CN112676128A - DLC coating with corrosion resistance and high temperature resistance and preparation process thereof - Google Patents
DLC coating with corrosion resistance and high temperature resistance and preparation process thereof Download PDFInfo
- Publication number
- CN112676128A CN112676128A CN202011475854.7A CN202011475854A CN112676128A CN 112676128 A CN112676128 A CN 112676128A CN 202011475854 A CN202011475854 A CN 202011475854A CN 112676128 A CN112676128 A CN 112676128A
- Authority
- CN
- China
- Prior art keywords
- mass
- parts
- corrosion
- high temperature
- dlc coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Coating By Spraying Or Casting (AREA)
Abstract
The invention discloses a DLC coating with corrosion resistance and high temperature resistance and a preparation process thereof, the DLC coating comprises a DLC coating base layer, an anti-corrosion layer and a high temperature resistance layer, the surface of the DLC coating base layer is sequentially attached with the anti-corrosion layer and the high temperature resistance layer from inside to outside, wherein: the anti-corrosion layer takes PTFE as a basic component and contains a solid lubricant, wherein the PTFE is 30-60 parts by mass, and the solid lubricant is 40-70 parts by mass; the high temperature resistant layer takes ceramic powder as a basic component and contains silicate paint, wherein the ceramic powder accounts for 50-80 parts by mass, and the silicate powder accounts for 20-50 parts by mass. The anti-corrosion layer of the invention takes PTFE as a basic component and contains solid lubricant, thus having excellent corrosion resistance, chemical resistance and abrasion resistance, and the high temperature resistant layer takes ceramic powder as a basic component and contains silicate paint, thus having high heat resistance and better high temperature resistance.
Description
Technical Field
The invention relates to the technical field of DLC coatings, in particular to a DLC coating with corrosion resistance and high temperature resistance and a preparation process thereof.
Background
DLC coatings (Diamond-like Carbon) coatings, Diamond-like coatings (Diamond-like Carbon) or DLC coatings for short are metastable amorphous substances containing a Diamond structure (sp3 bonds) and a graphite structure (sp2 bonds), the Carbon atoms being mainly bound by sp3 and sp2 hybrid bonds. Diamond-like coatings, or DLC coatings for short, are amorphous films that can be divided into substantially hydrogen-containing diamond-like (a-C: H) coatings and hydrogen-free diamond-like coatings. The hydrogen content in the hydrogen-containing DLC coating is between 20 at.% and 50 at.%, with an sp3 composition of less than 70%. A tetrahedral amorphous carbon (ta-C) film is common in hydrogen-free DLC coatings. the ta-C coating is mainly sp3 bond, and the content of sp3 is generally higher than 70%. Common to different kinds of diamond-like coatings is the fact that carbon atoms have two forms of occurrence in nature with long-range disorder in the spatial structure: diamond and graphite. In the diamond structure, each carbon atom forms a covalent bond with four other carbon atoms by an sp3 hybridization orbital to form a regular tetrahedron, and all valence electrons participate in the formation of the covalent bond without free electrons.
CN202010803821.4 discloses a DLC coating process, wherein the process equipment is provided with a magnetron sputtering target required by PVD coating, a discharge electrode required by PECVD gas coating and a magnetic field coil; the process equipment can realize the DLC coating process at low temperature: meanwhile, the carbon film has the functions of PVD and PECVD, the problems that magnetron sputtering is needed for the priming of DLC and PECVD is needed for the carbon film layer are solved, carbon-containing gas can be cracked at a lower temperature, and the temperature is greatly reduced; the deposition rate of the process equipment is fast: the method combines the electromagnetic field generated by the coil with the central auxiliary anode, and is assisted by a high-power pulse power supply, so that the ionization rate of the carbon-containing gas is improved, and the deposition rate of the carbon layer is improved. However, the DLC coating prepared in this patent is difficult to satisfy corrosion resistance and high temperature resistance because of its use environment, which is generally used in a high temperature and highly corrosive environment.
Disclosure of Invention
The invention aims to provide a DLC coating with corrosion resistance and high temperature resistance and a preparation process thereof, wherein the corrosion resistance layer takes PTFE as a basic component, contains a solid lubricant, has excellent corrosion resistance, chemical resistance and wear resistance, takes ceramic powder as a basic component, contains silicate paint, has high heat resistance and good high temperature resistance, and can solve the problems in the background art.
