CN112729624B - Array LC pressure sensor integrated device - Google Patents
Array LC pressure sensor integrated device Download PDFInfo
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- CN112729624B CN112729624B CN202011414537.4A CN202011414537A CN112729624B CN 112729624 B CN112729624 B CN 112729624B CN 202011414537 A CN202011414537 A CN 202011414537A CN 112729624 B CN112729624 B CN 112729624B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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- G—PHYSICS
- G08—SIGNALLING
- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
- G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
- G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
Abstract
An array type LC pressure sensor integrated device is characterized in that: the method comprises the steps that multipoint pressure signal changes are obtained in real time through frequency domain characteristics of signals, and the multipoint pressure signal changes comprise a flexible thin film layer, and a microstrip line, a transmitting antenna, a receiving antenna and a plurality of LC pressure sensors which are constructed on the flexible thin film layer; the LC pressure sensors are distributed on the flexible thin film layer in an array mode and are placed on one side of the microstrip line to form a band elimination filter; the microstrip line traverses all LC pressure sensors, one end of the microstrip line is electrically connected with the transmitting antenna, and the other end of the microstrip line is electrically connected with the receiving antenna. The invention integrates the inductance part and the capacitance part of the LC pressure sensor together, has higher space utilization rate and symmetry, is easy to construct an array, realizes far-field transmission of signals by utilizing the microstrip line and the receiving and transmitting antenna, and has application potential in the field of human body or robot bionic electronic skin.
Description
Technical Field
The invention relates to the field of pressure sensors, in particular to an array type LC pressure sensor integrated device.
Background
The flexible pressure array sensor has important application potential in the fields of bionic robots and human body electronic skins. In terms of data reading, the conventional practice is: and connecting the pressure sensor to a terminal through a wire, or adding an edge computing chip and a Bluetooth module into the pressure sensor to acquire a pressure change signal in real time. The disadvantages are as follows: the addition of wires complicates the device integration process and cannot be applied in some closed or harsh environments; the edge calculation and the adoption of the Bluetooth module increase the production cost of the sensor, and meanwhile, the sensor is used as an energy consumption device, so that a producer must add a power supply in the sensor, and therefore, energy supply technologies such as a solid-state battery or wireless charging are required to be introduced, and the production cost of the sensor is further increased. Moreover, the flexible nature of the electronic skin makes it necessary for the pressure sensor to be repeatedly bent and folded during operation, so that even if the substrate of such a sensor is designed to be flexible, a considerable portion of the integrated circuit is not flexible, and it is difficult to maintain its stability for a long time in actual operation, and once operation is faulty, the cost of maintenance is high.
The LC sensor (composed of an inductor and a capacitor) has the characteristics of no chip, no source and no wire. Thus, with an LC sensor, the above-mentioned problems with data reading can be circumvented. And the bionic electronic skin has low manufacturing cost and is easy to be flexible, thereby being in accordance with the field of bionic electronic skin.
The main problems of the existing LC pressure sensor are the following two points:
1. array integration problems.
For a single LC pressure sensor, which mainly consists of a capacitor and an inductor, both of which are mostly placed in a plane, each pressure sensor needs enough space to accommodate both the inductor and the capacitor, which is not a problem in a single LC pressure sensor, but if a high density array is made, the spatial configuration of such a structure causes great inconvenience.
2. A read problem.
The distance is short: generally, the signal reading of the LC pressure sensor requires an additional reading coil, and the two transmit the frequency domain characteristics to the terminal by means of electromagnetic coupling. The electromagnetic coupling strength between the coils is rapidly dispersed along with the increase of the distance, so that the distance for wireless reading is limited to be within 1cm, and the advantage of the wireless mode on the distance is not obvious.
Array reading: the signal reading of the common LC pressure sensor is performed by an electromagnetic coupling mode, so that the reading coil and the LC sensing coil need to be sleeved together, which has no problem in a single LC pressure sensor, but if an array is formed, the reading coil needs to cover all the sensing arrays, otherwise, the signals cannot be read simultaneously.
Disclosure of Invention
The main purpose of the present invention is to overcome the above mentioned drawbacks in the prior art, and to provide an array type LC pressure sensor integrated device, which has higher space utilization and symmetry, is easy to construct an array, and solves the above mentioned reading problem by using microstrip lines and transceiving antennas.
The invention adopts the following technical scheme:
an array type LC pressure sensor integrated device is characterized in that: the method comprises the steps that multipoint pressure signal changes are obtained in real time through frequency domain characteristics of signals, and the multipoint pressure signal changes comprise a flexible thin film layer, and a microstrip line, a transmitting antenna, a receiving antenna and a plurality of LC pressure sensors which are constructed on the flexible thin film layer; the LC pressure sensors are distributed on the flexible thin film layer in an array mode and integrated on one side of the microstrip line to form a band elimination filter; the microstrip line traverses all LC pressure sensors, one end of the microstrip line is electrically connected with the transmitting antenna, and the other end of the microstrip line is electrically connected with the receiving antenna.
Preferably, each of the LC pressure sensors is provided with a first film substrate layer, an inductor coil layer configured on the first film substrate layer, an elastic body configured on the second film substrate layer, an electrode layer, a second film substrate layer, and a connecting lead wire, wherein the elastic body is attached between the inductor coil layer and the electrode layer, and the connecting lead wire is located at a side of the elastic body and electrically connected with an end of the inductor coil layer and the electrode layer.
Preferably, the flexible film layer is a PET film, a PI film or a silk film.
Preferably, the elastomer is Ecoflex or PDMS.
Preferably, the inductance coil layer is manufactured by etching or ink-jet printing or screen printing.
Preferably, the sensor comprises two flexible film layers, one flexible film layer is a first film substrate layer of the LC pressure sensors, and the other flexible film layer is a second film substrate layer of the LC pressure sensors.
Preferably, the transmitting antenna is a UWB circular antenna, a UWB square antenna or a UWB special-shaped antenna.
Preferably, the receiving antenna is a UWB circular antenna, a UWB square antenna or a UWB special-shaped antenna.
Preferably, the receiving antenna and the transmitting antenna are arranged orthogonally.
As can be seen from the above description of the present invention, compared with the prior art, the present invention has the following advantages:
1. according to the invention, one polar plate of the capacitor is transformed into the inductance coil, so that the integrated LC pressure sensor with high symmetry is constructed, the space consumption of the constructed array is solved, and the integration of the array is more convenient due to the characteristic of high symmetry.
2. In the aspect of signal reading, the invention abandons the reading mode of electromagnetic coupling and adopts microstrip transmission lines to sense the LC pressure sensor. And an Ultra Wide Band (UWB) signal communication antenna is added at the initial two ends of the microstrip line to perform data interaction with the terminal. The microstrip transmission line can traverse all the cells of the LC pressure sensing array and thus can solve the array reading problem.
3. The microstrip line is adopted, so that a plurality of array data can be simultaneously sensed; by adopting a receiving and transmitting antenna (such as the integration of a UWB signal communication antenna), the signal reading can be expanded to the range of far-field communication, namely, the far-field signal transmission can be realized, and the reading distance is greatly increased.
4. The invention does not need any IC chip and power supply, and the substrate and the elastomer are both flexible, thereby having application potential in the field of human body or robot bionic electronic skin.
Drawings
FIG. 1 is an exploded view of a single LC pressure sensor;
FIG. 2 is a top view of the apparatus of the present invention;
FIG. 3 is a side view of the apparatus of the present invention;
fig. 4 is a schematic arrangement diagram of an inductance coil and a microstrip line of the LC pressure sensor;
FIG. 5 is a plot of the calibration of the frequency of an LC pressure sensor as a function of pressure;
FIG. 6 is a frequency test chart of the apparatus of the present invention;
wherein: 1. first film substrate layer, 11, receiving antenna, 12, microstrip line, 13, inductance coil layer, 14, transmitting antenna, 2, second film substrate layer, 21, electrode layer, 3, elastic body, 4, connecting lead
The invention is described in further detail below with reference to the figures and specific examples.
Detailed Description
The invention is further described below by means of specific embodiments.
The terms "first," "second," "third," and the like in this disclosure are used solely to distinguish between similar items and not necessarily to describe a particular order or sequence, nor are they to be construed as indicating or implying relative importance. In the description, the directions or positional relationships indicated by "up", "down", "left", "right", "front" and "rear" are used based on the directions or positional relationships shown in the drawings, and are only for convenience of describing the present invention, and do not indicate or imply that the device referred to must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the scope of the present invention. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In addition, in the description of the present application, "a plurality" means two or more unless otherwise specified. "and/or" describes the association relationship of the associated objects, meaning that there may be three relationships, e.g., a and/or B, which may mean: a exists alone, A and B exist simultaneously, and B exists alone. The character "/" generally indicates that the former and latter associated objects are in an "or" relationship.
