CN112658815A - Processing method for 3D printing silicon carbide reflector - Google Patents
Processing method for 3D printing silicon carbide reflector Download PDFInfo
- Publication number
- CN112658815A CN112658815A CN202011568268.7A CN202011568268A CN112658815A CN 112658815 A CN112658815 A CN 112658815A CN 202011568268 A CN202011568268 A CN 202011568268A CN 112658815 A CN112658815 A CN 112658815A
- Authority
- CN
- China
- Prior art keywords
- silicon carbide
- polishing
- grinding
- processing
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The invention discloses a processing method of a 3D printed silicon carbide reflector, which comprises the following steps: grinding the 3D printed silicon carbide workpiece to obtain a smooth workpiece surface, then grinding and rough polishing to obtain a reflecting mirror surface meeting the requirements of an initial surface shape and surface quality, and then iteratively performing magnetorheological shape modification and shape-preserving fairing on the reflecting mirror surface until the index requirements are met. The method provided by the invention can solve the problems of uneven multiphase tissue removal and the like in the 3D printing silicon carbide reflector processing process, overcomes the defects of surface shape and surface quality of the existing silicon carbide reflector polishing technology, realizes the ultra-precision processing of the 3D printing silicon carbide reflector, and has the advantages of high precision of the processed surface shape and good surface quality.
Description
Technical Field
The invention relates to a processing technology of an optical element, in particular to a processing method of a 3D printed silicon carbide reflector.
Background
The rapid development of space astronomical optics and satellite remote sensing technologies puts more and more strict requirements on indexes such as the working waveband, imaging resolution, thermal stability, system weight and the like of an optical system. The selection of suitable mirror materials is of great significance for meeting these criteria, and considering the manufacturing, emission, operating costs and working environment of the space optical system, the selection of the mirror materials for space must consider the following aspects: 1) isotropy and stable size; 2) the mirror body can be polished and can be plated with a high-reflectivity film layer, and good polishability is the basic requirement of the reflector material, and particularly when the mirror body is used for visible light investigation, the good polishability is an important index for determining the performance of the reflector; 3) the shape accuracy of the reflector is kept unchanged under the condition of space radiation, the reflector can be continuously radiated by high-energy cosmic rays under the space working environment, the reflector is kept stable in shape and physical properties after radiation, and generally, the radiation stability of a material with a low atomic coefficient is better; 4) the material with large specific stiffness and small thermal deformation coefficient is selected, the specific stiffness is large, the diameter-thickness ratio of the reflector can be increased, and therefore the mass of the reflector and the mass of the frame can be reduced. The materials of the existing reflector mainly comprise metallic aluminum, metallic beryllium, monocrystalline silicon, various optical glasses, composite materials, silicon carbide and the like. As can be seen from fig. 1, the specific stiffness of beryllium and silicon carbide is far better than that of other materials, beryllium is toxic during processing, a series of protective measures are required to prevent the toxicity from affecting human health during processing, the manufacturing cost is increased, and the thermal stability of silicon carbide material is far better than that of beryllium. Silicon carbide optical material is therefore the best material for making a spatial mirror.
Silicon carbide is difficult to machine due to its brittle texture, high hardness, etc., especially complex structures (such as porous structures designed for light weight). The traditional method for preparing silicon carbide has the following defects: the preparation precision is low, and the preparation of the product with complex shape, especially the product such as the reflector, needs precise processing mould and matching processing cutter, which results in high preparation cost. The 3D printing technology can overcome the difficulties, is suitable for preparing the silicon carbide reflector with any complex shape, improves the lightweight rate of the reflector, shortens the processing period, reduces the processing cost and can realize near net shape.
The 3D printed silicon carbide optical material has a plurality of components, each phase material is unevenly distributed, as shown in FIG. 2, the difference of the physical properties of the Si and SiC with the highest content is large, the removal rate of Si is high and SiC is slow in the polishing process of the traditional polishing method, so that a micro-step is formed at the boundary of the two phase components, as shown in FIG. 3, the optical surface quality obtained after the silicon carbide surface is directly polished is not high due to the unevenness. Impurity components such as printing binders and the like also exist in the 3D printed silicon carbide optical material, the porosity is high, the compactness of the material is influenced, and as shown in FIG. 4, the existence of impurities and pores can generate adverse effects on the improvement of the surface quality of the mirror surface.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the defects of the prior art, and provide a processing method of a 3D printed silicon carbide reflector, which is used for uniformly removing multiphase components in a 3D printed silicon carbide material, realizing the ultra-precision processing of the 3D printed silicon carbide reflector, and having high precision of the processed surface shape and good quality of the surface.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
a processing method for 3D printing of a silicon carbide reflector comprises the following steps:
1) grinding a 3D printed silicon carbide workpiece to be processed to obtain a flat workpiece surface;
2) grinding and roughly polishing the ground 3D printed silicon carbide workpiece by using a small grinding head to obtain a 3D printed silicon carbide reflector surface meeting the requirements of an initial surface shape and surface quality;
3) performing magnetorheological modification on the surface of the 3D printed silicon carbide reflector;
4) performing conformal fairing on the surface of the 3D printed silicon carbide reflector;
5) and detecting whether the surface of the 3D printed silicon carbide reflector meets the index requirement, if not, skipping to execute the step 3), otherwise, finishing the processing and exiting.
In the above processing method for 3D printing of the silicon carbide reflector, preferably, step 2) includes:
2.1) carrying out small grinding head grinding processing on the ground workpiece;
2.2) carrying out rough polishing processing on the workpiece subjected to grinding processing by using a small grinding head;
2.3) detecting the processed workpiece by using a wave surface interferometer and a white light interferometer, and executing the step 3) if the surface shape error and the surface quality meet the requirement of the step 3); otherwise, the jump executes step 2.1).
In the processing method of the 3D printed silicon carbide reflector, preferably, in the step 2.1), when the small grinding head is used for grinding, the adopted grinding mode is linear path uniform scanning grinding; the adopted grinding disc is a cast iron grinding disc; the rotation speed of the machine tool is revolution at 75-120 rpm, rotation at 150-240 rpm, and air pressure at 0.1-0.2 MPa, and the polishing solution used in grinding is diamond polishing solution.
In the processing method of the 3D printed silicon carbide reflector, preferably, in step 2.1), the number of grinding times is 2; the abrasive grain size used in the first grinding was W14, and the abrasive grain size used in the second grinding was W7.
Preferably, in the step 2.2), when the small grinding head is used for rough polishing, the polishing mode is linear path uniform scanning grinding polishing; the adopted polishing disk is a polyurethane disk; the rotation speed of the machine tool is revolution 60-90 rpm, rotation 120-180 rpm and air pressure 0.08-0.12 MPa; the polishing solution used in polishing is diamond polishing solution.
In the method for processing the 3D printed silicon carbide reflector, preferably, in step 2.2), the number of times of polishing is 2, the granularity of the abrasive used in the first grinding is W5, and the granularity of the abrasive used in the second grinding is W1.
In the above processing method for 3D printing of the silicon carbide reflector, preferably, the step 3) includes the following steps:
3.1) acquiring a magnetorheological processing removal function of the 3D printed silicon carbide workpiece to be processed, calculating processing residence time according to the initial surface shape and the removal function, selecting a scanning path, generating a numerical control processing code, and performing magnetorheological modification on the workpiece to be processed;
3.2) performing surface shape detection on the workpiece subjected to the magnetorheological shape modification by using a wave surface interferometer, and executing the step 4) if the surface shape error meets the requirement; otherwise, step 3.1) is repeated.
Preferably, in the step 3.1), when magnetorheological modification is adopted, the magnetorheological fluid abrasive material used in the processing method for 3D printing the silicon carbide reflector has a particle size of W1; the rotating speed of the polishing wheel is 180-260 rpm; the flow rate of the magnetorheological fluid is 60-120L/h.
In the above processing method for 3D printing of the silicon carbide reflector, step 4) preferably includes:
4.1) selecting the size and the shape of the fairing disc to ensure that the polishing disc is attached to the surface to be processed;
4.2) selecting reasonable polishing parameters and motion tracks to realize the surface fairing of the 3D printed silicon carbide reflector;
4.3) cleaning the smooth workpiece.
