CN112798628B - Feasibility verification method for detecting industrial internal defects by using OCT (optical coherence tomography) imaging - Google Patents

Feasibility verification method for detecting industrial internal defects by using OCT (optical coherence tomography) imaging Download PDF

Info

Publication number
CN112798628B
CN112798628B CN202110402872.0A CN202110402872A CN112798628B CN 112798628 B CN112798628 B CN 112798628B CN 202110402872 A CN202110402872 A CN 202110402872A CN 112798628 B CN112798628 B CN 112798628B
Authority
CN
China
Prior art keywords
absolute difference
class
difference vector
value
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110402872.0A
Other languages
Chinese (zh)
Other versions
CN112798628A (en
Inventor
和江镇
王岩松
都卫东
方志斌
吴健雄
王天翔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Focusight Technology Co Ltd
Original Assignee
Focusight Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Focusight Technology Co Ltd filed Critical Focusight Technology Co Ltd
Priority to CN202110402872.0A priority Critical patent/CN112798628B/en
Publication of CN112798628A publication Critical patent/CN112798628A/en
Application granted granted Critical
Publication of CN112798628B publication Critical patent/CN112798628B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pulmonology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention relates to a feasibility verification method for detecting industrial internal defects by utilizing OCT imaging, which comprises S1, carrying out OCT imaging on a defect sample with a mark, and taking points from a normal position and a defect position on an x-y plane to obtain a vector of each point; s2, performing absolute difference operation between every two obtained vectors to form absolute difference vectors with the same dimension; s3, sequentially comparing the ith value in the inter-class absolute difference vector and the intra-class absolute difference vector, calculating the difference value of the ith value in the inter-class absolute difference vector and the intra-class absolute difference vector and the variance of the coordinate distribution of the ith value in the z-axis direction, and comparing the difference value with a set threshold value, thereby judging the feasibility of the OCT imaging for detecting the internal defect of the measured object. The invention can quickly judge whether the internal defects of the current measured object are suitable for being detected by OCT imaging or whether the feasibility of solving the detection problem by OCT imaging exists or not.

