CN112710628B - Ultrasensitive SF6 gas decomposition component detection method based on broadband dual-comb spectroscopy - Google Patents

Ultrasensitive SF6 gas decomposition component detection method based on broadband dual-comb spectroscopy Download PDF

Info

Publication number
CN112710628B
CN112710628B CN202011480526.6A CN202011480526A CN112710628B CN 112710628 B CN112710628 B CN 112710628B CN 202011480526 A CN202011480526 A CN 202011480526A CN 112710628 B CN112710628 B CN 112710628B
Authority
CN
China
Prior art keywords
comb
frequency
optical
gas
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202011480526.6A
Other languages
Chinese (zh)
Other versions
CN112710628A (en
Inventor
张静
黄勤清
杨旭
黄立才
肖黎
罗传仙
梁红胜
王圆圆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan NARI Ltd
State Grid Electric Power Research Institute
Original Assignee
Wuhan NARI Ltd
State Grid Electric Power Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan NARI Ltd, State Grid Electric Power Research Institute filed Critical Wuhan NARI Ltd
Priority to CN202011480526.6A priority Critical patent/CN112710628B/en
Publication of CN112710628A publication Critical patent/CN112710628A/en
Application granted granted Critical
Publication of CN112710628B publication Critical patent/CN112710628B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention provides an ultrasensitive SF based on broadband double-optical comb spectrum 6 The gas decomposition component detecting system includes two optical combs, beam combiner, reinforced gas sample cell, lens, hollow fiber, microphone, audio amplifier and data collecting card. The invention discloses an ultrasensitive SF based on broadband double optical comb spectrum 6 According to the method for detecting the gas decomposition components, the characteristic of wide spectrum coverage of the optical comb is utilized, and simultaneous measurement of a plurality of molecular absorption peaks can be realized by a modulation mode of beat frequency of the double optical comb, so that the dilemma of point-by-point sweep spectrum measurement of the traditional photoacoustic spectrum is solved; the photoacoustic effect and the hollow optical fiber are combined, so that the effective optical path and the action cross section of the interaction of light and molecules are increased, and the problem of low sensitivity of the traditional spectrum detection technology is solved; the technology is applied to SF 6 The detection of the gas decomposition components can effectively improve the detection capability of the power equipment fault gas detection device on complex multicomponent gas.

Description

基于宽带双光梳光谱的超灵敏SF6气体分解组分检测方法Ultrasensitive SF6 gas decomposition component detection method based on broadband dual-comb spectroscopy

技术领域technical field

本发明属于气体检测技术领域,具体地指一种基于宽带双光梳光谱的超灵敏SF6气体分解组分检测系统及方法。The invention belongs to the technical field of gas detection, and specifically refers to an ultrasensitive SF 6 gas decomposition component detection system and method based on broadband dual-comb spectroscopy.

背景技术Background technique

GIS(全封闭式气体组合电器)、敞开式开关、互感器等SF6(六氟化硫)气体绝缘类设备由于占地面积小、可靠性高,在电力系统中得到了广泛应用。由于全部元件都封闭在金属壳中,其早期故障较常规设备更难发现,即使解体检修,由于设备工艺复杂,检修工作难度大、耗时长,因此故障造成的损失也更大。对GIS等设备内部状态进行监测,避免事故的发生一直是国内外科研机构研究的热点。通过检测GIS设备中SF6气体分解产物对设备内部绝缘进行故障诊断和状态评估,具有抗干扰能力强、灵敏度高等特点,被广泛用于设备现场检测分析。在实际的GIS设备中,SF6气体含有微量的空气、水分和矿物油等杂质,这些杂质参与反应生成稳定的分解物,如SO2、SOF2、H2S、HF等。因此,通过检测SF6气体分解产物体积分数对于发现设备潜伏性故障和故障定位有很大帮助。SF 6 (sulfur hexafluoride) gas-insulated equipment such as GIS (totally enclosed gas combined electrical equipment), open switches, and transformers have been widely used in power systems due to their small footprint and high reliability. Since all components are enclosed in metal shells, early failures are more difficult to find than conventional equipment. Even if the equipment is disassembled for maintenance, due to the complex process of the equipment, the maintenance work is difficult and time-consuming, so the loss caused by the failure is also greater. Monitoring the internal status of GIS and other equipment to avoid accidents has always been a research hotspot of scientific research institutions at home and abroad. By detecting the decomposition products of SF 6 gas in GIS equipment, the fault diagnosis and status evaluation of the internal insulation of the equipment are carried out. It has the characteristics of strong anti-interference ability and high sensitivity, and is widely used in the on-site detection and analysis of equipment. In the actual GIS equipment, SF 6 gas contains trace impurities such as air, water and mineral oil, and these impurities participate in the reaction to generate stable decomposition products, such as SO 2 , SOF 2 , H 2 S, HF, etc. Therefore, detecting the volume fraction of SF 6 gas decomposition products is of great help in discovering latent faults and fault location of equipment.

现行的气体检测手段主要包括:接触式技术(如:半导体式传感器、接触燃烧式传感器、电化学式传感器)和非接触式技术(如:傅里叶变换红外光谱法、光谱吸收法)。然而,现行气体检测方案存在如下问题:The current gas detection methods mainly include: contact technology (such as: semiconductor sensor, contact combustion sensor, electrochemical sensor) and non-contact technology (such as: Fourier transform infrared spectroscopy, spectral absorption method). However, the current gas detection scheme has the following problems:

1)接触式检测技术针对的气体种类单一,可监测气体类别非常有限,不能对SF6分解物进行全面检测,从而引入单一数据误差,导致误判;并且此类技术存在定点检测或需人为现场操作等弊端;特别是针对危险气体,存在使用寿命较短,易被腐蚀的问题,且无法做到在线实时监测。1) The contact detection technology targets a single type of gas, and the gas types that can be monitored are very limited. It cannot comprehensively detect SF 6 decomposition products, thereby introducing a single data error, resulting in misjudgment; and this type of technology has fixed-point detection or requires on-site inspection. Operation and other disadvantages; especially for dangerous gases, there are problems of short service life, easy to be corroded, and online real-time monitoring cannot be achieved.

