CN112581562A - Pattern coloring method, electronic device, and computer-readable storage medium - Google Patents
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Abstract
A pattern rendering method, an electronic device, and a computer-readable storage medium are described herein. The pattern coloring method described herein includes: dividing a plurality of patterns included in the layout into a plurality of sub-networks based on distances between the patterns in the layout; coloring two patterns coupled to each other within each sub-network in different colors; and coloring the two patterns coupled to each other between the two sub-networks coupled to each other in the same color.
Description
Technical Field
Embodiments of the present disclosure relate generally to the field of semiconductor technology, and more particularly, to pattern coloring methods, electronic devices, and computer-readable storage media.
Background
As the distance between patterns in an integrated circuit decreases, the likelihood of the patterns in the layout colliding increases. The multi-patterning technique is one of the effective means for solving the pattern conflict. Multiple patterning techniques involve the disassembly of patterns in a layout into patterns in two or more photomasks. This disassembly involves the coloring of the pattern. Coloring two patterns in different colors means that the two patterns will be broken down to different photomasks, and coloring two patterns in the same color means that the two patterns will be arranged to the same photomask.
The complete pattern may be decomposed into two pattern parts, and the two pattern parts may be stitched or coupled with an overlap region. If the link coupling the two pattern parts that are broken by the overlap area is an optional link, this means that the two pattern parts may be colored in different colors or in the same color in order to help avoid coloring conflicts when coloring the entire pattern.
It is desirable to provide improved solutions for coloring patterns to avoid color conflict optimizations based on cost.
Disclosure of Invention
Embodiments of the present disclosure provide a pattern coloring method, an electronic device, and a computer-readable storage medium capable of reducing stitching of patterns colored in different colors to optimize coloring of the patterns in terms of cost.
In a first aspect, a method of coloring a pattern is provided. The method comprises the following steps: dividing a plurality of patterns included in the layout into a plurality of sub-networks based on distances between the patterns in the layout; coloring two patterns coupled to each other within each sub-network in different colors; and coloring the two patterns coupled to each other between the two sub-networks coupled to each other in the same color.
In some embodiments, dividing the plurality of patterns included in the layout into a plurality of sub-networks includes: if the end-to-end distance between a first pattern and a second pattern is less than or equal to a specification value, dividing the first pattern and the second pattern into the same sub-network; and if the end-to-end distance between a first pattern and a second pattern is greater than the specification value, dividing the first pattern and the second pattern into different sub-networks.
In some embodiments, coloring the two patterns coupled to each other within the respective sub-networks in different colors comprises: each two patterns coupled to each other in each sub-network are colored in a different first color and second color.
In some embodiments, coloring two patterns coupled to each other between two sub-networks coupled to each other in the same color comprises: if a third pattern in a first sub-network and a fourth pattern in a second sub-network coupled to each other are colored in different colors, the coloring of all the patterns in the second sub-network is altered such that the fourth pattern is colored in the same color as the third pattern and the two patterns in the second sub-network coupled to each other are colored in different colors.
In some embodiments, coloring two patterns coupled to each other between two sub-networks coupled to each other in the same color comprises: if a third pattern in a first sub-network and a fourth pattern in a second sub-network coupled to each other are colored in the same color, keeping all patterns in the second sub-network colored so that the fourth pattern is colored in the same color as the third pattern.
In some embodiments, altering all patterned colorations in the second subnetwork comprises: flipping all of the patterned colorations in the second subnetwork such that the fourth pattern of colorations changes from a third color to a fourth color, and a fifth pattern of colorations coupled with the fourth pattern changes from the fourth color to the third color.
In some embodiments, dividing the plurality of patterns included in the layout into a plurality of sub-networks includes: with breadth-first search, two patterns that are less than or equal to a specification value from each other are classified into the same sub-network, and two patterns that are greater than the specification value from each other are classified into different sub-networks.
In some embodiments, the plurality of patterns are colored in two different colors based on a double patterning technique.
In a second aspect, an electronic device is provided. The electronic device includes: a processing unit; a memory coupled to the processing unit and including a program stored thereon, which when executed by the processing unit, causes the electronic device to perform the method.
In a third aspect, a computer-readable storage medium is provided. The computer-readable storage medium has stored thereon machine-executable instructions that, when executed by at least one processor, cause the at least one processor to implement the above-described method.
