CN112818629A - Design rule of planar transistor and planar transistor - Google Patents

Design rule of planar transistor and planar transistor Download PDF

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CN112818629A
CN112818629A CN202011632476.9A CN202011632476A CN112818629A CN 112818629 A CN112818629 A CN 112818629A CN 202011632476 A CN202011632476 A CN 202011632476A CN 112818629 A CN112818629 A CN 112818629A
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level
design
planar transistor
priority
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CN112818629B (en
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苏炳熏
杨展悌
叶甜春
罗军
赵杰
王云
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Guangdong Greater Bay Area Institute of Integrated Circuit and System
Ruili Flat Core Microelectronics Guangzhou Co Ltd
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Aoxin Integrated Circuit Technology Guangdong Co ltd
Guangdong Greater Bay Area Institute of Integrated Circuit and System
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    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • G06F30/398—Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM]

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Abstract

The invention relates to a design rule of a planar transistor and the planar transistor, comprising: evaluating the key design criteria by using a priority method and dividing the key design criteria into 4 levels; the first level of prioritization of the design criteria is: a new rule; the second level of prioritization of the design criteria is: regional key rules; the third level of prioritization of the design criteria is: designing a key rule; the fourth level of prioritization of the design criteria is: yield key rules; the first level has the highest priority and the fourth level has the lowest priority; the design criteria and design architecture of the planar transistor are optimized using a priority approach to evaluate the design criteria and the innovative design layout of the design criteria design.

Description

Design rule of planar transistor and planar transistor
Technical Field
The present invention relates to the field of planar transistor design and manufacturing technology, and more particularly, to a design rule of a planar transistor and a planar transistor.
Background
In the technological development of the past decades, the size of the planar transistor has been continuously reduced, and at the same time, the performance has been significantly improved and the power consumption has been greatly reduced. The benefits of planar transistor technology advancement are that electronic products become better performing more useful, important, and valuable things in a faster, simpler, and more efficient manner. In 1999, the research objective of the research group of professors in hungry has been how to extend CMOS technology to the area of 25nm and below. Since the current control capability drops dramatically as the gate length approaches 20nm gate turn-off, the leakage rate increases accordingly. The conventional planar MOSFET structure is no longer suitable. By 2010, Bulk CMOS (Bulk silicon) process technology would end up at 20 nm.
There are two solutions proposed by the teaching of huqin: one is a FinFET transistor of a three-dimensional structure (fin transistor, release 1999), and the other is an ultra-thin silicon-on-insulator technology based on SOI (UTB-SOI, also FD-SOI transistor technology, release 2000). The invention of FinFET and FD-SOI processes has allowed the 10nm/14nm/16nm moore's law to continue to be surprising today.
Early numerous electrical simulation results showed that reducing both the BOX thickness of the FD-SOI substrate and the top silicon thickness can reduce the Drain Induced Barrier Lowering (DIBL) level of the transistor. FD-SOI planar transistors continue to shrink down to below 14nm, resulting in increasingly complex planar transistor designs. At present, how to reduce the area of a planar transistor and provide a flexible design architecture at the same time is a problem to be solved urgently to improve the energy efficiency of the planar transistor and reduce the power consumption.
Disclosure of Invention
Based on this, there is currently no design rule and design architecture for FD-SOI planar transistors below 14 nm.
In order to achieve the above object, the present invention provides a design rule of a planar transistor, comprising: dividing a design rule into a plurality of levels by using a priority method according to the design criterion, and carrying out priority ordering on the plurality of levels; wherein the content of the first and second substances,
the first level after the priority ordering is: checking whether the design rule is a new rule;
the second level after the priority ordering is as follows: the region key rule is used for checking whether the design rule designs the size of the chip or not;
the third level after the priority ordering is as follows: checking whether the design rule is related to the functional yield of the fabricated planar transistor;
the fourth level after the priority ranking is: checking whether the design rule is related to the parameter yield of the prepared planar transistor;
wherein, in the plurality of levels, the priority levels are sequentially reduced from the priority level of the first level to the priority level of the fourth level;
dividing the design criteria using a prioritization method, and designing the planar transistor based on the prioritized design rules of the plurality of levels.
According to the design criteria of the planar transistor provided by the embodiment of the invention, in the first level of the priority ranking, the new rule is defined as a new layer rule required to be described in the design technical standard or a new recommended rule of design and manufacture or a condition rule divided into a plurality of sub-rules.
According to the design criteria of the planar transistor provided by the embodiment of the invention, in the second level of the priority ranking, checking whether the design rule designs the size of the chip comprises checking whether the design rule designs the size of the chip to be reduced by a margin.
According to the design criteria of the planar transistor provided by the embodiment of the invention, in the third level of the priority ranking, the functional yield comprises functional yield, and the functional defect caused by the design criteria is evaluated through the functional yield of the functional yield.
According to the design rule of the planar transistor provided by the embodiment of the invention, in the fourth level of the priority ranking, the performance problem caused by the design rule is evaluated through the parameter yield.
According to the design rule of the planar transistor provided by the embodiment of the invention, in the plurality of levels, the design rule of at least one level is a non-critical rule, the design rules of all levels are critical rules, or the design rules of all levels are non-critical rules.
According to the design rule of the planar transistor provided by the embodiment of the invention, the divided design rules of the multiple levels are evaluated, the evaluation result is divided into multiple groups, and the multiple groups are divided into multiple risk levels.
According to the design criteria of the planar transistor provided by the embodiment of the invention, in the evaluation result, the highest risk level is as follows: the design rules in the first level, the second level, the third level and the fourth level are all key rules; the lowest risk rating is: the design rules in the first level, the second level, the third level, and the fourth level are all non-critical rules.
According to the design rule of the planar transistor provided by the embodiment of the invention, in the evaluation result, the risk coefficient priority of the design rule in the first level is higher than the risk coefficient priority of the design rule in the second level, the risk coefficient priority of the design rule in the second level is higher than the risk coefficient priority of the design rule in the third level, and the risk coefficient priority of the design rule in the third level is higher than the risk coefficient priority of the design rule in the fourth level.
The present invention also provides a planar transistor, which uses the design rule of the planar transistor of any of the above embodiments.
The invention has the beneficial effects that: in the design rule of the planar transistor and the planar transistor provided by the embodiment, the design rule of the planar transistor is evaluated and divided into a plurality of levels by using a priority method, and the design rule of the planar transistor is subjected to risk coefficient sorting by a plurality of criteria levels with different priority levels. The design rule of the planar transistor provided by the embodiment can cover a larger rule risk by only finding out a few design rules, and can greatly reduce the development cost and the development time of the design rules. The design rule of the planar transistor provided by the embodiment uses an innovative design rule priority method and an innovative design layout, so that the design rule and the design architecture of the planar transistor are optimized.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or the conventional technologies of the present application, the drawings used in the descriptions of the embodiments or the conventional technologies will be briefly introduced below, it is obvious that the drawings in the following descriptions are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a diagram illustrating evaluation of design criteria of a planar transistor according to the present embodiment;
FIG. 2 is a study plot of risk coverage versus number of design criteria.
Detailed Description
To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Embodiments of the present application are set forth in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
Fully depleted silicon-on-insulator (FD-SOI) is a planar process technology that relies on two major technological innovations. First, an ultra-thin insulating layer, also called a buried oxide layer, is formed on a substrate. A transistor channel is made with a very thin silicon film. Because the channel is very thin, the channel does not need to be doped, and the depletion layer fills the whole channel region, namely the fully depleted transistor. The two innovative technologies are called ultra-thin bulk silicon and buried oxide layer fully-depleted silicon-on-insulator (UTBB-FD-SOI) for short. Structurally, FD-SOI transistors have superior electrostatic properties to conventional bulk silicon technology. The buried oxide layer can reduce parasitic capacitance between the source and the drain, and can effectively inhibit electrons from flowing from the source to the drain, thereby greatly reducing leakage current causing performance degradation. FD-SOI has many other unique advantages, including back-biasing capability, excellent transistor matching characteristics, use of low supply voltages near threshold, ultra-low sensitivity to radiation, and very high intrinsic transistor operating speed, which make it useful for millimeter-wave applications. Due to the limitations of advanced lithography and process technology, the design rules and layout design approaches for planar FD-SOI transistors below 14nm are becoming more complex.
The present embodiment provides a design rule of a planar transistor, including: dividing a design rule into a plurality of levels by using a priority method according to the design criterion, and carrying out priority ordering on the plurality of levels; wherein the first level after the priority ordering is: a new rule checking whether the design rule is a new rule; the second level after the priority ordering is as follows: the region key rule is used for checking whether the design rule designs the size of the chip or not; the third level after the priority ordering is as follows: designing a key rule, checking whether the design rule is related to the functional yield of the prepared planar transistor; the fourth level after the priority ordering is: a yield key rule checking whether the design criterion is related to a parameter yield of the fabricated planar transistor; wherein, in the plurality of levels, the priority levels are sequentially reduced from the priority level of the first level to the priority level of the fourth level; dividing the design criterion by using a priority method, designing the planar transistor based on the design rules of the plurality of levels after the priority ranking, and optimizing the design criterion and the design architecture of the planar transistor.
Wherein, the priority method is a recursive method. In the construction of the recursion theory, the problems that a plurality of requirements can be met at the same time at a certain moment in the construction process, even some requirements are met temporarily, but if one requirement is met, other requirements cannot be met, or the requirement which is met temporarily is damaged are often caused. At this point it is decided which demand needs to be met first. The priority method is to assign priorities to all demands, and when a conflict occurs among a plurality of demands, the demand with the highest priority is satisfied preferentially. Priority methods typically suffer from impairments that disrupt the established satisfaction of low priority requirements in order to satisfy high priority requirements, but not all priority methods must suffer.
As shown in fig. 1, there is provided an evaluation diagram of design criteria of a planar transistor according to the present embodiment. The design rule of the planar transistor provided by the embodiment is divided into four levels according to a priority method, wherein the first level is a new rule; the first level of prioritization of the design rule is to check if the design rule is a new rule. The new rule is defined as a new layer rule that needs to be described in a design technical standard (in particular, a completely new technology) or a new recommended rule for design and manufacture or a more complex conditional rule divided into several sub-rules. Wherein most rules can be discovered and scaled from previous techniques; however, new rules are generated for new layers of the new flow. During early process development, planar transistor fabricators had no concept or experience with this new rule, as they never run this new process. They also do not know what the potential risk or vulnerability of this rule is. The second level is a regional key rule; the second level of prioritization of the design rules is to check whether the design rules design the size of the chip, including checking whether the design rules can reduce the magnitude by which the size of the chip can be designed. This is called critical area (critical area), and one of the key objectives in designing a new design rule is to examine how much the size of the fabricated chip can be reduced based on the production technology developed based on the design rule. For example, multi-pitch is a key design rule for defining the dimension of front end of line (FEOL) planar transistor chips, and the front end of line covers and designs the individual devices, mainly including transistors, resistors, capacitors, etc. The spacing between metal lines is a key design rule in the back end of line (BEOL), and the metal line spacing rule designs the interconnection line between the metal lines and the device. In the subsequent process, several layers of conductive metal lines are required to be established, and the metal lines of different layers are connected by columnar metal. The third level is a design key rule; the third level of prioritizing the design rules is to check whether the design rules are related to functional yield of the fabricated planar transistor. The functional yield of the functional output is an important index for evaluating the functional defect caused by the planar transistor produced by the design criterion. The fourth level is a yield key rule; the fourth level of prioritizing the design rules is to check whether the design rules are related to the parametric yield of the fabricated planar transistors. Parametric yield is an important indicator for evaluating the performance problems caused by the design criteria.
In the multiple levels provided by this embodiment, at least one of the levels of design rules is a non-critical rule, all levels of design rules are critical rules, or all levels of design rules are non-critical rules; evaluating the divided design rules of the multiple levels, dividing the evaluation result into multiple groups, and dividing the multiple groups into multiple risk levels; in the evaluation result, the highest risk level is as follows: the design rules in the first level, the second level, the third level and the fourth level are all key rules; the lowest risk rating is: the design rules in the first level, the second level, the third level, and the fourth level are all non-critical rules.
Specifically, as shown in fig. 1, the design rules of the planar transistor provided in this embodiment are evaluated and divided into four levels by a priority method, including the new rule, the area key rule, the design key rule, and the yield key rule, where at least one of the new rule, the area key rule, the design key rule, and the yield key rule is a non-key rule, and all the levels of the design rules are key rules or all the levels of the design rules are non-key rules. According to the four-layer grade evaluation of the design criterion and two categories including the key rule and the non-key rule in each layer grade, the key rule in the design criterion is marked as 1, the non-key rule in the design criterion is marked as 0 in the embodiment, and the design criterion can be divided into 16 groups. Of the 16 groups of the four-level rating of the design criteria, the risk levels of some groups were different and the risk levels of some groups were the same. The 16 subgroups include:
a first subgroup: the new rule is a non-critical rule (0), the regional critical rule is a non-critical rule (0), the design critical rule is a non-critical rule (0), and the yield critical rule is a non-critical rule (0), i.e., the first subgroup has a four-layer rank evaluation of (0000); the risk rating coefficient of the first panel is 1;
a second subgroup: the new rule is a non-critical rule (0), the regional critical rule is a non-critical rule (0), the design critical rule is a non-critical rule (0), and the yield critical rule is a critical rule (1), i.e., the second subgroup has a four-layer rank evaluation of (0001); the risk rating factor for the second panel is 2;
and (3) a third subgroup: the new rule is a non-critical rule (0), the regional critical rule is a non-critical rule (0), the design critical rule is a critical rule (1), and the yield critical rule is a non-critical rule (0), i.e., the fourth-layer rank evaluation of the third subgroup is (0010); the risk rating factor for the third panel is 2;
and a fourth subgroup: the new rule is a non-critical rule (0), the regional critical rule is a non-critical rule (0), the design critical rule is a critical rule (1), and the yield critical rule is a critical rule (1), that is, the fourth subgroup has four levels of rating evaluation (0011); the risk rating coefficient for the fourth panel is 3;
and a fifth subgroup: the new rule is a non-critical rule (0), the regional critical rule is a critical rule (1), the design critical rule is a non-critical rule (0), and the yield critical rule is a non-critical rule (0), that is, the fourth-layer grade evaluation of the fifth group is (0100); the risk rating coefficient for the fifth panel is 4;
a sixth subgroup: the new rule is a non-critical rule (0), the regional critical rule is a critical rule (1), the design critical rule is a non-critical rule (0), and the yield critical rule is a critical rule (1), that is, the four-layer grade evaluation of the sixth group is (0101); the risk rating factor for the sixth panel is 5;
a seventh subgroup: the new rule is a non-critical rule (0), the regional critical rule is a critical rule (1), the design critical rule is a critical rule (1), and the yield critical rule is a non-critical rule (0), i.e., the seventh group has a four-layer rating of (0110); the risk rating factor for the seventh panel is 5;
group eight: the new rule is a non-critical rule (0), the regional critical rule is a critical rule (1), the design critical rule is a critical rule (1), and the yield critical rule is a critical rule (1), i.e., the eighth subgroup has a four-layer rating of (0111); the risk rating coefficient for the eighth panel is 6;
ninth subgroup: the new rule is a key rule (1), the regional key rule is a non-key rule (0), the design key rule is a non-key rule (0), and the yield key rule is a non-key rule (0), i.e., the ninth group has a four-layer rank evaluation of (1000); the risk rating coefficient for the ninth panel is 7;
the tenth subgroup: the new rule is a key rule (1), the regional key rule is a non-key rule (0), the design key rule is a non-key rule (0), and the yield key rule is a key rule (1), that is, the fourth-layer rank evaluation of the tenth group is (1001); the risk rating factor for the tenth panel is 8;
the eleventh subgroup: the new rule is a key rule (1), the regional key rule is a non-key rule (0), the design key rule is a key rule (1), and the yield key rule is a non-key rule (0), i.e., the eleventh subgroup has four-layer rank evaluation (1010); the risk rating coefficient for the eleventh panel is 8;
the twelfth subgroup: the new rule is a key rule (1), the regional key rule is a non-key rule (0), the design key rule is a key rule (1), and the yield key rule is a key rule (1), i.e., the twelfth subgroup has a four-layer rating of (1011); the risk rating coefficient for the twelfth panel is 9;
a thirteenth group: the new rule is a key rule (1), the regional key rule is a key rule (1), the design key rule is a non-key rule (0), and the yield key rule is a non-key rule (0), i.e., the thirteenth group has a four-tier ranking score of (1100); the risk ranking coefficient for the thirteenth panel is 10;
a fourteenth subgroup: the new rule is a key rule (1), the regional key rule is a key rule (1), the design key rule is a non-key rule (0), and the yield key rule is a key rule (1), that is, the fourteenth group has a four-layer rating of 1101; the risk ranking coefficient of the fourteenth subgroup is 11;
a fifteenth subgroup: the new rule is a key rule (1), the regional key rule is a key rule (1), the design key rule is a key rule (1), and the yield key rule is a non-key rule (0), i.e., the fifteenth subgroup has a four-layer rating of (1110); the risk rating coefficient for the fifteenth subgroup is 11;
a sixteenth subgroup: the new rule is a key rule (1), the regional key rule is a key rule (1), the design key rule is a key rule (1), the yield key rule is a key rule (1), i.e., the sixteenth group has a four-layer rating of (1111); the risk rating factor for the sixteenth subgroup is 12.
Wherein, in the 16 subgroups of four-layer level evaluation of the design criteria, in the evaluation results, the risk coefficient priority of the design rules in the first level is greater than the risk coefficient priority of the design rules in the second level, the risk coefficient priority of the design rules in the second level is greater than the risk coefficient priority of the design rules in the third level, and the risk coefficient priority of the design rules in the third level is greater than the risk coefficient priority of the design rules in the fourth level. In the 16 groups of the four-layer level evaluation of the design criteria provided in this embodiment, the sixteenth group is the group with the highest risk level coefficient, that is, the new rule is the key rule (1), the regional key rule is the key rule (1), the design key rule is the key rule (1), and the yield key rule is the key rule (1); the risk grade coefficient is the lowest in the first group, namely the new rule is a non-critical rule (0), the regional critical rule is a non-critical rule (0), the design critical rule is a non-critical rule (0), and the yield critical rule is a non-critical rule (0);
in 16 subgroups of the four-layer grade evaluation of the design criteria provided in this example, the risk grade coefficients of the second subgroup (0001) and the third subgroup (0010) are the same and are both 2; the risk rating coefficients of the sixth subgroup (0101) and the seventh subgroup (0110) are the same, both 5; the risk rating coefficients of the tenth subgroup (1001) and the eleventh subgroup (1010) are the same and are both 8; the fourteenth subgroup (1101) has a risk rating factor equal to that of the fifteenth subgroup (1110), both of which are 11. In the four-layer level evaluation of the design rule provided in this embodiment, if it is critical that only one of the design key rule and the yield key rule is satisfied, the degree of influence of the design key rule and the yield key rule on the risk level of the design rule is the same.
As shown in fig. 2, a study plot of risk coverage versus number of design criteria. As can be seen from fig. 2, the number of design criteria is in a proportional relationship with the risk coverage rate, and the greater the number of design criteria, the higher the risk coverage rate. And the risk coverage rate increases with the number of design criteria, the risk factor increasing logarithmically. The design rule of the planar transistor provided by the embodiment can cover a larger rule risk by only finding out a few design rules, and the development cost and the development time of the design rule can be greatly reduced by the design rule of the planar transistor provided by the embodiment.
The present embodiment also provides a planar transistor designed and manufactured by the design rule of the planar transistor provided by the present embodiment. The related structure of the planar transistor is not described again.
In the design rule of the planar transistor and the planar transistor provided by the embodiment, the design rule of the planar transistor is evaluated and divided into a plurality of levels by using a priority method, and the design rule of the planar transistor is subjected to risk coefficient sorting by a plurality of criteria levels with different priority levels. The design rule of the planar transistor provided by the embodiment can cover a larger rule risk by only finding out a few design rules, and can greatly reduce the development cost and the development time of the design rules. The design rule of the planar transistor provided by the embodiment uses an innovative design rule priority method and an innovative design layout, so that the design rule and the design architecture of the planar transistor are optimized.
In the description herein, references to the description of "some embodiments," "other embodiments," "desired embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic description of the above terminology may not necessarily refer to the same embodiment or example.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features of the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the claims. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. A design rule for a planar transistor, comprising: dividing a design rule into a plurality of levels by using a priority method according to the design criterion, and carrying out priority ordering on the plurality of levels; wherein the content of the first and second substances,
the first level after the priority ordering is: checking whether the design rule is a new rule;
the second level after the priority ordering is as follows: checking whether the design rule designs the size of the chip;
the third level after the priority ordering is as follows: checking whether the design rule is related to the functional yield of the fabricated planar transistor;
the fourth level after the priority ordering is: checking whether the design rule is related to the parameter yield of the prepared planar transistor;
wherein, in the plurality of levels, the priority levels are sequentially reduced from the priority level of the first level to the priority level of the fourth level;
dividing the design criteria using a prioritization method, and designing the planar transistor based on the prioritized design rules of the plurality of levels.
2. Design criteria for a planar transistor according to claim 1, characterized in that in the first level of the prioritization the new rule is defined as a new layer rule that needs to be described in a design technical standard or a new recommended rule for design manufacturing or a conditional rule that is divided into several sub-rules.
3. The design rule of planar transistor of claim 2, wherein in the second level of the priority ordering, checking whether the design rule designs the size of the chip comprises checking whether the design rule designs the magnitude by which the size of the chip can be reduced.
4. The design rule of planar transistor of claim 3, wherein in the third level of the priority ordering, the functional yield includes a functional yield, and functional defects caused by the design rule are evaluated by the functional yield of the functional yield.
5. The design rule of planar transistor of claim 4, characterized in that in the fourth level of the prioritization, the performance issues caused by the design rule are evaluated by the parameter yield.
6. The design rule of the planar transistor according to claim 1, wherein at least one of the levels of the plurality of levels is a non-critical rule, all levels of the plurality of levels are critical rules, or all levels of the plurality of levels are non-critical rules.
7. The design rule of the planar transistor according to claim 6, wherein the divided design rules of the plurality of levels are evaluated, the evaluation result is divided into a plurality of subgroups, and the plurality of subgroups are divided into a plurality of risk levels.
8. The design rule of planar transistor according to claim 7, characterized in that, in the evaluation results, the highest risk level is: the design rules in the first level, the second level, the third level and the fourth level are all key rules; the lowest risk rating is: the design rules in the first level, the second level, the third level, and the fourth level are all non-critical rules.
9. The design rule of the planar transistor according to claim 8, wherein in the evaluation result, the risk coefficient priority of the design rule in the first level is higher than the risk coefficient priority of the design rule in the second level, the risk coefficient priority of the design rule in the second level is higher than the risk coefficient priority of the design rule in the third level, and the risk coefficient priority of the design rule in the third level is higher than the risk coefficient priority of the design rule in the fourth level.
10. A planar transistor, wherein the planar transistor uses the design rule of the planar transistor as claimed in any one of claims 1 to 9.
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