CN112827930A - Belt cleaning device for semiconductor processing - Google Patents
Belt cleaning device for semiconductor processing Download PDFInfo
- Publication number
- CN112827930A CN112827930A CN202011620408.0A CN202011620408A CN112827930A CN 112827930 A CN112827930 A CN 112827930A CN 202011620408 A CN202011620408 A CN 202011620408A CN 112827930 A CN112827930 A CN 112827930A
- Authority
- CN
- China
- Prior art keywords
- motor
- box
- semiconductor processing
- drying box
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 47
- 238000004140 cleaning Methods 0.000 title claims abstract description 41
- 238000001035 drying Methods 0.000 claims abstract description 34
- 238000009434 installation Methods 0.000 claims abstract description 10
- 238000005406 washing Methods 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000003756 stirring Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- -1 etc. Chemical compound 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
-
- B08B1/12—
-
- B08B1/32—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/044—Cleaning involving contact with liquid using agitated containers in which the liquid and articles or material are placed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
Abstract
The invention discloses a cleaning device for semiconductor processing, which comprises a base, a drying box and a fixing box, wherein the drying box is installed at the top of the base, an air outlet is installed at one side of the drying box, the fixing box is installed at the other side of the drying box, one side of the fixing box penetrates through the inner wall of the drying box, a fixing rod is installed at the top of the base, a connecting rod is installed at the top of the fixing rod, an installation frame is installed at one side of the connecting rod, a first motor is installed inside the installation frame, a first rotating shaft is installed at the output end of the first motor, a cleaning bin is installed at one end of the first rotating shaft, a second rotating shaft is installed at one side of the cleaning bin, and an installation plate is installed at one end of. According to the semiconductor drying device, the drying device is arranged at the top of the base, so that the semiconductor in the drying box can be dried, the semiconductor can dry moisture more quickly, and the working efficiency can be improved.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a cleaning device for semiconductor processing.
Background
The semiconductor is a substance with conductivity between an insulator and a conductor, the conductivity of the substance is easy to control, and the substance can be used as a component material for information processing, the semiconductor is very important from the viewpoint of technological or economic development, the core unit of many electronic products, such as computers, mobile phones, digital recorders, utilizes the conductivity change of the semiconductor to process information, the common semiconductor materials are silicon, germanium, gallium arsenide, etc., and silicon is the most influential one of various semiconductor materials in commercial application.
The existing semiconductor processing has the following defects:
1. when the traditional semiconductor processing cleaning device is used for cleaning semiconductors, a large amount of dirt can be remained after incomplete cleaning, and the cleaning time is very slow.
2. The conventional semiconductor processing is not provided with a drying device, and the semiconductor needs to be dried for too long after being cleaned, so that the working efficiency is reduced.
Disclosure of Invention
The present invention is directed to a cleaning apparatus for semiconductor processing to solve the above-mentioned problems of the related art.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a belt cleaning device for semiconductor processing, includes base, stoving case and fixed box, the stoving case is installed at the top of base, the air outlet is installed to one side of stoving case, fixed box is installed to the opposite side of stoving case, and one side of fixed box runs through the inner wall of stoving case, the dead lever is installed at the top of base, the connecting rod is installed at the top of dead lever, the mounting bracket is installed to one side of connecting rod, the internally mounted of mounting bracket has first motor, first rotation axis is installed to the output of first motor, the washing storehouse is installed to the one end of first rotation axis, the second rotation axis is installed to one side of washing storehouse, the mounting panel is installed to the one end of second rotation axis.
Preferably, the spring holder is installed to the bottom of base, and the connecting piece is located spring holder one side, and the removal wheel is installed to the inboard of connecting piece.
Preferably, the motor is installed through branch in the inside of fixed box, and the axis of rotation is installed to the output of motor, and the fan is installed to the one end of axis of rotation, and the air intake is installed to one side of fixed box, and the internally mounted of fixed box has the zone of heating.
Preferably, install the inoxidizing coating on the inner wall in washing storehouse, the liquid outlet is installed to the bottom in washing storehouse, and the internally mounted of liquid outlet has the filter screen, and the discharge gate is installed to the bottom in washing storehouse and the discharge gate is located one side of liquid outlet.
Preferably, a second motor is installed at one end of the second rotating shaft, and a fixing frame is installed outside the second motor.
