CN112777600B - A kind of ultra-high-purity quartz and preparation method thereof - Google Patents

A kind of ultra-high-purity quartz and preparation method thereof Download PDF

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CN112777600B
CN112777600B CN202110267642.8A CN202110267642A CN112777600B CN 112777600 B CN112777600 B CN 112777600B CN 202110267642 A CN202110267642 A CN 202110267642A CN 112777600 B CN112777600 B CN 112777600B
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李育彪
马强
裴振宇
肖蕲航
雷绍民
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Wuhan University of Technology WUT
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Abstract

本发明涉及一种超高纯石英及其制备方法。该制备方法包括依次进行的石英预处理、表面杂质清洗、表面缺陷增加、石英晶格金属杂质的扩散偏聚及表面杂质偏聚区剥蚀步骤;石英晶格金属杂质的扩散偏聚步骤采用焙烧进行处理,表面杂质偏聚区剥蚀步骤采用氢氧化钠进行处理。该制备方法并未使用氢氟酸、氯气、氟化氢气体等对环境不友好或危险性高的物质,对环境友好;且盐酸浸出步骤和氢氧化钠浸出步骤产生的废液可以互相中和,可极大程度地减少石英工业废水处理成本。

Figure 202110267642

The invention relates to an ultra-high-purity quartz and a preparation method thereof. The preparation method includes the steps of quartz pretreatment, surface impurity cleaning, surface defect increase, diffusion and segregation of quartz lattice metal impurities, and surface impurity segregation area ablation steps in sequence; the diffusion and segregation of quartz lattice metal impurities is performed by baking. Treatment, the surface impurity segregation zone erosion step is treated with sodium hydroxide. The preparation method does not use hydrofluoric acid, chlorine gas, hydrogen fluoride gas and other substances that are not friendly to the environment or are highly dangerous, and is environmentally friendly; and the waste liquids generated in the hydrochloric acid leaching step and the sodium hydroxide leaching step can be Dramatically reduce the cost of wastewater treatment in the quartz industry.

Figure 202110267642

Description

一种超高纯石英及其制备方法A kind of ultra-high-purity quartz and preparation method thereof

技术领域technical field

本发明涉及石英砂生产技术领域,尤其涉及一种超高纯石英及其制备方法。The invention relates to the technical field of quartz sand production, in particular to an ultra-high-purity quartz and a preparation method thereof.

背景技术Background technique

超高纯石英砂一般是指SiO2含量高于99.99%的石英砂,具有极好的化学稳定性,高绝缘耐压能力和极低的体膨胀系数。是电子核心导件,光导通讯材料,太阳能电池等高新技术产业不可或缺的重要基础材料。其高档产品广泛应用于大规模集成电路,太阳能电池,光纤,激光,航天,军事等行业中。石英砂纯度和杂质元素种类及含量直接影响产品的质量。Ultra-high-purity quartz sand generally refers to quartz sand with SiO 2 content higher than 99.99%, which has excellent chemical stability, high insulation and pressure resistance, and extremely low volume expansion coefficient. It is an indispensable and important basic material for high-tech industries such as electronic core guides, photoconductive communication materials, and solar cells. Its high-end products are widely used in large-scale integrated circuits, solar cells, optical fibers, lasers, aerospace, military and other industries. The purity of quartz sand and the type and content of impurity elements directly affect the quality of the product.

目前石英砂的提纯工艺主要有:手工选矿,水洗,粗碎,细碎,筛分,磁选,酸洗,浮选,去离子水洗,烘干和石英砂品质检测。此种提纯工艺流程复杂,且不能有效除去石英砂中的包裹杂质及表面杂质,在生产过程中还会引入新的杂质。现有技术中,有碱洗的报道,如公开号为CN102674376A,发明名称为“一种石英尾砂提纯的生产方法”,引入碱洗过程,但对石英砂内部偏聚的杂质金属元素难以有效去除。At present, the purification process of quartz sand mainly includes: manual beneficiation, water washing, coarse crushing, fine crushing, screening, magnetic separation, pickling, flotation, deionized water washing, drying and quartz sand quality inspection. This purification process is complicated, and cannot effectively remove the encapsulated impurities and surface impurities in the quartz sand, and new impurities will be introduced in the production process. In the prior art, there is a report of alkaline washing, such as the publication number is CN102674376A, the name of the invention is "a production method for purification of quartz tailings", and the alkaline washing process is introduced, but the impurity metal elements segregated inside the quartz sand are difficult to be effective. remove.

发明内容SUMMARY OF THE INVENTION

有鉴于此,有必要提供一种制备超高纯石英的方法,可以有效去除石英砂内部偏聚的杂质金属元素。In view of this, it is necessary to provide a method for preparing ultra-high-purity quartz, which can effectively remove the impurity metal elements segregated inside the quartz sand.

本发明提供一种制备超高纯石英的方法,包括依次进行的石英预处理、表面杂质清洗、表面缺陷增加、石英晶格金属杂质的扩散偏聚和表面杂质偏聚区剥蚀的步骤;其中,表面缺陷增加的步骤采用氢氧化钠进行处理,石英晶格金属杂质的扩散偏聚的步骤采用焙烧进行处理,表面杂质偏聚区剥蚀的步骤采用氢氧化钠进行处理。The invention provides a method for preparing ultra-high-purity quartz, including the steps of quartz pretreatment, surface impurity cleaning, surface defect increase, diffusion segregation of quartz lattice metal impurities, and surface impurity segregation zone erosion in sequence; wherein, The step of increasing surface defects is treated with sodium hydroxide, the step of diffusing and segregating the metal impurities of the quartz lattice is treated with baking, and the step of eroding the surface impurity segregation region is treated with sodium hydroxide.

具体的,所述石英预处理的步骤包括对石英进行破碎、磁选和筛分。Specifically, the steps of the quartz pretreatment include crushing, magnetic separation and sieving of the quartz.

具体的,所述表面杂质清洗的步骤中,采用1~4mol/L的盐酸溶液进行热压浸出和清洗,盐酸溶液与石英颗粒的液固比为(6~10)mL:1g,浸出温度150℃~250℃,浸出时间1~8h。Specifically, in the step of cleaning the surface impurities, a hydrochloric acid solution of 1-4 mol/L is used for hot-pressing leaching and cleaning, the liquid-solid ratio of the hydrochloric acid solution and the quartz particles is (6-10) mL:1 g, and the leaching temperature is 150 °C. ℃~250℃, leaching time 1~8h.

具体的,所述表面缺陷增加的步骤中,采用0.2~2mol/L的氢氧化钠溶液侵蚀石英颗粒,氢氧化钠溶液与石英颗粒的液固比为(6~10)mL:1g,浸出温度150℃~200℃,浸出时间1~8h。Specifically, in the step of increasing the surface defects, 0.2-2 mol/L sodium hydroxide solution is used to erode the quartz particles, the liquid-solid ratio of the sodium hydroxide solution and the quartz particles is (6-10) mL:1 g, and the leaching temperature 150℃~200℃, leaching time 1~8h.

优选的,所述表面缺陷增加的步骤中,氢氧化钠溶液浓度为0.6667mol/L,氢氧化钠溶液与石英颗粒的液固比为6mL:1g。Preferably, in the step of increasing the surface defects, the concentration of the sodium hydroxide solution is 0.6667 mol/L, and the liquid-solid ratio of the sodium hydroxide solution to the quartz particles is 6 mL:1 g.

具体的,所述石英晶格金属杂质的扩散偏聚的步骤中,焙烧温度为600~1400℃,焙烧时间为5~70h。Specifically, in the step of diffusing and segregating metal impurities in the quartz lattice, the calcination temperature is 600-1400° C., and the calcination time is 5-70 h.

优选的,所述石英晶格金属杂质的扩散偏聚的步骤中,焙烧温度为1000℃。Preferably, in the step of diffusing and segregating metal impurities in the quartz lattice, the calcination temperature is 1000°C.

具体的,所述表面杂质偏聚区剥蚀步骤中,使用的氢氧化钠溶液浓度为0.1~0.5mol/L,氢氧化钠溶液与石英颗粒的液固比为(2~10)mL:1g,浸出温度150℃~200℃,浸出时间1~8h。Specifically, in the denudation step of the surface impurity segregation zone, the concentration of the sodium hydroxide solution used is 0.1-0.5 mol/L, and the liquid-solid ratio of the sodium hydroxide solution to the quartz particles is (2-10) mL:1 g, The leaching temperature is 150℃~200℃, and the leaching time is 1~8h.

优选的,所述表面杂质偏聚区剥蚀步骤中,氢氧化钠溶液浓度为0.3799mol/L,氢氧化钠溶液与石英颗粒的液固比为6mL:1g。Preferably, in the denudation step of the surface impurity segregation zone, the concentration of the sodium hydroxide solution is 0.3799 mol/L, and the liquid-solid ratio of the sodium hydroxide solution to the quartz particles is 6 mL:1 g.

本发明还提供了一种所述方法制备的超高纯石英。The present invention also provides an ultra-high-purity quartz prepared by the method.

有益效果:Beneficial effects:

1、该制备方法并未使用氢氟酸、氯气、氟化氢气体等对环境不友好或危险性高的物质,对环境友好;且盐酸浸出步骤和氢氧化钠浸出步骤产生的废液可以互相中和,可极大程度地减少石英工业废水处理成本。1. The preparation method does not use unfriendly or dangerous substances such as hydrofluoric acid, chlorine gas, hydrogen fluoride gas, etc., and is environmentally friendly; and the waste liquids generated in the hydrochloric acid leaching step and the sodium hydroxide leaching step can be mutually neutralized , which can greatly reduce the cost of quartz industrial wastewater treatment.

2、经过该制备方法处理后,石英中Al元素含量由56.5μg/g降到了7.8μg/g,达到了IOTA 6系列的Al含量8μg/g要求,杂质元素总含量降低到了38.2μg/g,远低于高纯石英标准要求的50μg/g。2. After this preparation method, the content of Al element in quartz is reduced from 56.5μg/g to 7.8μg/g, which meets the requirement of 8μg/g Al content of IOTA 6 series, and the total content of impurity elements is reduced to 38.2μg/g, Much lower than the 50μg/g required by the high-purity quartz standard.

附图说明Description of drawings

图1为本发明实施例提供的超高纯石英的制备方法流程图。FIG. 1 is a flow chart of a method for preparing ultra-high-purity quartz provided in an embodiment of the present invention.

图2为本发明实施例提供的石英原矿的表面形貌图。FIG. 2 is a surface topography diagram of a quartz ore provided in an embodiment of the present invention.

图3为本发明实施例提供的用盐酸浸出石英原矿的表面形貌图。Fig. 3 is the surface topography diagram of leaching quartz ore with hydrochloric acid according to the embodiment of the present invention.

图4为本发明实施例提供的用盐酸+氯化钠浸出石英原矿的表面形貌图。Fig. 4 is the surface topography diagram of leaching quartz raw ore with hydrochloric acid+sodium chloride according to the embodiment of the present invention.

图5为本发明实施例提供的用盐酸+氢氟酸浸出石英原矿的表面形貌图。5 is a surface topography diagram of leaching quartz ore with hydrochloric acid + hydrofluoric acid according to an embodiment of the present invention.

图6为本发明实施例提供的用氢氧化钠浸出石英原矿的表面形貌图。FIG. 6 is a surface topography diagram of leaching quartz raw ore with sodium hydroxide according to an embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合实施例对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

本发明实施例提供一种制备超高纯石英的方法,如图1所示,包括依次进行的石英预处理、表面杂质清洗、表面缺陷增加、石英晶格金属杂质的扩散偏聚和表面杂质偏聚区剥蚀的步骤。其中,表面缺陷增加的步骤采用氢氧化钠进行处理,石英晶格金属杂质的扩散偏聚的步骤采用焙烧进行处理,表面杂质偏聚区剥蚀的步骤采用氢氧化钠进行处理。An embodiment of the present invention provides a method for preparing ultra-high-purity quartz, as shown in FIG. 1 , including quartz pretreatment, surface impurity cleaning, surface defect increase, diffusion and segregation of metal impurities in quartz lattice, and surface impurity segregation, which are sequentially performed. The step of poly-area ablation. Wherein, the step of increasing the surface defects is treated with sodium hydroxide, the step of diffusing and segregating the metal impurities of the quartz lattice is treated with roasting, and the step of eroding the surface impurity segregation area is treated with sodium hydroxide.

在使用剥蚀剂对石英颗粒进行处理时,是从颗粒表面向内部逐渐剥蚀溶解石英颗粒时,浸出纯化后石英中某杂质元素的含量C可表示为:When the denuding agent is used to treat the quartz particles, when the quartz particles are gradually eroded and dissolved from the particle surface to the inside, the content C of an impurity element in the quartz after leaching and purification can be expressed as:

Figure BDA0002972873810000041
Figure BDA0002972873810000041

上式(1)中,C0为该元素的初始平均含量,n0为石英初始物质量,ΔC为石英被溶解部分中该元素的平均含量,Δn为石英被溶解的物质量。In the above formula (1), C 0 is the initial average content of the element, n 0 is the initial amount of quartz, ΔC is the average content of the element in the dissolved part of quartz, and Δn is the amount of dissolved quartz.

在剥蚀溶解石英的过程中,如果被溶解部分中该元素的平均含量大于石英初始平均含量,经剥蚀后石英中该元素的平均含量会下降;若被溶解部分中的平均含量小于石英初始平均含量,则经剥蚀后石英中平均含量升高。In the process of denuding and dissolving quartz, if the average content of the element in the dissolved part is greater than the initial average content of quartz, the average content of this element in the quartz will decrease after denudation; if the average content in the dissolved part is less than the initial average content of quartz , the average content of quartz increases after ablation.

因此,在表面杂质偏聚区剥蚀的步骤中,当石英颗粒中某一杂质元素发生偏聚时,而石英表面没有该元素或表面该元素已清除完毕,则该元素在石英颗粒中的初始平均含量即为石英颗粒基体中的含量,偏聚区中的含量高于其在基体中的含量,而亏损区中的含量低于基体中的含量。根据式(1),在表面杂质偏聚区剥蚀时,剩余石英中该元素的浓度降低,并在剥蚀完偏聚区时达到最低值,继续剥蚀到达亏损区时,剩余部分该元素的浓度会升高,当亏损区被完全剥蚀溶解掉后,剩余部分该元素的浓度会再次和基体中相同,再继续剥蚀石英,该元素浓度基本不再变化。Therefore, in the step of removing the surface impurity segregation zone, when a certain impurity element in the quartz particles is segregated, and the element is not on the surface of the quartz or the element has been removed on the surface, the initial average value of the element in the quartz particles The content is the content in the matrix of the quartz particles, the content in the segregation zone is higher than that in the matrix, and the content in the depleted zone is lower than that in the matrix. According to formula (1), when the surface impurity segregation area is eroded, the concentration of the element in the remaining quartz decreases, and reaches the lowest value when the segregation area is eroded. When the loss area is completely eroded and dissolved, the concentration of the element in the remaining part will be the same as that in the matrix again, and then the quartz will continue to be eroded, and the concentration of this element will basically not change.

利用这一现象和原理,联合浸出、焙烧与剥蚀相结合的工艺(也即增大缺陷的表面浓度、石英晶格金属杂质的扩散偏聚和表面杂质偏聚区剥蚀的步骤),本发明实施例提供一种制备超高纯石英的方法。Using this phenomenon and principle, combined with the process of leaching, roasting and erosion (that is, the steps of increasing the surface concentration of defects, the diffusion and segregation of metal impurities in the quartz lattice, and the erosion of the surface impurity segregation area), the present invention implements The example provides a method for preparing ultra-high purity quartz.

该方法先通过浸出对石英进行处理后使表面缺陷增加(缺陷是指某一个晶面的不完整区域,微观上指缺失的原子或晶胞,宏观上成蚀坑、侵蚀缝等状态,如图6中圈出的部位),而表面缺陷增加的晶面能够利于焙烧促使杂质元素进行石英晶格金属杂质的扩散偏聚。具体如图2~6所示,为了深入研究盐酸、氯化钠、氢氟酸、氢氧化钠浸出过程中与石英反应的特点,利用扫描电子显微镜对石英原矿、石英经盐酸浸出、石英经盐酸+氯化钠浸出、石英经盐酸+氢氟酸浸出、石英经氢氧化钠浸出后再经盐酸浸出样品做了表面形貌分析发现,经氢氧化钠浸出后,石英颗粒上也形成了较多的蚀坑和侵蚀缝,与氢氟酸相比,氢氧化钠形成的蚀坑和侵蚀缝形状要圆润一些,由局部细节图像可以看出蚀坑和侵蚀缝内壁也更圆滑,说明氢氧化钠对蚀坑和侵蚀缝内壁石英的溶解量比氢氟酸多,可以推断氢氧化钠浸出杂质和包裹体的选择性比氢氟酸弱,同时在浸出试验中浸出效果也比氢氟酸差一些。也即是说,采用氢氧化钠进行浸出,能够产生表面缺陷增加的效果。In this method, the quartz is first treated by leaching, and then the surface defects are increased (defects refer to the incomplete area of a certain crystal plane, microscopically refers to missing atoms or unit cells, and macroscopically forms etch pits, eroded seams, etc., as shown in the figure The part circled in 6), and the crystal plane with increased surface defects can facilitate the roasting and promote the diffusion and segregation of impurity elements in the quartz lattice metal impurities. Specifically as shown in Figures 2 to 6, in order to deeply study the characteristics of the reaction between hydrochloric acid, sodium chloride, hydrofluoric acid and sodium hydroxide in the leaching process with quartz, scanning electron microscopy was used to analyze the raw quartz ore, the leaching of quartz by hydrochloric acid, and the leaching of quartz by hydrochloric acid. + Sodium chloride leaching, quartz leaching with hydrochloric acid + hydrofluoric acid, quartz leaching with sodium hydroxide and then leaching with hydrochloric acid. Compared with hydrofluoric acid, the shape of the corrosion pits and corrosion seams formed by sodium hydroxide is more rounded, and it can be seen from the local detail images that the inner walls of the corrosion pits and corrosion seams are also more rounded, indicating that the sodium hydroxide The dissolved amount of quartz on the inner wall of the etch pit and eroded fracture is more than that of hydrofluoric acid. It can be inferred that the selectivity of sodium hydroxide to leaching impurities and inclusions is weaker than that of hydrofluoric acid, and the leaching effect is also worse than that of hydrofluoric acid in the leaching test. . That is to say, using sodium hydroxide for leaching can produce the effect of increasing surface defects.

再经过焙烧使石英内部的Al元素等杂质金属元素发生扩散并偏聚到石英表面内几微米范围形成局部偏聚区。最后,利用可以溶解石英的剥蚀剂精确溶解该局部偏聚区,从而快速显著地降低石英内各杂质金属元素含量。After calcination, impurity metal elements such as Al element inside the quartz diffuse and segregate to a range of several micrometers on the surface of the quartz to form a local segregation region. Finally, the localized segregation region is precisely dissolved by a denuding agent capable of dissolving quartz, thereby rapidly and significantly reducing the content of various impurity metal elements in the quartz.

该方法可以将杂质金属元素特别是Al元素的清除范围从一般方法的表面以及表面附近数个原子层延伸扩散到石英表面以内十几个到几十个微米的区域,即达到亏损区的内边界,从而使纯化后石英中Al等杂质金属元素的含量大幅度降低(如图2~6)。This method can extend and diffuse the removal range of impurity metal elements, especially Al elements, from the surface of the general method and several atomic layers near the surface to a region of dozens to tens of microns within the quartz surface, that is, to the inner boundary of the depleted region. , so that the content of impurity metal elements such as Al in the purified quartz is greatly reduced (as shown in Figures 2-6).

具体的,石英预处理步骤包括对石英进行破碎、磁选和筛分。Specifically, the quartz pretreatment step includes crushing, magnetic separation and screening of the quartz.

具体的,表面杂质清洗的步骤主要采用1~4mol/L的盐酸溶液对预处理后石英进行热压浸出和清洗。热压浸出中,盐酸溶液与石英颗粒的液固比为(6~10)mL:1g,浸出温度150~250℃,浸出时间1~8h。Specifically, in the step of cleaning the surface impurities, a hydrochloric acid solution of 1-4 mol/L is mainly used to perform hot-press leaching and cleaning on the pretreated quartz. In hot-press leaching, the liquid-solid ratio of hydrochloric acid solution and quartz particles is (6-10) mL:1g, the leaching temperature is 150-250°C, and the leaching time is 1-8h.

具体的,表面缺陷增加是指增大某一个晶面不完整区域的比例。其中,缺陷是指某一个晶面的不完整区域,微观上指缺失的原子或晶胞,宏观上成蚀坑、侵蚀缝等状态。具体的表面缺陷增加的步骤为,采用0.2~2mol/L氢氧化钠溶液侵蚀石英颗粒,氢氧化钠溶液与石英颗粒的液固比为(6~10)mL:1g,浸出温度150~200℃,浸出时间1~8h。优选的,该步骤中,氢氧化钠溶液浓度为0.6667mol/L,氢氧化钠溶液与石英颗粒的液固比为6mL:1g。Specifically, the increase in surface defects refers to an increase in the proportion of an incomplete region of a certain crystal plane. Among them, defect refers to the incomplete area of a certain crystal plane, microscopically refers to missing atoms or unit cells, and macroscopically forms etch pits, eroded seams and other states. The specific steps of increasing surface defects are as follows: 0.2-2mol/L sodium hydroxide solution is used to erode the quartz particles, the liquid-solid ratio of the sodium hydroxide solution to the quartz particles is (6-10) mL:1g, and the leaching temperature is 150-200°C , leaching time 1 ~ 8h. Preferably, in this step, the concentration of the sodium hydroxide solution is 0.6667 mol/L, and the liquid-solid ratio of the sodium hydroxide solution to the quartz particles is 6 mL:1 g.

具体的,石英晶格金属杂质的扩散偏聚步骤中,焙烧温度为600~1400℃,焙烧时间为5~70h,优选的焙烧温度为1000℃。Specifically, in the step of diffusing and segregating the metal impurities in the quartz lattice, the roasting temperature is 600-1400°C, the roasting time is 5-70h, and the preferred roasting temperature is 1000°C.

具体的,表面杂质偏聚区剥蚀的步骤中,使用的氢氧化钠溶液浓度为0.1~0.5mol/L,氢氧化钠溶液与石英颗粒的液固比为(2~10)mL:1g,浸出温度150~200℃,浸出时间1~8h。优选的,氢氧化钠溶液浓度为0.3799mol/L,氢氧化钠溶液与石英颗粒的液固比为6mL:1g。Specifically, in the step of eroding the surface impurity segregation zone, the concentration of the sodium hydroxide solution used is 0.1-0.5 mol/L, and the liquid-solid ratio of the sodium hydroxide solution and the quartz particles is (2-10) mL: 1 g, and the leaching The temperature is 150~200℃, and the leaching time is 1~8h. Preferably, the concentration of the sodium hydroxide solution is 0.3799 mol/L, and the liquid-solid ratio of the sodium hydroxide solution to the quartz particles is 6 mL:1 g.

为便于对本发明提供的超高纯石英制备方法的具体实施例进行描述,下方将其具体的制备参数列入表1中,以便评价各参数对最终结果的影响。In order to facilitate the description of the specific embodiments of the ultra-high-purity quartz preparation method provided by the present invention, the specific preparation parameters thereof are listed in Table 1 below, so as to evaluate the influence of each parameter on the final result.

表1超高纯石英制备步骤条件汇总Table 1 Summary of conditions for the preparation of ultra-high-purity quartz

Figure BDA0002972873810000061
Figure BDA0002972873810000061

Figure BDA0002972873810000071
Figure BDA0002972873810000071

Figure BDA0002972873810000081
Figure BDA0002972873810000081

为对上述实施例的杂质去除过程及杂质去除效果进行评价,将其去除效果列入表2中。In order to evaluate the impurity removal process and impurity removal effect of the above embodiment, the removal effect is listed in Table 2.

通过ICP-MS测试方法测量原石英矿及处理后的石英样品中杂质元素浓度。测试方法具体为先称取石英样品2g,再加入氢氟酸10ml定容至100ml进行石英样品溶解,采用平板加热至200℃把多余氢氟酸蒸发,直到不冒白烟为止,然后进行石英中杂质元素浓度测量。原石英矿中,铝(Al)含量为56.5μg/g,锂(Li)含量为12.3μg/g,钠(Na)含量为48.1μg/g,钾(K)含量为22.9μg/g,镁(Mg)含量为0.52μg/g,铍(Be)含量为0.02μg/g,钙(Ca)含量为68.87μg/g,铁(Fe)含量为26.3μg/g,钛(Ti)含量为15.2μg/g,锰(Mn)含量为9.62μg/g铬(Cr)含量为0.16μg/g,镍(Ni)含量为0.35μg/g和铜(Cu)含量为5.2μg/g。The concentration of impurity elements in the original quartz ore and the treated quartz samples was measured by ICP-MS test method. The specific test method is to first weigh 2g of the quartz sample, then add 10ml of hydrofluoric acid to dilute the volume to 100ml to dissolve the quartz sample, use a flat plate to heat to 200°C to evaporate the excess hydrofluoric acid until no white smoke is emitted, and then proceed to the quartz sample. Impurity element concentration measurement. In the original quartz ore, the aluminum (Al) content was 56.5 μg/g, the lithium (Li) content was 12.3 μg/g, the sodium (Na) content was 48.1 μg/g, the potassium (K) content was 22.9 μg/g, and the magnesium (K) content was 22.9 μg/g. (Mg) content was 0.52 μg/g, beryllium (Be) content was 0.02 μg/g, calcium (Ca) content was 68.87 μg/g, iron (Fe) content was 26.3 μg/g, and titanium (Ti) content was 15.2 μg/g μg/g, manganese (Mn) content was 9.62 μg/g chromium (Cr) content was 0.16 μg/g, nickel (Ni) content was 0.35 μg/g and copper (Cu) content was 5.2 μg/g.

Figure BDA0002972873810000091
Figure BDA0002972873810000091

Figure BDA0002972873810000101
Figure BDA0002972873810000101

表2数据为石英晶格金属杂质的扩散偏聚步骤后及表面杂质偏聚区剥蚀步骤后的各杂质浓度,而对比例8数据均为各杂质最终在颗粒中的浓度。由表2可知:The data in Table 2 are the impurity concentrations after the diffusion and segregation step of the metal impurities in the quartz lattice and after the surface impurity segregation zone ablation step, while the data in Comparative Example 8 are the final concentrations of each impurity in the particles. It can be seen from Table 2 that:

1、石英晶格取代杂质是最难分离的杂质之一,常规分离方法对去除晶格取代杂质中的Al等杂质元素无能为力。采用本发明提供的方法,通过表面缺陷增加、石英晶格内金属杂质的扩散偏聚和表面杂质偏聚区剥蚀的步骤,对石英晶格的Al及其他各金属元素产生良好的去除能力(如实施例1~14相对于对比例8)。1. Quartz lattice substitution impurities are one of the most difficult impurities to separate. Conventional separation methods are powerless to remove Al and other impurity elements in lattice substitution impurities. By adopting the method provided by the present invention, through the steps of increasing surface defects, diffusing and segregating metal impurities in the quartz crystal lattice, and eroding the surface impurity segregation region, a good removal ability (such as Al and other metal elements in the quartz crystal lattice) is produced. Examples 1 to 14 are relative to Comparative Example 8).

2、实施例6相对于实施例3和4,其扩散偏聚时间得以延长,经过石英晶格金属杂质的扩散偏聚步骤后对表面杂质偏聚区剥蚀,其去除的杂质含量达到10.1μg/g,高于实施例3和4,说明实施例6中延长石英晶格金属杂质的扩散偏聚时间,可进一步加强石英晶格金属杂质的扩散偏聚效果,从而便于后续杂质的浸出剥蚀,使得最后一步能够极大地去除杂质。2. Compared with Example 3 and Example 4, the diffusion and segregation time of Example 6 is prolonged. After the diffusion and segregation step of quartz lattice metal impurities, the surface impurity segregation region is eroded, and the impurity content removed reaches 10.1 μg/ g, higher than that of Examples 3 and 4, it shows that prolonging the diffusion and segregation time of the metal impurities in the quartz lattice in Example 6 can further strengthen the diffusion and segregation effect of the metal impurities in the quartz lattice, thereby facilitating the leaching and ablation of the subsequent impurities, making The last step can greatly remove impurities.

3、对比例1~2相对于实施例,其焙烧温度和焙烧时间均不合理,使得杂质扩散偏聚效果不佳,经过石英晶格金属杂质的扩散偏聚步骤影响了表面杂质偏聚区剥蚀的去除效果,使得其效果均显著劣于实施例。这表明本发明提供的杂质扩散偏聚方法需要精确控制焙烧时间和焙烧温度。3. Compared with the examples, the calcination temperature and calcination time of Comparative Examples 1 to 2 are unreasonable, which makes the effect of impurity diffusion and segregation not good. The removal effect is significantly worse than that of the embodiment. This shows that the impurity diffusion segregation method provided by the present invention requires precise control of the calcination time and calcination temperature.

4、对比例3~7相对于实施例,其对表面缺陷增加步骤没有进行合理控制,严重影响后续的石英晶格金属杂质的扩散偏聚和表面杂质偏聚区剥蚀的处理效果,石英颗粒杂质含量仍然较高,不利于后续处理,显著降低最终杂质去除效率。4. Compared with the Examples 3 to 7, the steps of increasing the surface defects are not reasonably controlled, which seriously affects the subsequent diffusion and segregation of metal impurities in the quartz lattice and the treatment effect of the surface impurity segregation zone erosion. The content is still high, which is not conducive to subsequent treatment and significantly reduces the final impurity removal efficiency.

综上所述,本发明提供的超高纯石英制备方法避免使用氢氟酸、氯气、氟化氢气体等对环境不友好或危险性大的物质,对环境相对友好;而且盐酸浸出步骤和氢氧化钠浸出步骤产生的废液可以互相中和,可极大程度地减少石英工业废水处理成本。最终制备的石英中Al元素含量由56.5μg/g降到7.8μg/g,达到了IOTA 6系列对Al含量8μg/g的要求,杂质元素总含量可降低到38.2μg/g,远高于高纯石英50μg/g的标准要求。To sum up, the preparation method of ultra-high-purity quartz provided by the present invention avoids the use of unfriendly or dangerous substances such as hydrofluoric acid, chlorine gas, hydrogen fluoride gas, etc., and is relatively friendly to the environment; and the hydrochloric acid leaching step and sodium hydroxide The waste liquid produced in the leaching step can be neutralized with each other, which can greatly reduce the cost of wastewater treatment in the quartz industry. The content of Al element in the final prepared quartz is reduced from 56.5μg/g to 7.8μg/g, which meets the requirement of IOTA 6 series for Al content of 8μg/g, and the total content of impurity elements can be reduced to 38.2μg/g, which is much higher than the high Standard requirement for pure quartz 50μg/g.

以上所述,仅为本发明较佳的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention, but the protection scope of the present invention is not limited to this. Substitutions should be covered within the protection scope of the present invention.

Claims (4)

1.一种制备超高纯石英的方法,其特征在于,包括依次进行的石英预处理、表面杂质清洗、表面缺陷增加、石英晶格金属杂质的扩散偏聚和表面杂质偏聚区剥蚀的步骤;1. a method for preparing ultra-high-purity quartz, is characterized in that, comprises the steps of quartz pretreatment, surface impurity cleaning, surface defect increase, the diffusion segregation of quartz lattice metal impurity and surface impurity segregation zone ablation that carry out successively ; 其中,表面缺陷增加的步骤采用氢氧化钠进行处理,石英晶格金属杂质的扩散偏聚的步骤采用焙烧进行处理,表面杂质偏聚区剥蚀的步骤采用氢氧化钠进行处理,其中,焙烧温度为600~1400℃,焙烧时间为5~70h;Wherein, the step of increasing the surface defects is treated with sodium hydroxide, the step of diffusing and segregating the metal impurities of the quartz lattice is treated with roasting, and the step of eroding the surface impurity segregation zone is treated with sodium hydroxide, wherein the roasting temperature is 600~1400℃, the roasting time is 5~70h; 所述表面杂质清洗的步骤中,采用1~4 mol/L的盐酸溶液进行热压浸出和清洗,盐酸溶液与石英颗粒的液固比为(6~10) mL:1 g,浸出温度150℃~250℃,浸出时间1~8 h;In the step of cleaning the surface impurities, the hydrochloric acid solution of 1-4 mol/L is used for hot-pressing leaching and cleaning, the liquid-solid ratio of the hydrochloric acid solution and the quartz particles is (6-10) mL: 1 g, and the leaching temperature is 150° C. ~250℃, leaching time 1~8 h; 所述表面缺陷增加的步骤中,采用0.6667 mol/L的氢氧化钠溶液侵蚀石英颗粒,氢氧化钠溶液与石英颗粒的液固比为6 mL:1 g,浸出温度150℃~200℃,浸出时间1~8 h;In the step of increasing the surface defects, 0.6667 mol/L sodium hydroxide solution is used to etch the quartz particles, the liquid-solid ratio of the sodium hydroxide solution and the quartz particles is 6 mL:1 g, the leaching temperature is 150 ℃ ~ 200 ℃, and the leaching temperature is 150 ℃ ~ 200 ℃. Time 1~8 h; 所述表面杂质偏聚区剥蚀的步骤中,使用的氢氧化钠溶液浓度为0.1~0.5 mol/L,氢氧化钠溶液与石英颗粒的液固比为(2~10) mL:1 g,浸出温度150℃~200℃,浸出时间1~8 h。In the step of erosion of the surface impurity segregation zone, the concentration of the sodium hydroxide solution used is 0.1~0.5 mol/L, and the liquid-solid ratio of the sodium hydroxide solution to the quartz particles is (2~10) mL: 1 g, and the leaching The temperature is 150℃~200℃, and the leaching time is 1~8 h. 2.根据权利要求1所述的方法,其特征在于,所述石英预处理的步骤包括对石英进行破碎、磁选和筛分。2 . The method according to claim 1 , wherein the quartz pretreatment step comprises crushing, magnetic separation and sieving of the quartz. 3 . 3.根据权利要求1所述的方法,其特征在于,所述石英晶格金属杂质的扩散偏聚的步骤中,焙烧温度为1000℃。3 . The method according to claim 1 , wherein, in the step of diffusing and segregating metal impurities in the quartz lattice, the firing temperature is 1000° C. 4 . 4.根据权利要求1所述的方法,其特征在于,所述表面杂质偏聚区剥蚀的步骤中,氢氧化钠溶液浓度为0.3799 mol/L,氢氧化钠溶液与石英颗粒的液固比为6 mL:1 g。4. method according to claim 1, is characterized in that, in the step of described surface impurity segregation zone erosion, sodium hydroxide solution concentration is 0.3799 mol/L, and the liquid-solid ratio of sodium hydroxide solution and quartz particle is 6 mL: 1 g.
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