CN112718761A - Lens cleaning device for long crystal furnace window - Google Patents

Lens cleaning device for long crystal furnace window Download PDF

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Publication number
CN112718761A
CN112718761A CN202011438671.8A CN202011438671A CN112718761A CN 112718761 A CN112718761 A CN 112718761A CN 202011438671 A CN202011438671 A CN 202011438671A CN 112718761 A CN112718761 A CN 112718761A
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CN
China
Prior art keywords
cleaning
lens
unit
driving unit
gear
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Pending
Application number
CN202011438671.8A
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Chinese (zh)
Inventor
徐兴超
沈安宇
李钊
张耀文
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Shandong Tianyue Advanced Technology Co Ltd
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Shandong Tianyue Advanced Technology Co Ltd
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Application filed by Shandong Tianyue Advanced Technology Co Ltd filed Critical Shandong Tianyue Advanced Technology Co Ltd
Priority to CN202011438671.8A priority Critical patent/CN112718761A/en
Publication of CN112718761A publication Critical patent/CN112718761A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/02Devices for holding articles during cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/0031Machines having several working posts; Feeding and manipulating devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005Blocking means, chucks or the like; Alignment devices

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)

Abstract

The application discloses a crystal growth furnace window lens cleaning device, which comprises a supporting base, a lens bearing device and a lens cleaning unit, wherein the lens bearing device is connected with a first feeding unit so as to enable the lens bearing device to feed according to a set running route; each lens cleaning unit is connected with one second feeding unit so as to enable the lens cleaning unit to be close to or far away from the lens carrying device; at least part of the lens cleaning unit performs polishing cleaning, and at least part of the lens cleaning unit performs cleaning liquid cleaning; the lens cleaning device further comprises an electric control system, and the first feeding unit, the second feeding unit and the plurality of lens cleaning units are controlled by the electric control system. The long brilliant stove window lens cleaning device that appears disclosed in this application can implement cleanly to the sight glass lens high-efficiently, high quality, in batches, can also reduce clean cost, liberation labour simultaneously and have advantages such as the security management of being convenient for.

Description

Lens cleaning device for long crystal furnace window
Technical Field
The application belongs to the technical field of mirror surface cleaning, especially, relate to a crystal growth stove window lens cleaning device.
Background
As is well known, silicon carbide is one of the important third-generation semiconductor materials, and has the characteristics of large forbidden bandwidth, high saturated electron mobility, high breakdown strength, high thermal conductivity and the like, so that the silicon carbide is widely applied to the fields of power electronics, radio frequency devices, photoelectronic devices and the like.
In the production process of silicon carbide, in order to obtain products with certain quality, the environment in the crystal growth furnace must be accurately monitored, particularly in the seeding process, the environment in the crystal growth furnace plays a crucial role in the direction of crystal lattices, and therefore the crystal growth furnace needs to be effectively monitored. In the prior art, in order to monitor the inside of the crystal growth furnace, a window needs to be formed on the crystal growth furnace, and a window lens is arranged on the window in the working process of the crystal growth furnace, so that workers and instruments can monitor the inside of the crystal growth furnace through the window lens. Because the working environment inside the crystal growth furnace is extremely severe (the internal temperature reaches more than two thousand degrees), the common lens is difficult to simultaneously meet the requirements of high temperature resistance, good light transmittance, high strength and the like, and therefore, a window lens with high price is required to meet the requirement of accurate monitoring. In addition, during the working process of the crystal growth furnace, a colored film which is difficult to wipe off and affects the observation is easily formed on the window lens, and even crystals are generated on the surface of the window lens; in order to enable the crystal growth furnace to be accurately and effectively monitored during next working, the window lens needs to be taken down to be cleaned after one-time crystallization is completed, so that the observation requirement is met.
However, it is conventional: firstly, manually grinding the window glass with grinding fluid for a long time to grind off attachments such as colored films, crystals and the like which are difficult to clean and are attached to the surface of the window glass; then, the surface is wiped for at least two times by the cleaning liquid for a long time to meet the requirement of reuse. This method has many problems, for example, because the cleaning time of each window lens is long, and the cleaning solution is easily wasted during the cleaning process, which greatly increases the cleaning cost; for another example, in the cleaning process, cleaning liquid is needed to be used for cleaning, and the cleaning liquid often contains substances harmful to human bodies, so that workers are easily injured; for another example, in the cleaning process, high-concentration industrial alcohol is needed, the requirement of the use of the industrial alcohol on the working environment is extremely high, and if the industrial alcohol cannot be effectively controlled, safety accidents are easily caused. It is worth noting that the crystal growth furnaces in enterprises often work in batches, and if the window glasses cannot be cleaned effectively in a rapid and batch manner, normal production of factories is affected. In addition, cleaning of the window lenses requires a large amount of manpower, which increases the labor cost of the enterprise.
In order to solve at least the above problems in the prior art, the applicant has proposed a cleaning device capable of cleaning the window lenses rapidly, efficiently and in batch.
The above description is included in the technical recognition scope of the inventors, and does not necessarily constitute the prior art.
Disclosure of Invention
The invention provides a cleaning device for a crystal growth furnace window lens, which aims to solve at least one technical problem in the technical problems.
The technical scheme adopted by the invention is as follows:
a long crystal furnace window lens cleaning device comprises a supporting base, a lens bearing device and a plurality of lens cleaning units, wherein the supporting base is provided with a first feeding unit, and the lens bearing device is connected with the first feeding unit so as to feed the lens bearing device according to a set running route; the lens bearing device comprises a lens holding part which can be matched with the periphery of the lens to be cleaned;
the supporting base is also provided with a plurality of second feeding units, and each lens cleaning unit is connected with one second feeding unit so as to enable the lens cleaning unit to be close to or far away from the lens bearing device;
the lens cleaning unit comprises a cleaning medium feeding unit and a wiping unit for cleaning the mirror surface of the cleaned lens, and the cleaning medium feeding unit supplies cleaning medium to the wiping unit wiping process in the cleaning process;
at least part of the cleaning media which can be provided by the cleaning media supply unit of the lens cleaning unit is set as polishing media, and at least part of the cleaning media which can be provided by the cleaning media supply unit of the lens cleaning unit is set as cleaning liquids;
the lens cleaning device further comprises an electric control system, and the first feeding unit, the second feeding unit and the plurality of lens cleaning units are controlled by the electric control system.
Further selectively enabling the cleaning process of each lens to comprise a first step, a second step and a third step:
in the first step, a cleaning medium supply unit of a lens cleaning unit supplies a cleaning medium, the cleaning medium is set as a polishing medium, and a wiping unit of the lens cleaning unit performs polishing wiping on a mirror surface of a lens;
in the second step, the cleaning medium supply unit of the other lens cleaning unit supplies cleaning liquid, and the wiping unit of the lens cleaning unit wipes the lens surface of the lens;
in the third step, the cleaning medium supply unit of the third lens cleaning unit supplies cleaning liquid, and the wiping unit of the lens cleaning unit wipes the lens surface of the lens;
the cleaning time of the lens cleaning unit is determined according to the degree of contamination of the lens to be cleaned and the cleaning step to be performed.
Further selectively arranging 3N lens cleaning units on the supporting base, wherein the lens bearing device comprises 3N bearing supports which are arranged at intervals and matched with the 3N lens cleaning units in an alignment manner, and N is a positive integer greater than or equal to 1;
one third of the lens cleaning units being capable of performing the first step, providing polishing media and being capable of providing a polishing wipe to the media being cleaned;
one third of the lens cleaning units can perform the second step to perform a second cleaning of the polished and wiped cleaned lens;
the other third of the lens cleaning units can perform the third step to perform a third cleaning of the cleaned lens wiped by the second step.
Further selectively enabling the lens bearing device to further comprise a bearing table, wherein one end of each bearing support is fixedly connected with the bearing table, and the lens holding part is fixedly arranged at the other end of each bearing support;
the lens cleaning device comprises a plurality of lens cleaning units arranged on one side or two sides of the moving track of the lens bearing device, and each lens cleaning unit is connected with the supporting base through one second feeding unit.
Further selectively enabling the first feeding unit to comprise a first driving unit, a first threaded rod and a first sliding block, wherein the first sliding block is in screwing transmission connection with the first threaded rod, and the first threaded rod is fixedly arranged on the supporting base and driven by the first driving unit; the first sliding block is fixedly connected with the bearing table, one of the opposite positions of the support base and the bearing table is provided with a guide rail parallel to the axis of the first threaded rod, and the other position of the support base and the bearing table is provided with a sliding groove matched with the guide rail in a sliding manner; when the first driving unit drives the first threaded rod to rotate, the lens bearing device moves relative to the support base along the guide rail according to a set track, and the first driving unit is controlled by the electric control system to enable the lens bearing device to move to a set cleaning position.
Further selectively enabling the first feeding unit to comprise a first driving unit, a first gear and a first rack, wherein the first gear is rotatably arranged on the supporting base, the rack is fixedly connected with the bearing table, the first gear and the first rack are in meshing transmission arrangement, and the first gear is driven by the first driving unit and can rotate; a guide rail parallel to the movement direction of the first rack is arranged at one position of the relative position of the support base and the bearing table, and a sliding groove matched with the guide rail in a sliding manner is arranged at the other position of the support base and the bearing table; when the first driving unit drives the first gear to rotate, the first gear drives the lens bearing device to move along the guide rail relative to the support base through the first rack meshed with the first gear, and the first driving unit is controlled by the electric control system to enable the lens bearing device to run to a set cleaning position.
Further selectively enabling each mirror surface cleaning device to comprise a supporting structure body, wherein a first cantilever part and a second cantilever part are oppositely and fixedly arranged on two sides of the supporting structure body, a first cleaning wiping body is arranged at the cantilever end of the first cantilever part, and the first cleaning wiping body is in transmission arrangement with a third driving unit; a cantilever end of the second cantilever part is provided with a second cleaning and wiping body, and the second cleaning and wiping body is in transmission arrangement with another third driving unit;
the first cleaning wiping body and the second cleaning wiping body are arranged oppositely, and the height from the first cleaning wiping body and the height from the second cleaning wiping body to the upper surface of the supporting base are the same as the height from the cleaned lens located at the holding part to the upper surface of the supporting base, so that the first cleaning wiping body and the second cleaning wiping body are respectively opposite to two mirror surfaces of the cleaned lens;
when the third driving unit drives the first cleaning wiping body and the second cleaning wiping body to rotate, the first cleaning wiping body and the second cleaning wiping body can wipe two mirror surfaces of a lens to be cleaned;
the third driving unit is controlled by the electronic control system, and the driving time of the third driving unit is determined according to the dirt degree of the cleaned lens and the cleaning step.