2)非接触式的光学检测方案中,主要包括以下几种技术。2) The non-contact optical detection scheme mainly includes the following technologies.

a)基于频率调制的可调谐半导体激光吸收光谱(即TDLAS)。通过调谐激光器的波长(或频率),逐点检测透过吸收池的透射光强来获取吸收谱。结合长光程气体池,其测量灵敏度高、精度高、分辨率高,但是测量速度极慢,检测气体种类有限,且成本高昂。a) Frequency-modulation-based tunable semiconductor laser absorption spectroscopy (i.e., TDLAS). The absorption spectrum is obtained by tuning the wavelength (or frequency) of the laser and detecting the transmitted light intensity through the absorption cell point by point. Combined with a long optical path gas cell, it has high measurement sensitivity, high precision, and high resolution, but the measurement speed is extremely slow, the types of detected gases are limited, and the cost is high.

b)差分吸收光谱技术(即DOAS)。利用样品对光的差分吸收实现物质浓度测量。其优点是可以同时测量多种痕量气体,但缺点是该技术仅限于所测波段的窄吸收谱线的气体分子,另外其监测体系也会受到环境中水汽的影响。b) Differential Absorption Spectroscopy (ie DOAS). The differential absorption of light by a sample is used to measure the concentration of a substance. Its advantage is that multiple trace gases can be measured at the same time, but the disadvantage is that the technology is limited to gas molecules with narrow absorption lines in the measured band, and its monitoring system will also be affected by water vapor in the environment.

c)光声光谱技术(PAS)。光声光谱检测系统一般包括光源、光调制器、光声池、微音器、解调器,以及音频放大器等器件。其工作过程是,利用光调制器对光源辐射进行周期性强度调制。调制光随后进入光声池,与气体分子相互作用。待测分子吸收光能后被激发到高能态,并向往辐射热能,产生调制频率的声波。此时,微音器接收声波。该方法可以对在红外光源发射谱范围内有明显吸收的气体进行浓度检测,光谱范围的选择可以通过滤波片实现。该方法的不足之处在于,由于红外光源的相干性与稳定性低,导致检测精度低、分辨率低,以及可重复性差。此外,难以实现对多组分气体吸收峰同时测量,也是该方法的一个弊端。c) Photoacoustic spectroscopy (PAS). A photoacoustic spectroscopy detection system generally includes a light source, an optical modulator, a photoacoustic cell, a microphone, a demodulator, and an audio amplifier. Its working process is to use the light modulator to periodically modulate the intensity of the light source radiation. The modulated light then enters the photoacoustic cell, where it interacts with gas molecules. After absorbing the light energy, the molecules to be tested are excited to a high energy state, and yearn to radiate heat energy to generate sound waves with modulated frequencies. At this time, the microphone receives sound waves. The method can detect the concentration of the gas with obvious absorption in the emission spectrum range of the infrared light source, and the selection of the spectrum range can be realized by a filter. The disadvantage of this method is that due to the low coherence and stability of the infrared light source, the detection accuracy is low, the resolution is low, and the repeatability is poor. In addition, it is difficult to realize simultaneous measurement of multi-component gas absorption peaks, which is also a drawback of this method.

光学频率梳(简称“光梳”),是一种相干性好,时频特性稳定的宽谱带激光光源。基于光梳的光谱检测技术可以实现上百个分子吸收峰的同时、高精度、高分辨测量。但是,由于光梳光谱宽,能量分散,从而导致该方法检测灵敏度低,尚不能与上述几种传统气体检测技术相比。Optical frequency comb (referred to as "optical comb") is a broadband laser light source with good coherence and stable time-frequency characteristics. Optical comb-based spectral detection technology can realize simultaneous, high-precision, and high-resolution measurement of hundreds of molecular absorption peaks. However, due to the wide spectrum and energy dispersion of the optical comb, the detection sensitivity of this method is low, and it cannot be compared with the above-mentioned several traditional gas detection technologies.

光谱检测技术在电力设备故障排查与预警等方面具有重要应用价值。然而,由于电气设备故障特征气体的组分复杂、含量不一,因此对气体检测技术的气体识别或分辨能力(选择性)、灵敏度、准确性,以及可检测气体种类等特性提出严苛要求。Spectral detection technology has important application value in troubleshooting and early warning of power equipment. However, due to the complex components and different contents of the characteristic gases of electrical equipment faults, strict requirements are placed on the characteristics of gas detection technology such as gas identification or resolution (selectivity), sensitivity, accuracy, and detectable gas types.

现有的非接触式气体检测技术或多或少地存在着光谱精度与准确度低的问题,检测灵敏度有限的问题,定量分析困难和信息采集量内容有限的问题。上述问题在很大程度上制约了目前气体检测的准确性和输变电设备评估的实时性和可靠性。The existing non-contact gas detection technology more or less has the problems of low spectral precision and accuracy, limited detection sensitivity, difficult quantitative analysis and limited information collection. The above problems largely restrict the accuracy of current gas detection and the real-time and reliability of power transmission and transformation equipment evaluation.

发明内容Contents of the invention

本发明的目的是提出一种采用光梳源作为激励源,提高激发光的时频稳定性和相干性,进而提升测量的精度与可重复性;通过双光梳的多纵模拍频效应,实现对多个分子吸收峰的频率调制,产生与吸收峰相对应的光声音频信号,并同时被微音器检测;通过将激光与分子束缚在空心光纤内的方式,增加分子与光相互作用截面,提高分子吸收强度,提升光声信号的检测灵敏度的基于宽带双光梳光谱的超灵敏SF6气体分解组分检测系统及方法。The purpose of the present invention is to propose an optical comb source as the excitation source, improve the time-frequency stability and coherence of the excitation light, and then improve the accuracy and repeatability of the measurement; through the multi-longitudinal mode beat frequency effect of the dual optical comb, Realize the frequency modulation of multiple molecular absorption peaks, generate photoacoustic audio signals corresponding to the absorption peaks, and be detected by the microphone at the same time; increase the interaction between molecules and light by confining the laser and molecules in the hollow fiber The ultra-sensitive SF 6 gas decomposition component detection system and method based on broadband dual-comb spectroscopy to increase the molecular absorption intensity and improve the detection sensitivity of photoacoustic signals.