Description

Feasibility verification method for detecting industrial internal defects by using OCT (optical coherence tomography) imaging
Technical Field
The invention relates to the technical field of visual inspection, in particular to a feasibility verification method for detecting industrial internal defects by utilizing OCT imaging.
Background
The OCT technique is a technique used for medical diagnosis, and acquires data in a human tissue or organ by means of fluoroscopy, and visualizes the data to acquire tomographic images, and a doctor diagnoses a disease condition based on the tomographic images.
In recent years, OCT has also been used to detect internal defects in industrial products, particularly in products having a spray on the surface, and to detect whether there are impurities in the interlayer between the spray and the surface of the product.
The OCT spraying object interlayer foreign matter detection technology is not suitable for all products, one of the conventional feasibility verification methods is to obtain data in a range of a z axis where an interlayer is located by calibration and analyze the data in the range; the other method is that a fault map of each layer on the z-axis is obtained as in medicine, and the fault map is observed by a professional to judge feasibility.
However, for the first method, a method for verifying feasibility of OCT in industrial detection is adopted based on a corresponding layer based on calibration, and since OCT imaging obtains a large amount of data and has high data dimension, a large amount of calculation and experiments are required to ensure that a proper layer and interface thickness value is found, and the method can only be used in the case where the internal defect of the object to be measured is located at a position near the specific coordinate of the Z axis, and is not applicable to the case where the defect may occur at a position within a large range in the Z axis direction;
for the second method, a medical diagnosis scheme is applied to detect defects to obtain a fault map of each layer on the z axis, and professionals observe the fault maps to judge feasibility.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the feasibility verification method for detecting the internal defects of the industry by utilizing the OCT imaging can quickly judge whether the internal defects of the current object to be detected are suitable for OCT imaging detection or whether the feasibility of using the OCT imaging to solve the detection problem exists or not through the operation method and the logic steps provided by the invention, so that a large amount of time spent on calibration of a specific layer is saved, and the labor cost consumed by professionals for observing the section diagrams one by one is also avoided.
The technical scheme adopted by the invention for solving the technical problems is as follows: a feasibility verification method for detecting industrial internal defects by utilizing OCT imaging comprises the following steps,
s1, carrying out OCT imaging on the defect sample with the mark, taking points from the normal position and the defect position on the x-y plane, and obtaining data on each point in the z-axis direction, namely each point obtains a vector;
s2, performing absolute difference operation between every two obtained vectors to form absolute difference vectors with the same dimension, wherein the absolute difference vectors comprise intra-class absolute difference vectors and inter-class absolute difference vectors;
s3, sequentially comparing the ith value in the inter-class absolute difference vector and the intra-class absolute difference vector, calculating the difference value of the ith value in the inter-class absolute difference vector and the intra-class absolute difference vector and the variance of the coordinate distribution of the ith value in the z-axis direction, and comparing the variance with a set threshold value, thereby judging the feasibility of the OCT imaging for detecting the internal defect of the measured object.
Further, the intra-class absolute difference vector of the present invention includes a normal intra-class absolute difference vector and a defect intra-class absolute difference vector.
Still further, in step S3 of the present invention, if the ith value of the inter-class absolute difference vector is greater than the ith values of the normal intra-class absolute difference vector and the defect intra-class absolute difference vector, and the difference value exceeds the set threshold, it is determined that the feasibility of detecting the industrial internal defect by using OCT imaging is successful; otherwise, the variance of the coordinate distribution in the z-axis direction of the ith-largest value of each absolute difference vector is calculated.
Furthermore, if the variance is larger than a set threshold, the feasibility of detecting the industrial internal defects by using OCT imaging is judged to be unsuccessful; if the variance is not larger than the set threshold, returning the ith large value in the absolute difference vector between the comparison classes and the absolute difference vector in the classes, and performing iteration.
Still further, if the number of iterations exceeds the set number, a feasible successful result of detecting the industrial internal defect by using the OCT is still not obtained, and then a final result is determined, that is, the detection of the industrial internal defect by using the OCT is not feasible.
The invention has the advantages that the defects in the background technology are solved, the feasibility of OCT detection of the defects of the detected object is judged by counting the difference of corresponding points of imaging data of the normal position and the defect position on the Z axis and combining the algorithm logic provided by the invention, the whole data obtained by OCT is directly processed without analyzing a specific image layer; the invention is based on the judgment of the global statistic on the Z axis, so the invention is not influenced by the defect space distribution, thereby being suitable for the application scene that the defect may appear at any position in the measured object.
Drawings
FIG. 1 is a flow chart of a verification method of the present invention;
FIG. 2 is a statistical plot of the ith largest value of each absolute difference vector;
fig. 3 is a Z-axis coordinate statistical diagram where the ith largest value of each absolute difference vector is located.
Detailed Description
The invention will now be described in further detail with reference to the drawings and preferred embodiments. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
A feasibility verification method for detecting industrial internal defects using OCT imaging, as shown in figure 1, comprises the following steps,
s1, carrying out OCT imaging on the defect sample with the mark, taking points from the normal position and the defect position on the x-y plane, and obtaining data on each point in the z-axis direction, namely each point obtains a vector;
s2, performing absolute difference operation between every two obtained vectors to form absolute difference vectors with the same dimension, wherein the absolute difference vectors comprise intra-class absolute difference vectors and inter-class absolute difference vectors;
s3, sequentially comparing the ith value in the inter-class absolute difference vector and the intra-class absolute difference vector, calculating the difference value of the ith value in the inter-class absolute difference vector and the intra-class absolute difference vector and the variance of the coordinate distribution of the ith value in the z-axis direction, and comparing the difference value with a set threshold value, thereby judging the feasibility of the OCT imaging for detecting the internal defect of the measured object.
The specific implementation steps are as follows:
1. obtaining a small amount of samples of the measured object with the defect marks, and taking 5 points in the defect area and the normal area of the samples respectively to obtain 10 groups of data, namely 10 vectors;
2. and performing difference operation on the data of each dimension between every two 10 vectors to obtain absolute values, namely absolute difference operation, so as to form absolute difference vectors of the same dimension, wherein the absolute difference vectors are divided into inter-class absolute difference vectors and intra-class absolute difference vectors, and the intra-class absolute difference vectors are divided into defect intra-class absolute difference vectors and normal intra-class absolute difference vectors. The absolute difference vector between the defect vector and the defect vector is called as a defect intra-class absolute difference vector, the absolute difference vector between the normal vector and the normal vector is called as a normal intra-class absolute difference vector, and the absolute difference vector between the defect vector and the normal vector is called as a defect inter-class absolute difference vector;
3. setting i as an iteration counting variable, and taking an initial value of i as 1;
4. take the ith largest value of each absolute difference vector, as shown in FIG. 2; then comparing the value of the absolute difference vector taken between the classes with the value of the absolute difference vector taken in the class (including the normal class and the defect class), if: if the absolute difference vector values between the classes are all larger than the absolute difference vector values in the classes and the difference exceeds a threshold value T (T is generally the ith value in the classes of 0.15), the scheme that the OCT imaging is feasible for detecting the internal defect of the detected object is indicated, and if the absolute difference vector values between the classes are not larger than the absolute difference vector values in the classes, the following steps are continued;
5. counting the dimension of the ith value of each vector in the vector dimension, namely the z-axis coordinate, and if the variance of the statistics is greater than a threshold value dT (dT generally takes the dimension number of the vector 0.3), indicating that the OCT imaging is not feasible to detect the internal defect scheme of the measured object; if the current value is not greater than dT, i = i +1, and the step 4 is returned to for iteration;
6. if the iteration number exceeds the limit iT (iT generally takes 10), the result that the scheme is feasible is still not obtained, and the scheme is not feasible.
Aiming at the problems that the OCT imaging step is complicated, the price is high, and imaging is difficult to visualize due to high data dimension, when the OCT technology is tried to detect the defect of the interlayer foreign matter in the industry, a cheap, simple and convenient method for evaluating the feasibility of the OCT imaging method for detecting the detected defect does not exist; and judging whether the sample defects are suitable for being detected by OCT imaging or not by utilizing the point taking of a small amount of samples with marks at the defect positions and the normal areas and combining algorithm logic according to the data distribution difference of the defect points and the normal points in the z-axis direction and the distribution positions of the points with large difference on the z-axis.
While particular embodiments of the present invention have been described in the foregoing specification, various modifications and alterations to the previously described embodiments will become apparent to those skilled in the art from this description without departing from the spirit and scope of the invention.

Claims (2)

1. A feasibility verification method for detecting industrial internal defects by utilizing OCT imaging is characterized in that: comprises the following steps of (a) carrying out,
s1, carrying out OCT imaging on the defect sample with the mark, taking points from the normal position and the defect position on the x-y plane, and obtaining data on each point in the z-axis direction, namely each point obtains a vector;
s2, performing absolute difference operation between every two obtained vectors to form absolute difference vectors with the same dimension, wherein the absolute difference vectors comprise intra-class absolute difference vectors and inter-class absolute difference vectors;
s3, sequentially comparing the ith value in the inter-class absolute difference vector and the intra-class absolute difference vector, and calculating the difference value of the ith value in the inter-class absolute difference vector and the intra-class absolute difference vector; the intra-class absolute difference vector comprises a normal intra-class absolute difference vector and a defect intra-class absolute difference vector;
if the ith value of the inter-class absolute difference vector is larger than the ith values of the normal intra-class absolute difference vector and the defect intra-class absolute difference vector and the difference value exceeds a set threshold T, judging that the feasibility of detecting the industrial internal defect by using OCT imaging is successful; otherwise, calculating the variance of the coordinate distribution of the ith large value of each absolute difference vector in the z-axis direction;
if the variance is larger than a set threshold value dT, judging that the feasibility of detecting the industrial internal defects by using OCT imaging is unsuccessful; and if the variance is not greater than the set threshold value dT, returning the ith value of the absolute difference vector between the comparison classes and the absolute difference vector in the classes, and performing iteration.
2. The feasibility verification method for detecting industrial internal defects using OCT imaging of claim 1, characterized by: if the iteration times exceed the set times, the feasibility success result of detecting the industrial internal defect by using the OCT imaging is still not obtained, and the final result is judged, namely the OCT imaging is not feasible to detect the industrial internal defect.
CN202110402872.0A 2021-04-15 2021-04-15 Feasibility verification method for detecting industrial internal defects by using OCT (optical coherence tomography) imaging Active CN112798628B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110402872.0A CN112798628B (en) 2021-04-15 2021-04-15 Feasibility verification method for detecting industrial internal defects by using OCT (optical coherence tomography) imaging

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110402872.0A CN112798628B (en) 2021-04-15 2021-04-15 Feasibility verification method for detecting industrial internal defects by using OCT (optical coherence tomography) imaging

Publications (2)

Publication Number Publication Date
CN112798628A CN112798628A (en) 2021-05-14
CN112798628B true CN112798628B (en) 2021-06-29

Family

ID=75811365

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110402872.0A Active CN112798628B (en) 2021-04-15 2021-04-15 Feasibility verification method for detecting industrial internal defects by using OCT (optical coherence tomography) imaging

Country Status (1)

Country Link
CN (1) CN112798628B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105784735A (en) * 2016-03-07 2016-07-20 杭州华新检测技术股份有限公司 Graphical processing and displaying method for ultrasonic CT detecting result data
CN112037166A (en) * 2020-07-10 2020-12-04 武汉迈格驷友科技有限公司 Surface defect detection method and detection device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011051146B3 (en) * 2011-06-17 2012-10-04 Precitec Optronik Gmbh Test method for testing a bonding layer between wafer-shaped samples
CN103175837B (en) * 2011-12-20 2015-06-03 法国圣戈班玻璃公司 Method and device for detecting defect in matrix
EP2917848A4 (en) * 2012-11-09 2016-11-02 California Inst Of Techn Automated feature analysis, comparison, and anomaly detection
CN104964982B (en) * 2015-06-30 2018-05-29 浙江大学 Glass surface true and false defect identification method and system based on OCT complex signals
CN106023158B (en) * 2016-05-10 2018-09-18 浙江科技学院 The fresh water pipless pearl pearly layer defect identification method of SD-OCT images
US10852125B2 (en) * 2017-11-28 2020-12-01 Koh Young Technology Inc. Apparatus for inspecting film on substrate by using optical interference and method thereof
CN110196021A (en) * 2019-01-16 2019-09-03 苏州大学 Coating layer thickness and its application are measured based on Optical coherence tomography technology

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105784735A (en) * 2016-03-07 2016-07-20 杭州华新检测技术股份有限公司 Graphical processing and displaying method for ultrasonic CT detecting result data
CN112037166A (en) * 2020-07-10 2020-12-04 武汉迈格驷友科技有限公司 Surface defect detection method and detection device

Also Published As

Publication number Publication date
CN112798628A (en) 2021-05-14

Similar Documents

Publication Publication Date Title
US10445875B2 (en) Pattern-measuring apparatus and semiconductor-measuring system
US10417517B2 (en) Medical image correlation apparatus, method and storage medium
KR101318685B1 (en) Image processing apparatus, control method thereof, image processing method, tomography system, and storage medium
JP6629934B2 (en) Method and system for generating test strategy
CN111242123B (en) Power equipment fault diagnosis method based on infrared image
US7933441B2 (en) Method of inspection for inner defects of an object and apparatus for same
CN111091562B (en) Method and system for measuring size of digestive tract lesion
EP2762072A1 (en) Medical image processing device, medical image processing method, program
CN108983744B (en) Abnormality diagnosis apparatus and abnormality diagnosis method
WO2020090770A1 (en) Abnormality detection device, abnormality detection method, and program
JP4235648B2 (en) Eddy current flaw detection signal processing method
CA2964021A1 (en) Determination of localised quality measurements from a volumetric image record
JP6063630B2 (en) Pattern measuring apparatus and semiconductor measuring system
KR20180076504A (en) Method and Apparatus for Predicting Liver Cirrhosis Using Neural Network
CN116664551B (en) Display screen detection method, device, equipment and storage medium based on machine vision
KR101615843B1 (en) Semiconductor measurement device and recording medium
JP7354421B2 (en) Error factor estimation device and estimation method
TWI679652B (en) Method, non-transitory computer-readable media and apparatus for evaluating personalized brain imaging
CN112798628B (en) Feasibility verification method for detecting industrial internal defects by using OCT (optical coherence tomography) imaging
WO2015125504A1 (en) Pattern-measuring device and computer program
JP3972647B2 (en) Diagnostic imaging apparatus, diagnostic imaging system, and diagnostic imaging method
KR20210079133A (en) Template-based Hippocampus Subfield Atrophy Analysis in Alzheimer's Disease and Normal Aging
CN111696113A (en) Method and system for monitoring a biological process
JP4629086B2 (en) Image defect inspection method and image defect inspection apparatus
Moroni et al. An experimental study on segmentation in X-Ray Computed Tomography

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant