CN112678828A - Reducing furnace capable of automatically relieving pressure and used for polycrystalline silicon production - Google Patents
Reducing furnace capable of automatically relieving pressure and used for polycrystalline silicon production Download PDFInfo
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- CN112678828A CN112678828A CN202110091676.6A CN202110091676A CN112678828A CN 112678828 A CN112678828 A CN 112678828A CN 202110091676 A CN202110091676 A CN 202110091676A CN 112678828 A CN112678828 A CN 112678828A
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Abstract
The invention relates to a reducing furnace for polysilicon production, which can automatically release pressure, and comprises a main body, an exhaust pipe, a sealing and fixing mechanism and a pressure release mechanism, wherein the sealing and fixing mechanism is arranged on the exhaust pipe, the pressure release mechanism is arranged in the exhaust pipe, the reducing furnace for polysilicon production, which can automatically release pressure, realizes the fixation and sealing of the exhaust pipe through the sealing and fixing mechanism, and releases the pressure through the pressure release mechanism, compared with the prior fixing mechanism, the reducing furnace not only clamps and fixes the exhaust pipe, but also seals the connection part of the exhaust pipe and the main body, thereby improving the practicability, compared with the prior mode of releasing pressure through an air pressure meter and an electromagnetic valve, the pressure release mechanism adopts a pure mechanical structure, thereby improving the stability and the service life of the device, simultaneously, the reducing furnace can filter the air in the main body, and avoids the dust from blocking a pressure release component, and through the operation of pressure release mechanism, strike the filter screen to avoid the filter screen to block up, realize better filter effect.
Description
Technical Field
The invention relates to a reducing furnace capable of automatically relieving pressure and used for polycrystalline silicon production.
Background
Polycrystalline silicon is a form of simple substance silicon, when molten simple substance silicon is solidified under a supercooling condition, silicon atoms are arranged into a plurality of crystal nuclei in a diamond lattice form, if the crystal nuclei grow into crystal grains with different crystal plane orientations, the crystal grains are combined to crystallize into polycrystalline silicon, and the polycrystalline silicon is widely applied to industries of solar cells, photovoltaic panels and the like.
In production, silica is generally reduced by carbon in an electric furnace to obtain crystalline silicon, and in the second process, carbon monoxide gas can be generated, so that the air pressure of a furnace body is increased, when the pressure is overlarge, the risk of explosion of the furnace can be generated, the furnace body needs to be exhausted and decompressed, the existing decompression mode is generally subjected to air pressure control through an air pressure gauge and an electromagnetic valve, the electronic element is low in stability and short in service life, meanwhile, the existing exhaust pipe is generally fixed in a welding mode, and the installation is inconvenient.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects of the prior art, the reduction furnace for producing the polycrystalline silicon, which can automatically release pressure, is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: a reducing furnace capable of automatically relieving pressure and used for polycrystalline silicon production comprises a main body, an exhaust pipe, a sealing and fixing mechanism and a pressure relieving mechanism, wherein the exhaust pipe is arranged on the main body and is communicated with the inside of the main body;
the sealing and fixing mechanism comprises a fixing ring and a sealing and fixing component, the fixing ring is sleeved on the exhaust pipe, the fixing pipe is connected with the exhaust pipe in a sliding manner, the sealing and fixing component comprises two sealing and fixing units, the two sealing and fixing units are respectively arranged at two ends of the fixing ring, the sealing and fixing units comprise a fixing block, a push rod, a sealing plate, a push block and a first spring, the fixing block is arranged on the fixing ring, the push rod penetrates through the fixing block, the push rod is connected with the fixing block in a sliding manner, the sealing plate and the push block are respectively arranged at two ends of the push rod, the cross section of the sealing plate is arc-shaped, the circle center of the arc-shaped cross section of the sealing plate is positioned on the axis of the exhaust pipe, the exhaust pipe is provided with a ring groove, one end of the sealing plate, the first spring is positioned between the sealing plate and the pushing block, one end of the first spring is connected with the sealing plate, and the other end of the first spring is connected with the pushing block;
the pressure relief mechanism comprises a pressure relief component and a filtering component, the pressure relief component comprises a shell, a sealing ball, a limiting unit and a sealing unit, the shell is arranged in an exhaust pipe, a plurality of exhaust holes are formed in the bottom of the shell, the limiting unit is arranged in the shell and comprises a limiting rod, a limiting plate and a second spring, the limiting rod is arranged in the shell, the limiting plate is sleeved on the limiting rod, the limiting plate is connected with the limiting rod in a sliding manner, the sealing ball is arranged on the limiting plate, the limiting ball is positioned at the top of the shell and is connected with the shell in a sealing manner, the second spring is sleeved on the limiting rod, one end of the second spring is connected with the bottom of the shell, the other end of the second spring is connected with the limiting plate, the sealing unit comprises a sealing ring and an air blowing unit, the sealing ring is arranged at the, the sealing ring is sleeved on the sealing ball and is connected with the sealing ball in a sealing way, the air blowing unit comprises a sleeve, a piston rod, a third spring and an air pipe, the sleeve is arranged in the shell, one end of the piston rod is positioned in the sleeve, the other end of the piston rod extends out of the sleeve and is connected with the limiting plate, the piston of the piston rod is hermetically connected with a sleeve, the sleeve is communicated with the inside of the sealing ring through an air pipe, the third spring is sleeved on the piston rod and is positioned in the sleeve, one end of the third spring is connected with the sleeve, the other end of the third spring is connected with the piston of the piston rod, the filter assembly comprises a filter screen and a recovery box, the filter screen sets up in the blast pipe, the filter screen supports with the ball sealer and leans on, retrieve the box setting on the blast pipe, it is located the filter screen and keeps away from one side of casing to retrieve the box.
In order to realize better sealing effect, be equipped with the sealing strip on one of them closing plate, the sealing strip has two, and two sealing strips set up respectively at the both ends of closing plate, are equipped with the seal groove on another closing plate, the seal groove has two, and two seal grooves correspond the setting with two sealing strips respectively, the sealing strip is located the seal groove, sealing strip and seal groove sealing connection.
In order to better limit the movement of the limiting plate, the limiting rods are two, the two limiting rods are respectively arranged at two ends of the limiting plate, the second springs are two, and the two second springs are respectively sleeved on the two limiting rods.
In order to clean the recovery box conveniently, a cover plate is arranged on the recovery box and is connected with the recovery box in a sealing mode.
In order to ensure that dust in the recovery box is better cleaned, the bottom of the recovery box is obliquely arranged.
In order to achieve a better sealing and fixing effect, the first spring is in a compressed state.
In order to achieve a better sealing effect, the second spring is in a compressed state.
In order to achieve a better sealing effect, the third spring is in a compressed state.
In order to realize better recovery of the sealing ring to the initial state, the sealing ring is made of elastic materials.
In order to realize better recovery of the sealing ring to the initial state, the sealing strip is made of elastic materials.
The reducing furnace for producing polycrystalline silicon, which can automatically release pressure, has the advantages that the exhaust pipe is fixed and sealed through the sealing and fixing mechanism, and the exhaust pipe is exhausted and released pressure through the pressure release mechanism.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural view of a reduction furnace for polysilicon production, which is capable of automatically depressurizing, according to the present invention;
FIG. 2 is a schematic structural diagram of a sealing and fixing mechanism of a reduction furnace for polysilicon production, which can automatically release pressure according to the present invention;
FIG. 3 is a schematic structural diagram of a pressure relief mechanism of the reduction furnace for polysilicon production, which can automatically relieve pressure according to the present invention;
FIG. 4 is a schematic structural diagram of a pressure relief assembly of the reduction furnace for polysilicon production, which is capable of automatically relieving pressure according to the present invention;
in the figure: 1. the air exhaust pipe comprises a main body, an exhaust pipe body, a fixing ring body, a fixing block body, a push rod body, a sealing plate body, a push block body, a first spring body, a shell body, a sealing ball body, a limiting rod body, a limiting plate body, a second spring body, a sealing ring body, a sleeve pipe body, a piston rod body, a third spring body, a piston rod body, a filter screen, a recovery box body, a sealing strip body and a cover plate, wherein.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1, a reduction furnace for polysilicon production capable of automatically relieving pressure comprises a main body 1, an exhaust pipe 2, a sealing and fixing mechanism and a pressure relieving mechanism, wherein the exhaust pipe 2 is arranged on the main body 1, the exhaust pipe 2 is communicated with the inside of the main body 1, the sealing and fixing mechanism is arranged on the exhaust pipe 2, and the pressure relieving mechanism is arranged in the exhaust pipe 2;
when the device uses, pour silicon raw materials and charcoal into main part 1 in, then the heating realizes the production of polycrystalline silicon, realizes through sealed fixed establishment that exhaust pipe 2's is sealed fixed, and polycrystalline silicon can produce gas in process of production to make the inside atmospheric pressure increase of main part 1, when atmospheric pressure increases to a certain extent, carry out automatic pressure release through pressure relief mechanism, avoid 1 internal pressure of main part to lead to the fact explode the stove excessively.
As shown in fig. 2, the sealing and fixing mechanism includes a fixing ring 3 and a sealing and fixing assembly, the fixing ring 3 is sleeved on the exhaust pipe 2, the fixing pipe is slidably connected with the exhaust pipe 2, the sealing and fixing assembly includes two sealing and fixing units, the two sealing and fixing units are respectively disposed at two ends of the fixing ring 3, the sealing and fixing units include a fixing block 4, a push rod 5, a sealing plate 6, a push block 7 and a first spring 8, the fixing block 4 is disposed on the fixing ring 3, the push rod 5 penetrates through the fixing block 4, the push rod 5 is slidably connected with the fixing block 4, the sealing plate 6 and the push block 7 are respectively disposed at two ends of the push rod 5, the cross section of the sealing plate 6 is arc-shaped, the circle center of the arc-shaped cross section of the sealing plate 6 is located on the axis of the exhaust pipe 2, an annular groove is disposed on, the two sealing plates 6 of the two sealing and fixing units are attached, the first spring 8 is sleeved on the push rod 5, the first spring 8 is positioned between the sealing plates 6 and the push block 7, one end of the first spring 8 is connected with the sealing plates 6, and the other end of the first spring 8 is connected with the push block 7;
when the exhaust pipe 2 is installed, the push block 7 is pulled, the push block 7 drives the push rod 5 to move, the push rod 5 drives the sealing plates 6 to move, so that the two sealing plates 6 are far away from each other, so that enough space is reserved between the two sealing plates 6, then the exhaust pipe 2 is inserted into the fixing ring 3, so that the annular groove on the exhaust pipe 2 corresponds to the sealing plates 6, at the moment, the first spring 8 is in a compressed state, the first spring 8 generates thrust on the sealing plates 6, then the push block 7 is loosened, under the action of restoring force of the first spring 8, the first spring 8 drives the sealing plates 6 to be clamped into the annular groove, so that the exhaust pipe 2 is clamped and fixed, meanwhile, the sealing plates 6 seal the gap between the exhaust pipe 2 and the fixing ring 3, two sealing plates 6 are attached, so that the sealing strips 21 on the sealing plates 6 are clamped into the sealing, thereby achieving a better sealing effect.
As shown in fig. 3-4, the pressure relief mechanism includes a pressure relief assembly and a filter assembly, the pressure relief assembly includes a housing 9, a sealing ball 10, a limiting unit and a sealing unit, the housing 9 is disposed in the exhaust pipe 2, a plurality of exhaust holes are disposed at the bottom of the housing 9, the limiting unit is disposed in the housing 9, the limiting unit includes a limiting rod 11, a limiting plate 12 and a second spring 13, the limiting rod 11 is disposed in the housing 9, the limiting plate 12 is sleeved on the limiting rod 11, the limiting plate 12 is slidably connected to the limiting rod 11, the sealing ball 10 is disposed on the limiting plate 12, the limiting ball is located at the top of the housing 9, the limiting ball is hermetically connected to the housing 9, the second spring 13 is sleeved on the limiting rod 11, one end of the second spring 13 is connected to the bottom of the housing 9, the other end of the second spring 13 is connected to the limiting plate 12, the sealing unit comprises a sealing ring 14 and an air blowing unit, the sealing ring 14 is arranged at the top of the shell 9, the sealing ring 14 is sleeved on a sealing ball 10, the sealing ring 14 is connected with the sealing ball 10 in a sealing manner, the air blowing unit comprises a sleeve 15, a piston rod 16, a third spring 17 and an air pipe 18, the sleeve 15 is arranged in the shell 9, one end of the piston rod 16 is positioned in the sleeve 15, the other end of the piston rod 16 extends out of the sleeve 15 and is connected with a limiting plate 12, the piston of the piston rod 16 is connected with the sleeve 15 in a sealing manner, the sleeve 15 is communicated with the sealing ring 14 through the air pipe 18, the third spring 17 is sleeved on the piston rod 16, the third spring 17 is positioned in the sleeve 15, one end of the third spring 17 is connected with the sleeve 15, the other end of the third spring 17 is connected with the piston of the piston rod 16, the filter assembly comprises a filter, the filter screen 19 sets up in blast pipe 2, filter screen 19 supports with ball sealer 10 and leans on, retrieve box 20 and set up on blast pipe 2, retrieve box 20 and be located one side that casing 9 was kept away from to filter screen 19.
Along with the increase of the air pressure in the main body 1, the thrust of the air pressure on the sealing ball 10 is increased, when the thrust is greater than the restoring force of the second spring 13, the air pressure pushes the sealing ball 10 to move, so that a gap is generated between the sealing ball 10 and the shell 9, so that the air in the main body 1 can flow into the shell 9 through the gap between the shell 9 and the sealing ball 10 and then is exhausted through the exhaust hole at the bottom of the shell 9, thereby realizing automatic pressure relief, when the thrust is less than the restoring force of the second spring 13, namely, the air pressure in the main body 1 is in a stable state, the restoring force of the second spring 13 generates thrust on the limiting plate 12, the limiting plate 12 generates thrust on the sealing ball 10, so that the sealing ball 10 seals the top of the shell, thereby avoiding the exhaust of the air in the main body 1, and meanwhile, the limiting plate 12 pushes the piston rod 16 to move, so that the space of, therefore, air in the sleeve 15 is pressed into the sealing ring 14 through the air pipe 18, so that the sealing ring 14 is expanded, the sealing ring 14 is better attached to the sealing ball 10, and a better sealing effect is realized.
Filter the air in main part 1 through filter screen 19, avoid the dust impurity of air to pile up in casing 9, thereby influence the operation of pressure release subassembly, after the pressure release is accomplished, the air pressure in main part 1 is less than the restoring force of second spring 13, thereby make first spring 8 drive ball sealer 10 pop out again and seal casing 9, the ball sealer 10 that pops out strikes filter screen 19, make the dust on the filter screen 19 shake and fall, thereby clean filter screen 19, thereby make filter screen 19 keep better filter effect, the dust that the shake falls is retrieved in retrieving box 20.
Only when pressure is too large, the pressure relief assembly can operate to relieve pressure, so that rapid loss of heat in the main body 1 is avoided, and normal reduction reaction of silicon and carbon is guaranteed.
In order to realize better sealing effect, be equipped with sealing strip 21 on one of them closing plate 6, sealing strip 21 has two, and two sealing strips 21 set up respectively at the both ends of closing plate 6, are equipped with the seal groove on another closing plate 6, the seal groove has two, and two seal grooves correspond the setting with two sealing strips 21 respectively, sealing strip 21 is located the seal groove, sealing strip 21 and seal groove sealing connection.
In order to better limit the movement of the limiting plate 12, the two limiting rods 11 are provided, the two limiting rods 11 are respectively arranged at two ends of the limiting plate 12, the two second springs 13 are provided, and the two second springs 13 are respectively sleeved on the two limiting rods 11.
In order to clean the recovery box 20 conveniently, a cover plate 22 is arranged on the recovery box 20, and the cover plate 22 is connected with the recovery box 20 in a sealing mode.
In order to better clean the dust in the recovery box 20, the bottom of the recovery box 20 is inclined.
For a better sealing fixation, the first spring 8 is in a compressed state.
For a better sealing effect, the second spring 13 is in a compressed state.
For a better sealing effect, the third spring 17 is in a compressed state.
In order to achieve a better return of the sealing ring 14 to the initial state, said sealing ring 14 is made of an elastic material.
In order to achieve a better return of the sealing ring 14 to the initial state, the sealing strip 21 is made of an elastic material.
When the device is used, silicon and carbon are added into a main body 1 and then heated, so that the silicon and the carbon react, thereby realizing the production of polycrystalline silicon, the sealing plates 6 move upwards by pulling the push block 7, thereby enough space is reserved between the two sealing plates 6, then the exhaust pipe 2 is inserted into the fixing ring 3, the hand is loosened, thereby the sealing plates 6 are pushed to be clamped into the annular groove under the restoring force action of the first spring 8, thereby the exhaust pipe 2 is clamped and fixed, meanwhile, the thin seam between the fixing ring 3 and the exhaust pipe 2 is sealed, the thin seam between the two sealing plates 6 is sealed through the sealing strip 21, thereby realizing better sealing effect, the silicon and the carbon react to generate gas, thereby the air pressure in the main body 1 is increased, when the pressure is greater than the restoring force of the first spring 8, the air pressure pushes the sealing ball 10 to move into the shell 9, so that the air in the main body 1 flows into the shell 9 through the gap between the sealing ball 10 and the shell 9 and is exhausted through the exhaust hole at the bottom of the shell 9, thereby realizing pressure relief, when the pressure is smaller than the restoring force of the first spring 8, the first spring 8 pushes the limiting plate 12 to move reversely, thereby enabling the sealing ball 10 to seal the shell 9 again, meanwhile, the limiting plate 12 moves to drive the piston rod 16 to move, thereby reducing the space of the sealing cavity, thereby enabling the air in the sleeve 15 to be pressed into the sealing ring 14, expanding the sealing ring 14, thereby better clinging the sealing ball 10, realizing better sealing effect, meanwhile, the air entering the exhaust pipe 2 is filtered through the filter screen 19, avoiding dust accumulation in the shell 9, causing the failure of the pressure relief component, and simultaneously, when the sealing ball 10 seals the shell 9 each time, can strike filter screen 19 for dust shakes off on the filter screen 19, avoids the dust to block up filter screen 19, realizes better filter effect, seals up blast pipe 2 here through pressure relief mechanism, only when the air pressure in main part 1 is too big, just can carry out the pressure release of exhausting, thereby has reduced thermal loss in main part 1.
Compared with the prior art, this but reducing furnace for polycrystalline silicon production of automatic pressure release, realize the fixed of blast pipe 2 and sealed through sealed fixed establishment, carry out the pressure release of exhausting through pressure release mechanism, compare with current fixed establishment, this mechanism not only presss from both sides tightly fixedly to blast pipe 2, seal the junction of blast pipe 2 and main part 1 simultaneously, the practicality has been improved, compare with the current mode that adopts barometer and solenoid valve to carry out the pressure release, this pressure release mechanism adopts pure mechanical structure, the stability and the life of device have been improved, this mechanism can filter the air in the main part 1 simultaneously, avoid the dust to block up the pressure release subassembly, and the operation through pressure release mechanism, strike filter screen 19, thereby avoid filter screen 19 to block up, realize better filter effect.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. The reducing furnace capable of automatically relieving pressure and used for polycrystalline silicon production is characterized by comprising a main body (1), an exhaust pipe (2), a sealing and fixing mechanism and a pressure relieving mechanism, wherein the exhaust pipe (2) is arranged on the main body (1), the exhaust pipe (2) is communicated with the inside of the main body (1), the sealing and fixing mechanism is arranged on the exhaust pipe (2), and the pressure relieving mechanism is arranged in the exhaust pipe (2);
the sealing and fixing mechanism comprises a fixing ring (3) and a sealing and fixing component, the fixing ring (3) is sleeved on the exhaust pipe (2), the fixing pipe is connected with the exhaust pipe (2) in a sliding manner, the sealing and fixing component comprises two sealing and fixing units, the two sealing and fixing units are respectively arranged at two ends of the fixing ring (3), each sealing and fixing unit comprises a fixing block (4), a push rod (5), a sealing plate (6), a push block (7) and a first spring (8), the fixing block (4) is arranged on the fixing ring (3), the push rod (5) penetrates through the fixing block (4), the push rod (5) is connected with the fixing block (4) in a sliding manner, the sealing plates (6) and the push block (7) are respectively arranged at two ends of the push rod (5), the cross section of the sealing plate (6) is arc-shaped, and the circle center of the arc-shaped cross section of the sealing plate (6), an annular groove is formed in the exhaust pipe (2), one end, far away from the push rod (5), of each sealing plate (6) is located in the annular groove, the two sealing plates (6) of the two sealing and fixing units are attached to each other, the first spring (8) is sleeved on the push rod (5), the first spring (8) is located between each sealing plate (6) and the corresponding push block (7), one end of the first spring (8) is connected with the corresponding sealing plate (6), and the other end of the first spring (8) is connected with the corresponding push block (7);
the pressure relief mechanism comprises a pressure relief component and a filtering component, the pressure relief component comprises a shell (9), a sealing ball (10), a limiting unit and a sealing unit, the shell (9) is arranged in the exhaust pipe (2), a plurality of exhaust holes are formed in the bottom of the shell (9), the limiting unit is arranged in the shell (9), the limiting unit comprises a limiting rod (11), a limiting plate (12) and a second spring (13), the limiting rod (11) is arranged in the shell (9), the limiting plate (12) is sleeved on the limiting rod (11), the limiting plate (12) is in sliding connection with the limiting rod (11), the sealing ball (10) is arranged on the limiting plate (12), the limiting ball is positioned at the top of the shell (9), the limiting ball is in sealing connection with the shell (9), the second spring (13) is sleeved on the limiting rod (11), the one end and the casing (9) bottom of second spring (13) are connected, the other end and the limiting plate (12) of second spring (13) are connected, sealed unit includes sealing washer (14) and air-blowing unit, sealing washer (14) set up at casing (9) top, sealing washer (14) cover is established on ball sealer (10), sealing washer (14) and ball sealer (10) sealing connection, air-blowing unit includes sleeve pipe (15), piston rod (16), third spring (17) and trachea (18), sleeve pipe (15) set up in casing (9), the one end of piston rod (16) is located sleeve pipe (15), the other end of piston rod (16) stretches out sleeve pipe (15) and is connected with limiting plate (12) outward, the piston and the sleeve pipe (15) sealing connection of piston rod (16), sleeve pipe (15) are through trachea (18) and the inside intercommunication of sealing washer (14), third spring (17) cover is established on piston rod (16), third spring (17) are located sleeve pipe (15), the one end and the sleeve pipe (15) of third spring (17) are connected, the other end and the piston connection of piston rod (16) of third spring (17), filtering component includes filter screen (19) and retrieves box (20), filter screen (19) set up in blast pipe (2), filter screen (19) support with ball sealer (10) and lean on, it sets up on blast pipe (2) to retrieve box (20), it is located one side that casing (9) were kept away from to filter screen (19) to retrieve box (20).
2. The reduction furnace capable of automatically relieving pressure for polysilicon production according to claim 1, wherein two sealing strips (21) are provided on one sealing plate (6), two sealing strips (21) are provided, two sealing strips (21) are respectively provided at two ends of the sealing plate (6), two sealing grooves are provided on the other sealing plate (6), two sealing grooves are provided, two sealing grooves are respectively provided corresponding to the two sealing strips (21), the sealing strips (21) are located in the sealing grooves, and the sealing strips (21) are hermetically connected with the sealing grooves.
3. The reduction furnace capable of automatically relieving pressure for polysilicon production according to claim 1, wherein there are two limiting rods (11), the two limiting rods (11) are respectively disposed at two ends of the limiting plate (12), there are two second springs (13), and the two second springs (13) are respectively sleeved on the two limiting rods (11).
4. The reduction furnace for polysilicon production capable of automatically depressurizing according to claim 1, wherein a cover plate (22) is provided on the recycling box (20), and the cover plate (22) is hermetically connected with the recycling box (20).
5. The reduction furnace for polysilicon production, which is automatically depressurized according to claim 4, wherein the bottom of the recovery box (20) is disposed to be inclined.
6. A reduction furnace for polysilicon production with automatic depressurization according to claim 1, wherein the first spring (8) is in a compressed state.
7. A reduction furnace for polysilicon production with automatic depressurization as set forth in claim 1 wherein the second spring (13) is in a compressed state.
8. A reduction furnace for polysilicon production with automatic depressurization as set forth in claim 1 wherein the third spring (17) is in a compressed state.
9. The reduction furnace for polysilicon production that can automatically depressurize according to claim 1, wherein the sealing ring (14) is made of an elastic material.
10. A reduction furnace for polysilicon production with automatic depressurization as set forth in claim 2 wherein the sealing strip (21) is made of an elastic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110091676.6A CN112678828A (en) | 2021-01-23 | 2021-01-23 | Reducing furnace capable of automatically relieving pressure and used for polycrystalline silicon production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110091676.6A CN112678828A (en) | 2021-01-23 | 2021-01-23 | Reducing furnace capable of automatically relieving pressure and used for polycrystalline silicon production |
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| Publication Number | Publication Date |
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| CN112678828A true CN112678828A (en) | 2021-04-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110091676.6A Withdrawn CN112678828A (en) | 2021-01-23 | 2021-01-23 | Reducing furnace capable of automatically relieving pressure and used for polycrystalline silicon production |
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| CN (1) | CN112678828A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113331156A (en) * | 2021-05-17 | 2021-09-03 | 薛世豪 | Agricultural integrated pesticide spraying device |
| CN114010106A (en) * | 2021-11-05 | 2022-02-08 | 江苏南高智能装备创新中心有限公司 | Robot of sweeping floor based on laser rangefinder location technique |
| CN114181023A (en) * | 2021-12-28 | 2022-03-15 | 潍坊万胜生物农药有限公司 | Preparation process of biochar-based seaweed microbial fertilizer for improving saline soil |
-
2021
- 2021-01-23 CN CN202110091676.6A patent/CN112678828A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113331156A (en) * | 2021-05-17 | 2021-09-03 | 薛世豪 | Agricultural integrated pesticide spraying device |
| CN113331156B (en) * | 2021-05-17 | 2022-07-22 | 苏州普轮电子科技有限公司 | Agricultural integrated pesticide spraying device |
| CN114010106A (en) * | 2021-11-05 | 2022-02-08 | 江苏南高智能装备创新中心有限公司 | Robot of sweeping floor based on laser rangefinder location technique |
| CN114010106B (en) * | 2021-11-05 | 2023-03-03 | 江苏南高智能装备创新中心有限公司 | Robot of sweeping floor based on laser rangefinder location technique |
| CN114181023A (en) * | 2021-12-28 | 2022-03-15 | 潍坊万胜生物农药有限公司 | Preparation process of biochar-based seaweed microbial fertilizer for improving saline soil |
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Application publication date: 20210420 |