CN112619217A - Fluid filtering system of mass spectrometry equipment, mass spectrometry equipment and regeneration and use method - Google Patents

Fluid filtering system of mass spectrometry equipment, mass spectrometry equipment and regeneration and use method Download PDF

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Publication number
CN112619217A
CN112619217A CN201910953879.4A CN201910953879A CN112619217A CN 112619217 A CN112619217 A CN 112619217A CN 201910953879 A CN201910953879 A CN 201910953879A CN 112619217 A CN112619217 A CN 112619217A
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China
Prior art keywords
filter element
mass spectrometry
valve
fluid
communicated
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CN201910953879.4A
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Chinese (zh)
Inventor
任建新
李灵锋
卢文成
常清
李鹏
汪小知
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Suzhou Weimu Intelligent System Co ltd
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Suzhou Weimu Intelligent System Co ltd
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Priority to CN201910953879.4A priority Critical patent/CN112619217A/en
Publication of CN112619217A publication Critical patent/CN112619217A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/90Devices for taking out of action one or more units of multi-unit filters, e.g. for regeneration or maintenance
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D24/00Filters comprising loose filtering material, i.e. filtering material without any binder between the individual particles or fibres thereof
    • B01D24/02Filters comprising loose filtering material, i.e. filtering material without any binder between the individual particles or fibres thereof with the filter bed stationary during the filtration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D35/00Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/12Devices for taking out of action one or more units of multi- unit filters, e.g. for regeneration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/30Particle separators, e.g. dust precipitators, using loose filtering material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention relates to a fluid filtering system of mass spectrometry equipment, the mass spectrometry equipment and a regeneration method, wherein the fluid filtering system comprises a first filter element, a second filter element, an air inlet valve, an air outlet valve and a sewage discharge valve, the air inlet valve is respectively connected with the first filter element and the second filter element and is used for feeding fluid with impurities into the first filter element and the second filter element, and two air outlet ends can not be opened simultaneously; the exhaust valve is respectively connected with the first filter element and the second filter element and is used for exhausting the dried fluid filtered by the first filter element and the second filter element for mass spectrometry equipment; the sewage discharge valve is respectively connected with the first filter element and the second filter element; the first filter element and the second filter element are connected with a back flushing pipeline, and a flow limiting valve is arranged on the back flushing pipeline; the first filter element and the second filter element are alternately switched between working and regeneration, the filter elements can be regenerated in situ on line, disassembly is not needed, the working efficiency is improved, and the replacement time is shortened.

Description

Fluid filtering system of mass spectrometry equipment, mass spectrometry equipment and regeneration and use method
Technical Field
The invention relates to the technical field of regeneration of mass spectrometry equipment filter elements, in particular to a fluid filtering system of mass spectrometry equipment, mass spectrometry equipment and a regeneration and use method.
Background
Mass spectrometry equipment is generally designed for detecting explosives and drugs, pesticide residues, animal residues, and food additives, contraband, etc., and the main principle of the equipment is as follows: the ion source device is used for ionizing sample molecules, and the ionized sample molecules pass through the ion transmission device and enter the mass analyzer, wherein the mass analyzer is a device for separating different ions which enter the mass analyzer at the same time according to the mass-to-charge ratio. And the separated ions sequentially enter an ion detector, and after ion signals are collected and amplified, the ions are processed by a computer and finally drawn into a mass spectrogram.
The apparatus requires the use of a gas as a carrier gas which acts to carry the sample from the sample inlet into the ionization region of the ion source. For mass spectrometry equipment using a capillary as an ion transport path, a carrier gas needs to pass through the capillary, and therefore, the purity of the carrier gas must be ensured. The purity of the carrier gas is ensured by the filtration of the filter element; if the filter element fails, redundant impurities and moisture can be generated in the carrier gas, so that the capillary tube is blocked, and finally, the ion source outside the cavity, the ion trap in the cavity and the detector are damaged. Therefore, ensuring dry and clean circulating gas in mass spectrometry equipment is a necessary condition for ensuring the equipment to be in a good working state and ensuring the service life of the equipment.
In order to ensure the normal filtering effect of the filter element, the filter element is replaced in the existing mass spectrum equipment. After the filter element is used for a period of time, the filter element is disassembled and then replaced, or the filter element is taken out after the disassembly and is independently regenerated and dried. The method has the disadvantages that the use cost of the filter element is increased, the replacement process is time-consuming and labor-consuming, online in-situ regeneration cannot be realized, and the working efficiency is greatly reduced.
Disclosure of Invention
Therefore, the technical problem to be solved by the invention is to overcome the technical problem that the filter element of the mass spectrometry equipment in the prior art needs to be disassembled for regeneration and cannot realize online in-situ regeneration.
It is an object of the present invention to provide a fluid filtration system for a mass spectrometry apparatus, comprising
A first filter element having a front side adapted to receive a contaminated fluid and a back side for discharging a clean fluid;
a second filter element also having a front side adapted to receive the contaminated fluid and a back side for discharging the clean fluid;
the first passage is suitable for introducing fluid with impurities from the front surface of the first filter element and introducing clean fluid to the back surface of the second filter element;
and the second passage is suitable for introducing fluid with impurities from the front surface of the second filter element and introducing clean fluid to the back surface of the first filter element.
Preferably, the fluid filtration system of the mass spectrometry apparatus comprises:
the air inlet valve is provided with an air inlet end and at least two air outlet ends, the air inlet end is suitable for being communicated with the air supply device, one air outlet end is connected to the front face of the first filter element, and the other air outlet end is connected to the front face of the second filter element;
the two air outlet ends of the air inlet valve are not opened at the same time;
and the back flushing pipeline is communicated with the back of the first filter element and the back of the second filter element.
Preferably, in the fluid filtering system of the mass spectrometer, a flow limiting valve is arranged on the blowback pipeline.
Preferably, the fluid filtering system of the mass spectrometry device further comprises:
the sewage discharge valve is provided with at least two air inlet ends which are respectively communicated to the front surfaces of the first filter element and the second filter element;
and the exhaust valve is provided with at least two air inlet ends and an air outlet end, the two air inlet ends are respectively communicated to the back surface of the first filter element and the back surface of the second filter element, and the air outlet end is suitable for being connected with mass spectrometry equipment.
Preferably, in the fluid filtering system of the mass spectrometer, the air inlet valve, the dirt discharge valve and the air outlet valve are all three-way valves.
Preferably, the fluid filtering system of the mass spectrometry equipment further comprises a condensing device, and the condensing device is arranged at the air inlet end of the blowdown valve.
Preferably, the fluid filtering system of the mass spectrometry device further comprises a heating device, and the heating device is arranged outside the first filter element and the second filter element.
Preferably, in the fluid filtering system of the mass spectrometry device, the outer surfaces of the first filter element and the second filter element are wrapped with a heat insulation structure.
The invention also provides mass spectrometry equipment, which comprises a gas inlet system, an ion source device, a mass analyzer, a detector and a recording system, wherein a gas inlet pipeline of the gas inlet system is provided with a fluid filtering system of the mass spectrometry equipment.
It is a further object of the present invention to provide a method of regenerative use of a fluid filtration system of a mass spectrometry apparatus, comprising the method steps of:
(1) the air inlet valve and the air outlet valve are communicated with the first filter element, and the first filter element works to dehumidify and dry the carrier gas;
(2) the first filter element is communicated with the second filter element, part of carrier gas in the first filter element enters the second filter element through a back flushing pipeline to heat the second filter element, and water absorbed by the second filter element is condensed and discharged at the position of the sewage discharge valve after being evaporated at high temperature, so that the work of the first filter element is realized, and meanwhile, the second filter element is regenerated;
(3) stopping heating the second filter element, disconnecting the first filter element from the second filter element, completing regeneration of the second filter element until the second filter element is naturally cooled, switching after the first filter element continues to work for a period of time, and regenerating the first filter element by adopting the second filter element to work;
(4) the air inlet valve and the air outlet valve are communicated with the second filter element, the second filter element is used for dehumidifying and drying the carrier gas, and the second filter element is used for working;
(5) the first filter element is communicated with the drain valve, the second filter element is communicated with the first filter element, and the carrier gas in the second filter element enters the first filter element through a back flushing pipeline to heat the first filter element, so that the second filter element works, and meanwhile, the first filter element is regenerated;
(6) the first filter element and the second filter element are sequentially circulated to realize the alternation of work and regeneration.
The technical scheme of the invention has the following advantages:
1. the fluid filtering system of mass spectrum equipment provided by the invention comprises a first filter element, a second filter element, a first passage and a second passage, wherein the first passage is communicated with the first filter element, and the second passage is communicated with the second filter element, so that the two filter element structures of the first filter element and the second filter element are switched to be used, and the purity of carrier gas is ensured.
2. The invention provides a fluid filtering system of mass spectrum equipment, which comprises an air inlet valve, an air outlet valve and a sewage discharge valve, wherein two air outlet ends of the air inlet valve are respectively connected with the front surface of a first filter element and the front surface of a second filter element and used for feeding fluid with impurities into the front surfaces of the first filter element and the second filter element, and the two air outlet ends can not be opened simultaneously, namely the first filter element and the second filter element can not work simultaneously; the two air inlet ends of the exhaust valve are respectively connected with the back surface of the first filter element and the back surface of the second filter element and used for exhausting pure fluid filtered by the first filter element and the second filter element for mass spectrometry equipment through the exhaust valve, and the sewage discharge valve is provided with two air inlet ends which are respectively connected with the front surfaces of the first filter element and the second filter element; the back of the first filter element and the back of the second filter element are connected with a back flushing pipeline; when one of the first filter element and the second filter element works, part of gas enters the other filter element, and the water absorbed by the filter element is evaporated and then is condensed and discharged through the drain valve by heating the filter element; realize first filter core and second filter core work and regeneration and switch in turn, can realize the online normal position regeneration of filter core, need not to dismantle, improve work efficiency, reduce the change time, ensure the normal filter effect of filter core, guarantee fluidic purity.
3. According to the fluid filtering system of the mass spectrum equipment, the condensing device is additionally arranged at the air inlet end of the sewage discharge valve, and water evaporated in the regeneration process is condensed by the condensing device and then discharged in a liquid form, so that the pollution of the gas emission to the atmosphere is reduced, and the gas can be recycled.
4. The mass spectrum equipment provided by the invention comprises the fluid filtering system, can regenerate the filter element on line without disassembly regeneration or disassembly replacement, improves the working efficiency, reduces the use cost and improves the dryness of the carrier gas.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a block diagram of a fluid filtration system of the present invention.
Description of reference numerals:
1-a first filter element;
2-a second filter element;
3-an air inlet valve;
4-a drain valve;
5-an exhaust valve;
6-a flow limiting valve;
7-an air pump;
8-main trachea;
9-a first air pipe;
10-a second trachea;
11-a third trachea;
12-fourth trachea;
13-a back-blowing pipeline;
14-a fifth pipeline;
15-sixth trachea.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
The fluid filtering system of the mass spectrometer of the present embodiment, as shown in fig. 1, includes a first filter element 1, a second filter element 2, a first passage, a second passage, an air inlet valve 3, a dirt discharge valve 4, a blowback pipeline, a flow limiting valve 6, an air supply device (not shown), a heating device (not shown), and a condensing device (not shown), where the first filter element 1 and the second filter element 2 are both molecular sieve filter elements and have both front and back surfaces, where the front surface is used for receiving fluid with impurities, and the back surface is used for discharging clean fluid; one end of the first passage is communicated with the air supply device, the other end of the first passage is communicated with the front surface of the first filter element 1, and the first passage is suitable for introducing fluid with impurities from the front surface of the first filter element 1 and introducing clean fluid to the back surface of the second filter element 2; one end of the second passage is communicated with the air supply device, the other end of the second passage is communicated with the front surface of the second filter element 2, the fluid with impurities is introduced to the front surface of the second filter element 2, and the clean fluid is introduced to the back surface of the first filter element 1; a heating device (not shown) and a heat preservation device (not shown) are wrapped outside the first filter element 1 and the second filter element 2, and a condensing device is arranged at the air inlet end of the sewage discharge valve 4; the back-blowing pipeline 13 is communicated with the back surface of the first filter element 1 and the back surface of the second filter element 2, and the flow limiting valve 6 is arranged on the back-blowing pipeline 13. The air supply device is a common air storage tank in the existing market; the condensing device is a common condenser in the existing market, and the specific structure is not limited and described; the heating device is a conventional heating plate structure and the like, and the specific structure and the working principle are not limited and described herein; the heat insulation structure is common heat insulation cotton in the existing market, the specific structure, material and the like are not limited and described, and the skilled person can select the heat insulation structure according to the actual needs; the flow limiting valve is a common back-blowing flow limiting valve in the existing market, and the specific structure and the working principle are not limited and described herein. The fluid of the present embodiment refers to a gaseous medium, and the impurities refer to moisture and other particulate impurities in the carrier gas, and the like. Of course, the fluid filtering system of the present embodiment can also be used for filtering liquid media.
As shown in fig. 1, the first passage is composed of a main gas pipe 8 and a first gas pipe 9, and the first gas pipe 9 is connected with the front surface of the first filter element 1; the second passage consists of a main air pipe 8 and a second air pipe 10, and the second air pipe 10 is connected with the front side of the second filter element 2; an air pump 7 is arranged on the main air pipe 8; the air inlet valve 3, the sewage discharge valve 4 and the exhaust valve 5 are all three-way valves, the air inlet valve 3 is arranged at the joint of the main air pipe 8 and the first air pipe 9 as well as the second air pipe 10, the air inlet valve 3 is provided with an air inlet end and two air outlet ends, the air inlet end is suitable for being communicated with an air supply device through the main air pipe 8, one air outlet end is connected to the front face of the first filter element 1 through the first air pipe 9, and the other air outlet end is connected to the front face of the second filter element 2 through the second air pipe 10; the two air outlet ends of the air inlet valve 3 are not opened at the same time in the using process; the flow limiting valve 6 is arranged on the back flushing pipeline 13; the sewage discharge valve 4 is provided with two air inlet ends which are communicated to the front surfaces of the first filter element 1 and the second filter element 2 through a fifth air pipe 14 and a sixth air pipe 15 respectively; the exhaust valve 5 has two air inlet ends and one air outlet end, the two air inlet ends are respectively communicated to the back surface of the first filter element 1 and the back surface of the second filter element 2 through a third air pipe 11 and a fourth air pipe 12, and the air outlet end is suitable for being connected with mass spectrometry equipment (not shown). As an alternative embodiment, the inlet end of the inlet valve 3 includes, but is not limited to, one, and the outlet end includes, but is not limited to, two; similarly, the inlet ends of the exhaust valves 5 include, but are not limited to, two, and the outlet ends include, but are not limited to, one; the inlet ends of the blowdown valves 4 include, but are not limited to, two, and the outlet ends include, but are not limited to, one.
As an alternative embodiment, the air inlet end of the dirt discharging valve 4 of the present embodiment may not be provided with a condensing device, and the dirt discharging valve 4 itself may have a condensing function.
As another alternative embodiment, the first filter element 1 and the second filter element 2 of this embodiment may not be wrapped with a heating device, and the heating device may be a heating device that is additionally provided, and is only required to heat the first filter element 1 and the second filter element 2 respectively.
Example 2
The fluid filtering system of the mass spectrometer of this embodiment includes an air intake system, an ion source device, a mass analyzer, a detector, and a recording system, and the air intake pipe of the air intake system is provided with the fluid filtering system of the mass spectrometer of embodiment 1. The mass spectrometer structure of this embodiment is a mass spectrometer commonly used in the existing market, and the specific structure, the connection relationship between the structures, and the operation principle are not described and limited in detail herein.
Example 3
The method for regenerating and using the fluid filtering system of the mass spectrometer device comprises the following steps:
(1) the air inlet valve 3 and the air outlet valve 5 are both communicated with the first filter element 1, and the first filter element 1 works to dehumidify and dry carrier gas;
(2) the drain valve 4 is communicated with the second filter element 2, the first filter element 1 is communicated with the second filter element 2, part of carrier gas in the first filter element 1 enters the second filter element 2 through a back flushing pipeline 13 to heat the second filter element 2, and water absorbed by the second filter element 2 is condensed at the drain valve 4 and then discharged after being evaporated at high temperature, so that the first filter element 1 works, and meanwhile, the second filter element 2 is regenerated;
(3) stopping heating the second filter element 2, disconnecting the first filter element 1 from the second filter element 2, completing regeneration of the second filter element 2 until the second filter element 2 is naturally cooled, switching after the first filter element 1 continues to work for a period of time, adopting the second filter element 2 to work, and regenerating the first filter element 1;
(4) the air inlet valve 3 and the air outlet valve 5 are communicated with the second filter element 2, the second filter element 2 works to dehumidify and dry the carrier gas, and the second filter element 2 works;
(5) the first filter element 1 is communicated with the drain valve 4, the second filter element 2 is communicated with the first filter element 1, the carrier gas in the second filter element 2 enters the first filter element 1 through the back flushing pipeline 13 to heat the first filter element 1, the second filter element 2 works, and meanwhile, the first filter element 1 is regenerated;
(6) the first filter element 1 and the second filter element 2 are alternately operated and regenerated in a sequential and circular way.
The water in the carrier gas is absorbed in the working process, and the water absorbed in the filter element is evaporated by heating to 200 ℃ during regeneration. In the step (2), the temperature for heating the second filter element 2 is 200 ℃, the heating time is determined according to the actual situation, a moisture testing device can be additionally arranged for ensuring that the moisture of the molecular sieve in the filter element reaches the standard, and the heating of the filter element can be disconnected when the moisture testing device detects that the moisture meets the standard.
And (4) when the heating of the second filter element 2 is stopped in the step (3), the dew point of the gas in the first filter element 1 is lower than-60 ℃, the detection requirement of mass spectrometry equipment is met, and the gas is kept dry.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.

Claims (10)

1. A fluid filtration system for a mass spectrometry apparatus, comprising:
a first filter cartridge (1) having a front side adapted to receive a fluid with impurities and a rear side to discharge a dry clean fluid;
a second filter element (2) also having a front face suitable for receiving fluids with impurities and a rear face for discharging clean fluids;
the first passage is suitable for introducing fluid with impurities from the front surface of the first filter element (1) and introducing clean fluid to the back surface of the second filter element (2);
and the second passage is suitable for introducing fluid with impurities from the front surface of the second filter element (2) and introducing clean fluid to the back surface of the first filter element (1).
2. The fluid filtration system of a mass spectrometry apparatus of claim 1, comprising:
the air inlet valve (3) is provided with an air inlet end and at least two air outlet ends, the air inlet end is suitable for being communicated with the air supply device, one air outlet end is connected to the front surface of the first filter element (1), and the other air outlet end is connected to the front surface of the second filter element (2);
the two air outlet ends of the air inlet valve (3) are not opened at the same time;
and the back flushing pipeline (13) is communicated with the back surface of the first filter element (1) and the back surface of the second filter element (2).
3. The fluid filter system of mass spectrometry apparatus according to claim 2, wherein the blowback line (13) is provided with a flow restriction valve (6).
4. The fluid filtration system of a mass spectrometry apparatus of claim 3, further comprising:
the sewage discharge valve (4) is provided with at least two air inlet ends which are respectively communicated to the front surfaces of the first filter element (1) and the second filter element (2);
and the exhaust valve (5) is provided with at least two air inlet ends and one air outlet end, the two air inlet ends are respectively communicated to the back surface of the first filter element (1) and the back surface of the second filter element (2), and the air outlet end is suitable for being connected with mass spectrometry equipment.
5. The fluid filtration system of a mass spectrometry apparatus of claim 4, wherein the inlet valve (3), the blowdown valve (4) and the exhaust valve (5) are all three-way valves.
6. The fluid filtration system of a mass spectrometry apparatus according to claim 4 or 5, further comprising a condensing device disposed at the inlet end of the blowdown valve (4).
7. A fluid filtration system of a mass spectrometry apparatus according to claim 1, further comprising heating means provided outside the first filter element (1) and the second filter element (2).
8. The fluid filtration system of mass spectrometry apparatus of claim 7, wherein the outer surface of the first (1) and second (2) filter elements is wrapped with a thermal insulation structure.
9. A mass spectrometry apparatus comprising a gas inlet system, an ion source device, a mass analyser, a detector and a recording system, wherein the gas inlet system has a fluid filtration system in the gas inlet line of the mass spectrometry apparatus of any one of claims 1 to 8.
10. A method of regenerative use of a fluid filtration system of a mass spectrometry apparatus according to any of claims 1 to 8, comprising the method steps of:
(1) the air inlet valve (3) and the air outlet valve (5) are communicated with the first filter element (1), and the first filter element (1) works to dehumidify and dry carrier gas;
(2) the sewage discharge valve (4) is communicated with the second filter element (2), the first filter element (1) is communicated with the second filter element (2), part of carrier gas in the first filter element (1) enters the second filter element (2) through a back flushing pipeline (13) to heat the second filter element (2), and water absorbed by the second filter element (2) is condensed and discharged at the sewage discharge valve (4) after being evaporated at high temperature, so that the first filter element (1) works, and meanwhile, the second filter element (2) is regenerated;
(3) stopping heating the second filter element (2), disconnecting the first filter element (1) and the second filter element (2), completing regeneration of the second filter element (2) until the second filter element (2) is naturally cooled, switching after the first filter element (1) continues to work for a period of time, adopting the second filter element (2) to work, and regenerating the first filter element (1);
(4) the air inlet valve (3) and the air outlet valve (5) are communicated with the second filter element (2), the second filter element (2) works to dehumidify and dry carrier gas, and the second filter element (2) works;
(5) the first filter element (1) is communicated with the sewage discharge valve (4), the second filter element (2) is communicated with the first filter element (1), a carrier gas part in the second filter element (2) enters the first filter element (1) through a back flushing pipeline (13) to heat the first filter element (1), the second filter element (2) works, and meanwhile, the first filter element (1) is regenerated;
(6) the first filter element (1) and the second filter element (2) are sequentially circulated to realize the alternation of work and regeneration.
CN201910953879.4A 2019-10-09 2019-10-09 Fluid filtering system of mass spectrometry equipment, mass spectrometry equipment and regeneration and use method Pending CN112619217A (en)

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