CN112763549B - Preparation method of gas sensor and gas sensor - Google Patents
Preparation method of gas sensor and gas sensor Download PDFInfo
- Publication number
- CN112763549B CN112763549B CN202011581380.4A CN202011581380A CN112763549B CN 112763549 B CN112763549 B CN 112763549B CN 202011581380 A CN202011581380 A CN 202011581380A CN 112763549 B CN112763549 B CN 112763549B
- Authority
- CN
- China
- Prior art keywords
- nanowire
- alpha
- zno
- gas sensor
- branched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Molecular Biology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
The invention provides a preparation method of a gas sensor, which comprises the following steps: providing an alpha-Fe 2 O 3 A nanowire; in the alpha-Fe 2 O 3 Depositing a ZnO seed crystal layer on the surface of the nanowire to form alpha-Fe 2 O 3 /ZnO core-shell nanowires; for the alpha-Fe 2 O 3 Performing electrode deposition on the ZnO nanowire to form a gas sensor precursor; for alpha-Fe in the gas sensor precursor 2 O 3 The ZnO core-shell nanowire is branched to form single alpha-Fe 2 O 3 A gas sensor with ZnO nanowire structure with branched nanowire surface is disclosed. The method for grafting the core-shell nanowire with the electrode and then branching the nanowire is adopted, the advantages of the powder nanostructure and the advantages of the single nanostructure are combined, and the difficulty that the electrode is easily punctured when the electrode is lapped on a complex structure is overcome. The preparation process has strong repeatability and high yield, and is beneficial to large-scale preparation. Effectively improve the gas sensor pair H 2 S gas response, and has the advantages of being beneficial to small-size integration, high in specific surface area, excellent in stability and the like, and the sensitivity to gas is improved.
Description
Technical Field
The invention relates to the field of semiconductors, in particular to a preparation method of a gas sensor and the gas sensor.
Background
The detection of flammable and explosive gases is becoming increasingly important in life and industry, and there is an urgent need for a gas sensor to perform rapid and accurate detection. Wherein hydrogen sulfide gas (H) 2 S) is a highly toxic, colorless, flammable gas with a consistency as thick as rotten eggs. Detection of H 2 The gas sensor of S generally includes an electrochemical gas sensor, a catalytic combustion gas sensor, an optical gas sensor, a chemiresistive gas sensor, and the like. Among them, the micro-chemical resistance-based gas sensor is receiving more and more attention from the fields of medicine, industry and food safety due to its advantages of low power consumption, low cost, high response, small humidity effect, etc.
In the prior art, based on metal oxide moietiesConductor materials CuO, znO and Fe 2 O 3 、WO 3 The gas sensor has good detection characteristics in the aspect of detecting toxic or combustible gas in the air. However, the single-component metal oxide nano structure has the defects of poor selectivity, slow response and the like. Therefore, it has been a hot spot of research to improve the sensing response and selectivity of metal oxide by noble metal doping, multilevel structure construction, and construction of composite heterostructure with other metal oxide semiconductor.
With the development of the electronic nose in the fields of medicine, military and the like, the electronic nose not only provides the requirements of high sensitivity and high selectivity for the gas sensor, but also can realize higher integration, and can realize simultaneous detection of various gases on the basis of greatly reducing the size of a device, thereby providing the idea based on a single metric line gas sensor. Therefore, on the basis of a single nanowire, the structure of the nanowire can be further optimized, and the method has important significance for the development of an electronic nose.
Disclosure of Invention
The invention aims to solve the technical problems of improving the sensitivity of a gas sensor and reducing the preparation difficulty, and provides a preparation method of the gas sensor and the gas sensor.
In order to solve the above problems, the present invention provides a method for manufacturing a gas sensor, comprising: providing an alpha-Fe 2 O 3 A nanowire; in the alpha-Fe 2 O 3 Depositing a ZnO seed crystal layer on the surface of the nanowire to form alpha-Fe 2 O 3 ZnO core-shell nanowire; for the alpha-Fe 2 O 3 Performing electrode deposition on the ZnO nanowire to form a gas sensor precursor; for alpha-Fe in the gas sensor precursor 2 O 3 The ZnO core-shell nanowire is branched to form single alpha-Fe 2 O 3 A gas sensor with ZnO nanowire structure with branched nanowire surface is disclosed.
In order to solve the problems, the invention also provides a gas sensor which is based on single alpha-Fe 2 O 3 Nanowire surface branched ZnO nanowire structure
Hair brushObviously, the method of grafting the core-shell nanowire with the electrode and then branching the nanowire is adopted, the advantages of the powder nanostructure and the single nanostructure are combined, and the difficulty that the electrode is easily punctured when the electrode is covered on a complex structure is overcome. The preparation process has strong repeatability and high yield, and is beneficial to large-scale preparation. Based on a single alpha-Fe 2 O 3 The ZnO nanowire structure with the branched nanowire surface can effectively improve H of the gas sensor 2 S gas response, and has the advantages of being beneficial to small-size integration, high in specific surface area, excellent in stability and the like, and the sensitivity to gas is improved.
Drawings
Fig. 1 is a schematic diagram illustrating steps of a method for manufacturing a gas sensor according to an embodiment of the present invention.
FIG. 2 is a schematic view of α -Fe according to an embodiment of the present invention 2 O 3 Schematic scanning electron microscope of nanowires.
FIG. 3 shows α -Fe according to an embodiment of the present invention 2 O 3 A scanning electron microscope schematic diagram of the ZnO core-shell nanowire.
FIG. 4 shows α -Fe according to an embodiment of the present invention 2 O 3 ZnO core-shell nanowire device and alpha-Fe 2 O 3 Schematic scanning electron microscope diagram of ZnO nanowire structure with branched nanowire surface.
FIG. 5 shows α -Fe according to an embodiment of the present invention 2 O 3 ZnO nanowire and alpha-Fe with surface of nanowire being branched 2 O 3 Gas-sensitive response schematic diagram of/ZnO core-shell nanowire.
Detailed Description
The following describes a method for manufacturing a gas sensor and a specific embodiment of the gas sensor in detail with reference to the accompanying drawings.
Fig. 1 is a schematic diagram of steps of a method for manufacturing a gas sensor according to an embodiment of the present invention, including: step S10, providing alpha-Fe 2 O 3 A nanowire; step S11, in the alpha-Fe 2 O 3 Depositing a ZnO seed crystal layer on the surface of the nanowire to form alpha-Fe 2 O 3 ZnO core-shell nanowire; step S12, for instituteThe alpha-Fe 2 O 3 Performing electrode deposition on the ZnO nanowire to form a gas sensor precursor; step S13, carrying out treatment on alpha-Fe in the gas sensor precursor 2 O 3 The ZnO core-shell nanowire is branched to form single-root alpha-Fe 2 O 3 A gas sensor with ZnO nanowire structure with branched nanowire surface is disclosed.
Step S10, providing alpha-Fe 2 O 3 A nanowire. In one embodiment of the invention, the alpha-Fe 2 O 3 The nanowires are prepared by calcining the foam iron in a muffle furnace. The preparation method further comprises the following steps: ultrasonically cleaning foamed iron sheets (10 multiplied by 0.25 mm) with the purity of 99.99 percent in ethanol and deionized water respectively, and then putting the cleaned foamed iron sheets into a muffle furnace for calcination; after calcining and sintering, naturally cooling to room temperature, and taking out the foam iron with bright red surface to obtain the alpha-Fe 2 O 3 A nanowire. The alpha-Fe 2 O 3 The length of the nanowire is 10-15 mu m, and the diameter is 100-130 nm.
FIG. 2 shows α -Fe according to an embodiment of the present invention 2 O 3 Scanning electron microscope schematic of nanowires. Providing the alpha-Fe 2 O 3 The nanowires were imaged at different magnifications.
Step S11, in the alpha-Fe 2 O 3 Depositing a ZnO seed crystal layer on the surface of the nanowire to form alpha-Fe 2 O 3 /ZnO core-shell nanowire. In one embodiment of the invention, the ZnO seed layer is deposited by adopting an atomic layer deposition method. In one embodiment of the invention, DEZ (diethyl zinc) is selected as the zinc source, deionized water is selected as the oxygen source, and the reaction temperature is set to be 180-220 ℃.
FIG. 3 is a schematic view of α -Fe according to an embodiment of the present invention 2 O 3 The scanning electron microscope schematic diagram of the ZnO core-shell nanowire provides the alpha-Fe 2 O 3 And the/ZnO core-shell nanowires are imaged under different magnification factors. In one embodiment of the present invention, the ZnO seed layer has a thickness of 20nm.
In one embodiment of the invention, a plurality is providedOf alpha-Fe 2 O 3 Nanowire, and finish step S11, deposit ZnO seed crystal layer; from the large amount of alpha-Fe formed 2 O 3 And selecting one of the/ZnO core-shell nanowires to perform subsequent electrode deposition and branching steps. The process of selecting further comprises: subjecting the alpha-Fe to 2 O 3 Dispersing the ZnO core-shell nanowire in ethanol, and performing ultrasonic treatment, centrifugation and concentration to form a solution; dropping the solution on a prepared label; observing the marked piece by an optical microscope to find out a proper alpha-Fe 2 O 3 ZnO nanowires and marks the location.
Step S12, for the alpha-Fe 2 O 3 And performing electrode deposition on the/ZnO nanowire to form a gas sensor precursor. In one embodiment of the present invention, the electrodeposition method employs a physical vapor deposition method. Electron beam lithography and physical vapor deposition of said alpha-Fe in place 2 O 3 The ZnO nanowire is overlapped with an electrode, the thickness of the electrode deposition is 10nm of a metal Cr layer and 70nm of a metal Au layer, and the single alpha-Fe is obtained after acetone stripping 2 O 3 /ZnO core-shell nanowire.
S13, carrying out treatment on alpha-Fe in the gas sensor precursor 2 O 3 The ZnO core-shell nanowire is branched to form single alpha-Fe 2 O 3 A gas sensor with ZnO nanowire structure with branched nanowire surface is disclosed. In a specific embodiment of the present invention, the branching method adopts a hydrothermal method, the precursor for hydrothermal growth is a mixed solution of zinc nitrate and hexamethylenetetramine HMT in an equal molar ratio of 6.25mmol/L, the growth temperature is 80 ℃, and the growth time is 5 hours. After the completion, the mixture is washed by deionized water and dried to obtain the alpha-Fe based on single root 2 O 3 A gas sensor with ZnO nanowire structure branched on the surface of nanowire.
FIG. 4 shows α -Fe according to an embodiment of the present invention 2 O 3 /ZnO core-shell nanowire device and alpha-Fe 2 O 3 Schematic scanning electron microscope diagram of ZnO nanowire structure with branched nanowire surface. Wherein, the graph a at the upper left corner is the alpha-Fe 2 O 3 A scanning electron microscope schematic diagram of the ZnO core-shell nanowire device; the diagram b-diagram d are the alpha-Fe 2 O 3 Schematic scanning electron microscope diagram of the nanowire surface branched ZnO nanowire structure under different magnifications.
After the steps are completed, the gas sensor of one embodiment of the invention can be obtained, and the gas sensor is based on single alpha-Fe 2 O 3 The surface of the nanowire is in a branched ZnO nanowire structure. In one embodiment of the invention, the single alpha-Fe is 2 O 3 The length of the ZnO nanowire with the branched surface of the nanowire is 3-4 mu m, and the diameter of the ZnO nanowire is 250nm. The trace concentration of the hydrogen sulfide gas can be accurately tested.
FIG. 5 shows α -Fe according to an embodiment of the present invention 2 O 3 ZnO nanowire and alpha-Fe with surface of nanowire being branched 2 O 3 Gas-sensitive response schematic diagram of/ZnO core-shell nanowire.
