CN112687518A - Quadrupole rod structure convenient to repair and grind assembly - Google Patents
Quadrupole rod structure convenient to repair and grind assembly Download PDFInfo
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- CN112687518A CN112687518A CN202011521467.2A CN202011521467A CN112687518A CN 112687518 A CN112687518 A CN 112687518A CN 202011521467 A CN202011521467 A CN 202011521467A CN 112687518 A CN112687518 A CN 112687518A
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- 230000008439 repair process Effects 0.000 title claims description 8
- 239000000919 ceramic Substances 0.000 claims abstract description 35
- 238000009434 installation Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 12
- 238000005259 measurement Methods 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000013461 design Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000000306 component Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000011160 research Methods 0.000 description 3
- 239000008358 core component Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/068—Mounting, supporting, spacing, or insulating electrodes
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Abstract
The invention provides a quadrupole rod structure convenient for repairing, grinding and assembling, which comprises two ceramic rings, 4 pole rods and 8 screws, wherein the 4 pole rods are connected between the two ceramic rings, the pole rods are fixedly connected to the inner walls of the ceramic rings through the screws, four mounting positions for assembling the pole rods are arranged in a cavity, each mounting position comprises two planes, and the planes are contact surfaces of the pole rods. When the space position of the pole rod needs to be adjusted, the adjustment is realized by repairing and grinding the plane contacted by the pole rod. Compared with the prior art, the invention has the following advantages: the special ceramic ring design in this patent for the quadrupole rod subassembly is repaiied and is ground assembly process has obtained greatly simplifying, has reduced the technology degree of difficulty, and possesses the high accuracy measurement condition, can carry out the high accuracy measurement to the size after the repaiing and grinding, has improved the accuracy of repairing and grinding. This inevitably greatly improves the production efficiency of the quadrupole rod assembly, reduces the production cost, and contributes to improvement of the assembly accuracy.
Description
Technical Field
The invention relates to the technical field of mass analysis instruments of mass spectrometers, in particular to a quadrupole rod structure convenient to repair, research and assemble.
Background
A quadrupole mass analyzer (quadrupole for short) in a mass spectrometer belongs to a typical precision/ultra-precision component and belongs to a key core component of the quadrupole mass spectrometer. At present, the price of the domestic high-precision quadrupole rod is 2-3 ten thousand yuan, and the price of the foreign high-precision quadrupole rod custom-made processing unit is more than one hundred thousand. At present, in the domestic quadrupole mass analyzer market, foreign suppliers mainly comprise companies such as Reliance, Extrel and Morgan in the UK, and domestic suppliers comprise units such as mechanical manufacturing process research institute of China engineering and physics research institute. After the pole rod group of the quadrupole mass analyzer is assembled, the requirements on parallelism and position accuracy are generally about 2-6 μm, and the machining accuracy is generally difficult to meet by only depending on a ceramic ring. In the actual assembly process, on the basis of high-precision machining of the ceramic ring, the assembly result is repeatedly detected and the ceramic ring is disassembled, assembled and repaired and ground in the assembly process, so that the required precision is achieved by a manual repair method.
At present, the conventional quadrupole rod structure mostly adopts a structure that two ceramic rings fix four quadrupole rods, as shown in fig. 1. Wherein, the position on the ceramic ring matched with the pole rod is mostly a section of arc surface with the same radius as the pole rod. In the actual lapping process, a large amount of lapping is often required in the first several assembly iterations, and the amount of lapping needs to be accurately controlled so as to approach the size meeting the accuracy requirement as soon as possible. However, the circular arc surface lapping includes lapping amounts in two directions, and it is difficult to precisely control and measure the lapping amount in a single direction.
Disclosure of Invention
In order to solve the difficult problems of the control and measurement of the repairing and grinding quantity, a quadrupole rod structure with two mutually vertical plane pole rod supporting surfaces is designed. The structure can directly measure the spacing size of the pole support plane by using geometric measuring tools such as a length measuring instrument in the repairing and grinding process, so that the repairing and grinding process is more controllable. The ceramic belongs to a material with higher strength and hardness, and the quadrupole rod using the structure still has enough dimensional stability compared with the original structure.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
the utility model provides a quadrupole rod structure convenient to repair and grind assembly, includes two ceramic rings, 4 polars and 8 screws, and 4 polars are connected between two ceramic rings, and the polars passes through screw fixed connection in ceramic ring inner wall, forms the cavity that is used for the polars to run through in the ceramic ring, is equipped with four installation positions that are used for assembling the polars in the cavity, and it has the arc recess to open between two adjacent installation positions, and four arc recesses equipartitions set up in the cavity.
Furthermore, each mounting position comprises two planes, a fillet is arranged between the two planes, and the planes are contact surfaces of the pole rods.
Further, when the spatial position of the pole rod needs to be adjusted, the adjustment is realized by repairing and grinding the plane contacted by the pole rod.
Further, the fixing position of the screw and the pole rod is a fillet position between two planes.
Compared with the prior art, the invention has the following advantages: the special ceramic ring design in this patent for the quadrupole rod subassembly is repaiied and is ground assembly process has obtained greatly simplifying, has reduced the technology degree of difficulty, and possesses the high accuracy measurement condition, can carry out the high accuracy measurement to the size after the repaiing and grinding, has improved the accuracy of repairing and grinding. The production efficiency of the quadrupole rod assembly is inevitably and greatly improved, the production cost is reduced, the assembly precision is improved, the performance of the domestic quadrupole rod assembly and the performance of a corresponding mass spectrometer are further improved, the difficulty that the existing domestic liquid mass spectrometer and a foreign advanced instrument have large performance gap is overcome, the domestic rate of the instrument is improved, and the domestic production of key core components is realized.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram of a conventional quadrupole rod configuration;
FIG. 2 is a schematic diagram of a ceramic ring assembled arc surface before and after repairing and grinding in a conventional quadrupole rod structure;
FIG. 3 is a schematic diagram of a quadrupole rod structure and its dimensions according to the present invention;
FIG. 4 is a schematic diagram of a ceramic ring in a quadrupole rod structure before and after repairing and grinding a plane;
description of reference numerals:
1-a ceramic ring; 2-pole rod; 3-screws; 4-plane; 5-arc groove; 6-round corner.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
As shown in fig. 3-4, a quadrupole rod structure convenient to repair and grind assembly, including two ceramic rings 1, 4 polars 2 and 8 screws 3, 4 polars 2 connect between two ceramic rings 1, polars 2 pass through 3 fixed connection of screws in ceramic ring 1 inner wall, form the cavity that is used for polars 2 to run through in the ceramic ring 1, be equipped with four installation positions that are used for assembling polars 2 in the cavity, it has arc recess 5 to open between two adjacent installation positions, four arc recess 5 equipartitions set up in the cavity.
Each mounting location comprises two flat surfaces 4, a fillet 6 is arranged between the two flat surfaces 4, and the flat surfaces 4 are contact surfaces of the pole rods 2. The fixing place of the screw 3 and the pole rod 2 is a round angle 6 between two planes 4. When the spatial position of the pole rod 2 needs to be adjusted, the adjustment is realized by repairing and grinding the plane 4 contacted by the pole rod 2.
At the fastening of each screw, the pole rod is in two line contacts with the ceramic ring. These two line contact positions determine the spatial position of the pole. When the position of a pole rod at a certain position is improper, the space position of the pole rod can be adjusted by repairing and grinding the local contact surface where the contact line of the ceramic ring near the pole rod is located.
Example (b):
suppose there is a quadrupole rod assembly in the assembly stage, the outer dimensions of the adjacent rods of the four rods are shown in the figure, and the outer dimensions of the adjacent rods of the four rods are a, b, c and d respectively. In order to achieve the desired assembly accuracy, it is necessary that the difference between the maximum and minimum values of the four values a, b, c, d is in the order of micrometers, for example 2 μm. Often, the ceramic ring needs to be repaired.
For example for a set of data in the assembly process:
a＝27.990mm，b＝27.993mm，c＝27.994mm，d＝27.994mm，
if a conventional ceramic ring is used, as shown in fig. 2, its ideal position (shown by the dotted line) is opposite to the current position of the circular arc surface of the ceramic ring (the solid line circle). In the actual repairing and grinding process, the precision reaches the conventional machining limit, so that the precision is difficult to obtain by directly performing machine tool repairing and machining, and the model can be repaired only by the experience of a high-grade grinder. As shown in FIG. 2, for the arc surface lapping, it is necessary to lap the arc surface at the upper left-hand pole position (solid line circle) shown by the solid line in the figure by a lapping amount of 4 μm upward and 1 μm leftward. During the arc surface repairing and grinding, the proportion of the upward repairing and grinding component and the leftward repairing and grinding component can be controlled only by the repairing and grinding force angle of the repairing and grinding tool and the ceramic ring, the operation process is complex, the requirement on a grinding worker is high, and the finally repaired and ground molded arc surface has large repairing and grinding deviation possibly because of uneven stress or improper proportion of the two repairing and grinding components. In addition, the repaired arc surface can only be confirmed by a complex curved surface measuring device such as a three-coordinate measuring machine, and the measurement accuracy is difficult to be ensured by almost all three-coordinate measuring machines under the requirement of submicron accuracy. The absolute dimensional accuracy of the conventional high-accuracy three-coordinate measuring machine is in the micron order, and the measurement accuracy principle that the measurement accuracy/the measurement equipment accuracy is more than or equal to 3 is difficult to meet. In practice, only the quadrupole rods assembly can be reassembled and the dimensions a, b, c, d of the quadrupole rods are examined.
