CN112748153B - Method and device for measuring electrical characteristics by amplitude modulation electrostatic force microscopy - Google Patents
Method and device for measuring electrical characteristics by amplitude modulation electrostatic force microscopy Download PDFInfo
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Abstract
The amplitude modulation alternating voltage is used as excitation voltage and comprises modulation signals and carrier signals, the adjustable range of the frequency of the carrier signals is large, namely, the excitation voltage with different frequencies can be applied to the probe, so that the electrical characteristics of the sample under different excitation frequencies can be obtained, namely, the electrical characteristics of the obtained sample are more comprehensive.
Description
Technical Field
The disclosed embodiments relate to the field of scanning probe technology, and more particularly, to a method and apparatus for measuring electrical characteristics using amplitude modulated electrostatic force microscopy.
Background
With the development of science and technology, various novel materials emerge, and in order to obtain the electrical characteristics of various materials, electrostatic force microscopy is required to determine the electrical characteristics of various materials. For example, information about the type of carriers and the concentration of carriers in a semiconductor sample.
There are many prior art Electrostatic Force Microscopy techniques, such as Kelvin Microscopy (SKPM), double Bias modulated Electrostatic Force Microscopy (Dual Bias Modulation Electrostatic Force Microscopy), higher order resonance Electrostatic Force Microscopy (MH-EFM), and the like.
These techniques can determine the appearance and electrical properties of a sample by two scans, for example, a first scan can obtain the appearance of the sample and a second scan can obtain the electrical properties of the sample. In the process of obtaining the electrical characteristics of the sample, a direct current voltage and/or an alternating current voltage is generally applied to the probe, and the influence of the electrostatic force between the probe and the sample on the vibration amplitude and frequency of the probe is analyzed to obtain the electrical characteristics of the sample.
Disclosure of Invention
This disclosure is provided to introduce concepts in a simplified form that are further described below in the detailed description. This disclosure is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.
The embodiment of the disclosure provides a method and a device for measuring electrical characteristics by amplitude modulation electrostatic force microscopy, which can obtain the electrical characteristics of a sample under different excitation frequencies, so that the electrical characteristics of the obtained sample are more comprehensive.
In a first aspect, embodiments of the present disclosure provide a method for measuring an electrical property by amplitude modulation electrostatic force microscopy, including: applying an amplitude modulated alternating voltage to the probe in response to detecting an inspection instruction for an electrical characteristic of the sample, wherein the amplitude modulated alternating voltage comprises a modulation signal and a carrier signal, and the electrical characteristic comprises at least any one of: carrier concentration, conductivity, dielectric constant; determining an electrical characteristic of the sample based on the amplitude and phase of the probe at a predetermined frequency of the modulated signal.
With reference to an embodiment of the first aspect, in some embodiments, the preset frequency is equal to 2 times a frequency of the modulation signal.
With reference to the embodiments of the first aspect, in some embodiments, the determining the electrical characteristic of the sample based on the amplitude and the phase of the probe at the preset frequency of the modulation signal includes: determining the electrostatic force to which the probe is subjected at a predetermined frequency of the modulation signal; determining an electrical characteristic of the sample based on the electrostatic force and the predetermined frequency.
With reference to the embodiments of the first aspect, in some embodiments, the determining the electrical characteristic of the sample based on the electrostatic force and the predetermined frequency includes: determining a complex capacitance gradient between said probe and said sample based on said electrostatic force and said predetermined frequency; determining the local impedance of the sample according to the complex capacitance gradient; based on the local impedance, the electrical characteristics of the sample are determined.
With reference to embodiments of the first aspect, in some embodiments, the frequency of the modulation signal is determined by: acquiring the resonance frequency of the probe; and determining the frequency of the modulation signal according to the resonance frequency of the probe.
With reference to an embodiment of the first aspect, in some embodiments, determining the frequency of the modulation signal according to the resonant frequency of the sample includes: and determining the 1/2 resonance frequency of the probe as the frequency of the modulation signal.
With reference to an embodiment of the first aspect, in some embodiments, the acquiring a resonant frequency of the sample includes: and determining the 1/2 first-order resonance frequency of the probe as the frequency of the modulation signal.
In a second aspect, embodiments of the present disclosure provide an apparatus for measuring electrical properties by amplitude modulation electrostatic force microscopy, comprising: an applying unit, configured to apply an amplitude modulation alternating voltage to the probe in response to detecting an inspection instruction for an electrical characteristic of the sample, where the amplitude modulation alternating voltage includes a modulation signal and a carrier signal, and the electrical characteristic includes at least any one of: carrier concentration, conductivity, dielectric constant; a first determining unit for determining the electrical characteristics of the sample based on the amplitude and phase of the probe at a predetermined frequency of the modulation signal.
With reference to the second aspect, in some embodiments, the preset frequency is equal to 2 times the frequency of the modulation signal.
With reference to the embodiment of the second aspect, in some embodiments, the first determining unit is further specifically configured to: determining the electrostatic force to which the probe is subjected at a predetermined frequency of the modulation signal; determining an electrical characteristic of the sample based on the electrostatic force and the predetermined frequency.
With reference to the embodiment of the second aspect, in some embodiments, the first determining unit is further specifically configured to: determining a complex capacitance gradient between said probe and said sample based on said electrostatic force and said predetermined frequency; determining the local impedance of the sample according to the complex capacitance gradient; based on the local impedance, an electrical characteristic of the sample is determined.
With reference to the embodiments of the second aspect, in some embodiments, the apparatus further includes a second determining unit, where the second determining unit is configured to: acquiring the resonance frequency of the probe; and determining the frequency of the modulation signal according to the resonance frequency of the probe.
With reference to the embodiment of the second aspect, in some embodiments, the second determining unit is further specifically configured to: and determining the 1/2 resonance frequency of the probe as the frequency of the modulation signal.
With reference to the embodiment of the second aspect, in some embodiments, the second determining unit is further specifically configured to: and determining the 1/2 first-order resonance frequency of the probe as the frequency of the modulation signal.
In a third aspect, an embodiment of the present disclosure provides an electronic device, including: one or more processors; a storage device for storing one or more programs which, when executed by the one or more processors, cause the one or more processors to implement the method for measuring electrical characteristics by amplitude modulated electrostatic force microscopy as described above in the first aspect.
In a fourth aspect, embodiments of the present disclosure provide a computer readable medium, on which a computer program is stored, which program, when being executed by a processor, realizes the steps of the method for measuring electrical characteristics by amplitude modulated electrostatic force microscopy as described above in the first aspect.
According to the method and the device for measuring the electrical characteristics by the amplitude modulation electrostatic force microscopy, the amplitude modulation alternating voltage is used as the excitation voltage and comprises the modulation signal and the carrier signal, the adjustable range of the frequency of the carrier signal is large, namely, the excitation voltage with different frequencies can be applied to the probe, so that the electrical characteristics of samples under different excitation frequencies can be obtained, and the electrical characteristics of the obtained samples can be more comprehensive.
Drawings
The above and other features, advantages and aspects of various embodiments of the present disclosure will become more apparent by referring to the following detailed description when taken in conjunction with the accompanying drawings. Throughout the drawings, the same or similar reference numbers refer to the same or similar elements. It should be understood that the drawings are schematic and that elements and features are not necessarily drawn to scale.
FIG. 1 is a flow chart of one embodiment of a method of measuring electrical properties according to amplitude modulated electrostatic force microscopy of the present disclosure;
FIG. 2 is a circuit schematic of one embodiment of a method of measuring an electrical property according to amplitude modulated electrostatic force microscopy of the present disclosure;
FIG. 3 is a model schematic of one embodiment of a method of measuring electrical properties by amplitude modulated electrostatic force microscopy of the present disclosure.
Fig. 4 is a schematic connection diagram of the apparatus for measuring electrical characteristics of amplitude modulated electrostatic force microscopy of the present disclosure.
Detailed Description
Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While certain embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be construed as limited to the embodiments set forth herein, but rather are provided for a more complete and thorough understanding of the present disclosure. It should be understood that the drawings and embodiments of the disclosure are for illustration purposes only and are not intended to limit the scope of the disclosure.
It should be understood that the various steps recited in the method embodiments of the present disclosure may be performed in a different order, and/or performed in parallel. Moreover, method embodiments may include additional steps and/or omit performing the illustrated steps. The scope of the present disclosure is not limited in this respect.
The term "include" and variations thereof as used herein are open-ended, i.e., "including but not limited to". The term "based on" is "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Relevant definitions for other terms will be given in the following description.
It should be noted that the terms "first", "second", and the like in the present disclosure are only used for distinguishing different devices, modules or units, and are not used for limiting the order or interdependence relationship of the functions performed by the devices, modules or units.
It is noted that references to "a", "an", and "the" modifications in this disclosure are intended to be illustrative rather than limiting, and that those skilled in the art will recognize that "one or more" may be used unless the context clearly dictates otherwise.
The names of messages or information exchanged between devices in the embodiments of the present disclosure are for illustrative purposes only, and are not intended to limit the scope of the messages or information.
Referring to fig. 1, a flow diagram of one embodiment of a method of measuring electrical properties according to amplitude modulated electrostatic force microscopy of the present disclosure is shown. The execution subject of the method for measuring electrical characteristics by amplitude modulation electrostatic force microscopy can be a terminal device and/or a server, as shown in fig. 1, and the method for measuring electrical characteristics by amplitude modulation electrostatic force microscopy comprises the following steps:
in response to detecting an inspection instruction for the electrical characteristics of the sample, an amplitude modulated alternating voltage is applied to the probe, step 101.
Here, the amplitude-modulated alternating voltage includes a modulation signal and a carrier signal.
Here, the electrical characteristics include at least any one of: carrier concentration, conductivity, dielectric constant, etc.
In some embodiments, the amplitude modulated alternating voltage applied to the probe may be understood as an electrical stimulus such that an alternating potential difference exists between the probe and the sample. As an example, the probe may be placed over the sample, and when an amplitude modulated ac voltage is applied to the probe, an ac potential difference may exist between the probe and the sample.
In some embodiments, the probe may be placed 50 nanometers above the sample.
In some embodiments, the amplitude modulated ac voltage may include a modulation signal and a carrier signal, and the probe may be understood as a low-pass filter, that is, the frequency of the carrier signal may be set to be high without affecting the vibration condition of the probe, so that the electrical characteristics of the sample at different carrier frequencies can be obtained.
For example, the frequency of the carrier signal can be selected reasonably according to practical application scenarios, for example, the frequency of the carrier signal can be selected from 100KHz to 20GHz, so that the electrical characteristics of the sample under the wide-frequency electrostatic field can be obtained.
In some embodiments, certain electrical properties of the sample (e.g., capacitive properties of the sample) are dependent on the frequency of the excitation voltage at the time of probing. When the low-frequency electric field excites the sample, the charge-discharge energy of the capacitance dielectric layer between the probe tip and the sample follows the change of excitation frequency, so that the quasi-static characteristic of the sample can be obtained when the low-frequency voltage is used as the excitation source of the probe to detect the sample. When the high-frequency voltage is used as an excitation source of the probe to detect the sample, the charge and discharge of a capacitance dielectric layer between the probe tip and the sample cannot follow the change of the excitation frequency, and the dynamic performance of the sample can be obtained at the moment. In other words, the frequency of the excitation voltage to be detected may be varied widely in order to obtain a more comprehensive and accurate understanding of the electrical characteristics of the sample.
In the embodiment of the disclosure, since the amplitude modulation alternating voltage is used as the excitation voltage, and the amplitude modulation alternating voltage includes the modulation signal and the carrier signal, when the local electrical signal of the sample at a certain frequency needs to be obtained, only the frequency of the carrier signal needs to be adjusted. As an example, when the electrical characteristics of the sample under the high-frequency electrostatic field need to be analyzed, the frequency of the carrier signal may be adjusted to a corresponding high frequency.
In some embodiments, a lock-in amplifier may be used to extract the amplitude and phase of the probe at a preset frequency.