In the processing method of the 3D printed silicon carbide reflector, preferably, in step 4.2), conformal light smoothing is performed, and the polishing mode adopted is linear path uniform scanning polishing; the adopted polishing disc is an asphalt disc; the rotation speed of the machine tool is revolution 40-60 rpm, rotation 80-120 rpm, and air pressure 0.02-0.04 MPa; the abrasive particle size W of the polishing solution is 0.1, and the smoothing times are 2 times
Compared with the prior art, the invention has the advantages that:
the processing method of the 3D printed silicon carbide reflector is researched and explored aiming at the optical polishing mechanism and process of the 3D printed silicon carbide reflector. The silicon carbide is difficult to machine and form due to the fact that the silicon carbide is crisp in texture and high in hardness, particularly complex structures are difficult to machine and form, the difficulties can be overcome by adopting a 3D printing technology, the silicon carbide reflector is suitable for preparing silicon carbide reflectors with any complex shapes, the light weight rate of the reflector is improved, the processing period is shortened, the processing cost is reduced, and near-net forming can be achieved. However, the 3D printed silicon carbide optical material has numerous components, the distribution of each phase material is not uniform, the difference of the physical properties of the two components of Si and SiC with the highest content is large, the removal rate of Si is high in the polishing process, SiC is slow, so that a micro-step is formed at the boundary of the two components, the quality of the optical surface obtained after the silicon carbide surface is directly polished is not very high due to the unevenness, and the problems of impurity components such as printing adhesive and the like, high porosity, poor material density and the like exist. According to the processing method of the 3D printed silicon carbide reflector, the defects of a traditional polishing method in aspects of improving the surface shape of a mirror surface, improving the surface quality and the like can be overcome by a combined processing technology comprising grinding, small grinding head grinding and rough polishing, magnetorheological shape correction and shape keeping fairing and optimizing technological parameters, the deterministic shape correction of the 3D printed silicon carbide reflector is realized, and a high-quality polished surface is obtained.
Drawings
FIG. 1 is a graph comparing the specific stiffness and thermal stability of a typical mirror material of an embodiment of the present invention.
FIG. 2 is a micro-topography showing the non-uniform distribution of the materials of the phases after grinding of a sample piece in an embodiment of the invention.
FIG. 3 is a micro-step formed at the interface of two phase components when silicon carbide is processed using conventional polishing methods.
FIG. 4 is a microscopic topography of the machined sample containing impurities and porosity.
FIG. 5 is a schematic process flow diagram of the process in an example of the invention.
Fig. 6 is a schematic view of the dual rotor CCOS machine tool employed in the embodiment of the present invention.
FIG. 7 shows the results of the profile shape obtained in step 2) in the example of the present invention.
FIG. 8 shows the surface quality results obtained in step 2) of the example of the invention.
FIG. 9 is a schematic view of a magnetorheological finishing in an embodiment of the invention.
FIG. 10 shows the results of the profile shape obtained in step 4) in the examples of the present invention.
FIG. 11 shows the surface quality results obtained in step 4) of the examples of the present invention.
Figure 12 is a finished 3D printed silicon carbide mirror representation of an example of the present invention.
Detailed Description
The invention will be described in further detail below with reference to the drawings and specific examples.
The workpiece to be processed in this embodiment is a 3D printed silicon carbide plane mirror with a diameter of 100mm, and the present invention is further described below with reference to the drawings of the specification and specific preferred embodiments, and the combined polishing method adopted by the present invention is further explained.
As shown in fig. 5, the steps of the 3D printing silicon carbide reflector combination polishing method of the present embodiment include:
1) carrying out plane grinding on the silicon carbide blank workpiece after printing, and removing concave pit and convex parts on the surface of the workpiece to obtain a flat workpiece surface;
2) grinding and rough polishing a workpiece to be processed by a small grinding head to obtain a reflector surface meeting the requirements of initial surface shape and surface quality;
3) performing magnetorheological modification on the surface of a 3D printed silicon carbide reflector of a workpiece to be processed;
4) performing conformal fairing on the surface of a 3D printed silicon carbide reflector of a workpiece to be processed;
5) and detecting whether the surface of the 3D printing silicon carbide reflector of the workpiece to be processed meets the index requirement, if not, skipping to execute the step 3), otherwise, finishing the processing and exiting.
In this embodiment, the grinding and rough polishing of the small grinding head, conformal fairing and magnetorheological are based on a Computer Controlled Optical surface forming technology (CCOS), and the basic idea is to quantitatively remove the surface shape error of an Optical part under the guidance of quantitative detection data, so that the whole processing process is developed towards the direction of certainty. The theoretical basis for CCOS processing is the Preston equation:
ΔH(x,y)＝K·P(x,y)·V(x,y) (1)
in the above formula, Δ H (x, y) is the material removal amount per unit time at the (x, y) position, K is Preston constant, which is related to the workpiece material, the type of polishing disk, the abrasive material, and the temperature of the working area, V (x, y) is the relative speed of the optical part and the polishing disk at the (x, y) position, and P (x, y) is the positive pressure of the polishing disk at the (x, y) position on the optical part. When the pressure, relative velocity and other process parameters are held constant, the material removal H (x, y) of the optical part is equal to the convolution of the removal function R (x, y) formed by the polishing tool with the dwell time T (x, y) along the machining trajectory:
H(x,y)＝∫α∫βR(x-α,y-β)·T(α,β)dαdβ (2)
for brevity;
H(x,y)＝R(x,y)**T(x,y) (3)
r (x, y) is a removal function formed by the polishing tool, and in formula (3), x represents a two-dimensional convolution operation. With the removal function R (x, y) known, the dwell time T (x, y) of the polishing tool in each region is controlled according to the magnitude of the material removal H (x, y), and a certain amount of polishing can be achieved. The removal function is generally required to have the characteristic of linear time invariance in the CCOS process: the method has the advantages that time and space invariance is realized, and in the CCOS process, the removal function does not change along with the processing position and the processing time, namely the removal function has stability. ② has time linearity, in the course of CCOS process the material removal quantity and the residence time of the removal function are in linear relationship.
In this embodiment, the CCOS machine tool used for the small grinding head grinding and rough polishing in step 2) and the conformal fairing in step 4 has a double-rotor structure, as shown in fig. 6, ω is ω1Is revolution speed, ω2Is the spin speed. The CCOS process is very complex in processing process, and not only has the mechanical cutting function of the polishing disc and the surface of a workpiece; the chemical action among the polishing disk, the polishing solution and the optical part is also realized; there is also a phenomenon of flow of molecules on the surface of the optical part due to frictional heat, and the processing mechanism is very complicated.
In the step 2), the detailed steps of grinding by the small grinding head and rough polishing processing comprise:
2.1) grinding and processing the workpiece to be processed twice by a small grinding head according to specified parameters, wherein the adopted grinding mode is a linear path uniform scanning grinding, and the time for each time is about 30 min;
2.2) carrying out rough polishing processing twice on the workpiece ground by the small grinding head according to the specified parameters, wherein the adopted polishing mode is a linear path uniform scanning grinding polishing, and the time for each time is about 40 min;
2.3) detecting the processed workpiece by using a wave surface interferometer and a white light interferometer, and executing the step 3) if the surface shape error and the surface quality meet the requirements of the step 3); otherwise, the jump executes step 2.1).
The requirement for entering the step 3) from the step 2) is as follows: surface shape error PV/RMS is less than 10, and surface quality Ra is less than 20 nm.
The processing parameters used in step 2) are shown in table 1 below.
The result of measuring the surface shape of the reflecting mirror by using a wavefront interferometer after the processing in the step 2) is shown in fig. 7, and the result of measuring the surface quality by using a white light interferometer is shown in fig. 8.
In this embodiment, the magnetorheological polishing in step 3) is as shown in fig. 9, in the magnetorheological polishing process, the flexible polishing mold formed by the chain-shaped carbonyl iron powder has a strong holding capacity on the abrasive particles, the material removal is mainly two-body plastic removal, and the proportion of the abrasive particles formed by effective material removal is high. In the magnetic rheological polishing process, the positive pressure exerted on the surface of the optical element by the abrasive particles is generated by gravity, magnetic suspension and hydrodynamic pressure FpComposition, wherein gravity and magnetic levitation are negligible. For a typical magnetorheological polishing process, the positive pressure of a single abrasive particle on the surface of the optical element is about 10-7N～10-8N, much smaller than the positive pressure of the traditional polishing process, the positive pressure is no longer the dominant factor for material removal, and the shear force is the magnetorheological polishingThe dominant factor in material removal.
The detailed magnetorheological polishing steps of the step 3) comprise:
3.1) acquiring a magnetorheological processing removal function of the 3D printed silicon carbide material to be processed, calculating processing residence time according to the removal function and the initial surface shape of the reflector obtained in the step 2), selecting a linear scanning path, generating a numerical control processing code, and performing magnetorheological shape modification on a workpiece to be processed for about 50 min;
3.2) performing surface shape detection on the workpiece subjected to the magnetorheological shape modification by using a wave surface interferometer, and executing the step 4) if the surface shape error meets the requirement; otherwise, repeatedly executing the step 3).
The magnetorheological polishing process parameters in step 3 are shown in table 2.
In this embodiment, the detailed steps of step 4) include:
4.1) selecting the size and the shape of a fairing disc to ensure that the polishing disc is attached to a surface to be processed, and selecting a planar polishing disc with the diameter of 20mm as the reflector to be processed is a plane, wherein the polishing disc is made of #64 asphalt;
4.2) selecting reasonable polishing parameters and motion tracks to realize surface smoothing, wherein the adopted polishing mode is a linear path uniform scanning polishing mode, and the iterative smoothing is carried out twice, and each time is about 45 min;
4.3) placing the smooth workpiece in a clean room environment, performing ultrasonic cleaning by using deionized water, wiping the workpiece by using alcohol cotton after cleaning, and performing surface shape error detection on the clean workpiece under a wave surface interferometer, wherein the result is shown in figure 10, and the result is shown in figure 11. The resulting finished workpiece is shown in fig. 12.
In this embodiment, the parameters of the conformal smoothing process in step 4 are shown in table 3.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.
Claims (10)
1. A processing method for 3D printing of a silicon carbide reflector is characterized by comprising the following steps:
1) grinding a 3D printed silicon carbide workpiece to be processed to obtain a flat workpiece surface;
2) grinding and roughly polishing the ground 3D printed silicon carbide workpiece by using a small grinding head to obtain a 3D printed silicon carbide reflector surface meeting the requirements of an initial surface shape and surface quality;
3) performing magnetorheological modification on the surface of the 3D printed silicon carbide reflector;
4) performing conformal fairing on the surface of the 3D printed silicon carbide reflector;
5) and detecting whether the surface of the 3D printed silicon carbide reflector meets the index requirement, if not, skipping to execute the step 3), otherwise, finishing the processing and exiting.
2. The method of processing a 3D printed silicon carbide mirror as claimed in claim 1, wherein step 2) comprises:
2.1) carrying out small grinding head grinding processing on the ground workpiece;
2.2) carrying out rough polishing processing on the workpiece subjected to grinding processing by using a small grinding head;
2.3) detecting the processed workpiece by using a wave surface interferometer and a white light interferometer, and executing the step 3) if the surface shape error and the surface quality meet the requirement of the step 3); otherwise, the jump executes step 2.1).
3. The processing method of the 3D printed silicon carbide reflector as claimed in claim 2, wherein in the step 2.1), when the small grinding head is adopted for grinding, the adopted grinding mode is linear path uniform scanning grinding; the adopted grinding disc is a cast iron grinding disc; the rotation speed of the machine tool is revolution at 75-120 rpm, rotation at 150-240 rpm, and air pressure at 0.1-0.2 MPa, and the polishing solution used in grinding is diamond polishing solution.
4. The method for 3D printing of silicon carbide mirrors as claimed in claim 2, wherein in step 2.1), the number of grinding is 2; the abrasive grain size used in the first grinding was W14, and the abrasive grain size used in the second grinding was W7.
5. The processing method of the 3D printed silicon carbide reflector according to claim 2, wherein in the step 2.2), when the small grinding head is adopted for rough polishing, the adopted polishing mode is linear path uniform scanning grinding polishing; the adopted polishing disk is a polyurethane disk; the rotation speed of the machine tool is revolution 60-90 rpm, rotation 120-180 rpm and air pressure 0.08-0.12 MPa; the polishing solution used in polishing is diamond polishing solution.
6. The method for 3D printing silicon carbide mirror according to claim 2, wherein in step 2.2), the number of polishing is 2, the granularity of the abrasive material used in the first grinding is W5, and the granularity of the abrasive material used in the second grinding is W1.
7. The method for processing the 3D printed silicon carbide reflector according to any one of claims 1 to 6, wherein the step 3) comprises the following steps:
3.1) acquiring a magnetorheological processing removal function of the 3D printed silicon carbide workpiece to be processed, calculating processing residence time according to the initial surface shape and the removal function, selecting a scanning path, generating a numerical control processing code, and performing magnetorheological shape modification on the workpiece to be processed;
3.2) performing surface shape detection on the workpiece subjected to the magnetorheological shape modification by using a wave surface interferometer, and executing the step 4) if the surface shape error meets the requirement; otherwise, step 3.1) is repeated.
