CN112666639A - Micro lens array and manufacturing method thereof, light homogenizing element and imaging module - Google Patents
Micro lens array and manufacturing method thereof, light homogenizing element and imaging module Download PDFInfo
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Abstract
The invention discloses a micro-lens array, a manufacturing method thereof, a light homogenizing element and an imaging module. The manufacturing method of the micro-lens array comprises the steps of enabling each initial control point on an array plane to be randomly shifted along a first direction and a second direction of the array plane respectively to obtain a plurality of target control points, wherein the array plane is provided with the plurality of initial control points, and the first direction is perpendicular to the second direction; calculating a plurality of Thiessen polygon boundaries according to the plurality of target control points, wherein each target control point corresponds to one Thiessen polygon boundary, and at least one edge is shared by two adjacent Thiessen polygon boundaries; projecting the target control point as the center of a microlens, and projecting the Thiessen polygon boundary as the boundary of the microlens to generate a plurality of microlenses, thereby obtaining the microlens array. Therefore, the micro lens array has a larger filling proportion, and the moire effect can be effectively eliminated, so that the viewing effect of integrated imaging is improved.
Description
Technical Field
The invention relates to the technical field of optics, in particular to a micro-lens array and a manufacturing method thereof, a light homogenizing element and an imaging module.
Background
In the related art, the microlens array for integrated imaging is usually a regular array microlens, however, the microlenses of the regular array microlens array have larger ineffective spacing areas, so that the overall filling ratio of the microlenses to the array is lower, and meanwhile, the moire effect is easily generated, and the sensory effect is influenced.
Disclosure of Invention
The embodiment of the invention provides a micro-lens array, a manufacturing method thereof, a light homogenizing element and an imaging module.
The method for manufacturing the micro-lens array comprises the following steps:
randomly shifting each initial control point on an array plane along a first direction and a second direction of the array plane respectively to obtain a plurality of target control points, wherein the array plane is provided with a plurality of initial control points, the interval between every two adjacent initial control points is the same in the first direction, the interval is also the same in the second direction, and the first direction is perpendicular to the second direction;
calculating a plurality of Thiessen polygon boundaries according to the target control points, wherein each target control point corresponds to one Thiessen polygon boundary, and at least one edge is shared by two adjacent Thiessen polygon boundaries;
projecting the target control point as the center of a microlens, and projecting the Thiessen polygon boundary as the boundary of the microlens to generate a plurality of microlenses, thereby obtaining the microlens array.
In the method for manufacturing a microlens array according to the embodiment of the present invention, the initial control points on the array plane are randomly shifted in the first direction and the second direction to obtain a plurality of target control points, the thieson polygon boundary corresponding to each target control point is calculated from the target control points, the target control points are projected as the center of the microlens, and the thieson polygon boundary is projected as the boundary of the microlens to generate a plurality of microlenses, thereby obtaining the microlens array. Therefore, the target control point is obtained through random offset, the irregular Thiessen polygon boundary is calculated, then the target control point is used as the center projection of the micro lens, the Thiessen polygon boundary is used as the boundary projection of the micro lens to fill the micro lens array, the micro lens array has a larger filling proportion, meanwhile, each micro lens in the micro lens array is randomly distributed, the boundary of each micro lens array is a random boundary, the Moire effect can be effectively eliminated, and the viewing effect of integrated imaging is improved.
In some embodiments, before randomly offsetting each initial control point on the array plane along the first direction and the second direction respectively to obtain a plurality of target control points, the method for manufacturing the microlens array further comprises:
generating a plurality of the initial control points on the array plane based on a standard array spacing, wherein the standard array comprises a rectangular array.
In this way, a plurality of initial control points may be generated on the array plane at a standard array spacing to facilitate random offset of each initial control point at a later time.
In some embodiments, the radius of curvature R of a plurality of the microlenses satisfies the following relationship:
5*max(dx，dy)>R>3*max(dx，dy)；
and dx is the spacing distance between two adjacent initial control points in the first direction, and dy is the spacing distance between two adjacent initial control points in the second direction.
Thus, controlling dx and dy to be in the range of 5um to 100um can make the microlens array easier to process.
In some embodiments, the distance dx between two adjacent initial control points in the first direction is 5um to 100um, and the distance dy between two adjacent initial control points in the second direction is 5um to 100 um.
Thus, setting the ratio of dx and dy within the above range can be used to control the aspect ratio to match the viewing angle of the human eye.
In some embodiments, the separation distance dx in the first direction between two adjacent initial control points and the separation distance dy in the second direction between two adjacent initial control points satisfy the following relation:
9/16≤dx/dy≤16/9。
in certain embodiments, the maximum offset distance dl between the target control point and the initial control point satisfies at least one of the following relationships:
dx/6<dl<dx/1.5；
dy/6<dl<dy/2；
and dx is the spacing distance between two adjacent initial control points in the first direction, and dy is the spacing distance between two adjacent initial control points in the second direction.
Thus, the microlens array formed by setting the offset distance dl of the maximum random offset of the initial control point in the above range can obtain better randomness, and the moire effect can be effectively eliminated.
In certain embodiments, the maximum offset distance dl between the target control point and the initial control point satisfies at least one of the following relationships:
dx/6<dl<dx/3；
dy/6<dl<dy/3。
as such, setting the offset distance dl of the maximum random offset of the initial control points within the above range can avoid the randomness of the generated thiessen polygon from being too large to be suitable for integrated imaging.
The microlens array according to the embodiment of the present invention is manufactured by the method for manufacturing a microlens array according to any one of the above-described embodiments.
In the microlens array of the above embodiment, the boundary of the microlens array is an irregular thieson polygon boundary obtained by obtaining the target control point through random offset and calculating, the microlens array has a larger filling proportion, and meanwhile, the boundary of each microlens array is a random boundary, so that the moire effect can be effectively eliminated, and the viewing effect of integrated imaging is improved.
The light homogenizing element comprises a micro lens array, wherein the micro lens array is provided with a plurality of micro lenses positioned on an array plane, the projection of the center of each micro lens on the array plane corresponds to a target control point of each micro lens, the projection of the boundary line of the adjacent micro lenses on the array plane is a Thiessen polygon, and the Thiessen polygon is calculated from the target control points;
the target control point is obtained by randomly shifting initial control points on the array plane along a first direction and a second direction of the array plane, the interval of two adjacent initial control points in the first direction is the same, the interval of two adjacent initial control points in the second direction is also the same, and the first direction is perpendicular to the second direction.
In the dodging element of the above embodiment, the boundaries of the microlens arrays are irregular thieson polygon boundaries obtained by obtaining target control points through random offset and calculating, the microlens arrays have a larger filling proportion, and meanwhile, the boundaries of each microlens array are random boundaries, so that the moire effect can be effectively eliminated, and the viewing effect of integrated imaging is improved.
The imaging module of the embodiment of the invention comprises the light homogenizing element of the embodiment.
In the imaging module of the above embodiment, the boundary of the microlens array is an irregular thieson polygon boundary obtained by obtaining the target control point through random offset and calculating, the microlens array has a larger filling proportion, and meanwhile, the boundary of each microlens array is a random boundary, so that the moire effect can be effectively eliminated, and the viewing effect of integrated imaging is improved.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic flow chart of a method for fabricating a microlens array according to an embodiment of the present invention;
FIG. 2 is a process diagram of a method of fabricating a microlens array according to an embodiment of the invention;
FIG. 3 is another schematic flow chart of a method for fabricating a microlens array according to an embodiment of the invention;
FIG. 4 is a schematic diagram of the structure of the initial control points of the microlens array according to the embodiment of the present invention;
FIG. 5 is a schematic flow chart of a method for fabricating a microlens array according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of an imaging module according to an embodiment of the invention;
FIG. 7 is a schematic view of the boundary and target control points of the microlens array of example 1 of the present invention;
FIG. 8 is a schematic imaging diagram of the microlens array of FIG. 7;
FIG. 9 is a schematic view of the boundary and target control points of a microlens array of example 2 of the present invention;
FIG. 10 is a schematic imaging diagram of the microlens array of FIG. 9;
FIG. 11 is a schematic view of the boundary and target control points of a microlens array of example 3 of the present invention;
FIG. 12 is a schematic imaging diagram of the microlens array of FIG. 11;
FIG. 13 is a schematic view of the boundary and target control points of the microlens array of example 4 of the present invention;
FIG. 14 is a schematic imaging view of the microlens array of FIG. 13;
FIG. 15 is a schematic view of the boundary and target control points of the microlens array of example 5 of the present invention;
FIG. 16 is a schematic imaging view of the microlens array of FIG. 15;
FIG. 17 is a schematic view of the boundary and target control points of the microlens array of example 6 of the present invention;
FIG. 18 is a schematic imaging view of the microlens array of FIG. 17;
FIG. 19 is a schematic view of the boundary and target control points of the microlens array of example 7 of the present invention;
FIG. 20 is a schematic imaging view of the microlens array of FIG. 19;
FIG. 21 is a schematic view of the boundary and target control points of a microlens array of example 8 of the present invention;
fig. 22 is a schematic imaging diagram of the microlens array of fig. 21.