为实现上述目的,本发明所采用的技术方案是:To achieve the above object, the technical solution adopted in the present invention is:

一种基于宽带双光梳光谱的超灵敏SF6气体分解组分检测系统,所述系统包括:A kind of ultrasensitive SF6 gas decomposition component detection system based on broadband double optical comb spectrum, described system comprises:

1)光梳光源:所述光梳光源共两台,所述光梳光源载波包络相位零频与重复频率分别为:f01和fr1,以及f02和fr2;每台光梳有n个频率齿构成;其中第n个梳齿的频率为f0+nfr。两台光梳第n个梳齿的频率差fb=|(f02+nfr2)-(f01+nfr1)|,那么所述两台光梳第n个梳齿的拍频信号。通过调谐激光器参数即f0和fr,可以使拍频信号fb在音频频域(20Hz-20kHz),两台宽带光梳激光器输出光通过合束器空间重合,形成双光梳激光光束.1) Optical comb light source: There are two optical comb light sources, and the carrier envelope phase zero frequency and repetition frequency of the optical comb light source are respectively: f 01 and f r1 , and f 02 and f r2 ; each optical comb has It consists of n frequency teeth; the frequency of the nth comb tooth is f 0 +nf r . The frequency difference f b =|(f 02 +nf r2 )-(f 01 +nf r1 )| of the nth tooth of the two optical combs is the beat frequency signal of the nth tooth of the two optical combs. By tuning the laser parameters f 0 and f r , the beat frequency signal f b can be in the audio frequency domain (20Hz-20kHz), and the output lights of two broadband optical comb lasers are spatially overlapped by the beam combiner to form a double optical comb laser beam.

2)合束器:用于将两个光梳的输出光耦合成空间重合的光束。2) Beam combiner: used to couple the output lights of two optical combs into spatially coincident beams.

3)增强型增强型气样池:用于超灵敏气体光声光谱检测,增强型气样池,所述气样池包括一个进气口,一个出气口,一个通光窗口,一段缠绕于微音器上的空心光纤和一个将激光耦合进光纤的耦合透镜。空心光纤是指将光纤作成空心,形成圆筒状空间的光传输介质,通过透镜耦合进入空心光纤;空心光纤内含有待测气体分子.3) Enhanced enhanced gas sample cell: used for ultra-sensitive gas photoacoustic spectroscopy detection, enhanced gas sample cell, the gas sample cell includes an air inlet, an air outlet, a light window, and a section wound on the micro A hollow-core fiber on the sounder and a coupling lens that couples the laser light into the fiber. Hollow-core optical fiber refers to the optical transmission medium that makes the optical fiber hollow to form a cylindrical space, and is coupled into the hollow-core optical fiber through the lens; the hollow-core optical fiber contains gas molecules to be measured.

4)微音器:用于接收音频信号。4) Microphone: used to receive audio signals.

5)音频放大器:用于对弱信号放大。5) Audio amplifier: used to amplify weak signals.

6)数据采集卡:用于记录音频信号。6) Data acquisition card: used to record audio signals.

利用上述的基于宽带双光梳光谱的超灵敏SF6气体分解组分检测系统,本发明还提供了Utilize above-mentioned ultrasensitive SF6 gas decomposition component detection system based on broadband dual-comb spectrum, the present invention also provides

一种基于宽带双光梳光谱的超灵敏SF6气体分解组分检测方法,所述检测方法包括如下步骤:A kind of ultrasensitive SF6 gas decomposition component detection method based on broadband double optical comb spectrum, described detection method comprises the steps:

步骤1:两台宽带光梳激光器输出光通过合束器空间重合,形成双光梳激光光束;这里光梳的光谱需涵盖多个分子吸收峰;Step 1: The output light of two broadband optical comb lasers is spatially overlapped by a beam combiner to form a double optical comb laser beam; here the spectrum of the optical comb needs to cover multiple molecular absorption peaks;

步骤2:双光梳激光射入增强型气样池,并通过透镜耦合进入空心光纤;空心光纤内含有待测气体分子;当两台光梳的第n个梳齿频率在气体分子吸收峰频谱范围内时,分子将吸收该频率的光梳光子,并进入振动能级的高激发态,振动频率等于激发光频率,即分别为(f02+nfr2)和(f01+nfr1);两个不同频率振动态之间产生一个拍频信号,即fb=|(f02+nfr2)-(f01+nfr1)|;在光声效应作用下,分子的振动被转化为音频信号,信号频率为fbStep 2: The double-comb laser is injected into the enhanced gas sample cell, and coupled into the hollow fiber through the lens; the hollow fiber contains the gas molecules to be measured; When within the range, the molecule will absorb the optical comb photons of this frequency, and enter into a high excited state of the vibration energy level, the vibration frequency is equal to the frequency of the excitation light, namely (f 02 +nf r2 ) and (f 01 +nf r1 ); A beat frequency signal is generated between two vibration states of different frequencies, that is, f b = |(f 02 +nf r2 )-(f 01 +nf r1 )|; under the photoacoustic effect, the vibration of molecules is converted into audio frequency signal, the signal frequency is f b ;

步骤3:光纤缠绕于微音器周围,微音器可以有效接收分子振动引起的音频信号,即拍频信号fbStep 3: The optical fiber is wound around the microphone, and the microphone can effectively receive the audio signal caused by molecular vibration, that is, the beat frequency signal f b ;

步骤4:音频信号经过放大器后被放大,然后由数据采集卡进行记录;记录的信号为时域波形;对波形进行离散傅里叶变换后可获得拍频信号的频率;因为不同吸收峰,吸收频率不同,产生的拍频信号亦不相同,因此可以通过测量拍频信号频率的方式进行区分,从而实现对多个气体分子吸收峰的同时测量;同时,由于激光和分子被束缚在空心光纤内,增加了光与分子相互作用距离与吸收截面,提高了检测灵敏度,从而实现对多组分六氟化硫电气设备分解产物的超灵敏光谱检测。Step 4: The audio signal is amplified after passing through the amplifier, and then recorded by the data acquisition card; the recorded signal is a time domain waveform; the frequency of the beat frequency signal can be obtained after discrete Fourier transform of the waveform; because of different absorption peaks, the absorption Different frequencies produce different beat signals, so it can be distinguished by measuring the frequency of the beat signal, so as to realize the simultaneous measurement of the absorption peaks of multiple gas molecules; at the same time, since the laser and molecules are bound in the hollow fiber , increasing the interaction distance and absorption cross-section between light and molecules, and improving the detection sensitivity, so as to realize the ultra-sensitive spectral detection of the decomposition products of multi-component sulfur hexafluoride electrical equipment.

本发明利用宽谱带双光梳光源对光声光谱进行测量,增加了光声光谱测量的多吸收峰同时测量难题,提高对复杂多组分电力设备故障气体检测的分辨能力,解决传统技术交叉敏感的问题和选择性差的问题;通过采用空心光纤与光声光谱、光梳光谱结合的方法,增加光谱的谱宽以及检测灵敏度。本发明相较于传统气体光谱分析法而言,具有灵敏度高,分辨率高,多个吸收峰同时检测等优势,可以实现对电网故障设备特征气体的光谱谱线的高效、准确分析。The invention uses a wide-band dual-comb light source to measure the photoacoustic spectrum, which increases the problem of simultaneous measurement of multiple absorption peaks in the photoacoustic spectrum measurement, improves the resolution ability of complex multi-component power equipment fault gas detection, and solves the traditional technology. Sensitivity and poor selectivity; by combining hollow-core optical fiber with photoacoustic spectroscopy and optical comb spectroscopy, the spectral width and detection sensitivity of the spectrum are increased. Compared with the traditional gas spectroscopic analysis method, the present invention has the advantages of high sensitivity, high resolution, simultaneous detection of multiple absorption peaks, etc., and can realize efficient and accurate analysis of the spectral lines of the characteristic gases of power grid fault equipment.

附图说明Description of drawings

图1为本发明的结构示意图;Fig. 1 is a structural representation of the present invention;

图2为本发明中双光梳拍频的原理图;Fig. 2 is the schematic diagram of dual optical comb beat frequency among the present invention;

图3为本发明中增强型气体池的内容结构图;Fig. 3 is the content structure diagram of enhanced gas pool in the present invention;

图4为本发明的实施例结构示意图。Fig. 4 is a schematic structural diagram of an embodiment of the present invention.

图中,1,2—光梳激光源、3—偏振控制器、4—合束器、5—半波片、6—增强型气样池、7—透镜、8—空心光纤、9—微音器、10—滤波器、11—音频放大器、12—数据采集卡。In the figure, 1, 2—optical comb laser source, 3—polarization controller, 4—beam combiner, 5—half-wave plate, 6—enhanced gas sample cell, 7—lens, 8—hollow fiber, 9—micro Speaker, 10—filter, 11—audio amplifier, 12—data acquisition card.

具体实施方式Detailed ways

以下结合附图和具体实施例对本发明作进一步的详细说明:Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:

一种基于宽带双光梳光谱的超灵敏SF6气体分解组分检测系统(图1),所述系统包括:A kind of ultra-sensitive SF gas decomposition component detection system (Fig. 1) based on broadband double optical comb spectrum, said system comprises:

1)光梳光源:所述光梳光源共两台,所述光梳光源载波包络相位零频与重复频率分别为:f01和fr1,以及f02和fr2;每台光梳有n个频率齿构成;其中第n个梳齿的频率为f0+nfr(图2)。两台光梳第n个梳齿的频率差fb=|(f02+nfr2)-(f01+nfr1)|,那么所述两台光梳第n个梳齿的拍频信号。通过调谐激光器参数即f0和fr,可以使拍频信号fb在音频频域(20Hz-20kHz)。1) Optical comb light source: There are two optical comb light sources, and the carrier envelope phase zero frequency and repetition frequency of the optical comb light source are respectively: f 01 and f r1 , and f 02 and f r2 ; each optical comb has It consists of n frequency teeth; the frequency of the nth comb tooth is f 0 +nf r (Figure 2). The frequency difference f b =|(f 02 +nf r2 )-(f 01 +nf r1 )| of the nth tooth of the two optical combs is the beat frequency signal of the nth tooth of the two optical combs. By tuning the laser parameters f 0 and f r , the beat frequency signal f b can be in the audio frequency domain (20Hz-20kHz).

2)合束器:用于将两个光梳的输出光耦合成空间重合的光束。2) Beam combiner: used to couple the output lights of two optical combs into spatially coincident beams.

3)增强型增强型气样池:用于超灵敏气体光声光谱检测,增强型气样池(图3),所述气样池包括一个进气口,一个出气口,一个通光窗口,一段缠绕于微音器上的空心光纤和一个将激光耦合进光纤的耦合透镜。空心光纤是指将光纤作成空心,形成圆筒状空间的光传输介质。3) Enhanced enhanced gas sample cell: for ultra-sensitive gas photoacoustic spectroscopy detection, enhanced gas sample cell (Figure 3), the gas sample cell includes an air inlet, an air outlet, and a light-through window, A section of hollow fiber wrapped around the microphone and a coupling lens that couples the laser light into the fiber. Hollow-core optical fiber refers to the optical transmission medium in which the optical fiber is made hollow to form a cylindrical space.

4)微音器:用于接收音频信号。4) Microphone: used to receive audio signals.

5)音频放大器:用于对弱信号放大。5) Audio amplifier: used to amplify weak signals.

6)数据采集卡:用于记录音频信号。6) Data acquisition card: used to record audio signals.

如图4所示的本发明的基于宽带双光梳光谱的超灵敏SF6气体分解组分检测系统,包括光梳激光源1和2、偏振控制器3、合束器4、半波片5、增强型气样池6、透镜7、空心光纤8和微音器9,滤波器10、音频放大器11—、数据采集卡12。所述光梳1和2的输出光,通过合束器4进行空间合束,其中一路光梳光经过一个偏振控制器,调节偏振态,使两路光梳偏振相同。空间重合与偏振态控制是实现两者光学拍频的必要条件。合束后,激光通过一个半波片,优化激光偏振态,使其通过透镜7后,能以最佳耦合效率进入空心光纤8。双光梳光束与光纤中的待测气体分子相互作用,被吸收后,通过光声效应产生声波信号,并由微音器9接收。微音器9的输出音频信号,通过滤波器10,滤除背景与高频噪声后,经过音频放大器11进行放大,最后由数据采集卡12进行数据记录与信号处理。As shown in Figure 4, the ultrasensitive SF6 gas decomposition component detection system based on broadband double optical comb spectrum of the present invention comprises optical comb laser source 1 and 2, polarization controller 3, beam combiner 4, half-wave plate 5 , Enhanced gas sample cell 6, lens 7, hollow fiber 8 and microphone 9, filter 10, audio amplifier 11-, data acquisition card 12. The output lights of the optical combs 1 and 2 are spatially combined by the beam combiner 4, wherein one optical comb light passes through a polarization controller to adjust the polarization state so that the two optical combs have the same polarization. Spatial coincidence and polarization state control are the necessary conditions to realize the optical beat frequency of both. After beam combining, the laser light passes through a half-wave plate to optimize the polarization state of the laser light so that it can enter the hollow fiber 8 with the best coupling efficiency after passing through the lens 7 . The double-comb light beam interacts with the gas molecules to be measured in the optical fiber, and after being absorbed, an acoustic wave signal is generated through the photoacoustic effect, and is received by the microphone 9 . The output audio signal of the microphone 9 passes through the filter 10 to filter out the background and high-frequency noise, and then is amplified by the audio amplifier 11, and finally the data acquisition card 12 performs data recording and signal processing.

上述技术方案中,待测气体通过进气口,导入增强型气样池6中。测量中,增强型气样池进出气口密闭,池内气体通过扩散过程,进入空心光纤。待测量结束后,通过出气口,对气体池抽真空,排出原残留样品气体。In the above technical solution, the gas to be measured is introduced into the enhanced gas sample cell 6 through the air inlet. During the measurement, the gas inlet and outlet of the enhanced gas sample cell are sealed, and the gas in the cell enters the hollow fiber through the diffusion process. After the measurement is finished, the gas cell is evacuated through the gas outlet to discharge the original residual sample gas.

上述技术方案中,微音器9用于测量分子吸收双光梳光后产生的声波信号,信号频率等于被吸收的双光梳梳齿间的拍频信号fb。不同吸收峰产生音频频率不同,可以用于对吸收峰进行区分,进而实现对气体种类的鉴别。In the above technical solution, the microphone 9 is used to measure the acoustic wave signal generated by molecules absorbing the light of the double-light comb, and the frequency of the signal is equal to the beat frequency signal f b between the teeth of the absorbed double-light comb. Different absorption peaks produce different audio frequencies, which can be used to distinguish absorption peaks, thereby realizing the identification of gas types.

上述技术方案中,所述电信号由放大器11放大后,通过数据采集卡12采集,并利用傅里叶变换方法得到待测气体的光声光谱强度信号,该信号与气体的浓度成正比关系,可以用于识别气体的浓度与气体的种类。In the above technical solution, after the electrical signal is amplified by the amplifier 11, it is collected by the data acquisition card 12, and the photoacoustic spectrum intensity signal of the gas to be measured is obtained by using the Fourier transform method, and the signal is proportional to the concentration of the gas. It can be used to identify the concentration and type of gas.

利用上述基于宽带双光梳光谱的超灵敏SF6气体分解组分检测系统,本实施例的检测方法,包括如下步骤:Utilize above-mentioned ultrasensitive SF6 gas decomposition component detection system based on broadband dual-comb spectrum, the detection method of the present embodiment, comprises the following steps:

步骤1:两台宽带光梳激光器1和2输出光通过合束器4空间重合,形成双光梳激光光束;Step 1: The output lights of two broadband optical comb lasers 1 and 2 are spatially overlapped by a beam combiner 4 to form a double optical comb laser beam;

步骤2:双光梳激光射入增强型气样池6,并通过透镜7耦合进入空心光纤8;空心光纤内含有待测气体分子,在光声效应作用下,分子的振动被转化为音频信号,信号频率为fbStep 2: The double-comb laser is injected into the enhanced gas sample cell 6, and coupled into the hollow fiber 8 through the lens 7; the hollow fiber contains the gas molecules to be measured, and the vibration of the molecules is converted into an audio signal under the action of the photoacoustic effect , the signal frequency is f b ;

步骤3:光纤缠绕于微音器周围,微音器可以有效接收分子振动引起的音频信号,即拍频信号fbStep 3: The optical fiber is wound around the microphone, and the microphone can effectively receive the audio signal caused by molecular vibration, that is, the beat frequency signal f b ;

步骤4:音频信号经过放大器后被放大,然后由数据采集卡进行记录;记录的信号为时域波形;对波形进行离散傅里叶变换后可获得拍频信号的频率;因为不同吸收峰,吸收频率不同,产生的拍频信号亦不相同,因此可以通过测量拍频信号频率的方式进行区分,从而实现对多个气体分子吸收峰的同时测量;同时,由于激光和分子被束缚在空心光纤内,增加了光与分子相互作用距离与吸收截面,提高了检测灵敏度,从而实现对多组分六氟化硫电气设备分解产物的超灵敏光谱检测。Step 4: The audio signal is amplified after passing through the amplifier, and then recorded by the data acquisition card; the recorded signal is a time domain waveform; the frequency of the beat frequency signal can be obtained after discrete Fourier transform of the waveform; because of different absorption peaks, the absorption Different frequencies produce different beat signals, so it can be distinguished by measuring the frequency of the beat signal, so as to realize the simultaneous measurement of the absorption peaks of multiple gas molecules; at the same time, since the laser and molecules are bound in the hollow fiber , increasing the interaction distance and absorption cross-section between light and molecules, and improving the detection sensitivity, so as to realize the ultra-sensitive spectral detection of the decomposition products of multi-component sulfur hexafluoride electrical equipment.

上述技术方案中,如图2所示,所述的光梳是指一个宽带相干激光光源,光谱范围在1~12μm之间皆可,其光谱呈现梳齿状分布,即光谱由N根等间距分布的频率齿或梳齿组成,N为任意整数,通常N在103~106之间,其中每根频率齿相当于一束单纵模激光,光梳的第一根梳齿的频率为f0,彼此相邻梳齿的频率间距为fr,则第n根梳齿的绝对频率表示为:fn=f0+nfr,其中0<n<N。In the above technical solution, as shown in Figure 2, the optical comb refers to a broadband coherent laser light source, the spectral range is between 1 and 12 μm, and its spectrum presents a comb-like distribution, that is, the spectrum consists of N equally spaced Distributed frequency teeth or comb teeth, N is any integer, usually N is between 10 3 and 10 6 , where each frequency tooth is equivalent to a beam of single longitudinal mode laser, and the frequency of the first comb tooth of the optical comb is f 0 , the frequency spacing between adjacent comb teeth is f r , then the absolute frequency of the nth comb tooth is expressed as: f n =f 0 +nf r , where 0<n<N.

上述技术方案中,所述的双光梳是指载波包络相位零频(即第一根梳齿的频率)与重复频率分别为:f01和fr1以及f02和fr2的光梳。In the above technical solution, the dual optical comb refers to an optical comb with a carrier envelope phase of zero frequency (that is, the frequency of the first comb tooth) and a repetition frequency of f 01 and f r1 and f 02 and f r2 , respectively.

上述技术方案中,当两台光梳的第n个梳齿频率在气体分子吸收峰频谱范围内时,分子将吸收该频率的光梳光子,并进入振动能级的高激发态,振动频率等于激发光频率,即分别为(f02+nfr2)和(f01+nfr1);两个不同频率振动态之间产生一个拍频信号,即fb=|(f02+nfr2)-(f01+nfr1)|。受激分子引发介质折射率的周期变化,周期频率为fb。这种折射率的变化将形成频率为fb的声波,通过气体与空心光纤,传递给微音器9。由于光梳源具有宽带光谱特性,因此可以一次同时激发多个分子吸收峰,产生不同频率的声波信号。声波频率与吸收峰或吸收谱线呈一一对应关系,因此,可以通过微音器9同时检测这些音频信号,达到测量多个吸收峰的目的。In the above technical solution, when the frequency of the nth comb teeth of the two optical combs is within the spectrum range of the absorption peak of gas molecules, the molecules will absorb the optical comb photons of this frequency and enter a high excited state of vibration energy level, the vibration frequency is equal to The excitation light frequencies are respectively (f 02 +nf r2 ) and (f 01 +nf r1 ); a beat frequency signal is generated between two vibration states of different frequencies, that is, f b =|(f 02 +nf r2 )- (f 01 +nf r1 )|. The excited molecules induce periodic changes in the refractive index of the medium with a periodic frequency f b . This change in the refractive index will form a sound wave with frequency f b , which will be transmitted to the microphone 9 through the gas and the hollow fiber. Due to the broadband spectral characteristics of the optical comb source, multiple molecular absorption peaks can be simultaneously excited at one time to generate acoustic signals of different frequencies. There is a one-to-one correspondence between the sound wave frequency and the absorption peak or absorption line. Therefore, these audio signals can be detected simultaneously by the microphone 9 to achieve the purpose of measuring multiple absorption peaks.

上述技术方案中,空心光纤8的作用是将光束与分子束缚在狭小的物理空间内,增加相互作用截面,同时,光纤可以增加光与分子相互作用长度,规避样品池物理空间对有效光程的限制,最终达到提升检测灵敏度的目的。In the above technical solution, the role of the hollow fiber 8 is to confine the light beam and molecules in a narrow physical space and increase the interaction cross-section. Limit, and finally achieve the purpose of improving the detection sensitivity.

上述技术方案中,所述六氟化硫电气设备分解产物是指具有红外吸收特征的电气设备故障特征气体,如H2S、HF、SO2、CO、CO2In the above technical solution, the decomposition products of sulfur hexafluoride electrical equipment refer to gases characteristic of electrical equipment failure with infrared absorption characteristics, such as H 2 S, HF, SO 2 , CO, CO 2 .

实施例1:Example 1:

以针对氟化氢(HF)气体分子在1.28μm附近的吸收峰群进行测量为例。Take the measurement of the absorption peak group of hydrogen fluoride (HF) gas molecules around 1.28 μm as an example.

如图4所示,采用两台中心波长在1.28μm附近的光梳光源。其中一台经过一个偏振控制器,调节偏振状态。两台光梳经过50:50的合束器4后空间重合。两台光梳的重复频率(即梳齿间距)fr1=10MHz,fr2=10MHz+1Hz,载波包络相位零频f0,均设置为0(通常采用调节光梳泵浦光功率的方式实现)。As shown in Figure 4, two optical comb light sources with a center wavelength around 1.28 μm are used. One of them passes through a polarization controller to adjust the polarization state. The two optical combs overlap in space after passing through the 50:50 beam combiner 4. The repetition frequency of the two optical combs (that is, the spacing between the teeth of the combs) f r1 = 10MHz, f r2 = 10MHz+1Hz, and the carrier envelope phase zero frequency f 0 are all set to 0 (usually by adjusting the pumping power of the optical comb accomplish).

双光梳光束经过半波片5后,进入充有HF气体的增强型气样池6中。光束经过数值孔径为NA=0.5的透镜,耦合进入空心光纤。空心光纤孔径为10μm,长度为10m。光纤缠绕于微音器9四周。光梳引发的光声信号被附在池壁的微音器9捕捉并转化为电信号,对电信号进行噪声抑制和放大后,送入数据采集卡进行采集处理。其中,采集信号为时域信号,通过傅里叶时频变换,得到声波的频率特征,进而获取HF相应的光谱信息。例如,若两个光梳的第n个梳齿被HF分子吸收,则会产生一个频率为fb的信号。第n个梳齿之间的拍频信号fb=n·|fr2-fr1|。fr2-fr1=1Hz为已知量,为fb为微音器9的测量值。由此,可以计算出n的取值。因此,吸收谱线对应的频率为nfr2及nfr1,强度则于声波音频信号的幅度呈正比关系。After passing through the half-wave plate 5, the double optical comb beam enters the enhanced gas sample cell 6 filled with HF gas. The beam passes through a lens with a numerical aperture of NA=0.5 and is coupled into a hollow fiber. The hollow fiber has an aperture of 10 μm and a length of 10 m. The optical fiber is wound around the microphone 9. The photoacoustic signal generated by the optical comb is captured by the microphone 9 attached to the pool wall and converted into an electrical signal. After the electrical signal is noise-suppressed and amplified, it is sent to the data acquisition card for acquisition and processing. Among them, the acquisition signal is a time-domain signal, and the frequency characteristics of the sound wave are obtained through Fourier time-frequency transformation, and then the corresponding spectral information of HF is obtained. For example, if the nth teeth of two optical combs are absorbed by HF molecules, a signal with frequency f b will be generated. The beat frequency signal f b between the nth comb teeth = n · | f r2 - f r1 |. f r2 −f r1 =1 Hz is a known quantity, and f b is a measured value of the microphone 9 . From this, the value of n can be calculated. Therefore, the frequencies corresponding to the absorption spectral lines are nf r2 and nf r1 , and the intensity is proportional to the amplitude of the sound wave audio signal.

综上所述,本发明提出的一种基于宽带双光梳光谱的超灵敏SF6气体分解组分检测系统与方法,可实现多分子吸收峰的同时测量,并且在灵敏度和选择性方面都占据优势,可以获得分子的单个或几个距离较近难以分辨的吸收谱信息,同时也解决了各气体吸收峰之间交叉敏感的问题。本系统在电网安全维护方面可以实现高灵敏度快速响应的特征气体(如SF6气体及其分解产物)光谱谱线参数分析。利用本方法对可以以灵敏、准确的方式测定气体的浓度、含量、种类等重要信息,为电网运行安全与故障特征气体检测提供途径。In summary, a kind of ultra-sensitive SF 6 gas decomposition component detection system and method based on broadband dual-comb spectroscopy proposed by the present invention can realize the simultaneous measurement of multi-molecular absorption peaks, and it occupies an important position in both sensitivity and selectivity. The advantage is that it can obtain the absorption spectrum information of single or several molecules that are difficult to distinguish at a short distance, and it also solves the problem of cross-sensitivity between the absorption peaks of various gases. In terms of power grid security maintenance, this system can realize the analysis of spectral line parameters of characteristic gases (such as SF 6 gas and its decomposition products) with high sensitivity and fast response. The method can be used to measure important information such as the concentration, content, and type of gas in a sensitive and accurate manner, and provides a way for power grid operation safety and fault characteristic gas detection.

本说明书未作详细描述的内容属于本领域专业技术人员公知的现有技术。The content not described in detail in this specification belongs to the prior art known to those skilled in the art.

Claims (3)

1. The method comprises the following steps ofUltrasensitive SF based on broadband double-optical comb spectrum 6 The gas decomposition component detecting system is characterized in that: the system comprises:
optical comb light source: for the generation of a light source,
the number of the optical comb light sources is two, and the carrier envelope phase zero frequency and the repetition frequency of the optical comb light sources are respectively: f01 and fr1, and f02 and fr2; each optical comb is composed of n frequency teeth; the frequency of the nth comb tooth is f0+ nfr, the frequency difference fb of the nth comb teeth of the two optical combs is = | (f02+ nfr 2) - (f01+ nfr 1) |, then the beat frequency signals of the nth comb teeth of the two optical combs can make the beat frequency signals fb in the audio frequency domain (20 Hz-20 kHz) by tuning the parameters f0 and fr of the laser, and the output light of the two broadband optical comb lasers are overlapped through the beam combiner to form a double optical comb laser beam;
a beam combiner: the optical comb is used for optically coupling the output light of the optical comb into spatially coincident light beams;
enhancement type gas sample pool: is used for the photo-acoustic spectrum detection of ultrasensitive gas,
the enhanced gas sample pool comprises an air inlet, an air outlet, a light-passing window, a section of hollow optical fiber wound on the microphone and a coupling lens for coupling laser into the optical fiber, wherein the hollow optical fiber is a light transmission medium which is formed into a cylindrical space by making the optical fiber hollow, and double-light comb laser light enters the enhanced gas sample pool and is coupled into the hollow optical fiber through the lens; the hollow optical fiber contains gas molecules to be detected;
a microphone: for receiving an audio signal;
an audio amplifier: for amplifying weak signals;
a data acquisition card: for recording audio signals.
2. Ultrasensitive SF based on broadband double optical comb spectra as recited in claim 1 6 The gas decomposition component detecting system is characterized in that: the hollow optical fiber has the functions of binding light beams and molecules in a narrow physical space, increasing the interaction section, increasing the interaction length of the light and the molecules, avoiding the limitation of the physical space of a sample cell on the effective optical path, and finally achieving the purpose of liftingThe purpose of the detection sensitivity is to be improved.
3. Ultrasensitive SF based on broadband double optical comb spectra as claimed in any of claims 1-2 6 The detection method of the gas decomposition component detection system comprises the following steps:
step 1: the output light of the two broadband optical comb lasers are overlapped through the beam combiner to form a double optical comb laser beam; the spectrum of the optical comb needs to cover a plurality of molecular absorption peaks;
step 2: the double-light comb laser light enters the enhanced gas sample cell and is coupled into the hollow optical fiber through the lens; the hollow optical fiber contains gas molecules to be detected; when the nth comb tooth frequency of the two optical combs is in the range of the absorption peak frequency spectrum of the gas molecules, the molecules will absorb the optical comb photons of the frequency and enter into the high excitation state of the vibration energy level, and the vibration frequency is equal to the excitation light frequency, namely (f respectively 02 +nf r2 ) And (f) 01 +nf r1 ) The method comprises the steps of carrying out a first treatment on the surface of the Generating a beat signal between two different frequency vibromens, i.e. f b =|(f 02 +nf r2 )-(f 01 +nf r1 ) I (I); under the effect of the photoacoustic effect, the vibration of the molecules is converted into an audio signal with the frequency f b
Step 3: the optical fiber is wound around the microphone, and the microphone can effectively receive the audio signal caused by molecular vibration, namely beat signal f b
Step 4: the audio signal is amplified after passing through the amplifier, and then recorded by the data acquisition card; the recorded signal is a time domain waveform; the frequency of the beat frequency signal can be obtained after the waveform is subjected to discrete Fourier transform; because of different absorption peaks and absorption frequencies, the generated beat frequency signals are different, and therefore the beat frequency signals are distinguished by measuring the beat frequency signals, and simultaneous measurement of a plurality of gas molecular absorption peaks is realized; meanwhile, as the laser and the molecules are bound in the hollow optical fiber, the interaction distance and the absorption section of the light and the molecules are increased, and the detection sensitivity is improved, so that the ultrasensitive spectrum detection of the decomposition products of the multicomponent sulfur hexafluoride electrical equipment is realized.
CN202011480526.6A 2020-12-15 2020-12-15 Ultrasensitive SF6 gas decomposition component detection method based on broadband dual-comb spectroscopy Active CN112710628B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011480526.6A CN112710628B (en) 2020-12-15 2020-12-15 Ultrasensitive SF6 gas decomposition component detection method based on broadband dual-comb spectroscopy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011480526.6A CN112710628B (en) 2020-12-15 2020-12-15 Ultrasensitive SF6 gas decomposition component detection method based on broadband dual-comb spectroscopy

Publications (2)

Publication Number Publication Date
CN112710628A CN112710628A (en) 2021-04-27
CN112710628B true CN112710628B (en) 2023-06-23

Family

ID=75543301

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011480526.6A Active CN112710628B (en) 2020-12-15 2020-12-15 Ultrasensitive SF6 gas decomposition component detection method based on broadband dual-comb spectroscopy

Country Status (1)

Country Link
CN (1) CN112710628B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114018829B (en) * 2021-10-27 2024-05-10 国网四川省电力公司电力科学研究院 Double-optical comb multicomponent gas detection system with tuning fork resonance enhancement
CN114878496A (en) * 2022-04-16 2022-08-09 国网江苏省电力有限公司超高压分公司 Apparatus and method for detection of SF6 decomposition products of annular optical fiber based on ultraviolet absorption spectrum
CN115656061A (en) * 2022-08-13 2023-01-31 台州安奇灵智能科技有限公司 Breath acetone concentration detection device based on dual-mode detection of photoacoustic and absorption spectroscopy

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203658243U (en) * 2013-11-27 2014-06-18 武汉豪迈光电科技有限公司 C2H2 and CH4 detection device based on photoacoustic spectrometry
CN104849214A (en) * 2015-04-20 2015-08-19 北京航天控制仪器研究所 Enhanced multi-group photoacoustic spectrum gas sensing device based on quartz tuning fork
CN209495963U (en) * 2018-11-27 2019-10-15 国网重庆市电力公司电力科学研究院 An infrared photoacoustic spectroscopy detection system
CN110044824B (en) * 2019-05-06 2021-08-24 安徽大学 A dual-spectrum gas detection device and method based on quartz tuning fork
CN111751323A (en) * 2020-07-22 2020-10-09 云南电网有限责任公司电力科学研究院 A Dispersive Spectroscopy Device for SF6 Gas Detection

Also Published As

Publication number Publication date
CN112710628A (en) 2021-04-27

Similar Documents

Publication Publication Date Title
CN112710628B (en) Ultrasensitive SF6 gas decomposition component detection method based on broadband dual-comb spectroscopy
CN111650127B (en) High-resolution photoacoustic spectroscopy gas detection system and method based on optical frequency comb frequency calibration
CN101487818B (en) On-line monitoring method and system for gas content in transformer oil
CN114047136B (en) A high-sensitivity combined light source photoacoustic spectroscopy gas detection system and method
Li et al. Multi-pass absorption enhanced photoacoustic spectrometer based on combined light sources for dissolved gas analysis in oil
CN108535184A (en) A kind of optoacoustic spectroscopy multicomponent trace gas detection instrument and method
CN113777068B (en) A Multiband Cavity Enhanced Infrared Comb Spectroscopy Gas Detection System
CN104237135A (en) System and method for detecting CO gas based on quartz tuning fork enhanced photoacoustic spectrometry technology
CN212321419U (en) High-resolution photoacoustic spectroscopy gas detection system based on optical frequency comb frequency calibration
CN203658243U (en) C2H2 and CH4 detection device based on photoacoustic spectrometry
CN110542839B (en) For SF6All-optical insulation fault monitoring system of gas insulation equipment
CN209372684U (en) A Tunable Laser Photoacoustic Spectroscopy Trace Gas Detection Teaching Experimental Device
Qi et al. High-precision photoacoustic nitrogen dioxide gas analyzer for fast dynamic measurement
CN111721485A (en) Oil and Gas Leak Detection Method Based on Dual Optical Frequency Comb Spectroscopy Technology
CN101308089B (en) Ethyne gas optical checking method and apparatus
CN113155742A (en) Single resonant cavity photoacoustic spectroscopy system and method for simultaneously detecting multiple gases
CN110426371A (en) A kind of system detecting the HF gas in SF6 electrical equipment
CN115561195A (en) A single-cavity double-comb light source and a gas detection system based on the single-cavity double-comb light source
CN105784643B (en) A kind of devices and methods therefor reducing gas Raman spectrum fluorescence background
CN114018829B (en) Double-optical comb multicomponent gas detection system with tuning fork resonance enhancement
CN115494046B (en) A method and device for optical fiber distributed detection of trace multi-component gas
CN215574610U (en) Single resonant cavity photoacoustic spectroscopy system for simultaneously detecting multiple gases
CN102914509A (en) Measurement device and testing method of hydrogen sulfide gas concentration of irregular-pore optical fiber
CN108918497B (en) Raman detection system based on composite filter demodulation
CN110470605B (en) Multi-node photoacoustic gas detection method based on optical fiber coupling mode

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant