CN112728881A - Clean drying device and method for radiation heating immersion unit - Google Patents
Clean drying device and method for radiation heating immersion unit Download PDFInfo
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- CN112728881A CN112728881A CN202010913186.5A CN202010913186A CN112728881A CN 112728881 A CN112728881 A CN 112728881A CN 202010913186 A CN202010913186 A CN 202010913186A CN 112728881 A CN112728881 A CN 112728881A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
- F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/14—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects using gases or vapours other than air or steam, e.g. inert gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/001—Handling, e.g. loading or unloading arrangements
- F26B25/003—Handling, e.g. loading or unloading arrangements for articles
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/06—Chambers, containers, or receptacles
- F26B25/08—Parts thereof
- F26B25/10—Floors, roofs, or bottoms; False bottoms
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B3/00—Drying solid materials or objects by processes involving the application of heat
- F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
Abstract
The invention discloses a clean drying device of a radiant heating immersion unit and a drying method thereof, which uses a radiant heater outside the upper part of a box body to heat and dry the immersion unit in a stable dry gas environment in an upper cavity of a closed drying box body, the first air outlet, the second air outlet and the air outlet at the bottom of the box are used for separating the dry gas in the upper cavity and the lower cavity, the drying and heating treatment can be more stable and cleaner, the temperature sensor and the humidity sensor respectively collect the temperature and humidity data of the upper cavity and the lower cavity, the control of the starting work and the shutdown work of the radiation heater can be more reliably and effectively obtained, the deformation and the functional failure of partial assembly parts caused by overheating of the immersion unit can be effectively avoided, the accelerated aging or the pollution of the immersion unit is avoided, and the reliable stability of the drying and cleaning of the immersion unit is improved.
Description
Technical Field
The invention relates to an immersion lithography machine, in particular to an ultra-clean drying device and an ultra-clean drying method for a radiation heating immersion unit on the immersion lithography machine.
Background
In an immersion lithography machine system, an immersion unit in an immersion head module is immersed in pure water liquid for exposure for a long time according to objective requirements in operation, and in order to ensure that the immersion unit does not generate any pollutant or pollutant particles to influence the exposure quality in the operation process, the immersion unit needs to be thoroughly cleaned before being put into use so as to remove the pollutant generated in the manufacturing process; the immersion unit also needs to be replaced or cleaned periodically during the use process, so as to ensure that the immersion lithography machine can work stably for a long time. The immersion unit after being cleaned needs to be dried, and the cleaning liquid remained on the immersion unit is removed, so that the immersion unit can be put into operation again and quickly; however, the existing drying treatment method or device in the market is easy to cause local overheating damage of the immersion unit or introduce pollution particles, thereby causing the problem of secondary pollution after the immersion unit is cleaned.
A patent number ZL201721125682.4 granted as 6.22.2018 discloses a heating and drying device, wherein in the internal heating and drying process of the heating and drying device, water vapor generated by drying is extracted outwards from the inside of the device in a fan air draft mode, and the high pressure difference between the inside and the outside of a drying box easily causes outside air flow to wrap suspended particles and flow into the device, so that the suspended particles are solidified on the surface of a dried device in the heating and drying process, the surface precision error of the dried device is increased, and the function failure of the dried device is easily caused.
Disclosure of Invention
The invention provides a clean drying device of a radiant heating immersion unit and a drying method thereof, which can effectively avoid the deformation and functional failure of partial assembly parts caused by overheating of the immersion unit, avoid the accelerated aging or pollution of the immersion unit and improve the reliable and stable drying and cleaning of the immersion unit, aiming at solving the problems that the existing drying and drying treatment method or device for the immersion unit in an immersion lithography system is easy to cause the local overheating damage of the immersion unit or the introduction of pollution particles to cause the secondary pollution of the immersion unit after cleaning, and the current situation that the function of a dried device is invalid and the like caused by the local overheating.
The invention adopts the following specific technical scheme for solving the technical problems: the utility model provides a clean drying device of radiant heating submergence unit, includes the stoving box that is used for carrying out drying process to submergence unit, its characterized in that: the top of the drying box body is communicated with the outside, the immersion unit can be placed into the box body from the top of the drying box body, a quartz glass cover used for sealing the drying box body is arranged at the top of the drying box body, a radiation heater used for heating the drying box body is arranged above the quartz glass cover, and radiation rays emitted by the radiation heater penetrate through the quartz glass cover and enter the drying box body to heat the immersion unit; a separation supporting assembly is arranged in a box of the drying box body, the separation supporting assembly is used for separating the drying box body into an upper cavity and a lower cavity, the separation supporting assembly is used for supporting and placing an immersion unit to be heated and dried in the upper cavity, at least one air inlet is arranged on the wall of the upper cavity, and the air inlet is used for introducing stable drying gas into the upper cavity; a plurality of inter-cavity communication air outlets for communicating the upper cavity with the lower cavity are arranged between the upper cavity and the lower cavity; the drying box body is provided with a plurality of box body air outlets which are communicated with the lower cavity and the external space of the drying box body. The upper cavity of the closed drying box body is internally provided with the radiation heater outside the box body above, so that the immersion unit is heated and dried in a stable dry gas environment, the immersion unit can be effectively prevented from deforming and losing function due to overheating, accelerated aging or pollution caused by the immersion unit is avoided, and the reliable drying stability of the immersion unit is improved.
Preferably, a temperature sensor for monitoring the temperature in the upper cavity in real time is arranged on the inner side wall of the upper cavity; a humidity sensor for monitoring the humidity content in the dried gas after drying in real time is arranged in the lower cavity; the temperature sensor and the humidity sensor are arranged in the corresponding cavities simultaneously or are arranged in the corresponding cavities independently. The effectiveness of feedback control on the temperature in the upper cavity is improved, and the effectiveness of feedback control on the humidity in the lower cavity is improved.
Preferably, the air inlet is arranged at a height above the immersion unit. The flow directionality of the dry gas flowing from the upper part to the lower part of the immersion unit is improved, and the treatment effect of the immersion unit in a dry environment for stabilizing the dry gas is improved.
Preferably, the separation support assembly comprises a separation pore plate and a support plate, the periphery of the separation pore plate is connected with the inner wall of the drying box body or is supported and arranged on the inner bottom wall of the drying box body through supporting legs in the cavity, the support plate is positioned above the center of the separation pore plate, and the immersion unit is arranged on the support plate; the separation pore plate is provided with a plurality of first air outlets in the direction close to the inner side of the support plate, the separation pore plate is provided with a plurality of second air outlets in the direction close to the outer side of the support plate, and the plurality of first air outlets and the plurality of second air outlets are combined together to form an air outlet communicated with the cavity between the upper cavity and the lower cavity. The improvement separates the supporting component and realizes that the air current between upper cavity and the lower cavity flows and carry over smoothly to the residual cleaning solution on the submergence unit, improves the submergence unit surface cleanliness after the stoving processing.
Preferably, the temperature sensors are uniformly distributed on the inner wall surface of the drying box body. The temperature detection accuracy and effectiveness of the heating and drying gas in the upper inner cavity are improved.
Preferably, the plurality of first air outlets are distributed on the separating pore plate under the supporting plate in an annular shape, and the plurality of second air outlets are distributed on the separating pore plate under the peripheral area of the supporting plate. The effectiveness of the supporting plate for supporting the immersion unit is improved, the smooth taking-out of the airflow between the upper cavity and the lower cavity and the residual cleaning liquid on the immersion unit is realized, and the surface cleanliness of the immersion unit after drying treatment is improved.
Preferably, the humidity sensor is arranged in the lower cavity and is positioned at the area right below the supporting plate. The accuracy and effectiveness of the humidity detection of the dried drying gas are improved, and the radiation heater can be controlled to be turned off in time.
Preferably, a plurality of supporting leg columns in the cavity for supporting and connecting the separation supporting assembly are distributed at the periphery of the humidity sensor, and the supporting leg columns in the cavity are connected and supported between the bottom surface of the separation supporting assembly and the inner bottom wall of the drying box body. The supporting, fixing, reliability, stability and effectiveness of the separation supporting assembly are improved.