An array LC pressure sensor integrated device comprises a flexible film layer, and a microstrip line 12, a transmitting antenna 14, a receiving antenna 11 and a plurality of LC pressure sensors 13 which are constructed on the flexible film layer; the LC pressure sensors 13 are distributed on the flexible thin film layer in an array manner and integrated on one side of the microstrip line 12 to form a band elimination filter, and the arrangement schematic diagram is shown in fig. 4; the microstrip line 12 traverses all the LC pressure sensors, one end of the microstrip line is electrically connected with the transmitting antenna 14, and the other end of the microstrip line is electrically connected with the receiving antenna 11, so that multipoint pressure signal changes are obtained in real time through frequency domain characteristics of signals. In the present invention, microstrip line 12 traverses all LC pressure sensors, i.e. microstrip line 12 passes through all LC pressure sensors.
In the invention, each LC pressure sensor is provided with a first film substrate layer 1, an inductance coil layer 13, an elastic body 3, an electrode layer 21, a second film substrate layer 2 and a connecting lead 4, wherein the inductance coil layer 13 is constructed on the first film substrate layer 1, the electrode layer 21 is constructed on the second film substrate layer 2, the elastic body 3 is attached between the inductance coil layer 13 and the electrode layer 21, and the connecting lead 4 is positioned at the side part of the elastic body 3 and is electrically connected with the end of the inductance coil layer 13 and the electrode layer 21.
The inductor layer 13 is directly formed on the first film substrate layer 1, and the first film substrate layer 1 is located on the side of the inductor layer 13 away from the elastic body 3. The inductor layer 13 may be formed by etching or ink-jet printing or screen printing. Preferably, the inductor layer 13 may be a copper foil, which is hot-pressed on the first film substrate layer 1, and then the copper foil is made into a shape of a predetermined inductor by an etching process, i.e., by using photolithography and etching, where the first film substrate layer may be a flexible PET film, a PI film, or a silk film.
Further, a second film substrate layer 2 is further arranged on the side, away from the elastic body 3, of the electrode layer 21, and a layer of silver can be sputtered on the second film substrate layer 2 through magnetron sputtering by the electrode layer 21, so that the flexible silver electrode is obtained. The electrode layer 21 may be made of other conductive metals, such as copper electrode.
The invention comprises two flexible film layers, wherein one flexible film layer is a first film substrate layer 1 of a plurality of LC pressure sensors, and the other flexible film layer is a second film substrate layer 2 of the plurality of LC pressure sensors.
The invention connects one end of the inductance coil layer 13 with the electrode layer 21 through the connecting lead 4, and the two layers are tightly attached with the Ecoflex elastic body 3.
The flexible film layers of the invention, namely the first film substrate layer 1 and the second film substrate layer 2, are PET films, PI films or silk films. The receiving antenna 11 and the transmitting antenna 14 are orthogonally arranged on the flexible film layer to avoid signal interference. The plurality of LC pressure sensors are distributed at intervals at positions close to the middle of the flexible thin film layer and are arranged in an array, the microstrip lines 12 are located on one side of the plurality of LC pressure sensors, for example, in fig. 2, the plurality of LC pressure sensors are arranged in three rows and three columns, the microstrip lines are correspondingly arranged into three longitudinal fold line segments and three transverse fold line segments, and the LC pressure sensors in each column are located on one side of the corresponding longitudinal fold line segment. Microstrip line 12 may be a copper microstrip line.
In practical applications, the number and arrangement of the LC pressure sensors are not limited to this, and may be arranged more, and the shape of the microstrip line is adjusted according to the arrangement of the plurality of LC pressure sensors, which is not limited. The transmitting antenna 14 is a UWB circular antenna, a UWB square antenna or a UWB special antenna. The receiving antenna 11 may also be a UWB circular antenna, a UWB square antenna or a UWB special antenna. The transmitting antenna 14 and the receiving antenna 11 are preferably UWB circular antennas.
The single LC pressure sensor of the present invention comprises two quantities, capacitance C and inductance L, with a resonant frequency of
Pressing the device from the side of the electrode layer 21 thins the elastic body 3, causing the capacitance value C to increase, thereby lowering the LC resonance frequency value. By scaling, the magnitude of the change amount of the resonant frequency signal uniquely corresponds to the magnitude of the pressure value to which the resonant frequency signal is subjected, namely the reason for the wireless sensing pressure magnitude of the LC pressure sensor.
In array integration, the inductance value of the LC pressure sensor is adjusted by changing the length or the number of turns of the inductor coil, etc. The aim is to have the resonance frequencies of different LC pressure sensors at idle in different frequencies, which are the fundamental frequencies of a certain LC pressure sensor unit. By pressing a certain LC pressure sensor unit, its corresponding frequency is shifted accordingly. The pressure values of the different LC pressure sensors can be obtained by studying the frequency shift of each discrete frequency. Theoretically, an infinite number of LC pressure sensors can be integrated, as long as the bandwidth is sufficient. Finally, by separating the movement of the discrete frequency, the pressure information of multiple points is read in real time.
The integrated structure of the LC pressure sensor is shown in fig. 2 and 3, and the working principle is as follows: a terminal transmits a transversely polarized ultra-wideband signal, which is received by a receiving antenna 11, the signal propagates along a microstrip line 12, each LC pressure sensor 13 acts as a filter (the filtering frequency is the resonant frequency) on the propagation path to modulate the frequency domain characteristics of the signal in the microstrip line 12, and finally the modulated signal is transmitted back to a vertically polarized signal by a transmitting antenna 14, which is received by the terminal.
The calibration curve of the frequency of the LC pressure sensor as a function of pressure shows a good monotonic frequency shift law in the range of 0-100kPa, as shown in fig. 5, so that for a certain pressure sensor the frequency may correspond to a single pressure value. By trimming the geometry of the inductor layer 13, the 10 pressure sensors can be made to not cross over at frequencies in the range of 0-100 kPa. Theoretically, an infinite number of LC pressure sensors can be integrated, as long as the bandwidth is sufficient.
Results of actual testing, as shown in fig. 6, a system consisting of 5 LC pressure sensors was constructed, with 5 discrete frequencies occurring, 100kPa pressure was applied to the frequencies No. 3 and No. 5, respectively, and the frequencies No. 3 and No. 5 had corresponding frequency shifts Δ 3 and Δ 5, and none of the remaining frequencies had changed.
According to the sensor integrated device, the inductance part and the capacitance part are integrated, so that the space utilization rate and symmetry are higher, and an array is easy to construct. In addition, the invention does not need any IC chip and power supply, and the substrate and the elastomer 3 are both flexible, thereby having application potential in the field of human body or robot bionic electronic skin.
The above description is only an embodiment of the present invention, but the design concept of the present invention is not limited thereto, and any insubstantial modifications made by using the design concept should fall within the scope of infringing the present invention.
Claims (8)
1. An array type LC pressure sensor integrated device is characterized in that: the method comprises the steps that multipoint pressure signal changes are obtained in real time through frequency domain characteristics of signals, and the multipoint pressure signal changes comprise a flexible thin film layer, and a microstrip line, a transmitting antenna, a receiving antenna and a plurality of LC pressure sensors which are constructed on the flexible thin film layer; the LC pressure sensors are distributed on the flexible thin film layer in an array mode and integrated on one side of the microstrip line to form a band elimination filter; the microstrip line traverses all LC pressure sensors, one end of the microstrip line is electrically connected with the transmitting antenna, and the other end of the microstrip line is electrically connected with the receiving antenna; each LC pressure sensor is provided with a first film substrate layer, an inductance coil layer, an elastic body, an electrode layer, a second film substrate layer and a connecting lead, wherein the inductance coil layer is constructed on the first film substrate layer, the electrode layer is constructed on the second film substrate layer, the elastic body is attached between the inductance coil layer and the electrode layer, and the connecting lead is positioned on the side of the elastic body and is electrically connected with the tail end of the inductance coil layer and the electrode layer.
2. An arrayed LC pressure sensor integrated device of claim 1, wherein: the flexible film layer is a PET film, a PI film or a silk film.
3. An arrayed LC pressure sensor integrated device of claim 1, wherein: the elastomer is Ecoflex or PDMS.
4. An arrayed LC pressure sensor integrated device of claim 1, wherein: the inductance coil layer is manufactured by etching, ink-jet printing or screen printing.
5. An arrayed LC pressure sensor integrated device of claim 1, wherein: the flexible film layer is a first film substrate layer of the LC pressure sensors, and the other flexible film layer is a second film substrate layer of the LC pressure sensors.
6. An arrayed LC pressure sensor integrated device of claim 1, wherein: the transmitting antenna is a UWB circular antenna, a UWB square antenna or a UWB special-shaped antenna.
7. An arrayed LC pressure sensor integrated device of claim 1, wherein: the receiving antenna is a UWB circular antenna, a UWB square antenna or a UWB special-shaped antenna.
8. An arrayed LC pressure sensor integrated device of claim 1, wherein: the receiving antennas and the transmitting antennas are orthogonally arranged.
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