CN112595720A - System for detecting loose body based on laser interference imaging - Google Patents
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- CN112595720A CN112595720A CN202011520273.0A CN202011520273A CN112595720A CN 112595720 A CN112595720 A CN 112595720A CN 202011520273 A CN202011520273 A CN 202011520273A CN 112595720 A CN112595720 A CN 112595720A
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- 238000001514 detection method Methods 0.000 claims abstract description 117
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8829—Shadow projection or structured background, e.g. for deflectometry
Abstract
The application relates to a system for detecting a loose body based on laser interference imaging, which relates to the technical field of optical fiber preform production and comprises a laser generator, a beam splitter, a beam expanding mechanism and a detection mechanism; wherein the laser generator is used for periodically emitting laser beams; the beam splitter is used for splitting the laser beam emitted by the laser generator into a detection beam and a reference beam and respectively transmitting the detection beam and the reference beam to the beam expanding mechanism and the detection mechanism; the beam expanding mechanism is used for expanding the detection light beam and emitting the detection light beam to a preset detection area on the loose body; the detection mechanism is used for receiving the detection light beam reflected by the loose body, so that the detection light beam and the reference light beam generate interference and an interference image is generated; and the detection mechanism is also used for judging whether the loose body in the detection area has defects or not according to the interference image.
Description
Technical Field
The application relates to the technical field of optical fiber perform production, in particular to a system for detecting a loose body based on laser interference imaging.
Background
At present, in the optical fiber preform production industry, the process of outside rod Chemical vapor deposition (OVD) (outside Chemical vapor deposition) for making the outside cladding layer of the optical fiber rod is still the mainstream technology. During deposition, the dopant as main material is fed into oxyhydrogen flame burner in gaseous state, and hydrolyzed in oxyhydrogen flame to produce quartz glass particle dust, which is sprayed out via the burner to deposit on the outer surface of the mother rod of quartz material and deposited several times to form porous prefabricated rod of certain size. In the manufacturing process, parameters directly influencing the process technologies such as oxyhydrogen, silicon tetrachloride raw material flow and the like are explored according to specific process requirements, the selection of proper deposition density is one of process difficulties, and if the deposition density is too low, the cone part of the loose body is easy to crack, so that the product is scrapped.
In the related technology, the crack of the loose body is detected only by the weight change of the loose body in the deposition process and the inspection and confirmation of operating personnel, if the crack is small and does not have serious peeling, the crack can be repeatedly deposited to cover, and the condition that the whole optical rod is scrapped can be caused and great manpower and material resources are wasted when the process is found to be bad after sintering is completed.
Disclosure of Invention
The embodiment of the application provides a system for detecting loose bodies based on laser interference imaging to solve the problem that in the prior art, because smaller cracks cannot be found in time, the process is not found until sintering is completed, the whole optical rod is scrapped, and large manpower and material resources are wasted.
In a first aspect, a system for detecting a loose body based on laser interference imaging is provided, which comprises a laser generator, a beam splitter, a beam expanding mechanism and a detection mechanism; wherein the content of the first and second substances,
the laser generator is used for periodically emitting laser beams;
the beam splitter is used for splitting a laser beam emitted by the laser generator into a detection beam and a reference beam and respectively transmitting the detection beam and the reference beam to the beam expanding mechanism and the detection mechanism;
the beam expanding mechanism is used for expanding the detection light beam and emitting the detection light beam to a preset detection area on the loose body;
the detection mechanism is used for receiving the detection light beam reflected by the loose body, so that the detection light beam and the reference light beam generate interference and an interference image is generated; and the detection mechanism is also used for judging whether the loose body in the detection area has defects or not according to the interference image.
In some embodiments, the beam expanding mechanism includes a first beam expanding lens and a first driver, and the first driver is connected to the first beam expanding lens and is configured to drive the first beam expanding lens to rotate, so as to change a coverage area of the detection beam passing through the first beam expanding lens, and make the coverage area not smaller than the size of the detection area.
In some embodiments, the system further comprises a controller connected to the first driver and configured to control the rotation angle of the first beam expander via the first driver.
In some embodiments, the system further comprises a second beam expander and a second driver, wherein the second driver is connected with the second beam expander and is used for driving the second beam expander to rotate so as to change the coverage of the reference beam.
In some embodiments, the controller is further connected to the second driver and configured to control the rotation angle of the second beam expander through the second driver, so that the rotation angle of the second beam expander is equal to the rotation angle of the first beam expander.
In some embodiments, the beam splitter has a transmission surface and a reflection surface, the transmission surface is used for transmitting a part of the laser beam emitted by the laser generator to the beam expanding mechanism, and the part of the laser beam is a detection beam; the reflecting surface is used for reflecting the rest part of the laser beam to the detection mechanism, and the part is the reference beam.
In some embodiments, the system further comprises a mirror for reflecting the reference beam from the beam splitter to the detection mechanism.
In some embodiments, the system further includes a first convex lens, which is located between the laser generator and the beam splitter and is configured to focus the laser beam generated by the laser generator and send the focused laser beam to the beam splitter.
In some embodiments, the system further includes a second convex lens, where the second convex lens is located between the beam splitter and the beam expanding mechanism, and the second convex lens is configured to focus the detection light beam emitted by the beam splitter and send the detection light beam to the beam expanding mechanism.
In some embodiments, the defects include cracks, bulges, and debonds.
The beneficial effect that technical scheme that this application provided brought includes: according to the embodiment of the application, whether the defect occurs in the loose body is visually observed through the interference fringes, the defect can be timely found, and once the defect occurs, the deposition work is immediately stopped, so that the defect cannot be detected in the subsequent deposition process, and the loose body is a defective product and cannot be used after being formed; and the problem is found in the deposition process, the deposition can be stopped in time, the deposited material is removed, the remained core rod can still be reused, the raw material is greatly saved, and the quality of the optical fiber preform is also ensured.
The embodiment of the application provides a system for detecting a loose body based on laser interference imaging, and the system comprises a beam expanding mechanism, a beam splitter, a laser generator, a detection mechanism and a detection mechanism, wherein the beam splitter firstly emits laser beams to the beam splitter, divides the laser beams emitted by the laser generator into detection beams and reference beams, and respectively transmits the detection beams and the reference beams to the beam expanding mechanism and the detection mechanism; the beam expanding mechanism expands the detection light beam and emits the detection light beam into a preset detection area on the loose body; the detection mechanism receives the detection light beam reflected by the loose body, the detection light beam entering the detection mechanism interferes with the reference light beam, and an interference image is generated; finally, the detection mechanism judges whether the loose body in the detection area has defects or not according to the interference image; if the interference fringes in the interference image are regular, it is indicated that the loose body in the detection area is not defective, and the interference fringes in a plurality of interference images are irregular, it is indicated that the loose body in the detection area is defective, therefore, the embodiment of the application can visually observe whether the loose body is defective through the interference fringes, the defect can be found in time, and once the defect is generated, the deposition work is stopped immediately, so that the defect cannot be detected in the subsequent deposition process, and the formed loose body is a defective product and cannot be used; and the problem is found in the deposition process, the deposition can be stopped in time, the deposited material is removed, the remained core rod can still be reused, the raw material is greatly saved, and the quality of the optical fiber preform is also ensured.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a system for detecting a loose body based on laser interference imaging according to an embodiment of the present application.
In the figure: 1. a laser generator; 2. a beam splitter; 3. a beam expanding mechanism; 30. a first beam expander; 31. a first driver; 32. a second beam expander; 33. a second driver; 4. a detection mechanism; 5. a laser beam; 50. detecting the light beam; 51. a reference beam; 6. a loose body; 60. detecting a region; 7. a second convex lens; 8. a mirror; 9. a first convex lens.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1, an embodiment of the present application provides a system for detecting a loose body based on laser interference imaging, which includes a laser generator 1, a beam splitter 2, a beam expanding mechanism 3, and a detection mechanism 4; wherein the laser generator 1 is configured to periodically emit a laser beam 5; the beam splitter 2 is used for splitting the laser beam 5 emitted by the laser generator 1 into a detection beam 50 and a reference beam 51, and transmitting the detection beam 50 and the reference beam 51 to the beam expanding mechanism 3 and the detection mechanism 4 respectively; the beam expanding mechanism 3 is used for expanding the detection light beam 50 and emitting the detection light beam to a preset detection area 60 on the loose body 6; the detection mechanism 4 is used for receiving the detection beam 50 reflected by the loose body 6, so that the detection beam 50 and the reference beam 51 generate interference and generate an interference image; and the detection mechanism 4 is also used for judging whether the loose body 6 in the detection area 60 has defects or not according to the interference image.
The working principle of the system for detecting the loose body based on laser interference imaging is as follows:
when the detection system is installed, an area where defects are likely to occur in the deposition process of the loose body 6 is determined in advance and is used as a detection area 60; the inspection system is then aligned with the inspection area 60; moreover, because the loose body 6 is in a state of rotating around the axis thereof during the deposition process, the laser generator 1 periodically emits the laser beam 5 according to the rotating speed of the loose body 6, so that the laser beam 5 emitted by the laser generator 1 can be emitted into the detection area 60 on the loose body 6 each time.
The laser generator 1 emits laser beams 5 to the beam splitter 2, the beam splitter 2 divides the laser beams 5 emitted by the laser generator 1 into detection beams 50 and reference beams 51, and the detection beams 50 and the reference beams 51 are respectively transmitted to the beam expanding mechanism 3 and the detection mechanism 4; the beam expanding mechanism 3 expands the detection light beam 50 and emits the detection light beam to a preset detection area 60 on the loose body 6; the detection mechanism 4 receives the detection beam 50 reflected by the loose body 6, the detection beam 50 entering the detection mechanism 4 interferes with the reference beam 51, and an interference image is generated; finally, the detection mechanism 4 judges whether the loose body 6 in the detection area 60 has defects according to the interference image; if the interference fringes in the interference image are regular, it is indicated that the loose body 6 in the detection region 60 is not defective, and if the interference fringes in some of the interference images are irregular, it is indicated that the loose body 6 in the detection region 60 is defective.
Once the defect is generated, the deposition work is immediately stopped, so that the defect cannot be detected in the subsequent deposition process, and the loose body 6 which is formed into a defective product cannot be used; and the problem is found in the deposition process, the deposition can be stopped in time, the deposited material is removed, the remained core rod can still be reused, the raw material is greatly saved, and the quality of the optical fiber preform is also ensured.
Optionally, the beam expanding mechanism 3 includes a first beam expanding lens 30 and a first driver 31, and the first driver 31 is connected to the first beam expanding lens 30 and is configured to drive the first beam expanding lens 30 to rotate, so as to change a coverage of the detection beam 50 passing through the first beam expanding lens 30 and make the coverage not smaller than the size of the detection area 60.
Since the distance between the first beam expander 30 and the loose body 6 is fixed, the coverage of the first beam expander 30 can be changed only by changing the angle between the first beam expander 30 and the loose body 6, so that the first beam expander 30 can completely cover the detection area 60.
Preferably, the system further comprises a controller connected to the first driver 31 and configured to control the rotation angle of the first beam expander 30 via the first driver 31.
Further, the system further comprises a second expander lens 32 and a second driver 33, wherein the second driver 33 is connected to the second expander lens 32 and is used for driving the second expander lens 32 to rotate so as to change the coverage area of the reference beam 51.
By varying the coverage of the reference beam 51, the reference beam 51 is totally incident on the detection means 4 and interferes with the detection beam 50 in the detection means 4.
Further, the controller is also connected to the second driver 33 and is configured to control the rotation angle of the second expander lens 32 through the second driver 33 so that the rotation angle of the second expander lens 32 is equal to the rotation angle of the first expander lens 30.
The rotation angle of the second beam expander 32 is equal to that of the first beam expander 30, so that the incident angles of the reference light beam 51 reflected by the second beam expander 32 and the detection light beam 50 reflected by the loose body 6 are substantially the same.
Optionally, the beam splitter 2 has a transmission surface and a reflection surface, the transmission surface is used for transmitting a part of the laser beam 5 emitted by the laser generator 1 to the beam expanding mechanism 3, and the part of the laser beam is the detection beam 50; the reflecting surface is used to reflect the remaining part of the laser beam 5 to the detection means 4, and this part is the reference beam 51.
The laser generator 1 emits laser beams 5 to the beam splitter 2, and the transmission surface of the beam splitter 2 transmits a part of the laser beams 5 emitted by the laser generator 1 to the beam expanding mechanism 3; the reflecting surface of the beam splitter 2 reflects the rest part of the laser beam 5 to the detection mechanism 4; thereby achieving beam splitting of the laser beam 5.
Optionally, the system further comprises a mirror 8, and the mirror 8 is configured to reflect the reference beam 51 emitted from the beam splitter 2 to the detection mechanism 4.
Since the detection beam 50 transmitted by the beam splitter 2 and the reference beam 51 reflected by the beam splitter 2 need to be converged into the detection mechanism 4 finally, and the propagation direction of the detection beam 50 and the reference beam 51 after being separated from the beam splitter 2 is approximately 90 °, in order to save the floor area of the detection system, the mirror 8 needs to be used to change the propagation path of the reference beam 51, so as to reduce the loss of the reference beam 51 during propagation.
Further, the system further comprises a first convex lens 9, wherein the first convex lens 9 is located between the laser generator 1 and the beam splitter 2, and is used for focusing the laser beam 5 emitted by the laser generator 1 and then sending the focused laser beam to the beam splitter 2.
Further, the system further comprises a second convex lens 7, the second convex lens 7 is located between the beam splitter 2 and the beam expanding mechanism 3, and the second convex lens 7 is used for focusing the detection light beam 50 emitted by the beam splitter 2 and then sending the detection light beam to the beam expanding mechanism 3.
Further, defects include cracks, bulges, and debonding.
The types of defects can be distinguished through the shapes of interference fringes in the interference image, and a plurality of interference fringes are abnormal and have bulges, so that the detection area 60 of the loose body 6 is shown to be bulged; if the interference fringes are absent, the peeling of the detection area 60 of the loose body 6 is shown; several of the cross-stripes appeared as butterfly-spot-like stripes, indicating that the detection zone 60 of the loose body 6 was cracked.
In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
It is noted that, in the present application, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above description is merely exemplary of the present application and is presented to enable those skilled in the art to understand and practice the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A system for detecting a loose body based on laser interference imaging is characterized by comprising a laser generator (1), a beam splitter (2), a beam expanding mechanism (3) and a detection mechanism (4); wherein the content of the first and second substances,
the laser generator (1) is used for periodically emitting a laser beam (5);
the beam splitter (2) is used for splitting a laser beam (5) emitted by the laser generator (1) into a detection beam (50) and a reference beam (51), and transmitting the detection beam (50) and the reference beam (51) to the beam expanding mechanism (3) and the detection mechanism (4) respectively;
the beam expanding mechanism (3) is used for expanding the detection light beam (50) and emitting the detection light beam to a preset detection area (60) on the loose body (6);
the detection mechanism (4) is used for receiving a detection light beam (50) reflected by the loose body (6), so that the detection light beam (50) and the reference light beam (51) generate interference and generate an interference image; and the detection mechanism (4) is also used for judging whether the loose body (6) in the detection area (60) has defects or not according to the interference image.
2. The loose body detection system based on laser interference imaging as claimed in claim 1, wherein the beam expanding mechanism (3) comprises a first beam expanding lens (30) and a first driver (31), the first driver (31) is connected with the first beam expanding lens (30) and is used for driving the first beam expanding lens (30) to rotate, and the coverage range of the detection beam (50) passing through the first beam expanding lens (30) is changed, and the coverage range is not smaller than the size of the detection area (60).
3. The system for detecting loose bodies based on laser interference imaging as claimed in claim 2, further comprising a controller connected to the first driver (31) and configured to control the rotation angle of the first beam expander (30) through the first driver (31).
4. The system for detecting loose bodies based on laser interference imaging as claimed in claim 3, further comprising a second beam expander (32) and a second driver (33), wherein the second driver (33) is connected with the second beam expander (32) and is used for driving the second beam expander (32) to rotate so as to change the coverage of the reference beam (51).
5. The system for detecting loose bodies based on laser interference imaging as claimed in claim 4, wherein the controller is further connected with the second driver (33) and is configured to control the rotation angle of the second beam expander (32) through the second driver (33) so that the rotation angle of the second beam expander (32) is equal to the rotation angle of the first beam expander (30).
6. The system for detecting loose bodies based on laser interference imaging according to claim 1, wherein the beam splitter (2) has a transmission surface and a reflection surface, the transmission surface is used for transmitting a part of the laser beam (5) emitted by the laser generator (1) to the beam expanding mechanism (3), and the part of the laser beam is a detection beam (50); the reflecting surface is used for reflecting the rest part of the laser beam (5) to the detection mechanism (4), and the part is a reference beam (51).
7. The system for detecting loose bodies based on laser interference imaging according to claim 1, characterized in that the system further comprises a mirror (8), wherein the mirror (8) is used for reflecting the reference beam (51) emitted by the beam splitter (2) to the detection mechanism (4).
8. The system for detecting loose bodies based on laser interference imaging according to claim 1, further comprising a first convex lens (9), wherein the first convex lens (9) is located between the laser generator (1) and the beam splitter (2) and is used for focusing the laser beam (5) emitted by the laser generator (1) and then sending the focused laser beam to the beam splitter (2).
9. The system for detecting loose bodies based on laser interference imaging as claimed in claim 1, further comprising a second convex lens (7), wherein the second convex lens (7) is located between the beam splitter (2) and the beam expanding mechanism (3), and the second convex lens (7) is used for focusing the detection light beam (50) emitted by the beam splitter (2) and then sending the detection light beam to the beam expanding mechanism (3).
10. The system for detecting porosity based on laser interference imaging as claimed in claim 1, wherein the defects include cracks, bulges and peelings.
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| CN202011520273.0A CN112595720A (en) | 2020-12-21 | 2020-12-21 | System for detecting loose body based on laser interference imaging |
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| CN202011520273.0A CN112595720A (en) | 2020-12-21 | 2020-12-21 | System for detecting loose body based on laser interference imaging |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113329553A (en) * | 2021-06-11 | 2021-08-31 | 北京环境特性研究所 | Detection method and detection device for plasma density distribution |
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