Further selectively enabling the second feeding unit to comprise a second driving unit, a second threaded rod and a second sliding block, wherein the second sliding block is in screwing transmission connection with the second threaded rod, and the second threaded rod is fixedly arranged on the supporting base and driven by the second driving unit; the second sliding block is fixedly connected with the bottom of one support structure, one of the relative positions of the support base and the bottom of the support structure is provided with a guide rail parallel to the axis of the second threaded rod, and the other of the support base and the bottom of the support structure is provided with a sliding groove matched with the guide rail in a sliding manner; when the second driving unit drives the second threaded rod to rotate, the lens cleaning unit moves relative to the supporting base along the guide rail and is close to or far away from the lens bearing device, the second driving unit is controlled by the electric control system to enable the lens cleaning unit to run to a set cleaning position, and a cleaned lens is clamped between the first cleaning wiping body and the second cleaning wiping body.
Further selectively enabling the second feeding unit to comprise a second driving unit, a second gear and a second rack, wherein the second gear is rotatably arranged on the supporting base, the rack is fixedly connected with the supporting structural body, the second gear and the second rack are in meshing transmission arrangement, and the second gear is driven by the second driving unit and can rotate; a guide rail parallel to the movement direction of the second rack is arranged at one position of the relative positions of the bottom of the support base and the bottom of the support structure, and a sliding groove in sliding fit with the guide rail is arranged at the other position of the support base and the bottom of the support structure; when the second driving unit drives the second gear to rotate, the second gear drives the lens cleaning unit to move along the guide rail relative to the support base through the second gear engaged with the second gear and to be close to or far away from the lens carrying device, and the third driving unit is controlled by the electric control system to enable the lens cleaning unit to run to a set cleaning position, and a cleaned lens is clamped between the first cleaning wiping body and the second cleaning wiping body.
Further selectively setting the cleaning medium as a polishing liquid; the cleaning solution is set to be alcohol solution.
Through the long brilliant stove window lens cleaning device that this application provided can bring following beneficial effect:
1. the lens cleaning device comprises a plurality of lens cleaning units, each lens cleaning unit is driven by one second feeding unit, and the second feeding units are controlled by an electric control system, so that the lens cleaning units can move to a set cleaning position and perform a cleaning process on lenses; the lens cleaning units can automatically clean the lenses in batch, so that the defects of slow cleaning and high labor intensity of a traditional manual cleaning mode are overcome, and a powerful guarantee is provided for the large-scale use of a large number of window lenses in a crystal growth factory.
2. This application makes lens bearing device includes a plurality of lens gripping portions to make lens bearing device receives first feed unit drive, first feed unit is controlled by electric control system, makes then cleaning device can remove the clear lens of quilt by controlled ground to the clear position of settlement of window lens, makes it with lens cleaning unit collaborative work, makes operating personnel only need will be cleaned the lens place in lens gripping portion alright make the clear lens obtain effectual cleanness.
3. The cleaning device comprises a cleaning process of sequentially utilizing polishing media to clean, so that attachments (such as crystal grains, colored films and the like) which are difficult to remove and are attached to the surface of the window lens of the crystal growth furnace can be ground, the grinding time can be further set according to the pollution degree of the window lens, and the cleaning device can be suitable for cleaning the window lenses with different pollution degrees; in addition, this application cleaning device can also utilize the clear clean process of cleaning solution to carry out twice clean process at least to the window lens after polishing medium is clean to make the window lens can reach the standard that uses once more, can be provided powerful the guarantee by accurate, the monitoring effectively for long brilliant stove at next during operation.
4. The cleaning method has the advantages that the polishing medium and the cleaning liquid can be managed in a centralized manner by combining the mechanical and electric control processes, so that the waste of the polishing medium and the cleaning liquid caused by manual cleaning can be effectively avoided, and when the cleaning liquid is high-concentration alcohol, the cleaning liquid can be properly used, so that safety accidents are effectively avoided; in addition, the polishing medium and the cleaning liquid can be prevented from causing damage to the operator's body.
5. Because the cleaning device can carry out an automatic cleaning process on the window glass, the damage to the expensive window glass caused by improper operation can be effectively avoided when manual cleaning is adopted, so that the window glass can be cleaned more safely, more reliably and more efficiently; in addition, the cleaning worker can be liberated to do other work, so that the cleaning cost of the window lens is reduced, and the labor output of the worker can be effectively improved.
6. According to the lens cleaning device, the first feeding unit comprises a transmission device with a threaded rod and a sliding block or a transmission device with a gear and a rack, so that the transmission precision of the first feeding unit can be effectively ensured, and the lens bearing device can accurately provide a cleaned window lens for the lens cleaning unit; in addition, this application can guarantee effectively through making the second feeds the unit and includes the transmission of threaded rod and slider or the transmission that includes gear and rack the transmission precision of second feed the unit makes the clean unit of lens can be to being located the window lens clean accurately of clean position, and then makes cleaning device is whole can accurately, reliably clean the window lens.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
FIG. 1 is a schematic view of a lens cleaning device according to an embodiment of the present disclosure;
FIG. 2 is a front view of a lens cleaning device provided in an embodiment of the present application;
FIG. 3 is a top view of a lens cleaning device provided in an embodiment of the present application;
fig. 4 is a side view of a lens cleaning device provided in an embodiment of the present application.
Wherein the content of the first and second substances,
1 a support base for supporting the device to be installed,
2 lens carrying device, 21 lens holding part, 22 carrying bracket, 23 carrying platform,
3 a lens cleaning unit, 31 a support structure, 32 a first cantilever part, 33 a second cantilever part, 34 a first cleaning wiper, 35 a second cleaning wiper,
4 a first feeding unit, 41 a first driving unit, 42 a first threaded rod, 43 a guide rail, 44 a chute,
5 a second feeding unit for feeding the second feed material,
6, an electric control system is adopted to control the electric control system,
7 the cleaned lens.
Detailed Description
In order to more clearly explain the overall concept of the present application, the following detailed description is given by way of example in conjunction with the accompanying drawings.
In the description of the present application, it is to be understood that the terms "central," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description herein, references to the description of the terms "an aspect," "some aspects," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the aspect or example is included in at least one aspect or example of the application. In this specification, the schematic representations of the terms used above do not necessarily refer to the same solution or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more aspects or examples.
In the present application, the number is included in a certain number or more, and two or more, for example.
For convenience of description, the terms "front", "rear", "left", "right", "up" and "down" refer to the orientation of the lens cleaning device relative to the user when the device is in use.
The lens cleaning device for the window of the crystal growth furnace shown in fig. 1 to 4 comprises a support base 1, a lens carrying device 2 and a plurality of lens cleaning units 3, wherein the support base 1 is provided with a first feeding unit 4, and the lens carrying device 2 is connected with the first feeding unit 4 so that the lens carrying device 2 can feed according to a set running route; the lens carrying device 2 comprises a lens holding part 21 which can be matched with the periphery of the lens 7 to be cleaned; a plurality of second feeding units 5 are further arranged on the supporting base 1, and each lens cleaning unit 3 is connected with one second feeding unit 5, so that the lens cleaning unit 3 can be close to or far away from the lens carrying device 2; the lens cleaning unit 3 includes a cleaning medium feeding unit that supplies a cleaning medium to a wiping unit wiping process of the wiping unit in a cleaning process, and a wiping unit that cleans a mirror surface of the lens 7 to be cleaned; at least a part of the cleaning media that can be supplied by the cleaning media supply unit of the lens cleaning unit 3 is set as polishing media, and at least a part of the cleaning media that can be supplied by the cleaning media supply unit of the lens cleaning unit 3 is set as cleaning liquids; the lens cleaning device further comprises an electronic control system 6, and the first feeding unit 4, the second feeding unit 5 and the plurality of lens cleaning units 3 are all controlled by the electronic control system 6. It should be noted that the cleaning device is mainly a technical solution provided for cleaning a long crystal furnace window lens, and in particular, the cleaning device can also clean other types of lenses. In addition, the support base 1 is not particularly limited, and may be any structure capable of supporting; such as a load-bearing platform with feet, a load-bearing platform of a pipeline, etc. Besides, the cleaning medium feeding unit is not particularly limited, and may be any feeding unit capable of providing a cleaning medium for a lens cleaning process, for example, the cleaning medium feeding unit is configured as a feeding unit for spraying or showering the lens cleaning process; and further preferably causes the cleaning medium feeding unit to be controlled by an electronic control system. The lens cleaning device comprises a plurality of lens cleaning units, each lens cleaning unit is driven by one second feeding unit, and the second feeding units are controlled by an electric control system, so that the lens cleaning units can move to a set cleaning position and perform a cleaning process on lenses; the lens cleaning units can automatically clean the lenses, so that the lens cleaning units have the advantage of cleaning the window lenses in batches, the defects of slow cleaning and high labor intensity existing in the traditional manual cleaning mode are overcome, and the powerful guarantee is provided for the large-scale use of the window lenses used in a large number in a crystal growing factory. In addition, according to the cleaning device, the lens bearing device comprises the plurality of lens holding parts, the lens bearing device is driven by the first feeding unit, the first feeding unit is controlled by the electric control system, and then the cleaning device can move the cleaned lens to the set cleaning position of the lens in a controlled manner, so that the cleaning device and the lens cleaning unit work in cooperation, and an operator can effectively clean the cleaned lens only by placing the cleaned lens on the lens holding parts.
The cleaning method has the advantages that the polishing medium and the cleaning liquid can be managed in a centralized manner by combining the mechanical and electric control processes, so that the waste of the polishing medium and the cleaning liquid caused by manual cleaning can be effectively avoided, and when the cleaning liquid is high-concentration alcohol, the cleaning liquid can be properly used, so that safety accidents are effectively avoided; in addition, the polishing medium and the cleaning liquid can be prevented from causing damage to the operator's body. In addition, because the cleaning device can carry out an automatic cleaning process on the window glass, the damage to the expensive window glass caused by improper operation can be effectively avoided when manual cleaning is adopted, so that the window glass can be cleaned more safely, reliably and efficiently; in addition, the cleaning worker can be liberated to do other work, so that the cleaning cost of the window lens is reduced, and the labor output of the worker can be effectively improved.
As a preferred embodiment of the present application, when embodied, the cleaning process of each lens is further selectively made to include a first step, a second step and a third step: in the first step, a cleaning medium supply unit of one lens cleaning unit 3 supplies a cleaning medium, which is set as a polishing medium, and a wiping unit of the lens cleaning unit 3 performs polishing wiping on the mirror surface of the lens 7; in the second step, the cleaning medium supply unit of another lens cleaning unit 3 supplies cleaning liquid, and the wiping unit of the lens cleaning unit 3 wipes the mirror surface of the lens 7; in the third step, the cleaning medium supply unit of the third lens cleaning unit 3 supplies the cleaning solution, and the wiping unit of the lens cleaning unit 3 wipes the mirror surface of the lens 7; the cleaning time period of the lens cleaning unit 3 is determined according to the degree of contamination of the lens 7 to be cleaned, the cleaning step to be performed. In specific implementation, it is preferable that the cleaning medium is set to polishing liquid, and the cleaning liquid is set to alcohol solution; it is further preferable that the alcohol solution is a high-concentration alcohol, and a specific example thereof is a high-concentration industrial alcohol. The cleaning device comprises a cleaning process of sequentially utilizing polishing media to clean, so that attachments (such as crystal grains, colored films and the like) which are difficult to remove and are attached to the surface of the window lens of the crystal growth furnace can be ground, the grinding time can be further set according to the pollution degree of the window lens, and the cleaning device can be suitable for cleaning the window lenses with different pollution degrees; in addition, this application cleaning device can also utilize the clear clean process of cleaning solution to carry out twice clean process at least to the window lens after polishing medium is clean, and then makes the window lens can reach the standard that uses once more, can be provided with the powerful guarantee by accurate, the monitoring effectively for long brilliant stove at next during operation.
As a preferred embodiment in this embodiment, 3N lens cleaning units 3 are further selectively disposed on the supporting base 1, and the lens carrying device 2 includes 3N carrying brackets 22 disposed at intervals and aligned with the 3N lens cleaning units 3, where N is a positive integer greater than or equal to 1; one third of the lens cleaning units 3 being able to perform the first step, providing polishing media and being able to provide polishing wipes to the media being cleaned; one third of the lens cleaning units 3 is capable of performing the second step to perform a second cleaning of the polished and wiped cleaned lens 7; the remaining one third of the lens cleaning units 3 can perform the third step to perform a third cleaning of the cleaned lens 7 wiped in the second step. N is not particularly limited, and may be a positive integer of 1, 2, 3, 4, 5, 6, 7, 8, 9, or 10 or more. When implemented, the plurality of lens cleaning units 3, when implemented, may selectively implement the first step, the second step, and the third step in sequence; preferably, at least two of the first step, the second step and the third step are performed simultaneously to improve the efficiency of the cleaning device in cleaning the window lens.
As a preferred example under the present embodiment, the lens carrier 2 further selectively includes a carrying platform 23, one end of each of the carrying brackets 22 is fixedly connected to the carrying platform 23, and the lens holding portion 21 is fixedly arranged at the other end of each of the carrying brackets 22; the lens cleaning device comprises a plurality of lens cleaning units 3 arranged on one side of the moving track of the lens carrying device 2, and each lens cleaning unit 3 is connected with the support base 1 through one second feeding unit 5. As a changeable embodiment, when the lens cleaning device is implemented, a plurality of lens cleaning units 3 included in the lens cleaning device can be selectively arranged on two sides of the running track of the lens carrying device 2; in addition, the carrier table 23 is not limited in particular, and can be selectively provided as a plate with a certain thickness, and enables the lens carrier 2 to move along a set movement track under the action of the second feeding unit 5.
As a preferred embodiment of the present application, the present application may further selectively enable the first feeding unit 4 to include a first driving unit 41, a first threaded rod 42, and a first sliding block, the first sliding block is in screwing transmission connection with the first threaded rod 42, the first threaded rod 42 is fixedly disposed on the support base 1 and driven by the first driving unit 41; the first sliding block is fixedly connected with the bearing table 23, a guide rail 43 parallel to the axis of the first threaded rod 42 is arranged at one of the relative positions of the support base 1 and the bearing table 23, and a sliding groove 44 in sliding fit with the guide rail 43 is arranged at the other of the two positions; when the first driving unit 41 drives the first threaded rod 42 to rotate, the lens carrier 2 moves along the guide rail 43 relative to the support base 1 according to a set track, and the first driving unit 41 is controlled by the electronic control system 6 to move the lens carrier 2 to a set cleaning position. In a specific implementation, the first driving unit 41 is preferably a driving motor or a driving unit including a driving motor, and the first threaded rod 42 is preferably a lead screw, and the first slide block is a slide block that is adapted to and can transmit power to the lead screw. In a specific working process, the driving motor is controlled by the electronic control system 6 and rotates to drive the lead screw to rotate, and in the rotating process of the lead screw, the lens bearing device 2 is driven by the first sliding block to move along the guide rail 43 relative to the support base 1 according to a set track.
As an alternative embodiment, the present application may also selectively enable the first feeding unit 4 to include a first driving unit 41, a first gear and a first rack, the first gear is rotatably disposed on the support base 1, the rack is fixedly connected to the plummer 23, the first gear and the first rack are in meshing transmission, and the first gear is driven by the first driving unit 41 and can rotate; a guide rail 43 parallel to the movement direction of the first rack is arranged at one position of the relative positions of the support base 1 and the bearing table 23, and a sliding groove 44 matched with the guide rail 43 in a sliding manner is arranged at the other position of the two positions; when the first driving unit 41 drives the first gear to rotate, the first gear drives the lens carrier 2 to move along the guide rail 43 relative to the support base 1 through the first rack engaged with the first gear, and the first driving unit 41 is controlled by the electronic control system 6 to move the lens carrier 2 to a set cleaning position. In specific implementation, the first driving unit 41 may be further selectively set as a driving motor or a driving unit including a driving motor, the driving motor is controlled by the electronic control system 6, when power is supplied to the driving motor, the driving motor drives the first gear to rotate, and the first gear drives the lens carrier 2 to move along a set track through the first rack in the rotating process of the first gear. This application is through making first feeding unit includes the transmission of threaded rod and slider or the transmission that includes gear and rack, can guarantee effectively first feeding unit's transmission precision ensures lens bearing device can provide the window lens that is cleaned to the lens cleaning unit accurately.
As a preferred embodiment of the present application, all of the aforementioned embodiments, examples, and their modified embodiments, modified examples, and modified examples of the present application can further selectively make each of the mirror surface cleaning devices include a supporting structure 31, a first cantilever portion 32 and a second cantilever portion 33 are fixed opposite to both sides of the supporting structure 31, a first cleaning wiping body 34 is provided at a cantilever end of the first cantilever portion 32, and the first cleaning wiping body 34 is in transmission with a third driving unit; a second cleaning wiping body 35 is arranged at the cantilever end of the second cantilever part 33, and the second cleaning wiping body 35 is in transmission arrangement with another third driving unit; the first cleaning wiping body 34 is arranged opposite to the second cleaning wiping body 35, and the height of the first cleaning wiping body 34 and the height of the second cleaning wiping body 35 from the upper surface of the support base 1 are both the same as the height of the lens to be cleaned at the holding part from the upper surface of the support base 1, so that the first cleaning wiping body 34 and the second cleaning wiping body 35 are respectively opposite to two mirror surfaces of the lens to be cleaned; when the third driving unit drives the first cleaning wiping body 34 and the second cleaning wiping body 35 to rotate, the first cleaning wiping body 34 and the second cleaning wiping body 35 can wipe two mirror surfaces of a lens to be cleaned; the third driving unit is controlled by the electronic control system 6, and the driving time of the third driving unit is determined according to the dirt degree of the cleaned lens and the cleaning step. In specific implementation, the third driving unit is preferably set as a driving motor or a driving unit including a driving motor, and the driving motor is further controlled by the electronic control system 6, when the driving motor is powered, the driving motor drives the first cleaning wiping body 34 and the second cleaning wiping body 35 to perform a cleaning process on two mirror surfaces of the window lens, in order to enable the window lens to be more scientifically cleaned, the driving motor for driving the first cleaning wiping body 34 and the driving motor for driving the second cleaning wiping body 35 can be selectively and independently controlled, so that the dirty mirror surface of the window lens is better cleaned, and meanwhile, the cleaner mirror surface is not in transition cleaning.
As a preferred example in this embodiment, the present application may further selectively enable the second feeding unit 5 to include a second driving unit, a second threaded rod, and a second slider, where the second slider is in threaded transmission connection with the second threaded rod, and the second threaded rod is fixed on the support base 1 and driven by the second driving unit; the second sliding block is fixedly connected with the bottom of one support structure body 31, a guide rail parallel to the axis of the second threaded rod is arranged at one of the relative positions of the support base 1 and the bottom of the support structure body 31, and a sliding groove in sliding fit with the guide rail is arranged at the other of the two; when the second driving unit drives the second threaded rod to rotate, the lens cleaning unit 3 moves along the guide rail relative to the support base 1 and moves close to or away from the lens carrying device 2, the second driving unit is controlled by the electronic control system 6 to enable the mirror surface cleaning unit to run to a set cleaning position, and a cleaned mirror surface is clamped between the first cleaning wiping body 34 and the second cleaning wiping body 35. In specific implementation, it is preferable that the second driving unit is a driving motor or a driving unit including a driving motor, and the driving motor is controlled by the electronic control system 6; the second threaded rod is preferably a lead screw, and the second sliding block is a sliding block which is matched with the lead screw and can transmit power; in a specific working process, the electric control system 6 supplies power to a driving motor associated with a mirror surface cleaning unit for cleaning the window lens, the driving motor drives the lead screw to rotate and drives the mirror surface cleaning unit to act under the action of the second sliding block, so that the mirror surface cleaning unit for cleaning the window lens moves towards the direction of the window lens at a set cleaning position, and after the mirror surface cleaning unit is in place, a cleaning process of a corresponding step is carried out on the window lens; after the cleaning is finished, the driving motor is controlled by the electric control system 6, and then the mirror surface cleaning unit for cleaning the window lens moves towards the direction far away from the window lens at the set cleaning position under the action of the second feeding unit 5.
As an alternative embodiment, in a specific implementation, the present application may further selectively enable the second feeding unit 5 to include a second driving unit, a second gear and a second rack, the second gear is rotatably disposed on the support base 1, the rack is fixedly connected to the support structure 31, the second gear and the second rack are in a meshing transmission arrangement, and the second gear is driven by the second driving unit and can rotate; a guide rail parallel to the movement direction of the second rack is arranged at one position of the relative positions of the bottom parts of the support base 1 and the support structure body 31, and a sliding groove matched with the guide rail in a sliding manner is arranged at the other position of the two positions; when the second driving unit drives the second gear to rotate, the second gear drives the lens cleaning unit 3 to move along the guide rail relative to the support base 1 through the second gear engaged with the second gear, and the lens cleaning unit is close to or far away from the lens carrying device 2, and the third driving unit is controlled by the electronic control system 6 to enable the lens cleaning unit to run to a set cleaning position, and a cleaned lens is clamped between the first cleaning wiping body 34 and the second cleaning wiping body 35. This application is through making the second feeds the unit and includes the transmission of threaded rod and slider or the transmission that includes gear and rack, can guarantee effectively the transmission precision of second feeding unit makes the clean unit of lens can be accurate clean to the window lens that is located clean position, and then makes cleaning device can accurately, reliably clean the window lens.
It should be noted that the drawings in the present application are only schematic, and any technical solutions meeting the requirements of the text of the present application belong to the protection scope of the present application.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the system embodiment, since it is substantially similar to the method embodiment, the description is simple, and for the relevant points, reference may be made to the partial description of the method embodiment.
The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims (10)

1. A cleaning device for a crystal growth furnace window lens, which is characterized in that,
the device comprises a supporting base, a lens bearing device and a plurality of lens cleaning units, wherein the supporting base is provided with a first feeding unit, and the lens bearing device is connected with the first feeding unit so as to feed the lens bearing device according to a set running route;
the lens bearing device comprises a lens holding part which can be matched with the periphery of the lens to be cleaned;
the supporting base is also provided with a plurality of second feeding units, and each lens cleaning unit is connected with one second feeding unit so as to enable the lens cleaning unit to be close to or far away from the lens bearing device;
the lens cleaning unit comprises a cleaning medium feeding unit and a wiping unit for cleaning the mirror surface of the cleaned lens, and the cleaning medium feeding unit supplies cleaning medium to the wiping unit wiping process in the cleaning process;
at least part of the cleaning media which can be provided by the cleaning media supply unit of the lens cleaning unit is set as polishing media, and at least part of the cleaning media which can be provided by the cleaning media supply unit of the lens cleaning unit is set as cleaning liquids;
the lens cleaning device further comprises an electric control system, and the first feeding unit, the second feeding unit and the plurality of lens cleaning units are controlled by the electric control system.
2. The crystal growth furnace window lens cleaning device as claimed in claim 1,
the cleaning process for each lens comprises a first step, a second step and a third step:
in the first step, a cleaning medium supply unit of a lens cleaning unit supplies a cleaning medium, the cleaning medium is set as a polishing medium, and a wiping unit of the lens cleaning unit performs polishing wiping on a mirror surface of a lens;
in the second step, the cleaning medium supply unit of the other lens cleaning unit supplies cleaning liquid, and the wiping unit of the lens cleaning unit wipes the lens surface of the lens;
in the third step, the cleaning medium supply unit of the third lens cleaning unit supplies cleaning liquid, and the wiping unit of the lens cleaning unit wipes the lens surface of the lens;
the cleaning time of the lens cleaning unit is determined according to the degree of contamination of the lens to be cleaned and the cleaning step to be performed.
3. The lens cleaning device for the window of the crystal growth furnace of claim 2,
the supporting base is provided with 3N lens cleaning units, the lens bearing device comprises 3N bearing supports which are arranged at intervals and matched with the 3N lens cleaning units in an alignment mode, and N is a positive integer larger than or equal to 1;
one third of the lens cleaning units being capable of performing the first step, providing polishing media and being capable of providing a polishing wipe to the media being cleaned;
one third of the lens cleaning units can perform the second step to perform a second cleaning of the polished and wiped cleaned lens;
the other third of the lens cleaning units can perform the third step to perform a third cleaning of the cleaned lens wiped by the second step.
4. The crystal growth furnace window lens cleaning device as claimed in claim 3,
the lens bearing device also comprises a bearing table, one end of each bearing support is fixedly connected with the bearing table, and the lens holding part is fixedly arranged at the other end of each bearing support;
the lens cleaning device comprises a plurality of lens cleaning units arranged on one side or two sides of the moving track of the lens bearing device, and each lens cleaning unit is connected with the supporting base through one second feeding unit.
5. The crystal growth furnace window lens cleaning device as claimed in claim 4,
the first feeding unit comprises a first driving unit, a first threaded rod and a first sliding block, the first sliding block is in rotary buckle transmission connection with the first threaded rod, and the first threaded rod is fixedly arranged on the supporting base and driven by the first driving unit; the first sliding block is fixedly connected with the bearing table, one of the opposite positions of the support base and the bearing table is provided with a guide rail parallel to the axis of the first threaded rod, and the other position of the support base and the bearing table is provided with a sliding groove matched with the guide rail in a sliding manner; when the first driving unit drives the first threaded rod to rotate, the lens bearing device moves relative to the support base along the guide rail according to a set track, and the first driving unit is controlled by the electric control system to enable the lens bearing device to move to a set cleaning position.
6. The crystal growth furnace window lens cleaning device as claimed in claim 4,
the first feeding unit comprises a first driving unit, a first gear and a first rack, the first gear is rotatably arranged on the supporting base, the rack is fixedly connected with the bearing table, the first gear and the first rack are in meshing transmission arrangement, and the first gear is driven by the first driving unit and can rotate; a guide rail parallel to the movement direction of the first rack is arranged at one position of the relative position of the support base and the bearing table, and a sliding groove matched with the guide rail in a sliding manner is arranged at the other position of the support base and the bearing table; when the first driving unit drives the first gear to rotate, the first gear drives the lens bearing device to move along the guide rail relative to the support base through the first rack meshed with the first gear, and the first driving unit is controlled by the electric control system to enable the lens bearing device to run to a set cleaning position.
7. The crystal growth furnace window lens cleaning device according to any one of claims 1 to 6,
each mirror surface cleaning device comprises a supporting structure body, a first cantilever part and a second cantilever part are fixedly arranged opposite to two sides of the supporting structure body, a first cleaning wiping body is arranged at the cantilever end of the first cantilever part, and the first cleaning wiping body is in transmission arrangement with a third driving unit; a cantilever end of the second cantilever part is provided with a second cleaning and wiping body, and the second cleaning and wiping body is in transmission arrangement with another third driving unit;
the first cleaning wiping body and the second cleaning wiping body are arranged oppositely, and the height from the first cleaning wiping body and the height from the second cleaning wiping body to the upper surface of the supporting base are the same as the height from the cleaned lens located at the holding part to the upper surface of the supporting base, so that the first cleaning wiping body and the second cleaning wiping body are respectively opposite to two mirror surfaces of the cleaned lens;
when the third driving unit drives the first cleaning wiping body and the second cleaning wiping body to rotate, the first cleaning wiping body and the second cleaning wiping body can wipe two mirror surfaces of a lens to be cleaned;
the third driving unit is controlled by the electronic control system, and the driving time of the third driving unit is determined according to the dirt degree of the cleaned lens and the cleaning step.
8. The crystal growth furnace window lens cleaning device as claimed in claim 7,
the second feeding unit comprises a second driving unit, a second threaded rod and a second sliding block, the second sliding block is in screwing transmission connection with the second threaded rod, and the second threaded rod is fixedly arranged on the supporting base and driven by the second driving unit; the second sliding block is fixedly connected with the bottom of one support structure, one of the relative positions of the support base and the bottom of the support structure is provided with a guide rail parallel to the axis of the second threaded rod, and the other of the support base and the bottom of the support structure is provided with a sliding groove matched with the guide rail in a sliding manner; when the second driving unit drives the second threaded rod to rotate, the lens cleaning unit moves relative to the supporting base along the guide rail and is close to or far away from the lens bearing device, the second driving unit is controlled by the electric control system to enable the lens cleaning unit to run to a set cleaning position, and a cleaned lens is clamped between the first cleaning wiping body and the second cleaning wiping body.
9. The crystal growth furnace window lens cleaning device as claimed in claim 7,
the second feeding unit comprises a second driving unit, a second gear and a second rack, the second gear is rotatably arranged on the supporting base, the rack is fixedly connected with the supporting structure, the second gear and the second rack are in meshing transmission arrangement, and the second gear is driven by the second driving unit and can rotate; a guide rail parallel to the movement direction of the second rack is arranged at one position of the relative positions of the bottom of the support base and the bottom of the support structure, and a sliding groove in sliding fit with the guide rail is arranged at the other position of the support base and the bottom of the support structure; when the second driving unit drives the second gear to rotate, the second gear drives the lens cleaning unit to move along the guide rail relative to the support base through the second gear engaged with the second gear and to be close to or far away from the lens carrying device, and the third driving unit is controlled by the electric control system to enable the lens cleaning unit to run to a set cleaning position, and a cleaned lens is clamped between the first cleaning wiping body and the second cleaning wiping body.
10. The crystal growth furnace window lens cleaning device according to any one of claims 1 to 6,
the cleaning medium is set to be polishing solution; the cleaning solution is set to be alcohol solution.
CN202011438671.8A 2020-12-10 2020-12-10 Lens cleaning device for long crystal furnace window Pending CN112718761A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011438671.8A CN112718761A (en) 2020-12-10 2020-12-10 Lens cleaning device for long crystal furnace window

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