In order to achieve the purpose, the invention provides the following technical scheme:
the utility model provides a DLC coating with anticorrosive and high temperature resistance can, includes DLC coating basic unit, anti-corrosion coating and resistant high temperature layer, and the surface of DLC coating basic unit has anti-corrosion coating and resistant high temperature layer to adhere to from inside to outside in proper order, wherein:
the anti-corrosion layer takes PTFE as a basic component and contains a solid lubricant, wherein the PTFE is 30-60 parts by mass, and the solid lubricant is 40-70 parts by mass;
the high temperature resistant layer takes ceramic powder as a basic component and contains silicate paint, wherein the ceramic powder accounts for 50-80 parts by mass, and the silicate powder accounts for 20-50 parts by mass.
Further, the thickness of the anti-corrosion layer is the same as that of the high temperature resistant layer.
Further, the solid lubricant is graphite powder.
Further, 40-50 parts by mass of PTFE, 50-60 parts by mass of solid lubricant, 60-70 parts by mass of ceramic powder and 30-40 parts by mass of silicate powder.
Further, 45 parts by mass of PTFE, 55 parts by mass of a solid lubricant, 65 parts by mass of a ceramic powder, and 35 parts by mass of a silicate powder.
The invention provides another technical scheme that: a preparation process of a DLC coating with corrosion resistance and high temperature resistance comprises the following steps:
step 1, stirring and mixing: mixing and stirring PTFE and a solid lubricant according to a proportion to obtain a material A for later use, and mixing and stirring ceramic powder and silicate powder according to a proportion to obtain a material B for later use;
step 2, plasma spraying of the material A: feeding the material A into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material A onto a DLC coating base layer to form an anti-corrosion layer;
step 3, plasma spraying the material B: and B, feeding the material B into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material B onto the anti-corrosion layer obtained in the step 2 to form the anti-corrosion layer.
Further, the temperature at the nozzle exit of the plasma spray was 15000-.
Further, the flame flow velocity was 100-200m/s at the nozzle outlet.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the outer surface of the traditional DLC coating base layer is sequentially sprayed with the anti-corrosion layer and the high-temperature resistant layer by adopting a plasma spraying process, wherein the anti-corrosion layer takes PTFE as a basic component and contains a solid lubricant, so that the anti-corrosion layer has excellent corrosion resistance, chemical resistance and wear resistance, and the high-temperature resistant layer takes ceramic powder as a basic component and contains silicate paint, so that the heat resistance temperature is high, and the high-temperature resistance is better.
Drawings
FIG. 1 is a process flow diagram of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The utility model provides a DLC coating with anticorrosive and high temperature resistance can, includes DLC coating basic unit, anti-corrosion coating and resistant high temperature layer, and the surface of DLC coating basic unit has anti-corrosion coating and resistant high temperature layer to adhere to from inside to outside in proper order, wherein:
the anti-corrosion layer takes PTFE as a basic component and contains solid lubricant, wherein the PTFE is 30-60 parts by mass, and the solid lubricant is 40-70 parts by mass.
The high temperature resistant layer takes ceramic powder as a basic component and contains silicate paint, wherein the ceramic powder accounts for 50-80 parts by mass, and the silicate powder accounts for 20-50 parts by mass.
The solid lubricant is graphite powder.
Example 1
40 parts by mass of PTFE, 60 parts by mass of solid lubricant, 60 parts by mass of ceramic powder and 40 parts by mass of silicate powder.
Referring to fig. 1, a process for preparing a DLC coating with corrosion and high temperature resistance comprises the following steps:
step 1, stirring and mixing: mixing and stirring 40 parts by mass of PTFE and 60 parts by mass of solid lubricant into material A for later use, and mixing and stirring 60 parts by mass of ceramic powder and 40 parts by mass of silicate powder into material B for later use;
step 2, plasma spraying of the material A: feeding the material A into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material A onto a DLC coating base layer to form an anti-corrosion layer;
step 3, plasma spraying the material B: and B, feeding the material B into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material B onto the anti-corrosion layer obtained in the step 2 to form the anti-corrosion layer.
The temperature at the nozzle exit of the plasma spray was 15000 ° f.
The flame flow velocity was 200m/s at the nozzle outlet.
Example 2
42 parts by mass of PTFE, 58 parts by mass of solid lubricant, 70 parts by mass of ceramic powder and 30 parts by mass of silicate powder.
A preparation process of a DLC coating with corrosion resistance and high temperature resistance comprises the following steps:
step 1, stirring and mixing: mixing and stirring 42 parts by mass of PTFE and 58 parts by mass of solid lubricant into material A for later use, and mixing and stirring 70 parts by mass of ceramic powder and 30 parts by mass of silicate powder into material B for later use;
step 2, plasma spraying of the material A: feeding the material A into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material A onto a DLC coating base layer to form an anti-corrosion layer;
step 3, plasma spraying the material B: and B, feeding the material B into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material B onto the anti-corrosion layer obtained in the step 2 to form the anti-corrosion layer.
The temperature at the nozzle exit of the plasma spray was 16000 ° f.
The flame flow velocity was 200m/s at the nozzle outlet.
Example 3
45 parts by mass of PTFE, 55 parts by mass of a solid lubricant, 65 parts by mass of ceramic powder and 35 parts by mass of silicate powder.
A preparation process of a DLC coating with corrosion resistance and high temperature resistance comprises the following steps:
step 1, stirring and mixing: mixing and stirring 45 parts by mass of PTFE and 55 parts by mass of solid lubricant into material A for later use, and mixing and stirring 65 parts by mass of ceramic powder and 35 parts by mass of silicate powder into material B for later use;
step 2, plasma spraying of the material A: feeding the material A into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material A onto a DLC coating base layer to form an anti-corrosion layer;
step 3, plasma spraying the material B: and B, feeding the material B into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material B onto the anti-corrosion layer obtained in the step 2 to form the anti-corrosion layer.
The temperature at the nozzle exit of the plasma spray was 18000 ° f.
The flame flow velocity was 140m/s at the nozzle exit.
Example 4
50 parts by mass of PTFE, 50 parts by mass of a solid lubricant, 65 parts by mass of ceramic powder and 35 parts by mass of silicate powder.
A preparation process of a DLC coating with corrosion resistance and high temperature resistance comprises the following steps:
step 1, stirring and mixing: mixing and stirring 50 parts by mass of PTFE and 50 parts by mass of solid lubricant into material A for later use, and mixing and stirring 65 parts by mass of ceramic powder and 35 parts by mass of silicate powder into material B for later use;
step 2, plasma spraying of the material A: feeding the material A into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material A onto a DLC coating base layer to form an anti-corrosion layer;
step 3, plasma spraying the material B: and B, feeding the material B into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material B onto the anti-corrosion layer obtained in the step 2 to form the anti-corrosion layer.
The temperature at the nozzle exit of the plasma spray was 20000 ° f.
The flame flow velocity was 100m/s at the nozzle outlet.
Example 6
48 parts by mass of PTFE, 52 parts by mass of a solid lubricant, 68 parts by mass of a ceramic powder and 32 parts by mass of a silicate powder.
A preparation process of a DLC coating with corrosion resistance and high temperature resistance comprises the following steps:
step 1, stirring and mixing: mixing and stirring 48 parts by mass of PTFE and 52 parts by mass of solid lubricant into material A for later use, and mixing and stirring 68 parts by mass of ceramic powder and 32 parts by mass of silicate powder into material B for later use;
step 2, plasma spraying of the material A: feeding the material A into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material A onto a DLC coating base layer to form an anti-corrosion layer;
step 3, plasma spraying the material B: and B, feeding the material B into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material B onto the anti-corrosion layer obtained in the step 2 to form the anti-corrosion layer.
The temperature at the nozzle exit of the plasma spray was 18000 ° f.
The flame flow velocity was 150m/s at the nozzle outlet.
Example 7
50 parts by mass of PTFE, 50 parts by mass of a solid lubricant, 70 parts by mass of ceramic powder and 30 parts by mass of silicate powder.
A preparation process of a DLC coating with corrosion resistance and high temperature resistance comprises the following steps:
step 1, stirring and mixing: mixing and stirring 50 parts by mass of PTFE and 50 parts by mass of solid lubricant into material A for later use, and mixing and stirring 70 parts by mass of ceramic powder and 30 parts by mass of silicate powder into material B for later use;
step 2, plasma spraying of the material A: feeding the material A into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material A onto a DLC coating base layer to form an anti-corrosion layer;
step 3, plasma spraying the material B: and B, feeding the material B into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material B onto the anti-corrosion layer obtained in the step 2 to form the anti-corrosion layer.
The temperature at the nozzle exit of the plasma spray was 17000 ° f.
The flame flow velocity was 180m/s at the nozzle outlet.
Example 8
40 parts by mass of PTFE, 60 parts by mass of solid lubricant, 70 parts by mass of ceramic powder and 30 parts by mass of silicate powder.
A preparation process of a DLC coating with corrosion resistance and high temperature resistance comprises the following steps:
step 1, stirring and mixing: mixing and stirring 40 parts by mass of PTFE and 60 parts by mass of solid lubricant into material A for later use, and mixing and stirring 70 parts by mass of ceramic powder and 30 parts by mass of silicate powder into material B for later use;
step 2, plasma spraying of the material A: feeding the material A into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material A onto a DLC coating base layer to form an anti-corrosion layer;
step 3, plasma spraying the material B: and B, feeding the material B into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material B onto the anti-corrosion layer obtained in the step 2 to form the anti-corrosion layer.
The temperature at the nozzle exit of the plasma spray was 20000 ° f.
The flame flow velocity was 180m/s at the nozzle outlet.
The DLC coatings of examples 1-8 above were tested for corrosion and high temperature resistance with the following results:
as can be seen from the above table, the DLC coatings of examples 1-8 have no cracking and peeling phenomena and can withstand temperatures as high as 1200 ℃ compared to the conventional DLC coatings which have cracking and peeling phenomena after use and can withstand temperatures of only 650 ℃, so the DLC coatings of the present invention have better corrosion resistance and high temperature resistance.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be able to cover the technical solutions and the inventive concepts of the present invention within the technical scope of the present invention.
Claims (8)
1. The utility model provides a DLC coating with anticorrosive and high temperature resistance, its characterized in that, includes DLC coating basic unit, anti-corrosion coating and high temperature resistant layer, and DLC coating basic unit's surface from inside to outside adheres to in proper order has anti-corrosion coating and high temperature resistant layer, wherein:
the anti-corrosion layer takes PTFE as a basic component and contains a solid lubricant, wherein the PTFE is 30-60 parts by mass, and the solid lubricant is 40-70 parts by mass;
the high temperature resistant layer takes ceramic powder as a basic component and contains silicate paint, wherein the ceramic powder accounts for 50-80 parts by mass, and the silicate powder accounts for 20-50 parts by mass.
2. DLC coating with corrosion and temperature resistance according to claim 1, characterised in that the thickness of the corrosion resistant layer and the temperature resistant layer is the same.
3. DLC coating with anti-corrosion and high temperature resistance according to claim 1, characterised in that the solid lubricant is graphite powder.
4. The DLC coating with anti-corrosion and high temperature resistance according to claim 1, wherein PTFE is 40 to 50 parts by mass, solid lubricant is 50 to 60 parts by mass, ceramic powder is 60 to 70 parts by mass, and silicate powder is 30 to 40 parts by mass.
5. The DLC coating with anti-corrosion and high temperature resistance according to claim 1, wherein PTFE is 45 parts by mass, the solid lubricant is 55 parts by mass, the ceramic powder is 65 parts by mass, and the silicate-based powder is 35 parts by mass.
6. A process for the preparation of DLC coatings with corrosion and high temperature resistance according to claim 1, characterized by the following steps:
step 1, stirring and mixing: mixing and stirring PTFE and a solid lubricant according to a proportion to obtain a material A for later use, and mixing and stirring ceramic powder and silicate powder according to a proportion to obtain a material B for later use;
step 2, plasma spraying of the material A: feeding the material A into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material A onto a DLC coating base layer to form an anti-corrosion layer;
step 3, plasma spraying the material B: and B, feeding the material B into flame through a powder feeder to be melted, accelerating the material to be higher than 150m/s through flame flow, and spraying the material B onto the anti-corrosion layer obtained in the step 2 to form the anti-corrosion layer.
7. The process for the preparation of DLC coatings with anti-corrosion and high temperature resistance according to claim 6, characterized in that the temperature of the nozzle outlet of the plasma spraying is 15000-.
8. The process for the preparation of DLC coatings with corrosion and temperature resistance according to claim 6, characterized in that the flame flow velocity at the nozzle outlet is 100-200 m/s.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011475854.7A CN112676128A (en) | 2020-12-14 | 2020-12-14 | DLC coating with corrosion resistance and high temperature resistance and preparation process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011475854.7A CN112676128A (en) | 2020-12-14 | 2020-12-14 | DLC coating with corrosion resistance and high temperature resistance and preparation process thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112676128A true CN112676128A (en) | 2021-04-20 |
Family
ID=75447832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011475854.7A Pending CN112676128A (en) | 2020-12-14 | 2020-12-14 | DLC coating with corrosion resistance and high temperature resistance and preparation process thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112676128A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102498232A (en) * | 2009-08-07 | 2012-06-13 | 欧瑞康贸易股份公司(特吕巴赫) | Tribology combined with corrosion resistance: a new family of pvd- and pacvd coatings |
| CN106011855A (en) * | 2016-07-18 | 2016-10-12 | 大连维钛克科技股份有限公司 | Carbon-based coating applied to sliding part |
| CN107056074A (en) * | 2017-06-13 | 2017-08-18 | 大连工业大学 | A kind of plasma spraying ceramic coat is modified with glass dust, preparation method and applications |
| CN107761060A (en) * | 2017-09-27 | 2018-03-06 | 南京工业大学 | Surface corrosion-resistant conductive composite coating of metal polar plate for battery, metal polar plate for battery and preparation method of metal polar plate |
| CN211820349U (en) * | 2020-01-14 | 2020-10-30 | 天津维特邦技术开发有限公司 | Improved main shaft structure for blower transmission set |
-
2020
- 2020-12-14 CN CN202011475854.7A patent/CN112676128A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102498232A (en) * | 2009-08-07 | 2012-06-13 | 欧瑞康贸易股份公司(特吕巴赫) | Tribology combined with corrosion resistance: a new family of pvd- and pacvd coatings |
| CN106011855A (en) * | 2016-07-18 | 2016-10-12 | 大连维钛克科技股份有限公司 | Carbon-based coating applied to sliding part |
| CN107056074A (en) * | 2017-06-13 | 2017-08-18 | 大连工业大学 | A kind of plasma spraying ceramic coat is modified with glass dust, preparation method and applications |
| CN107761060A (en) * | 2017-09-27 | 2018-03-06 | 南京工业大学 | Surface corrosion-resistant conductive composite coating of metal polar plate for battery, metal polar plate for battery and preparation method of metal polar plate |
| CN211820349U (en) * | 2020-01-14 | 2020-10-30 | 天津维特邦技术开发有限公司 | Improved main shaft structure for blower transmission set |
Non-Patent Citations (3)
| Title |
|---|
| 周惠久: "《新材料辞典》", 31 December 1996, 上海科学技术文献出版社 * |
| 董祥忠: "《现代塑料成型工程》", 30 September 2009, 国防工业出版社 * |
| 陈榕林: "《最新机械设计制造常用数据与新旧标准对照手册》", 30 November 1995, 科学技术文献出版社 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0017944B1 (en) | Thermospray method for production of aluminium porous boiling surfaces | |
| CN108359927B (en) | NiCr/Al2O3Preparation method of composite coating | |
| CN102676971B (en) | Preparation method for composite coating of outer surface of nodular cast iron pipe | |
| CN103484857B (en) | Metallic matrix ceramic coating is prepared the method for nano modification amorphous ceramic coating | |
| CN109778105A (en) | A kind of amorphous composite coating and preparation method thereof | |
| CN101590558A (en) | Preparation method of reaction nitrogen arc surfacing titanium carbonitride reinforced titanium-based composite coating | |
| CN105506564A (en) | Rotating silicon-magnesium alloy target and preparation method thereof | |
| CN110158050B (en) | System and method for preparing TiN, TiC and TiCN coatings by fluidized bed | |
| CN111575629B (en) | Anti-corrosion composite layer, application and preparation method of anti-corrosion composite lining layer | |
| CN112159982A (en) | High-entropy alloy coating containing endogenous alumina reinforced phase and preparation method thereof | |
| CN111424229B (en) | Preparation method of composite coating resistant to liquid metal alloy etching | |
| US10053780B2 (en) | Method for depositing an anti-corrosion coating | |
| CN109182996B (en) | Tungsten alloy coating preparation equipment and method | |
| CN105296909A (en) | Galvanizing zinc corrosion resistant boride and method for preparing metal ceramic gradient coatings | |
| CN112676128A (en) | DLC coating with corrosion resistance and high temperature resistance and preparation process thereof | |
| CN107523780B (en) | Composite protective coating of sink roller for hot dip plating and preparation method | |
| CN103834929A (en) | Carbide coating containing hafnium and preparation method of carbide coating | |
| CN102102203A (en) | Preparation method of corrosion resistant FeAl intermetallic compound-based composite structure coating | |
| CN101239844A (en) | Composite carbon-resisting coat and method for preparing the same on substrate | |
| CN105164303B (en) | The method of deposit attack protective coating | |
| CN102071388A (en) | Method for preparing anticorrosive coating for magnesium and lithium alloy | |
| CN104593714B (en) | The SiC bases rotary target material and its manufacture method of a kind of doping metals | |
| CN101333642A (en) | Band steel filming method and system thereof | |
| CN105088122A (en) | Preparation method of Ni-Al2O3-AlB12 composite coating on surface of magnesium alloy | |
| CN111118437A (en) | Rotary silicon-phosphorus alloy target material and preparation method and application thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210420 |