It should be noted that there are many ways to obtain the electrical characteristics of the sample by analyzing the amplitude and phase of the probe at the predetermined frequency; the method for obtaining the electrical characteristics of the sample through the amplitude and the phase under the preset frequency is not limited, and the method only needs to be reasonably selected according to actual conditions. As an example, the amplitude and phase can be visualized using computer programming and then analyzed by computer software to obtain the electrical properties of the sample.
It can be seen that, in the embodiment of the present disclosure, since the amplitude modulation ac voltage is used as the excitation voltage, and the amplitude modulation ac voltage includes the modulation signal and the carrier signal, and the adjustable range of the frequency of the carrier signal is large, that is, the excitation voltages with different frequencies can be applied to the probe, so that the electrical characteristics of the sample under different excitation frequencies can be obtained, that is, the electrical characteristics of the obtained sample can be more comprehensive.
In some embodiments, the amplitude modulated alternating voltage may be characterized by a formula, by way of example, V (ω) mod ,ω carrier )＝V 0 cos(ω mod t)cos(ω carrier t); and V (omega) mod ,ω carrier ) It can be understood that the amplitude modulates the AC voltage (i.e., the voltage output to the probe), and V 0 Can be understood as amplitude, ω mod Can be understood as the frequency of the modulated signal, and ω carrier Which may be understood as the frequency of the carrier signal.
In some embodiments, the preset frequency may be equal to 2 times the frequency of the modulation signal.
In some embodiments, step 102 (determining the electrical properties of the sample based on the amplitude and phase of the probe at the predetermined frequency of the modulation signal) may specifically include: determining the electrostatic force to which the probe is subjected at the preset frequency of the modulation signal; based on the electrostatic force and the preset frequency, the electrical properties of the sample are determined.
In some embodiments, the probe vibrates when subjected to electrostatic forces, and the electrical properties of the sample can be determined by analyzing the amplitude and phase of the vibration of the probe.
In some embodiments, a complex capacitance gradient between the probe and the sample is determined based on the electrostatic force and a preset frequency; determining the local impedance of the sample according to the complex capacitance gradient; based on the local impedance, the electrical properties of the sample are determined.
To better understand the idea provided by the present application, the following examples are given, for example, when the amplitude modulated ac voltage is equal to V (ω) mod ,ω carrier )＝V 0 cos(ω mod t)cos(ω carrier t), the expression for the electrostatic force between the probe and the sample can be as follows:
in this connection, it is possible to use,
can be understood as the local impedance, F, of the sample es Which may be understood as the electrostatic force between the probe and the sample.
In some embodiments, the probe resembles a low pass filter and does not respond to high band vibrations. That is, in the actual measurement, ω mod (frequency of the modulated signal) is generally low, and ω is carrier (frequency of carrier signal) is generally high, i.e., 2 ω carrier 、2ω carrier +2ω mod 、2ω carrier -2ω mod The vibration of the probe is not affected. In this way, high-frequency alternating voltage can be applied to the probe, and the vibration of the probe is not influenced by the application of the high-frequency alternating voltage.
For easy understanding, please refer to fig. 2, fig. 2 is a schematic connection diagram of the sample electrical characteristic determination apparatus of the present disclosure, and as can be seen from fig. 2, the signal generator is used for generating the amplitude modulation alternating voltage V (ω) mod ,ω carrier ) (ii) a The signal generator modulates the amplitude of the AC voltage V (omega) mod ,ω carrier ) To the probe 201. And the base 203 may be used to place the sample and grounded so that the sample is at an alternating potential difference with the probe 201. The laser generator 202 may be used to emit a laser beam to the back of the probe, where the reflected laser beam is received by the photodiode 204. Here, the signal received by the photodiode 204 is transmitted to the lock-in amplifier, and the lock-in amplifier can determine the amplitude and phase of the probe at a specific frequency according to the detection result of the photodetector (in this example, the mechanical resonance frequency of the probe is detected during the topography scan; and 2 ω is detected during the second electrical property scan) mod And the frequency of (d) and transmitting the results to a signal generator for analysis, whereby the electrical properties of the sample can be obtained.
In some embodiments, the specific model of the signal generator may be: KEYSIGHT33522B signal generator.
In some embodiments, to facilitate the analysis of local impedance, the probe and the substrate (the plane where the sample is placed) can be considered as two electrodes, and the spatial layer between the probe and the sample can be considered as a capacitor C, as shown in FIG. 3 air And the sample can be regarded as a capacitor C s And a resistor R s In a parallel form. That is, the simplified model shown in FIG. 3 can be used to obtain the electrical characteristics (e.g., local carrier concentration, doping characteristics, conductivity, etc.) of the sample.
In some embodiments, to facilitate amplification and extraction of the minute signals; in other words, for better detecting the vibration condition of the probe, the resonant frequency ω of the probe can be obtained first r And the frequency of the modulation signal can be determined as half of the resonant frequency; i.e. omega mod Can be equal to
Corresponding, 2 ω mod It is understood that the resonance frequency of the probe, i.e. the predetermined frequency, is the resonance frequency of the probe at which the vibration of the probe is most pronounced and therefore the frequency of the modulation signal isThe rate is determined to be half of the resonance frequency, so that the vibration condition of the probe can be conveniently acquired.
For ease of understanding, further illustration is made: when omega carrier ＝1GHz，
Then 2 ω can be extracted from the probe vibration mod 2, 2 ω extracted from the signal of (c) mod The signal of (2) can then be used to analyze the probe at 2 ω carrier Amplitude and phase at high frequency electric field (i.e. 2 GHz). And the amplitude and the phase of the probe can determine that the sample is at 2 omega carrier (i.e., 2 GHz) electric characteristics under a high-frequency electric field. That is, in the above manner, the electrical characteristics of the sample under the high-frequency electric field can be obtained
That is, in some embodiments, the frequency of the modulated signal may be determined by:
acquiring the resonance frequency of the probe; the frequency of the modulation signal is determined from the resonant frequency of the probe.
In some embodiments, there are many ways to acquire the probe resonance frequency, and for the simplicity of the description, the specific way to acquire the probe resonance frequency is not limited herein, and only needs to be set reasonably according to the actual situation.
In some embodiments, the 1/2 mechanical resonance frequency of the probe may be determined as the frequency of the modulation signal.
In some embodiments, the probe may have a first order mechanical resonance frequency, a second order mechanical resonance frequency, a third order mechanical resonance frequency, and the like, and the specific selected several orders of the mechanical resonance frequencies of the sample may be set according to actual needs.
In some embodiments, the 1/2 first order mechanical resonance frequency of the probe may be determined as the frequency of the modulation signal. The first order resonance frequency of the sample is lower than the second order mechanical resonance frequency of the sample, so that the frequency of the modulation signal does not need to have higher frequency.
With further reference to fig. 4, as an implementation of the methods illustrated in the above figures, the present disclosure provides an apparatus for amplitude modulated electrostatic force microscopy measurement of electrical properties, which corresponds to the method embodiment illustrated in fig. 1, and which may be applied in various electronic devices in particular.
As shown in fig. 4, the apparatus for measuring electrical characteristics by amplitude modulation electrostatic force microscopy of the present embodiment includes: an applying unit 401, configured to apply an amplitude modulation alternating voltage to the probe in response to detecting an inspection instruction for an electrical characteristic of the sample, where the amplitude modulation alternating voltage includes a modulation signal and a carrier signal, and the electrical characteristic includes at least any one of: carrier concentration, conductivity, dielectric constant; a first determining unit 402 for determining the electrical characteristics of the sample based on the amplitude and phase of the probe at a predetermined frequency of the modulation signal.
In some optional embodiments, the preset frequency is equal to 2 times the frequency of the modulation signal.
In some optional embodiments, the first determining unit 402 is further specifically configured to: determining the electrostatic force to which the probe is subjected at a predetermined frequency of the modulation signal; determining an electrical characteristic of the sample based on the electrostatic force and the predetermined frequency.
In some optional embodiments, the first determining unit 402 is further specifically configured to: determining a complex capacitance gradient between said probe and said sample based on said electrostatic force and said predetermined frequency; determining the local impedance of the sample according to the complex capacitance gradient; based on the local impedance, an electrical characteristic of the sample is determined.
In some optional embodiments, the apparatus further includes a second determining unit 403, where the second determining unit is configured to: acquiring the resonance frequency of the probe; and determining the frequency of the modulation signal according to the resonance frequency of the probe.
In some optional embodiments, the second determining unit 403 is further specifically configured to: and determining the 1/2 resonance frequency of the probe as the frequency of the modulation signal.
In some optional embodiments, the second determining unit 403 is further specifically configured to: and determining the 1/2 first-order resonance frequency of the probe as the frequency of the modulation signal.
It should be noted that the computer readable medium of the present disclosure can be a computer readable signal medium or a computer readable storage medium or any combination of the two. A computer readable storage medium may be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination of the foregoing. More specific examples of the computer readable storage medium may include, but are not limited to: an electrical connection having one or more wires, a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing. In the present disclosure, a computer readable storage medium may be any tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device. In contrast, in the present disclosure, a computer readable signal medium may comprise a propagated data signal with computer readable program code embodied therein, either in baseband or as part of a carrier wave. Such a propagated data signal may take many forms, including, but not limited to, electro-magnetic, optical, or any suitable combination thereof. A computer readable signal medium may also be any computer readable medium that is not a computer readable storage medium and that can communicate, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device. Program code embodied on a computer readable medium may be transmitted using any appropriate medium, including but not limited to: electrical wires, optical cables, RF (radio frequency), etc., or any suitable combination of the foregoing.
In some embodiments, the clients, servers may communicate using any currently known or future developed network Protocol, such as HTTP (HyperText Transfer Protocol), and may interconnect with any form or medium of digital data communication (e.g., a communications network). Examples of communication networks include a local area network ("LAN"), a wide area network ("WAN"), the Internet (e.g., the Internet), and peer-to-peer networks (e.g., ad hoc peer-to-peer networks), as well as any currently known or future developed network.
The computer readable medium may be embodied in the electronic device; or may exist separately without being assembled into the electronic device.
The computer readable medium carries one or more programs which, when executed by the electronic device, cause the electronic device to: applying an amplitude modulated alternating voltage to the probe in response to detecting an inspection instruction for an electrical characteristic of the sample, wherein the amplitude modulated alternating voltage comprises a modulation signal and a carrier signal, and the electrical characteristic comprises at least any one of: carrier concentration, conductivity, dielectric constant; determining an electrical characteristic of the sample based on the amplitude and phase of the probe at a predetermined frequency of the modulation signal.
Computer program code for carrying out operations for the present disclosure may be written in any combination of one or more programming languages, including but not limited to an object oriented programming language such as Java, smalltalk, C + +, and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The program code may execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer and partly on a remote computer or entirely on the remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a Local Area Network (LAN) or a Wide Area Network (WAN), or the connection may be made to an external computer (for example, through the Internet using an Internet service provider).
The flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present disclosure. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.
The units described in the embodiments of the present disclosure may be implemented by software or hardware. Where the name of a cell does not in some cases constitute a limitation of the cell itself, for example, the applying unit 401 may also be described as a "cell applying an amplitude modulated alternating voltage to the probe".
The functions described herein above may be performed, at least in part, by one or more hardware logic components. For example, without limitation, exemplary types of hardware logic components that may be used include: field Programmable Gate Arrays (FPGAs), application Specific Integrated Circuits (ASICs), application Specific Standard Products (ASSPs), systems on a chip (SOCs), complex Programmable Logic Devices (CPLDs), and the like.
In the context of this disclosure, a machine-readable medium may be a tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device. The machine-readable medium may be a machine-readable signal medium or a machine-readable storage medium. A machine-readable medium may include, but is not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any suitable combination of the foregoing. More specific examples of a machine-readable storage medium would include an electrical connection based on one or more wires, a portable computer diskette, a hard disk, a Random Access Memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.
The foregoing description is only exemplary of the preferred embodiments of the disclosure and is illustrative of the principles of the technology employed. It will be appreciated by those skilled in the art that the scope of the disclosure herein is not limited to the particular combination of features described above, but also encompasses other embodiments in which any combination of the features described above or their equivalents does not depart from the spirit of the disclosure. For example, the above features and (but not limited to) the features disclosed in this disclosure having similar functions are replaced with each other to form the technical solution.
Further, while operations are depicted in a particular order, this should not be understood as requiring that such operations be performed in the particular order shown or in sequential order. Under certain circumstances, multitasking and parallel processing may be advantageous. Likewise, while several specific implementation details are included in the above discussion, these should not be construed as limitations on the scope of the disclosure. Certain features that are described in the context of separate embodiments can also be implemented in combination in a single embodiment. Conversely, various features that are described in the context of a single embodiment can also be implemented in multiple embodiments separately or in any suitable subcombination.
Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are disclosed as example forms of implementing the claims.
Claims (4)
1. A method of measuring electrical properties using amplitude modulated electrostatic force microscopy, comprising:
applying an amplitude modulated alternating voltage to the probe in response to detecting an inspection instruction for an electrical characteristic of the sample, wherein the amplitude modulated alternating voltage comprises a modulation signal, a carrier signal, the electrical characteristic comprising at least any one of: carrier concentration, conductivity, dielectric constant;
determining electrical characteristics of the sample based on the amplitude and phase of the modulation signal at a predetermined frequency of the probe;
wherein the preset frequency is equal to 2 times of the frequency of the modulation signal; and (c) a second step of,
determining a 1/2 resonance frequency of the probe as a frequency of the modulation signal;
wherein said determining electrical characteristics of said sample based on amplitude and phase of said modulation signal at a predetermined frequency comprises: determining the electrostatic force to which the probe is subjected at a preset frequency of the modulation signal; determining an electrical characteristic of the sample based on the electrostatic force and the preset frequency;
wherein said determining an electrical characteristic of said sample based on said electrostatic force and said preset frequency comprises: determining a complex capacitance gradient between the probe and the sample according to the electrostatic force and the preset frequency; determining the local impedance of the sample according to the complex capacitance gradient; determining an electrical characteristic of the sample based on the local impedance;
wherein the frequency of the modulation signal is determined by:
acquiring the resonance frequency of the probe; determining the frequency of the modulation signal according to the resonance frequency of the probe;
wherein said obtaining a resonant frequency of said sample comprises: determining a 1/2 first order resonance frequency of the probe as a frequency of the modulation signal.
2. An apparatus for measuring electrical properties using amplitude modulated electrostatic force microscopy, comprising:
an applying unit, for responding to the detection of the inspection instruction of the electrical characteristics of the sample, applying an amplitude modulation alternating current voltage to the probe, wherein the amplitude modulation alternating current voltage comprises a modulation signal and a carrier signal, and the electrical characteristics at least comprise any one of the following: carrier concentration, conductivity, dielectric constant;
a first determination unit for determining an electrical characteristic of the sample based on an amplitude and a phase of the probe at a preset frequency of the modulation signal;
wherein the preset frequency is equal to 2 times of the frequency of the modulation signal; and (c) a second step of,
determining a 1/2 resonance frequency of the probe as a frequency of the modulation signal;
the first determination unit is further configured to: determining the electrostatic force to which the probe is subjected at a preset frequency of the modulation signal; determining an electrical characteristic of the sample based on the electrostatic force and the preset frequency; and determining a complex capacitance gradient between the probe and the sample according to the electrostatic force and the preset frequency; determining the local impedance of the sample according to the complex capacitance gradient; determining an electrical characteristic of the sample based on the local impedance;
a second determining unit for determining the frequency of the modulation signal by:
acquiring the resonance frequency of the probe; determining the frequency of the modulation signal according to the resonance frequency of the probe;
wherein said obtaining a resonant frequency of said sample comprises: determining a 1/2 first order resonance frequency of the probe as a frequency of the modulation signal.
3. An electronic device comprising a processor and a memory, the memory storing computer readable instructions which, when executed by the processor, perform the steps of the method of claim 1.
4. A computer-readable medium, on which a computer program is stored which, when being executed by a processor, carries out the method as claimed in claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110017122.1A CN112748153B (en) | 2021-01-07 | 2021-01-07 | Method and device for measuring electrical characteristics by amplitude modulation electrostatic force microscopy |
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