With the structure of this patent, the amount of work to be done can be easily broken down into two local planar position quantities, as shown in FIG. 4. Two planes near the upper left pole in the figure need to be lapped. The plane of the ceramic ring on the upper left pole rod is ground by 0.004mm (c-a is 27.994mm-27.990 mm); and (3) grinding the left ceramic ring plane of the upper left pole by 0.001mm (d-b is 27.994mm-27.993 mm). In the process of repairing and grinding, a repairing and grinding plane can be measured through a high-precision length measuring instrument such as a length measuring instrument, the sizes a 'and b' of the ceramic rings after repairing and grinding are measured, and the repairing and grinding amount can be checked. The measuring precision of the length measuring instrument can generally meet the submicron level and the measuring requirement. And the plane repairing and grinding belongs to the conventional grinding, the requirement on the technical level of workers is lower, and the process is simple.
It should be noted that, on the basis of this patent, simple modifications, such as changing the contact line into a small arc surface contact, a multipoint contact, etc., still belong to the core idea of this patent, and the idea of decomposing the arc repairing and grinding surface into two directions for independent measurement and repairing and grinding should be considered to be within the protection scope of this patent.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (4)
1. The utility model provides a quadrupole rod structure convenient to repair and grind assembly which characterized in that: including two ceramic rings (1), 4 utmost point poles (2) and 8 screw (3), 4 utmost point poles (2) are connected between two ceramic rings (1), utmost point pole (2) are through screw (3) fixed connection in ceramic ring (1) inner wall, form the cavity that is used for utmost point pole (2) to run through in ceramic ring (1), be equipped with four installation positions that are used for assembling utmost point pole (2) in the cavity, it has arc recess (5) to open between two adjacent installation positions, four arc recess (5) equipartitions set up in the cavity.
2. The quadrupole rod structure facilitating repair assembly of claim 1, wherein: each mounting position comprises two planes (4), a fillet (6) is arranged between the two planes (4), and the planes (4) are contact surfaces of the pole rods (2).
3. The quadrupole rod structure facilitating lapping assembly of claim 2, wherein: when the spatial position of the pole rod (2) needs to be adjusted, the adjustment is realized by repairing and grinding the plane (4) contacted by the pole rod (2).
4. The quadrupole rod structure facilitating lapping assembly of claim 2, wherein: the fixing position of the screw (3) and the pole rod (2) is a fillet (6) between the two planes (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011521467.2A CN112687518A (en) | 2020-12-21 | 2020-12-21 | Quadrupole rod structure convenient to repair and grind assembly |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011521467.2A CN112687518A (en) | 2020-12-21 | 2020-12-21 | Quadrupole rod structure convenient to repair and grind assembly |
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| Publication Number | Publication Date |
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| CN112687518A true CN112687518A (en) | 2021-04-20 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011521467.2A Pending CN112687518A (en) | 2020-12-21 | 2020-12-21 | Quadrupole rod structure convenient to repair and grind assembly |
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Citations (12)
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|---|---|---|---|---|
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| JPH10106484A (en) * | 1996-09-30 | 1998-04-24 | Shimadzu Corp | Quadrupole mass spectrographic device |
| US6239429B1 (en) * | 1998-10-26 | 2001-05-29 | Mks Instruments, Inc. | Quadrupole mass spectrometer assembly |
| CN200965862Y (en) * | 2006-10-10 | 2007-10-24 | 北京东西分析仪器有限公司 | An adjustable quadrupole rods device |
| WO2011081188A1 (en) * | 2009-12-28 | 2011-07-07 | キヤノンアネルバ株式会社 | Quadrupole mass spectroscope |
| CN202103012U (en) * | 2011-05-11 | 2012-01-04 | 张锡水 | Square inner frame type quadrupole bar support and device thereof |
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| JPH0935682A (en) * | 1995-07-14 | 1997-02-07 | Ulvac Japan Ltd | Quadrupole mass spectrometer |
| JPH10106484A (en) * | 1996-09-30 | 1998-04-24 | Shimadzu Corp | Quadrupole mass spectrographic device |
| US6239429B1 (en) * | 1998-10-26 | 2001-05-29 | Mks Instruments, Inc. | Quadrupole mass spectrometer assembly |
| CN200965862Y (en) * | 2006-10-10 | 2007-10-24 | 北京东西分析仪器有限公司 | An adjustable quadrupole rods device |
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| CN202103012U (en) * | 2011-05-11 | 2012-01-04 | 张锡水 | Square inner frame type quadrupole bar support and device thereof |
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| CN209471925U (en) * | 2019-04-15 | 2019-10-08 | 广州汇弘科技有限公司 | Quadrupole lever fixing apparatus |
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