According to embodiments of the present disclosure, a scheme for coloring a pattern can significantly reduce stitching of patterns colored in different colors, thereby enabling optimization of coloring of the pattern in terms of cost.
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The above and other objects, features and advantages of the present disclosure will become more apparent by describing in more detail exemplary embodiments thereof with reference to the attached drawings. In exemplary embodiments of the present disclosure, like reference numerals generally represent like parts. In the drawings:
fig. 1 is a flow chart illustrating a pattern coloring method according to an embodiment of the present disclosure;
FIG. 2 is a schematic diagram illustrating the partitioning of patterns into sub-networks, according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram illustrating coloring patterns coupled to each other in the same sub-network, according to an embodiment of the present disclosure;
FIG. 4 is a schematic diagram illustrating coloring of patterns in different sub-networks that are coupled to each other, according to an embodiment of the present disclosure; and
FIG. 5 is a schematic block diagram illustrating an electronic device for implementing embodiments of the present disclosure.
Detailed Description
Preferred embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present disclosure are illustrated in the accompanying drawings, it is to be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
The term "include" and variations thereof as used herein is meant to be inclusive in an open-ended manner, i.e., "including but not limited to". Unless specifically stated otherwise, the term "or" means "and/or". The term "based on" means "based at least in part on". The terms "one example embodiment" and "one embodiment" mean "at least one example embodiment". The term "another embodiment" means "at least one additional embodiment". The terms "first," "second," and the like may refer to different or the same object. Other explicit and implicit definitions are also possible below.
It is known to decompose and stitch individual patterns based on Design Rule Checking (DRC). Further, in coloring the patterns, some of the two patterns coupled to each other can be colored in either the same color or different colors. In this case, the two patterns may be referred to as being linked or coupled to each other via an optional link. On the other hand, in the case where two patterns can only be colored in different colors, the two patterns may be said to be linked or coupled to each other via a must link (must link).
With regard to the selectable links, the user may desire to color the two patterns in as different colors as possible so that the color density may be adjusted. However, for some alternative links, coupling two differently colored patterns to each other may increase the cost in the manufacturing process.
At least to address the above issues, embodiments of the present disclosure provide improvements for coloring patterns. According to an embodiment, the plurality of patterns included in the layout are divided into a plurality of sub-networks based on a distance between the patterns in the layout, two patterns coupled to each other within the respective sub-networks are colored in different colors, and two patterns coupled to each other between the two sub-networks coupled to each other are colored in the same color. In this way, two patterns in two sub-networks coupled to each other by a selectable link may be colored the same color. In this way, stitching of differently colored patterns is reduced, thereby reducing costs in the manufacturing process.
In the solution according to an embodiment of the present disclosure, two patterns coupled to each other between two sub-networks coupled to each other may be colored according to a coupling form. If the coupling modality is via overlay/stitching, optimization is performed to color the two patterns in the same color. If the user specifies different coupling forms and should color in different colors, the solution according to embodiments of the present disclosure may also perform optimization to suit the needs to color the two patterns in different colors.
Various example embodiments of the disclosure will be described in detail below with reference to various embodiments in conjunction with the following figures.
Fig. 1 is a flow chart illustrating a pattern coloring method 100 according to an embodiment of the present disclosure.
At block 102, a plurality of patterns included in the layout are divided into a plurality of sub-networks based on distances between the patterns in the layout.
In some embodiments, a design layout of a semiconductor device includes a plurality of patterns, and the plurality of layouts are to be disassembled into patterns in two or more photomasks based on a multiple patterning technique. In some embodiments, the pattern of each level of the design layout is decomposed into patterns in two photomasks based on a double patterning technique.
In some embodiments, two patterns that are less than or equal to a predetermined specification value from each other are divided into the same sub-network, and two patterns that are greater than the specification value from each other are divided into different sub-networks. In some embodiments, two patterns are divided into the same sub-network if the end-to-end distance between the two patterns is less than or equal to a specification value, and the two patterns are divided into different sub-networks if the end-to-end distance between the two patterns is greater than the specification value. Each sub-network may comprise one or more patterns. In this way, the patterns in the layout are divided into sub-networks based on the distance between each other. In this way, the shading limits can be imposed individually on each subnetwork in order to meet the shading requirements of the entire pattern in the layout.
In some embodiments, starting with a first pattern in the layout, the distance between the first pattern and its neighboring patterns is determined. If the distance between the second pattern and the first pattern is less than or equal to the specification value, the second pattern is divided into the same first sub-networks as the first pattern. If the distance between the third pattern and the first pattern is greater than the specification value, the third pattern is divided into a second sub-network different from the first pattern. Then, the distance between the second pattern and its neighboring pattern is determined. If the distance between the fourth pattern and the second pattern is less than or equal to the specification value, the fourth pattern is divided into the first sub-networks. If the distance between the fifth pattern and the second pattern is greater than a specification value, and if the distance between the fifth pattern and the third pattern is less than or equal to the specification value, the fifth pattern is divided into a second sub-network. If the distance between the sixth pattern and the second pattern is greater than the specification value, and if the distance between the sixth pattern and the third pattern is greater than the specification value, the sixth pattern is divided into a third sub-network. And so on. In some embodiments, patterns in the layout are searched using a Breadth First Search (BFS) method.
At block 104, two patterns coupled to each other within each sub-network are colored in different colors.
In some embodiments, the coloring of the pattern is performed in units of sub-networks for each sub-network. In some embodiments, the respective patterns coupled to each other are determined in the first sub-network, and each two patterns coupled to each other in the first sub-network are colored in a different color. Here, the patterns in the sub-networks are coupled to each other means that every two patterns (polygons) are specified as coupled due to a rule set by a user. In some embodiments, two patterns are coupled to each other, meaning that the two patterns can be connected to each other via a connection pattern, i.e., physically coupled, or the two patterns can be component patterns of a complete functional pattern, i.e., logically coupled. In addition, the respective patterns coupled to one another are determined in the second sub-network, and each two patterns coupled to one another in the second sub-network are colored in a different color. The coloring of the pattern in the first sub-network and the coloring of the pattern in the second sub-network may be performed at substantially the same time or at different times.
In some embodiments, the patterns in the various sub-networks are colored in a plurality of different colors based on a multiple patterning technique. In some embodiments, each two patterns coupled to each other in each sub-network are colored in a first color and a second color, the first color being different from the second color, based on a double patterning technique.
In some embodiments, the two patterns are coupled to each other via a must-link means that the coupled two patterns must be colored in different colors. Furthermore, the two patterns being coupled to each other via the selectable link means that the coupled two patterns are colored in the same color or in different colors. Coupling two patterns to each other via a selectable link may be referred to as the two patterns being stitched. In each sub-network, the two patterns are coupled to each other via a necessary link.
In some embodiments, after the coloring of the patterns is performed for each of the subnetworks, the coloring of the patterns in the layout is preliminarily completed to obtain a preliminarily colored layout. In the preliminary colored layout, every two patterns coupled to each other in each sub-network are colored in a different color, i.e., coupled to each other via a must-link. After performing the coloring for the respective sub-networks, for two patterns coupled to each other in two sub-networks coupled to each other, the two patterns may be colored in the same color or may be colored in different colors, i.e., coupled to each other via an optional link. Thus, two patterns coupled via a link are required to be divided into the same sub-network, and two patterns coupled to each other in the same sub-network are colored in different colors. In this way, coloring conflicts in the preliminary colored layout are avoided and coloring requirements are met. Furthermore, two patterns coupled via selectable links are divided into different sub-networks, the coloring of the two patterns not affecting each other. In this way, the preliminary rendered layout may have the possibility of varying the pattern rendering, with design flexibility.
In some embodiments, if there is a pattern in a certain sub-network that does not couple to a pattern in that sub-network, that pattern may be coupled to patterns in other sub-networks via selectable links. Thus, the coloring of the pattern is not uniquely determined. In some embodiments, in the preliminary colored layout, the pattern is colored in any possible color.
At block 106, two patterns coupled to each other between two sub-networks coupled to each other are colored in the same color.
In some embodiments, the coloring of two patterns coupled to each other between two sub-networks coupled to each other is considered after the coloring of the patterns within the respective sub-networks is completed. Here, the two sub-networks being coupled to each other means that the pattern in one sub-network is coupled to the pattern in the other sub-network. In the preliminary coloring layout, since coloring restrictions are imposed only for the respective sub-networks, respectively, coloring of two patterns coupled to each other between two sub-networks coupled to each other may be the same or may be different. According to an embodiment of the present invention, the two patterns are then colored in the same color to obtain a finished colored layout.
In some embodiments, if a first pattern in a first sub-network and a second pattern in a second sub-network coupled to each other are colored in different colors, then the coloring of all the patterns in the second sub-network is altered such that the second pattern is colored in the same color as the first pattern and the two patterns in the second sub-network coupled to each other are colored in different colors. In this way, two patterns coupled to each other in two sub-networks coupled to each other are colored in the same color while satisfying the coloring restriction within each sub-network.
In some embodiments, the plurality of patterns in the layout are colored in two different colors based on a double patterning technique. In this case, if the first pattern in the first sub-network and the second pattern in the second sub-network coupled to each other are colored in different colors, the coloring of all the patterns in the second sub-network is reversed so that the coloring of the second pattern changes from the second color to the same first color as the first pattern, and the coloring of the third pattern coupled to the second pattern in the second sub-network changes from the first color to the second color.
In some embodiments, if a first pattern in a first sub-network and a second pattern in a second sub-network coupled to each other are colored in the same color, the coloring of all the patterns in the second sub-network is maintained such that the second pattern is colored in the same color as the first pattern.
In some embodiments, two patterns in two sub-networks coupled to each other via a selectable link are eventually colored in the same color to generate a finished colored layout. In a finished colored layout, selectable links are presented as links between patterns that are colored in the same color. In this way, stitching of patterns colored in different colors is reduced, and stitching of patterns colored in the same color is increased. In this way, the cost in terms of the manufacturing process is reduced, and the reliability in terms of the manufacturing process is increased.
According to an embodiment of the present disclosure, patterns that need to be coupled via an essential link are divided into the same sub-networks based on the distance between the patterns, and are colored separately for each sub-network, so that two patterns coupled to each other in a sub-network are colored in different colors. After obtaining the preliminary colored layout, the patterns coupled to each other in the two sub-networks coupled to each other are colored in the same color while keeping a limit that the two patterns coupled to each other within the respective sub-networks are colored in different colors, according to a characteristic that the coloring of the patterns coupled via the selectable link can be changed, thereby obtaining a finished colored layout. In this manner, completing the colored layout may reduce stitching of patterns colored in different colors, reduce costs in manufacturing, and increase reliability in manufacturing.
Fig. 2 is a schematic diagram illustrating the partitioning of patterns into sub-networks according to an embodiment of the present disclosure. As shown in fig. 2, the design layout 200 may include pattern a through pattern I.
Referring to fig. 2, patterns a to I are divided into first to third sub-networks 202 to 206 based on distances between the patterns. In some embodiments, pattern a, pattern B, and pattern C are partitioned into a first sub-network 202, pattern D, pattern E, and pattern F are partitioned into a second sub-network 204, and pattern G, pattern H, and pattern I are partitioned into a third sub-network 206 based on the distance between the ends of the patterns. In some embodiments, each pattern in the design layout 200 is searched by BFS.
In the first sub-network 202, the distance between pattern a and pattern B and the distance between pattern B and pattern C are both less than or equal to a predetermined specification value. In the second subnetwork 204, the distance between pattern D and pattern E and the distance between pattern E and pattern F are both less than or equal to the specification value. In the third sub-network 206, the distance between the pattern G and the pattern H and the distance between the pattern H and the pattern I are both smaller than or equal to the specification value.
The distance between each of the patterns a to C in the first sub-network 202 and each of the patterns D to F in the second sub-network 204 is larger than a specification value. The distance between each of the patterns D to F in the second sub-network 204 and each of the patterns G to I in the third sub-network 206 is larger than a specification value.
In the first subnetwork 202, pattern a is coupled with pattern B, and pattern B is coupled with pattern C. In the second subnetwork 204, pattern D is coupled with pattern E, and pattern E is coupled with pattern F. In the third sub-network 206, pattern G is coupled with pattern H, and pattern H is coupled with pattern I.
The first sub-network 202 is coupled to a second sub-network 204 and the second sub-network 204 is coupled to a third sub-network 206. Pattern C in the first sub-network 202 couples with pattern D in the second sub-network 204, and pattern F in the second sub-network 204 couples with pattern G in the third sub-network 206.
According to an embodiment of the present disclosure, the patterns a to I shown in fig. 2 are divided into the first to third sub-networks 202 to 206 based on the distance between the patterns by the block 102 described with reference to fig. 1. In this manner, coloring constraints can be imposed on the first through third subnetworks 202 through 206, respectively, in order to meet the coloring requirements of the patterns in the design layout 200.
Fig. 3 is a schematic diagram illustrating coloring patterns coupled to each other in the same sub-network according to an embodiment of the present disclosure.
Referring to fig. 3, for each of the first through third sub-networks 202 through 206, two patterns coupled to each other in the respective sub-network are colored in different colors. For the first subnetwork 202, pattern a and pattern B are colored in different colors, and pattern B and pattern C are colored in different colors. For the second subnetwork 204, pattern D and pattern E are colored in different colors, and pattern E and pattern F are colored in different colors. For the third sub-network 206, pattern G and pattern H are colored in different colors, and pattern H and pattern I are colored in different colors.
In some embodiments, the individual patterns are colored in a dichotomy. In some embodiments, for the first subnetwork 202, pattern a and pattern C are colored in a first color, and pattern B is colored in a second color different from the first color. For the second subnetwork 204, pattern D and pattern F are colored in the second color, and pattern E is colored in the first color. For the third subnetwork 206, pattern G and pattern I are colored in a first color, and pattern H is colored in a second color.
After the pattern coloring is performed separately for each of the subnetworks, a preliminary colored layout 300 as shown in fig. 3 is obtained. In the first sub-network 202, pattern a and pattern B are coupled to each other via an obligatory link, and pattern B and pattern C are coupled to each other via an obligatory link. In the second sub-network 204, pattern D and pattern E are coupled to each other via an obligatory link, and pattern E and pattern F are coupled to each other via an obligatory link. In the third sub-network 206, the pattern G and the pattern H are coupled to each other via the necessary link, and the pattern H and the pattern I are coupled to each other via the necessary link.
Further, in preliminary rendered layout 300, pattern C in first subnetwork 202 and pattern D in second subnetwork 204 are coupled to each other via a selectable link, and pattern F in second subnetwork 204 and pattern G in third subnetwork 206 are coupled via a selectable link. Since coloring for the pattern in the first sub-network 202 and the pattern in the second sub-network 204 are independent of and do not affect each other, the pattern C in the first sub-network 202 and the pattern D in the second sub-network 204 may be colored in the same color or may be colored in different colors after the pattern coloring in the sub-networks is completed. Similarly, pattern F in the second sub-network 204 and pattern G in the third sub-network 206 may be colored in the same color or may be colored in different colors.
In the embodiment of the preliminary colored layout 300 shown in FIG. 3, pattern C and pattern D are colored in different colors, and pattern F and pattern G are colored in different colors. However, embodiments of the present disclosure are not so limited, and in other embodiments of the preliminary colored layout 300, pattern C and pattern D may be colored in the same color, and/or pattern F and pattern G may be colored in the same color.
According to an embodiment of the present disclosure, the two patterns coupled to each other in each of the first through third sub-networks 202 through 206 are colored in different colors by the block 104 described with reference to fig. 1, thereby obtaining the preliminary colored layout 300 shown in fig. 3. In this way, the coloring requirements of the patterns coupled via the must-link are satisfied, and coloring conflicts in the preliminary colored layout are avoided. Furthermore, since there are patterns in the preliminary colored layout that are coupled via optional links, there is a possibility of changing the coloring of the patterns in the preliminary colored layout, thereby having design flexibility.
Fig. 4 is a schematic diagram illustrating coloring of patterns in different subnetworks coupled to each other according to an embodiment of the present disclosure.
Referring to fig. 4, two patterns coupled to each other of two sub-networks coupled to each other among the first to third sub-networks 202 to 206 are colored in the same color. Pattern C in the first sub-network 202 and pattern D in the second sub-network 204 are colored in the same color, and pattern F in the second sub-network 204 and pattern G in the third sub-network 206 are colored in the same color.
In some embodiments, if pattern C in first subnetwork 202 and pattern D in second subnetwork 204 are colored in different colors in preliminary colored layout 300, the coloring of pattern D, pattern E, and pattern F in second subnetwork 204 is altered such that pattern D is colored in the same color as pattern C, and pattern E is colored in a different color than pattern D, and pattern F is colored in a different color than pattern E. Alternatively, if pattern F in the second subnetwork 204 and pattern G in the third subnetwork 206 are colored in different colors in the preliminary colored layout 300, the coloring of pattern D, pattern E, and pattern F in the second subnetwork 204 is altered such that pattern F is colored in the same color as pattern G, and pattern E is colored in a different color than pattern F, and pattern D is colored in a different color than pattern E. In this way, the finished colored layout 400 as shown in fig. 4 is obtained.
In some embodiments, the individual patterns are colored in a dichotomy. If pattern C is colored in a first color and pattern D is colored in a second color in preliminary colored layout 300, the coloring of pattern D, pattern E, and pattern F in second subnetwork 204 are reversed such that the coloring of pattern D changes from the second color to the first color, the coloring of pattern E changes from the first color to the second color, and the coloring of pattern F changes from the second color to the first color. Alternatively, if pattern F is colored in the second color and pattern G is colored in the first color in preliminary colored layout 300, the coloring of pattern D, pattern E, and pattern F in second subnetwork 204 are reversed such that the coloring of pattern F changes from the second color to the first color, the coloring of pattern E changes from the first color to the second color, and the coloring of pattern D changes from the second color to the first color.
In some embodiments, if the second subnetwork 204 is coupled between the first subnetwork 202 and the third subnetwork 206, and pattern C and pattern D are colored in different colors and pattern F and pattern G are colored in different colors in the preliminary colored layout 300, then only the pattern coloring of the second subnetwork 204 may be altered such that pattern C and pattern D are colored in the same color and pattern F and pattern G are colored in the same color.
In some embodiments, if pattern C in first subnetwork 202 and pattern D in second subnetwork 204 are colored in the same color in preliminary colored layout 300, the coloring of pattern D, pattern E, and pattern F in second subnetwork 204 is maintained such that pattern D remains colored in the same color as pattern C and pattern E remains colored in a different color than pattern D and pattern F remains colored in a different color than pattern E. Alternatively, if pattern F in the second subnetwork 204 and pattern G in the third subnetwork 206 are colored in the same color in the preliminary colored layout 300, the coloring of pattern D, pattern E, and pattern F in the second subnetwork 204 is maintained such that pattern F remains colored in the same color as pattern G, and pattern E remains colored in a different color than pattern F, and pattern D remains colored in a different color than pattern E. In this way, the finished colored layout 400 as shown in fig. 4 is obtained as well.
In some embodiments, if the second subnetwork 204 is coupled between the first subnetwork 202 and the third subnetwork 206, and pattern C and pattern D are colored in the same color and pattern F and pattern G are colored in different colors in the preliminary colored layout 300, the pattern coloring of the third subnetwork 206 can be altered while keeping the pattern coloring of the second subnetwork 204 such that pattern C and pattern D are colored in the same color and pattern F and pattern G are colored in the same color.
According to an embodiment of the present disclosure, by coloring two patterns coupled to each other of two sub-networks coupled to each other of the first sub-network 202 to the third sub-network 206 in the same color by the block 106 described with reference to fig. 1, a finished coloring pattern 400 shown in fig. 4 is obtained, wherein the selectable links are presented as links between the patterns colored in the same color. In this way, stitching of patterns colored in different colors is reduced and stitching of patterns colored in the same color is increased, thereby reducing costs and increasing reliability in the manufacturing process.
According to an embodiment of the present disclosure, patterns that need to be coupled via an essential link are divided into the same sub-networks based on the distance between the patterns, and are colored separately for each sub-network, so that two patterns coupled to each other in a sub-network are colored in different colors. Subsequently, the patterns coupled to each other in the two sub-networks coupled to each other are colored in the same color while keeping the two patterns coupled to each other within the respective sub-networks colored in different colors. In this way, it is possible to effectively reduce stitching of patterns colored in different colors, reduce the cost in terms of manufacturing, and increase the reliability in terms of manufacturing.
Fig. 5 is a schematic block diagram illustrating an electronic device 500 for implementing embodiments of the present disclosure. As shown in fig. 5, device 500 includes a Central Processing Unit (CPU)501 that may perform various appropriate actions and processes in accordance with computer program instructions stored in a Read Only Memory (ROM)502 or loaded from a storage unit 508 into a Random Access Memory (RAM) 503. In the RAM 503, various programs and data necessary for the operation of the electronic apparatus 500 may also be stored. The CPU 501, ROM 502, and RAM 503 are connected to each other via a bus 504. An input/output (I/O) interface 505 is also connected to bus 504.
A number of components in the device 500 are connected to the I/O interface 505, including: an input unit 506 such as a keyboard, a mouse, or the like; an output unit 507 such as various types of displays, speakers, and the like; a storage unit 508, such as a magnetic disk, optical disk, or the like; and a communication unit 509 such as a network card, modem, wireless communication transceiver, etc. The communication unit 509 allows the device 500 to exchange information/data with other devices through a computer network such as the internet and/or various telecommunication networks.
Various processes and processes described above, such as method 100, may be performed by processing unit 501. For example, in some embodiments, the method 100 may be implemented as a computer software program tangibly embodied in a machine-readable medium, such as the storage unit 508. In some embodiments, part or all of the computer program may be loaded and/or installed onto the device 500 via the ROM 502 and/or the communication unit 509. When the computer program is loaded into RAM 503 and executed by CPU 501, one or more steps of method 100 described above may be performed.
Aspects in accordance with embodiments of the present disclosure may be methods, apparatus, systems, and/or computer program products. The computer program product may include a computer-readable storage medium having computer-readable program instructions embodied thereon for carrying out various aspects of the present disclosure. The computer readable storage medium may be a tangible device that can hold and store the instructions for use by the instruction execution device. The computer-readable program instructions may be downloaded to the respective computing/processing device from a computer-readable storage medium, or to an external computer or external storage device via a network, such as the internet, a local area network, a wide area network, and/or a wireless network.
Having described embodiments of the present disclosure, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (10)
1. A method of coloring a pattern, comprising:
dividing a plurality of patterns included in the layout into a plurality of sub-networks based on distances between the patterns in the layout;
coloring two patterns coupled to each other within each sub-network in different colors; and
two patterns that couple to each other between two sub-networks that are coupled to each other are colored in the same color.
2. The pattern coloring method according to claim 1, wherein dividing the plurality of patterns included in the layout into the plurality of sub-networks comprises:
if the end-to-end distance between a first pattern and a second pattern is less than or equal to a specification value, dividing the first pattern and the second pattern into the same sub-network; and
if the end-to-end distance between a first pattern and a second pattern is greater than the specification value, the first pattern and the second pattern are divided into different sub-networks.
3. The pattern coloring method of claim 1, wherein coloring two patterns coupled to each other within respective sub-networks in different colors comprises:
each two patterns coupled to each other in each sub-network are colored in a different first color and second color.
4. The pattern coloring method according to any one of claims 1 to 3, wherein coloring two patterns coupled to each other between two sub-networks coupled to each other in the same color comprises:
acquiring coloring information of a third pattern in the first sub-network and a fourth pattern in the second sub-network coupled to each other;
if the third pattern and the fourth pattern are colored in different colors, altering the coloring of all patterns in the second sub-network such that the fourth pattern is colored in the same color as the third pattern and two patterns in the second sub-network that are coupled to each other are colored in different colors.
5. The pattern coloring method according to any one of claims 1 to 3, wherein coloring two patterns coupled to each other between two sub-networks coupled to each other in the same color comprises:
if a third pattern in a first sub-network and a fourth pattern in a second sub-network coupled to each other are colored in the same color, keeping all patterns in the second sub-network colored so that the fourth pattern is colored in the same color as the third pattern.
6. The pattern coloring method of claim 4, wherein altering all pattern colorations in the second sub-network comprises:
flipping all of the patterned colorations in the second subnetwork such that the fourth pattern of colorations changes from a third color to a fourth color, and a fifth pattern of colorations coupled with the fourth pattern changes from the fourth color to the third color.
7. The pattern coloring method according to claim 1, wherein dividing the plurality of patterns included in the layout into the plurality of sub-networks comprises:
with breadth-first search, two patterns that are less than or equal to a specification value from each other are classified into the same sub-network, and two patterns that are greater than the specification value from each other are classified into different sub-networks.
8. The pattern coloring method according to claim 1, wherein the plurality of patterns are colored in two different colors based on a double patterning technique.
9. An electronic device, comprising:
a processing unit;
a memory coupled to the processing unit and including a program stored thereon, which when executed by the processing unit, causes the electronic device to perform the pattern coloring method of any one of claims 1-8.
10. A computer-readable storage medium having stored thereon machine-executable instructions that, when executed by at least one processor, cause the at least one processor to implement the pattern coloring method of any one of claims 1 to 8.
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