CN112815160B - Flow path joint structure - Google Patents
Flow path joint structure Download PDFInfo
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- CN112815160B CN112815160B CN202011292816.8A CN202011292816A CN112815160B CN 112815160 B CN112815160 B CN 112815160B CN 202011292816 A CN202011292816 A CN 202011292816A CN 112815160 B CN112815160 B CN 112815160B
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- double
- male screw
- screw portion
- movable
- ended nut
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
- F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
- F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
- F16L19/0212—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member using specially adapted sealing means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L17/00—Joints with packing adapted to sealing by fluid pressure
- F16L17/06—Joints with packing adapted to sealing by fluid pressure with sealing rings arranged between the end surfaces of the pipes or flanges or arranged in recesses in the pipe ends or flanges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L2201/00—Special arrangements for pipe couplings
- F16L2201/60—Identification or marking
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Fluid Mechanics (AREA)
- Joints With Pressure Members (AREA)
Abstract
A flow path joint structure (1) is provided with: a 1 st male screw portion (11) provided to the 1 st piping block (51); a 2 nd male screw portion (12) provided to the 2 nd piping block (52); a double-ended nut (13) having a 1 st internal thread portion (13 a) that is screwed to the 1 st external thread portion (11) on one axial side and a 2 nd internal thread portion (13 b) that is screwed to the 2 nd external thread portion (12) on the other axial side; and a gasket (14) that seals a connection portion between the flow passage holes (510, 520) on the radially inner side of the double-ended nut (13). The 1 st male screw part (11) and the 1 st female screw part (13 a) are right-handed screws, and the 2 nd male screw part (12) and the 2 nd female screw part (13 b) are left-handed screws. The flow path joint structure (1) has 1 st mark sections (61, 62) provided on the 1 st and 2 nd piping blocks (51, 52) and indicating the fastening directions of the 1 st and 2 nd male screw sections (11, 12).
Description
Technical Field
The present invention relates to a flow path joint structure.
Background
As a channel joint structure for connecting channel holes formed in 2 fluid devices such as a pump, a valve, a reservoir, a filter, a flowmeter, a pressure sensor, and a piping block (block) to each other in the shortest manner, a structure shown in fig. 28 is known as a channel path for a fluid such as a chemical solution to be processed in a manufacturing process in various technical fields such as semiconductors, liquid crystals, and organic EL. This flow path joint structure is configured such that 2 fluid devices 110 are connected to both ends of a pipe 101 formed to a required minimum length by a sleeve 102 and a double-ended nut 103 (see patent document 1).
Patent document 1: japanese patent laid-open No. 2014-219060
Disclosure of Invention
In the manufacturing process of semiconductors, liquid crystals, organic EL, and the like, it is desirable to save installation space for a flow path joint structure used when a chemical solution is transported and circulated. However, the flow path joint structure shown in fig. 28 requires an installation space for installing the pipe 101 and the 2 double-ended nuts 103, and therefore there is a problem that the flow path joint structure cannot be installed in a space-saving manner. Therefore, it has been studied to connect the flow passage holes of 2 fluid devices to each other only with 1 double-ended nut in such a manner that the flow passage joint structure can be provided in a space-saving manner.
Specifically, there are double nuts and the like in which a right-handed female thread is formed on one axial side of the inner periphery of the double nut and a left-handed female thread is formed on the other axial side of the inner periphery of the double nut to form a double female thread. If the double-ended nut is tightened in one direction, the right-hand internal threads of the double-ended nut are screwed with the right-hand external threads of one fluid device, and the left-hand internal threads of the double-ended nut are screwed with the left-hand external threads of the other fluid device. Thereby, the flow passage holes of the 2 fluid devices were connected to each other via the gasket. However, in the flow passage joint structure having the double-ended nut, for example, if an operator erroneously screws the right-handed female screw of the double-ended nut to the left-handed male screw of the fluid device, the threads of the right-handed female screw and the left-handed male screw may be damaged.
The present invention has been made in view of such circumstances, and an object thereof is to provide a flow path joint structure that can save space and suppress thread breakage.
(1) The present invention provides a flow channel joint structure for connecting flow channel holes formed in a 1 st fluid device and a 2 nd fluid device, respectively, to each other, the flow channel joint structure including: a 1 st male screw portion provided to protrude from one end surface of the 1 st fluid device and arranged radially outside a flow passage hole of the 1 st fluid device; a 2 nd male screw portion provided to protrude from one end surface of the 2 nd fluidic device and arranged radially outside a flow passage hole of the 2 nd fluidic device; a double-ended nut having a 1 st internal thread portion to be screwed with the 1 st external thread portion on one axial side and a 2 nd internal thread portion to be screwed with the 2 nd external thread portion on the other axial side; and a seal member that seals a connection portion between the flow passage holes of the 1 st and 2 nd fluid devices by screwing the 1 st internal thread portion and the 1 st external thread portion together and screwing the 2 nd internal thread portion and the 2 nd external thread portion together inside the double-ended nut in a radial direction, wherein the 1 st external thread portion and the 1 st internal thread portion are either right-handed threads or left-handed threads, the 2 nd external thread portion and the 2 nd internal thread portion are the other of the right-handed threads and the left-handed threads, and the flow passage joint structure includes a 1 st mark portion provided in at least one of the 1 st and 2 nd fluid devices, the 1 st mark portion indicating a fastening direction of the external thread portion provided in the one of the 1 st external thread portion and the 2 nd external thread portion.
According to the present invention, since the 1 st internal thread portion on one axial side of the double-ended nut is either a right-handed thread or a left-handed thread and the 2 nd internal thread portion on the other axial side of the double-ended nut is the other of the right-handed thread and the left-handed thread, the 1 st internal thread portion is screwed with the 1 st external thread portion of the 1 st fluid device and the 2 nd internal thread portion is screwed with the 2 nd external thread portion of the 2 nd fluid device by fastening the double-ended nut. Thereby, the flow passage holes of 2 fluid devices can be connected to each other only by 1 double-ended nut, and the connecting portion between the flow passage holes can be sealed by a packing on the inner side in the radial direction of the double-ended nut. Therefore, the flow path joint structure of the present invention does not require the provision of a pipe and 2 double-ended nuts as in the conventional structure, and therefore the flow path joint structure can be provided in a space-saving manner.
Further, the worker can grasp the fastening direction of the male screw portion of at least one fluid device by using the 1 st mark portion provided to the fluid device. Accordingly, the female screw portion in a fastening direction different from the male screw portion can be prevented from being screwed into the male screw portion, and therefore, the thread breakage of the male screw portion and the female screw portion due to the screwing of the male screw portion and the female screw portion can be prevented.
(2) Preferably, the flow path joint structure further has a 2 nd mark portion, the 2 nd mark portion being provided to the double-ended nut and indicating a fastening direction of the double-ended nut.
In this case, the operator can also grasp the tightening direction of the double end nut, that is, the tightening direction of the 1 st internal thread portion and the 2 nd internal thread portion, by using the 2 nd marking portion, and therefore can further suppress the internal thread portion from being screwed in a tightening direction different from that of the external thread portion.
(3) Preferably, the flow path joint structure further includes: a fixed-side projecting portion provided to project from the one end face of the one fluid device; and a movable-side projection provided on the double-ended nut and projecting from the double-ended nut toward the one end surface side of the one fluid device, wherein if the double-ended nut is rotated in a direction opposite to a fastening direction from a state in which an internal thread portion corresponding to the external thread portion of the 1 st internal thread portion and the 2 nd internal thread portion is screwed with the external thread portion, the movable-side projection abuts against the fixed-side projection to restrict rotation of the double-ended nut in the direction opposite to the fastening direction.
In this case, if the double-ended nut is to be rotated in the opposite direction to the tightening direction from the state in which the corresponding female screw portion is screwed into the male screw portion, the movable-side projecting portion abuts against the fixed-side projecting portion to restrict the rotation of the double-ended nut in the opposite direction to the tightening direction. Thus, even if the fluid device vibrates due to pulsation of the fluid or the like in a state in which the double-ended nut is fastened, the double-ended nut can be prevented from loosening in a direction opposite to the fastening direction.
(4) Preferably, at least a part of the 1 st mark constitutes the fixed-side projecting portion.
In this case, it is not necessary to provide the fixing-side projecting portion separately from the 1 st mark portion, and therefore the structure of the flow path joint structure can be simplified.
(5) Preferably, the flow path joint structure further includes a 2 nd mark portion, the 2 nd mark portion being provided to the double-ended nut and indicating a fastening direction of the double-ended nut, and at least a part of the 2 nd mark portion constituting the movable-side protrusion portion.
In this case, since it is not necessary to provide the movable-side projecting portion separately from the 2 nd mark portion, the structure of the flow path joint structure can be further simplified.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, the flow path joint structure can be provided in a space-saving manner, and damage to the screw thread can be suppressed.
Drawings
Fig. 1 is a perspective view showing a flow channel joint structure according to embodiment 1 of the present invention.
Fig. 2 is a sectional view of the flow path joint structure.
Fig. 3 is a sectional view showing a state in which the flow path joint structure is disassembled.
Fig. 4 is an oblique view of the 1 st piping block.
Fig. 5 is a side view of the 1 st piping block as viewed from the right side.
Fig. 6 is an oblique view of the 2 nd piping block.
Fig. 7 is a side view of the 2 nd piping block as viewed from the left side.
Fig. 8 is a front view of the double-ended nut.
Fig. 9 is a side view of the double-ended nut as viewed from the left side.
Fig. 10 is a side view of the double-ended nut as viewed from the right.
Fig. 11 is a side view of the 1 st piping block viewed from the right side, showing the positional relationship of the 1 st fixed-side projecting portion and the 1 st movable-side projecting portion.
Fig. 12 is a side view of the 2 nd piping block viewed from the left side, showing the positional relationship of the 2 nd fixed-side projecting portion and the 2 nd movable-side projecting portion.
Fig. 13 is a sectional view showing a state in which the gasket is attached to the 1 st piping block.
Fig. 14 is a sectional view showing a state in the middle of tightening of the double-ended nut.
Fig. 15 is a sectional view showing a state immediately before the tightening of the double-ended nut is completed.
Fig. 16 is a sectional view showing a state in which the double-ended nut is fastened.
Fig. 17 is a perspective view of the 1 st pipe block of the flow channel joint structure according to embodiment 2 of the present invention.
Fig. 18 is a side view of the 1 st piping block of fig. 17 as viewed from the right side.
Fig. 19 is a perspective view of the 2 nd pipe block of the flow path joint structure according to embodiment 2.
Fig. 20 is a side view of the 2 nd piping block of fig. 19 viewed from the left side.
Fig. 21 is a perspective view of a double-ended nut of the flow channel joint structure according to embodiment 2.
Fig. 22 is a side view of the 1 st piping block of embodiment 2 as viewed from the right side, showing the positional relationship of the 1 st fixed-side projecting portion and the 1 st movable-side projecting portion.
Fig. 23 is a side view of the 2 nd piping block according to embodiment 2 as viewed from the left side, and shows a positional relationship between the 2 nd fixed-side projecting portion and the 2 nd movable-side projecting portion.
Fig. 24 is a perspective view of a double-ended nut of a flow channel joint structure according to embodiment 3 of the present invention.
Fig. 25 is a side view of the 1 st piping block of the 3 rd embodiment as viewed from the right side, and shows a positional relationship of the 1 st fixed-side projecting portion and the 1 st movable-side projecting portion.
Fig. 26 is a side view of the 2 nd piping block according to embodiment 3 as viewed from the left side, and shows a positional relationship between the 2 nd fixed-side projecting portion and the 2 nd movable-side projecting portion.
Fig. 27 is a cross-sectional view showing a modification of the seal member.
Fig. 28 is a sectional view showing a conventional flow path joint structure.
Description of the reference numerals
1. Flow path joint structure
11. 1 st external screw thread part
12. 2 nd external screw thread part
13. Double-end nut
13b the 2 nd female screw part
14. Gasket (sealing component)
51. 1 st pipe fitting block (1 st fluid equipment)
52. Pipe fitting block 2 (fluid device 2)
61. 1 st mark part
62. 1 st mark part
63. 2 nd mark part
71. No. 1 fixed side lobe (fixed side lobe)
72. No. 2 fixed side projection (fixed side projection)
73. No. 1 Movable side convex part (Movable side convex part)
74. No. 2 Movable side convex part (Movable side convex part)
510. Flow passage hole
520. Flow passage hole
Detailed Description
Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. At least some of the embodiments described below may be combined as desired.
[ Structure of flow channel Joint ]
Fig. 1 is a perspective view showing a flow channel joint structure according to embodiment 1 of the present invention. In fig. 1, for example, in a piping path through which a chemical liquid flows, which is used in a semiconductor manufacturing apparatus, a flow channel joint structure 1 of the present embodiment is used as a connection structure for connecting a flow channel hole 510 (see fig. 2) formed in a 1 st piping block (1 st fluid device) 51 and a flow channel hole 520 formed in a 2 nd piping block (2 nd fluid device) 52. In the present specification below, directions such as up, down, left, and right indicate directions shown in fig. 1.
Further, the flow channel joint structure 1 of the present embodiment is used as a connection structure for connecting the flow channel holes 510 and 520 of the pipe blocks 51 and 52 to each other, but may be applied to a connection structure for connecting flow channel holes of other fluid devices such as a pump, a valve, a reservoir, a filter, and a flowmeter to each other.
Fig. 2 is a sectional view of the flow channel joint structure 1 of the present embodiment. Fig. 3 is a sectional view showing a state in which the flow channel joint structure 1 is disassembled. In fig. 2 and 3, the 1 st piping block 51 includes, for example: a block main body 511 formed of a rectangular body; and a pair of left and right 1 st projections 512 formed of a cylindrical body. The right 1 st projecting portion 512 projects rightward from a right end surface (one end surface) 511a of the block main body 511 and is formed integrally with the block main body 511. The 1 st projecting portion 512 on the left side projects leftward from the left end surface 511b of the block main body 511, and is formed integrally with the block main body 511. An annular groove 513 is formed at a base end portion of each 1 st projecting portion 512 on the block main body 511 side.
A 1 st male screw part 11 is formed on the outer periphery of the 1 st projection 512 on the right side (except for the annular groove 513). A 2 nd male screw portion 12 is formed on the outer periphery of the 1 st projection 512 on the left side (except for the annular groove 513). The flow passage hole 510 of the 1 st piping block 51 is formed to penetrate the block main body 511 and the pair of 1 st projections 512. Therefore, the 1 st and 2 nd male screw portions 11 and 12 are disposed radially outward of both end portions of the flow passage hole 510.
An annular 1 st seal groove 15 is formed in the front end surface of the 1 st projection 512 on the right side, and an annular 2 nd seal groove 16 is formed in the front end surface of the 1 st projection 512 on the left side.
The 2 nd piping block 52 includes, for example: a block main body 521 formed of a rectangular body; and a pair of right and left No. 2 projecting portions 522 formed of a cylindrical body. The right 2 nd projecting portion 522 projects rightward at the right end surface 521a of the block main body 521 and is formed integrally with the block main body 521. The left 2 nd projecting portion 522 projects leftward from the left end surface (one end surface) 521b of the block main body 521, and is formed integrally with the block main body 521. An annular groove 523 is formed at a base end portion of each 2 nd projecting portion 522 on the block main body 521 side.
A 1 st male screw part 11 is formed on the outer periphery of the 2 nd projecting part 522 on the right side (except for the annular groove 523). A 2 nd male screw portion 12 is formed on the outer periphery of the 2 nd projecting portion 522 on the left side (except for the annular groove 523). The flow passage hole 520 of the 2 nd piping block 52 is formed to penetrate the block main body 521 and the pair of 2 nd projections 522. Therefore, the 1 st and 2 nd male screw portions 11 and 12 are disposed radially outward of both end portions of the flow passage hole 520. The flow channel hole 520 of the present embodiment is formed to have the same diameter as the flow channel hole 510.
An annular 1 st seal groove 15 is formed in the front end surface of the right 2 nd projection 522, and an annular 2 nd seal groove 16 is formed in the front end surface of the left 2 nd projection 522.
