CN112771359A - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
- Publication number
- CN112771359A CN112771359A CN201980059797.3A CN201980059797A CN112771359A CN 112771359 A CN112771359 A CN 112771359A CN 201980059797 A CN201980059797 A CN 201980059797A CN 112771359 A CN112771359 A CN 112771359A
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- China
- Prior art keywords
- cylindrical member
- pressure sensor
- flange portion
- pressure
- sensor
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/003—Fluidic connecting means using a detachable interface or adapter between the process medium and the pressure gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0046—Fluidic connecting means using isolation membranes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0672—Leakage or rupture protection or detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L2009/0066—Mounting arrangements of diaphragm transducers; Details thereof, e.g. electromagnetic shielding means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention provides a pressure sensor, which is provided with: a cylindrical member (5) which is airtightly attached to a main body (4) forming the fluid passage (3) in a state of being communicated with the fluid passage (3); and a pressure sensor unit (6) that is connected to the tubular member (5) and detects the pressure of the fluid flowing through the fluid passage (3) of the main body (4), wherein the tubular member (5) is formed of a nickel-molybdenum-chromium alloy material or a stainless steel material, and the pressure sensor unit (6) is provided with: a sensor body (8) having a pressure receiving chamber (7) into which a fluid flows and a diaphragm (8a) that is in contact with the fluid flowing into the pressure receiving chamber (7), and one end of which is closed by the diaphragm (8 a); and a pressure detection element (2) that outputs the displacement of the diaphragm (8a) as a pressure, wherein the sensor body (8) is formed from a cobalt-nickel alloy material, and the open-end side end is hermetically connected to one end of the tubular member (5).
Description
Technical Field
The present invention relates to a diaphragm type pressure sensor using a pressure detection element (strain gauge, pressure sensitive element) which is installed mainly in a fluid supply line for a gas or the like in a semiconductor manufacturing facility, a chemical plant, or the like, and a pressure type flow rate control device, a concentration measuring device, or the like incorporated in the fluid supply line, and which detects the pressure of a fluid such as a gas flowing through the fluid supply line.
Background
Conventionally, various types of pressure sensors have been used for detecting the pressure of a fluid flowing through a fluid supply line in a semiconductor manufacturing facility or the like.
For example, known pressure sensors include: a pressure sensor in which a strain gauge is attached to a diaphragm to detect the pressure of a fluid, an absolute pressure type pressure sensor in which a space adjacent to the diaphragm is a vacuum chamber, a pressure sensor in which a pressure transmission medium such as silicon oil is sealed in a space adjacent to the diaphragm, a pressure sensor in which the diaphragm and a main body are formed of a stainless material having excellent corrosion resistance, and the like (see patent documents 1 to 3).
However, in the case where a corrosive gas such as a halogen gas such as hydrogen chloride or hydrogen bromide, or a chlorine-based gas such as fluorine gas or hydrogen fluoride is flowed, as in a gas supply line of a semiconductor manufacturing facility, a pressure sensor is used in which a diaphragm (pressure-sensitive portion) or the like that comes into contact with the corrosive gas is formed of austenitic stainless steel having excellent corrosion resistance.
However, in a pressure sensor in which a diaphragm as a pressure sensitive portion is formed of austenitic stainless steel, the diaphragm has excellent corrosion resistance, but has low tensile strength and low proof stress. Therefore, if the pressure sensor is used for a long time or a long period of time, or the strain of the diaphragm as the pressure-sensitive portion is made large to improve the sensitivity, the endurance of the diaphragm may be deteriorated.
Therefore, in the pressure sensor, if the diaphragm made of austenitic stainless steel is used for a long time or a long time as the pressure sensitive portion, the strain or the like becomes large due to the deterioration of the proof stress, and a problem of zero point offset or the like is caused, and the pressure cannot be measured with high accuracy occurs. However, the use of austenitic stainless steel as the material of the main body of the pressure sensor that is not in contact with corrosive gases does not cause the above-mentioned problems.
In order to solve the above problem, the separator (pressure-sensitive portion) may be formed of a material having excellent corrosion resistance and durability.
For example, japanese patent laid-open nos. 2005-148002 (patent document 4) and 2018-048859 (patent document 5) describe pressure sensors in which a diaphragm (pressure-sensitive portion) is formed of a metal material having excellent corrosion resistance and durability.
That is, as shown in fig. 5, the conventional pressure sensor 30 includes: a pressure-sensitive portion 31 in which a diaphragm 31a that is in contact with the fluid is formed; a strain gauge 32 provided on the diaphragm 31 a; and a support portion 34 that supports an outer peripheral edge portion of the pressure sensitive portion 31 and forms a reference pressure chamber 33 with a diaphragm 31a of the pressure sensitive portion 31, the pressure sensitive portion 31 on which the diaphragm 31a is formed being made of a cobalt-nickel alloy material (SPRON (registered trademark)) excellent in corrosion resistance and endurance.
Since the pressure-sensitive portion 31 on which the diaphragm 31a is formed is made of a cobalt-nickel alloy material having excellent corrosion resistance and durability, strain or the like is hardly generated even if the pressure sensor 30 is used for a long time or for a long period of time, and pressure can be measured with high accuracy.
