CN112630995A - Method for converting polarization state of optical signal by silicon-based polarization rotator - Google Patents

Method for converting polarization state of optical signal by silicon-based polarization rotator Download PDF

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CN112630995A
CN112630995A CN202110029699.4A CN202110029699A CN112630995A CN 112630995 A CN112630995 A CN 112630995A CN 202110029699 A CN202110029699 A CN 202110029699A CN 112630995 A CN112630995 A CN 112630995A
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mode
optical signal
converter
silicon
mode converter
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CN112630995B (en
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恽斌峰
陈文鑫
胡国华
崔一平
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Southeast University
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation

Abstract

The invention provides a method for converting the polarization state of an optical signal by a silicon-based polarization rotator, wherein the silicon-based polarization rotator comprises a mode converter and an asymmetric multimode waveguide grating which are sequentially cascaded, and the mode converter is formed by cascading three-level tapered waveguides; the mode converter converts the transverse magnetic mode fundamental mode (TM) of the input optical signal, wherein the magnetic field direction of the input optical signal is perpendicular to the propagation direction0Mode conversion to the first-order transverse electric mode TE with the electric field direction perpendicular to the propagation direction1Outputting the mode to the asymmetric multimode waveguide grating, and reflecting the TE from the asymmetric multimode waveguide grating1Mode conversion to TM0Mode, TE, the fundamental mode of transverse electric mode in which the direction of the electric field of the input optical signal is perpendicular to the propagation direction0The transmission of the modes does not change the polarization state; the asymmetric multimode waveguide grating is TE to be output from the mode converter0Mode reflection as TE1Mode input-to-mode converter to TM0Mode, and TE to be output from the mode converter1Mode reflection as TE0Mode, inputGoing back to the mode converter, the polarization state is unchanged.

Description

Method for converting polarization state of optical signal by silicon-based polarization rotator
Technical Field
The invention relates to a silicon-based photonic integrated polarization conversion technology, and belongs to the technical field of integrated photonics.
Background
In recent years, silicon-based photonic integration technology based on silicon-on-insulator (SOI) technology is considered to be the most promising technology for large-scale photonic integration due to its characteristics such as high integration and CMOS process compatibility, and is expected to play an important role in a variety of fields such as optical communication, data centers, high-performance computers, biosensing, and quantum information processing. In a silicon-based integrated optical passive device, the integrated polarization rotator has important significance in many aspects because the integrated polarization rotator can realize the regulation and control of the polarization state.
On one hand, the silicon-based optical waveguide usually supports the transmission of the polarization states of TE (transverse electric mode with the electric field direction perpendicular to the propagation direction) and TM (transverse magnetic mode with the magnetic field direction perpendicular to the propagation direction), but many on-chip integrated silicon-based photonic devices require to work in a specific TE or TM polarization state, so that a polarization rotator needs to be added at a specific position on a chip according to requirements to realize the conversion of the TE and TM polarization states, thereby ensuring the polarization condition required by the normal work of the on-chip device. On the other hand, as the communication speed is increased, the demand for polarization multiplexing technology is higher, and such systems need to convert the polarization state of the signal by using a polarization rotator so as to realize polarization multiplexing. In addition, in emerging silicon-based quantum devices, the generation and regulation of polarization entanglement pairs is a fundamental task of such devices, and thus polarization rotators play a central role in such devices. It can be seen that the silicon-based polarization rotator plays an important role in coherent optical communication, on-chip optical interconnection, optical signal processing and quantum information processing, and thus the device has been the focus of research.
Disclosure of Invention
The technical problem is as follows: the invention aims to provide a silicon-based polarization rotator based on a mode converter and an asymmetric multimode waveguide grating, which can solve the problem of complex process of the polarization rotator in the related technology.
The technical scheme is as follows: the method for converting the polarization state of the optical signal by the silicon-based polarization rotator comprises the following steps: the silicon-based polarization rotator comprises a mode converter and an asymmetric multimode waveguide grating which are sequentially cascaded, wherein the mode converter is formed by cascading three-level tapered waveguides;
the mode converter converts the transverse magnetic mode fundamental mode (TM) of the input optical signal, wherein the magnetic field direction of the input optical signal is perpendicular to the propagation direction0Mode conversion to the first-order transverse electric mode TE with the electric field direction perpendicular to the propagation direction1Outputting the mode to the asymmetric multimode waveguide grating, and reflecting the TE from the asymmetric multimode waveguide grating1Mode conversion to TM0Mode, TE, the fundamental mode of transverse electric mode in which the direction of the electric field of the input optical signal is perpendicular to the propagation direction0The transmission of the modes does not change the polarization state;
the asymmetric multimode waveguide grating is TE to be output from the mode converter0Mode reflection as TE1Mode input-to-mode converter to TM0Mode, and TE to be output from the mode converter1Mode reflection as TE0Mode, input back to the mode converter, polarization state is unchanged.
The silicon-based polarization rotator is composed of a silicon dioxide lower cladding layer, a monocrystalline silicon core layer and a silicon nitride upper cladding layer which are stacked in sequence from bottom to top, and the core layer is composed of a designed mode converter and an asymmetric multimode waveguide grating which are cascaded in sequence.
The mode converter is formed by cascading three sections of tapered waveguide structures, wherein the length L of the first section of tapered waveguide is1The width of the waveguide is from W0Increase to W1The width does not change in the process of changing the polarization state, the length is allowed to be shorter, and the length L of the second section of tapered waveguide2The width of the waveguide is from W1Increase to W2The width is changed while the polarization state is converted, and the length is longest and the length L of the third section of tapered waveguide is longer to ensure the conversion efficiency of the polarization state3The width of the waveguide is from W2Increase to W3The width is changed without polarization conversion, and the length is allowed to be shorter.
The asymmetric multimode waveguide grating is connected with the mode converter, and the asymmetric multimode waveguide grating outputs TE meeting phase matching output from the mode converter0And TE1The modes are converted to each other and reflected back to the mode converter, where the phase matching relation is (beta)01) N 2 is pi/Λ, whereinβ0And beta1Is TE0And TE1The propagation constant corresponding to the mode, Λ, is the grating period.
The optical signal is TE0Inputting the polarization state into the silicon-based polarization rotator;
the optical signal is TE0The mode passes through the mode converter and then passes through the asymmetric multimode waveguide grating connected with the mode converter to be reflected into TE1Mode conversion to TM by mode converter0And (6) outputting the mode.
The optical signal is represented by TM0Inputting the polarization state into the silicon-based polarization rotator;
the optical signal is represented by TM0The mode is first converted into TE by the mode converter1The mode is reflected as TE by the asymmetric multimode waveguide grating connected with the mode0And finally, outputting the mode through a mode converter.
Has the advantages that: the invention provides a silicon-based polarization rotator of SOI technology, which adopts a device structure of mode converters for cascading asymmetric multimode waveguide gratings to realize TE0And TM0Polarization rotation of both polarization states. Compared with the prior art, the device has the advantages of compatibility with CMOS, simple structure, low process requirement and the like.
Drawings
FIG. 1 is a schematic diagram of a silicon-based polarization rotator based on a mode converter and an asymmetric multimode waveguide grating;
FIG. 2 is a schematic cross-sectional view of a waveguide;
FIG. 3 is a graph showing the variation of the dispersion curves of TE and TM modes with the width of the waveguide.
Fig. 4 shows the mode conversion efficiency of the device based on the parameter settings of table 1.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
The method for converting the polarization state of the optical signal by the silicon-based polarization rotator comprises the following steps: the silicon-based polarization rotator comprises a mode converter and an asymmetric multimode waveguide grating which are sequentially cascaded, wherein the mode converter is formed by cascading three-level tapered waveguides;
the mode converter converts the transverse magnetic mode fundamental mode (TM) of the input optical signal, wherein the magnetic field direction of the input optical signal is perpendicular to the propagation direction0Mode conversion to the first-order transverse electric mode TE with the electric field direction perpendicular to the propagation direction1Outputting the mode to the asymmetric multimode waveguide grating, and reflecting the TE from the asymmetric multimode waveguide grating1Mode conversion to TM0Mode, TE, the fundamental mode of transverse electric mode in which the direction of the electric field of the input optical signal is perpendicular to the propagation direction0The transmission of the modes does not change the polarization state;
the asymmetric multimode waveguide grating is TE to be output from the mode converter0Mode reflection as TE1Mode input-to-mode converter to TM0Mode, and TE to be output from the mode converter1Mode reflection as TE0Mode, input back to the mode converter, polarization state is unchanged.
Mode converter implementation TM of FIG. 10And TE1To convert between them. TM0Incident, waveguided at L1One segment of the width is from W0Change to W1In the waveguide, only TM is present0Mode, in the waveguide L2One segment of the width is from W2Change to W3Existing of TM0TE also exists1Mode, indistinguishable, mode-conversion caused by this mode-hybridization, as can be seen from FIG. 3, the waveguide width for mode-conversion is 0.76 μm, with TM increasing with width0Conversion to TE1Mode(s). Waveguide is at L3One segment only having TE in the waveguide1Mode(s). And TE0Mode mixing and mode conversion do not occur at the incidence.
As can be seen from fig. 1, the input of the grating portion is connected to the output of the mode converter, and the width is W3The grating teeth are respectively shifted by +/-delta/2 relative to the vertical direction, namely the upper grating is shifted by delta/2 relative to the vertical direction, the lower grating is shifted by delta/2 relative to the vertical direction, the width of the grating teeth of delta is formed, the upper grating and the lower grating are shifted by delta/2 relative to a straight waveguide of an input end and an output end in the y direction, and the partial structure of the grating is formed in the mode thatAnd is asymmetric in the y-direction, which enables the odd and even modes in the waveguide to couple to each other. The scheme realizes TE by utilizing the characteristic of asymmetric multimode waveguide grating0And TE1Mutual coupling between modes. The grating phase matching relation is (beta)01) Where 2 is pi/Λ, where β0And beta1Is TE0And TE1The propagation constant corresponding to the mode, Λ, is the grating period. Incident TE when phase matching is satisfied0The mode will be reflected as TE of the corresponding wavelength1Mode when incident is TE1In the mode, it will be reflected as TE0Mode and the two transmission curves are identical. And the light which does not meet the phase matching condition, namely is not near the Bragg wavelength keeps the original polarization state to continue transmission.
When the optical signal is TE0The polarization state is input into the silicon-based polarization rotator, and the optical signal is TE0The mode passes through the mode converter and then passes through the asymmetric multimode waveguide grating connected with the mode converter to be reflected into TE1Mode conversion to TM by mode converter0And (6) outputting the mode.
When the optical signal is TM0The polarization state is input into the silicon-based polarization rotator, and the optical signal is in TM0The mode is first converted into TE by the mode converter1The mode is reflected as TE by the asymmetric multimode waveguide grating connected with the mode0And finally, outputting the mode through a mode converter.
Therefore, the mode converter provided by the scheme can realize polarization rotation of two polarization states.
TABLE 1 structural parameters of the devices
Design parameter Name (R) Parameter value
ncladt Upper cladding material Si3N4Refractive index 1.979
ncladb Lower cladding material SiO2Refractive index 1.444
ht Thickness of upper cladding 3μm
hb Lower cladding thickness 3μm
ncore Refractive index of Si as core material 3.476
h Height of core layer 220nm
L1 Mode converter first segment tapered waveguide length 10μm
L2 Second segment tapered waveguide length for mode converter 46μm
L3 Third segment tapered waveguide length of mode converter 11.25μm
W0 Waveguide width in FIG. 1 450nm
W1 Waveguide width in FIG. 1 690nm
W2 Waveguide width in FIG. 1 830nm
W3 Waveguide width in FIG. 1 1100nm
Λ Waveguide Bragg grating period 290nm
δ Bragg grating tooth width 200nm
n Number of waveguide Bragg grating periods 200
According to the above device parameters, the mode converter is simulated by using a three-dimensional Finite Time Domain (FDTD), and the obtained mode conversion efficiency is shown in fig. 4. TE in the wavelength range of 1536 to 1547nm0And TM0The conversion efficiency of two polarization states reaches more than 90%, and the bandwidth is more than 11 nm. Within the working bandwidth, the conversion efficiency of the two polarization states is almost the same, the maximum error is about 0.5%, and the polarization independence is good.
The bandwidth of the device is limited by the bandwidth of the grating, and the parameters of the grating can be further optimized if a larger bandwidth is required. The size of the invention is less than 200 mu m, and TE can be realized compared with a polarization rotator with the same size0And TM0The polarization rotation of two polarization states has the advantages of simple structure, contribution to on-chip integration and the like.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.

Claims (6)

1. A method for converting the polarization state of an optical signal by a silicon-based polarization rotator is characterized in that the silicon-based polarization rotator comprises a mode converter and an asymmetric multimode waveguide grating which are sequentially cascaded, wherein the mode converter is formed by cascading three-level tapered waveguides;
the mode converter converts the transverse magnetic mode fundamental mode (TM) of the input optical signal, wherein the magnetic field direction of the input optical signal is perpendicular to the propagation direction0Mode conversion to the first-order transverse electric mode TE with the electric field direction perpendicular to the propagation direction1Outputting the mode to the asymmetric multimode waveguide grating, and reflecting the TE from the asymmetric multimode waveguide grating1Mode conversion to TM0Mode, TE, the fundamental mode of transverse electric mode in which the direction of the electric field of the input optical signal is perpendicular to the propagation direction0The transmission of the modes does not change the polarization state;
the asymmetric multimode waveguide grating is TE to be output from the mode converter0Mode reflection as TE1Mode input-to-mode converter to TM0Mode, and TE to be output from the mode converter1Mode reflection as TE0Mode, input back to the mode converter, polarization state is unchanged.
2. The method according to claim 1, wherein the silica-based polarization rotator comprises a silica lower cladding, a single crystal silicon core layer, and a silicon nitride upper cladding from bottom to top, and the core layer comprises a designed mode converter and an asymmetric multimode waveguide grating which are sequentially cascaded.
3. The method of claim 1, wherein the mode converter comprises a cascade of three tapered waveguide structures, the first tapered waveguide having a length L1The width of the waveguide is from W0Increase to W1The width does not change in the process of changing the polarization state, the length is allowed to be shorter, and the length L of the second section of tapered waveguide2The width of the waveguide is from W1Increase to W2The width is changed while the polarization state is converted, and the length is longest and the length L of the third section of tapered waveguide is longer to ensure the conversion efficiency of the polarization state3The width of the waveguide is from W2Increase to W3The width is changed without polarization conversion, and the length is allowed to be shorter.
4. The method of claim 1, wherein the asymmetric multimode waveguide grating is coupled to a mode converter, and the asymmetric multimode waveguide grating converts the TE output from the mode converter that satisfies phase matching0And TE1Mode interconverting and reflection back to mode conversionA phase matching relation of (beta)01) Where 2 is pi/Λ, where β0And beta1Is TE0And TE1The propagation constant corresponding to the mode, Λ, is the grating period.
5. The method of claim 1, wherein the optical signal is converted to TE by a silicon-based polarization rotator0Inputting the polarization state into the silicon-based polarization rotator;
the optical signal is TE0The mode passes through the mode converter and then passes through the asymmetric multimode waveguide grating connected with the mode converter to be reflected into TE1Mode conversion to TM by mode converter0And (6) outputting the mode.
6. The method of claim 1, wherein the optical signal is converted to the TM in the polarization state of the optical signal by a silicon-based polarization rotator0Inputting the polarization state into the silicon-based polarization rotator;
the optical signal is represented by TM0The mode is first converted into TE by the mode converter1The mode is reflected as TE by the asymmetric multimode waveguide grating connected with the mode0And finally, outputting the mode through a mode converter.
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CN114019605A (en) * 2021-11-11 2022-02-08 西安邮电大学 Diagonal etching sub-wavelength grating type on-chip polarization rotator based on SOI
CN114280775A (en) * 2022-01-06 2022-04-05 海宁利伊电子科技有限公司 Small broadband polarization filter
CN114624815A (en) * 2022-03-08 2022-06-14 华中科技大学 Passive waveguide type polarization rotation beam splitter with large manufacturing tolerance and high polarization extinction ratio
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Cited By (11)

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Publication number Priority date Publication date Assignee Title
CN113391395A (en) * 2021-06-01 2021-09-14 西安邮电大学 Compact on-chip polarization beam splitting rotator based on Bezier curve graded waveguide
CN114019605A (en) * 2021-11-11 2022-02-08 西安邮电大学 Diagonal etching sub-wavelength grating type on-chip polarization rotator based on SOI
CN114280775A (en) * 2022-01-06 2022-04-05 海宁利伊电子科技有限公司 Small broadband polarization filter
CN114280775B (en) * 2022-01-06 2024-04-09 海宁利伊电子科技有限公司 Small broadband polarization filter device
CN114624815A (en) * 2022-03-08 2022-06-14 华中科技大学 Passive waveguide type polarization rotation beam splitter with large manufacturing tolerance and high polarization extinction ratio
CN114924351A (en) * 2022-05-19 2022-08-19 中国人民解放军国防科技大学 Polarization converter and design method
CN114924351B (en) * 2022-05-19 2024-04-09 中国人民解放军国防科技大学 Polarization converter and design method
CN114966966A (en) * 2022-05-24 2022-08-30 北京邮电大学 Nonlinear tapered coupler based on auxiliary waveguide
CN114966972A (en) * 2022-05-25 2022-08-30 兰州大学 Adjustable mode converter based on waveguide cladding switching mechanism
CN114966972B (en) * 2022-05-25 2023-03-28 兰州大学 Adjustable mode converter based on waveguide cladding switching mechanism
CN114755757A (en) * 2022-06-15 2022-07-15 之江实验室 TM0-TE1 optical mode converter and optical device based on double-layer curve edge waveguide structure

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