CN112827272A - Intelligent electronic gas tail gas recovery device and method - Google Patents
Intelligent electronic gas tail gas recovery device and method Download PDFInfo
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- CN112827272A CN112827272A CN202110207728.1A CN202110207728A CN112827272A CN 112827272 A CN112827272 A CN 112827272A CN 202110207728 A CN202110207728 A CN 202110207728A CN 112827272 A CN112827272 A CN 112827272A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/261—Drying gases or vapours by adsorption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/38—Removing components of undefined structure
- B01D53/40—Acidic components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/38—Removing components of undefined structure
- B01D53/42—Basic components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
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Abstract
The invention relates to the technical field of electronic gas tail gas and waste gas recovery, in particular to an electronic gas tail gas intelligent recovery device and method. The invention comprises a base plate and a control platform, wherein the control platform is arranged at one end of the top of the base plate, and the invention also comprises: the device comprises a first processing mechanism, a detection mechanism, a second processing mechanism, a third processing mechanism, a gas dehumidifying mechanism and an electronic gas collecting tank, wherein the other end of the top of the substrate is provided with the first processing mechanism, one side of the top of the substrate, which is positioned on a console, is respectively provided with the second processing mechanism and the third processing mechanism, the other side of the top of the substrate, which is positioned on the console, is provided with the gas dehumidifying mechanism, the side of the top of the substrate, which is positioned on the first processing mechanism, is provided with the electronic gas collecting tank, and the first processing mechanism comprises a first processing box. The invention has compact structure, continuous operation, convenient movement of the device, cost saving and high recovery efficiency.
Description
Technical Field
The invention relates to the technical field of electronic gas tail gas and waste gas recovery, in particular to an electronic gas tail gas intelligent recovery device and method.
Background
The electronic gas is an indispensable basic supporting raw material in the manufacturing process of developing integrated circuits, photoelectrons and microelectronics, particularly ultra-large scale integrated circuits, liquid crystal display devices, semiconductor light-emitting devices and semiconductor materials, is called blood and grain in the electronic industry, and the purity and cleanliness of the electronic gas directly influence the quality, the integration level, specific technical indexes and the yield of the photoelectrons and the microelectronic components, the accuracy and the precision of the circuit and the device are fundamentally restricted, the utilization rate of the electronic gas is only 30 to 70 percent no matter the electronic gas is used as a cleaning agent or an etching agent, therefore, the tail gas of the electronic gas contains a large amount of unused electronic gas and (C-H) n polymers generated in the cleaning and etching process, meanwhile, most of the electronic gases are greenhouse gases, which are the largest greenhouse gas emission source in the semiconductor industry: the tail gas emission of the electronic gas not only causes the waste of the electronic gas, but also affects the environmental protection.
The existing electronic gas tail gas recovery device is generally directly provided with a plurality of spray towers, impurities in gas are removed through continuous spraying of the gas, operation procedures are multiple, equipment cost is high, operation is complex, recovery efficiency is low, gas leakage is easily caused in a plurality of operation procedure processes, and the recovery effect of the gas is influenced.
Disclosure of Invention
The invention aims to provide an intelligent electronic gas tail gas recovery device and method to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides an electronic gas tail gas intelligence recovery unit, includes the base plate and controls the platform, the one end at base plate top is provided with controls the platform, still includes: the device comprises a first processing mechanism, a detection mechanism, a second processing mechanism, a third processing mechanism, a gas dehumidifying mechanism and an electronic gas collecting tank, wherein the first processing mechanism is arranged at the other end of the top of the substrate;
the first treatment mechanism comprises a first treatment box, an impurity collection box, an electric gas inlet, a filter screen, a filter cavity, a washing cavity, a first vent pipe, a communication pipe, a first gas outlet, a first packing layer, a first positioning plate and a fixing plate, the first treatment box is fixedly arranged at the top of the base plate, the lower end of the interior of the first treatment box is provided with the filter cavity, the top end of the interior of the filter cavity is provided with the filter screen, the lower end of the first treatment box is provided with the impurity collection box, the impurity collection box is arranged in the filter cavity in a sliding manner, the impurity collection box is connected with the filter cavity in a sealing manner, the top end of the filter cavity is provided with an electronic gas inlet, and the electronic gas inlet is positioned in an area between the filter screen and the impurity;
the first processing box is characterized in that a water washing cavity is arranged on the filter cavity, the water washing cavity is connected with the filter cavity through a sealing partition plate, a communicating pipe is arranged in the filter cavity, the end of the communicating pipe extends into the low end of the inner portion of the water washing cavity, a first ventilating pipe is arranged at one end of the communicating pipe located at the low end of the inner portion of the water washing cavity, the first ventilating pipe is integrally of a U-shaped structure, and a first gas outlet is formed in the outer side of the first ventilating pipe at equal intervals.
Preferably, washing intracavity part is provided with two first packing layers respectively, and the washing intracavity is located the bottom of first packing layer and the equal fixed mounting in bottom has first locating plate, the bleeder vent of vertical direction is seted up to the surperficial equidistance of first locating plate, the intercommunication groove has all been seted up to the tip that the lateral wall of first processing case is located first packing layer, and the intercommunication inslot is connected with the fixed plate, the tip of first packing layer and first locating plate all is connected with the fixed plate, the equal an organic whole in both ends of fixed plate and first processing case is provided with the flange, and passes through fixed screw fixed connection between the flange on fixed plate and the first processing case, be provided with sealed the pad between the flange on fixed plate and the first processing case, first gas outlet sets up towards first packing layer.
Preferably, first case lateral wall fixed mounting of handling has first water pump, and the end of intaking of first water pump is connected with the low side that washes the intracavity portion, first connecting pipe is installed to the play water end of first water pump, the tip of first connecting pipe forms two bleeder, and the tip of two bleeder all stretches into first processing incasement, two bleeder of first processing incasement portion are located two first packing layers directly over respectively, one section equidistance that the bleeder is located first processing incasement portion is provided with first hydrojet mouth, and first hydrojet mouth sets up towards first packing layer.