Description of the main element symbols:
the micro-lens array 100, the array plane 10, the initial control point 11, the target control point 12, the Thiessen polygon boundary 13, the dodging element 200, the light source 300 and the imaging module 1000.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more than two unless specifically defined otherwise.
In the description of the present invention, it should be noted that the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected unless otherwise explicitly stated or limited. Either mechanically or electrically. Either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The disclosure herein provides many different embodiments or examples for implementing different configurations of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize applications of other processes and/or uses of other materials.
Referring to fig. 1 and 2, a method for fabricating a microlens array 100 according to an embodiment of the invention includes the steps of:
s10: randomly shifting each initial control point 11 on the array plane 10 along a first direction and a second direction of the array plane 10 respectively to obtain a plurality of target control points 12;
the array plane 10 is provided with a plurality of initial control points 11, the intervals of two adjacent initial control points 11 in a first direction are the same, the intervals of two adjacent initial control points 11 in a second direction are also the same, and the first direction is perpendicular to the second direction;
s20: calculating a plurality of Thiessen polygon boundaries 13 according to the plurality of target control points 12;
each target control point 12 corresponds to one Thiessen polygon boundary 13, and at least one edge is shared by two adjacent Thiessen polygon boundaries 13;
s30: the target control point 12 is projected as the center of the microlens 20, and the tesson polygon boundary 13 is projected as the boundary of the microlens to generate a plurality of microlenses 20, thereby obtaining the microlens array 100.
In the method for manufacturing the microlens array 100 according to the embodiment of the present application, the initial control point 11 on the array plane 10 is randomly shifted in the first direction and the second direction to obtain a plurality of target control points 12, then the taisen polygon boundary 13 corresponding to each target control point 12 is calculated according to the target control points 12, then the target control points 12 are projected as the center of the microlens 20, and the taisen polygon boundary 13 is projected as the boundary of the microlens to generate a plurality of microlenses 20, thereby obtaining the microlens array 100. Thus, the target control point 12 is obtained through random offset, the irregular Thiessen polygon boundary 13 is calculated, then the target control point 12 is used as the center of the micro lens 20 for projection, the Thiessen polygon boundary 13 is used as the boundary of the micro lens for projection to obtain the micro lens array 100 through filling, the micro lens array 100 can have a larger filling proportion, meanwhile, each micro lens 20 in the micro lens array 100 can be randomly distributed, the boundary of each micro lens array 100 is a random boundary, the Moire effect can be effectively eliminated, and the viewing effect of integrated imaging is improved.
Specifically, herein, the "array plane 10" may be understood as a reference plane for forming the microlens array 100. The first direction and the second direction may be understood as two different directions on the array plane 10, for example, an XOY coordinate system is established on the array plane 10, the first direction may be understood as an X-axis direction, the second direction may be understood as a Y-axis direction, and the interval between two adjacent initial control points 11 is the same, i.e., the two adjacent initial control points 11 are equally spaced in the first direction and equally spaced in the second direction, i.e., the plurality of initial control points 11 may be arranged on the array substrate in a rectangular array.
Referring to fig. 2, in some embodiments, before step S10, the method for manufacturing the microlens array 100 further includes the steps of:
s40: a plurality of initial control points 11 are generated on the array plane 10 based on a standard array spacing, wherein the standard array comprises a rectangular array.
In this way, a plurality of initial control points 11 may be generated on the array plane 10 at a standard array spacing, so that each initial control point 11 may be randomly offset subsequently.
Specifically, referring to fig. 4, in the illustrated embodiment, the standard array is a rectangular array, that is, the plurality of initial control points 11 are arranged in a rectangular array, and in such an embodiment, the first direction and the second direction are the length direction and the width direction of the rectangular array, respectively. Of course, it will be appreciated that in other embodiments, the standard array may be other types of arrays, such as a circular array, and is not limited thereto.
Referring to fig. 4, in some embodiments, the distance dx between two adjacent initial control points 11 in the first direction is 5um to 100um, and the distance dy between two adjacent initial control points 11 in the second direction is 5um to 100 um.
Thus, controlling dx and dy to be in the range of 5um to 100um can make the microlens array 100 easier to process.
Specifically, in the illustrated embodiment, the initial control points 11 are arranged in a rectangular array, the first direction and the second direction are respectively the length direction and the width direction of the rectangular array, the distance between two adjacent initial control points 11 in the length direction is 5um to 100um, and the distance between two adjacent initial control points 11 in the width direction is also 5um to 100 um. It is understood that in other embodiments, the initial control points 11 may be arranged in other types of arrays, such as circular arrays, and the like, and are not limited herein.
In some embodiments, the separation distance dx of two adjacent initial control points 11 in the first direction and the separation distance dy of two adjacent initial control points 11 in the second direction satisfy the following relation:
9/16≤dx/dy≤16/9。
thus, setting the ratio of dx and dy within the above range can be used to control the aspect ratio to match the viewing angle of the human eye.
Specifically, in the present embodiment, dx/dy may be 5/8, 11/16, 3/4, 13/16, 7/8, 1, 10/9, 11/9, or other values between 9/16 and 16/9, and is not particularly limited herein, and only the above range needs to be satisfied.
Referring to fig. 5, in some embodiments, step S30 includes the steps of:
s31: the microlens array 100 is obtained by projecting the target control point 12 as the center of the microlens 20, projecting the Thiessen polygon boundary 13 as the boundary of the microlens 20, and filling each Thiessen polygon boundary 13 according to the underlying surface type formula to obtain a plurality of microlenses 20.
Thus, after the target control point 12 (i.e. the center of the plurality of microlenses 20) and the Thiessen polygon boundary 13 are determined, which is equivalent to the boundary and the center of the projection of the plurality of microlenses 20 on the substrate, the base surface type formula of the microlenses 20 selected by the dotted line can be combined to uniquely determine the topography of the plurality of microlenses 20, thereby obtaining the microlens array 100.
It is understood that the underlying surface formula can be selected according to actual conditions. For example, the base surface type formula may be an even aspheric formula:
wherein r is2＝x2+y2C is 1/R, R is the curvature radius of the vertex of the curved surface, k is the coefficient of the cone, alpha1、α2、α3、α4、α5Is a high-order term coefficient.
Alternatively, the formula may employ two sets of parameters as follows.
| R | k | α1 | α2 | α3 | α4 | α5 | |
| Parameter set 1 | 0.013888 | -1.16301 | 0 | 5684.618896 | -1.256212237e7 | 6.481978431 |
0 |
| Parameter set 2 | 0.021081 | -0.7528 | 0 | 0 | 0 | 0 | 0 |
In some embodiments, the radius of curvature R of the plurality of microlenses 20 satisfies the following relationship:
5*max(dx，dy)>R>3*max(dx，dy)；
where dx is the distance between two adjacent initial control points 11 in the first direction, and dy is the distance between two adjacent initial control points 11 in the second direction.
As such, designing the radius of curvature R of each microlens 20 within the above range may allow the microlens array 100 to obtain better aberrations and a larger field angle when used for integrated imaging.
In some embodiments, the maximum offset distance dl between the target control point 12 and the initial control point 11 satisfies at least one of the following relationships:
dx/6< dl < dx/1.5; and/or
dy/6<dl<dy/2；
And dx is the spacing distance between two adjacent initial control points in the first direction, and dy is the spacing distance between two adjacent initial control points in the second direction.
Thus, the microlens array 100 formed by setting the shift distance dl of the maximum random shift of the initial control point in the above range can obtain a better degree of randomness, and can effectively eliminate the moire effect.
It should be noted that, in this document, dl refers to the maximum value of the straight-line distance between the target control point 12 and the initial control point 11.
Further, in some embodiments, the maximum offset distance dl between the target control point 12 and the initial control point 11 satisfies at least one of the following relationships:
dx/6< dl < dx/3; and/or
dy/6<dl<dy/3。
As such, setting the offset distance dl of the maximum random offset of the initial control points within the above range can avoid the randomness of the generated thiessen polygon from being too large to be suitable for integrated imaging.
Specifically, in the embodiment of the present application, dl may be a numerical value such as dx/5, dx/4, 3dx/10, 4dx/15, 5dx/16, dy/5, dy/4, 3dy/10, 4dy/15, 5dy/16, or other numerical values between dx/6-dx/3 and/or dy/6-dy/3, and is not limited herein, and only at least one of the above relations needs to be satisfied.
It should be noted that, in the embodiment of the present application, when dl simultaneously satisfies the above-mentioned relations dx/6< dl < dx/3 and dy/6< dl < dy/3, the performance of the microlens array 100 is optimal, i.e. the moire effect can be effectively eliminated, and the central point (i.e. the target control point 12) of the microlens 20 is not too close to the boundary due to too strong randomness, so that the integrated imaging effect is not poor.
The microlens array 100 according to the embodiment of the present invention is manufactured by the method for manufacturing the microlens array 100 according to any of the above-described embodiments.
Referring to fig. 6, a light uniformizing element 200 according to an embodiment of the present invention is provided, wherein the light uniformizing element 200 includes the microlens array 100 according to the above embodiment. The microlens array 100 has a plurality of microlenses 20 located on the array plane 10, the projection of the center of the microlens 20 on the array plane 10 corresponds to the target control point 12 of the microlens 20, the projection of the boundary line of the adjacent microlenses 20 on the array plane 10 is a Thiessen polygon 13, and the Thiessen polygon 13 is calculated from the target control point 12. The target control point 12 is obtained by randomly shifting the initial control points 11 on the array plane 10 along a first direction and a second direction of the array plane 10, wherein the intervals of two adjacent initial control points 11 in the first direction are the same, the intervals of two adjacent initial control points 11 in the second direction are also the same, and the first direction is perpendicular to the second direction.
The imaging module 1000 of the embodiment of the present invention includes the light uniformizing element 200 of the above embodiment. Specifically, the light uniformizing element 200 according to the embodiment of the present invention may be a light uniformizer, the imaging module 1000 may be a TOF camera, the imaging module 1000 includes a light source 300, and the light uniformizing element 200 is disposed on an optical path of the light source 300.
In the microlens array 100, the dodging element 200 and the imaging module 1000 of the above embodiment, the boundary of the microlens array 100 is the irregular taison polygon boundary 13 obtained by obtaining the target control point 12 through random offset and calculating, the microlens array 100 has a larger filling proportion, and meanwhile, the boundary of each microlens array 100 is a random boundary, so that the moire effect can be effectively eliminated, and the viewing effect of integrated imaging is improved.
The present invention will be described in detail below with reference to the following specific embodiments and accompanying drawings.
Specifically, in the following embodiments, the initial control points 11 are arranged in a rectangular array, and the distance dx between two adjacent initial control points 11 in the first direction is 30um, and the distance dy between two adjacent initial control points 11 in the second direction is 40um, where d is the offset distance between the target control point 12 and the initial control point 11, and dl is the maximum offset distance between the target control point 12 and the initial control point 11.
Example 1:
referring to table 1 below, in example 1, the microlens array 100 satisfies the following conditions for each parameter:
TABLE 1
| Example 1 |
| dx＝30um，dy＝40um |
| d＝0um～0.1um |
Fig. 7 is a schematic diagram of the boundary and the target control point of the microlens array 100 in embodiment 1, and fig. 8 is a schematic diagram of imaging of the microlens array in fig. 7.
As can be seen from fig. 7 and 8, in embodiment 1, the randomness of the microlens array 100 is small, and the area is uniformly divided as a whole, but the improvement of the moire effect is not significant.
Example 2:
referring to table 2 below, in example 2, the parameters of the microlens array 100 satisfy the conditions of the following table:
TABLE 2
| Example 2 |
| dx＝30um，dy＝40um |
| d＝0um～5um |
Fig. 9 is a schematic diagram of the boundary and the target control point of the microlens array 100 in embodiment 2, and fig. 10 is a schematic diagram of imaging of the microlens array in fig. 9. As can be seen from fig. 9 and 10, in embodiment 2, the maximum offset distance dl is dx/6, the degree of randomness of the microlens array 100 is better than that of embodiment 1, but is insufficient, the overall division is uniform, the moire effect is improved to some extent, but the moire effect is still present at the center.
Example 3:
referring to table 3 below, in example 3, the parameters of the microlens array 100 satisfy the conditions of the following table:
TABLE 3
| Example 3 |
| dx＝30um，dy＝40um |
| d＝0um～6.67um |
Fig. 11 is a schematic diagram of the boundary and the target control point of the microlens array 100 in example 3, and fig. 12 is a schematic diagram of imaging of the microlens array in fig. 11. As can be seen from fig. 11 and 12, in embodiment 3, the maximum offset distance dl is dy/6, the randomness of the microlens array 100 is better than that of embodiment 2, the overall division is more uniform, and the moire effect is better improved at the center than that of embodiment 2.
Example 4:
referring to table 4 below, in example 4, the parameters of the microlens array 100 satisfy the conditions of the following table:
TABLE 4
| Example 4 |
| dx＝30um，dy＝40um |
| d＝0um～8um |
Fig. 13 is a schematic diagram of the boundary and the target control point of the microlens array 100 in example 4, and fig. 14 is a schematic diagram of imaging of the microlens array in fig. 13. As can be seen from fig. 13 and 14, in example 4, the maximum offset distance dl < dx/3 and dl < dy/3, the degree of randomness of the microlens array 100 is appropriate, the entire division is uniform, the moire effect can be suppressed well, and the expression effect is good.
Example 5:
referring to table 5 below, in example 5, the parameters of the microlens array 100 satisfy the conditions of the following table:
TABLE 5
| Example 5 |
| dx＝30um，dy＝40um |
| d＝0um～10um |
Fig. 15 is a schematic view of the boundary and the target control point of the microlens array 100 in example 5, and fig. 16 is a schematic view of imaging of the microlens array in fig. 15. As is clear from fig. 15 and 16, in example 5, the maximum offset distance dl is dx/3 and dl < dy/3, the degree of randomness of the microlens array 100 is appropriate, the entire zonal difference is not too large, the moire effect can be suppressed well, and the expression effect is excellent.
Example 6:
referring to table 6 below, in example 6, the microlens array 100 satisfies the following conditions for each parameter:
TABLE 6
| Example 3 |
| dx＝30um，dy＝40um |
| d＝0um～13.33um |
Fig. 17 is a schematic view of the boundary and the target control point of the microlens array 100 in example 5, and fig. 18 is a schematic view of imaging of the microlens array in fig. 17. As can be seen from fig. 17 and 18, in example 6, the maximum offset distance dl is dy/3 and dx/3< dl, the degree of randomness of the microlens array 100 is sufficient, the moire effect can be suppressed well, but the overall zonal uniformity is slightly poor, the performance is better, but is inferior to that of example 5.
Example 7:
referring to table 7 below, in example 7, the parameters of the microlens array 100 satisfy the conditions of the following table:
TABLE 7
| Example 3 |
| dx＝30um，dy＝40um |
| d＝0um～15um |
Fig. 19 is a schematic view of the boundary and the target control point of the microlens array 100 in example 7, and fig. 20 is a schematic view of imaging of the microlens array in fig. 19. As can be seen from FIGS. 19 and 20, in example 7, dy/3< dl and dx/3< dl, the randomness of the microlens array 100 is sufficient, the Moire effect is well suppressed, but the partial zonal difference is too large, and the lens center point is too close to the lens boundary for integrated imaging.
Example 8:
referring to table 4 below, in example 8, the parameters of the microlens array 100 satisfy the conditions of the following table:
TABLE 8
| Example 8 |
| dx＝30um，dy＝40um |
| d＝0um～20um |
Fig. 20 is a schematic view of the boundary and the target control point of the microlens array 100 in example 7, and fig. 21 is a schematic view of imaging of the microlens array in fig. 20. As can be seen from fig. 20 and 21, in embodiment 8, dl ═ dx/2, the degree of randomness of the microlens array 100 is sufficient, the moire effect is suppressed well, but the partial zoning difference is too large, and the lens center point is too close to the lens boundary for integrated imaging.
As can be seen from the above examples 1 to 8, in the microlens array 100 according to the embodiment of the present application, the moire effect suppression effect is not good at dl < dx/6 or dl < dy/6. When dl satisfies dx/3< dl or dy/3< dl, although the suppression effect of the moire effect is excellent, the partial divisional difference is too large, and the lens center point is too close to the lens boundary for integrated imaging. When dl satisfies dx/6< dl < dx/1.5 and/or dy/6< dl < dy/2, the randomness is insufficient, but the moire effect suppression effect is achieved. While dx/6< dl < dx/3 and dy/6< dl < dy/3 are satisfied, the performance of the microlens array 100 is excellent, i.e., the moire effect can be well suppressed, and the microlens array is also suitable for integrated imaging.
In the description of the specification, references to the terms "one embodiment", "some embodiments", "certain embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples", etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A method of fabricating a microlens array, comprising:
randomly shifting each initial control point on an array plane along a first direction and a second direction of the array plane respectively to obtain a plurality of target control points, wherein the array plane is provided with a plurality of initial control points, the interval between every two adjacent initial control points is the same in the first direction, the interval is also the same in the second direction, and the first direction is perpendicular to the second direction;
calculating a plurality of Thiessen polygon boundaries according to the target control points, wherein each target control point corresponds to one Thiessen polygon boundary, and at least one edge is shared by two adjacent Thiessen polygon boundaries;
projecting the target control point as the center of a microlens, and projecting the Thiessen polygon boundary as the boundary of the microlens to generate a plurality of microlenses, thereby obtaining the microlens array.
2. The method of claim 1, wherein before randomly offsetting each initial control point in the array plane along the first and second directions to obtain a plurality of target control points, the method further comprises:
generating a plurality of the initial control points on the array plane based on a standard array spacing, wherein the standard array comprises a rectangular array.
3. The method of claim 1, wherein the curvature radius R of the microlenses satisfies the following relationship:
5*max(dx，dy)>R>3*max(dx，dy)；
and dx is the spacing distance between two adjacent initial control points in the first direction, and dy is the spacing distance between two adjacent initial control points in the second direction.
4. The method of claim 1, wherein the distance dx between two adjacent initial control points in the first direction is 5um to 100um, and the distance dy between two adjacent initial control points in the second direction is 5um to 100 um.
5. The method of claim 1, wherein a distance dx separating two adjacent initial control points in the first direction and a distance dy separating two adjacent initial control points in the second direction satisfy the following relationship:
9/16≤dx/dy≤16/9。
6. the method of manufacturing a microlens array as set forth in claim 1, wherein a maximum offset distance dl between the target control point and the initial control point satisfies at least one of the following relations:
dx/6<dl<dx/1.5；
dy/6<dl<dy/2；
and dx is the spacing distance between two adjacent initial control points in the first direction, and dy is the spacing distance between two adjacent initial control points in the second direction.
7. The method of manufacturing a microlens array as set forth in claim 6, wherein a maximum offset distance dl between the target control point and the initial control point satisfies at least one of the following relations:
dx/6<dl<dx/3；
dy/6<dl<dy/3。
8. a microlens array, wherein the microlens array is produced by the method for producing a microlens array according to any one of claims 1 to 7.
9. A light homogenizing element, characterized in that the light homogenizing element comprises a micro lens array, the micro lens array is provided with a plurality of micro lenses positioned on an array plane, the projection of the center of each micro lens on the array plane corresponds to a target control point of each micro lens, the projection of the boundary line of the adjacent micro lenses on the array plane is a Thiessen polygon, and the Thiessen polygon is calculated from the target control points;
the target control point is obtained by randomly shifting initial control points on the array plane along a first direction and a second direction of the array plane, the interval of two adjacent initial control points in the first direction is the same, the interval of two adjacent initial control points in the second direction is also the same, and the first direction is perpendicular to the second direction.
10. An imaging module comprising the light unifying element of claim 9.
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