CN112764436A - Mass flow controller detection system - Google Patents
Mass flow controller detection system Download PDFInfo
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- CN112764436A CN112764436A CN202011494805.8A CN202011494805A CN112764436A CN 112764436 A CN112764436 A CN 112764436A CN 202011494805 A CN202011494805 A CN 202011494805A CN 112764436 A CN112764436 A CN 112764436A
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- mass flow
- flow controller
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
Abstract
The embodiment of the application provides a mass flow controller detection system. The detection system includes: the device comprises a mounting plate, a transmission assembly, a mounting assembly and a leakage detection assembly; the transmission assembly is arranged on the mounting plate and used for bearing the mass flow controllers and driving the mass flow controllers to move along a first direction, so that the mass flow controllers are sequentially stopped at preset positions; the mounting assemblies are arranged on the mounting plate and positioned on two sides of the preset position, and the output end and the input end of the leakage detection assembly are respectively arranged on the mounting assemblies on the two sides of the preset position; the mounting assembly is used for connecting the output end and the input end to two ends of the mass flow controller respectively, disassembling the output end and the input end from two ends of the mass flow controller, and the leakage detecting assembly is used for detecting leakage of the mass flow controller. The embodiment of the application realizes automatic leakage detection of the mass flow controller, not only saves labor cost, but also improves the calibration precision and efficiency of the mass flow controller.
Description
Technical Field
The application relates to the technical field of flow control, in particular to a mass flow controller detection system.
Background
At present, a Digital Mass Flow Controller (DMFC) is a Controller that monitors and adjusts the Flow of a gas supply system in real time through Digital signals, and is widely applied to the fields of photovoltaics, fuel cells, semiconductor processes, and the like, and is a main component in the gas supply systems of process equipment in these fields. Therefore, the precision and reliability of the DMFC become key factors for the process accuracy and stability in the above fields, and a calibration method for determining the precision and reliability of the DMFC becomes more important.
The existing calibration method is to put the DMFC into a calibration system for calibration. Specifically, the DMFC is placed in a calibration system in a manual mode, then clamping sleeve nuts at two ends of the DMFC are screwed down in a manual mode, and the clamping sleeve nuts at two ends of the DMFC are loosened manually after calibration is completed. Because the manual mode can only calibrate a single DMFC each time, the labor intensity of workers is high, and the calibration efficiency of the DMFC is seriously influenced. In addition, the existing calibration system leaks air in the calibration process due to insufficient force for manually screwing clamping sleeve nuts at two ends of the DMFC, so that the calibration precision and the reliability of the DMFC can be directly influenced, and the process accuracy and the stability of process equipment applying the DMFC can be seriously influenced.
Disclosure of Invention
The application aims at the defects of the prior art and provides a mass flow controller detection system which is used for solving the technical problems that in the prior art, the calibration efficiency of the mass flow controller is low and the calibration precision is low due to manual operation.
In a first aspect, an embodiment of the present application provides a mass flow controller detection system, including: the device comprises a mounting plate, a transmission assembly, a mounting assembly and a leakage detection assembly; the transmission assembly is arranged on the mounting plate and used for bearing the mass flow controllers and driving the mass flow controllers to move along a first direction, so that the mass flow controllers are sequentially stopped at preset positions; the mounting components are arranged on the mounting plate and located on two sides of the preset position, the leakage detection component comprises an output end and an input end, and the output end and the input end are respectively arranged on the mounting components on two sides of the preset position; the mounting assembly is used for enabling the output end and the input end to be connected to the two ends of the mass flow controller respectively when the mass flow controller stays at the preset position, the output end and the input end are detached from the two ends of the mass flow controller, and the leakage detecting assembly is used for detecting leakage of the mass flow controller after the output end and the input end are connected to the two ends of the mass flow controller.
In an embodiment of the application, the mounting assembly is configured to drive the output end and the input end to be close to or far away from the preset position along a second direction, and the first direction intersects with the second direction.
In an embodiment of the present application, the first direction and the second direction are perpendicular to each other.
In an embodiment of the application, the mounting assembly includes a moving mechanism, a driving portion and a connecting block, the moving mechanism is disposed on the mounting plate and extends along the second direction to be disposed on one side of the preset position, the driving portion is disposed on the moving mechanism through the connecting block, and the moving mechanism is configured to drive the driving portion to move in the second direction through the connecting block; the output end and the input end are arranged on the driving part, and the driving part is used for connecting the output end and the input end to the two ends of the mass flow controller according to a preset torque and detaching the output end and the input end from the two ends of the mass flow controller.
In an embodiment of this application, transmission assembly includes transmission device, fixture and fixed block, transmission device set up in on the mounting panel, follow first direction extension set up in one side of predetermineeing the position, fixture passes through the fixed block set up in transmission device is last for bear a plurality of mass flow controller, transmission device is used for passing through the fixed block drives fixture is in the removal in the first direction.
In an embodiment of the present application, the clamping mechanism includes a bearing plate, clamping blocks and a telescopic cylinder, a bottom surface of the bearing plate is connected to a top surface of the fixing block, a plurality of the clamping blocks are slidably disposed on the top surface of the bearing plate, and any two adjacent clamping blocks can clamp one mass flow controller; the telescopic cylinder is arranged on the top surface of the bearing plate and used for driving the clamping blocks to move simultaneously so as to clamp the mass flow controllers.
In an embodiment of the present application, the leak detection assembly further includes a flow control unit, a flow display, a first valve and a second valve, one end of the flow control unit is connected to a fluid supply device through the first valve, the other end of the flow control unit is connected to the output end, the input end is connected to the second valve, and the flow display is electrically connected to the flow control unit.
In an embodiment of the present application, the method further includes: the device comprises a control device, a multi-path switching device and a data acquisition device, wherein the control device is electrically connected with the transmission assembly, the mounting assembly, the leakage detection assembly, the multi-path switching device and the data acquisition device; the data acquisition device is used for acquiring a voltage value of output flow of the mass flow controller after the mass flow controller completes leak detection, and the control device is used for calibrating the mass flow controller according to the voltage value; the multi-channel switching device is used for being connected with the mass flow controllers, a calibration completion signal is fed back to the control device after the mass flow controllers complete calibration, and the control device is used for switching the connection states of the mass flow controllers through the multi-channel switching device according to the calibration completion signal.
In an embodiment of the present application, the apparatus further includes a power supply device electrically connected to the control device, and the power supply device is electrically connected to the plurality of mass flow controllers and is configured to supply power to the mass flow controllers under the control of the control device.
In an embodiment of the present application, the power supply device includes a multi-channel programmable power supply.
The technical scheme provided by the embodiment of the application has the following beneficial technical effects:
the embodiment of the application drives a plurality of mass flow controllers to move through the transmission assembly, and the output end and the input end of the leakage detecting assembly are connected or detached with the mass flow controllers through the installation assembly, so that leakage detection of the mass flow controllers is realized, labor cost is effectively saved, manual operation can be avoided, air leakage is not caused due to insufficient force, and calibration precision and efficiency of the mass flow controllers are improved. In addition, the air tightness of the mass flow controller is detected, so that the calibration precision and reliability of the mass flow controller are greatly improved, and the process accuracy and stability of process equipment are further ensured.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic partial structural diagram of a detection system according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural diagram of a mounting assembly according to an embodiment of the present disclosure;
FIG. 3 is a schematic side view of a transfer assembly according to an embodiment of the present disclosure;
fig. 4 is a schematic top view of a transfer assembly according to an embodiment of the present disclosure;
FIG. 5 is a schematic diagram of a leak detection assembly provided by an embodiment of the present application;
fig. 6 is a schematic overall structure diagram of a detection system according to an embodiment of the present application.
Detailed Description
Reference will now be made in detail to the present application, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts or parts having the same or similar functions throughout. In addition, if a detailed description of the known art is not necessary for illustrating the features of the present application, it is omitted. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The following describes the technical solutions of the present application and how to solve the above technical problems with specific embodiments.
An embodiment of the present application provides a mass flow controller detection system, and a schematic structural diagram of the mass flow controller detection system is shown in fig. 1 and fig. 5, and includes: the device comprises a mounting plate 1, a transmission assembly 2, a mounting assembly 3 and a leakage detection assembly 4; the transmission assembly 2 is arranged on the mounting plate 1 and is used for bearing the mass flow controllers 200 and driving the mass flow controllers 200 to move along a first direction L1, so that the mass flow controllers 200 sequentially stay at preset positions 11; the mounting assemblies 3 are arranged on the mounting plate 1 and located on two sides of the preset position 11, the leak detection assembly 4 comprises an output end 41 and an input end 42, and the output end 41 and the input end 42 are respectively arranged on the mounting assemblies 3 on two sides of the preset position 11; the mounting assembly 3 is used for connecting the output end 41 and the input end 42 to both ends of the mass flow controller 200 respectively when the mass flow controller 200 stays at the preset position 11, and the leak detection assembly 4 is used for performing leak detection on the mass flow controller 200 after the output end 41 and the input end 42 are connected to both ends of the mass flow controller 200.
As shown in fig. 1 and 5, the predetermined position 11 may be specifically located on the mounting plate 1, and the mounting plate 1 may be a rectangular plate-shaped structure made of a metal material. The transferring assembly 2 may be disposed on the mounting plate 1, and the transferring assembly 2 is located at one side of the preset position 11 and extends along the first direction L1. The first direction L1 is the up-down direction shown in fig. 1, and for convenience of description, the first direction L1 is referred to hereinafter as an example, and the description will not be repeated. The transport assembly 2 is provided with a plurality of carrier stations 24 arranged side by side along a first direction L1, the carrier stations 24 are used for carrying the mass flow controllers 200, and the transport assembly 2 can drive the plurality of mass flow controllers to move in the first direction L1 and can align each carrier station 24 with the preset position 11 so as to enable the mass flow controllers 200 to perform leak detection on the preset positions 11. The two mounting assemblies 13 are arranged on the mounting plate 1 and are respectively positioned at two sides of the preset position 11, the leak detection assembly 4 comprises an output end 41 and an input end 42, and the output end 41 can be specifically arranged on the mounting assembly 3 positioned at the left side of the preset position 11; and input 42 may be specifically provided on mounting assembly 3 to the right of preset position 11. Mounting assembly 3 may mount output 41 of leak detection assembly 4 to the left end of mass flow controller 200 and mount input 42 of leak detection assembly 4 to the right end of mass flow controller 200 to complete leak detection of mass flow controller 200. After the current mass flow controller 200 completes leak detection, the mass flow controller 200 can be directly calibrated, the mounting assembly 3 detaches the output end 41 and the output end 41 of the leak detection assembly 4 after calibration is completed, the transmission assembly 2 moves along the first direction L1, so that leak detection and calibration are performed on the next mass flow controller 200, and leak detection and calibration of a plurality of mass flow controllers 200 are completed by repeating the above actions.
The embodiment of the application drives a plurality of mass flow controllers to move through the transmission assembly, and the output end and the input end of the leakage detecting assembly are connected or detached with the mass flow controllers through the installation assembly, so that leakage detection of the mass flow controllers is realized, labor cost is effectively saved, manual operation can be avoided, air leakage is not caused due to insufficient force, and calibration precision and efficiency of the mass flow controllers are improved. In addition, the air tightness of the mass flow controller is detected, so that the calibration precision and reliability of the mass flow controller are greatly improved, and the process accuracy and stability of process equipment are further ensured.
It should be noted that the embodiment of the present application does not limit the specific type of the mass flow controller 200 and the specific direction of the first direction L1, for example, the embodiment of the present application may apply a digital mass flow controller and an analog mass flow controller; the first direction L1 may be other directions. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.
In one embodiment of the present application, as shown in fig. 1, the mounting assembly 3 is configured to drive the output end 41 and the input end 42 to approach or depart from the predetermined position 11 along a second direction L2, and the first direction L1 intersects the second direction L2. Optionally, the first direction L1 and the second direction L2 are perpendicular to each other.
As shown in fig. 1, two installation components 3 all extend along second direction L2 and set up, and this second direction L2 specifically can be left right direction in fig. 1, and second direction L2 specifically can adopt this design with first direction L1 mutually perpendicular can make this application structural design reasonable, and two installation components 3 of being convenient for are connected or are dismantled output 41 and input 42 to reduce this application embodiment fault rate and increase of service life. For convenience of explanation, the second direction L2 mentioned hereinafter is taken as an example, and the explanation is not repeated. In practical application, the two mounting assemblies 3 can simultaneously drive the output end 41 and the input end 42 to move to the preset position 11, so that the output end 41 and the input end 42 are close to the preset position 11 and are connected to two ends of the mass flow controller 200, after leakage detection and calibration are completed, the output end 41 and the input end 42 can be detached by the two mounting assemblies 3, and then the output end 41 and the input end 42 are driven to simultaneously keep away from the preset position 11. Adopt above-mentioned design, because two installation component 3 selectivity are close to preset position 11 simultaneously, not only can improve work efficiency, but also can avoid taking place mechanical interference with transmission assembly 2 to further reduce the fault rate, and then improve the life of this application embodiment by a wide margin.
It should be noted that the specific direction of the second direction L2 is not limited in the embodiments of the present application, for example, the second direction L2 may also be another direction, for example, the first direction L1 is exchanged with the second direction L2. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.
In an embodiment of the present application, as shown in fig. 1 and fig. 2, the mounting assembly 3 includes a moving mechanism 31, a driving portion 32 and a connecting block 33, the moving mechanism 31 is disposed on the mounting plate, and extends along the second direction L2 to be disposed at one side of the preset position 11, the driving portion 32 is disposed on the moving mechanism 31 through the connecting block 33, and the moving mechanism 31 is configured to drive the driving portion 32 to move in the second direction L2 through the connecting block 33; the output end 41 and the input end 42 are disposed on the driving portion 32, and the driving portion 32 is configured to connect the output end 41 and the input end 42 to two ends of the mass flow controller 200 according to a predetermined torque, and detach the output end 41 and the input end 42 from two ends of the mass flow controller 200.
As shown in fig. 1 and fig. 2, the moving mechanism 31 may be extended along the second direction L2, and the moving mechanisms 31 of the two mounting assemblies 3 are respectively disposed at the left and right sides of the preset position 11, and the moving mechanism 31 is configured to drive the driving portion 32 to reciprocate in the second direction L2. The driving portion 32 may be disposed on the moving mechanism 31 through the connecting block 33, and the driving portion 32 is disposed away from the preset position 11, so that the moving mechanism 31 drives the driving portion 32 to move to the preset position 11. The connection block 33 may be a hollow block made of metal, and two opposite sidewalls of the connection block 33 are connected to the moving mechanism 31 and the driving portion 32 by bolts, so as to facilitate the disassembly and assembly maintenance of the installation component 3, but the embodiment of the present invention is not limited thereto. Further, the output end 41 and the input end 42 are both ferrule nuts, and the driving portion 32 can drive the output end 41 and the input end 42 to rotate according to a preset torque, so as to install the output end 41 and the input end 42 at two ends of the mass flow controller 200, and can also be used for detaching the output end 41 and the input end from two ends of the mass flow controller 200. Because the output end 41 and the input end 42 are connected to the two ends of the mass flow controller 200 according to the preset torque, the problem of leakage detection failure caused by too large or too small tightening force due to manual operation can be effectively solved, the installation efficiency can be greatly improved, and the precision and the reliability of leakage detection and calibration can be further improved.
It should be noted that the embodiment of the present application does not limit the specific value of the preset torque, and the preset torque may be set according to the types of the output end 41 and the input end 42 and the specification of the mass flow controller 200. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.
In an embodiment of the present application, as shown in fig. 1 and fig. 2, the driving portion 32 includes a servo motor, and the input end 42 and the output end 41 are both in transmission connection with an output shaft of the servo motor. Specifically, the driving portion 32 employs a servo motor, which is easy to control and improves control accuracy, and can greatly reduce application cost of the embodiment of the present application. It should be noted that the embodiment of the present application does not limit the specific type of the driving portion 32 as long as it can operate the output end 41 and the input end 42 according to the preset torque. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.
In an embodiment of the present application, as shown in fig. 1 and fig. 3, the transmission assembly 2 includes a transmission mechanism 21, a clamping mechanism 22 and a fixing block 23, the transmission mechanism 21 is disposed on one side of the predetermined position 11 along the first direction L1, the clamping mechanism 22 is disposed on the transmission mechanism 21 through the fixing block 23 for carrying the mass flow controllers 200, and the transmission mechanism 21 is configured to drive the clamping mechanism 22 to move in the first direction L1 through the fixing block 23.
As shown in fig. 1 and 3, the transmission mechanism 21 may be extended along the first direction L1, and the transmission mechanism 21 may be specifically located at the lower side of the preset position 11, that is, the transmission mechanism 21 is located at the lower side of the two mounting assemblies 3 as shown in fig. 1, but the embodiment of the present application is not limited thereto, for example, the transmission mechanism 21 may also be located at the upper side of the two mounting assemblies 3 as long as the transmission mechanism 21 can move the clamping mechanism 22 in the first direction L1. The holding mechanism 22 is disposed on the conveying mechanism 21 through a fixing block 23, and the fixing block 23 may be disposed between the conveying mechanism 21 and the holding mechanism 22 and at an end away from the preset position 11. The fixing block 23 may be a hollow block made of a metal material, and two opposite side walls of the fixing block 23 are connected to the transmission mechanism 21 and the clamping mechanism 22 by bolts, so as to facilitate the disassembly and assembly of the transmission assembly 2, but the embodiment of the present invention is not limited thereto. By adopting the design, the disassembly, assembly and maintenance efficiency can be greatly improved, and the application and maintenance cost can be effectively reduced.
In an embodiment of the present application, as shown in fig. 1, 3 and 4, the clamping mechanism 22 includes a supporting plate 221, clamping blocks 222 and a telescopic cylinder 223, wherein the bottom surface of the supporting plate 221 is connected to the top surface of the fixing block 23, a plurality of clamping blocks 222 are slidably disposed on the top surface of the supporting plate 221, and any two adjacent clamping blocks 222 can clamp a mass flow controller 200; the telescopic cylinder 223 is disposed on the top surface of the bearing plate 221 for driving the plurality of clamping blocks 222 to move simultaneously to clamp the plurality of mass flow controllers 200.
As shown in fig. 1, 3 and 4, the supporting plate 221 may be a plate-shaped structure made of a metal material, and the bottom surface of the supporting plate 221 is connected to the top surface of the fixing block 23. The clamping blocks 222 may be block structures made of metal materials, the clamping blocks 222 are disposed on the top surface of the carrier plate 221 at intervals and can slide relative to the carrier plate 221, and a carrying station 24 is formed between any two adjacent clamping blocks 222 for carrying and clamping the mass flow controller 200. The telescopic cylinder 223 is disposed on the top surface of the loading plate 221 and disposed away from the preset position 11, and the telescopic rod of the telescopic cylinder 223 can drive the plurality of clamping blocks 222 to move for clamping the plurality of mass flow controllers 200. Adopt above-mentioned design, not only make the simple structure of this application embodiment, but also can improve stability by a wide margin to be convenient for installation component 3 carries out the dismouting to output 41 and input 42, thereby further improve work efficiency.
In an embodiment of the present application, as shown in fig. 1 to 4, the moving mechanism 31 and the transmission mechanism 21 both include linear modules. Specifically, the linear module is a device similar to a screw transmission mechanism so as to drive the driving portion 32 of the mounting assembly 3 and the clamping mechanism 22 of the transmission assembly 2 to move, and can also precisely control the moving process of the mounting assembly 3 and the clamping mechanism, thereby further improving the operation stability and reliability of the embodiment of the present application. However, the embodiment of the present application is not limited to this, and both the moving mechanism 31 and the transmission mechanism 21 may include a telescopic cylinder structure. Therefore, the embodiments of the present application are not limited thereto, and those skilled in the art can adjust the settings according to actual situations.
In one embodiment of the present application, as shown in fig. 1 and 5, the leak detection assembly 4 further includes a flow control unit 43, a flow indicator 44, a first valve 45 and a second valve 46, wherein one end of the flow control unit 43 is connected to a fluid supply device (not shown) through the first valve 45, the other end is connected to the output end 41, the input end 42 is connected to the second valve 46, and the flow indicator 44 is electrically connected to the flow control unit 43. Optionally, the first valve 45 and the second valve 46 each comprise a solenoid valve.
As shown in fig. 1 and 5, the first valve 45 and the second valve 46 may be solenoid valves, but the embodiment of the present invention is not limited thereto. The first valve 45 is connected to the fluid supply and one end of the flow control unit 43 via a pipe, the other end of the flow control unit 43 is connected to the input port 42 via a pipe, and the input port 42 is connected to the second valve 46 via a pipe. The flow display 44 is electrically connected to the flow control unit 43 via a data connection. The pipe fitting can be specifically for adopting stainless steel to make the pipeline to improve the bearing capacity and prolong leak hunting subassembly 4's life. In practical applications, the first valve 45 is connected to a fluid supply device, which may be specifically a gas supply device, but the embodiment of the present application is not limited thereto. Further, the output terminal 41 and the input terminal 42 are connected to the left and right ends of the mass flow controller 200, respectively. At this time, the first valve 45, the mass flow controller 200 and the second valve 46 are controlled to be opened to allow the leak detection assembly 4 to be in a venting state and to be vented according to a first preset time, and then the first valve 45 and the second valve 46 are controlled to be closed and to be maintained according to a second preset time. And judging whether leakage exists between the leakage detection assembly 4 and the mass flow controller 200 or not according to the reading of the flow display 44, if the reading of the flow display 44 is not changed, indicating no leakage, and if the reading of the flow display 44 is changed, indicating leakage, thereby completing the air tightness detection of the mass flow controller 200. By adopting the design, automatic control of leakage detection of the mass flow controller 200 is facilitated, and due to the fact that leakage detection is carried out on the mass flow controller 200 in advance, air leakage caused by manual operation can be effectively prevented, and therefore calibration accuracy and reliability of the mass flow controller 200 applied to the embodiment of the application are greatly improved.
In an embodiment of the present application, as shown in fig. 6, the mass flow controller detection system further includes: the device comprises a control device 5, a multi-path switching device 6 and a data acquisition device 7, wherein the control device 5 is electrically connected with a transmission assembly 2, a mounting assembly 3, a leakage detection assembly 4, the multi-path switching device 6 and the data acquisition device 7; the data acquisition device 7 is used for acquiring a voltage value of the output flow of the mass flow controller 200 after the mass flow controller 200 completes leak detection, and the control device 5 is used for calibrating the mass flow controller 200 according to the voltage value; the multi-channel switching device 6 is used for connecting with a plurality of mass flow controllers 200, when the mass flow controllers 200 finish calibration, a calibration completion signal is fed back to the control device 5, and the control device 5 is used for switching the connection states of the mass flow controllers 200 through the multi-channel switching device 6 according to the calibration completion signal.
Optionally, the mass flow controller detecting system further comprises a power supply device 8 electrically connected to the control device 5, and the power supply device 8 is electrically connected to the plurality of mass flow controllers 200 for supplying power to the mass flow controllers 200 under the control of the control device 5. Optionally, the power supply means 8 comprises a multi-channel programmable power supply.
As shown in fig. 1 and 6, the control device 5 is used to control the operation states of the transmission module 2, the mounting module 3, the leak detection module 4, the multiplexer 6, the data acquisition device 7, and the power supply device 8. Specifically, the control device 5 controls the transmission assembly 2 to move the mass flow controller 200 to the preset position 11, and then controls the mounting assembly 3 to connect the output end 41 and the input end 42 of the leak detection assembly 4 to the left and right ends of the mass flow controller 200, at this time, the leak detection assembly 4 performs leak detection on the current mass flow controller 200, and feeds a leak detection completion signal back to the control device 5. The control device 5 controls the power supply device 8 to apply a set calibration voltage to the current mass flow controller 200, the mass flow controller 200 controls the output flow according to the set calibration voltage, the control device 5 controls the acquisition device 7 to acquire the voltage value of the output flow corresponding to the mass flow controller 200, the control device 5 performs curve fitting on the set calibration voltage and the voltage value through a least square method to obtain a third-order curve and writes the third-order curve into the current mass flow controller 200 to complete calibration, at the moment, the multi-path switching device 6 feeds a calibration completion signal of the current mass flow controller 200 back to the control device 5, the control device 5 is connected with the next mass flow controller 200 through the multi-path switching device 6, and leak detection and calibration are performed on the next mass flow controller 200 through the control transmission assembly 2, the installation assembly 3 and the leak detection assembly 4. The power supply device 8 specifically adopts a multi-channel programmable power supply, which is not only used for applying a set calibration voltage to the mass flow controller 200 after receiving an instruction of the control device 5 to provide a required stable voltage value for the mass flow controller 200 to perform flow control, but also used for providing a working voltage for the mass flow controller 200, but the embodiment of the present application is not limited thereto, and a person skilled in the art can adjust the setting according to actual situations. By adopting the design, the multi-path switching device is adopted to switch the mass flow controllers, so that the control device can finish the calibration of the mass flow controllers at one time, and the working efficiency of the embodiment of the application is greatly improved.
By applying the embodiment of the application, at least the following beneficial effects can be realized:
the embodiment of the application drives a plurality of mass flow controllers to move through the transmission assembly, and the output end and the input end of the leakage detecting assembly are connected or detached with the mass flow controllers through the installation assembly, so that leakage detection of the mass flow controllers is realized, labor cost is effectively saved, manual operation can be avoided, air leakage is not caused due to insufficient force, and calibration precision and efficiency of the mass flow controllers are improved. In addition, the air tightness of the mass flow controller is detected, so that the calibration precision and reliability of the mass flow controller are greatly improved, and the process accuracy and stability of process equipment are further ensured.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
Claims (10)
1. A mass flow controller inspection system, comprising: the device comprises a mounting plate, a transmission assembly, a mounting assembly and a leakage detection assembly;
the transmission assembly is arranged on the mounting plate and used for bearing the mass flow controllers and driving the mass flow controllers to move along a first direction, so that the mass flow controllers are sequentially stopped at preset positions;
the mounting components are arranged on the mounting plate and located on two sides of the preset position, the leakage detection component comprises an output end and an input end, and the output end and the input end are respectively arranged on the mounting components on two sides of the preset position; the mounting assembly is used for enabling the output end and the input end to be connected to the two ends of the mass flow controller respectively when the mass flow controller stays at the preset position, the output end and the input end are detached from the two ends of the mass flow controller, and the leakage detecting assembly is used for detecting leakage of the mass flow controller after the output end and the input end are connected to the two ends of the mass flow controller.
2. The mass flow controller detection system of claim 1, wherein the mounting assembly is configured to move the output end and the input end toward or away from the predetermined position in a second direction, the first direction intersecting the second direction.
3. The mass flow controller detection system of claim 2, wherein the first direction and the second direction are perpendicular to each other.
4. The mass flow controller detecting system according to claim 2, wherein the mounting assembly includes a moving mechanism, a driving portion and a connecting block, the moving mechanism is disposed on the mounting plate and extends along the second direction to be disposed at one side of the preset position, the driving portion is disposed on the moving mechanism through the connecting block, and the moving mechanism is configured to drive the driving portion to move in the second direction through the connecting block; the output end and the input end are arranged on the driving part, and the driving part is used for connecting the output end and the input end to the two ends of the mass flow controller according to a preset torque and detaching the output end and the input end from the two ends of the mass flow controller.
5. The mass flow controller detection system of claim 1, wherein the transmission assembly comprises a transmission mechanism, a clamping mechanism and a fixed block, the transmission mechanism is disposed on the mounting plate and extends along the first direction to be disposed at one side of the preset position, the clamping mechanism is disposed on the transmission mechanism through the fixed block and is used for carrying a plurality of mass flow controllers, and the transmission mechanism is used for driving the clamping mechanism to move in the first direction through the fixed block.
6. The mass flow controller detecting system of claim 5, wherein the clamping mechanism comprises a bearing plate, clamping blocks and a telescopic cylinder, the bottom surface of the bearing plate is connected with the top surface of the fixing block, a plurality of the clamping blocks are slidably arranged on the top surface of the bearing plate, and any two adjacent clamping blocks can clamp one mass flow controller; the telescopic cylinder is arranged on the top surface of the bearing plate and used for driving the clamping blocks to move simultaneously so as to clamp the mass flow controllers.
7. The mass flow controller detector system of claim 1, wherein said leak detection assembly further comprises a flow control unit, a flow indicator, a first valve, and a second valve, said flow control unit being connected at one end to a fluid supply via said first valve and at the other end to said output, said input being connected to said second valve, said flow indicator being electrically connected to said flow control unit.
8. The mass flow controller test system of any of claims 1 to 7, further comprising: a control device, a multi-path switching device and a data acquisition device, wherein,
the control device is electrically connected with the transmission assembly, the mounting assembly, the leakage detecting assembly, the multi-path switching device and the data acquisition device;
the data acquisition device is used for acquiring a voltage value of output flow of the mass flow controller after the mass flow controller completes leak detection, and the control device is used for calibrating the mass flow controller according to the voltage value;
the multi-channel switching device is used for being connected with the mass flow controllers, a calibration completion signal is fed back to the control device after the mass flow controllers complete calibration, and the control device is used for switching the connection states of the mass flow controllers through the multi-channel switching device according to the calibration completion signal.
9. The mass flow controller detection system of claim 8, further comprising a power supply electrically connected to said control device, said power supply electrically connected to a plurality of said mass flow controllers for powering said mass flow controllers under control of said control device.
10. The mass flow controller detection system of claim 9, wherein the power supply comprises a multi-channel programmable power supply.
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