CN112695298A - Flywheel type static gas mixer for two-dimensional material growth - Google Patents
Flywheel type static gas mixer for two-dimensional material growth Download PDFInfo
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- CN112695298A CN112695298A CN202011368419.4A CN202011368419A CN112695298A CN 112695298 A CN112695298 A CN 112695298A CN 202011368419 A CN202011368419 A CN 202011368419A CN 112695298 A CN112695298 A CN 112695298A
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- 239000000463 material Substances 0.000 title claims abstract description 16
- 230000003068 static effect Effects 0.000 title claims abstract description 14
- 238000005192 partition Methods 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 9
- 239000007789 gas Substances 0.000 description 57
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45512—Premixing before introduction in the reaction chamber
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- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
The invention relates to a flywheel type static gas mixer for two-dimensional material growth, which comprises a mixing cylinder, a first wind impeller, a second wind impeller, a third wind impeller, a second baffle, a gas outlet pipe, a first gas inlet pipe, a second gas inlet pipe, a lower baffle vent hole, an upper baffle vent hole, a step folded plate and a first baffle, wherein the first wind impeller, the second wind impeller, the third wind impeller, the second baffle, the gas outlet pipe, the first gas inlet pipe, the second gas; the center of the first impeller is deviated in the export of second intake pipe, and the center of lower baffle air vent is eccentric settings with the center of first impeller, and the second baffle is to inserting the setting with first baffle. The invention greatly improves the gas mixing effect and has the advantages of simple structure and convenient disassembly and assembly.
Description
Technical Field
The invention belongs to the technical field of two-dimensional material vapor deposition, and particularly relates to a flywheel type static gas mixer for two-dimensional material growth.
Background
At present, in the technical field of two-dimensional material vapor deposition, a static mixer realizes collision mixing of multiple gases through a porous guide structure inside a space, and the mixing effect is poor.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide the flywheel type static gas mixer for the growth of the two-dimensional material, which can greatly improve the gas mixing effect and has a simple structure.
According to the technical scheme provided by the invention, the flywheel type static gas mixer for two-dimensional material growth comprises a vertically arranged mixing drum, a first wind impeller is arranged in the lower section of the mixing drum, a second wind impeller is arranged in the middle section of the first mixing drum, a third wind impeller is arranged in the upper section of the mixing drum, a first air inlet pipe is fixed on the drum bottom plate of the first mixing drum, at least one second air inlet pipe is fixed on the drum wall of the first mixing drum corresponding to the first wind impeller, the outlet of the second air inlet pipe deviates from the center of the first wind impeller, a lower partition plate is fixed on the drum inner wall of the mixing drum between the drum bottom plate and the first wind impeller, a lower partition plate vent hole is arranged on the lower partition plate, the center of the lower partition plate vent hole is eccentrically arranged with the center of the first wind impeller, an upper partition plate is fixed on the inner wall of the mixing drum corresponding to the space between the first wind impeller and the second wind impeller, an upper partition plate vent hole is formed in the upper partition plate, a step folded plate is fixed on the upper surface of the upper partition plate, the upper end portion of the step folded plate is located below a second wind impeller, the uppermost step plate of the step folded plate abuts against the inner wall of the right barrel of the mixing barrel and is matched with the inner wall of the right barrel of the mixing barrel to form a long and narrow gas channel, the long and narrow gas channel deviates from the center of the first wind impeller, a first baffle plate is fixed on the step folded plate corresponding to the long and narrow gas channel, a second baffle plate is fixed on the inner wall of the mixing barrel corresponding to the long and narrow gas channel, the second baffle plate and the first baffle plate are arranged in an opposite insertion mode, and a gas outlet pipe is fixed on a barrel top.
Preferably, two adjacent stages of the step folding plates are vertically arranged. Preferably, the upper end of the step folding plate is fixed with an air guide plate bent towards the left side, and the air guide plate is connected with the uppermost step plate of the step folding plate at an obtuse angle.
Preferably, the heater is fixed to both the lower outer wall and the upper outer wall of the mixing cylinder.
Preferably, a heating wire is wound around the outside of the outlet duct.
The invention greatly improves the gas mixing effect and has the advantages of simple structure and convenient disassembly and assembly.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
The present invention will be further described with reference to the following specific examples.
A flywheel type static gas mixer for two-dimensional material growth is disclosed, as shown in figure 1, comprising a mixing barrel 1, a first wind impeller 11 is arranged in the lower section of the mixing barrel 1, a second wind impeller 12 is arranged in the middle section of the first mixing barrel 1, a third wind impeller 13 is arranged in the upper section of the mixing barrel 1, a first air inlet pipe 3 is fixed on the barrel bottom plate of the first mixing barrel 1, at least one second air inlet pipe 4 is fixed on the barrel wall of the first mixing barrel 1 corresponding to the position of the first wind impeller 11, the outlet of the second air inlet pipe 4 deviates from the center of the first wind impeller 11, a lower clapboard 5 is fixed on the barrel inner wall of the mixing barrel 1 between the barrel bottom plate and the first wind impeller 11, a lower clapboard vent hole 51 is arranged on the lower clapboard 5, the center of the lower clapboard vent hole 51 is eccentrically arranged with the center of the first wind impeller 11, an upper clapboard 6 is fixed on the barrel inner wall of the mixing barrel 1 corresponding to the position of the first wind impeller 11 and the second wind impeller 12, an upper clapboard vent hole 61 is arranged on an upper clapboard 6, a step folded plate 7 is fixed on the upper surface of the upper clapboard 6, the upper end part of the step folded plate 7 is positioned below a second wind impeller 12, the uppermost step plate of the step folded plate 7 is tightly close to the inner wall of the right barrel of the mixing barrel 1 and is matched with the inner wall of the right barrel of the mixing barrel 1 to form a long and narrow gas channel, the long and narrow gas channel deviates from the center of the first wind impeller 11, a first baffle plate 71 is fixed on the step folded plate 7 corresponding to the long and narrow gas channel, a second baffle plate 14 is fixed on the inner wall of the mixing barrel 1 corresponding to the long and narrow gas channel, the second baffle plate 14 and the first baffle plate 71 are arranged in an opposite insertion way, and an air outlet pipe 15 is fixed on the barrel top plate of the.
The adjacent two-stage step plates of the step folded plate 7 are vertically arranged. The upper end of the step folded plate 7 is fixed with an air guide plate 8 bent towards the left side, and the air guide plate 8 is connected with the uppermost step plate of the step folded plate 7 at an obtuse angle.
A heating wire 2 is wound around the outside of the outlet duct 15.
When the flywheel-type static gas mixer for two-dimensional material growth in embodiment 1 is used, the first gas is introduced from the first gas inlet pipe 3, the second gas is introduced from the second gas inlet pipe 4, the first gas is sprayed upwards from the lower partition plate vent hole 51 of the lower partition plate 5, so that the first wind impeller 11 rotates under the action of the gas flow of the first gas, similarly, the rotating speed of the first wind impeller 11 is increased under the action of the gas flow of the second gas inlet pipe 4, so that the first gas and the second gas are rapidly mixed, then the mixed gas of the first gas and the second gas enters the long and narrow gas passage formed by the matching of the uppermost step plate of the step folding plate 7 and the inner wall of the right cylinder of the mixing cylinder 1 through the upper partition plate vent hole 61, because the second baffle plate 14 and the first baffle plate 71 are oppositely inserted in the long and narrow gas passage, when the mixed gas of the first gas and the second gas passes through the passage between the second baffle plate 14 and the first baffle plate 71, the mixing effect of the first gas and the second gas is improved, the mixed gas blows to the second wind impeller 12 through the long and narrow gas channel, the second wind impeller 12 rotates, the mixing effect of the first gas and the second gas is further improved, the mixed gas continuously goes upwards, when the mixed gas passes through the third wind impeller 13, the third wind impeller 13 rotates, the mixing effect of the first gas and the second gas is further improved, and finally the mixed gas is connected out from the gas outlet pipe 15 to carry out two-dimensional material vapor deposition.
The heaters 15 fixed on the outer wall of the lower section and the outer wall of the upper section of the mixing cylinder 1 can increase the temperature of the mixed gas (composed of the first gas and the second gas), and the increase of the temperature of the gas can accelerate the movement speed of gas molecules, thereby improving the mixing effect of the two gases.
The heating wire 2 wound outside the air outlet pipe 15 can increase the temperature of the mixed gas, and further improves the mixing effect of the two gases.
Claims (5)
1. The utility model provides a flywheel-type two-dimensional material static gas mixer for growth which characterized by: the mixing device comprises a vertically arranged mixing drum (1), a first wind impeller (11) is arranged inside the lower section of the mixing drum (1), a second wind impeller (12) is arranged inside the middle section of the first mixing drum (1), a third wind impeller (13) is arranged inside the upper section of the mixing drum (1), a first air inlet pipe (3) is fixed on the drum bottom plate of the first mixing drum (1), at least one second air inlet pipe (4) is fixed on the drum wall of the first mixing drum (1) corresponding to the position of the first wind impeller (11), the outlet of the second air inlet pipe (4) deviates from the center of the first wind impeller (11), a lower partition plate (5) is fixed on the drum inner wall of the mixing drum (1) between the drum bottom plate and the first wind impeller (11), a lower partition plate vent hole (51) is formed in the lower partition plate (5), and the center of the lower partition plate vent hole (51) and the center of the first wind impeller (11) are eccentrically arranged, an upper partition plate (6) is fixed on the inner wall of the mixing cylinder (1) corresponding to the position between the first wind impeller (11) and the second wind impeller (12), an upper partition plate vent hole (61) is formed in the upper partition plate (6), a step folded plate (7) is fixed on the upper surface of the upper partition plate (6), the upper end part of the step folded plate (7) is positioned below the second wind impeller (12), the uppermost step plate of the step folded plate (7) abuts against the inner wall of the right cylinder of the mixing cylinder (1) and is matched with the inner wall of the right cylinder of the mixing cylinder (1) to form a long and narrow gas channel, the long and narrow gas channel deviates from the center of the first wind impeller (11), a first baffle plate (71) is fixed on the step folded plate (7) corresponding to the long and narrow gas channel position, a second baffle plate (14) is fixed on the inner wall of the mixing cylinder (1) corresponding to the long and narrow gas channel position, and the second baffle plate (14) and the first baffle plate (71), an air outlet pipe (15) is fixed on the top plate of the mixing cylinder (1).
2. The flywheel-type two-dimensional static gas mixer for material growth according to claim 1, wherein: and two adjacent stages of step plates of the step folded plate (7) are vertically arranged.
3. The flywheel-type two-dimensional material growth static gas mixer according to claim 1 or 2, wherein: the upper end of the step folded plate (7) is fixed with an air guide plate (8) bent towards the left side, and the air guide plate (8) is connected with the uppermost step plate of the step folded plate (7) at an obtuse angle.
4. The flywheel-type two-dimensional static gas mixer for material growth according to claim 1, wherein: heaters (15) are fixed on the outer wall of the lower section and the outer wall of the upper section of the mixing cylinder (1).
5. The flywheel-type two-dimensional static gas mixer for material growth according to claim 1, wherein: the outside of the air outlet pipe (15) is wound with a heating wire (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011368419.4A CN112695298A (en) | 2020-11-30 | 2020-11-30 | Flywheel type static gas mixer for two-dimensional material growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011368419.4A CN112695298A (en) | 2020-11-30 | 2020-11-30 | Flywheel type static gas mixer for two-dimensional material growth |
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| Publication Number | Publication Date |
|---|---|
| CN112695298A true CN112695298A (en) | 2021-04-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011368419.4A Pending CN112695298A (en) | 2020-11-30 | 2020-11-30 | Flywheel type static gas mixer for two-dimensional material growth |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140102706A1 (en) * | 2012-10-11 | 2014-04-17 | Halliburton Energy Services, Inc. | Method and apparatus for mixing fluid flow in a wellbore using a static mixer |
| CN203737124U (en) * | 2014-01-21 | 2014-07-30 | 中国石油化工股份有限公司 | Gas mixer |
| CN206103744U (en) * | 2016-08-29 | 2017-04-19 | 苏州艾特斯环保设备有限公司 | Efficient gas mixing arrangement |
| CN206853487U (en) * | 2017-06-02 | 2018-01-09 | 衢州市沃德仪器有限公司 | Online gas mixer |
| CN210448778U (en) * | 2019-08-22 | 2020-05-05 | 杭州新庆气体设备有限公司 | Static mixer structure of mixed gas distribution equipment |
| CN214300347U (en) * | 2020-11-30 | 2021-09-28 | 无锡费曼科技有限公司 | Flywheel type static gas mixer for two-dimensional material growth |
-
2020
- 2020-11-30 CN CN202011368419.4A patent/CN112695298A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140102706A1 (en) * | 2012-10-11 | 2014-04-17 | Halliburton Energy Services, Inc. | Method and apparatus for mixing fluid flow in a wellbore using a static mixer |
| CN203737124U (en) * | 2014-01-21 | 2014-07-30 | 中国石油化工股份有限公司 | Gas mixer |
| CN206103744U (en) * | 2016-08-29 | 2017-04-19 | 苏州艾特斯环保设备有限公司 | Efficient gas mixing arrangement |
| CN206853487U (en) * | 2017-06-02 | 2018-01-09 | 衢州市沃德仪器有限公司 | Online gas mixer |
| CN210448778U (en) * | 2019-08-22 | 2020-05-05 | 杭州新庆气体设备有限公司 | Static mixer structure of mixed gas distribution equipment |
| CN214300347U (en) * | 2020-11-30 | 2021-09-28 | 无锡费曼科技有限公司 | Flywheel type static gas mixer for two-dimensional material growth |
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