The upper left diagram a is alpha-Fe obtained by one embodiment of the invention 2 O 3 A gas-sensitive response diagram of the ZnO nanowire with the branched nanowire surface; the upper right-hand diagram b is the alpha-Fe 2 O 3 A dynamic response schematic diagram of the ZnO nanowire with the branched surface at the temperature of 300 ℃ and the concentration of 5 ppm; the lower left corner of the graph c is alpha-Fe 2 O 3 The ZnO core-shell nanowire has a dynamic response schematic diagram at the temperature of 300 ℃ and the concentration of 5 ppm; the lower right hand diagram d is α -Fe 2 O 3 The selectivity diagram of the nanowire surface branched ZnO nanowire to five gas responses comprises the following steps: hydrogen sulfide (H) 2 S), ammonia (NH) 3 ) Acetone (CH) 3 OCH 3 ) Nitrogen dioxide (NO) 2 ) And methane (CH) 4 )。
Than alpha-Fe alone 2 O 3 Nanowire structures, the present invention utilizes n-type semiconductor alpha-Fe 2 O 3 And ZnO, thereby utilizing the synergistic effect between the composite heterogeneous structures and finally improving the gas sensitivity.
alpha-Fe grown by the invention 2 O 3 The nano-wire has high specific surface area, and the ZnO nano-wire is branched on the basis of the high specific surface area, so that the ratio of the material is further improvedThe surface area further improves the adsorption capacity for gas. The method for grafting the core-shell nanowire with the electrode and then branching the nanowire is adopted, the advantages of the powder nanostructure and the advantages of the single nanostructure are combined, and the difficulty that the electrode is easily punctured when the electrode is lapped on a complex structure is overcome. The preparation process has strong repeatability and high yield, and is beneficial to large-scale preparation. Based on a single alpha-Fe 2 O 3 The ZnO nanowire structure with the branched nanowire surface can effectively improve H of the gas sensor 2 S gas response, and has the advantages of being beneficial to small-size integration, high in specific surface area, excellent in stability and the like, and the sensitivity to gas is improved.
An example of the above technical solution is given below with reference to a specific process scenario.
(1) Calcining the cleaned and ultrasonic foamed iron in a muffle furnace, naturally cooling to room temperature after calcining, and taking out the foamed iron with bright red surface to obtain the alpha-Fe 2 O 3 A nanowire.
(2) Will carry alpha-Fe 2 O 3 Atomic layer deposition system of foam iron of nanowire on each alpha-Fe 2 O 3 And a ZnO film is deposited on the surface of the nanowire, so that a seed crystal layer is provided for the subsequent branching of the nanowire.
(3) Will carry alpha-Fe 2 O 3 Putting the foam iron of the ZnO core-shell nanowire into ethanol, and performing ultrasonic treatment, centrifugation and concentration to obtain the nano-iron with alpha-Fe 2 O 3 A light red ethanol solution of ZnO core-shell nanowires.
(4) Will carry alpha-Fe 2 O 3 1-2 drops of ethanol solution of the ZnO core-shell nanowire are dropped on a mark sheet prepared in advance, the mark sheet is gently shaken to enable the drops to be distributed on the whole mark sheet, and the mark sheet is placed on a hot plate for waiting for ethanol volatilization.
(5) Will carry alpha-Fe 2 O 3 The marking piece of the/ZnO nuclear shell nanowire observes the distribution of the nanowire on the marking piece by using an optical microscope, selects a proper nanowire and records the marking position.
(6) Making plate and drawing on computer, and selecting alpha-Fe under optical microscope 2 O 3 ZnO core-shellThe nanowires are drawn as electrodes.
(7) With alpha-Fe 2 O 3 Coating glue on the surface of a marking sheet of the ZnO core-shell nanowire, prebaking, electron beam Exposure (EBL), developing and fixing.
(8) The surface of the marking piece is stripped by acetone after chromium/gold is deposited on the surface of the marking piece by a physical vapor deposition system (PVD), and the photoetching and electrode growth effects are observed under an optical microscope.
(9) The marking sheet is processed by a hydrothermal method to branch a zinc oxide nanowire structure, and then is washed by deionized water and dried to obtain the single-root alpha-Fe-based nano-wire structure 2 O 3 A ZnO nanowire structure gas sensor with the surface of a nanowire being branched.
By utilizing the characteristic that ALD uniformly deposits on the surface with the high aspect ratio, the concentration of the solution dripped on the marking sheet is not too high as much as possible, and the solution is judged to be light red. Dripping 1-2 drops of solution on the marking sheet, otherwise, the nanowire is adhered after being branched at the later stage; PVD deposits chrome/gold to the surface of the marked piece to a thickness of 10/70nm. The precursor for hydrothermal growth is a mixed solution of zinc nitrate and hexamethylenetetramine HMT in an equal molar ratio of 6.25mmol/L, the growth temperature is 80, and the growth time is 5 hours.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (5)
1. A preparation method of a gas sensor is characterized by comprising the following steps:
providing an alpha-Fe 2 O 3 A nanowire;
in the alpha-Fe 2 O 3 Depositing a ZnO seed crystal layer on the surface of the nanowire to form alpha-Fe 2 O 3 ZnO core-shell nanowire;
subjecting the alpha-Fe to electron beam lithography and physical vapor deposition 2 O 3 Performing electrode deposition on the ZnO nanowire to form a gas-sensitive sensor precursor, wherein the thickness of the electrode deposition is 10nm of that of the metal Cr layerThe metal Au layer is 70nm, and single alpha-Fe is obtained after acetone stripping 2 O 3 ZnO core-shell nanowire;
for alpha-Fe in the gas sensor precursor 2 O 3 The ZnO core-shell nanowire is branched to form single-root alpha-Fe 2 O 3 The gas sensor with the ZnO nanowire structure branched on the surface of the nanowire adopts a hydrothermal method, the hydrothermal growth precursor is a mixed solution of zinc nitrate and hexamethylenetetramine HMT with the equal molar ratio of 6.25mmol/L, the growth temperature is 80 ℃, and the growth time is 5 hours.
2. The method of claim 1, wherein the α -Fe is 2 O 3 The nanowires are prepared by calcining the foam iron in a muffle furnace.
3. The method of claim 1, wherein the depositing the ZnO seed layer comprises atomic layer deposition.
4. The gas sensor is characterized in that the gas sensor is based on single alpha-Fe 2 O 3 The surface of the nanowire is in a branched ZnO nanowire structure.
5. The gas sensor of claim 4, wherein the single root is α -Fe 2 O 3 The length of the ZnO nanowire with the branched surface of the nanowire is 3-4 mu m, and the diameter of the ZnO nanowire is 250nm.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011581380.4A CN112763549B (en) | 2020-12-28 | 2020-12-28 | Preparation method of gas sensor and gas sensor |
| PCT/CN2020/141323 WO2022141173A1 (en) | 2020-12-28 | 2020-12-30 | Manufacturing method for gas sensor and gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011581380.4A CN112763549B (en) | 2020-12-28 | 2020-12-28 | Preparation method of gas sensor and gas sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112763549A CN112763549A (en) | 2021-05-07 |
| CN112763549B true CN112763549B (en) | 2022-11-25 |
Family
ID=75696252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011581380.4A Active CN112763549B (en) | 2020-12-28 | 2020-12-28 | Preparation method of gas sensor and gas sensor |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN112763549B (en) |
| WO (1) | WO2022141173A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114047230A (en) * | 2021-10-15 | 2022-02-15 | 光华临港工程应用技术研发(上海)有限公司 | Gas-sensitive nanomaterial with branched nanowire structure, preparation method and application thereof |
| CN114988457B (en) * | 2022-06-27 | 2023-06-23 | 上海复纯环保科技有限公司 | Based on alpha-Fe 2 O 3 Microporous nanomaterial of nano wire heteroepitaxy ZnO@ZIF-8, preparation process and application |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050167646A1 (en) * | 2004-02-04 | 2005-08-04 | Yissum Research Development Company Of The Hebrew University Of Jerusalem | Nanosubstrate with conductive zone and method for its selective preparation |
| KR100812357B1 (en) * | 2005-12-23 | 2008-03-11 | 한국과학기술연구원 | Ultra-sensitive metal oxide gas sensor and fbrication method thereof |
| US8263002B1 (en) * | 2008-05-16 | 2012-09-11 | University Of Central Florida Research Foundation, Inc. | Fabrication of ZnO nanorod-based hydrogen gas nanosensor |
| CN101830509B (en) * | 2010-05-20 | 2012-01-11 | 武汉理工大学 | Beta-AgVO3 nanowire hydrogen sulfide gas sensing material and method for manufacturing gas sensor by using same |
| CN103337469B (en) * | 2013-06-15 | 2015-10-28 | 复旦大学 | The system and method for a kind of in-situ deposition barrier layer and inculating crystal layer |
| KR101621021B1 (en) * | 2014-11-28 | 2016-05-24 | 인하대학교 산학협력단 | Sensor having core-shell nanowire and preparing method of the same |
| CN106970117B (en) * | 2017-03-27 | 2019-11-12 | 东北大学 | A kind of NO based on electrode surface growth in situ nano-ZnO2Sensor |
| CN110589875B (en) * | 2019-09-17 | 2021-10-26 | 复旦大学 | Gas-sensitive nano material based on single-layer ordered tin oxide nano bowl branched zinc oxide nanowire structure, preparation process and application thereof |
| CN111285409A (en) * | 2020-02-20 | 2020-06-16 | 复旦大学 | Gas-sensitive nanomaterial based on single-layer ordered tin oxide nanometer bowl branched iron oxide nanorod structure, preparation process and application thereof |
-
2020
- 2020-12-28 CN CN202011581380.4A patent/CN112763549B/en active Active
- 2020-12-30 WO PCT/CN2020/141323 patent/WO2022141173A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN112763549A (en) | 2021-05-07 |
| WO2022141173A1 (en) | 2022-07-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112763549B (en) | Preparation method of gas sensor and gas sensor | |
| Karnati et al. | Conduction mechanisms in one dimensional core-shell nanostructures for gas sensing: A review | |
| Wang et al. | Core-double shell ZnO@ In2O3@ ZnO hollow microspheres for superior ethanol gas sensing | |
| Chen et al. | Chemical sensors and electronic noses based on 1-D metal oxide nanostructures | |
| Huang et al. | Gas sensors based on semiconducting metal oxide one-dimensional nanostructures | |
| Kim et al. | Tailoring the surface area of ZnO nanorods for improved performance in glucose sensors | |
| Zheng et al. | Nanowire biosensors for label-free, real-time, ultrasensitive protein detection | |
| CN110589875B (en) | Gas-sensitive nano material based on single-layer ordered tin oxide nano bowl branched zinc oxide nanowire structure, preparation process and application thereof | |
| Tiwale | Zinc oxide nanowire gas sensors: fabrication, functionalisation and devices | |
| CN104332513B (en) | A kind of NiO nanowire ultraviolet light detector and preparation method and application | |
| US20230184710A1 (en) | Nonenzymatic biosensor based on metal-modified porous boron-doped diamond electrode, and method for preparing same and use thereof | |
| JP2012247189A (en) | Graphene sensor, substance species analyzer using sensor, and method for detecting substance species using sensor | |
| US8324703B2 (en) | Approach to contacting nanowire arrays using nanoparticles | |
| Cao et al. | Hedgehog-like Bi 2 S 3 nanostructures: a novel composite soft template route to the synthesis and sensitive electrochemical immunoassay of the liver cancer biomarker | |
| Navarrete et al. | WO3 nanowires loaded with cobalt oxide nanoparticles, deposited by a two-step AACVD for gas sensing applications | |
| Choi et al. | Ultraviolet photoactivated room temperature NO2 gas sensor of ZnO hemitubes and nanotubes covered with TiO2 nanoparticles | |
| KR20120039232A (en) | Hydrogen gas sensor using carbon nanotube sheet and its fabrication method | |
| Song et al. | Porous Cr2O3 architecture assembled by nano-sized cylinders/ellipsoids for enhanced sensing to trace H2S gas | |
| Li et al. | Strain control of a no gas sensor based on Ga-doped ZnO epilayers | |
| Annanouch et al. | p-Type PdO nanoparticles supported on n-type WO3 nanoneedles for hydrogen sensing | |
| Su et al. | Tin dioxide functionalized single-walled carbon nanotube (SnO2/SWNT)-based ammonia gas sensors and their sensing mechanism | |
| Tang et al. | Enhanced organic gas sensor based on Cerium-and Au-doped ZnO nanowires via low temperature one-pot synthesis | |
| Pan et al. | MOF-templated synthesis of cobalt-doped zinc oxide superparticles for detection of the 3-hydroxy-2-butanone microbial biomarker | |
| Dwivedi et al. | Near Room Temperature Sensing by In₂O₃ Decorated Silicon Nanowires for Sensitive Detection of Ethanol | |
| Krishan et al. | Development of Nitride-Sensors for Monitoring in Control Systems |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |