CN112710292B - Frequency-tunable micromechanical gyroscope structure based on tunnel magnetic resistance detection - Google Patents
Frequency-tunable micromechanical gyroscope structure based on tunnel magnetic resistance detection Download PDFInfo
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- CN112710292B CN112710292B CN202011457459.6A CN202011457459A CN112710292B CN 112710292 B CN112710292 B CN 112710292B CN 202011457459 A CN202011457459 A CN 202011457459A CN 112710292 B CN112710292 B CN 112710292B
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Abstract
The invention belongs to the technical field of micromechanical gyroscopes, and particularly relates to a frequency-tunable micromechanical gyroscope structure based on tunnel magnetoresistance detection, which comprises a glass substrate, a support structure, a driving mass block, a detection mass block, a first support beam, a second support beam, driving leads, driving feedback leads, a first adjusting electrode, a second adjusting electrode, a third adjusting electrode, a fourth adjusting electrode and a lead ring, wherein the support structure is fixed on the glass substrate through anodic bonding, the number of the first support beam and the number of the second support beam are four, the support structure is connected with the driving mass block through the four first support beams, the driving mass block is connected with the detection mass block through the four second support beams, and the two sides of the driving mass block are respectively provided with the driving leads and the driving feedback leads. The micromechanical gyroscope has the advantages of reasonable structural design, simple interface circuit and high detection precision, and can solve the problem of angular rate signal detection.
Description
Technical Field
The invention belongs to the technical field of micromechanical gyroscopes, and particularly relates to a frequency-tunable micromechanical gyroscope structure based on tunnel magnetic resistance detection.
Background
The inertia technology works in a completely autonomous mode, is not in contact with the outside, and has the advantages of autonomy, real time and no interference. The gyroscope is a core device of an inertial navigation technology and plays a vital role in the fields of modern aerospace, national defense, military and the like.
The micro-inertial system is mainly provided with a gyroscope, and the MEMS gyroscope is an inertial device manufactured based on a micro-electro-mechanical system technology, is used for measuring the angular velocity of an object, has the characteristics of small volume, high reliability, low cost and suitability for mass production, and thus the MEMS gyroscope is widely used in the micro-inertial system.
Micromechanical gyroscopes primarily utilize coriolis forces, i.e., tangential forces to which a rotating object is subjected in the presence of radial motion. When the MEMS gyroscope works, the driving mass block continuously moves back and forth in the radial direction under the action of the driving force, and when angular velocity is input, the corresponding Coriolis force continuously changes back and forth in the transverse direction, so that the detection mass block slightly oscillates in the transverse direction. The MEMS gyroscope detects the small displacement in different detection modes, and then calculates the magnitude of the input angular velocity.
In the process of processing and designing the micromechanical gyroscope, factors such as processing errors and damping influence exist, so that the difference exists between the resonant frequency tested by an actual structure and the design simulation, and the frequency difference exists between the driving resonant frequency and the detection resonant frequency.
Disclosure of Invention
Aiming at the technical problems of processing error, damping influence and frequency difference between driving and detection resonant frequencies in the process of processing and designing the micro-mechanical gyroscope, the invention provides the frequency-tunable micro-mechanical gyroscope structure based on tunnel magnetic resistance detection, which has high sensitivity, low cost and high detection precision.
In order to solve the technical problems, the invention adopts the technical scheme that:
the utility model provides a tunable micromechanical gyroscope structure of frequency based on tunnel magnetic resistance detects, includes glass substrate, bearing structure, drive quality piece, proof mass piece, first supporting beam, second supporting beam, drive wire, drive feedback wire, first regulation electrode, second regulation electrode, third regulation electrode, fourth regulation electrode, wire circle, bearing structure passes through the anode bonding to be fixed on glass substrate, first supporting beam, second supporting beam all have four, bearing structure is connected with the drive quality piece through four first supporting beams, the drive quality piece is connected with proof mass piece through four second supporting beams, the both sides of drive quality piece are provided with drive wire, drive feedback wire respectively, the drive quality piece is connected with first regulation electrode, second regulation electrode, third regulation electrode, fourth regulation electrode respectively, be provided with the wire circle on the proof mass piece.
The detection device is characterized by further comprising a first driving electrode, a second driving electrode, a first driving feedback electrode, a second driving feedback electrode, a first detection electrode, a second detection electrode, a third detection electrode and a fourth detection electrode, wherein the first driving electrode, the second driving electrode, the first driving feedback electrode, the second driving feedback electrode, the first detection electrode, the second detection electrode, the third detection electrode and the fourth detection electrode are all arranged at the edge position of the surface of the supporting structure.
The two ends of the driving lead are respectively connected with a first driving electrode and a second driving electrode, the two ends of the driving feedback lead are respectively connected with a first driving feedback electrode and a second driving feedback electrode, and a lead ring on the detection mass block is respectively connected with a first detection electrode, a second detection electrode, a third detection electrode and a fourth detection electrode.
First regulation electrode includes first fixed electrode, first removal electrode, second regulation electrode includes second fixed electrode, second removal electrode, third regulation electrode includes third fixed electrode, third removal electrode, fourth regulation electrode includes fourth fixed electrode, fourth removal electrode, the equal fixed connection of first fixed electrode, second fixed electrode, third fixed electrode, fourth fixed electrode is on bearing structure, the equal fixed connection of first removal electrode, second removal electrode, third removal electrode, fourth removal electrode is on the drive quality piece.
The first movable electrode, the second movable electrode, the third movable electrode and the fourth movable electrode are all composed of at least two strip-shaped comb teeth, the comb teeth of the first movable electrode are arranged on the right side of the comb teeth corresponding to the second fixed electrode, the comb teeth of the third movable electrode are arranged on the right side of the comb teeth corresponding to the third fixed electrode, and the comb teeth of the fourth movable electrode are arranged on the right side of the comb teeth corresponding to the fourth fixed electrode.
And the distance between the comb teeth of the first moving electrode, the second moving electrode, the third moving electrode and the fourth moving electrode and the corresponding comb teeth of the first fixed electrode, the second fixed electrode, the third fixed electrode and the fourth fixed electrode are larger than the distance between the comb teeth of the first moving electrode, the second moving electrode, the third moving electrode and the fourth moving electrode and the distance between the comb teeth of the first fixed electrode, the second fixed electrode, the third fixed electrode and the next comb teeth.
The first moving electrode and the second moving electrode adopt a T-shaped structure.
Compared with the prior art, the invention has the following beneficial effects:
the invention adopts a mode of introducing electrostatic force frequency modulation by adding comb teeth on the structure, solves the problem of unmatched driving and detection resonant frequency caused by the influence of adverse factors such as structural errors brought in the process of processing, application environment and the like, and simultaneously combines the modes of electromagnetic driving and magnetic resistance detection to solve the problem that the existing micromechanical gyroscope is difficult to detect weak Coriolis force; the frequency-adjustable micro-gyroscope device designed by the invention can realize the automatic adjustment of the resonant frequency in the driving direction through a special circuit system, the corresponding driving resonant frequency is calculated by detecting the induced electromotive force generated by the driving feedback lead, and the matching of the resonant frequency in the driving direction and the resonant frequency in the detecting direction can be realized by changing the adjusting voltage applied on the adjusting electrode. Meanwhile, the tunnel magnetoresistance effect with high sensitivity is adopted for detection, and the detection precision of the micro gyroscope is improved. The micromechanical gyroscope has the advantages of reasonable structural design, simple interface circuit and high detection precision, and can solve the problem of angular rate signal detection.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a support structure according to the present invention;
FIG. 3 is a schematic diagram of a moving electrode according to the present invention;
FIG. 4 is a schematic structural view of a fixed electrode according to the present invention;
FIG. 5 is a simplified model diagram of the present invention.
Wherein: the optical fiber sensor comprises a glass substrate 1, a support structure 2, a driving mass block 3, a detection mass block 4, a first support beam 5, a second support beam 6, a driving lead 7, a driving feedback lead 8, a first adjusting electrode 9, a second adjusting electrode 10, a third adjusting electrode 11, a fourth adjusting electrode 12, a conductive coil 13, a first driving electrode 14, a second driving electrode 15, a first driving feedback electrode 16, a second driving feedback electrode 17, a first detection electrode 18, a second detection electrode 19, a third detection electrode 20, a fourth detection electrode 21, a first fixed electrode 9a, a first moving electrode 9b, a second fixed electrode 10a, a second moving electrode 10b, a third fixed electrode 11a, a third moving electrode 11b, a fourth fixed electrode 12a, and a fourth moving electrode 12 b.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the combination or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, are not to be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
A frequency tunable micromechanical gyroscope structure based on tunnel magnetic resistance detection is disclosed, as shown in FIG. 1 and FIG. 2, the structure comprises a glass substrate 1, a support structure 2, a driving mass block 3, a detection mass block 4, first support beams 5, second support beams 6, driving leads 7, driving feedback leads 8, first adjusting electrodes 9, second adjusting electrodes 10, third adjusting electrodes 11, fourth adjusting electrodes 12 and lead rings 13, wherein the support structure 2 is fixed on the glass substrate 1 through anode bonding, the first support beams 5 and the second support beams 6 are four in number, the support structure 2 is connected with the driving mass block 3 through the four first support beams 5, the driving mass block 3 is connected with the detection mass block 4 through the four second support beams 6, the driving leads 7 and the driving feedback leads 8 are respectively arranged on two sides of the driving mass block 3, the driving mass block 3 is respectively connected with the first adjusting electrodes 9, the second adjusting electrodes 10, the third adjusting electrodes 11 and the fourth adjusting electrodes 12, and the detection mass block 4 is provided with the lead rings 13.
Further, the device further comprises a first driving electrode 14, a second driving electrode 15, a first driving feedback electrode 16, a second driving feedback electrode 17, a first detection electrode 18, a second detection electrode 19, a third detection electrode 20, and a fourth detection electrode 21, wherein the first driving electrode 14, the second driving electrode 15, the first driving feedback electrode 16, the second driving feedback electrode 17, the first detection electrode 18, the second detection electrode 19, the third detection electrode 20, and the fourth detection electrode 21 are all disposed at the edge position of the surface of the supporting structure 2.
Furthermore, two ends of the driving lead 7 are respectively connected with a first driving electrode 14 and a second driving electrode 15, two ends of the driving feedback lead 8 are respectively connected with a first driving feedback electrode 16 and a second driving feedback electrode 17, and the conductive coil 13 on the detection mass block 4 is respectively connected with a first detection electrode 18, a second detection electrode 19, a third detection electrode 20 and a fourth detection electrode 21.
Further, as shown in fig. 3 and 4, the first adjusting electrode 9 includes a first fixed electrode 9a and a first movable electrode 9b, the second adjusting electrode 10 includes a second fixed electrode 10a and a second movable electrode 10b, the third adjusting electrode 11 includes a third fixed electrode 11a and a third movable electrode 11b, the fourth adjusting electrode 12 includes a fourth fixed electrode 12a and a fourth movable electrode 12b, the first fixed electrode 9a, the second fixed electrode 10a, the third fixed electrode 11a, and the fourth fixed electrode 12a are all fixedly connected to the supporting structure 2, and the first movable electrode 9b, the second movable electrode 10b, the third movable electrode 11b, and the fourth movable electrode 12b are all fixedly connected to the driving mass 3.
Further, the first moving electrode 9b, the second moving electrode 10b, the third moving electrode 11b, and the fourth moving electrode 12b are each composed of at least two strip-shaped comb teeth, the comb teeth of the first moving electrode 9b are disposed on the right of the comb teeth corresponding to the second fixed electrode 10a, the comb teeth of the third moving electrode 11b are disposed on the right of the comb teeth corresponding to the third fixed electrode 11a, and the comb teeth of the fourth moving electrode 12b are disposed on the right of the comb teeth corresponding to the fourth fixed electrode 12 a.
Further, the distance between the comb teeth of the first moving electrode 9b, the second moving electrode 10b, the third moving electrode 11b, and the fourth moving electrode 12b and the corresponding comb teeth of the first fixed electrode 9a, the second fixed electrode 10a, the third fixed electrode 11a, and the fourth fixed electrode 12a is larger than the pitch between the comb teeth and the next comb tooth.
Further, it is preferable that, in order to ensure that the direction of the electrostatic force is consistent with the driving direction while adding more comb teeth to increase the electrostatic force, the first moving electrode 9b and the second moving electrode 10b are T-shaped, and in order to ensure that the direction of the electrostatic force is consistent with the driving direction while adding more comb teeth to increase the electrostatic force.
As shown in fig. 5, the abscissa is the applied adjustment voltage, and the ordinate is the value of the resonance frequency. A simplified model was built using COMSOL, applying a fixation constraint to the support structure 2, the first fixed electrode 9a, the second fixed electrode 10a, the third fixed electrode 11a, the fourth fixed electrode 12 a. The first moving electrode 9b, the second moving electrode 10b, the third moving electrode 11b and the fourth moving electrode 12b are applied with a positive potential, the first fixed electrode 9a, the second fixed electrode 10a, the third fixed electrode 11a and the fourth fixed electrode 12a are applied with a zero potential, the applied voltage is parametrically scanned, and the change of the required characteristic frequency is observed. "o" is the drive direction resonance frequency value, "\65121" is the detection direction resonance frequency value. When the voltage is applied to adjust the time, the two frequencies can be matched.
The working principle of the invention is as follows: the micro gyroscope device is driven by electromagnetism, alternating current driving current is applied to a driving lead 10, the driving mass block 3 and the detection mass block 4 are driven to reciprocate under the action of a magnetic field provided by a magnet, a driving feedback lead 8 arranged on the other side cuts a magnetic induction line to generate dynamic electromotive force, the dynamic electromotive force is detected to track the resonant frequency in the driving direction, an adjusting signal is finally output to an adjusting electrode through a special circuit system, the voltage of the adjusting electrode is shown to be changed, the generated electrostatic force is also changed, and the adjustment of the resonant frequency in the driving direction is finally realized, so that the resonant frequency is matched with the resonant frequency in the detection direction.
From a theoretical derivation it is understood that the kinematic equation becomes after the electrostatic tuning force is added:
m is the resonant mass, c is the damping coefficient, k is the stiffness coefficient of the suspension beam, Fd(t) is a driving force, Fe(t) is the electrostatic force generated by the electrostatically coupled comb fingers.
The top and bottom electrostatic coupling capacitances are:
the potential energy principle and the virtual displacement theory are utilized, and a capacitance formula is introduced into the formula:
f is to bee(t) substituting the calculation formula into the kinematic equation yields a natural frequency of:
the above results can be understood as the electrostatic tuning method can produce electrostatic stiffness and thus affect the structure resonant frequency. k is a radical of formulaeI.e. the resulting electrostatic stiffness coefficient.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although only the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art, and all changes are encompassed in the scope of the present invention.
Claims (7)
1. A frequency tunable micromechanical gyroscope structure based on tunnel magnetic resistance detection is characterized in that: including glass substrate (1), bearing structure (2), drive quality piece (3), proof mass piece (4), first supporting beam (5), second supporting beam (6), drive wire (7), drive feedback wire (8), first regulation electrode (9), second regulation electrode (10), third regulation electrode (11), fourth regulation electrode (12), wire circle (13), bearing structure (2) are fixed on glass substrate (1) through the anodic bonding, first supporting beam (5), second supporting beam (6) all have four, bearing structure (2) are connected with drive quality piece (3) through four first supporting beam (5), drive quality piece (3) are connected with proof mass piece (4) through four second supporting beam (6), the both sides of drive quality piece (3) are provided with drive wire (7), drive feedback wire (8) respectively, drive quality piece (3) are connected with first regulation electrode (9), second regulation electrode (10), third regulation electrode (11), fourth regulation electrode (12) respectively, be provided with proof mass piece (13) on proof mass piece (4).
2. The frequency-tunable micromechanical gyroscope structure based on tunneling magnetoresistance detection according to claim 1, characterized in that: the detection device is characterized by further comprising a first driving electrode (14), a second driving electrode (15), a first driving feedback electrode (16), a second driving feedback electrode (17), a first detection electrode (18), a second detection electrode (19), a third detection electrode (20) and a fourth detection electrode (21), wherein the first driving electrode (14), the second driving electrode (15), the first driving feedback electrode (16), the second driving feedback electrode (17), the first detection electrode (18), the second detection electrode (19), the third detection electrode (20) and the fourth detection electrode (21) are all arranged at the edge position of the surface of the supporting structure (2).
3. The frequency-tunable micromechanical gyroscope structure based on tunneling magnetoresistance detection according to claim 1, characterized in that: the two ends of the driving lead (7) are respectively connected with a first driving electrode (14) and a second driving electrode (15), the two ends of the driving feedback lead (8) are respectively connected with a first driving feedback electrode (16) and a second driving feedback electrode (17), and a conductive coil (13) on the detection mass block (4) is respectively connected with a first detection electrode (18), a second detection electrode (19), a third detection electrode (20) and a fourth detection electrode (21).
4. The frequency-tunable micromechanical gyroscope structure based on tunneling magnetoresistance detection according to claim 1, characterized in that: the first adjusting electrode (9) comprises a first fixed electrode (9 a) and a first movable electrode (9 b), the second adjusting electrode (10) comprises a second fixed electrode (10 a) and a second movable electrode (10 b), the third adjusting electrode (11) comprises a third fixed electrode (11 a) and a third movable electrode (11 b), the fourth adjusting electrode (12) comprises a fourth fixed electrode (12 a) and a fourth movable electrode (12 b), the first fixed electrode (9 a), the second fixed electrode (10 a), the third fixed electrode (11 a) and the fourth fixed electrode (12 a) are fixedly connected to the supporting structure (2), and the first movable electrode (9 b), the second movable electrode (10 b), the third movable electrode (11 b) and the fourth movable electrode (12 b) are fixedly connected to the mass block driving device (3).
5. The frequency-tunable micromechanical gyroscope structure based on tunneling magnetoresistance detection according to claim 4, wherein: the comb teeth of the first movable electrode (9 b), the second movable electrode (10 b), the third movable electrode (11 b) and the fourth movable electrode (12 b) are all composed of at least two long strip-shaped comb teeth, the comb teeth of the first movable electrode (9 b) are arranged on the right of the comb teeth corresponding to the second fixed electrode (10 a), the comb teeth of the third movable electrode (11 b) are arranged on the right of the comb teeth corresponding to the third fixed electrode (11 a), and the comb teeth of the fourth movable electrode (12 b) are arranged on the right of the comb teeth corresponding to the fourth fixed electrode (12 a).
6. The frequency-tunable micromechanical gyroscope structure based on tunneling magnetoresistance detection according to claim 5, wherein: the distance between the comb teeth of the first moving electrode (9 b), the second moving electrode (10 b), the third moving electrode (11 b) and the fourth moving electrode (12 b) and the corresponding comb teeth of the first fixed electrode (9 a), the second fixed electrode (10 a), the third fixed electrode (11 a) and the fourth fixed electrode (12 a) is larger than the distance between the comb teeth and the next comb tooth.
7. The frequency-tunable micromechanical gyroscope structure based on tunneling magnetoresistance detection according to claim 4, wherein: the first moving electrode (9 b) and the second moving electrode (10 b) adopt a T-shaped structure.
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| MY147014A (en) * | 2007-10-31 | 2012-10-15 | Mimos Berhad | Capacitive area-changed mems gyroscope with adjustable resonance frequencies |
| CN101509771A (en) * | 2008-02-14 | 2009-08-19 | 中国科学院声学研究所 | Decoupling micromechanical gyroscope |
| CN107782295A (en) * | 2016-08-26 | 2018-03-09 | 北京自动化控制设备研究所 | A kind of tuning-fork-type microelectromechanicgyroscope gyroscope sensitive structure with frequency modulation function |
| CN107356240B (en) * | 2017-07-21 | 2023-04-07 | 安徽芯动联科微系统股份有限公司 | MEMS gyroscope with driving frequency adjusting structure |
| CN107449410A (en) * | 2017-08-15 | 2017-12-08 | 中北大学 | Microthrust test device is detected in electromagnetic drive type tunnel magnetoresistive face |
| CN110966997A (en) * | 2019-12-13 | 2020-04-07 | 中北大学 | Piezoelectric driving type micro gyroscope device for in-plane detection of tunnel magneto-resistive |
| CN110940329A (en) * | 2019-12-16 | 2020-03-31 | 中北大学 | Triaxial microgyroscope device based on tunnel magnetic resistance detection |
| CN111521842A (en) * | 2020-06-18 | 2020-08-11 | 中北大学 | Electrostatic rigidity adjustment Z-axis resonant micro-accelerometer based on tunnel magnetic resistance detection |
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