CN112695305A - Preparation method of high-binding-force electroplated film ceramic resistor - Google Patents

Preparation method of high-binding-force electroplated film ceramic resistor Download PDF

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CN112695305A
CN112695305A CN202011465574.8A CN202011465574A CN112695305A CN 112695305 A CN112695305 A CN 112695305A CN 202011465574 A CN202011465574 A CN 202011465574A CN 112695305 A CN112695305 A CN 112695305A
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force
chemical
electroplated film
ceramic resistor
bonding
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刘滔
邱建伟
黄中胜
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Loudi Fine Ceramic Industrial Technology Testing Center National Electronic Ceramic Product Quality Supervision And Inspection Center Hunan
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Loudi Fine Ceramic Industrial Technology Testing Center National Electronic Ceramic Product Quality Supervision And Inspection Center Hunan
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/1851Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material
    • C23C18/1872Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material by chemical pretreatment
    • C23C18/1886Multistep pretreatment
    • C23C18/1893Multistep pretreatment with use of organic or inorganic compounds other than metals, first
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1689After-treatment
    • C23C18/1692Heat-treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/32Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
    • C23C18/34Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
    • C23C18/36Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites

Abstract

The invention discloses a preparation method of a high-binding force electroplated film ceramic resistor, which comprises the following steps: before electroplating, degreasing treatment is carried out, usually gasoline or alcohol is used for cleaning, and then chemical degreasing is carried out; step two, coarsening: coarsening the surface of the deoiled ceramic product by adopting a chemical etching coarsening method; step three, sensitization: adsorbing a layer of divalent tin ions with reducibility on the roughened part surface, and reducing palladium ions into palladium with catalytic action during subsequent ion activation treatment, wherein the step four is activation treatment: forming a layer of noble metal layer with catalytic activity on the surface of the part, and spontaneously performing chemical plating, wherein the step five is reduction: changing the catalytic activity of the surface of the part, and adopting the water plating and heat treatment process to prepare the high-binding-force electroplated film ceramic resistor.

Description

Preparation method of high-binding-force electroplated film ceramic resistor
Technical Field
The invention relates to the technical field of ceramic resistors, in particular to a preparation method of a high-binding-force electroplated film ceramic resistor.
Background
The metal film resistor is a resistor which takes special metal or alloy as resistance material and basically forms a resistance film layer on ceramic by a vacuum evaporation or sputtering method. Such resistors are typically made by a vacuum evaporation process, i.e. heating the alloy in a vacuum, evaporating the alloy, depositing it on the surface of the ceramic rod to form a conductive metal film. The resistance can be controlled by notching and changing the thickness of the metal film. The metal film resistor has flexible manufacture process, and can be used to adjust its material composition and film thickness, and to adjust resistance value by grooving, so as to obtain resistor with good performance and wide resistance range.
The existing metal film preparation method is to put the ceramic rod in the rotating disk of the physical vapor deposition cavity, and rotate the product by the rotation of the rotating disk, so that the surface of the magnetic rod is uniformly covered with 0.2um nickel metal film, as shown in the attached figure 1 of the specification.
PVD is a Physical Vapor Deposition (Physical Vapor Deposition) technique, which is a technique for vaporizing a material (commonly called a target or a film) into gaseous molecules, atoms or ions by a Physical method under vacuum and depositing the gaseous molecules, atoms or ions on a workpiece to form a thin film with a specific function.
The metal film deposited by PVD vapor deposition is combined with the magnetic bar through Van der Waals force, the binding force is low, the metal film can be adhered by a transparent adhesive tape, so that the defects that the metal film is locally peeled off and the like easily occur during subsequent finished product processing, and the preparation of a precise ceramic resistor is not facilitated.
Disclosure of Invention
The invention aims to provide a preparation method of a high-bonding-force electroplated film ceramic resistor, which aims to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a preparation method of a high-bonding-force electroplated film ceramic resistor comprises the following steps:
step one, oil removal: before electroplating, degreasing treatment is carried out, usually gasoline or alcohol is used for cleaning, and then chemical degreasing is carried out;
step two, coarsening: coarsening the surface of the deoiled ceramic product by adopting a chemical etching coarsening method to improve the surface hydrophilicity and form proper roughness of the ceramic product so as to ensure that the plating layer has good adhesive force;
step three, sensitization: adsorbing a layer of divalent tin ions with reducibility on the surface of the coarsened part, and reducing palladium ions into palladium with catalytic action during subsequent ion type activation treatment;
step four, activation treatment: forming a noble metal layer with catalytic activity on the surface of the part, so that chemical plating can be carried out spontaneously;
step five, reduction: changing the catalytic activity of the surface of the part, removing the activating solution remained on the surface of the part and preventing the activating solution from being brought into the chemical plating solution to cause solution decomposition;
step six, chemical nickel plating: the palladium particles on the surface of the ceramic rod catalyze the chemical nickel reaction to form a compact film layer on the surface;
step seven, heat treatment: the chemical nickel layer with microscopic microporous surface is heat treated to volatilize residual water and strengthen the corrosion resistance of the product.
Preferably, the chemical degreasing liquid in the step one comprises the following components and process conditions:
Figure BDA0002832717820000021
Figure BDA0002832717820000031
preferably, the chemical etching coarsening process described in step two is as follows:
hydrofluoric acid 50-60mL/L
Ammonium fluoride 200-220g/L
Time 8-10min
Temperature of 30℃
Preferably, the sensitization process described in step three is as follows:
Figure BDA0002832717820000032
preferably, the activation treatment process described in step four is as follows:
Figure BDA0002832717820000033
Figure BDA0002832717820000041
preferably, the reduction process in step five is as follows:
H2SO4 35-45g/l
dispergation salt 18-22g/L
Time 5-10s
Temperature of At room temperature
Preferably, the chemical nickel plating treatment process in the sixth step is as follows:
NiSO4.6H2O 15-22g/l
PH 8.0-8.5
NaH2PO2 5.0-8.0g/l
Na3Cit 30-40g/l
NH4Cl 30-38g/l
NiSO4.6H2O 15-22g/l
NaH2PO2 5.0-8.0g/l
PH 8.0-8.5
Time 8–10min
temperature of At room temperature
Preferably, in the heat treatment process in the seventh step, the heating speed of the heating roller is set to be 5 ℃/min, the temperature is increased to 400 ℃, the rotating speed of the single roller is 10 revolutions per minute, and the heat is preserved for 3 hours.
Compared with the prior art, the invention has the beneficial effects that:
the invention adopts the water plating and heat treatment process, the nickel plating film has uniform appearance, no shedding, good bonding force of the film layer, good compactness of the film layer and better performance of the film layer.
Drawings
FIG. 1 is a diagram of a ceramic rod produced by a conventional metal film production method;
FIG. 2 is a diagram of the resistance of the metal film formed by the water-plating and heat treatment process according to the present invention;
FIG. 3 is a schematic view of the overall process of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a preparation method of a high-bonding-force electroplated film ceramic resistor comprises the following steps:
step one, oil removal: the surface of the ceramic product is always stained with oil stain and hand sweat, which can lead the adhesion of the electroplated layer to be poor and generate cracking, bubbling and falling off, the oil removal treatment is carried out before electroplating, usually gasoline or alcohol is used for cleaning, then chemical oil removal is carried out, and the components and the process conditions of the chemical oil removal liquid are as follows;
Figure BDA0002832717820000051
Figure BDA0002832717820000061
step two, coarsening: the coarsening method is a most critical process for determining the adhesive force of the plating layer, and has various coarsening methods and different effects, and the coarsening by chemical etching is superior to the coarsening by solvent swelling and the coarsening by mechanical etching in terms of improving the adhesive force of the plating layer;
hydrofluoric acid 50-60mL/L
Ammonium fluoride 200-220g/L
Time 8-10min
Temperature of 30℃
Step three, sensitization: the ceramic product is an insulator, can not be directly electroplated, and needs to be sensitized, activated and chemically plated before electroplating, wherein the mechanism of sensitization treatment is to make the roughened surface of the part adsorb a layer of divalent tin ions with reducibility so as to reduce palladium ions into palladium with catalytic action during subsequent ionic activation treatment, and the practical process of sensitization treatment is as follows;
Figure BDA0002832717820000062
Figure BDA0002832717820000071
step four, activation treatment: forming a noble metal layer with catalytic activity on the surface of the part, so that chemical plating can be carried out spontaneously;
PdCl2 30-50ppm
HCl 250-300ml/l
SnCl2.2H2O 1-3g/l
Time 10–15s
temperature of At room temperature
Step five, reduction: through reduction treatment, on one hand, the catalytic activity of the surface can be improved, the chemical plating deposition speed is accelerated, and on the other hand, the activating solution remained on the surface of the part can be removed, so that the activating solution is prevented from being brought into the chemical plating solution to cause solution decomposition;
H2SO4 35-45g/l
dispergation salt 18-22g/L
Time 5-10s
Temperature of At room temperature
Step six, chemical nickel plating: the palladium particles on the surface of the ceramic rod catalyze the chemical nickel reaction to form a compact film layer on the surface, and the thickness of the film layer is mainly determined by time;
NiSO4.6H2O 15-22g/l
PH 8.0-8.5
NaH2PO2 5.0-8.0g/l
Na3Cit 30-40g/l
NH4Cl 30-38g/l
NiSO4.6H2O 15-22g/l
NaH2PO2 5.0-8.0g/l
PH 8.0-8.5
Time 8–10min
temperature of At room temperature
Step seven, heat treatment: and seventhly, drying the surface of the ceramic rod by using a heat treatment process to volatilize residual moisture and enhance the corrosion resistance of the product, wherein in the heat treatment process, the heating speed of the heating roller is set to be 5 ℃/min, the temperature is increased to 400 ℃, the rotating speed of the single roller is 10 r/min, and the temperature is kept for 3 hours.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (8)

1. A preparation method of a high-bonding-force electroplated film ceramic resistor is characterized by comprising the following steps:
step one, oil removal: before electroplating, degreasing treatment is carried out, usually gasoline or alcohol is used for cleaning, and then chemical degreasing is carried out;
step two, coarsening: coarsening the surface of the deoiled ceramic product by adopting a chemical etching coarsening method to improve the surface hydrophilicity and form proper roughness of the ceramic product so as to ensure that the plating layer has good adhesive force;
step three, sensitization: adsorbing a layer of divalent tin ions with reducibility on the surface of the coarsened part, and reducing palladium ions into palladium with catalytic action during subsequent ion type activation treatment;
step four, activation treatment: forming a noble metal layer with catalytic activity on the surface of the part, so that chemical plating can be carried out spontaneously;
step five, reduction: changing the catalytic activity of the surface of the part, removing the activating solution remained on the surface of the part and preventing the activating solution from being brought into the chemical plating solution to cause solution decomposition;
step six, chemical nickel plating: the palladium particles on the surface of the ceramic rod catalyze the chemical nickel reaction to form a compact film layer on the surface;
step seven, heat treatment: the chemical nickel layer with microscopic microporous surface is heat treated to volatilize residual water and strengthen the corrosion resistance of the product.
2. The method for preparing a high-bonding-force electroplated film ceramic resistor as claimed in claim 1, wherein: the chemical degreasing liquid in the step one comprises the following components and process conditions:
Figure FDA0002832717810000011
Figure FDA0002832717810000021
3. the method for preparing a high-bonding-force electroplated film ceramic resistor as claimed in claim 2, wherein: the chemical etching coarsening process in the step two is as follows:
hydrofluoric acid 50-60mL/L Ammonium fluoride 200-220g/L Time 8-10min Temperature of 30℃
4. The method for preparing a high-bonding-force electroplated film ceramic resistor as claimed in claim 1, wherein: the sensitization treatment process in the third step is as follows:
Figure FDA0002832717810000022
5. the method for preparing a high-bonding-force electroplated film ceramic resistor as claimed in claim 1, wherein: the activation treatment process in the fourth step is as follows:
Figure FDA0002832717810000023
Figure FDA0002832717810000031
6. the method for preparing a high-bonding-force electroplated film ceramic resistor as claimed in claim 1, wherein: the reduction process in the fifth step is as follows:
H2SO4 35-45g/l dispergation salt 18-22g/L Time 5-10s Temperature of At room temperature
7. The method for preparing a high-bonding-force electroplated film ceramic resistor as claimed in claim 1, wherein: the chemical nickel plating treatment process in the sixth step is as follows:
Figure FDA0002832717810000032
Figure FDA0002832717810000041
8. the method for preparing a high-bonding-force electroplated film ceramic resistor as claimed in claim 1, wherein: and seventhly, in the heat treatment process, the heating speed of the heating roller is set to be 5 ℃/min, the heating temperature is increased to 400 ℃, the rotating speed of the single roller is 10 revolutions per minute, and the heat is preserved for 3 hours.
CN202011465574.8A 2020-12-13 2020-12-13 Preparation method of high-binding-force electroplated film ceramic resistor Pending CN112695305A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113818061A (en) * 2021-09-23 2021-12-21 镇江锦兴表面工程技术有限公司 Surface electroplating process for ceramic product
CN113860919A (en) * 2021-09-25 2021-12-31 麦德美科技(苏州)有限公司 Chemical roughening and metalizing process for alumina ceramic
CN115322014A (en) * 2022-09-14 2022-11-11 东华大学 Ceramic substrate with metal coating and preparation method thereof
CN115474345A (en) * 2022-09-14 2022-12-13 东华大学 Method for manufacturing ceramic fabric circuit based on screen printing and chemical deposition
CN117510097A (en) * 2023-12-29 2024-02-06 核工业西南物理研究院 Silicon-based ceramic surface metallization method and application

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113818061A (en) * 2021-09-23 2021-12-21 镇江锦兴表面工程技术有限公司 Surface electroplating process for ceramic product
CN113860919A (en) * 2021-09-25 2021-12-31 麦德美科技(苏州)有限公司 Chemical roughening and metalizing process for alumina ceramic
CN115322014A (en) * 2022-09-14 2022-11-11 东华大学 Ceramic substrate with metal coating and preparation method thereof
CN115474345A (en) * 2022-09-14 2022-12-13 东华大学 Method for manufacturing ceramic fabric circuit based on screen printing and chemical deposition
CN117510097A (en) * 2023-12-29 2024-02-06 核工业西南物理研究院 Silicon-based ceramic surface metallization method and application

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