The flow channel joint structure 1 mainly includes the 1 st male screw portion 11 of the 1 st pipe block 51, the 2 nd male screw portion 12 of the 2 nd pipe block 52, a double-ended nut 13, and a packing (sealing member) 14.
In the present embodiment, the 1 st male screw portion 11 of the 1 st pipe block 51 is a left-hand screw, and the 2 nd male screw portion 12 of the 2 nd pipe block 52 is a right-hand screw. In contrast to this embodiment, the 1 st male screw portion 11 of the 1 st pipe block 51 may be a right-hand screw, and the 2 nd male screw portion 12 of the 2 nd pipe block 52 may be a left-hand screw.
The double-ended nut 13 is constituted by, for example, a cylindrical body, and includes: a 1 st female screw portion 13a formed on the inner periphery of the left side (one axial side); and a 2 nd female screw portion 13b formed on the inner periphery of the right side (the other side in the axial direction). The 1 st and 2 nd internal thread portions 13a and 13b are formed continuously in the axial direction. The 1 st internal thread portion 13a is screwed to the 1 st external thread portion 11 of the 1 st piping block 51. The 2 nd female screw portion 13b is screwed to the 2 nd male screw portion 12 of the 2 nd pipe block 52.
Therefore, in the present embodiment, the 1 st female screw portion 13a is a left-hand screw similar to the 1 st male screw portion 11, and the 2 nd female screw portion 13b is a right-hand screw similar to the 2 nd male screw portion 12. In addition, when the 1 st male screw portion 11 is a right-hand screw and the 2 nd male screw portion 12 is a left-hand screw, the 1 st female screw portion 13a is a right-hand screw and the 2 nd female screw portion 13b is a left-hand screw.
The gasket 14 seals the connection portion between the flow passage holes 510 and 520 by screwing the 1 st female screw portion 13a into the 1 st male screw portion 11 and screwing the 2 nd female screw portion 13b into the 2 nd male screw portion 12 on the radially inner side of the double-ended nut 13. The gasket 14 of the present embodiment includes: an annular 1 st press-fitting portion 14a formed on the left side (one axial side); and an annular 2 nd press-fitting portion 14b formed on the right side (the other side in the axial direction). The 1 st press-fitting portion 14a is press-fitted into the 1 st seal groove 15 of the 1 st projection 512, and the 2 nd press-fitting portion 14b is press-fitted into the 2 nd seal groove 16 of the 2 nd projection 522.
[ 1 st marker and fixed-side projection ]
Fig. 4 is an oblique view of the 1 st piping block 51. Fig. 5 is a side view of the 1 st piping block 51 as viewed from the right side. In fig. 4 and 5, a pair of 1 st mark portions 61 indicating the fastening direction (counterclockwise direction in fig. 5) of the 1 st male screw portion 11 is provided on the end surface 511a of the block main body 511 of the 1 st piping block 51 so as to slightly protrude rightward in the same direction as the protruding direction of the 1 st male screw portion 11. The 1 st mark 61 is formed to have a projection amount with respect to the end surface 511a smaller than the width of the annular groove 513 in the left-right direction (axial direction) (see fig. 13). Note that the 1 st mark portion 61 is not shown in fig. 1 to 3.
The pair of 1 st mark portions 61 are arranged radially outward of the 1 st projecting portion 512 in a side view at equal intervals in the circumferential direction of the 1 st projecting portion 512. Each 1 st mark portion 61 is formed in an arrow shape, for example, and has: a front portion 611 formed in an approximately triangular shape; and a rear portion 612 formed in a circular arc shape.
The front portion 611 is formed to be tapered toward the counterclockwise direction in fig. 5, and is formed to be tapered toward the radially outer side. A side surface 611a on the rear 612 side of the portion of the front portion 611 that tapers radially outward, is formed as a tapered surface that is inclined such that the projection height gradually decreases toward the end surface 511 a. A side surface 611b opposite to the side surface 611a of the radially outward tapered portion of the front portion 611 is a non-tapered surface perpendicular to the end surface 511a and is formed to extend in the vertical direction. The front portion 611 functions as a 1 st fixing-side projecting portion 71 of a 1 st locking mechanism 75 (described later).
Fig. 6 is an oblique view of the 2 nd piping block 52. Fig. 7 is a side view of the 2 nd piping block 52 as viewed from the left side. In fig. 6 and 7, a pair of 1 st mark portions 62 indicating the fastening direction (clockwise direction in fig. 7) of the 2 nd male screw portion 12 is provided on the end surface 521b of the block main body 521 of the 2 nd pipe block 52 so as to project leftward in the same direction as the projecting direction of the 2 nd male screw portion 12. The 1 st mark 62 is formed so that the amount of projection from the end surface 521b is smaller than the width of the annular groove 523 in the left-right direction (axial direction) (see fig. 13). Note that, in fig. 1 to 3, the 1 st mark 62 is not shown.
The pair of 1 st mark portions 62 are arranged radially outward of the 2 nd projecting portion 522 in a side view at equal intervals in the circumferential direction of the 2 nd projecting portion 522. Each 1 st mark portion 62 is formed in the same arrow shape as the 1 st mark portion 61, for example, and has: a front portion 621 formed in an approximately triangular shape; and a rear portion 622 formed in a circular arc shape.
The front portion 621 is formed to taper toward the clockwise direction in fig. 7, and is formed to taper toward the radially outer side. The side surface 621a on the rear 622 side of the portion of the front 621 that tapers toward the radially outer side and the front end is formed as a tapered surface that is inclined so that the projection height gradually decreases toward the end surface 521 b. A side surface 621b opposite to the side surface 621a of the portion of the front portion 621 tapered toward the radially outer side is formed to extend in the vertical direction. The front portion 621 functions as a 2 nd fixing-side projecting portion 72 of a 2 nd loosening prevention mechanism 76 (described later).
[ 2 nd marking part and Movable-side convex part ]
Fig. 8 is a front view of the double-ended nut 13. In fig. 8, a plurality of convex portions 13f extending in the left-right direction (axial direction) are provided at equal intervals in the circumferential direction on the outer periphery of the double-ended nut 13. The plurality of projections 13f are used for hooking a tool for fastening the double-ended nut 13, and are formed by knurling, for example.
In the present embodiment, for example, a predetermined number (3 in the illustrated example) of the convex portions 13f that are continuous in the circumferential direction are formed into a shape of a plurality of arrows as a whole in the circumferential direction by gradually shortening the axial length thereof. The shape of the arrow indicates the fastening direction of the double-ended nut 13 (the fastening direction of the 1 st internal thread portion 13a and the 2 nd internal thread portion 13 b). Therefore, in the present embodiment, the shapes of a plurality of arrows formed for a predetermined number of the respective convex portions 13f function as the 2 nd mark portion 63 indicating the fastening direction of the double end nut 13.
The left end of the longest projection 13f in the left-right direction of each 2 nd mark 63 projects leftward from the left side surface 13d of the double-ended nut 13, and functions as a 1 st movable-side projection 73 of a 1 st locking mechanism 75 (described later). Thus, in the present embodiment, a part of the 2 nd mark 63 constitutes the 1 st movable-side projecting portion 73. When the 1 st female screw portion 13a is screwed into the 1 st male screw portion 11, the 1 st movable-side projecting portion 73 projects from the double-ended nut 13 toward the end surface 511a of the 1 st pipe block 51 (see fig. 13).
The right end of the projection 13f of each 2 nd mark 63, which is longest in the left-right direction, projects to the right side from the other side surface 13e on the right side of the double-ended nut 13, and functions as a 2 nd movable-side projection 74 of a 2 nd locking mechanism 76 (described later). Thus, in the present embodiment, a part of the 2 nd mark portion 63 constitutes the 2 nd movable-side projecting portion 74. When the 2 nd female screw portion 13b is screwed into the 2 nd male screw portion 12, the 2 nd movable-side projecting portion 74 projects from the double-ended nut 13 toward the end surface 521b of the 2 nd pipe block 52 (see fig. 13).
Fig. 9 is a side view of the double-ended nut 13 as viewed from the left side. In fig. 8 and 9, the 1 st movable-side projecting portion 73 is arranged at equal intervals in the circumferential direction on the outer circumferential side of the double-ended nut 13. The 1 st movable-side projecting portion 73 extends from the left end of the projecting portion 13f along the one side surface 13d of the double end nut 13 toward the axial center C of the double end nut 13. The side surfaces 73a and 73b on both sides in the width direction (the circumferential direction of the double-ended nut 13) of the 1 st movable-side projecting portion 73 are inclined such that the tip of the 1 st movable-side projecting portion 73 becomes narrower toward the axial center C side. In fig. 9, white arrows indicate the fastening direction of the 1 st female screw portion 13 a.
Fig. 10 is a side view of the double-ended nut 13 as viewed from the right side. In fig. 8 and 10, the 2 nd movable-side projecting portions 74 are arranged at equal intervals in the circumferential direction on the outer circumferential side of the double-ended nut 13. The 2 nd movable-side projecting portion 74 extends from the right end portion of the projection 13f along the other side surface 13e of the double-ended nut 13 toward the axial center C of the double-ended nut 13. The side surfaces 74a and 74b on both sides in the width direction (the circumferential direction of the double-ended nut 13) of the 2 nd movable-side projecting portion 74 are inclined so that the tip of the 2 nd movable-side projecting portion 74 becomes narrower toward the axial center C side. In addition, white arrows in fig. 10 indicate the fastening direction of the 2 nd female screw portion 13b.
[ anti-loosening mechanism ]
Fig. 11 is a side view of the 1 st piping block 51 as viewed from the right side, and shows a positional relationship between the 1 st fixed-side projecting portion 71 and the 1 st movable-side projecting portion 73.
The 1 st movable-side projecting portion 73 is disposed at a position where the side surface 73b of the 1 st movable-side projecting portion 73 abuts against the side surface 611a of the 1 st fixed-side projecting portion 71 (front portion 611) as indicated by a chain line in fig. 11 while the 1 st internal thread portion 13a is screwed into the 1 st external thread portion 11 (while the double-ended nut 13 is rotated in the tightening direction) (see fig. 15).
Further, the 1 st movable-side projecting portion 73 is disposed at a position where, if the double-ended nut 13 is to be rotated in a direction opposite to the fastening direction from a state where the 1 st female screw portion 13a is screwed into the 1 st male screw portion 11 (see fig. 16), a side surface 73a of the 1 st movable-side projecting portion 73 is brought into contact with a side surface 611b of the 1 st fixed-side projecting portion 71 as indicated by a two-dot chain line in fig. 11.
The height of projection of the 1 st movable-side projecting portion 73 with respect to the one side surface 13d of the double-ended nut 13 is set to a height such that the 1 st movable-side projecting portion 73 can pass over the 1 st fixed-side projecting portion 71 when the double-ended nut 13 is further rotated in the tightening direction from a state in which the side surface 73b of the 1 st movable-side projecting portion 73 is in contact with the side surface 611a of the 1 st fixed-side projecting portion 71. The projecting height of the 1 st movable-side projecting portion 73 is set to a height such that the 1 st movable-side projecting portion 73 cannot pass over the 1 st fixed-side projecting portion 71 even if the double-ended nut 13 is further rotated in the direction opposite to the tightening direction from the state where the side surface 73a of the 1 st movable-side projecting portion 73 is in contact with the side surface 611b of the 1 st fixed-side projecting portion 71.
With the above configuration, the 1 st fixed-side boss 71 on the 1 st piping block 51 side and the 1 st movable-side boss 73 on the double-end nut 13 side constitute the 1 st anti-loosening mechanism 75 for restricting the double-end nut 13 from rotating in the opposite direction to the tightening direction from the state where the 1 st female screw 13a is screwed into the 1 st male screw 11.
Fig. 12 is a side view of the 2 nd piping block 52 viewed from the left side, and shows a positional relationship between the 2 nd fixed-side projection 72 and the 2 nd movable-side projection 74.
The 2 nd movable-side boss 74 is disposed at a position where the side surface 74b of the 2 nd movable-side boss 74 is brought into contact with the side surface 621a of the 2 nd fixed-side boss 72 (front portion 621) as shown by a chain line in fig. 12, while the 2 nd female screw 13b is screwed into the 2 nd male screw 12 (while the double-ended nut 13 is rotated in the fastening direction) (see fig. 15).
The 2 nd movable-side projecting portion 74 is disposed at a position where, if the double-ended nut 13 is to be rotated in the opposite direction to the fastening direction from the state where the 2 nd female screw portion 13b is screwed into the 2 nd male screw portion 12 (see fig. 16), the side surface 74a of the 2 nd movable-side projecting portion 74 is brought into contact with the side surface 621b of the 2 nd fixed-side projecting portion 72 as shown by the two-dot chain line in fig. 12.
The projecting height of the 2 nd movable-side projecting portion 74 with respect to the other side surface 13e of the double-ended nut 13 is set to a height such that the 2 nd movable-side projecting portion 74 can pass over the 2 nd fixed-side projecting portion 72 when the double-ended nut 13 is further rotated in the tightening direction from a state where the side surface 74b of the 2 nd movable-side projecting portion 74 abuts against the side surface 621a of the 2 nd fixed-side projecting portion 72. The projecting height of the 2 nd movable-side projecting portion 74 is set to a height such that the 2 nd movable-side projecting portion 74 cannot pass over the 2 nd fixed-side projecting portion 72 even if the double-ended nut 13 is further rotated in the direction opposite to the tightening direction from the state where the side surface 74a of the 2 nd movable-side projecting portion 74 abuts against the side surface 621b of the 2 nd fixed-side projecting portion 72.
According to the above configuration, the 2 nd fixed-side boss 72 on the 2 nd piping block 52 side and the 2 nd movable-side boss 74 on the double-ended nut 13 side constitute the 2 nd loosening prevention mechanism 76 that restricts rotation of the double-ended nut 13 in the opposite direction to the tightening direction from the state where the 2 nd female screw portion 13b is screwed into the 2 nd male screw portion 12.
[ connection order of flow path joint Structure ]
Next, the procedure for connecting the flow passage holes 510 and 520 of the 1 st pipe block 51 and the 2 nd pipe block 52 to each other by the flow passage joint structure 1 of the present embodiment will be described. First, as shown in fig. 13, the worker presses the 1 st press-fitting portion 14a of the packing 14 into the 1 st seal groove 15 of the 1 st pipe block 51, and integrally attaches the packing 14 to the 1 st pipe block 51.
The gasket 14 may be integrally attached to the 2 nd pipe block 52. In this case, the operator may press-fit the 2 nd press-fitting portion 14b of the packing 14 into the 2 nd seal groove 16 of the 2 nd pipe block 52.
Next, the worker places the double-ended nut 13 between the 1 st pipe block 51 and the 2 nd pipe block 52. At this time, the operator visually checks the 1 st marks 61 and 62 of the 1 st and 2 nd piping blocks 51 and 52 and the 2 nd mark 63 of the double nut 13, and thereby arranges the 1 st piping block 51, the 2 nd piping block 52, and the double nut 13 such that the fastening direction of the 1 st male screw portion 11, the fastening direction of the 2 nd male screw portion 12, and the fastening direction of the double nut 13 (the 1 st female screw portion 13a and the 2 nd female screw portion 13 b) all face the same direction.
Next, the operator brings the tip of the 1 st projecting portion 512 of the 1 st pipe block 51 and the tip of the 2 nd projecting portion 522 of the 2 nd pipe block 52 into contact with both ends of the double end nut 13 in the axial direction, and then fastens the double end nut 13 in the direction indicated by the 2 nd mark 63 using a tool (not shown) or the like. This enables the 1 st male screw portion 11 and the 1 st female screw portion 13a of the left-hand screw to be reliably screwed together, and the 2 nd male screw portion 12 and the 2 nd female screw portion 13b of the right-hand screw to be reliably screwed together.
If the worker fastens the double-ended nut 13, as shown in fig. 14, the 1 st male screw portion 11 is screwed into the 1 st female screw portion 13a, and the 1 st projecting portion 512 of the 1 st piping block 51 moves from the left side toward the center of the double-ended nut 13. Similarly, the 2 nd male screw portion 12 is screwed into the 2 nd female screw portion 13b, and the 2 nd projecting portion 522 of the 2 nd piping block 52 is moved from the right side of the double-ended nut 13 toward the center.
In this way, if the 1 st boss 512 and the 2 nd boss 522 are moved toward the center of the double-ended nut 13, as shown in fig. 15, the 2 nd press-in portion 14b of the packing 14 is press-fitted into the 2 nd seal groove 16 of the 2 nd piping block 52, so that the flow passage holes 510, 520 are connected to each other, and the connected portion is sealed by the packing 14.
As shown in fig. 15, the side surfaces 73b and 74b of the 1 st and 2 nd movable- side projecting portions 73 and 74 of the double-ended nut 13 abut against the side surfaces 611a and 621a of the 1 st and 2 nd fixed- side projecting portions 71 and 72, respectively, immediately before the double-ended nut 13 is fastened (see also fig. 11 and 12). When the double-ended nut 13 is further tightened from this state, the 1 st and 2 nd movable- side projecting portions 73 and 74 pass over the 1 st and 2 nd fixed- side projecting portions 71 and 72. At this time, the 1 st and 2 nd movable- side projecting portions 73 and 74 ride over the 1 st and 2 nd fixed- side projecting portions 71 and 72 along the side surfaces 611a and 621a as tapered surfaces, so that increase in fastening torque of the double-ended nut 13 can be suppressed, and fatigue and breakage of the 1 st and 2 nd movable- side projecting portions 73 and 74 can be suppressed.
When the double-ended nut 13 is further tightened in a state where the 1 st and 2 nd movable- side bosses 73 and 74 pass over the 1 st and 2 nd fixed- side bosses 71 and 72, as shown in fig. 16, the end surfaces 73c and 74c of the 1 st and 2 nd movable- side bosses 73 and 74 abut against the end surfaces 511a and 521b of the 1 st and 2 nd piping blocks 51 and 52. Thereby, the fastening of the double-ended nut 13 is completed.
However, in the state shown in fig. 16, if the 1 st and 2 nd piping blocks 51 and 52 vibrate due to pulsation of the chemical liquid flowing through the flow path holes 510 and 520, the double-end nut 13 may rotate in the opposite direction to the tightening direction and loosen. However, in the present embodiment, if the double-ended nut 13 is to be rotated in the opposite direction to the tightening direction, as shown in fig. 11 and 12, the 1 st and 2 nd movable- side projecting portions 73, 74 abut against the side surfaces 611b, 621b of the 1 st and 2 nd fixed- side projecting portions 71, 72. Since the side surfaces 611b and 621b are not tapered surfaces as described above, the 1 st and 2 nd movable side protrusions 73 and 74 abut against the side surfaces 611b and 621b, and the side surfaces are prevented from passing over the 1 st and 2 nd fixed side protrusions 71 and 72. Thereby, the rotation of the double-ended nut 13 in the direction opposite to the tightening direction is restricted, and therefore, the double-ended nut 13 can be suppressed from loosening in the direction opposite to the tightening direction.
[ Effect ]
As described above, according to the flow channel joint structure 1 of the present embodiment, since the right-handed screw and the left-handed screw are formed in the double-ended nut 13 by the 1 st internal thread portion 13a and the 2 nd internal thread portion 13b, the 1 st internal thread portion 13a is screwed with the 1 st external thread portion 11 of the 1 st pipe block 51 and the 2 nd internal thread portion 13b is screwed with the 2 nd external thread portion 12 of the 2 nd pipe block 52 by fastening the double-ended nut 13. Thus, the flow passage holes 510 and 520 of the 1 st pipe block 51 and the 2 nd pipe block 52 can be connected to each other only by the 1 double-ended nut 13, and the connecting portion between the flow passage holes 510 and 520 can be sealed by the packing 14 on the inner side in the radial direction of the double-ended nut 13. Therefore, the flow channel joint structure 1 of the present embodiment does not require the provision of the tube 101 and the 2 double-ended nuts 103 as in the conventional structure shown in fig. 28, and therefore the flow channel joint structure 1 can be provided in a space-saving manner.
In addition, in the flow path joint structure 1 of the present embodiment, since the 1 st pipe block 51 and the 2 nd pipe block 52 are provided with the 1 st mark portions 61 and 62 indicating the fastening directions of the 1 st male screw portion 11 and the 2 nd male screw portion 12, the operator can grasp the fastening directions of the 1 st male screw portion 11 and the 2 nd male screw portion 12 by visually checking the 1 st mark portions 61 and 62. This can prevent the 1 st male screw portion 11 and the 2 nd female screw portion 13b, which are different from each other in the fastening direction, from being screwed together, and the 2 nd male screw portion 12 and the 1 st female screw portion 13a from being screwed together. As a result, it is possible to suppress the breakage of the ridges of the male screw portion and the female screw portion due to the screwing of the male screw portion and the female screw portion in different fastening directions from each other.
Further, since the 2 nd mark 63 indicating the tightening direction is provided on the double end nut 13, the operator can grasp the tightening direction of the double end nut 13, that is, the tightening direction of the 1 st female screw portion 13a and the 2 nd female screw portion 13b by visually checking the 2 nd mark 63. This can further suppress screwing of the male screw portion and the female screw portion in mutually different fastening directions.
Further, if the double end nut 13 is to be rotated in the opposite direction to the tightening direction from the state where the 1 st and 2 nd internal thread portions 13a, 13b are screwed with the 1 st and 2 nd external thread portions 11, 12, respectively, the 1 st and 2 nd movable side projections 73, 74 on the double end nut 13 side abut against the 1 st and 2 nd fixed side projections 71, 72 on the 1 st and 2 nd pipe block 51, 52 side to restrict the rotation of the double end nut 13 in the opposite direction to the tightening direction. Thus, even if the 1 st and 2 nd piping blocks 51 and 52 vibrate due to pulsation of the chemical liquid flowing through the flow passage holes 510 and 520 or the like in a state where the double-ended nut 13 is fastened, the double-ended nut 13 can be prevented from being loosened in the direction opposite to the fastening direction.
Since the 1 st and 2 nd fixing- side protrusions 71 and 72 are formed by a part of the 1 st mark portions 61 and 62 of the 1 st and 2 nd piping blocks 51 and 52, it is not necessary to separately provide the 1 st and 2 nd fixing- side protrusions 71 and 72 separately from the 1 st mark portions 61 and 62. As a result, the structure of the flow channel joint structure 1 can be simplified.
Since the 1 st and 2 nd movable- side projections 73 and 74 are formed by a part of the 2 nd mark 63 of the 1 st and 2 nd piping blocks 51 and 52, the 1 st and 2 nd movable- side projections 73 and 74 do not need to be separately provided from the 2 nd mark 63, and thus the structure of the flow path joint structure 1 can be further simplified.
[ 2 nd embodiment ]
Fig. 17 is a perspective view of the 1 st pipe block 51 of the flow channel joint structure 1 according to embodiment 2 of the present invention. Fig. 18 is a side view of the 1 st piping block 51 of fig. 17 as viewed from the right side. The flow channel joint structure 1 of the present embodiment is different from that of embodiment 1 in that the 1 st mark 61 and the 1 st fixing-side boss 71 of the 1 st pipe block 51 are provided separately.
In fig. 17 and 18, a pair of 1 st mark portions 61 indicating the fastening direction (counterclockwise direction in fig. 18) of the 1 st male screw portion 11 is formed to be recessed leftward on the end surface 511a of the block main body 511 of the 1 st pipe block 51. The pair of 1 st mark portions 61 are arranged radially outward of the 1 st projecting portion 512 in a side view at equal intervals in the circumferential direction of the 1 st projecting portion 512. Each 1 st mark portion 61 is formed in an arrow shape, for example.
On an end surface 511a of the block main body 511 of the 1 st piping block 51, a pair of 1 st fixing-side protrusions 71 constituting the 1 st loosening prevention mechanism 75 are provided so as to protrude rightward. The amount of projection of each 1 st fixing-side projecting portion 71 from the end surface 511a is the same as the amount of projection of the 1 st flag 61 from the end surface 511a in embodiment 1.
The pair of 1 st fixing-side protrusions 71 are arranged radially outward of the 1 st protrusion 512 in a side view so as to be spaced apart at equal intervals in the circumferential direction of the 1 st protrusion 512. The side surfaces 71a, 71b on both sides in the width direction (the circumferential direction of the 1 st projecting portion 512) of each 1 st fixed-side projecting portion 71 are formed to extend radially outward of the 1 st projecting portion 512. The end of each 1 st fixing-side projecting portion 71 on the outer side in the radial direction is formed in a semicircular arc shape, for example.
Fig. 19 is a perspective view of the 2 nd pipe block 52 of the flow channel joint structure 1 according to embodiment 2. Fig. 20 is a side view of the 2 nd piping block 52 of fig. 19, as viewed from the left side. The flow path joint structure 1 of the present embodiment is different from that of embodiment 1 in that the 1 st mark portion 62 and the 2 nd fixing-side boss portion 72 of the 2 nd pipe block 52 are provided separately.
In fig. 19 and 20, a pair of 1 st mark portions 62 indicating the fastening direction (clockwise direction in fig. 20) of the 2 nd male screw portion 12 is formed so as to be recessed rightward on the end surface 521b of the block main body 521 of the 2 nd pipe block 52. The pair of 1 st mark portions 62 are arranged radially outward of the 2 nd projecting portion 522 in a side view at equal intervals in the circumferential direction of the 2 nd projecting portion 522. Each 1 st mark portion 62 is formed in the same arrow shape as the 1 st mark portion 61, for example.
On an end surface 521b of the block main body 521 of the 2 nd pipe block 52, a pair of 2 nd fixing side protrusions 72 constituting the 2 nd loosening prevention mechanism 76 are provided so as to protrude leftward. The amount of projection of each 2 nd fixing-side projecting portion 72 from the end surface 521b is the same as the amount of projection of the 1 st mark portion 62 from the end surface 521b in embodiment 1.
The pair of 2 nd fixing-side protrusions 72 are arranged radially outward of the 2 nd protrusion 522 in a side view at equal intervals in the circumferential direction of the 2 nd protrusion 522. The 2 nd fixing side projecting portion 72 is formed in the same shape as the 1 st fixing side projecting portion 71. That is, the side surfaces 72a, 72b on both sides in the width direction of each 2 nd fixing-side projecting portion 72 (the circumferential direction of the 2 nd projecting portion 522) are formed so as to extend radially outward of the 2 nd projecting portion 522. Further, the end portion of each 2 nd fixing-side projecting portion 72 on the outer side in the radial direction is formed in a semicircular arc shape.
Fig. 21 is a perspective view of the double-ended nut 13 of the flow channel joint structure 1 according to embodiment 2. The flow channel joint structure 1 of the present embodiment is different from that of embodiment 1 in that the 2 nd mark 63 and the 1 st and 2 nd movable- side protrusions 73 and 74 of the double-ended nut 13 are provided, respectively.
In fig. 21, the double-ended nut 13 of the present embodiment is formed, for example, in a regular octagonal shape in its outer periphery. On each surface of the outer periphery of the double end nut 13, a 2 nd mark 63 indicating a fastening direction of the 1 st internal thread 13a and the 2 nd internal thread 13b (a direction indicated by a white arrow in fig. 21), that is, a fastening direction of the double end nut 13 is provided. The 2 nd mark 63 is formed as a V-shaped recess in an arrow shape, for example, and 2 marks are formed on each surface of the outer periphery of the double end nut 13.
On the outer peripheral side of one side surface 13d of the double-ended nut 13, a plurality of 1 st movable-side protrusions 73 of the 1 st looseness prevention mechanism 75 are provided so as to protrude to the left side. On the outer peripheral side of the other side surface 13e of the double-ended nut 13, a plurality of 2 nd movable-side protrusions 74 of a 2 nd loosening prevention mechanism 76 are provided so as to protrude rightward.
The 2 nd movable-side projecting portions 74 are formed in, for example, a regular hexagonal shape, and are provided at 8 corners on the outer peripheral side of the other side surface 13e of the double-ended nut 13. Thus, the 2 nd movable-side projecting portions 74 are arranged at equal intervals in the circumferential direction on the outer peripheral side of the other side surface 13e of the double-ended nut 13. The 2 nd movable-side projecting portion 74 has side surfaces 74a, 74b on both circumferential sides of the double-ended nut 13 (see fig. 23).
The 1 st movable-side projecting portion 73 is formed in the same shape as the 2 nd movable-side projecting portion 74. That is, the 1 st movable-side projecting portion 73 is formed in a regular hexagonal shape (not shown) and is provided at 8 corners on the outer peripheral side of the one side surface 13d of the double-ended nut 13. Thus, the 1 st movable-side projecting portions 73 are arranged at equal intervals in the circumferential direction on the outer peripheral side of the one side surface 13d of the double-ended nut 13. The 1 st movable-side projecting portion 73 has side surfaces 73a, 73b on both sides in the circumferential direction of the double-ended nut 13 (see fig. 22).
Fig. 22 is a side view of the 1 st pipe block 51 according to embodiment 2 as viewed from the right side, and shows a positional relationship between the 1 st fixed-side projection 71 and the 1 st movable-side projection 73.
The 1 st movable-side projecting portion 73 is disposed at a position where the side surface 73b of the 1 st movable-side projecting portion 73 and the side surface 71a of the 1 st fixed-side projecting portion 71 abut as shown by a chain line in fig. 22 while the 1 st internal thread portion 13a and the 1 st external thread portion 11 are being screwed together (while the double-ended nut 13 is being rotated in the tightening direction) (see fig. 15).
The 1 st movable-side projecting portion 73 is disposed at a position where, if the double-ended nut 13 is rotated in the opposite direction to the fastening direction from the state where the 1 st female screw portion 13a is screwed into the 1 st male screw portion 11 (see fig. 16), the side surface 73a of the 1 st movable-side projecting portion 73 is brought into contact with the side surface 71b of the 1 st fixed-side projecting portion 71 as shown by the two-dot chain line in fig. 22.
The height of the projection of the 1 st movable-side projecting portion 73 with respect to the one side surface 13d of the double-ended nut 13 is set to a height such that the 1 st movable-side projecting portion 73 can pass over the 1 st fixed-side projecting portion 71 when the double-ended nut 13 is further rotated in the tightening direction from a state in which the side surface 73b of the 1 st movable-side projecting portion 73 is in contact with the side surface 71a of the 1 st fixed-side projecting portion 71. The projecting height of the 1 st movable-side projecting portion 73 is set to a height at which the 1 st movable-side projecting portion 73 cannot pass over the 1 st fixed-side projecting portion 71 even if the double-ended nut 13 is further rotated in the direction opposite to the tightening direction from the state in which the side surface 73a of the 1 st movable-side projecting portion 73 is in contact with the side surface 71b of the 1 st fixed-side projecting portion 71.
According to the above configuration, the 1 st fixed-side boss 71 on the 1 st piping block 51 side and the 1 st movable-side boss 73 on the double-ended nut 13 side constitute the 1 st anti-loosening mechanism 75 that restricts rotation of the double-ended nut 13 in the opposite direction to the tightening direction from the state where the 1 st female screw 13a is screwed into the 1 st male screw 11.
Fig. 23 is a side view of the 2 nd piping block 52 of embodiment 2 as viewed from the left side, and shows a positional relationship between the 2 nd fixed-side projecting portion 72 and the 2 nd movable-side projecting portion 74.
The 2 nd movable-side projecting portion 74 is disposed at a position where the side surface 74b of the 2 nd movable-side projecting portion 74 abuts against the side surface 72a of the 2 nd fixed-side projecting portion 72 as shown by a chain line in fig. 23 while the 2 nd female screw portion 13b is screwed into the 2 nd male screw portion 12 (while the double-ended nut 13 is rotated in the tightening direction) (see fig. 15).
Further, the 2 nd movable-side projecting portion 74 is disposed at a position where, if the double-ended nut 13 is rotated in the opposite direction to the fastening direction from the state where the 2 nd female screw portion 13b is screwed into the 2 nd male screw portion 12 (see fig. 16), the side surface 74a of the 2 nd movable-side projecting portion 74 is brought into contact with the side surface 72b of the 2 nd fixed-side projecting portion 72 as indicated by a two-dot chain line in fig. 23.
The projecting height of the 2 nd movable-side projecting portion 74 with respect to the other side surface 13e of the double-ended nut 13 is set to a height such that the 2 nd movable-side projecting portion 74 can pass over the 2 nd fixed-side projecting portion 72 when the double-ended nut 13 is further rotated in the tightening direction from a state in which the side surface 74b of the 2 nd movable-side projecting portion 74 is in contact with the side surface 72a of the 2 nd fixed-side projecting portion 72. The projecting height of the 2 nd movable-side projecting portion 74 is set to a height such that the 2 nd movable-side projecting portion 74 cannot pass over the 2 nd fixed-side projecting portion 72 even if the double-ended nut 13 is further rotated in the direction opposite to the tightening direction from the state where the side surface 74a of the 2 nd movable-side projecting portion 74 abuts against the side surface 72b of the 2 nd fixed-side projecting portion 72.
With the above configuration, the 2 nd fixed-side boss 72 on the 2 nd piping block 52 side and the 2 nd movable-side boss 74 on the double-end nut 13 side constitute the 2 nd loosening prevention mechanism 76 that restricts rotation of the double-end nut 13 in the opposite direction to the tightening direction from the state in which the 2 nd female screw 13b is screwed into the 2 nd male screw 12.
Other configurations of the present embodiment are the same as those of embodiment 1, and therefore the same reference numerals are given thereto and descriptions thereof are omitted.
In the flow path joint structure 1 of embodiment 2, the 1 st pipe block 51 and the 2 nd pipe block 52 are provided with the 1 st mark portions 61 and 62 indicating the fastening direction of the 1 st male screw portion 11 and the 2 nd male screw portion 12, so that an operator can grasp the fastening direction of the 1 st male screw portion 11 and the 2 nd male screw portion 12 by visually checking the 1 st mark portions 61 and 62. This can prevent the male screw portion and the female screw portion having different fastening directions from being screwed together. As a result, it is possible to suppress the thread breakage of the male screw portion and the female screw portion caused by the screwing of the male screw portion and the female screw portion in different fastening directions.
Further, since the 2 nd mark 63 indicating the tightening direction is provided on the double end nut 13, the operator can grasp the tightening direction of the double end nut 13, that is, the tightening direction of the 1 st female screw portion 13a and the 2 nd female screw portion 13b by visually checking the 2 nd mark 63. This can further suppress screwing of the male screw portion and the female screw portion in mutually different fastening directions.
Further, if the double-ended nut 13 is to be rotated in the opposite direction to the tightening direction from the state where the 1 st and 2 nd female screw portions 13a, 13b are screwed with the 1 st and 2 nd male screw portions 11, 12, respectively, the 1 st and 2 nd movable side bosses 73, 74 on the double-ended nut 13 side abut against the 1 st and 2 nd fixed side bosses 71, 72 on the 1 st and 2 nd piping blocks 51, 52 side to restrict the rotation of the double-ended nut 13 in the opposite direction to the tightening direction. Thus, even if the 1 st and 2 nd piping blocks 51 and 52 vibrate due to pulsation of the chemical liquid flowing through the flow path holes 510 and 520 in the state where the double-ended nut 13 is fastened, the double-ended nut 13 can be prevented from being loosened in the direction opposite to the fastening direction.
[ embodiment 3 ]
Fig. 24 is a perspective view of the double-ended nut 13 of the flow channel joint structure 1 according to embodiment 3 of the present invention. The flow channel joint structure 1 of the present embodiment is a modification of embodiment 2, and is different from embodiment 2 in that the 2 nd mark 63 of the double-ended nut 13 is the 1 st and 2 nd movable- side protrusions 73 and 74.
In fig. 24, a plurality of 2 nd mark portions 63 indicating the fastening direction of the 1 st female screw portion 13a and the 2 nd female screw portion 13b (the direction indicated by white arrows in fig. 24), that is, the fastening direction of the double end nut 13 are provided on one side surface 13d and the other side surface 13e of the double end nut 13 in the present embodiment. The 2 nd mark 63 is formed in, for example, an arrow-root shape, and is provided on the outer peripheral side of the one side surface 13d (the other side surface 13 e) of the double end nut 13 so as to project to the left (right) side from positions corresponding to the respective surfaces of the outer periphery of the double end nut 13. The 2 nd mark 63 is disposed at equal intervals in the circumferential direction on the outer peripheral side of the one side surface 13d (the other side surface 13 e) of the double-ended nut 13.
The 2 nd mark portions 63 provided on the one side surface 13d of the double-ended nut 13 function as the 1 st movable-side projecting portions 73 of the 1 st lock mechanism 75. On both sides of the 1 st movable-side projecting portion 73 in the circumferential direction of the double-ended nut 13, side surfaces 73a recessed in a V shape and side surfaces 73b projecting in a V shape are formed (see fig. 25).
The 2 nd mark portions 63 provided on the other side surface 13e of the double-ended nut 13 function as the 2 nd movable-side projecting portions 74 of the 2 nd locking mechanism 76. On both sides of the double-ended nut 13 in the circumferential direction of the 2 nd movable-side projecting portion 74, side surfaces 74a recessed in a V shape and side surfaces 74b projecting in a V shape are formed (see fig. 26).
Fig. 25 is a side view of the 1 st pipe block 51 according to embodiment 3 as viewed from the right side, and shows a positional relationship between the 1 st fixed-side projection 71 and the 1 st movable-side projection 73.
The 1 st movable-side projecting portion 73 is disposed at a position where the side surface 73b of the 1 st movable-side projecting portion 73 and the side surface 71a of the 1 st fixed-side projecting portion 71 abut as shown by a chain line in fig. 25 while the 1 st internal thread portion 13a and the 1 st external thread portion 11 are being screwed together (while the double-ended nut 13 is being rotated in the tightening direction) (see fig. 15).
The 1 st movable-side projecting portion 73 is disposed at a position where, if the double-ended nut 13 is to be rotated in a direction opposite to the fastening direction from a state where the 1 st female screw portion 13a is screwed into the 1 st male screw portion 11 (see fig. 16), a side surface 73a of the 1 st movable-side projecting portion 73 is brought into contact with a side surface 71b of the 1 st fixed-side projecting portion 71 as indicated by a two-dot chain line in fig. 25.
Fig. 26 is a side view of the 2 nd piping block 52 according to embodiment 3 as viewed from the left side, and shows a positional relationship between the 2 nd fixed-side projecting portion 72 and the 2 nd movable-side projecting portion 74.
The 2 nd movable-side projecting portion 74 is disposed at a position where the side surface 74b of the 2 nd movable-side projecting portion 74 and the side surface 72a of the 2 nd fixed-side projecting portion 72 abut against each other as shown by a chain line in fig. 25 while the 2 nd female screw portion 13b is being screwed into the 2 nd male screw portion 12 (while the double-ended nut 13 is being rotated in the tightening direction) (see fig. 15).
The 2 nd movable-side projecting portion 74 is disposed at a position where, if the double-end nut 13 is to be rotated in a direction opposite to the fastening direction from a state where the 2 nd female screw portion 13b is screwed into the 2 nd male screw portion 12 (see fig. 16), a side surface 74a of the 2 nd movable-side projecting portion 74 is brought into contact with a side surface 72b of the 2 nd fixed-side projecting portion 72 as indicated by a two-dot chain line in fig. 25.
Other configurations of the present embodiment are the same as those of embodiment 2, and therefore the same reference numerals are given thereto and descriptions thereof are omitted.
The flow channel joint structure 1 according to embodiment 3 can also achieve the same operational effects as those of embodiment 2. Further, since the 2 nd mark 63 of the 1 st and 2 nd piping blocks 51 and 52 constitutes the 1 st and 2 nd movable- side projections 73 and 74, it is not necessary to separately provide the 1 st and 2 nd movable- side projections 73 and 74 from the 2 nd mark 63, and therefore the structure of the flow path joint structure 1 can be simplified.