Preferably, the support plate is of a support annular structure, a plurality of first air outlets are formed in the annular inner side area separation pore plate below the support annular structure, a plurality of second air outlets are formed in the annular outer side area separation pore plate below the support annular structure, and the plurality of second air outlets are distributed below the support legs of the immersion unit. The effectiveness of the supporting plate for supporting the immersion unit is improved, the smooth taking-out of the airflow between the upper cavity and the lower cavity and the residual cleaning liquid on the immersion unit is realized, and the surface cleanliness of the immersion unit after drying treatment is improved. The drying uniformity at various positions of the immersion unit 17 is improved.
Another object of the present invention is to provide a method for drying a radiant heating immersion unit, which comprises the steps of: comprises the following drying treatment method
A1. Sealing the upper end of the drying box body by using the quartz glass cover in one of the technical schemes;
A2. stable dry gas is introduced into the drying box body through the air inlet in one of the technical schemes after the drying box body is sealed, and the dry gas has the temperature within the stable range value and the flow rate;
A3. the stable dry gas enters an upper cavity of the drying box body along a gas inlet, pushes and pushes the air in the upper cavity in one of the technical schemes to flow downwards together, and flows downwards into a lower cavity in one of the technical schemes from a gas outlet communicated between the cavities in one of the technical schemes;
A4. the stable dry gas pushes the air from the upper cavity and the air from the lower cavity to flow downwards and then flows out of the box bottom from the air outlet of the box bottom in one of the technical schemes;
A5. when all air in the drying box body flows out of the box bottom and stable dry air is covered on the inner space of the drying box body from top to bottom in an all-round manner, the quartz glass cover in any one of claims 1 to 9 is moved from the top end of the drying box body, the immersion unit to be heated and dried is placed into the drying box body from the top end of the drying box body and is placed on the upper end face of the supporting plate in any one of the technical schemes, and the stable dry air is continuously kept introduced in the process of placing the immersion unit, so that the pollution of the environment in the drying box body caused by the introduction of the external air is avoided;
A6. after the immersion unit is placed, the quartz glass cover in one of the technical schemes is continuously used for sealing the upper end of the drying box body;
A7. opening the radiant heater in one of the technical schemes, and heating and drying the immersion unit placed in the upper cavity in the drying box body from the upper part of the quartz glass cover of the drying box body;
A8. when the temperature sensor monitors that the temperature in the upper cavity is consistent with the temperature of the drying gas, the temperature sensor detects and obtains a transmitted control signal to reduce the heating power of the radiant heater so as to maintain the stable temperature in the drying box body;
A9. when the dry gas flows in the upper cavity, because the first gas outlet and the second gas outlet are respectively arranged at the positions close to the middle part and the lower part of the outer side of the immersion unit, the residual cleaning liquid on the immersion unit can be better taken away when the dry gas flows, and the dry gas flows into the lower cavity and carries the residual cleaning liquid to flow out of the bottom of the tank from the gas outlet of the bottom of the tank;
A10. when the humidity sensor of any one of claims 1 to 9 detects that the humidity content in the dried gas flowing through the outside of the immersion unit and dried completely is consistent with the humidity of the dried gas introduced from the air inlet in one of the above technical solutions, the radiant heater is turned off by a control signal, and the continuous heating and drying treatment of the immersion unit is stopped;
A11. an external operator or manager can move the quartz glass cover on the top end of the drying box body to open the upper port of the drying box body, and the immersion unit is taken out of the drying box body from the upper cavity in one of the technical schemes;
the step A8 is a drying method when a temperature sensor is mounted in the upper cavity, the step a10 is a drying method when a humidity sensor is mounted in the lower cavity, and the step A8 and/or the step a10 are/is executed according to whether a temperature sensor is mounted in the upper cavity and/or whether a humidity sensor is mounted in the lower cavity.
The upper cavity of the closed drying box body is internally provided with the radiation heater outside the box body above, so that the immersion unit is heated and dried in a stable dry gas environment, the immersion unit can be effectively prevented from deforming and losing function due to overheating, accelerated aging or pollution caused by the immersion unit is avoided, and the reliable drying stability of the immersion unit is improved.
The invention has the beneficial effects that: the upper cavity of the closed drying box body is internally provided with the radiation heater outside the box body above, so that the immersion unit is heated and dried in a stable dry gas environment, the immersion unit can be effectively prevented from deforming and losing function due to overheating, accelerated aging or pollution caused by the immersion unit is avoided, and the reliable drying stability of the immersion unit is improved. The temperature sensor is arranged in the upper cavity of the drying box body, the ambient temperature of the immersion unit is monitored in real time when the immersion unit is dried, and deformation and functional failure of partial assembly parts caused by overheating of the immersion unit are avoided; the internal drying gas is sent out from top to bottom and flows in a flowing mode larger than the external pressure, air in the device can be removed before drying, the phenomenon that the external air enters the drying device due to poor sealing performance of the drying device and pollutes an immersion unit being dried to cause reduction of cleanliness of the immersion unit is avoided, and the flowing layout channel of the internal drying gas is optimized according to the appearance of the immersion unit, so that the residual cleaning liquid on the immersion unit can be better taken away when the drying gas flows.
Description of the drawings:
the invention is described in further detail below with reference to the figures and the detailed description.
FIG. 1 is a schematic view of an appearance structure of a clean drying device of a radiant heating immersion unit according to the present invention.
FIG. 2 is a schematic view of the internal structure of the radiant heating immersion unit cleaning and drying apparatus according to the present invention.
Fig. 3 is a schematic view of the flow field flow of fig. 2.
Fig. 4 is a schematic view of the structure in the direction of a-a in fig. 2.
Fig. 5 is a schematic structural view in the direction B-B in fig. 2.
Fig. 6 is a schematic bottom view of the structure of fig. 1.
Fig. 7 is a schematic structural view of fig. 4 with the effect of the appearance of the immersion unit.
Detailed Description
Example 1:
in the embodiment shown in fig. 1, 2, 3, 4, 5, and 6, a clean drying device for a radiant heating immersion unit includes a drying box 3 for drying an immersion unit, the top of the drying box 3 is communicated with the outside, the immersion unit can be placed into the drying box 3 from the top of the drying box, a quartz glass cover 2 for sealing the drying box 3 is placed on the top of the drying box 3, the quartz glass cover 2 has high light transmittance and high cleaning effect, the cleanliness of the immersion unit for drying in the sealed drying box 3 and the infrared radiation drying penetration rate of a radiant heater 1 can be ensured to a greater extent, and the drying efficiency can be improved; the quartz glass cover 2 can improve the effectiveness of the radiant heater in heating and drying the immersion unit in the drying box body 3 through the sealing cover, and reduce the secondary pollution to the immersion unit. A radiation heater 1 for heating the drying box body is fixedly arranged above the quartz glass cover 2, and radiation rays such as infrared rays emitted by the radiation heater 1 penetrate through the quartz glass cover 2 and enter the drying box body 3 to heat the immersion unit; a separation supporting component is arranged in a box of the drying box body, the separation supporting component is used for separating the drying box body into an upper cavity 6 and a lower cavity 16, the separation supporting component is used for supporting and placing an immersion unit to be heated and dried in the upper cavity 6, at least one air inlet 4 is arranged on the wall of the upper cavity, the air inlet 4 is arranged at a height position above the immersion unit, the air inlet 4 is used for introducing stable dry gas into the upper cavity, and one or more temperature sensors 8 for monitoring the temperature in the upper cavity in real time are arranged on the inner side wall of the upper cavity 6; a plurality of inter-cavity communicated gas outlets communicated with the upper cavity and the lower cavity are arranged between the upper cavity 6 and the lower cavity 16, one of the inter-cavity communicated gas outlets is used for realizing that the dried gas in the upper cavity 6 clings to the immersion unit and takes away the residual cleaning liquid attached to the immersion unit when the dried gas flows out to the lower cavity 16, thereby improving the cleaning treatment effectiveness of the residual cleaning liquid on the immersion unit; install one or more humidity transducer 14 that are arranged in real-time supervision to accomplish humidity content in the dry gas after drying in cavity 16 down, humidity transducer 14 is located fixed mounting distribution around and is equipped with a plurality of intracavity supporting legs 10 that are used for supporting connection to separate supporting component, intracavity supporting legs 10 joint support is between separating supporting component bottom surface and the internal diapire of stoving box, stoving box 3 is opened has a plurality of box gas outlets of cavity 16 and the external space of stoving box under the intercommunication, further a plurality of box gas outlet intercommunication cavity 16 and the external space of bottom half (see figure 2, figure 3, figure 5, figure 6), improve box gas outlet distribution rationality, reduce the adverse effect nature of box gas outlet to external space. A temperature sensor 8 mounted within the upper cavity 6 improves the effectiveness of feedback control of the temperature within the upper cavity 6 and a humidity sensor 14 mounted within the lower cavity 16 improves the effectiveness of feedback control of the humidity within the lower cavity 16. The temperature sensor 8 and the humidity sensor 14 may be installed at the same time, or may be installed separately, and it may be determined comprehensively according to actual requirements and other conditions whether both sensors are installed or only one of them is installed for feedback control. Of course, if direct aeration drying is used, it is also possible to perform feedback control without temperature sensor detection. The dry gas is nitrogen or other inert gases, so that the drying stability effect of the dry gas is improved, and the drying treatment stability and effectiveness of the immersion unit 17 in the upper cavity are improved. The radiant heater 1 is fixedly installed on an external supporting plate or a ceiling. The installation, the use, the convenience, the flexibility and the effectiveness of the radiation heater are improved. The radiant heater may be implemented using radiant heater technology known in the art, such as an infrared heater. The separating and supporting assembly comprises a separating orifice plate 9 and a supporting plate 7, the periphery of the separating orifice plate 9 is connected with the inner wall of the drying box body 3 or is supported and arranged on the inner bottom wall of the drying box body through an in-cavity supporting foot post 10, the supporting plate 7 is positioned and arranged above the center of the separating orifice plate 9, and the immersion unit is arranged on the upper end face of the supporting plate 7; a plurality of first air outlets 13 are arranged on the separating pore plate 9 in the direction close to the inner side of the supporting plate 7, a plurality of second air outlets 12 are arranged on the separating pore plate in the direction close to the outer side of the supporting plate, and the plurality of first air outlets 13 and the plurality of second air outlets 12 are combined together to form a cavity communicated air outlet communicated with the upper cavity and the lower cavity. The plurality of first air outlets 13 are mutually shared to form an annular distribution and are arranged on the separation pore plate right below the supporting plate, and the plurality of second air outlets 12 are arranged on the separation pore plate below the peripheral area of the supporting plate in a distribution manner. The humidity sensor 14 is fixedly installed in the lower cavity 16 at a region directly below the support plate 7. A plurality of supporting legs 10 in the cavity for supporting, connecting and separating the supporting components are fixedly arranged and distributed at the periphery of the humidity sensor 14, and the supporting legs 10 in the cavity are connected and supported between the bottom surface of the separating and supporting components and the inner bottom wall of the drying box. The supporting plate 7 adopts a supporting annular structure, a plurality of first air outlets 13 are arranged on the annular inner side region separating pore plate below the supporting annular structure, a plurality of second air outlets 12 (see fig. 4) are arranged on the annular outer side region separating pore plate below the supporting annular structure, and the plurality of second air outlets 12 are distributed below the supporting legs of the immersion unit. The number, shape and size of the first air outlet 13, the second air outlet 12 and the box bottom air outlet 11 are set, and the spacing distance and spacing distribution among the same air ports can be flexibly set according to various factors such as the adopted radiation heater, the heating distance space between the radiation heater and the drying box body, so that the effects of realizing the space between an upper cavity and a lower cavity in the drying box body, guiding and guiding the air flow between the lower cavity and the outer space of the box bottom, effectively taking away residual cleaning liquid remained on the immersion unit in the box body and the like can be achieved. The bottom of the drying box body 3 is fixedly connected with a plurality of bottom supporting legs 15 of the drying box body, the bottom of the drying box body is lifted by overhead support, and the air outlet and the air circulation smoothness of the air outlet 11 at the bottom of the drying box body 3 are improved.
As shown in fig. 7, since the immersion unit 17 to be dried is a flat solid having three supporting legs and a central through hole, the shape and position of the supporting plate 7 of the present invention can be further set according to the shape of the immersion unit to be dried to stably support the immersion unit 17 without excessively shielding the immersion unit 17 from the dry gas; the first gas outlet 13 may be arranged below the member of the immersion unit 17 and surrounds the central through hole thereof, the dry gas is guided to flow away from the first gas outlet 13 after bypassing the central through hole of the immersion unit 17 from above the immersion unit 17, the second gas outlet 12 may be arranged below the support leg of the immersion unit 17, and the dry gas is guided to flow away from the support leg of the immersion unit 17 after bypassing the support leg of the immersion unit 17 from above the immersion unit 17 through the second gas outlet 12; through setting up first gas outlet 13 and second gas outlet 12 like this, can make dry gas fully contact with immersion unit 17 and sweep to can improve drying efficiency, and be favorable to improving the dry homogeneity of immersion unit 17 each position, avoid dry inhomogeneous difference in temperature that introduces to lead to immersion unit 17 to take place deformation.
Example 2:
in the embodiments shown in fig. 1, 2, 3, 4, 5 and 6, a clean drying method for a radiation heating immersion unit includes the following drying treatment methods
A1. Sealing the upper end of the drying box body by using the quartz glass cover in the embodiment 1;
A2. stable dry gas is introduced into the sealed drying box body through the air inlet in the embodiment 1, and the dry gas has the temperature within the stable range value and the flow rate;
A3. the stable dry gas enters the upper cavity of the drying box body along the gas inlet, pushes the air in the upper cavity in the embodiment 1 to flow downwards, and flows downwards into the lower cavity in the embodiment 1 from the inter-cavity communication gas outlet in the embodiment 1 (the direction of an arrow C in the figure 3);
A4. the stable dry gas pushes the air from the upper cavity and the air from the lower cavity to flow downwards and then flows out of the box bottom from the air outlet of the box bottom in the embodiment 1 (as shown by an arrow C in the figure 3);
A5. when all the air in the drying box body flows out of the box bottom and stable dry air is covered on the inner space of the drying box body from top to bottom in an all-round way, the quartz glass cover in the embodiment 1 is moved from the top end of the drying box body, an immersion unit to be heated and dried is placed into the drying box body from the top end of the drying box body and is placed on the upper end face of the supporting plate in the embodiment 1, the stable dry air is continuously introduced in the process of placing the immersion unit, and the pollution of the environment in the drying box body caused by the introduction of the external air is avoided;
A6. after the immersion unit is placed, the upper end of the drying box body is sealed by continuously using the quartz glass cover in the embodiment 1;
A7. turning on the radiant heater described in example 1, and performing heating and drying treatment on the immersion unit placed in the upper cavity inside the drying box body from above the quartz glass cover of the drying box body;
A8. when the temperature sensor in embodiment 1 monitors that the temperature in the upper cavity is consistent with the temperature of the drying gas, the heating power of the radiant heater is reduced by a transmitted control signal obtained by detection of the temperature sensor so as to maintain a stable temperature in the drying box body;
A9. when the dry gas flows in the upper cavity, because the first gas outlet and the second gas outlet described in embodiment 1 are respectively arranged at the positions close to the middle and the lower part of the outer side of the immersion unit, the dry gas can better take away the residual cleaning liquid on the immersion unit when flowing, and flow into the lower cavity to take the residual cleaning liquid out of the bottom of the tank from the gas outlet of the bottom of the tank (see the direction indicated by the arrow C in fig. 3);
A10. when the humidity sensor in the embodiment 1 detects that the humidity content in the dried gas flowing through the outer side of the humidity sensor and dried completely is consistent with the humidity of the dried gas introduced from the air inlet in the embodiment 1, the radiation heater is turned off through a control signal, and the continuous heating and drying treatment of the immersion unit is stopped;
A11. an external operator or manager can move the quartz glass cover on the top end of the drying box body to open the upper port of the drying box body, and take the immersion unit out of the drying box body from the upper cavity in the embodiment 1;
the step A8 is a drying method when a temperature sensor is mounted in the upper cavity, the step a10 is a drying method when a humidity sensor is mounted in the lower cavity, and the step A8 and/or the step a10 are/is executed according to whether a temperature sensor is mounted in the upper cavity and/or whether a humidity sensor is mounted in the lower cavity. The rest is the same as in example 1.
In the positional relationship description of the present invention, the appearance of terms such as "inner", "outer", "upper", "lower", "left", "right", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings is merely for convenience of describing the embodiments and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation and operation, and thus, is not to be construed as limiting the present invention.
The foregoing summary and structure are provided to explain the principles, general features, and advantages of the product and to enable others skilled in the art to understand the invention. The foregoing examples and description have been presented to illustrate the principles of the invention and are intended to provide various changes and modifications within the spirit and scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The utility model provides a clean drying device of radiant heating submergence unit, includes the stoving box that is used for carrying out drying process to submergence unit, its characterized in that: the top of the drying box body is communicated with the outside, the immersion unit can be placed into the box body from the top of the drying box body, a quartz glass cover used for sealing the drying box body is arranged at the top of the drying box body, a radiation heater used for heating the drying box body is arranged above the quartz glass cover, and radiation rays emitted by the radiation heater penetrate through the quartz glass cover and enter the drying box body to heat the immersion unit; a separation supporting assembly is arranged in a box of the drying box body, the separation supporting assembly is used for separating the drying box body into an upper cavity and a lower cavity, the separation supporting assembly is used for supporting and placing an immersion unit to be heated and dried in the upper cavity, at least one air inlet is arranged on the wall of the upper cavity, and the air inlet is used for introducing stable drying gas into the upper cavity; a plurality of chamber-to-chamber communication air outlets which are communicated with the upper and lower cavities are arranged between the upper cavity and the lower cavity, and a plurality of box body air outlets which are communicated with the lower cavity and the external space of the drying box body are arranged in the drying box body.
2. The radiant heating immersion unit clean drying apparatus as claimed in claim 1, wherein: the inner side wall of the upper cavity is provided with a temperature sensor for monitoring the temperature in the upper cavity in real time; a humidity sensor for monitoring the humidity content in the dried gas after drying in real time is arranged in the lower cavity; the temperature sensor and the humidity sensor are arranged in the corresponding cavities simultaneously or are arranged in the corresponding cavities independently.
3. The radiant heating immersion unit clean drying apparatus as claimed in claim 1, wherein: the setting height of the air inlet is arranged at the height position above the immersion unit.
4. The radiant heating immersion unit clean drying apparatus as claimed in claim 1, wherein: the separation support assembly comprises a separation orifice plate and a support plate, the periphery of the separation orifice plate is connected with the inner wall of the drying box body or is supported and arranged on the inner bottom wall of the drying box body through supporting legs in the cavity, the support plate is positioned above the center of the separation orifice plate, and the immersion unit is arranged on the support plate; the separation pore plate is provided with a plurality of first air outlets in the direction close to the inner side of the support plate, the separation pore plate is provided with a plurality of second air outlets in the direction close to the outer side of the support plate, and the plurality of first air outlets and the plurality of second air outlets are combined together to form an air outlet communicated with the cavity between the upper cavity and the lower cavity.
5. The radiant heating immersion unit clean drying apparatus as claimed in claim 2, wherein: the temperature sensors are uniformly distributed on the inner wall surface of the drying box body.
6. The radiant heating immersion unit clean drying apparatus as claimed in claim 1, wherein: the first air outlets are mutually shared to form an annular distribution and are arranged on the separating pore plate under the supporting plate, and the second air outlets are arranged on the separating pore plate under the peripheral area of the supporting plate.
7. The radiant heating immersion unit clean drying apparatus as claimed in claim 1, wherein: the humidity sensor is arranged in the lower cavity and is positioned in the area right below the supporting plate.
8. The radiant heating immersion unit clean drying apparatus as claimed in claim 1, wherein: the humidity sensor is provided with a plurality of support leg columns in the cavity, the support leg columns are used for supporting, connecting and separating the support component, and the support leg columns in the cavity are connected and supported between the bottom surface of the separation support component and the inner bottom wall of the drying box body.
9. The radiant heating immersion unit clean drying apparatus as claimed in claim 1, wherein: the supporting plate adopts a supporting ring-shaped structure, a plurality of first air outlets are arranged on the ring inner side area separating pore plate below the supporting ring-shaped structure, a plurality of second air outlets are arranged on the ring outer side area separating pore plate below the supporting ring-shaped structure, and the plurality of second air outlets 12 are distributed below the supporting legs of the immersion unit.
10. A clean drying method for a radiation heating immersion unit is characterized by comprising the following steps: comprises the following drying treatment method
A1. Sealing the upper end of the drying box body by using the quartz glass cover of any one of claims 1 to 9;
A2. introducing stable dry gas into the sealed drying box body through the air inlet according to any one of claims 1 to 9, wherein the dry gas has temperature, humidity and introduction flow within a stable range;
A3. the stable dry gas enters an upper cavity of the drying box body along a gas inlet, pushes air in the upper cavity of one of claims 1 to 9 to flow downwards together, and flows downwards into a lower cavity of one of claims 1 to 9 from an inter-cavity communication gas outlet of one of claims 1 to 9;
A4. the stable dry gas pushes the air from the upper cavity and the air from the lower cavity to flow downwards and then flows out of the box bottom from the air outlet of the box bottom according to any one of claims 1 to 9;
A5. when all air in the drying box body flows out of the box bottom and stable dry air is covered on the inner space of the drying box body from top to bottom in an all-round manner, the quartz glass cover in any one of claims 1 to 9 is moved from the top end of the drying box body, the immersion unit to be heated and dried is placed into the drying box body from the top end of the drying box body and is placed at the upper end face of the supporting plate in any one of claims 1 to 9, and in the placing operation process of the immersion unit, stable dry air is kept to be introduced continuously, so that the pollution of the environment in the drying box body due to the introduction of outside air is avoided;
A6. after the immersion unit is placed, continuously sealing the upper end of the drying box body by using the quartz glass cover of any one of claims 1-9;
A7. opening the radiant heater according to any one of claims 1 to 9, and performing a heating and drying process on the immersion unit placed in the upper cavity inside the drying box body from above the quartz glass cover of the drying box body;
A8. when the temperature sensor of any one of claims 1 to 9 monitors that the temperature in the upper cavity is consistent with the temperature of the drying gas, the heating power of the radiant heater is reduced by a transmitted control signal detected by the temperature sensor so as to maintain a stable temperature in the drying box;
A9. when the drying gas flows in the upper cavity, the first gas outlet and the second gas outlet of any one of claims 1 to 9 are respectively arranged at the positions close to the middle part and the lower part of the outer side of the immersion unit, so that the residual cleaning liquid on the immersion unit can be better taken away when the drying gas flows, and flows into the lower cavity to carry the residual cleaning liquid out of the bottom of the tank from the gas outlet of the bottom of the tank;
A10. when the humidity sensor of any one of claims 1 to 9 detects that the humidity content in the dried gas flowing through the outside of the immersion unit and dried completely is consistent with the humidity of the dried gas introduced from the air inlet of any one of claims 1 to 9, the radiation heater is turned off by a control signal, and the continuous heating and drying treatment of the immersion unit is stopped;
A11. an external operator or manager can move the quartz glass cover on the top end of the drying box body to open the upper port of the drying box body, and take the immersion unit out of the drying box body from the upper cavity of one of claims 1 to 9;
the step A8 is a drying method when a temperature sensor is mounted in the upper cavity, the step a10 is a drying method when a humidity sensor is mounted in the lower cavity, and the step A8 and/or the step a10 are/is executed according to whether a temperature sensor is mounted in the upper cavity and/or whether a humidity sensor is mounted in the lower cavity.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010913186.5A CN112728881B (en) | 2020-09-03 | 2020-09-03 | Clean drying device and method for radiation heating immersion unit |
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| CN202010913186.5A CN112728881B (en) | 2020-09-03 | 2020-09-03 | Clean drying device and method for radiation heating immersion unit |
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| CN112728881A true CN112728881A (en) | 2021-04-30 |
| CN112728881B CN112728881B (en) | 2022-05-17 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115461585A (en) * | 2021-12-31 | 2022-12-09 | 深圳汝原科技有限公司 | Accessory, drying equipment and drying assembly |
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| CN112728881B (en) | 2022-05-17 |
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