However, the cobalt-nickel alloy material forming the pressure sensitive portion 31 of the pressure sensor 30 is preferably used as the diaphragm 31a because of deformation due to pressure, but is not a material suitable for a structure such as sealing. This is because the cobalt-nickel alloy material has a much higher hardness than austenitic stainless steel, and if a body or the like forming a fluid passage is fastened, looseness or the like is likely to occur, and the sealing property is impaired.
Therefore, in the pressure sensor 30, if the pressure sensitive portion 31 side formed of a cobalt-nickel alloy material is locked and fixed to a body or the like forming a fluid passage, looseness or the like is likely to occur, and a problem of impaired sealing performance occurs.
Prior art documents
Patent document
Patent document 1: japanese Kokai publication Hei 05-069647
Patent document 2: japanese laid-open patent publication No. 10-082707
Patent document 3: japanese laid-open patent publication No. 2007-033075
Patent document 4: japanese patent laid-open publication No. 2005-148002
Patent document 5: japanese laid-open patent publication No. 2018-048859
Disclosure of Invention
The present invention has been made in view of the above problems, and an object of the present invention is to provide a pressure sensor in which a sensor body having a diaphragm is formed of a metal material having excellent corrosion resistance, proof stress, and elasticity, and a cylindrical member for attaching the sensor body to a body forming a fluid passage is formed of a metal material having excellent corrosion resistance and suitable for a sealing structure, whereby pressure can be measured with high accuracy and the sealing property is also excellent.
In order to achieve the above object, a pressure sensor according to an embodiment of the present invention includes: a cylindrical member airtightly attached to a main body forming a fluid passage in a state of being communicated with the fluid passage; and a pressure sensor unit connected to the cylindrical member and detecting a pressure of a fluid flowing through the fluid passage of the main body, the cylindrical member being formed of a nickel-molybdenum-chromium alloy material or a stainless steel material, the pressure sensor unit including: a sensor body having a pressure receiving chamber into which the fluid flows and a diaphragm that is in contact with the fluid flowing into the pressure receiving chamber, and one end of the sensor body being closed by the diaphragm; and a pressure detection element that outputs a displacement of the diaphragm as a pressure, wherein the sensor body is formed of a cobalt-nickel alloy material, and an opening-side end portion is hermetically connected to one end portion of the cylindrical member.
In one embodiment, the cylindrical member and the sensor body are hermetically connected by welding.
In one embodiment, the cylindrical member is formed to have a diameter smaller than the maximum outer diameter of the pressure sensor portion, a welding flange portion is provided at one end portion of the cylindrical member, and a mounting flange portion is provided at the other end portion of the cylindrical member, and a connecting cylinder portion having a diameter smaller than the maximum outer diameter of the pressure sensor portion and an inner diameter equal to the inner diameter of the cylindrical member is formed to protrude from an end surface of the sensor main body of the pressure sensor portion at an opening end portion thereof, and the welding flange portion abutting against the welding flange portion of the cylindrical member is provided at the opening end portion of the connecting cylinder portion, and the welding flange portion of the cylindrical member and the welding flange portion of the connecting cylinder portion formed in the sensor main body are airtightly connected and fixed by welding.
In one embodiment, the cylindrical member and the sensor body are connected to each other through a flange to be airtight.
In one embodiment, the cylindrical member is formed to have a diameter smaller than the maximum outer diameter of the pressure sensor portion, a connecting flange portion is provided at one end portion of the cylindrical member, and an attachment flange portion is provided at the other end portion of the cylindrical member, a connecting cylindrical portion having a diameter smaller than the maximum outer diameter of the pressure sensor portion and an inner diameter equal to the inner diameter of the cylindrical member is formed to protrude from an end surface of an opening-side end portion of the sensor body of the pressure sensor portion, a connecting flange portion abutting against the connecting flange portion of the cylindrical member is provided at the opening-side end portion of the connecting cylindrical portion, a spacer is interposed between the connecting flange portion of the cylindrical member and the connecting flange portion of the connecting cylindrical portion formed in the sensor body, and the connecting flange portion of the cylindrical member and the connecting flange portion of the connecting cylindrical portion are fastened together by a bolt and a nut (nut) to be airtight The ground is connected and fixed.
In one embodiment, the cylindrical member is formed to have a diameter smaller than the maximum outer diameter of the pressure sensor portion, a connecting flange portion is provided at one end portion of the cylindrical member, and an attachment flange portion is provided at the other end portion of the cylindrical member, and a connecting cylindrical portion having a diameter smaller than the maximum outer diameter of the pressure sensor portion and an inner diameter equal to the inner diameter of the cylindrical member is formed to protrude from an end surface of an opening-side end portion of the sensor body of the pressure sensor portion, and a connecting flange portion abutting against the connecting flange portion of the cylindrical member is provided at the opening-side end portion of the connecting cylindrical portion, and a gasket is interposed between the connecting flange portion of the cylindrical member and the connecting flange portion of the connecting cylindrical portion formed in the sensor body, and the connecting flange portion of the cylindrical member and the connecting flange portion of the connecting cylindrical portion are connected and fixed in an airtight manner by being clamped from the outside by a clamp.
Effects of the invention
In the pressure sensor according to the embodiment of the present invention, since the sensor body having the diaphragm of the pressure sensor portion is formed of a cobalt-nickel alloy material having excellent corrosion resistance, proof stress, and elasticity, strain or the like hardly occurs in the sensor body even in long-term use, and pressure can be measured with high accuracy.
In the pressure sensor according to the embodiment of the present invention, the cylindrical member attached to the main body forming the fluid passage is made of a nickel-molybdenum-chromium alloy material or a stainless steel material which is excellent in corrosion resistance and has a hardness lower than that of the sensor main body, and therefore, even if the cylindrical member is locked and fixed to the main body, looseness or the like is hardly generated, and the sealing property is not impaired.
Further, in the pressure sensor according to the embodiment of the present invention, the connection cylinder portion is formed to protrude from the end surface of the opening-side end portion of the sensor main body having the diaphragm, and a cylindrical member airtightly attached to a body forming the fluid passage is airtightly connected to an opening-side end portion of the connecting cylinder portion, so that a distance between the opening-side end portion of the cylindrical member and the diaphragm of the sensor body is increased, therefore, even if the mounting flange portion provided at the opening-side end of the cylindrical member is fastened and fixed to the main body forming the fluid passage by the bonnet nut and is airtightly mounted, the stress applied to the mounting flange portion of the cylindrical member is absorbed by the cylindrical member and the connecting cylindrical portion and is not transmitted to the diaphragm, thus, the influence of stress on the diaphragm can be avoided, and variations in output characteristics of the pressure sensor before and after attachment to the main body can be eliminated. As a result, the aging treatment (aging) becomes unnecessary (running test).
Further, in the pressure sensor according to the embodiment of the present invention, since the cylindrical member attached to the main body forming the fluid passage is formed to have a diameter smaller than the maximum outer diameter of the pressure sensor portion, a space for attaching the pressure sensor to the main body can be small, and the size of the main body and the reduction in the inner volume of the fluid passage can be achieved.
Further, in the pressure sensor according to the embodiment of the present invention, since the welding flange portions are provided in the cylindrical member and the connecting cylindrical portion of the sensor body, respectively, and the two welding flange portions are fixed by welding, the thickness of the welded portion can be increased, the welded opening can be prevented, the depth of penetration of the welded portion can be increased, and the airtightness can be improved.
Drawings
Fig. 1 is a vertical cross-sectional view of a state in which a pressure sensor according to an embodiment of the present invention is mounted on a main body forming a fluid passage.
Fig. 2 is a longitudinal sectional view of a pressure sensor portion of the pressure sensor.
Fig. 3 is a longitudinal sectional view of a cylindrical member of the pressure sensor.
Fig. 4 is a vertical cross-sectional view of a state in which a pressure sensor according to another embodiment of the present invention is attached to a main body forming a fluid passage.
Fig. 5 is a vertical cross-sectional view showing an example of a conventional pressure sensor.
Description of the symbols
1 pressure sensor
2 pressure detecting element
3 fluid pathway
4 main body
5 cylindrical member
5a flange for welding
5 a' connection flange
5b mounting flange
6 pressure sensor unit
7 pressure receiving chamber
8 sensor body
8a diaphragm
8b cylindrical part
8c connecting tube part
8d flange for welding
8 d' connection flange
16 shim
22 bolt
23 nut (nut)
W welding
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
Fig. 1 to 3 show a pressure sensor 1 according to an embodiment of the present invention, in which the pressure sensor 1 is mainly installed in a pressure type flow rate control device, a concentration measuring device, or the like of a fluid supply line of a gas incorporated in a semiconductor manufacturing facility, detects the pressure of the gas flowing in the fluid supply line, and is a diaphragm type pressure sensor of an absolute pressure type using a pressure detecting element 2 (a strain gauge, a pressure sensitive element).
The pressure sensor 1 includes: a cylindrical member 5, the cylindrical member 5 being airtightly attached to the main body 4 forming the fluid passage 3 in a state of communicating with the fluid passage 3; and a pressure sensor unit 6, the pressure sensor unit 6 being connected to the cylindrical member 5 in an airtight manner and detecting a pressure of the fluid flowing through the fluid passage 3 of the main body 4.
As shown in fig. 1 and 3, the tubular member 5 is formed in a cylindrical shape having a diameter smaller than the maximum outer diameter of the pressure sensor portion 6 from a metal material having excellent corrosion resistance and suitable for a sealing structure, a welding flange portion 5a connected and fixed to the pressure sensor portion 6 by welding (electron beam welding, laser welding, or the like) is integrally provided at one end portion of the tubular member 5, and an attachment flange portion 5b attached to the main body 4 is integrally provided at the other end portion of the tubular member 5.
In the present embodiment, the tubular member 5 is formed of Hastelloy C-22(Hastelloy is a registered trademark) which is one of nickel-molybdenum-chromium alloy materials excellent in corrosion resistance and the like, or SUS316L which is one of austenitic stainless steels excellent in corrosion resistance and the like. Further, the inner peripheral surface of the cylindrical member 5 is subjected to electrolytic polishing treatment.
Further, the hardness (Hv) of Hastelloy C-22 was 260 or less, and the hardness (Hv) of SUS316L was 200 or less.
As shown in fig. 1 and 2, the pressure sensor unit 6 includes: a cylindrical sensor main body 8, the sensor main body 8 including a pressure receiving chamber 7 into which a fluid flows and a diaphragm 8a that is in contact with the fluid flowing into the pressure receiving chamber 7 and is displaced by a pressure of the fluid, and one end of the sensor main body 8 being closed by the diaphragm 8 a; a pressure detection element 2 provided on an outer surface of the diaphragm 8a, the pressure detection element 2 outputting displacement of the diaphragm 8a as pressure; a bottom ring 9, the bottom ring 9 being airtightly fitted and fixed to the outer peripheral surface of the sensor body 8; a seal ring 11 having one end surface hermetically connected to one end surface of the bottom ring 9, surrounding the outer surface of the diaphragm 8a, and hermetically inserted through the plurality of lead wires 10; a closing disk 13, the closing disk 13 being hermetically connected to the other end face of the seal ring 11, and forming a vacuum chamber 12 between the closing disk 13 and the diaphragm 8 a; and a cover 14, wherein the cover 14 holds the plurality of wires 10 inserted through the seal ring 11 in a right-angled state.
Specifically, as shown in fig. 1 and 2, the cylindrical sensor body 8 includes: a cylindrical portion 8b which is thicker than the wall thickness of the tubular member 5, the cylindrical portion 8b being formed in a closed-end tubular shape from a metal material having excellent corrosion resistance, durability, and elasticity, and having an outer diameter larger than the maximum outer diameter of the tubular member 5 (the outer diameter of the mounting flange portion 5 b) and an inner diameter equal to the inner diameter of the tubular member 5; a diaphragm 8a integrally provided at one end of the cylindrical portion 8b, the diaphragm 8a closing an opening at the one end of the cylindrical portion 8 b; and a connecting cylinder portion 8c, the connecting cylinder portion 8c being integrally provided on an end surface of the opening-side end portion of the cylinder portion 8b, and being hermetically connected to the cylindrical member 5.
The connection cylindrical portion 8c of the sensor body 8 is formed on the end surface of the opening-side end portion of the cylindrical portion 8b in a state of protruding outward, and has an outer diameter smaller than the maximum outer diameter of the cylindrical sensor body 8 (the outer diameter of the cylindrical portion 8 b) and an inner diameter equal to the inner diameter of the cylindrical member 5.
Further, a welding flange portion 8d that comes into contact with the welding flange portion 5a of the tubular member 5 is integrally provided at an opening-side end portion of the connecting cylindrical portion 8c of the sensor body 8, and the welding flange portion 5a of the tubular member 5 and the welding flange portion 8d of the tubular sensor body 8 are hermetically connected and fixed by welding such as electron beam welding or laser welding.
The space surrounded by the diaphragm 8a, the cylindrical portion 8b, and the connecting cylindrical portion 8c of the sensor main body 8 serves as a pressure receiving chamber 7 into which a fluid such as gas flows.
In the present embodiment, the cylindrical sensor body 8 is formed of SPRON510(SPRON is a registered trademark), which is one of cobalt-nickel alloy materials excellent in corrosion resistance, proof stress, and elasticity. The hardness (Hv) of the SPRON510 is 500. + -.30.
The pressure detection element 2 is constituted by a metal strain gauge including a gauge portion formed in a film shape by covering a resistance wire of a thin metal wire or a metal foil with an insulator. The metal strain gauge may be formed as a separate part from the strain gauge portion and the bridge circuit portion for detecting a change in resistance, or may be a combination of the strain gauge portion and the bridge circuit portion.
As shown in fig. 1 and 2, the bottom ring 9 is formed of a metal material having excellent corrosion resistance, has substantially the same length as the cylindrical portion 8b of the cylindrical sensor body 8, is formed in an annular shape that fits closely to the outer peripheral surface of the cylindrical portion 8b, and has an annular stepped portion having a stepped cross-sectional shape formed at one end portion (end portion close to the diaphragm 8a) of the bottom ring 9. The bottom ring 9 is fitted to the outer peripheral surface of the cylindrical portion 8b of the cylindrical sensor body 8, and the outer peripheral edge of one end portion of the cylindrical portion 8b is welded (electron beam welding, laser welding, or the like) to the inner peripheral edge of one end portion of the bottom ring 9, whereby the bottom ring 9 is airtightly fitted and fixed to the outer peripheral surface of the sensor body 8.
In the present embodiment, the under ring 9 is formed of Hastelloy C-22(Hastelloy is a registered trademark) which is one of nickel-molybdenum-chromium alloy materials excellent in corrosion resistance and the like. Further, since the bottom ring 9 does not require deformation as in the case of the diaphragm 8a, stainless steel (for example, SUS316L or the like) may be used instead of Hastelloy C-22(Hastelloy is a registered trademark).
As shown in fig. 1 and 2, the seal ring 11 is formed of a metal material having excellent corrosion resistance in an annular shape having the same outer diameter as that of the bottom ring 9, and an annular stepped portion having a stepped cross-sectional shape is formed at one end portion (end portion facing the bottom ring 9) of the seal ring 11 so as to be fitted to the annular stepped portion formed at the one end portion of the bottom ring 9. The seal ring 11 is hermetically connected and fixed to one end surface of the bottom ring 9 by fitting the annular stepped portion of the seal ring 11 into the annular stepped portion of the bottom ring 9 and welding (e.g., electron beam welding or laser welding) the outer peripheral edges of the abutting portions of the seal ring 11 and the bottom ring 9.
Further, the distal ends of the plurality of lead wires 10 are hermetically inserted through the seal ring 11 via the low-melting glass material 15, and the distal ends of the lead wires 10 are connected to a metal strain gauge as the pressure detection element 2.
In the present embodiment, the seal ring 11 is formed of SUS316L, which is one of austenitic stainless steels excellent in corrosion resistance and the like.
As shown in fig. 1 and 2, the closing disk 13 is formed of a metal material having excellent corrosion resistance into a disk shape having an outer diameter equal to that of the seal ring 11, and an annular notch portion into which the other end portion of the seal ring 11 is fitted is formed in an outer peripheral edge portion of an inner side surface of the closing disk 13. The closing disk 13 is fitted to the other end of the seal ring 11 by the annular notch, and the outer peripheral edge of the other end face of the seal ring 11 is welded (electron beam welding, laser welding, or the like) to the outer peripheral edge of the inner face of the closing disk 13, whereby the closing disk 13 is airtightly connected and fixed to the other end face of the seal ring 11. Thereby, a space is formed between the closing disk 13 and the diaphragm 8a, and this space is formed as the vacuum chamber 12.
In the present embodiment, the closing disk 13 is formed of SUS316L, which is one of austenitic stainless steels excellent in corrosion resistance and the like.
As shown in fig. 1 and 2, the cover 14 is formed of a synthetic resin material in an annular shape having an L-shaped cross section, and is fitted to the outer peripheral edge of the closing disk 13 and the outer peripheral surface of the other end of the seal ring 11, and further includes: and a plurality of through holes 14a for holding the plurality of wires 10 inserted through the seal ring 11 in a right angle state. The state of holding the plurality of wires 10 is not limited to the right angle state, and may be a shape matching the state to be held, and the cover 14 may be omitted if it is not necessary to hold the wires 10.
The pressure sensor 1 configured as described above is fixed to the main body 4 forming the fluid passage 3 in an airtight manner by the gasket 16, the washer 17, and the bonnet nut 18 in a state where the cylindrical member 5 communicates with the fluid passage 3.
The main body 4 is formed of a main body 4 forming the fluid passage 3 of the pressure type flow rate control device or the concentration measuring device, or a main body 4 forming the fluid passage 3 provided in the fluid supply line, and is formed in an appropriate shape from a metal material (e.g., austenitic stainless steel) excellent in corrosion resistance, durability, and the like. A fluid such as a gas (for example, a process gas of a semiconductor manufacturing apparatus) is caused to flow in the fluid passage 3 formed in the main body 4 of these.
As shown in fig. 1, the main body 4 is formed with a circular insertion hole 19 for attaching the cylindrical member 5 of the pressure sensor 1, and a female screw 4a into which the bonnet nut 18 is detachably screwed is formed on an inner circumferential surface of the insertion hole 19.
Further, as shown in fig. 1, a communication hole 20 for connecting the fluid passage 3 and the insertion hole 19 in a communicating manner is formed in the center of the bottom surface of the insertion hole 19 of the main body 4.
As shown in fig. 1, the gasket 16 is formed of austenitic stainless steel in a ring shape having a size of an insertion hole 19 into the body 4, and has a rectangular cross-sectional shape. One end surface of the gasket 16 abuts against the bottom surface of the insertion hole 19 of the main body 4, and the other end surface of the gasket 16 abuts against the outer end surface of the mounting flange 4b formed on the tubular member 5. The cross-sectional shape of the gasket 16 is not limited to a rectangular shape, and may be a circular shape or a polygonal shape.
As shown in fig. 1, the washer 17 is formed as an annular plate-like member, and abuts against an inner surface of the mounting flange portion 4b formed on the tubular member 5. The gasket 17 is formed of two pieces, and is slidable on a contact surface when the two pieces are stacked. The gasket 17 is a plate-like member made of synthetic resin or a metal plate made of stainless steel. When the gasket 17 is a metal plate, the metal surfaces may be directly slid on each other, or the sliding surface may be coated with a coating or the like to facilitate the sliding.
As shown in fig. 1, the bonnet nut 18 is formed of austenitic stainless steel into a cylindrical shape having a size of fitting to the cylindrical member 5, and has an outer peripheral surface formed with a male screw 18a to which a female screw 4a formed in an inner peripheral surface of an insertion hole 19 of the body 4 is detachably screwed.