Preferably, a brush rod is installed on one side of the installation plate, and a brush body is installed on the outer side of the brush rod.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the semiconductor cleaning device, the stirring device is arranged in the cleaning bin, the second motor in the stirring device drives the brush rod to rotate, the brush can rotate through the rotation of the brush rod, the semiconductor in the cleaning bin can be sufficiently cleaned through the rotation of the brush in the cleaning bin, the semiconductor can be cleaned more cleanly, the cleaning bin is driven to rotate through the second motor, the stirring device and the cleaning bin rotate in opposite directions, and therefore the semiconductor can be cleaned more quickly, the working efficiency is improved, and the cleaning is quicker.
2. According to the invention, the drying device is arranged at the top of the base, the fan is driven by the motor in the drying device to rotate, so that external wind can enter the drying device through the rotation of the fan, the wind can pass through the heating layer, the wind is heated through the heating layer, and the heated wind is blown into the drying box by the fan, so that the semiconductor in the drying box can be dried, and the semiconductor can dry moisture more quickly, thereby improving the working efficiency.
Drawings
FIG. 1 is a cross-sectional view of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is a schematic view of the cleaning apparatus of the present invention;
FIG. 4 is a schematic structural diagram of a drying apparatus according to the present invention;
in the figure: 1. a base; 101. a spring seat; 102. a connecting member; 103. a moving wheel; 2. a drying box; 201. an air outlet; 3. a fixing box; 301. an air inlet; 302. a strut; 303. a motor; 304. a rotating shaft; 305. a fan; 306. a heating layer; 4. fixing the rod; 401. a connecting rod; 5. a mounting frame; 501. a first motor; 502. a first rotating shaft; 6. cleaning the bin; 601. a protective layer; 602. a liquid outlet; 603. a filter screen; 604. a discharge port; 7. a second rotation shaft; 701. a fixed mount; 702. a second motor; 8. mounting a plate; 801. a brush rod; 802. a brush body.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, an embodiment of the present invention is shown: a cleaning device for semiconductor processing comprises a base 1, a drying box 2 and a fixing box 3, wherein the drying box 2 is installed at the top of the base 1, an air outlet 201 is installed at one side of the drying box 2, the fixing box 3 is installed at the other side of the drying box 2, one side of the fixing box 3 penetrates through the inner wall of the drying box 2, the base 1 can provide an installation position for the cleaning device, meanwhile, the drying box 2 can not contact the ground, damage is prevented, the drying box 2 can be used for storing cleaned semiconductors, the cleaned semiconductors can be stored in the drying box 2 to be dried, a position is provided for drying the semiconductors, the fixing box 3 can be used for fixing a motor 303, the motor 303 can stably work and cannot shake, a fixing rod 4 is installed at the top of the base 1, a connecting rod 401 is installed at the top of the fixing rod 4, an installation frame 5 is installed at one side of the connecting rod 401, the first motor 501 is arranged in the mounting rack 5, the first rotating shaft 502 is arranged at the output end of the first motor 501, the fixing rod 4 can play a supporting role, meanwhile, a mounting position can be provided for the connecting rod 401, the connecting rod 401 can provide a mounting position for the mounting rack 5, the mounting rack 5 can be used for fixing the first motor 501, so that the first motor 501 can operate more stably, the first motor 501 can convert electric energy into kinetic energy after being electrified and provide power for the rotation of the cleaning bin 6, the cleaning bin 6 can be driven to rotate through the rotation of the first rotating shaft 502, the cleaning bin 6 is arranged at one end of the first rotating shaft 502, the second rotating shaft 7 is arranged at one side of the cleaning bin 6, the mounting plate 8 is arranged at one end of the second rotating shaft 7, the cleaning bin 6 can provide a cleaning space for the cleaning of semiconductors, and the mounting plate 8 can be driven to rotate through the rotation of the second rotating shaft 7, the mounting plate 8 can provide a mounting position for the brush rod 801 and can drive the brush rod 801 to rotate.
Further, spring holder 101 is installed to base 1's bottom, connecting piece 102 is installed to base 1's bottom, and connecting piece 102 is located spring holder 101 one side, removal wheel 103 is installed to the inboard of connecting piece 102, spring holder 101 can play absorbing effect, make belt cleaning device can not produce too big rocking, connecting piece 102 can be for removing the position that wheel 103 provided the installation, the removal through removing wheel 103 can drive belt cleaning device and remove, make the easier of staff's removal.
Further, motor 303 is installed through branch 302 in the inside of fixed box 3, axis of rotation 304 is installed to the output of motor 303, fan 305 is installed to the one end of axis of rotation 304, air intake 301 is installed to one side of fixed box 3, the internally mounted of fixed box 3 has zone of heating 306, branch 302 can be used for fixed motor 303, motor 303 can turn into kinetic energy with the electric energy after the circular telegram, provide power for drying device, rotation through axis of rotation 304 can make fan 305 rotate, the rotation through fan 305 can make during outside wind gets into drying device, wind can pass through zone of heating 306, heat wind through zone of heating 306, fan 305 blows into stoving case 2 with the wind of heating again, thereby can make the semiconductor in stoving case 2 dry, thereby can make the semiconductor can be more quick dry moisture can improve work efficiency.
Further, install inoxidizing coating 601 on the inner wall of washing storehouse 6, liquid outlet 602 is installed to the bottom of washing storehouse 6, the internally mounted of liquid outlet 602 has filter screen 603, the bottom of washing storehouse 6 is installed discharge gate 604 and is located one side of liquid outlet 602, inoxidizing coating 601 can be used for protecting inside semiconductor, can not make the semiconductor receive the damage in the inside of washing storehouse 6, liquid outlet 602 can provide the space for the outflow of the inside washing liquid in washing storehouse 6, filter screen 603 can prevent that the semiconductor from flowing out the literary composition outside, discharge gate 604 can take out for the semiconductor that has cleaned and provide the position.
Further, a second motor 702 is installed at one end of the second rotating shaft 7, a fixing frame 701 is installed outside the second motor 702, the second motor 702 can convert electric energy into kinetic energy after being electrified, power is provided for rotation of the cleaning and stirring device, meanwhile, an installation position is also provided for the installation plate 8, and the fixing frame 701 is used for fixing the second motor 702, so that the second motor 702 can run more stably without shaking.
Further, brush rod 801 is installed to one side of mounting panel 8, and brush body 802 is installed to brush rod 801's the outside, and brush rod 801 can provide the mounted position for brush body 802, through brush rod 801's rotation to can make brush body 802 rotate, thereby can play clear effect through brush body 802's rotation.
The working principle is as follows: before using belt cleaning device, whether the device exists the damage earlier, various circumstances such as part is not hard up should be examined earlier, at first should remove the position that uses with removing wheel 103 with belt cleaning device earlier, then fix spring holder 101 subaerial, semiconductor and the washing liquid that will need processing add in washing storehouse 6, open the operation with first motor 501 and second motor 702, can drive washing storehouse 6 and agitating unit and rotate, thereby make the semiconductor obtain wasing, the semiconductor that has washd gets into in drying box 2 from discharge gate 604, can dry the semiconductor in drying box 2 through drying device, thereby can improve work efficiency.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.
Claims (6)
1. The utility model provides a belt cleaning device for semiconductor processing, includes base (1), stoving case (2) and fixed box (3), its characterized in that: a drying box (2) is arranged at the top of the base (1), an air outlet (201) is arranged at one side of the drying box (2), a fixing box (3) is arranged at the other side of the drying box (2), one side of the fixed box (3) penetrates through the inner wall of the drying box (2), the top of the base (1) is provided with a fixed rod (4), the top of the fixed rod (4) is provided with a connecting rod (401), one side of the connecting rod (401) is provided with a mounting rack (5), a first motor (501) is arranged in the mounting rack (5), a first rotating shaft (502) is arranged at the output end of the first motor (501), washing storehouse (6) is installed to the one end of first rotation axis (502), second rotation axis (7) are installed to one side of washing storehouse (6), mounting panel (8) are installed to the one end of second rotation axis (7).
2. The cleaning apparatus for semiconductor processing according to claim 1, wherein: spring holder (101) are installed to the bottom of base (1), and connecting piece (102) are located spring holder (101) one side, and removal wheel (103) are installed to the inboard of connecting piece (102).
3. The cleaning apparatus for semiconductor processing according to claim 1, wherein: the inside of fixed box (3) is installed motor (303) through branch (302), and axis of rotation (304) are installed to the output of motor (303), and fan (305) are installed to the one end of axis of rotation (304), and air intake (301) are installed to one side of fixed box (3), and the internally mounted of fixed box (3) has zone of heating (306).
4. The cleaning apparatus for semiconductor processing according to claim 1, wherein: install inoxidizing coating (601) on the inner wall in washing storehouse (6), liquid outlet (602) are installed to the bottom in washing storehouse (6), and the internally mounted of liquid outlet (602) has filter screen (603), and discharge gate (604) are located one side of liquid outlet (602) are installed to the bottom in washing storehouse (6).
5. The cleaning apparatus for semiconductor processing according to claim 1, wherein: and a second motor (702) is installed at one end of the second rotating shaft (7), and a fixing frame (701) is installed outside the second motor (702).
6. The cleaning apparatus for semiconductor processing according to claim 1, wherein: a brush rod (801) is installed on one side of the installation plate (8), and a brush body (802) is installed on the outer side of the brush rod (801).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011620408.0A CN112827930A (en) | 2020-12-31 | 2020-12-31 | Belt cleaning device for semiconductor processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011620408.0A CN112827930A (en) | 2020-12-31 | 2020-12-31 | Belt cleaning device for semiconductor processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112827930A true CN112827930A (en) | 2021-05-25 |
Family
ID=75925717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011620408.0A Pending CN112827930A (en) | 2020-12-31 | 2020-12-31 | Belt cleaning device for semiconductor processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112827930A (en) |
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| CN207238583U (en) * | 2017-09-01 | 2018-04-17 | 江西沁园春陶瓷有限公司 | A kind of function ceramics retracting device |
| CN108813666A (en) * | 2018-05-25 | 2018-11-16 | 吴子涵 | A kind of Easy assembling glass electric cleaning machine |
| CN109047078A (en) * | 2018-06-26 | 2018-12-21 | 上海曙赢新材料有限公司 | A kind of new material technology exploitation new ceramics cleaning device with drying function |
| CN208449996U (en) * | 2018-06-01 | 2019-02-01 | 青海建源药业有限公司 | A kind of medicinal material cleaning device |
| CN208613140U (en) * | 2018-05-07 | 2019-03-19 | 新昌县羽林街道全顺机械厂 | A kind of auto parts cleaning device |
| CN208758200U (en) * | 2018-08-23 | 2019-04-19 | 深圳市容浩五金科技有限公司 | A kind of gasket cleaning equipment |
| US20190201949A1 (en) * | 2016-09-13 | 2019-07-04 | SCREEN Holdings Co., Ltd. | Substrate processing device |
| CN209577581U (en) * | 2018-12-03 | 2019-11-05 | 苏州科裕精密机械有限公司 | A kind of hardware cleaning device |
| CN110822833A (en) * | 2019-11-21 | 2020-02-21 | 江苏新达石英有限公司 | Quartz sand washing and drying device and using method thereof |
| CN111744874A (en) * | 2020-07-03 | 2020-10-09 | 顾骏 | Cleaning device for production and processing of semiconductor products |
-
2020
- 2020-12-31 CN CN202011620408.0A patent/CN112827930A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104921271A (en) * | 2015-06-18 | 2015-09-23 | 苏晓玲 | Efficient vegetable cleaning machine |
| US20190201949A1 (en) * | 2016-09-13 | 2019-07-04 | SCREEN Holdings Co., Ltd. | Substrate processing device |
| CN207238583U (en) * | 2017-09-01 | 2018-04-17 | 江西沁园春陶瓷有限公司 | A kind of function ceramics retracting device |
| CN208613140U (en) * | 2018-05-07 | 2019-03-19 | 新昌县羽林街道全顺机械厂 | A kind of auto parts cleaning device |
| CN108813666A (en) * | 2018-05-25 | 2018-11-16 | 吴子涵 | A kind of Easy assembling glass electric cleaning machine |
| CN208449996U (en) * | 2018-06-01 | 2019-02-01 | 青海建源药业有限公司 | A kind of medicinal material cleaning device |
| CN109047078A (en) * | 2018-06-26 | 2018-12-21 | 上海曙赢新材料有限公司 | A kind of new material technology exploitation new ceramics cleaning device with drying function |
| CN208758200U (en) * | 2018-08-23 | 2019-04-19 | 深圳市容浩五金科技有限公司 | A kind of gasket cleaning equipment |
| CN209577581U (en) * | 2018-12-03 | 2019-11-05 | 苏州科裕精密机械有限公司 | A kind of hardware cleaning device |
| CN110822833A (en) * | 2019-11-21 | 2020-02-21 | 江苏新达石英有限公司 | Quartz sand washing and drying device and using method thereof |
| CN111744874A (en) * | 2020-07-03 | 2020-10-09 | 顾骏 | Cleaning device for production and processing of semiconductor products |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210525 |