CN112731767A - Temperature control device - Google Patents
Temperature control device Download PDFInfo
- Publication number
- CN112731767A CN112731767A CN201910974007.6A CN201910974007A CN112731767A CN 112731767 A CN112731767 A CN 112731767A CN 201910974007 A CN201910974007 A CN 201910974007A CN 112731767 A CN112731767 A CN 112731767A
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- China
- Prior art keywords
- temperature control
- area
- temperature
- laser direct
- direct writing
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Atmospheric Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Toxicology (AREA)
- Optics & Photonics (AREA)
- Control Of Temperature (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
The application relates to a temperature control device installs on laser direct writing equipment, and laser direct writing equipment includes the support body, sets up the work area that is used for carrying on laser direct writing in the support body, be located the sealed region of work area top, be located the temperature control zone of work area below and with work area, temperature control device signal connection's controller, temperature control device includes: a temperature sensor disposed within the working area to detect a temperature within the working area; the water cooler is in signal connection with the temperature sensor; the air channel mechanism is vertically arranged in the working area and is connected with the temperature control area and the sealed area; the condensation fins are arranged in the temperature control area and are connected with the water cooler and the air duct mechanism; the fan is arranged on the air channel mechanism; and the fan filter is arranged in the closed area and is used for filtering the airflow flowing to the working area. The temperature control device can be integrated on laser direct writing equipment, and the temperature control precision is high.
Description
Technical Field
The invention relates to a temperature control device, and belongs to the technical field of laser direct writing.
Background
In the laser direct writing process, the requirement on the environment of the internal cavity of the device is high, and the environment comprises two aspects: temperature and cleanliness. The environmental temperature variation range is generally 0.5 ℃, the cleanliness requirement is generally 1000 grades, the two technical parameters are relatively harsh, and the control of the internal temperature and the cleanliness of the equipment becomes a great problem. Therefore, the temperature control device of the laser direct writing equipment comes along, but the prior art has the defects of untimely reaction, poor temperature control precision, difficulty in integration to the whole machine and the like in the temperature control process.
Disclosure of Invention
The invention aims to provide a temperature control device which can be integrated on a laser direct writing device and has high temperature control precision.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a temperature control device installs on laser direct writing equipment, laser direct writing equipment includes the support body, sets up the work area that is used for carrying out laser direct writing in the support body, is located the sealed region of work area top, be located the temperature control area of work area below and with work area, temperature control device signal connection's controller, temperature control device includes:
a temperature sensor disposed within the working area to detect a temperature within the working area;
the water cooler is in signal connection with the temperature sensor;
the air channel mechanism is vertically arranged in the working area and is connected with the temperature control area and the sealed area;
the condensation fins are arranged in the temperature control area and are connected with the water cooler and the air duct mechanism;
the fan is arranged on the air channel mechanism;
and the fan filter is arranged in the closed area and is used for filtering the airflow flowing to the working area.
Furthermore, the temperature control area is provided with an air return opening communicated with the working area, and the air flow in the working area flows into the temperature control area through the air return opening.
Further, the water chiller is arranged outside the rack.
Further, the fan is arranged at the bottom of the air duct mechanism.
Further, the number of the fans is one or more.
Further, the air duct mechanism is one or more.
Further, the water chiller has two modes of cooling and heating.
Further, the laser direct writing device further comprises a control area arranged on one side of the temperature control area, and the controller is arranged in the control area.
The invention has the beneficial effects that: all parts of the temperature control device are arranged in all areas of the laser direct writing equipment, so that most parts of the temperature control device are integrated into the laser direct writing equipment, the temperature and the cleanliness of the interior of the laser direct writing equipment can be adjusted, the integral structure of the laser direct writing equipment is not increased, and the laser direct writing equipment is quick and convenient;
a temperature sensor is arranged in the working area, and a temperature controller can directly detect the temperature of the working area so as to meet the requirement of the exposure process of the working area; and the working area is provided with an air return opening communicated with the temperature control area, so that the temperature control area, the air channel, the fan filter and the air return opening form a closed air circulation system, and the temperature control precision is improved.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.
Drawings
Fig. 1 is a schematic structural diagram of a laser direct writing apparatus provided with a temperature control device according to the present invention.
Fig. 2 is a wind direction diagram of fig. 1.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
Referring to fig. 1 and 2, a temperature control device 6 according to a preferred embodiment of the present invention is mounted on a laser direct writing apparatus, which is one of the main techniques for manufacturing diffractive optical elements, and performs variable dose exposure of a resist material on a substrate surface with a laser beam having variable intensity, and forms a desired relief profile on the resist surface after development. Laser direct writing equipment includes support body 1, sets up be used for carrying out laser direct writing work area 2 in the support body 1, be located sealed region 3 of work area 2 top, be located the temperature control region 4 of work area 2 below and with work area 2, the 6 signal connection's of temperature control device controller, laser direct writing equipment is still including setting up the control area 5 of 4 one sides of temperature control region, control area 5 all sets up with temperature control region 4 promptly work area 2's below, the controller sets up in control area 5. The laser direct writing equipment further comprises a plurality of idler wheels 7 connected with the frame body 1, so that the laser direct writing equipment can be moved rapidly.
The temperature control device 6 comprises a temperature sensor arranged in the working area 2 to detect the temperature in the working area 2, a water cooling machine 61 in signal connection with the temperature sensor, an air duct mechanism 63 vertically arranged in the working area 2 and connected with the temperature control area 4 and the sealed area 3, a condensing fin 62 arranged in the temperature control area 4 and connected with the water cooling machine 61 and the air duct mechanism 63, a fan arranged on the air duct mechanism 63, and a fan filter 64 arranged in the sealed area 3 and used for filtering the air flow flowing to the working area 2, wherein the temperature sensor is arranged in the working area 2 and can directly detect the temperature in the working area 2, and the temperature sensor is more accurate; the fan filter 64 is communicated with the working area 2, so that impurities in the cold air flow or the hot air flow can be filtered while the cold air flow or the hot air flow flows into the working area 2, the impurities are prevented from interfering and damaging the working area 2, and the photoetching precision is improved.
In this embodiment, the number of the fans is one or more, the number of the air channel mechanisms 63 is one or more, and the specific number of the fans and the air channel mechanisms 63 is determined according to the actual situation, and is not particularly limited herein. The water chiller 61 has two modes of cooling and heating, and can perform cooling or heating functions according to actual requirements.
Referring to fig. 2, when the temperature sensor detects that the temperature in the working area 2 changes or the detected temperature value is not within the temperature threshold, the water chiller 61 starts to perform cooling or heating operation to adjust the temperature of the water flowing into the condensing fins 62, so that the temperature in the entire temperature control area 4 changes. The fan rotates to agitate the air flow, so that the air flow in the temperature controlled zone 4 flows rapidly into the enclosed zone 3 through the air channel mechanism 63, and flows into the working zone 2 after being filtered by the fan filter 64, to adjust the temperature in the working zone 2. When the temperature in the temperature controlled zone 4 is too high, the condensing fins 62 operate to cause the temperature in the temperature controlled zone 4 to decrease.
In this embodiment, cold water machine 61 sets up outside support body 1 to reduce the overall structure of laser direct writing equipment, simultaneously, all the other parts of temperature control device 6 are all integrated to the laser direct writing equipment in, not only can obtain adjusting the inside temperature of laser direct writing equipment and cleanliness factor, also do not increase the overall structure of laser direct writing equipment simultaneously, and is swift convenient. Meanwhile, the fan is arranged at the bottom of the air duct mechanism 63 and used for rapidly stirring the air flow in the temperature control area 4 to form rapid air flow, and the rapidly flowing air flow flows to the sealed area 3 through the air duct mechanism 63, so that the efficiency is improved. Indeed, in other embodiments, the fan may be disposed at other positions of the air duct mechanism 63, which is not limited herein according to the actual situation.
The temperature control area 4 is provided with an air return opening communicated with the working area 2, and air flow in the working area 2 flows into the temperature control area 4 through the air return opening, so that the temperature control area 4, the air channel mechanism 63, the fan filter 64 and the air return opening form a closed air flow circulating system, and the temperature can be adjusted more quickly and efficiently.
In summary, the following steps: all parts of the temperature control device 6 are arranged in all areas of the laser direct writing equipment, so that most parts of the temperature control device 6 are integrated into the laser direct writing equipment, the temperature and the cleanliness of the interior of the laser direct writing equipment can be adjusted, the integral structure of the laser direct writing equipment is not increased, and the laser direct writing equipment is quick and convenient;
a temperature sensor is arranged in the working area 2, and a temperature controller can directly detect the temperature of the working area 2 so as to meet the requirement of the exposure process of the working area 2; and the working area 2 is provided with an air return opening communicated with the temperature control area 4, so that the temperature control area 4, the air channel, the fan filter 64 and the air return opening form a closed air circulation system, and the temperature control precision is improved.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (8)
1. The utility model provides a temperature control device installs on laser direct writing equipment, its characterized in that, laser direct writing equipment includes the support body, sets up the work area that is used for carrying out laser direct writing in the support body, is located sealed region, the position of work area top the control by temperature change region of work area below and with work area, temperature control device signal connection's controller, temperature control device includes:
a temperature sensor disposed within the working area to detect a temperature within the working area;
the water cooler is in signal connection with the temperature sensor;
the air channel mechanism is vertically arranged in the working area and is connected with the temperature control area and the sealed area;
the condensation fins are arranged in the temperature control area and are connected with the water cooler and the air duct mechanism;
the fan is arranged on the air channel mechanism;
and the fan filter is arranged in the closed area and is used for filtering the airflow flowing to the working area.
2. The temperature control apparatus of claim 1, wherein the temperature controlled zone has a return air opening in communication with the working zone, and the air flow in the working zone flows into the temperature controlled zone through the return air opening.
3. The temperature control apparatus of claim 1, wherein the water chiller is disposed outside the frame.
4. The temperature control apparatus of claim 1, wherein the fan is disposed at a bottom of the air channel mechanism.
5. The temperature control apparatus of claim 1, wherein the fan is one or more.
6. The temperature control apparatus of claim 1, wherein the air channel mechanism is one or more.
7. The temperature control apparatus of claim 1, wherein the water chiller has both cooling and heating modes.
8. The temperature control apparatus according to claim 1, wherein the laser direct writing device further comprises a control region provided on a side of the temperature control region, the controller being provided in the control region.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910974007.6A CN112731767A (en) | 2019-10-14 | 2019-10-14 | Temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910974007.6A CN112731767A (en) | 2019-10-14 | 2019-10-14 | Temperature control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112731767A true CN112731767A (en) | 2021-04-30 |
Family
ID=75588510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910974007.6A Pending CN112731767A (en) | 2019-10-14 | 2019-10-14 | Temperature control device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112731767A (en) |
-
2019
- 2019-10-14 CN CN201910974007.6A patent/CN112731767A/en active Pending
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