CN112809408B

CN112809408B - Mask plate inclined drilling conversion adjusting support

Info

Publication number: CN112809408B
Application number: CN202011563914.0A
Authority: CN
Inventors: 钱超; 杨波; 洪明; 王有明
Original assignee: Jiangsu Gaoguang Semiconductor Materials Co ltd
Current assignee: Jiangsu Gaoguang Semiconductor Materials Co ltd
Priority date: 2020-12-25
Filing date: 2020-12-25
Publication date: 2022-03-01
Anticipated expiration: 2040-12-25
Also published as: CN112809408A

Abstract

The invention discloses a mask inclined drilling hole conversion adjusting bracket in the technical field of masks, wherein a limiting part is arranged at the bottom of a turnover plate, the limiting part is arranged at two sides of a support, the turnover plate is turned towards two sides and is blocked by the limiting part to be limited to a preset position, a clamping assembly is arranged on the turnover plate, a locking assembly is arranged at the bottom of the turnover plate, and the turnover plate is locked in position through the locking assembly after being turned over and adjusted. The turnover plate can be limited after being turned over, and a vertical drilling machine can punch holes with the angle of 45 degrees on the mask plate.

Description

Mask plate inclined drilling conversion adjusting support

Technical Field

The invention relates to the technical field of mask plates, in particular to a mask plate inclined drilling conversion adjusting support.

Background

The mask is a graphic master mask used by a photoetching process commonly used by a micro-nano processing technology. A mask pattern structure is formed on a transparent substrate by an opaque shading film, and pattern information is transferred to a product substrate through an exposure process. The metal mask is a hollow structure, a sputtering or evaporation metallization process can be directly carried out on the substrate without photoetching, the material can pass through the hollow part of the metal mask and is deposited on the surface of the substrate, a patterned deposition pattern is directly obtained, and the metal mask can be used for multiple times.

When the mask plate is processed, holes with an included angle of 45 degrees with the surface need to be drilled, the cost of the existing five-axis numerical control machine tool is high, and the three-axis machine tool cannot directly process 45-degree inclined holes, so that the mask plate and the horizontal plane form 45 degrees by utilizing a support, and the drill bit can finish the 45-degree inclined drilling by being vertical to the horizontal plane;

cause the displacement of mask version easily when driling, lead to drilling to appear the dislocation, cause the damage to the mask version easily in the centre gripping process, add man-hour, to the drilling of equidirectional not, need change the position again with the mask version, press from both sides tight drilling again, waste a large amount of time. Based on the technical scheme, the invention designs a mask inclined drilling conversion adjusting bracket to solve the problems.

Disclosure of Invention

The invention aims to provide a mask inclined drilling conversion adjusting bracket which can be quickly exchanged and turned, is convenient to clamp, reduces damage and reduces the time required by processing.

In order to achieve the purpose, the invention provides the following technical scheme: a mask plate inclined drilling conversion adjusting support comprises an operation table, wherein two groups of support seats which are arranged in an aligned mode are installed on the operation table, a turnover plate which can turn over is connected between the support seats through a rotating shaft, limiting parts are installed at the bottom of the turnover plate, the limiting parts are installed on two sides of each support seat, and the turnover plate turns over towards two sides and is blocked by the limiting parts to be limited to a preset position;

the turnover plate is provided with clamping components, a mask is placed between the clamping components and fixedly mounted through the clamping components, the clamping components are a fixed clamping plate and a movable clamping plate, and the fixed clamping plate and the movable clamping plate can be adjusted in a sliding manner;

the bottom of returning face plate sets up the locking subassembly, and the returning face plate carries out the position lock through the locking subassembly after the upset is adjusted and dies.

Preferably, the bottom of returning face plate is provided with the isosceles right angle board, the isosceles right angle board sets up the multiunit in the bottom of returning face plate, the right angle end of isosceles right angle board is connected on the rotary drum, the rotary drum is connected the pivot and is rotated and install on the support, the other end of pivot and the output shaft of motor, and the motor drive rotary drum overturns, install the control switch who controls the motor on the operation panel.

Preferably, the limiting part comprises a transverse plate, a limiting strip and a travel switch, the transverse plate is horizontally welded on two sides of the support, the limiting strip is installed at the top of the transverse plate, when the isosceles right-angle plate deflects to one side, the limiting strip is correspondingly clamped below the isosceles right-angle plate, the peer waist right-angle plate carries out limiting support, the travel switch is installed on the transverse plate, when the isosceles right-angle plate deflects to one side, the travel switch on one side is triggered, and the travel switch control motor is turned off.

Preferably, the deflection angle of the turnover plate is between +45 degrees and-45 degrees.

Preferably, the turnover plate is provided with a sliding groove and a screw groove, the bottom of the movable clamping plate is provided with a protruding part which is clamped into the sliding groove and the screw groove respectively, a connecting threaded rod is rotated in the screw groove, and the threaded rod drives one of the protruding parts in a threaded manner.

Preferably, the other end of the threaded rod is connected with a driving handle, the driving handle comprises a coarse adjusting disk and a fine adjusting disk which are concentrically connected together, and the diameter of the coarse adjusting disk is larger than that of the fine adjusting disk.

Preferably, the bottom installation draw runner of diaphragm, a side-mounting spring bolt of draw runner, the buckle is all installed to the bottom both sides of isosceles right angle board, set up the catching groove in the buckle, spring bolt slidable card is gone into in the catching groove, locks the returning face plate after the position is spacing.

Preferably, the outer tip installation connecting portion of diaphragm, the extension spring of installation on the connecting portion, the draw runner is connected to the other end of extension spring, the outer tip of diaphragm is seted up the bar groove, the both ends of draw runner run through in the bar groove, the outer tip installation of draw runner is convenient for the push pedal of hand operation.

Preferably, the corresponding positions of the fixed clamping plate and the movable clamping plate are provided with clamping grooves, the end parts of the two sides of the mask plate are clamped in the corresponding two clamping grooves, and the outer sides of the clamping grooves are sleeved with clamping sleeves for buffering.

Compared with the prior art, the invention has the beneficial effects that:

the turnover plate can turn over at two angles, after a 45-degree hole is drilled in one side of the mask, the mask can be turned over by 90 degrees to drill at 45 degrees in the other angle, so that the drilling at two sides is convenient and fast, and the mask is prevented from being damaged due to repeated moving and re-fixing;

according to the invention, the protective clamping and fixing of the mask can be rapidly completed through the arrangement of the fixed clamping plate and the movable clamping plate, the influence of looseness during drilling on drilling is avoided, the fastening and clamping can be rapidly and finely completed step by step through the coarse adjusting disc and the fine adjusting disc, the fixing is convenient, and the clamping force can be controlled;

according to the invention, the turnover plate can be limited after being turned over by the limiting component, so that a vertical drilling machine can punch holes with an angle of 45 degrees on the mask plate, the turnover plate is locked by the locking component arranged after being limited and the locking component is elastically clamped into the buckle plate by the locking tongue, and the punching is more stable.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a left side view of FIG. 1 in accordance with the present invention;

FIG. 3 is an enlarged, fragmentary view of the latch assembly of the present invention;

FIG. 4 is a view of the construction of the gusset of the present invention;

FIG. 5 is a schematic view of the structure of the fixed splint and the movable splint according to the present invention;

FIG. 6 is a schematic view of the structural runner and screw channel of the present invention;

fig. 7 is a diagram of the flip board in a flipped state according to the present invention.

In the drawings, the components represented by the respective reference numerals are listed below:

1-operation table, 2-support, 3-turnover plate, 4-mask, 5-limit part, 6-isosceles right plate, 7-rotary drum, 8-motor, 9-control switch, 10-transverse plate, 11-limit strip, 12-travel switch, 13-slide strip, 14-lock tongue, 15-push plate, 16-strip groove, 17-tension spring, 18-connecting part, 19-buckle plate, 20-buckle groove, 21-fixed clamp plate, 22-movable clamp plate, 23-clamp groove, 24-clamp sleeve, 25-slide groove, 26-screw groove, 27-screw rod, 28-projection, 29-coarse adjustment disc and 30-fine adjustment disc.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-7, the present invention provides a technical solution: a mask plate inclined drilling conversion adjusting support comprises an operation table 1, two groups of support seats 2 which are arranged in an aligned mode are installed on the operation table 1, turnover plates 3 which can turn over are connected between the support seats 2 through rotating shafts, isosceles right angle plates 6 are arranged at the bottoms of the turnover plates 3, a plurality of groups of the isosceles right angle plates 6 are arranged at the bottoms of the turnover plates 3, the right angle ends of the isosceles right angle plates 6 are connected onto a rotating drum 7, the rotating drum 7 is connected with the rotating shafts and is installed on the support seats 2 in a rotating mode, the other end of each rotating shaft is connected with an output shaft of a motor 8, the motor 8 drives the rotating drum 7 to turn over, a control switch 9 for controlling the motor 8 is installed on the operation table 1, after the control switch 9 is started, the motor 8 drives the rotating shafts to rotate, and the rotating drum 7 and the isosceles right angle plates 6 drive the turnover plates 3 to rotate; the deflection angle of the turning plate 3 is between +45 deg. and-45 deg..

The bottom of the turnover plate 3 is provided with a limiting component 5, the limiting component 5 is arranged on two sides of the support 2, and the turnover plate 3 is blocked by the limiting component 5 when turned to two sides and is limited to a preset position; limiting part 5 includes diaphragm 10, spacing 11 and travel switch 12, diaphragm 10 horizontal welding is in the both sides of support 2, spacing 11 is installed at the top of diaphragm 10, when isosceles right-angle plate 6 deflects to one side, spacing 11 corresponds the card in the below of isosceles right-angle plate 6, peer waist right-angle plate 6 carries out spacing support, travel switch 12 is installed on diaphragm 10, when isosceles right-angle plate 6 deflects to one side, trigger one side travel switch 12, travel switch 12 control motor 8 closes.

The turnover plate 3 is provided with clamping components, a mask 4 is arranged between the clamping components, the mask 4 is fixedly arranged through the clamping components, the clamping components are a fixed clamping plate 21 and a movable clamping plate 22, and the position between the fixed clamping plate 21 and the movable clamping plate 22 can be adjusted in a sliding manner; the turnover plate 3 is provided with a sliding groove 25 and a screw groove 26, the bottom of the movable clamping plate 22 is provided with a protrusion 28 which is respectively clamped in the sliding groove 25 and the screw groove 26, a threaded rod 27 is rotatably connected in the screw groove 26, and the threaded rod 27 drives one protrusion 28 in a threaded manner; the other end of threaded rod 27 is connected the actuating handle, and the actuating handle includes thick adjustment disk 29 and the little adjustment disk 30 that links together with concentric, and the diameter of thick adjustment disk 29 is greater than the diameter of little adjustment disk 30, and rotatory thick adjustment disk 29 can carry out the rapid rotation with threaded rod 27, and threaded rod 27 rotary drive movable clamp plate 22 slides, and movable clamp plate 22 removes to fixed splint 21 one side, and fixed splint 21 of cooperation carries out the centre gripping to mask version 4.

The clamping grooves 23 are formed in the corresponding positions of the fixed clamping plate 21 and the movable clamping plate 22, the end portions of the two sides of the mask plate 4 are clamped in the corresponding clamping grooves 23, the clamping sleeve 24 used for buffering is sleeved on the outer side of each clamping groove 23, and the clamping sleeve can be made of rubber materials and is protected in a buffering mode.

The bottom of the turnover plate 3 is provided with a locking assembly, and the turnover plate 3 is locked in position through the locking assembly after being turned and adjusted; the bottom of the transverse plate 10 is provided with a slide bar 13, one side of the slide bar 13 is provided with a lock tongue 14, two sides of the bottom of the isosceles right-angle plate 6 are provided with buckle plates 19, each buckle plate 19 is provided with a buckle groove 20, the lock tongue 14 can be clamped into the buckle groove 20 in a sliding mode, and the turnover plate 3 with the position limited is locked.

Connecting portion 18 is installed at the outer tip of diaphragm 10, install extension spring 17 on connecting portion 18, the other end of extension spring 17 is connected with draw runner 13, the outer tip of diaphragm 10 is seted up the bar groove 16, the both ends of draw runner 13 run through in the bar groove 16, the outer tip installation of draw runner 13 is convenient for the push pedal 15 of hand operation, promote push pedal 15 before locking, push pedal 15 slides in bar groove 16, retract spring bolt 14, after the flip-flop 3 is spacing, spring bolt 14 kick-backs under the effect of extension spring 17, spring bolt 14 blocks in the catching groove 20 of buckle 19, lock flip-flop 3.

During the use, the one end card of mask 4 is gone into in the double-layered groove 23 of solid fixed splint 21, the thick adjustment disk of quick rotation 29, threaded rod 27 is rotatory fast, with the movable splint 22 the other end of quick slip mask 4, adjust little adjustment disk 30, threaded rod 27 slow rotation, lift mask 4, with the centre gripping of mask 4 between solid fixed splint 21 and movable splint 22, starter motor 8, motor 8 rotates and is rotatory with returning face plate 3, when returning face plate 3 is rotatory 90 degrees, the right-angle side of isosceles right-angle board 6 is changeed on spacing strip 11, the right-angle side card of one of them isosceles right-angle board 6 is to travel switch 12, travel switch 12 is according to touching the back, motor 8 stall, promote push pedal 15 before locking, utilize the locking group to lock returning face plate 3 and lock, guarantee the fixed stability of returning face plate 3.

In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. The utility model provides a support is adjusted in mask version inclined drilling conversion, includes operation panel (1), install two sets of supports (2) that align to set up on operation panel (1), its characterized in that: the turnover device is characterized in that turnover plates (3) which can turn over are connected between the supports (2) through rotating shafts, limiting parts (5) are mounted at the bottoms of the turnover plates (3), the limiting parts (5) are mounted on two sides of the supports (2), and the turnover plates (3) are blocked by the limiting parts (5) to turn over towards two sides and are limited to preset positions;

the turnover plate (3) is provided with clamping components, a mask (4) is placed between the clamping components, the mask (4) is fixedly installed through the clamping components, the clamping components are a fixed clamping plate (21) and a movable clamping plate (22), and the position between the fixed clamping plate (21) and the movable clamping plate (22) can be adjusted in a sliding mode;

the bottom of the turnover plate (3) is provided with isosceles right angle plates (6), the bottom of the turnover plate (3) is provided with a plurality of groups of the isosceles right angle plates (6), the right-angle end of each isosceles right angle plate (6) is connected to a rotary drum (7), the rotary drum (7) is connected with a rotary shaft and rotatably mounted on a support (2), the other end of the rotary shaft is connected with an output shaft of a motor (8), the rotary drum (7) is driven by the motor (8) to turn over, and a control switch (9) for controlling the motor (8) is mounted on the operating table (1);

the limiting part (5) comprises a transverse plate (10), a limiting strip (11) and a travel switch (12), the transverse plate (10) is horizontally welded on two sides of the support (2), the limiting strip (11) is installed at the top of the transverse plate (10), when the isosceles right-angle plate (6) deflects to one side, the limiting strip (11) is correspondingly clamped below the isosceles right-angle plate (6) to limit and support the isosceles right-angle plate (6), the travel switch (12) is installed on the transverse plate (10), when the isosceles right-angle plate (6) deflects to one side, the travel switch (12) on one side is triggered, and the travel switch (12) controls the motor (8) to be closed;

the bottom of the turnover plate (3) is provided with a locking assembly, and the turnover plate (3) is locked in position through the locking assembly after being turned and adjusted;

a sliding strip (13) is arranged at the bottom of the transverse plate (10), a lock tongue (14) is arranged on one side of the sliding strip (13), buckle plates (19) are arranged on two sides of the bottom of the isosceles right-angle plate (6), a buckle groove (20) is formed in each buckle plate (19), the lock tongue (14) can be clamped into the buckle groove (20) in a sliding mode, and the turnover plate (3) with the position limited is locked;

outer tip installation connecting portion (18) of diaphragm (10), installation extension spring (17) on connecting portion (18), draw spring (17) other end is connected draw runner (13), bar groove (16) are seted up to the outer tip of diaphragm (10), in bar groove (16) is run through at the both ends of draw runner (13), the outer tip installation push pedal (15) of the hand operation of being convenient for of draw runner (13).

2. The mask plate inclined drilling conversion adjusting bracket according to claim 1, characterized in that: the deflection angle of the turnover plate (3) is between +45 degrees and-45 degrees.

3. The mask plate inclined drilling conversion adjusting bracket according to claim 1, characterized in that: the improved turnover mechanism is characterized in that the turnover plate (3) is provided with a sliding groove (25) and a screw groove (26), the bottom of the movable clamping plate (22) is provided with a protruding part (28) which is respectively clamped into the sliding groove (25) and the screw groove (26), a connecting threaded rod (27) is rotated in the screw groove (26), and the threaded rod (27) is in threaded driving for one protruding part (28).

4. The mask plate inclined drilling conversion adjusting bracket according to claim 3, characterized in that: the other end of the threaded rod (27) is connected with a driving handle, the driving handle comprises a coarse adjusting disk (29) and a fine adjusting disk (30) which are concentrically connected together, and the diameter of the coarse adjusting disk (29) is larger than that of the fine adjusting disk (30).

5. The mask plate inclined drilling conversion adjusting bracket according to claim 1, characterized in that: clamping grooves (23) are formed in corresponding positions of the fixed clamping plate (21) and the movable clamping plate (22), the end parts of two sides of the mask plate (4) are clamped in the corresponding two clamping grooves (23), and a clamping sleeve (24) for buffering is sleeved on the outer side of each clamping groove (23).