Preferably, detection mechanism includes detection case and acid-base detector, the top fixed mounting of first processing case lateral wall has the detection case, and the lateral wall fixed mounting of detection case has the acid-base detector, control a test table electric connection acid-base detector, and inside the detection head of acid-base detector stretched into the detection case, the top of first processing case becomes the arc structure, and the second breather pipe is installed at the top of first processing case, the tip of second breather pipe is connected with the top of detection case.
Preferably, the second treatment mechanism and the third treatment mechanism both comprise second treatment tanks, second air outlets, second water pumps, second connecting pipes and second liquid spraying ports, two second treatment tanks are respectively and fixedly mounted on the top of the substrate and positioned at the side edges of the console, the lower ends of the two second treatment tanks are respectively provided with an acidic solution and an alkaline solution, the lower end of the detection tank is provided with a third air vent pipe, the outside of the third air vent pipe is respectively connected with a first air vent branch pipe and a second air vent branch pipe, the end parts of the first air vent branch pipe and the second air vent branch pipe respectively extend into the lower ends of the two second treatment tanks, and the sections of the first air vent branch pipe and the second air vent branch pipe positioned in the second treatment tanks are provided with the second air outlets at equal intervals;
the solenoid valve is all installed in the outside of first branch pipe of ventilating and second branch pipe of ventilating, the second is handled the incasement, the base plate top is located two seconds and is handled the case side and all install the second water pump, the end of intaking of second water pump is connected with the low side that the case was handled to the second, the second connecting pipe is installed to the play water end of second water pump, and the tip of second connecting pipe stretches into the second and handles the top of incasement portion, one section equidistance that the second connecting pipe is located the second and handles incasement portion is provided with the second and spouts the liquid mouth, the fourth trachea is all installed at the top that the case was handled to the second, and two fourth trachea's end connection has the fifth trachea, the check valve is all installed in fifth trachea and the communicating pipe outside.
Preferably, the second is handled the incasement and is located second connecting pipe below and be provided with the second packing layer, and the top and the bottom that the incasement is located the second packing layer are handled to the second all are provided with the second locating plate, the bleeder vent has been seted up to second locating plate surface equidistance, the spacing groove has been seted up to the lateral wall that the case was handled to the second, and installs the limiting plate through the fixed screw in the spacing groove, second packing layer and second locating plate tip and limiting plate fixed connection, be provided with the sealing layer between limiting plate and the second processing case, the surface of limiting plate and fixed plate all is provided with the handle.
Preferably, the branch pipe is fixedly arranged in a section of spiral structure in the first treatment box.
Preferably, gaseous dehumidification mechanism includes drying cabinet and moisture absorption layer, the base plate top is located controls the platform side and installs the drying cabinet, and is provided with the moisture absorption layer in the drying cabinet, the compressor is installed to third through gas tubular's tip, and the end of giving vent to anger of compressor is connected with the low side of drying cabinet, the recovery pump is installed at the base plate top, the sixth logical trachea is all installed to the inlet end of recovery pump and the end of giving vent to anger, and the sixth logical trachea's of recovery pump inlet end department tip is connected with the top of drying cabinet, the sixth logical trachea and the electronic gas collection tank of the end of giving vent to anger of recovery pump are connected, the tracheal tip of fifth logical is connected with the low side of drying cabinet.
Preferably, the bottom equidistance of base plate is installed and is removed the wheel, the lateral wall that first processing case and second were handled the case all is provided with the observation window.
The invention discloses an intelligent electronic gas tail gas recovery method, which is based on the device provided by the invention and comprises the following steps:
the method comprises the following steps: electronic gas is arranged in a filter cavity through an electronic gas inlet on a first processing box, the gas entering the filter cavity is filtered through a filter screen for filtering micro particles, impurities filtered for a long time are arranged in an impurity collecting box for collection, the filtered gas enters a communicating pipe, enters a first ventilating pipe through a communicating pipe and is discharged through a first gas outlet, a console controls a first water pump to work at the same time, water is pumped into two branch pipes and is sprayed to a first packing layer through first liquid spraying ports on the two branch pipes, the gas is discharged through the first gas outlet and is fully contacted with the water in the upward moving process of the first packing layer, two thorough water washing processes are achieved, and water-soluble impurities in the electronic gas are removed;
step two: gas is arranged in the detection box through a second vent pipe, the acid-base detector works, when the pH value of the electronic gas reaches the standard, electromagnetic valves on the first vent branch pipe and the second vent branch pipe are both in a closed state, the gas reaching the standard is directly arranged in the drying box through a third vent pipe for drying, when the pH value of the gas is detected to exceed the standard, the electromagnetic valve on the second vent branch pipe is opened, the gas enters a second treatment box on a third treatment mechanism, a second water pump on the third treatment mechanism works to pump alkali liquor into a second connecting pipe and spray the alkali liquor to a second packing layer through a second liquid spraying port, the gas in the second vent branch pipe enters the second treatment box and is washed with alkali, the electronic gas is subjected to acid removal, when the pH value is detected to exceed the standard, the electromagnetic valve on the first vent branch pipe is opened, the gas enters the second treatment box on the second treatment mechanism, at the moment, a second water pump on the second treatment mechanism works to pump acid liquor into the second connecting pipe and spray the acid liquor to the second packing layer through a second liquor spraying port, and the gas in the first ventilating branch pipe enters a second treatment box and is subjected to acid washing to realize the alkali washing process of the electronic gas;
step three: the treated gas is placed in the fifth vent pipe through the fourth vent pipe, gas compression is carried out through the compressor, the compressed gas enters the drying oven, drying treatment is carried out through the moisture absorption layer inside the drying oven, and finally the gas is recovered to the inside of the electronic gas collection tank under the work of the recovery pump.
Compared with the prior art, the invention has the beneficial effects that: the invention is convenient for primary treatment of the electronic gas through the filter cavity arranged in the first treatment box on the first treatment mechanism, the filter screen in the filter cavity is convenient for filtering micro-particles in the gas, the filtered impurities are convenient for collecting treatment through the arrangement of the impurity collecting box, the electronic gas is convenient for washing through the arrangement of the washing cavity, the electronic gas is convenient for high-efficiency washing through the arrangement of the two first packing layers arranged in the washing cavity, and the acid-base value of the electronic gas is convenient to detect through the arrangement of the acid-base detector of the detection mechanism, the acid-washing and alkali-washing of the electronic gas are convenient through the second treatment mechanism and the third treatment mechanism, when the acid-base value of the electronic gas reaches the standard, the electromagnetic valves on the first vent branch pipe and the second vent branch pipe are both in a closed state, when the acid content of the gas is detected to be over standard, the electromagnetic valve on the first ventilation branch pipe is opened to ensure that the gas enters the first treatment box on the first treatment mechanism and is washed by alkali to remove acid from the electronic gas, when the acid content of the gas is detected to be over standard, the electromagnetic valve on the first ventilation branch pipe is opened to ensure that the gas enters the first treatment box on the first treatment mechanism and is washed by alkali, the gas in the first ventilation branch pipe enters the first treatment box on the first treatment mechanism, the electromagnetic valve on the second ventilation branch pipe works to ensure that the gas enters the first treatment box on the first treatment mechanism and is washed by alkali, the electromagnetic valve on the first ventilation branch pipe is opened to ensure that the gas enters the first treatment box on the first treatment mechanism and the second water pump on the first treatment mechanism works to pump acid liquor into the first connection pipe and sprays the acid liquor to the first treatment box through the first water spray port, and the gas in the first ventilation branch pipe enters the first acid washing treatment box, the realization is convenient for detach moisture in the gas through the setting of gaseous moisture removal mechanism to electronic gas's alkali wash process, and whole device compact structure, the operation is continuous, conveniently removes the device, can realize saving cost and recovery efficiency height to electronic gas's intelligent recovery processing.
Drawings
FIG. 1 is a schematic view of the overall connection structure of the present invention;
FIG. 2 is a schematic view of the overall internal connection structure of the present invention;
FIG. 3 is a schematic view of the internal connection structure of the drying box according to the present invention;
FIG. 4 is an enlarged view of the connection structure at A of the present invention;
FIG. 5 is a schematic view of the connection structure of the present invention enlarged at B;
FIG. 6 is a schematic view of the connection structure of the first and second processing mechanisms according to the present invention;
FIG. 7 is a schematic view of the connection structure of the present invention enlarged at C;
fig. 8 is a schematic view of the connection structure of the detection mechanism of the present invention.
In the figure: 1. a substrate; 2. a first processing mechanism; 3. a detection mechanism; 4. a second processing mechanism; 5. a third processing mechanism; 6. a gas dehumidifying mechanism; 7. an electron gas collection canister; 8. a first treatment tank; 9. an impurity collection box; 10. an electron gas inlet; 11. a filter screen; 12. a filter chamber; 13. a water washing cavity; 14. a first vent pipe; 15. a communicating pipe; 16. a first air outlet; 17. a first filler layer; 18. a first positioning plate; 19. a fixing plate; 20. a gasket; 21. a first water pump; 22. a first connecting pipe; 23. a branch pipe; 24. a second vent pipe; 25. a detection box; 26. an acid-base detector; 27. a third vent pipe; 28. a first vent leg; 29. a second vent leg; 30. an electromagnetic valve; 31. a second treatment tank; 32. a second air outlet; 33. a second packing layer; 34. a second positioning plate; 35. a convex plate; 36. a handle; 37. a second water pump; 38. a second connecting pipe; 39. a second liquid jet; 40. a fourth air vent pipe; 41. a fifth ventilation pipe; 42. a one-way valve; 43. a drying oven; 44. a moisture absorbing layer; 45. a compressor; 46. a recovery pump; 47. a sixth ventilation pipe; 48. a moving wheel; 49. a console; 50. a first liquid ejection port; 51. an observation window; 52. and a limiting plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, fig. 6 and fig. 8, the present invention provides a technical solution: the utility model provides an electronic gas tail gas intelligence recovery unit, includes base plate 1 and controls platform 49, the one end at base plate 1 top is provided with controls platform 49, still includes: the device comprises a first processing mechanism 2, a detection mechanism 3, a second processing mechanism 4, a third processing mechanism 5, a gas dehumidifying mechanism 6 and an electronic gas collecting tank 7, wherein a control platform 49 is arranged to control the operation of the electronic gas recovery device;
referring to fig. 1 and 8, a first processing mechanism 2 is disposed at the other end of the top of the substrate 1, a second processing mechanism 4 and a third processing mechanism 5 are disposed at one side of a console 49 on the top of the substrate 1, respectively, a gas dehumidifying mechanism 6 is disposed at the other side of the console 49 on the top of the substrate 1, an electronic gas collecting tank 7 is mounted at the side of the first processing mechanism 2 on the top of the substrate 1, the second processing mechanism 4 and the third processing mechanism 5 are disposed to facilitate acid cleaning and alkali cleaning of gas, and the gas dehumidifying mechanism 6 is disposed to facilitate removal of moisture in gas;
referring to fig. 2, the first treatment mechanism 2 includes a first treatment tank 8, an impurity collecting box 9, an electronic gas inlet 10, a filter screen 11, a filter chamber 12, a washing chamber 13, a first vent pipe 14, a communicating pipe 15, a first air outlet 16, a first packing layer 17, a first positioning plate 18 and a fixing plate 19, the first treatment tank 8 is fixedly installed on the top of the substrate 1, and the lower end of the interior of the first processing box 8 is provided with a filter cavity 12, the top end of the interior of the filter cavity 12 is provided with a filter screen 11, the lower end of the first processing box 8 is provided with an impurity collecting box 9, the impurity collecting box 9 is arranged in the filter cavity 12 in a sliding way, the impurity collecting box 9 is connected with the filter cavity 12 in a sealing way, the top end of the filter cavity 12 is provided with an electronic gas inlet 10, and the electronic gas inlet 10 is positioned in the area between the filter screen 11 and the impurity collecting box 9.
It should be noted that the filter chamber 12 is arranged to filter out micro particles in the electronic gas, so as to realize primary treatment of the electronic gas, and the impurity collecting box 9 is arranged to collect the filtered impurities;
referring to fig. 2 and 4, a water washing chamber 13 is arranged on the filtering chamber 12 in the first processing box 8, and the washing chamber 13 is connected with the filtering chamber 12 through a sealing clapboard, a communicating pipe 15 is arranged in the filtering chamber 12, and the end of the communicating pipe 15 extends into the lower end of the interior of the washing chamber 13, one end of the communicating pipe 15 located at the lower end of the interior of the washing chamber 13 is provided with a first vent pipe 14, the first vent pipe 14 is of a U-shaped structure as a whole, the first vent pipe 14 is provided with first air outlets 16 at equal intervals on the outer side, and through the arrangement of the water washing cavity 13, the gas passes through washing chamber 13 in-process, makes first hydrojet 50 spray water to gas, realizes the washing process to gas, sets first breather pipe 14 to the U-shaped structure, can make the first breather pipe 14 of U-shaped structure large tracts of land face gas spray water, makes gaseous abundant with the washing liquid contact, realizes the high-efficient processing to gas.
Please refer to fig. 4, two first packing layers 17 are respectively arranged inside the water washing cavity 13, a first positioning plate 18 is fixedly arranged at the bottom and the bottom of the first packing layer 17 inside the water washing cavity 13, air holes in the vertical direction are formed in the surface of the first positioning plate 18 at equal intervals, a plurality of air holes are formed in the first positioning plate 18, so that electronic gas can permeate through the air holes, the gas can be conveniently in full contact with water in the process through the first packing layer 17, thorough water washing of the gas can be realized, the first packing layer 17 can be conveniently fixed through the first positioning plate 18, and the first packing layer 17 can be prevented from being blown away in the process of gas passing.
Referring to fig. 4 and 5, the end of the side wall of the first processing box 8, which is located at the first packing layer 17, is provided with a communicating groove, and a fixing plate 19 is connected in the communicating groove, the end of the first packing layer 17 and the end of the first positioning plate 18 are connected with the fixing plate 19, the fixing plate 19 and the two ends of the first processing box 8 are integrally provided with a convex plate 35, the fixing plate 19 and the convex plate 35 on the first processing box 8 are fixedly connected through a fixing screw, a sealing gasket 20 is arranged between the fixing plate 19 and the convex plate 35 on the first processing box 8, the first air outlet 16 is arranged towards the first packing layer 17, the fixing plate 19, the first packing layer 17 and the first positioning plate 18 are fixedly arranged, and the fixing plate 19 is fixed with the first processing box 8 through a fixing screw, after the first packing layer 17 is used for a long time, the fixing plate 19, the first positioning plate 18 and the first packing layer 17 connected thereto can be detached from the first processing box 8, the handling and the replacement of the device are convenient.
Referring to fig. 2, 4 and 8, a first water pump 21 is fixedly installed on a side wall of the first processing tank 8, a water inlet end of the first water pump 21 is connected with a lower end of the interior of the water washing chamber 13, a first connecting pipe 22 is installed at a water outlet end of the first water pump 21, two branch pipes 23 are formed at end portions of the first connecting pipe 22, and end portions of the two branch pipes 23 extend into the first processing tank 8;
referring to fig. 4, the two branch pipes 23 inside the first treatment tank 8 are respectively located right above the two first packing layers 17, first liquid injection ports 50 are equidistantly arranged on a section of the branch pipes 23 inside the first treatment tank 8, and the first liquid injection ports 50 are arranged toward the first packing layers 17.
Referring to fig. 1, 2, 3 and 8, the detection mechanism 3 includes a detection box 25 and an acid-base detector 26, the top end of the side wall of the first processing box 8 is fixedly provided with the detection box 25, the side wall of the detection box 25 is fixedly provided with the acid-base detector 26, the console 49 is electrically connected to the acid-base detector 26, a detection head of the acid-base detector 26 extends into the detection box 25, the top end of the first processing box 8 is of an arc structure, the top of the first processing box 8 is provided with the second vent pipe 24, the end of the second vent pipe 24 is connected to the top of the detection box 25, water can be pumped into the branch pipes 23 through the operation of the first water pump 21, and liquid is sprayed to the electronic gas through the first liquid spraying ports 50 on the two branch pipes 23, so as to wash the electronic gas.
When the acid content of the electronic gas is detected to exceed the standard, the electromagnetic valve 30 on the first vent branch 28 and the electromagnetic valve 30 on the second vent branch 29 are both closed, the gas reaching the standard is directly placed in the drying box 43 through the third vent pipe 27 for drying, when the acid content of the gas is detected to exceed the standard, the electromagnetic valve 30 on the second vent branch 29 is opened, the gas enters the second processing box 31 on the third processing mechanism 5, at the moment, the second water pump 37 on the third processing mechanism 5 works to pump the alkali liquor into the second connecting pipe 38 and is sprayed to the second filler layer 33 through the second liquid spraying port 39, the gas in the second vent branch 29 enters the second processing box 31 and is washed with alkali, the acid removal of the electronic gas is realized, when the alkali content is detected to exceed the standard, the electromagnetic valve 30 on the first vent branch 28 is opened, and the gas enters the second treatment tank 31 on the second treatment mechanism 4, the second water pump 37 on the second treatment mechanism 4 works at the moment, acid liquor is pumped into the second connecting pipe 38 and is sprayed to the second packing layer 33 through the second liquid spraying port 39, and the gas in the first ventilation branch pipe 28 enters the second treatment tank 31 and is then subjected to acid washing, so that the alkaline washing process of the electronic gas is realized.
Referring to fig. 2, the second treatment mechanism 4 and the third treatment mechanism 5 each include a second treatment tank 31, a second air outlet 32, a second water pump 37, a second connection pipe 38 and a second liquid spray port 39, two second treatment tanks 31 are respectively and fixedly mounted on the top of the substrate 1 at the side of the console 49, and the lower ends of the interiors of the two second treatment tanks 31 are respectively provided with an acidic solution and an alkaline solution, so that the second treatment mechanism 4 is arranged to facilitate acid cleaning of the electronic gas, and the third treatment mechanism 5 is arranged to facilitate alkaline cleaning of the gas;
referring to fig. 2, 6 and 7, a third vent pipe 27 is installed at the lower end of the detection box 25, a first vent branch pipe 28 and a second vent branch pipe 29 are respectively connected to the exterior of the third vent pipe 27, the end parts of the first vent branch pipe 28 and the second vent branch pipe 29 respectively extend into the lower ends of the interiors of the two second treatment boxes 31, and second air outlets 32 are arranged on the sections of the first vent branch pipe 28 and the second vent branch pipe 29 which are positioned in the interiors of the second treatment boxes 31 at equal intervals;
referring to fig. 2, electromagnetic valves 30 are mounted on the outer sides of the first branch ventilation pipe 28 and the second branch ventilation pipe 29, and the electromagnetic valves 30 are arranged on the first branch ventilation pipe 28 and the second branch ventilation pipe 29, so that the on-off of the first branch ventilation pipe 28 and the second branch ventilation pipe 29 can be controlled conveniently;
referring to fig. 2, 4 and 7, in the second treatment tank 31, second water pumps 37 are respectively installed at the top of the substrate 1 on the side edges of the two second treatment tanks 31, the water inlet ends of the second water pumps 37 are connected with the lower ends of the second treatment tanks 31, second connecting pipes 38 are installed at the water outlet ends of the second water pumps 37, the end parts of the second connecting pipes 38 extend into the top end of the second treatment tank 31, second liquid spraying ports 39 are equidistantly arranged on a section of the second connecting pipes 38 inside the second treatment tank 31, fourth vent pipes 40 are respectively installed at the top of the second treatment tank 31, fifth vent pipes 41 are connected with the end parts of the two fourth vent pipes 40, check valves 42 are respectively installed at the outer sides of the fifth vent pipes 41 and the communicating pipes 15, and backflow of gas can be prevented by the arrangement of the fifth vent pipes 41 and the check valves 42 on the communicating pipes 15;
it should be noted that, the second water pump 37 on the third processing mechanism 5 works to pump the alkali liquor into the second connecting pipe 38, and sprays the alkali liquor into the second packing layer 33 through the second liquid spraying port 39, the gas in the second air branch pipe 29 enters the second processing tank 31 and is washed with alkali, so as to remove acid from the electronic gas, when the detected alkali content exceeds the standard, the electromagnetic valve 30 on the first air branch pipe 28 is opened, so that the gas enters the second processing tank 31 on the second processing mechanism 4, at this time, the second water pump 37 on the second processing mechanism 4 works to pump the acid liquor into the second connecting pipe 38, and sprays the acid liquor into the second packing layer 33 through the second liquid spraying port 39, the gas in the first air branch pipe 28 enters the second processing tank 31 and is washed with acid, so as to achieve the alkali washing process of the electronic gas, and the processed gas is placed in the fifth air pipe 41 through the fourth air pipe 40.
Referring to fig. 2 and 5, a second packing layer 33 is disposed below a second connecting pipe 38 in the second treatment tank 31, second positioning plates 34 are disposed at the top and bottom of the second packing layer 33 in the second treatment tank 31, air holes are equidistantly formed in the surface of each second positioning plate 34, a limiting groove is formed in the side wall of the second treatment tank 31, a limiting plate 52 is mounted in each limiting groove through a fixing screw, the end portions of the second packing layer 33 and the second positioning plates 34 are fixedly connected with the limiting plate 52, a sealing layer is disposed between each limiting plate 52 and the second treatment tank 31, the sealing layer ensures the sealing effect between each limiting plate 52 and the second treatment tank 31, prevents the gas in the second treatment tank 31 from being released, and handles 36 are disposed on the surfaces of each limiting plate 52 and the fixing plate 19;
it should be noted that the second packing layer 33 is convenient for control the gas to fully contact with the acid washing solution or the alkali washing solution in all directions, so as to improve the gas treatment effect and ensure the purification effect of the electronic gas, and the second packing layer 33 and the second positioning plate 34 are fixed by the limiting plate 52, and the second packing layer 33 can be conveniently detached to be replaced after being used for a period of time, so as to ensure the gas treatment effect.
Referring to fig. 4, the section of the spiral structure of the branch pipe 23 located inside the first processing box 8 is fixed, and the section of the branch pipe 23 located inside the first processing box 8 is set to be the spiral structure, so that the first liquid spray ports 50 on the branch pipe 23 are ensured to be widely distributed inside the water washing cavity 13, the gas is washed in all directions, the washing effect of the electronic gas is ensured, and the water-soluble impurities contained in the gas are conveniently removed.
Referring to fig. 3, the gas dehumidifying mechanism 6 includes a drying box 43 and a moisture absorbing layer 44, the drying box 43 is installed on the top of the substrate 1 at the side of the console 49, the moisture absorbing layer 44 is disposed in the drying box 43, the compressor 45 is installed at the end of the third air pipe 27, the air outlet end of the compressor 45 is connected to the lower end of the drying box 43, the moisture absorbing layer 44 is disposed to facilitate dehumidifying of the gas passing through the inside of the drying box 43, so as to achieve water removal of the gas, and the compressor 45 is disposed to facilitate compressing of the processed gas, so as to facilitate collection and storage of the gas;
referring to fig. 3, a recycling pump 46 is installed on the top of the substrate 1, sixth vent pipes 47 are installed at the air inlet end and the air outlet end of the recycling pump 46, the end portion of the sixth vent pipe 47 at the air inlet end of the recycling pump 46 is connected to the top end of the drying box 43, the sixth vent pipe 47 at the air outlet end of the recycling pump 46 is connected to the electronic gas collection tank 7, the end portion of the fifth vent pipe 41 is connected to the lower end of the drying box 43, and the gas after water removal can be pumped into the electronic gas collection tank 7 for collection through the operation of the recycling pump 46.
Referring to fig. 2, the bottom of the substrate 1 is equidistantly provided with moving wheels 48, and the side walls of the first processing box 8 and the second processing box 31 are provided with observation windows 51.
The invention also provides a method of the electronic gas tail gas intelligent recovery device, which comprises the following steps:
the method comprises the following steps: electronic gas is placed in a filter cavity 12 through an electronic gas inlet 10 on a first treatment box 8, the gas entering the filter cavity 12 is filtered through a filter screen 11 for micro particle filtration, long-term filtered impurities are placed in an impurity collection box 9 for collection, the filtered gas enters a communicating pipe 15 and enters a first ventilating pipe 14 through the communicating pipe 15 and is discharged through a first gas outlet 16, meanwhile, a console 49 controls the first water pump 21 to work, water is pumped into two branch pipes 23 and is sprayed to a first packing layer 17 through first liquid spraying ports 50 on the two branch pipes 23, the gas is discharged through the first gas outlet 16 and is fully contacted with water in the upward moving process through the first packing layer 17, two thorough water washing processes are achieved, and water-soluble impurities in the electronic gas are removed.
Step two: gas is arranged in the detection box 25 through the second vent pipe 24, the acid-base detector 26 works, when the pH value of the electronic gas is up to standard, the electromagnetic valves 30 on the first vent branch pipe 28 and the second vent branch pipe 29 are both in a closed state, the gas up to standard is directly arranged in the drying box 43 through the third vent pipe 27 for drying, when the acid content of the gas is detected to be over standard, the electromagnetic valve 30 on the second vent branch pipe 29 is opened, the gas enters the second treatment box 31 on the third treatment mechanism 5, at the moment, the second water pump 37 on the third treatment mechanism 5 works to pump alkali liquor into the second connecting pipe 38 and spray the alkali liquor into the second filler layer 33 through the second liquid spraying port 39, the gas in the second vent branch pipe 29 enters the second treatment box 31 and is washed with alkali, the acid removal of the electronic gas is realized, when the alkali content is detected to be over standard, the electromagnetic valve 30 on the first vent branch pipe 28 is opened, and the gas enters the second treatment tank 31 on the second treatment mechanism 4, the second water pump 37 on the second treatment mechanism 4 works at the moment, acid liquor is pumped into the second connecting pipe 38 and is sprayed to the second packing layer 33 through the second liquid spraying port 39, and the gas in the first ventilation branch pipe 28 enters the second treatment tank 31 and is then subjected to acid washing, so that the alkaline washing process of the electronic gas is realized.
Step three: the treated gas is placed in the fifth vent pipe 41 through the fourth vent pipe 40, is compressed through the compressor 45, enters the drying box 43, is dried through the moisture absorption layer 44 in the drying box 43, and is finally recovered into the electronic gas collection tank 7 under the operation of the recovery pump 46.
The working principle is as follows: when in use, the water used for washing the electronic gas is stored in the water washing chamber 13 of the first processing box 8, the acid solution used for washing the electronic gas is stored at the lower end in the second processing box 31 on the second processing mechanism 4, the alkali washing solution used for washing the electronic gas is stored in the second processing box 31 on the third processing mechanism 5, when in recovery, the electronic gas is placed in the filter chamber 12 through the electronic gas inlet 10 on the first processing box 8, the gas entering the filter chamber 12 is filtered through the filter screen 11 used for filtering the micro-particles, the long-term filtered impurities are collected in the impurity collecting box 9, the filtered gas enters the communicating pipe 15, enters the first vent pipe 14 through the communicating pipe 15 and is discharged through the first gas outlet 16, meanwhile, the console 49 controls the first water pump 21 to work, and the water is pumped into the two branch pipes 23, and is sprayed to the first packing layer 17 through the first liquid spraying port 50 on the two branch pipes 23, the gas is discharged through the first gas outlet 16, and fully contacts with water in the upward moving process through the first packing layer 17, so as to achieve twice thorough water washing processes, remove water-soluble impurities in the electronic gas, the gas is placed in the detection box 25 through the second gas pipe 24, the acid and alkali detector 26 works, when the electronic gas is at the pH value reaching standard, the electromagnetic valves 30 on the first gas branch pipe 28 and the second gas branch pipe 29 are both in the closed state, the gas reaching the standard is directly placed in the drying box 43 through the third gas pipe 27 for drying, when the gas pH value exceeding the standard is detected, the electromagnetic valve 30 on the second gas branch pipe 29 is opened, so that the gas enters the second processing box 31 on the third processing mechanism 5, at this time, the second water pump 37 on the third processing mechanism 5 works to pump the alkali liquor into the second connecting pipe 38, and is sprayed to the second packing layer 33 through the second liquid spraying port 39, the gas in the second gas branch pipe 29 enters the second processing box 31 and then is washed by alkali, so as to realize the acid removal of the electronic gas, when the alkali content is detected to exceed the standard, the electromagnetic valve 30 on the first gas branch pipe 28 is opened, so that the gas enters the second processing box 31 on the second processing mechanism 4, at the moment, the second water pump 37 on the second processing mechanism 4 works to pump the acid liquid into the second connecting pipe 38, and the acid liquid is sprayed to the second packing layer 33 through the second liquid spraying port 39, the gas in the first gas branch pipe 28 enters the second processing box 31 and then is washed by acid, so as to realize the alkali washing process of the electronic gas, the processed gas is placed in the fifth gas through the fourth gas pipe 40 and is compressed by the compressor 45, the compressed gas enters the drying box 43, and is dried through the moisture absorption layer 44 in the drying box 43, finally, the gas is recovered to the inside of the electronic gas collection tank 7 by the operation of the recovery pump 46.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. The utility model provides an electronic gas tail gas intelligence recovery unit, includes base plate (1) and controls platform (49), the one end at base plate (1) top is provided with controls platform (49), its characterized in that still includes: the device comprises a first processing mechanism (2), a detection mechanism (3), a second processing mechanism (4), a third processing mechanism (5), a gas dehumidifying mechanism (6) and an electronic gas collecting tank (7), wherein the first processing mechanism (2) is arranged at the other end of the top of a substrate (1), the second processing mechanism (4) and the third processing mechanism (5) are respectively arranged on one side, located on an operating platform (49), of the top of the substrate (1), the gas dehumidifying mechanism (6) is arranged on the other side, located on the operating platform (49), of the top of the substrate (1), and the electronic gas collecting tank (7) is installed on the side, located on the first processing mechanism (9), of the top of the substrate (1);
the first treatment mechanism (9) comprises a first treatment box (8), an impurity collection box (9), an electric gas inlet (10), a filter screen (11), a filter cavity (12), a washing cavity (13), a first vent pipe (14), a communicating pipe (15), a first air outlet (16), a first packing layer (17), a first positioning plate (18) and a fixing plate (19), the first treatment box (8) is fixedly arranged at the top of the base plate (1), the lower end of the interior of the first treatment box (8) is provided with the filter cavity (12), the top end of the interior of the filter cavity (12) is provided with the filter screen (11), the lower end of the first treatment box (8) is provided with the impurity collection box (9), the impurity collection box (9) is arranged in the filter cavity (12) in a sliding manner, the impurity collection box (9) is connected with the filter cavity (12) in a sealing manner, the top end of the filter cavity (12) is provided with the electronic gas inlet (10), and the electronic gas inlet (10) is positioned in the area between the filter screen (11) and the impurity collecting box (9);
be provided with washing chamber (13) on being located filter chamber (12) in first processing case (8), and be connected through sealed partition between washing chamber (13) and filter chamber (12), be provided with communicating pipe (15) in filter chamber (12), and the tip of communicating pipe (15) stretches into the inside low side of washing chamber (13), first breather pipe (14) are installed to the one end that communicating pipe (15) are located washing chamber (13) inside low side, and first breather pipe (14) wholly become the U-shaped structure, first breather pipe (14) outside equidistance is provided with first gas outlet (16).
2. The intelligent electronic gas tail gas recovery device of claim 1, wherein: the washing device is characterized in that two first packing layers (17) are respectively arranged inside the washing cavity (13), first positioning plates (18) are fixedly arranged at the bottom and the bottom of the first packing layers (17) in the washing cavity (13), air holes in the vertical direction are formed in the surface of each first positioning plate (18) at equal intervals, communicating grooves are formed in the end portions, located on the first packing layers (17), of the side walls of the first treatment box (8), fixing plates (19) are connected in the communicating grooves, the end portions of the first packing layers (17) and the first positioning plates (18) are connected with the fixing plates (19), protruding plates (35) are integrally arranged at the two ends of the fixing plates (19) and the two ends of the first treatment box (8), the fixing plates (19) and the protruding plates (35) on the first treatment box (8) are fixedly connected through fixing screws, and sealing gaskets (20) are arranged between the fixing plates (19) and the protruding plates (35) on the first treatment box (8), the first air outlet (16) is arranged towards the first packing layer (17).
3. The intelligent electronic gas tail gas recovery device of claim 1, wherein: first case (8) lateral wall fixed mounting is handled to the first water pump (21), and the end of intaking of first water pump (21) is connected with the inside low side in washing chamber (13), first connecting pipe (22) are installed to the play water end of first water pump (21), the tip of first connecting pipe (22) forms two bleeder pipes (23), and the tip of two bleeder pipes (23) all stretches into first case (8) of handling, first two bleeder pipes (23) of handling case (8) inside are located two first packing layers (17) respectively directly over, one section equidistance that bleeder pipe (23) are located first case (8) inside is provided with first hydrojet mouth (50), and first hydrojet mouth (50) set up towards first packing layer (17).
4. The intelligent electronic gas tail gas recovery device of claim 1, wherein: detection mechanism (3) are including detection case (25) and acid-base detector (26), the top fixed mounting of first processing case (8) lateral wall has detection case (25), and the lateral wall fixed mounting of detection case (25) has acid-base detector (26), control platform (49) electric connection acid-base detector (26), and inside the detection head of acid-base detector (26) stretched into detection case (25), the top of first processing case (8) becomes the arc structure, and the top of first processing case (8) installs second breather pipe (24), the tip of second breather pipe (24) is connected with the top of detection case (25).
5. The intelligent electronic gas tail gas recovery device of claim 4, wherein: the second treatment mechanism (4) and the third treatment mechanism (5) comprise a second treatment box (31), a second air outlet (32), a second water pump (37), a second connecting pipe (38) and a second liquid spraying port (39), two second treatment boxes (31) are fixedly mounted on the side of the top of the base plate (1) located in the console (49) respectively, the lower ends of the two second treatment boxes (31) are provided with acidic solution and alkaline solution respectively, a third connecting pipe (27) is mounted at the lower end of the detection box (25), a first air vent branch pipe (28) and a second air vent branch pipe (29) are connected to the outside of the third connecting pipe (27) respectively, the end parts of the first air vent branch pipe (28) and the second air vent branch pipe (29) extend into the lower ends of the two second treatment boxes (31) respectively, and a section of the first air vent branch pipe (28) and the second air vent branch pipe (29) located in the second treatment boxes (31) is provided with a second air outlet (32) at an equal distance (ii) a
Electromagnetic valves (30) are respectively arranged on the outer sides of the first vent branch pipe (28) and the second vent branch pipe (29), in the second treatment boxes (31), the top of the base plate (1) is provided with second water pumps (37) which are positioned at the side edges of the two second treatment boxes (31), the water inlet end of the second water pump (37) is connected with the lower end of the second treatment tank (31), a second connecting pipe (38) is arranged at the water outlet end of the second water pump (37), and the end of the second connecting pipe (38) is extended into the top end of the inside of the second treating tank (31), a section of the second connecting pipe (38) positioned in the second treatment box (31) is provided with second liquid spraying ports (39) at equal intervals, the top of the second treatment box (31) is provided with a fourth air pipe (40), and the end parts of the two fourth vent pipes (40) are connected with a fifth vent pipe (41), and one-way valves (42) are arranged on the outer sides of the fifth communicating pipe (41) and the communicating pipe (15).
6. The intelligent electronic gas tail gas recovery device of claim 5, wherein: the top and the bottom that lie in second connecting pipe (38) in case (31) are handled to the second are provided with second packing layer (33), and the second is handled case (31) and all is provided with second locating plate (34) in the top and the bottom that lie in second packing layer (33), bleeder vent has been seted up to second locating plate (34) surface equidistance, the spacing groove has been seted up to the lateral wall that case (31) were handled to the second, and installs limiting plate (52) through the fixed screw in the spacing groove, second packing layer (33) and second locating plate (34) tip and limiting plate (52) fixed connection, be provided with the sealing layer between limiting plate (52) and second processing case (31), the surface of limiting plate (52) and fixed plate (19) all is provided with handle (36).
7. The intelligent electronic gas tail gas recovery device of claim 3, wherein: the branch pipe (23) is fixedly arranged in a section of spiral structure in the first treatment box (8).
8. The intelligent electronic gas tail gas recovery device of claim 5, wherein: the gas dehumidifying mechanism (6) comprises a drying box (43) and a moisture absorbing layer (44), a drying box (43) is arranged at the top of the base plate (1) and is positioned at the side edge of the control platform (49), a moisture absorption layer (44) is arranged in the drying box (43), a compressor (45) is arranged at the end part of the third air pipe (27), the air outlet end of the compressor (45) is connected with the lower end of the drying box (43), the top of the base plate (1) is provided with a recovery pump (46), a sixth vent pipe (47) is arranged at the air inlet end and the air outlet end of the recovery pump (46), and the end part of a sixth vent pipe (47) at the air inlet end of the recovery pump (46) is connected with the top end of the drying box (43), a sixth vent pipe (47) at the air outlet end of the recovery pump (46) is connected with the electronic gas collecting tank (7), the end part of the fifth ventilation pipe (41) is connected with the lower end of the drying box (43).
9. The intelligent electronic gas tail gas recovery device of claim 5, wherein: the bottom equidistance of base plate (1) is installed and is removed wheel (48), the lateral wall that first processing case (8) and second were handled case (31) all is provided with observation window (51).
10. An intelligent electronic gas tail gas recovery method based on the device of any one of claims 1-9, characterized by comprising the following steps:
the method comprises the following steps: electronic gas is placed in a filter cavity (12) through an electronic gas inlet (10) on a first treatment box (8), the gas entering the filter cavity (12) is filtered through a filter screen (11) for filtering micro particles, impurities filtered for a long time are placed in an impurity collecting box (9) for collecting, the filtered gas enters a communicating pipe (15), enters a first ventilating pipe (14) through the communicating pipe (15) and is discharged through a first gas outlet (16), meanwhile, a control console (49) controls a first water pump (21) to work, water is pumped into two branch pipes (23) and is sprayed to a first filler layer (17) through first liquid spraying ports (50) on the two branch pipes (23), the gas is discharged through the first gas outlet (16) and is fully contacted with the water in the upward moving process of the first filler layer (17), and the two thorough water washing processes are achieved, removing water-soluble impurities in the electron gas;
step two: gas is arranged in a detection box (25) through a second vent pipe (24), an acid-base detector (26) works, when the pH value of electronic gas reaches the standard, electromagnetic valves (30) on a first vent branch pipe (28) and a second vent branch pipe (29) are both in a closed state, the gas reaching the standard is directly arranged at a drying box (43) through a third vent pipe (27) for drying, when the acid content of the gas is detected to exceed the standard, the electromagnetic valve (30) on the second vent branch pipe (29) is opened, the gas enters a second treatment box (31) on a third treatment mechanism (5), at the moment, a second water pump (37) on the third treatment mechanism (5) works to pump alkali liquor into a second connecting pipe (38) and spray the alkali liquor into a second packing layer (33) through a second liquid spraying port (39), the gas in the second vent branch pipe (29) enters the second treatment box (31) and then is washed by alkali, the electronic gas is subjected to acid removal, when the alkali content is detected to exceed the standard, the electromagnetic valve (30) on the first ventilation branch pipe (28) is opened, the gas enters the second treatment box (31) on the second treatment mechanism (4), the second water pump (37) on the second treatment mechanism (4) works at the moment, acid liquor is pumped into the second connecting pipe (38), the acid liquor is sprayed to the second packing layer (33) through the second liquid spraying port (39), the gas in the first ventilation branch pipe (28) enters the second treatment box (31) and then is subjected to acid washing, and the alkali washing process of the electronic gas is realized;
step three: the treated gas is placed in a fifth vent pipe (41) through a fourth vent pipe (40), gas compression is carried out through a compressor (45), the compressed gas enters a drying box (43), drying treatment is carried out through a moisture absorption layer (44) in the drying box (43), and finally the gas is recovered into an electronic gas collection tank (7) under the working of a recovery pump (46) for recovery.
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| CN113368685A (en) * | 2021-06-29 | 2021-09-10 | 河南绿蓝环保工程有限公司 | Novel biological deodorization filler and device |
| CN113786680A (en) * | 2021-10-12 | 2021-12-14 | 上海市计量测试技术研究院 | Device and method for adsorbing and purifying carbon dioxide in industrial waste gas |
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| CN112827272B (en) | 2022-04-15 |
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