[ others ]
The flow channel joint structure 1 of the above embodiment is described as being used in a semiconductor manufacturing apparatus, but may be used in the liquid crystal/organic EL field, the medical/medical field, the latter automotive field, and the like.
In the flow passage joint structure 1 of the above embodiment, the 1 st mark portions 61 and 62 are provided in both the 1 st pipe block 51 and the 2 nd pipe block 52, but the 1 st mark portion may be provided only in one of the 1 st pipe block 51 and the 2 nd pipe block 52. The shape, number, and position of the 1 st mark portions 61, 62 are not limited to those of the above embodiment. For example, in the above embodiment, the 1 st pipe block 51 and the 2 nd pipe block 52 are provided with the 1 st mark portions 61 and 62 having a convex or concave shape, but arrows or the like indicating the fastening directions of the 1 st and 2 nd male screw portions 11 and 12 may be given.
The shape, number, and position of the 2 nd mark 63 are not limited to those of the above embodiments. For example, in the above embodiment, the 2 nd mark 63 having a convex shape or a concave shape is provided on the double-ended nut 13, but an arrow indicating the fastening direction of the double-ended nut 13 may be given.
In the above embodiment, the 1 st and 2 nd fixing- side protrusions 71 and 72 are provided to both the 1 st pipe block 51 and the 2 nd pipe block 52, but the fixing-side protrusion may be provided only to one of the two pipe blocks 51 and 52. In this case, the double-ended nut 13 may be provided with only the movable-side boss corresponding to the fixed-side boss provided only on one of the two piping blocks 51 and 52.
The shape, number, and position of the 1 st and 2 nd fixing- side protrusions 71 and 72 are not limited to those of the above-described embodiment. The shape, number, and position of the 1 st and 2 nd movable- side protrusions 73 and 74 are not limited to those in the above embodiments.
In the above embodiment, the gasket 14 is used as the sealing member for sealing the connection portion between the flow passage holes 510 and 520, but a sealing member other than the gasket 14 may be used. As shown in fig. 27, the sealing member (gasket 14) may be integrated with the 1 st projection 512 of the 1 st pipe block 51, or may be integrated with the 2 nd projection 522 of the 2 nd pipe block 51, which is not shown.
It should be understood that the embodiments disclosed herein are illustrative and not restrictive in all respects. In addition, all or a part of the structures described as examples in each of embodiments 1 to 3 may be combined. The scope of the present invention is not intended to be limited to the above-described scope, and is intended to be defined by the appended claims, and include all modifications within the scope and range equivalent to the appended claims.
Claims (3)
1. A flow path joint structure for connecting flow path holes formed in a 1 st fluid device and a 2 nd fluid device, respectively,
the flow path joint structure includes:
a 1 st male screw portion provided to protrude from one end surface of the 1 st fluid device and arranged radially outside a flow passage hole of the 1 st fluid device;
a 2 nd male screw portion provided to protrude from one end surface of the 2 nd fluidic device, and arranged radially outside a flow passage hole of the 2 nd fluidic device;
a double-ended nut having a 1 st female screw portion that is screwed into the 1 st male screw portion on one axial side and a 2 nd female screw portion that is screwed into the 2 nd male screw portion on the other axial side; and
a seal member that seals a connection portion between the flow passage holes of the 1 st and 2 nd fluid devices by screwing the 1 st female screw portion and the 1 st male screw portion and screwing the 2 nd female screw portion and the 2 nd male screw portion on a radial inner side of the double-ended nut,
the 1 st external thread portion and the 1 st internal thread portion are either right-handed threads or left-handed threads,
the 2 nd external thread portion and the 2 nd internal thread portion are the other of a right-hand thread and a left-hand thread,
the flow path joint structure includes:
a 1 st mark portion provided in at least one of the 1 st fluidic device and the 2 nd fluidic device, the 1 st mark portion indicating a fastening direction of the 1 st male screw portion and the 2 nd male screw portion to the male screw portion provided in the one fluidic device;
a fixed-side projecting portion provided to project from the one end face of the one fluid device; and
a movable-side projection portion provided to the double-ended nut and projecting from the double-ended nut toward the one end surface side of the one fluid device,
if the double-ended nut is to be rotated in the opposite direction to the tightening direction from the state in which the female screw portion corresponding to the male screw portion of the 1 st and 2 nd female screw portions is screwed into the male screw portion, the movable-side projecting portion abuts against the fixed-side projecting portion to restrict the rotation of the double-ended nut in the opposite direction to the tightening direction,
at least a part of the 1 st mark constitutes the fixed-side projecting portion.
2. The flow path joint structure according to claim 1,
the flow path joint structure further includes a 2 nd mark portion, the 2 nd mark portion being provided to the double-ended nut and indicating a fastening direction of the double-ended nut.
3. The flow path joint structure according to claim 2,
at least a part of the 2 nd mark portion constitutes the movable-side projecting portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019207953A JP7308727B2 (en) | 2019-11-18 | 2019-11-18 | Flow joint structure |
| JP2019-207953 | 2019-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112815160A CN112815160A (en) | 2021-05-18 |
| CN112815160B true CN112815160B (en) | 2023-03-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011292816.8A Active CN112815160B (en) | 2019-11-18 | 2020-11-18 | Flow path joint structure |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7308727B2 (en) |
| KR (1) | KR102519792B1 (en) |
| CN (1) | CN112815160B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US581050A (en) * | 1897-04-20 | Pipe-coupling | ||
| US6070912A (en) * | 1989-08-01 | 2000-06-06 | Reflange, Inc. | Dual seal and connection |
| CN105556190A (en) * | 2013-10-01 | 2016-05-04 | 日本皮拉工业株式会社 | Synthetic resin tube joint |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4150845A (en) * | 1976-12-06 | 1979-04-24 | Becton, Dickinson And Company | Captured nut coupling |
| JPS6045915U (en) * | 1983-09-06 | 1985-04-01 | 川端 幸由 | Thin metal locking nut |
| JPS6077879U (en) * | 1983-10-31 | 1985-05-30 | 松下電工株式会社 | Piping fittings |
| JPS6224091A (en) * | 1985-07-24 | 1987-02-02 | 東海ゴム工業株式会社 | Pipe joint |
| JPH11108277A (en) * | 1997-10-02 | 1999-04-20 | Tomoe Shokai:Kk | Display member for rotationally moving direction of cap nut of valve connecting joint |
| JP2000205229A (en) * | 1999-01-19 | 2000-07-25 | Morio Tanmachi | Locking nut and locking bolt |
| US6578876B2 (en) * | 2000-12-12 | 2003-06-17 | Good Turns, Llc | Plumbing connection and disconnection system and method |
| US6908121B2 (en) * | 2001-10-22 | 2005-06-21 | Weatherford/Lamb, Inc. | Locking arrangement for a threaded connector |
| WO2008039456A2 (en) * | 2006-09-22 | 2008-04-03 | Eaton Corporation | Adjustable fluid coupling assembly |
| DE102010004272B4 (en) * | 2010-01-09 | 2011-09-22 | Norma Germany Gmbh | coupling member |
| JP5878143B2 (en) | 2013-05-08 | 2016-03-08 | 日本ピラー工業株式会社 | Synthetic resin pipe fittings |
| JP6420882B2 (en) * | 2017-11-01 | 2018-11-07 | 日本ピラー工業株式会社 | Synthetic resin pipe fittings |
-
2019
- 2019-11-18 JP JP2019207953A patent/JP7308727B2/en active Active
-
2020
- 2020-11-16 KR KR1020200152826A patent/KR102519792B1/en active IP Right Grant
- 2020-11-18 CN CN202011292816.8A patent/CN112815160B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US581050A (en) * | 1897-04-20 | Pipe-coupling | ||
| US6070912A (en) * | 1989-08-01 | 2000-06-06 | Reflange, Inc. | Dual seal and connection |
| CN105556190A (en) * | 2013-10-01 | 2016-05-04 | 日本皮拉工业株式会社 | Synthetic resin tube joint |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7308727B2 (en) | 2023-07-14 |
| JP2021080979A (en) | 2021-05-27 |
| CN112815160A (en) | 2021-05-18 |
| KR20210060343A (en) | 2021-05-26 |
| KR102519792B1 (en) | 2023-04-10 |
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