8. The method for processing a 3D printed silicon carbide mirror according to claim 7, wherein in step 3.1), when the magnetorheological modification is adopted, the magnetorheological fluid has a magnetorheological fluid abrasive grain size of W1; the rotating speed of the polishing wheel is 180-260 rpm; the liquid flow of the magnetorheological fluid is 60-120L/h.
9. The method for 3D printing of silicon carbide mirrors as claimed in any one of claims 1 to 6, wherein step 4) comprises:
4.1) selecting the size and the shape of the fairing disc to ensure that the polishing disc is attached to the surface to be processed;
4.2) selecting reasonable polishing parameters and motion tracks to realize the surface fairing of the 3D printed silicon carbide reflector;
4.3) cleaning the smooth workpiece.
10. The method for processing the 3D printed silicon carbide reflector according to claim 9, wherein in the step 4.2), conformal smooth polishing is performed in a linear path uniform scanning polishing mode; the adopted polishing disc is an asphalt disc; the rotation speed of the machine tool is revolution 40-60 rpm, rotation 80-120 rpm, and air pressure 0.02-0.04 MPa; the abrasive particle size W of the polishing solution is 0.1; the number of smoothing times was 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011568268.7A CN112658815B (en) | 2020-12-25 | 2020-12-25 | Processing method for 3D printing silicon carbide reflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011568268.7A CN112658815B (en) | 2020-12-25 | 2020-12-25 | Processing method for 3D printing silicon carbide reflector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112658815A true CN112658815A (en) | 2021-04-16 |
| CN112658815B CN112658815B (en) | 2023-03-07 |
Family
ID=75409677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011568268.7A Active CN112658815B (en) | 2020-12-25 | 2020-12-25 | Processing method for 3D printing silicon carbide reflector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112658815B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113245931A (en) * | 2021-05-25 | 2021-08-13 | 中国人民解放军国防科技大学 | Cuboid optical material guide rail combination processing method and system |
| CN114043321A (en) * | 2021-11-30 | 2022-02-15 | 北京创思工贸有限公司 | Deformable mirror processing method |
| CN114952437A (en) * | 2022-05-27 | 2022-08-30 | 中国人民解放军国防科技大学 | Processing method of NiP modified layer |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5616066A (en) * | 1995-10-16 | 1997-04-01 | The University Of Rochester | Magnetorheological finishing of edges of optical elements |
| US20050009447A1 (en) * | 2001-09-13 | 2005-01-13 | Hedser Van Brug | Method and apparatus for polishing a workpiece surface |
| CN101456680A (en) * | 2009-01-06 | 2009-06-17 | 中国人民解放军国防科学技术大学 | Processing method for correcting low steepness optical mirror surface error |
| CN102837228A (en) * | 2012-09-13 | 2012-12-26 | 中国人民解放军国防科学技术大学 | Short flow processing method of aspheric optical element |
| US20130011773A1 (en) * | 2010-03-16 | 2013-01-10 | Asahi Glass Company, Limited | Optical member base material for euv lithography, and method for producing same |
| CN205237716U (en) * | 2015-11-18 | 2016-05-18 | 广东工业大学 | Dynamic magnetic field that magnetic current becomes flexible polishing pad is from sharp burnishing device |
| CN107953151A (en) * | 2017-12-04 | 2018-04-24 | 中国人民解放军国防科技大学 | Combined polishing method of aluminum alloy reflector |
| CN108468029A (en) * | 2018-02-12 | 2018-08-31 | 中国科学院国家天文台南京天文光学技术研究所 | It is modified the magnetron sputtering scan method promoted with face shape for silicon carbide optical mirror plane |
| CN111590395A (en) * | 2020-04-29 | 2020-08-28 | 中国科学院上海光学精密机械研究所 | Processing method of ultrathin optical element |
-
2020
- 2020-12-25 CN CN202011568268.7A patent/CN112658815B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5616066A (en) * | 1995-10-16 | 1997-04-01 | The University Of Rochester | Magnetorheological finishing of edges of optical elements |
| US20050009447A1 (en) * | 2001-09-13 | 2005-01-13 | Hedser Van Brug | Method and apparatus for polishing a workpiece surface |
| CN101456680A (en) * | 2009-01-06 | 2009-06-17 | 中国人民解放军国防科学技术大学 | Processing method for correcting low steepness optical mirror surface error |
