosure of Invention
In order to solve the not enough that exists among the prior art, this application provides a do not have dead volume evacuation and fill device for dull and stereotyped miniature heat pipe, can realize filling repeatedly and fill and can reduce by a wide margin and fill near the dead volume of notes hole to dull and stereotyped miniature heat pipe, improve the leakproofness simultaneously.
The technical scheme adopted by the invention is as follows:
a filling and vacuum pump for a flat micro heat pipe comprises a filling end and a vacuumizing end, wherein the filling end and the vacuumizing end are both formed by a fixed shell sleeve and a body; a stepped hole is formed in the fixed shell sleeve along the axial direction, and the stepped hole is a first-order round hole, a second-order round hole and a third-order round hole in sequence; threads are tapped on the wall surface of the first-stage round hole, a shaft seal assembly is installed at the first-stage round hole, and a plurality of first channels distributed in an array mode are formed in the fixed shell at the third-stage round hole;
the outer part of the body is matched with the size of the stepped hole of the fixed shell sleeve, so that the outer part of the body is a stepped shaft and sequentially comprises a first stepped shaft, a second stepped shaft and a third stepped shaft from top to bottom; the outer wall of the first-step shaft is provided with threads matched with the wall surface of the first-step round hole; the second-stage shaft is matched with the shaft seal assembly; a plurality of second channels distributed in an array are arranged in the third step shaft; a pumping and injecting channel is axially arranged in the body, and the bottom end of the pumping and injecting channel is communicated with the second channel;
and a micro sample injector is inserted into the sampling and injection channel of the filling end, working medium is injected into the micro heat pipe through the micro sample injector, and the top end of the body of the vacuumizing end is connected with a vacuum pump.
Furthermore, a filling port and a vacuum pumping port are respectively formed in the micro heat pipe, and a third-order round hole of the filling end is formed above the filling end; the third round hole of the vacuumizing end is arranged above the vacuumizing hole.
Further, the thread surface of the first step shaft is coated with a proper amount of vacuum sealing ester.
Further, the shaft seal subassembly includes the sealing washer, and the sealing washer comprises 2 ring seal, has placed the gasket between 2 ring seal.
Furthermore, the number of the second channels is the same as that of the first channels, and the second channels correspond to the first channels one to one.
Further, the bottom of the fixed shell is fixedly connected with the surface of the micro heat pipe through high-temperature epoxy resin.
Further, fill the body inside of annotating the end and set up to the shoulder hole, from last down be the fourth passageway in proper order and take out annotate the passageway, be equipped with the sealing plug in the bottom of fourth passageway, advance kind of passageway and pass the sealing plug and insert and take out annotate the passageway.
Further, a sealing gasket is fixedly arranged at the bottom of the body.
The invention has the beneficial effects that:
according to the device designed by the invention, after the fixed shell is arranged right above the pumping and injection port, the position of the pumping and injection body is adjusted through the threads, and the pumping and injection port of the micro heat pipe is axially aligned with the channel at the bottom of the fixed shell, so that the operations of pumping vacuum and filling are smoothly carried out. After the vacuumizing/filling is completed, the silica gel pad of the vacuumizing/filling body can be sealed in the filling hole only by screwing the threads, so that the sealed micro heat pipe basically free of dead volume is obtained. The device designed by the invention can repeatedly fill the flat micro heat pipe, can greatly reduce the dead volume near the filling opening and simultaneously improve the sealing property.
Drawings
FIG. 1 is a schematic view of the filling end of the present invention;
FIG. 2 is a schematic view of the vacuum end of the present invention;
FIG. 3 is a schematic diagram showing the relative positions of the body and the fixed housing when the two ports are not engaged;
FIG. 4 is a schematic view of the relative positions of the body and the stationary housing when the two ports are engaged;
FIG. 5 is a schematic diagram showing the relative positions of the body and the fixed shell after the heat pipe is packaged;
FIG. 6 is a partially enlarged view of A in FIG. 1;
fig. 7 is a partially enlarged schematic view of B in fig. 2.
In the figure, 1, a micro heat pipe, 2, a sealing ring, 3, a gasket, 4, a fixed shell, 4-1, a first channel, 5, a microsyringe, 5-1, a sample introduction channel, 5-2, a sample introduction plug rod, 6, a sealing plug, 7, a body, 7-1, a second channel, 7-2, a pumping and injecting channel, 7-3, a fourth channel, 8, a sealing gasket, 9, a pagoda-shaped connector, 10, a PU hose, 11, a filling port, 12 and a vacuum pumping port.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1, the dead volume-free vacuum pumping and filling device for the flat micro heat pipe comprises a vacuum pumping end and a filling end, wherein the micro heat pipe 1 is provided with a filling hole 11 and a vacuum pumping hole 12 respectively; the evacuation end and the filling end are both formed by the fixed shell 4 and the body 7. A through hole is formed in the fixed shell sleeve 4 along the vertical direction, the through hole is a stepped hole and is a first-order round hole, a second-order round hole and a third-order round hole from top to bottom in sequence, and the inner diameter of the third-order round hole is gradually decreased. The wall of first order round hole is attacked there is the screw thread, and second order round hole department installs the bearing seal subassembly, and the bearing seal subassembly is shown including sealing washer 2 as figure 6, and sealing washer 2 comprises 2 ring packing, has placed gasket 3 between 2 ring packing. A plurality of first channels 4-1 distributed in an array are arranged in the fixed shell 4 at the third round hole, and the first channels 4-1 are communicated with the third round hole; the distance between the upper end and the lower end of the first channel 4-1 is h 1; in the present embodiment, the first channels 4-1 are arranged in 4 rows and are distributed in an array at 90 ° intervals.
The bottom of the fixed shell sleeve 4 is fixedly connected with the surface of the micro heat pipe 1 through high-temperature epoxy resin; the filling end is arranged in a third-order round hole above the filling hole 11; the vacuum-pumping end is arranged in the third round hole above the vacuum-pumping hole 12. The outer part of the body 7 is matched with the size of the stepped hole of the fixed shell sleeve 4, so that the outer part of the body 7 is a stepped shaft and is sequentially provided with a first stepped shaft, a second stepped shaft and a third stepped shaft from top to bottom; the outer wall of the first-step shaft is provided with threads matched with the wall surface of the first-step round hole, and the surface of the threads is coated with a proper amount of vacuum sealing ester, so that the airtight effect is better. The second stage shaft cooperates with the shaft seal assembly to enhance sealing. A plurality of second channels 7-1 distributed in an array are arranged in the third-order shaft along the radial direction, the number of the second channels 7-1 is the same as that of the first channels 4-1, and the second channels 7-1 are ensured to be in one-to-one correspondence with the first channels 4-1. The second channel 7-1 is at a distance h2 from the bottom end of the body 7, and h2< h 1. As shown in fig. 7, the end of the second channel 7-1 and the end of the first channel 4-1 in the body 7 are both chamfered, so that the machining precision of the thread can be properly reduced to save the cost, and the mode of aligning the channel opening by screwing the thread control has a larger allowable error range; in addition, the transitional structure of the first channel 4-1 can also effectively avoid cavitation when the working medium flows to the corner in the filling process.
A sampling and injection channel 7-2 is formed in the body 7 along the vertical direction, the bottom end of the sampling and injection channel 7-2 is communicated with the intersection of the second channel 7-1, a microsyringe 5 can be inserted into the sampling and injection channel 7-2 at the filling end, more specifically, a sample injection channel 5-1 of the microsyringe 5 is inserted into the sampling and injection channel 7-2, and filling working media are pushed to be injected into the micro heat pipe 1 under the action of a sample injection plug rod 5-2 in the sample injection channel 5-1. In order to improve the sealing performance in the filling process, a stepped hole is formed in the pumping and injecting body 7, a fourth channel 7-3 and a pumping and injecting channel 7-2 are sequentially arranged from top to bottom, a sealing plug 6 is arranged at the bottom of the fourth channel 7-3, and the sampling channel 5-1 penetrates through the sealing plug 6 to be inserted into the pumping and injecting channel 7-2. The top of the body 7 at the evacuation end is provided with a pagoda-shaped connector 9, and the pagoda-shaped connector 9 is connected with a vacuum pump through a PU hose 10 to realize the evacuation of the interior of the micro heat pipe 1.
A sealing gasket 8 is fixedly arranged at the bottom of the body 7, as shown in fig. 5, when the bottom end of the body 7 is contacted with the micro heat pipe 1, a compression buffering effect is achieved, sealing is guaranteed, and meanwhile damage to the micro heat pipe 1 is avoided; when in the position shown in fig. 4, the body 7 is sealed with the micro heat pipe 1 and the fixed shell 4.
For a more clear description of the apparatus for evacuating and filling a flat micro heat pipe protected by the present application, the following description will be made in conjunction with the working process of the apparatus of the present application:
a preparation stage:
firstly, adjusting the body 7 of the filling end to the position shown in FIG. 4, so that the second channels 7-1 of the filling end correspond to the first channels 4-1 one by one; a small amount of working medium is injected into the second channel 7-1 by the microsyringe 5 to exhaust the air in the second channel 7-1; then the body 7 is adjusted to the position shown in figure 3; at this time, the second channel 7-1 is no longer communicated with the first channel 4-1, but the first channel 4-1, the gap between the bottom of the body 7 and the third-step circular hole, the filling port 11 and the micro heat pipe 1 are kept communicated.
And (3) vacuumizing:
adjusting the body 7 of the vacuumizing end to the position shown in FIG. 4, so that the second channels 7-1 of the vacuumizing end correspond to the first channels 4-1 one by one; at the moment, the vacuumizing end, the micro heat pipe 1, a gap between the bottom of the filling end body 7 and the third-order round hole and a first channel 4-1 of the filling end are communicated; the PU hose is used for connecting the pagoda connector at the upper part of the vacuumizing end with the vacuum pump, the vacuum pump is started, the communicated space is vacuumized until the pressure in the space is as low as 0.5Pa, the body 7 of the vacuumizing end is adjusted to the position shown in the figure 5, the body 7 of the vacuumizing end rotates to the lowest position at the moment, and meanwhile, the bottom of the body 7 is tightly pressed with the micro heat pipe 1.
And (3) filling process:
after the vacuum pumping is finished, the body 7 of the filling end is adjusted to the position shown in the figure 4, at the moment, the second channel 7-1 of the filling end corresponds to and is communicated with the first channel 4-1 of the filling end one by one again, and the sampling plug rod 5-2 is pushed to inject working media in the sampling channel 5-1 into the micro heat pipe 1; after filling, the body 7 is rotated downwards, the body 7 is adjusted to the position shown in fig. 5, and then the working medium in the cavity at the bottom of the filling end body 7 is pressed into the micro heat pipe 1, and the bottom of the filling end body 7 is tightly pressed with the micro heat pipe 1; therefore, the non-dead volume encapsulation of the micro heat pipe 1 is realized; because the filling hole is small in size, the volume of the working medium remained at the filling hole is far smaller than the total volume inside the heat pipe and can be ignored, so that the influence of a sealing mode on the heat and mass transfer process inside the micro heat pipe is greatly reduced, and more accurate liquid filling rate of the heat pipe is easily obtained.
The above embodiments are only used for illustrating the design idea and features of the present invention, and the purpose of the present invention is to enable those skilled in the art to understand the content of the present invention and implement the present invention accordingly, and the protection scope of the present invention is not limited to the above embodiments. Therefore, all equivalent changes and modifications made in accordance with the principles and concepts disclosed herein are intended to be included within the scope of the present invention.
Claims (7)
1. A dead volume-free vacuumizing and filling device for a flat micro heat pipe is characterized by comprising a filling end and a vacuumizing end, wherein the filling end and the vacuumizing end are respectively formed by a fixed shell sleeve (4) and a body (7); a stepped hole is formed in the fixed shell sleeve (4) along the axial direction, and the stepped hole is a first-step round hole, a second-step round hole and a third-step round hole in sequence; threads are tapped on the wall surface of the first-stage round hole, a shaft seal assembly is arranged at the first-stage round hole, and a plurality of first channels (4-1) distributed in an array are arranged in the fixed shell (4) at the third-stage round hole;
the outer part of the body (7) is matched with the size of the stepped hole of the fixed shell sleeve (4), so that the outer part of the body (7) is provided with a stepped shaft and a first stepped shaft, a second stepped shaft and a third stepped shaft in sequence from top to bottom; the outer wall of the first-step shaft is provided with threads matched with the wall surface of the first-step round hole; the second-stage shaft is matched with the shaft seal assembly; a plurality of second channels (7-1) distributed in an array are arranged in the third step shaft; a pumping and injecting channel (7-2) is axially arranged in the body (7), and the bottom end of the pumping and injecting channel (7-2) is communicated with the second channel (7-1);
the top end of the body of the vacuumizing end is connected with a vacuum pump; a micro sample injector (5) is inserted into the sampling and injection channel (7-2) at the filling end, and the working medium is injected into the micro heat pipe (1) through the micro sample injector (5);
a filling port (11) and a vacuumizing port (12) are respectively formed in the micro heat pipe (1), and a third-order round hole of the filling end is formed above the filling port (11); the third round hole of the vacuum-pumping end is arranged above the vacuum-pumping port (12).
2. A dead volume-free evacuating and filling device for a flat micro heat pipe as claimed in claim 1, wherein the thread surface of the first step shaft is coated with a proper amount of vacuum sealing ester.
3. The non-dead-volume evacuating and filling device for flat micro heat pipe according to claim 1, wherein the shaft seal assembly comprises a sealing ring (2), the sealing ring (2) is composed of 2 annular sealing rings, and a gasket (3) is disposed between the 2 annular sealing rings.
4. A dead volume-free evacuation and filling device for flat micro heat pipes according to any of claims 1 to 3, wherein the number of the second channels (7-1) is the same as that of the first channels (4-1), and the second channels (7-1) correspond to the first channels (4-1) one by one.
5. The dead-volume-free vacuumizing and filling device for flat micro heat pipes according to claim 4, wherein the bottom of the fixed shell (4) is fixedly connected with the surface of the micro heat pipe (1) through high-temperature epoxy resin.
6. The dead volume-free vacuumizing and filling device for the flat micro heat pipe is characterized in that a stepped hole is formed in the body (7), a fourth channel (7-3) and a pumping channel (7-2) are sequentially arranged from top to bottom, a sealing plug (6) is arranged at the bottom of the fourth channel (7-3) at the filling end, and the sampling channel (5-1) penetrates through the sealing plug (6) to be inserted into the filling channel (7-2).
7. The dead volume-free evacuating and filling device for flat micro heat pipe as claimed in claim 5, wherein the sealing gasket (8) is fixedly installed at the bottom of the body (7).
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CN114941957B (en) * | 2022-05-06 | 2023-10-27 | 中国电子科技集团公司第十研究所 | Integral forming temperature equalization plate liquid filling sealing tool and method based on additive manufacturing |
CN115791322A (en) * | 2022-10-14 | 2023-03-14 | 中国计量科学研究院 | Dead volume-free gravimetric method gas distribution injection port connector |
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JPS5568586A (en) * | 1978-11-20 | 1980-05-23 | Tokico Ltd | Heat pipe working liquid injecting device |
CN102235831A (en) * | 2010-05-07 | 2011-11-09 | 扎尔曼技术株式会社 | Heat pipe production method, a heat pipe produced by means of the production method and a cooling device comprising the heat pipe |
CN104006687A (en) * | 2014-05-15 | 2014-08-27 | 华南理工大学 | Working medium steam perfusion device and method for flat plate type multi-channel heat pipe |
CN105444596A (en) * | 2015-12-14 | 2016-03-30 | 上海利正卫星应用技术有限公司 | Filling device of heat pipe phase change working medium and using method of filling device |
CN110411253A (en) * | 2019-07-11 | 2019-11-05 | 桂林电子科技大学 | A kind of high-temperature heat pipe working medium filling device and method |
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2021
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Patent Citations (5)
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JPS5568586A (en) * | 1978-11-20 | 1980-05-23 | Tokico Ltd | Heat pipe working liquid injecting device |
CN102235831A (en) * | 2010-05-07 | 2011-11-09 | 扎尔曼技术株式会社 | Heat pipe production method, a heat pipe produced by means of the production method and a cooling device comprising the heat pipe |
CN104006687A (en) * | 2014-05-15 | 2014-08-27 | 华南理工大学 | Working medium steam perfusion device and method for flat plate type multi-channel heat pipe |
CN105444596A (en) * | 2015-12-14 | 2016-03-30 | 上海利正卫星应用技术有限公司 | Filling device of heat pipe phase change working medium and using method of filling device |
CN110411253A (en) * | 2019-07-11 | 2019-11-05 | 桂林电子科技大学 | A kind of high-temperature heat pipe working medium filling device and method |
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