Further, an attachment flange portion 5b of the cylindrical member 5 and an annular fitting recess portion 18b into which the washer 17 is fitted are formed on the lower end portion inner peripheral edge portion of the bonnet nut 18, and the shape of the upper end portion outer peripheral surface (the portion where the male screw 18a is not formed) of the bonnet nut 18 is formed in a polygonal shape so that the bonnet nut 18 can be rotated by a tool such as a wrench.
In the present embodiment, the following are set: the maximum outer diameter of the pressure sensor portion 6 (the outer diameter of the lid 14) was set to 20mm, the height of the pressure sensor portion 6 was set to 11.7mm, the height of the pressure sensor portion 6 excluding the lid 14 was set to 9.7mm, the outer diameter of the cylindrical portion 8b of the sensor body 8 was set to 13mm, the inner diameter of the sensor body 8 was set to 8mm, the outer diameter of the welding flange 8d of the sensor body 8 was set to 10mm, the outer diameters of the bottom ring 9, the seal ring 11, and the closing disk 13 were set to 15.7mm, the outer diameter of the welding flange 5a of the cylindrical member 5 was set to 10mm, the outer diameter of the mounting flange 5b of the cylindrical member 5 was set to 12.8mm, the inner diameter of the cylindrical member 5 was set to 8mm, and the height of the mounting flange 5b of the cylindrical member 5 was set to 1.5 mm. The dimensions described here are merely one embodiment, and the dimensions described above can be changed according to various situations.
Next, a case where the pressure sensor 1 is attached to the body 4 forming the fluid passage 3 will be described.
First, the gasket 16 is inserted into the insertion hole 19 formed in the body 4, and the gasket 16 is placed on the bottom surface of the insertion hole 19 so that the center thereof coincides with the communication hole 20.
Next, the combination of the cylindrical member 5, the two washers 17, and the bonnet nut 18 is inserted into the insertion hole 19 of the main body 4, the male screw 18a of the bonnet nut 18 is screwed into the female screw 4a formed on the inner peripheral surface of the insertion hole 19, the bonnet nut 18 is locked to the main body 4 side, and the washer 17, the flange portion 4b for attachment of the cylindrical member 5, and the washer 16 are pressed to the bottom surface side of the insertion hole 19 by the bonnet nut 18.
In this way, the gasket 16 is pressed by the mounting flange portion 5b of the tubular member 5, and the tubular member 5 is air-tightly mounted in the insertion hole 19 by forming the seal portions between one end surface of the gasket 16 and the bottom surface of the insertion hole 19 and between the other end surface of the gasket 16 and the outer side surface of the mounting flange portion 5 b.
In the above embodiment, the combination of the cylindrical member 5, the two washers 17, and the bonnet nut 18 is inserted into the insertion hole 19 of the body 4, but in another embodiment, the cylindrical member 5, the two washers 17, and the bonnet nut 18 may be inserted into the insertion hole 19 of the body 4 in this order.
Then, if the tubular member 5 is airtightly attached to the main body 4, the welding flange portion 8d provided in the pressure sensor portion 6 is abutted against the welding flange portion 5a of the tubular member 5, and the welding flange portion 5a of the tubular member 5 and the welding flange portion 8d provided in the pressure sensor portion 6 are airtightly connected and fixed by welding (electron beam welding, laser welding, or the like).
Thus, the pressure sensor 1 is attached to the body 4 forming the fluid passage 3.
Since the sensor body 8 having the diaphragm 8a of the pressure sensor portion 6 of the pressure sensor 1 is formed of a cobalt-nickel alloy material having excellent corrosion resistance, proof stress, and elasticity, strain or the like hardly occurs in the sensor body 8 even in long-term use, and pressure can be measured with high accuracy.
Further, since the cylindrical member 5 attached to the body 4 forming the fluid passage 3 of the pressure sensor 1 is formed of a nickel-molybdenum-chromium alloy material or a stainless material having excellent corrosion resistance and having hardness lower than that of the sensor body 8, even if the cylindrical member 5 is locked and fixed to the body 4 side, looseness or the like is hardly generated, and the sealing property is not lowered.
Further, in the pressure sensor 1, the gasket 16 inserted into the insertion hole 19 is held between the main body 4 and the mounting flange portion 5b of the tubular member 5, and in this state, the mounting flange portion 2b of the tubular member 5 is pressed toward the main body 4 by the bonnet nut 18 screwed into the insertion hole 19 of the main body 4, so that the mounting flange portion 5b of the tubular member 5 is locked and fixed by the main body 4 and the bonnet nut 18, and therefore, even if the mounting flange portion 5b of the tubular member 5 is locked and fixed, the stress applied to the mounting flange portion 5b of the tubular member 5 is absorbed by the tubular member 5 and the connecting tubular portion 8c and is not transmitted to the diaphragm 8a, and therefore, the influence of the stress on the diaphragm 8a can be avoided, and the output characteristic fluctuation before and after the mounting of the pressure sensor 1 to the main body 4 disappears.
Fig. 4 shows a pressure sensor 1 according to another embodiment of the present invention, in which the pressure sensor 1 employs flange connection instead of connection by welding, and the cylindrical member 5 and the cylindrical sensor body 8 are hermetically connected by flange connection.
That is, in the pressure sensor 1, the tubular member 5 is formed to have a diameter smaller than the maximum outer diameter of the pressure sensor part 6 (the outer diameter of the lid 14), the connecting flange part 5a ' is provided at one end of the tubular member 5, the mounting flange part 5b is provided at the other end of the tubular member 5, the connecting cylindrical part 8c having a diameter smaller than the maximum outer diameter of the pressure sensor part 6 and an inner diameter equal to the inner diameter of the tubular member 5 is formed to protrude from the end surface of the cylindrical sensor body 8 at the opening side end of the pressure sensor part 6, the connecting flange part 8d ' abutting against the connecting flange part 5a ' of the tubular member 5 is provided at the opening side end of the connecting cylindrical part 8c, the annular metal plate-made spacer 21 is interposed between the connecting flange part 5a ' of the tubular member 5 and the connecting flange part 8d ' formed in the connecting cylindrical part 8c of the tubular sensor body 8, the flange portion 5a 'for connection of the fixed cylindrical member 5 and the flange portion 8 d' for connection of the cylindrical portion 8c are airtightly connected by tightening the bolt 22 and the nut 23. Here, the fastening of the connecting flange portions 5a ', 8 d' is performed by the bolts 22 and the nuts 23, but the two connecting flange portions 5a ', 8 d' may be clamped and fastened from the outside by using a clamp (not shown). For example, the clamp may be formed of two open case-shaped clamps.
That is, the pressure sensor 1 is configured in the same manner as the pressure sensor 1 shown in fig. 1 except that the connection structure between the tubular member 5 and the tubular sensor body 8 is a flange structure instead of a welded structure, and the same components and parts as those of the pressure sensor 1 shown in fig. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.
The pressure sensor 1 also exhibits the same operational effects as the pressure sensor 1 shown in fig. 1.
In the above-described embodiment, the vacuum chamber 12 is formed in the pressure sensor unit 6 and the strain gauge is used as the pressure detection element 2, but in another embodiment, a pressure chamber filled with a pressure transmission medium may be formed instead of the vacuum chamber 12 of the pressure sensor unit 6 and a pressure sensitive element (pressure detection element 2) may be disposed in the pressure chamber. A conventionally known diffusion-type semiconductor pressure transducer including a pressure detection diaphragm is used for the pressure sensitive element.
In the above embodiment, the bottom ring 9, the seal ring 11, and the closing disk 13 are all formed as separate bodies, but in another embodiment, the bottom ring 9 and the seal ring 11, or the seal ring 11 and the closing disk 13, or the bottom ring 9, the seal ring 11, and the closing disk 13 may be formed integrally. The materials of the bottom ring 9, the seal ring 11, and the closing disk 13 are not limited to those of the above embodiments, and may be any metal material having excellent corrosion resistance.
Further, in the above embodiment, the tubular member 5 is formed of Hastelloy C-22(Hastelloy is a registered trademark) or SUS316L which is excellent in corrosion resistance and suitable for a seal structure, but the material of the tubular member 5 is not limited to the material of the above embodiment, and any material may be used as long as it is excellent in corrosion resistance and suitable for a seal structure.
Further, in the above embodiment, the sensor main body 8 having the diaphragm 8a is formed of SPRON510(SPRON is a registered trademark) excellent in corrosion resistance, proof stress, and elasticity, but the material of the sensor main body 8 is not limited to the material according to the above embodiment, and any material may be used as long as it is excellent in corrosion resistance, proof stress, and elasticity.
Further, in the above-described embodiment, the diaphragm 8a is integrally formed in the cylindrical portion 8b of the sensor main body 8, but in another embodiment, the cylindrical portion 8b of the sensor main body 8 and the diaphragm 8a may be formed separately so that the outer peripheral edge portion of the diaphragm 8a is hermetically connected and fixed to the cylindrical portion 8b by welding.
Industrial applicability
The pressure sensor 1 according to the present invention is mainly used in a gas supply line of a semiconductor manufacturing facility, but the object of use is not limited to the semiconductor manufacturing apparatus described above, and can be used in a fluid supply line of various apparatuses such as a chemical plant, a pharmaceutical industry, and a food industry.
Claims (6)
1. A pressure sensor, characterized in that,
the disclosed device is provided with: a cylindrical member airtightly attached to a main body forming a fluid passage in a state of communicating with the fluid passage; and a pressure sensor portion connected to the cylindrical member and detecting a pressure of the fluid flowing in the fluid passage of the main body,
the cylindrical member is formed of a nickel-molybdenum-chromium alloy material or a stainless steel material,
the pressure sensor unit includes: a sensor body having a pressure receiving chamber into which the fluid flows and a diaphragm that is in contact with the fluid flowing into the pressure receiving chamber, and one end of which is occluded by the diaphragm; and a pressure detection element that outputs a displacement of the diaphragm as a pressure,
the sensor body is made of a cobalt-nickel alloy material, and an open-end portion is hermetically connected to one end portion of the tubular member.
2. The pressure sensor of claim 1,
the cylindrical member and the sensor body are hermetically connected by welding.
3. The pressure sensor of claim 2,
the cylindrical member is formed to have a diameter smaller than the maximum outer diameter of the pressure sensor portion, a welding flange portion is provided at one end portion of the cylindrical member, and an attachment flange portion is provided at the other end portion of the cylindrical member,
a connecting cylinder portion having a diameter smaller than the maximum outer diameter of the pressure sensor portion and an inner diameter equal to the inner diameter of the cylindrical member is formed to protrude from an end surface of the sensor body at an opening-side end of the pressure sensor portion, a welding flange portion to be brought into contact with the welding flange portion of the cylindrical member is provided at the opening-side end of the connecting cylinder portion,
the welding flange portion of the cylindrical member and the welding flange portion of the connecting cylinder portion formed in the sensor body are hermetically connected and fixed by welding.
4. The pressure sensor of claim 1,
the cylindrical member and the sensor body are connected by a flange to be airtight.
5. The pressure sensor of claim 4,
the cylindrical member is formed to have a diameter smaller than the maximum outer diameter of the pressure sensor portion, a connecting flange portion is provided at one end portion of the cylindrical member, and an attaching flange portion is provided at the other end portion of the cylindrical member,
a connecting cylinder portion having a diameter smaller than the maximum outer diameter of the pressure sensor portion and an inner diameter equal to the inner diameter of the cylindrical member is formed to protrude from an end surface of the sensor body at an opening-side end of the pressure sensor portion, a connecting flange portion abutting against the connecting flange portion of the cylindrical member is provided at the opening-side end of the connecting cylinder portion,
a gasket is interposed between the connecting flange portion of the tubular member and the connecting flange portion of the connecting cylinder portion formed in the sensor body, and the connecting flange portion of the tubular member and the connecting flange portion of the connecting cylinder portion are fastened and fixed in an airtight manner by a bolt and a nut.
6. The pressure sensor of claim 4,
the cylindrical member is formed to have a diameter smaller than the maximum outer diameter of the pressure sensor portion, a connecting flange portion is provided at one end portion of the cylindrical member, and an attachment flange portion is provided at the other end portion of the cylindrical member
The pressure sensor portion is formed by protruding from an end surface of an opening-side end portion of a sensor body: a connecting cylinder portion having a diameter smaller than the maximum outer diameter of the pressure sensor portion and an inner diameter equal to the inner diameter of the cylindrical member, a connecting flange portion abutting against the connecting flange portion of the cylindrical member being provided at an opening-side end of the connecting cylinder portion,
a spacer is interposed between the connecting flange portion of the tubular member and the connecting flange portion of the connecting cylinder portion formed in the sensor body, and the connecting flange portion of the tubular member and the connecting flange portion of the connecting cylinder portion are fixed to each other in an airtight manner by being clamped from the outside by a clamp.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-190708 | 2018-10-09 | ||
| JP2018190708 | 2018-10-09 | ||
| PCT/JP2019/039017 WO2020075600A1 (en) | 2018-10-09 | 2019-10-02 | Pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112771359A true CN112771359A (en) | 2021-05-07 |
Family
ID=70163803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980059797.3A Pending CN112771359A (en) | 2018-10-09 | 2019-10-02 | Pressure sensor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11768123B2 (en) |
| JP (1) | JP7157477B2 (en) |
| KR (1) | KR102436790B1 (en) |
| CN (1) | CN112771359A (en) |
| TW (1) | TWI719664B (en) |
| WO (1) | WO2020075600A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11513018B2 (en) * | 2020-09-30 | 2022-11-29 | Rosemount Inc. | Field device housing assembly |
| WO2022080069A1 (en) * | 2020-10-15 | 2022-04-21 | 株式会社フジキン | Cover component for pressure sensor, and pressure sensor device comprising same |
| CN116348750A (en) | 2020-12-23 | 2023-06-27 | 株式会社富士金 | Pressure sensor |
| WO2022197094A1 (en) | 2021-03-16 | 2022-09-22 | 주식회사 엘지에너지솔루션 | Non-aqueous electrolyte for lithium secondary battery and lithium secondary battery comprising same |
| KR102632048B1 (en) * | 2023-07-14 | 2024-02-01 | (주)유니콘 | Pressure conversion type water level indicator |
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- 2019-10-02 JP JP2020550522A patent/JP7157477B2/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2020075600A1 (en) | 2021-09-02 |
| KR102436790B1 (en) | 2022-08-26 |
| US11768123B2 (en) | 2023-09-26 |
| JP7157477B2 (en) | 2022-10-20 |
| WO2020075600A1 (en) | 2020-04-16 |
| TW202024575A (en) | 2020-07-01 |
| US20210356346A1 (en) | 2021-11-18 |
| KR20210034084A (en) | 2021-03-29 |
| TWI719664B (en) | 2021-02-21 |
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Application publication date: 20210507 |