| US20130011773A1 (en) * | 2010-03-16 | 2013-01-10 | Asahi Glass Company, Limited | Optical member base material for euv lithography, and method for producing same |
| CN102837228A (en) * | 2012-09-13 | 2012-12-26 | 中国人民解放军国防科学技术大学 | Short flow processing method of aspheric optical element |
| CN205237716U (en) * | 2015-11-18 | 2016-05-18 | 广东工业大学 | Dynamic magnetic field that magnetic current becomes flexible polishing pad is from sharp burnishing device |
| CN107953151A (en) * | 2017-12-04 | 2018-04-24 | 中国人民解放军国防科技大学 | Combined polishing method of aluminum alloy reflector |
| CN108468029A (en) * | 2018-02-12 | 2018-08-31 | 中国科学院国家天文台南京天文光学技术研究所 | It is modified the magnetron sputtering scan method promoted with face shape for silicon carbide optical mirror plane |
| CN111590395A (en) * | 2020-04-29 | 2020-08-28 | 中国科学院上海光学精密机械研究所 | Processing method of ultrathin optical element |
Non-Patent Citations (1)
| Title |
|---|
| 康念辉等: "化学气相沉积碳化硅平面反射镜的高精度超光滑加工", 《中国机械工程》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113245931A (en) * | 2021-05-25 | 2021-08-13 | 中国人民解放军国防科技大学 | Cuboid optical material guide rail combination processing method and system |
| CN114043321A (en) * | 2021-11-30 | 2022-02-15 | 北京创思工贸有限公司 | Deformable mirror processing method |
| CN114043321B (en) * | 2021-11-30 | 2023-03-03 | 北京创思工贸有限公司 | Deformable mirror processing method |
| CN114952437A (en) * | 2022-05-27 | 2022-08-30 | 中国人民解放军国防科技大学 | Processing method of NiP modified layer |
| CN114952437B (en) * | 2022-05-27 | 2023-08-18 | 中国人民解放军国防科技大学 | Processing method of NiP modified layer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112658815B (en) | 2023-03-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112658815B (en) | Processing method for 3D printing silicon carbide reflector | |
| Zhang et al. | Manufacturing technologies toward extreme precision | |
| Beaucamp et al. | Brittle-ductile transition in shape adaptive grinding (SAG) of SiC aspheric optics | |
| Zhong | Ductile or partial ductile mode machining of brittle materials | |
| Brinksmeier et al. | Ultra-precision grinding | |
| Ghosh et al. | Review of several precision finishing processes for optics manufacturing | |
| KR19990064351A (en) | Crystalline magnetic flow finishing method and apparatus | |
| CN100491067C (en) | High-precision mechanical sharpening method for diamond cutter | |
| Sidpara | Magnetorheological finishing: a perfect solution to nanofinishing requirements | |
| Zhang et al. | High-performance grinding of a 2-m scale silicon carbide mirror blank for the space-based telescope | |
| EP2707763B1 (en) | Magnesium mirrors and methods of manufacture thereof | |
| Ghosh et al. | Fabrication of optical components by ultraprecision finishing processes | |
| Ban et al. | Improvement and application of pad conditioning accuracy in chemical mechanical polishing | |
| Liao et al. | Deterministic measurement and correction of the pad shape in full-aperture polishing processes | |
| Ebizuka et al. | Development of the SiC ultralight mirror for large space telescope and for extremely huge ground-based telescope | |
| Johnson | SiC coatings on RB SiC mirrors for ultrasmooth surfaces | |
| Xue et al. | Precision polishing of the mandrel for x-ray grazing incidence mirrors in the Einstein probe | |
| Zuo et al. | Precision polishing of the mandrel for X-ray grazing incidence mirrors | |
| Zhang et al. | Corrective polishing of freeform optical surfaces in an off-axis three-mirror imaging system | |
| Xu et al. | Ultra-precision manufacturing of silicon carbide mirrors with additive manufacturing | |
| Liu et al. | Path planning and parameter optimization of uniform removal in active feed polishing | |
| Li et al. | A Global Correction Process for Flat Optics With Patterned Polishing Pad | |
| US2968134A (en) | Manufacture of precision cones | |
| CN117655816A (en) | Deterministic grinding and polishing shape-modifying method and system for reflecting surface of carbon fiber antenna | |
| CN113829176B (en) | Grinding flat plate for grinding and polishing beryllium mirror body and grinding and polishing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |