CN112578553A - Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror - Google Patents
Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror Download PDFInfo
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- CN112578553A CN112578553A CN202011472915.4A CN202011472915A CN112578553A CN 112578553 A CN112578553 A CN 112578553A CN 202011472915 A CN202011472915 A CN 202011472915A CN 112578553 A CN112578553 A CN 112578553A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention discloses a micro-mirror fine adjustment device driven by photoelectric piezoelectric and electrostatic composite, which comprises a coarse moving platform, y-direction slide rails are symmetrically arranged on the coarse motion platform, a first slide bar is arranged in each Y-direction slide rail and is connected with the Y-direction fine tuning platform in a sliding manner through a first slide block, a Y-direction adjusting mechanism is arranged below the Y-direction fine adjustment platform and on the surface of the coarse movement platform, two ends of the Y-direction adjusting mechanism are fixedly connected to the surface of the coarse movement platform through a first fixed block, y-direction photoelectric ceramics are symmetrically arranged below the Y-direction adjusting mechanism and on the surface of the coarse movement table, the photoelectric ceramic displacement adjusting mechanism has the advantages that the photogenerated voltage effect of the photoelectric ceramic is utilized to convert light energy into electric energy, the inverse piezoelectric effect of the piezoelectric film on the piezoelectric film driver in the adjusting mechanism is utilized to convert the electric energy into mechanical energy, the displacement adjustment can be realized, the mechanism is simple and compact, and the response speed is higher.
Description
Technical Field
The invention relates to the technical field of micro-mirror fine adjustment driving, in particular to a micro-adjustment device of a photoelectric piezoelectric and electrostatic compound driving micro-mirror.
Background
The micro-mirror is widely applied to national defense and civil fields such as optical systems, micro-mechanical optical switches, precision measurement, medical imaging, biotechnology, aerospace and the like. In recent years, by providing a micromirror with driving devices having different functions, modulation of incident light intensity and phase and gating of an optical path can be realized, so that the micromirror has functions of optical switching, adaptive optical correction, and the like. The traditional micro-mirror workbench adopts mechanical transmission type driving of a precise screw rod pair, a rolling guide rail, a precise spiral wedge block mechanism, a turbine-concave wheel mechanism, a gear-lever type mechanism and the like, is difficult to successfully position at one time due to mechanical friction, clearance, creeping and the like, often needs to be subjected to micro-adjustment, has the defects of insufficient adaptability and the like for driving forms such as electric heating, electromagnetism and the like, and cannot be directly operated and controlled under a vacuum or specific operating environment, so that a photoelectric piezoelectric and electrostatic composite driving micro-mirror micro-adjustment device is provided.
Disclosure of Invention
The present invention is directed to a micro-adjustment device of a micro-mirror driven by photoelectric piezoelectric and electrostatic composite driving, so as to solve the problems mentioned in the background art.
In order to achieve the purpose, the invention provides the following technical scheme: a micro-mirror fine adjustment device driven by photoelectric piezoelectric and electrostatic compounds comprises a coarse movement platform, wherein Y-direction slide rails are symmetrically arranged on the coarse movement platform, first slide bars are arranged in the Y-direction slide rails and are in sliding connection with a Y-direction fine adjustment platform through first slide blocks, Y-direction adjustment mechanisms are symmetrically arranged below the Y-direction fine adjustment platform and positioned on the surface of the coarse movement platform, two ends of each Y-direction adjustment mechanism are fixedly connected to the surface of the coarse movement platform through first fixed blocks, Y-direction photoelectric ceramics are symmetrically arranged below the Y-direction adjustment mechanisms and positioned on the surface of the coarse movement platform, X-direction slide rails are symmetrically arranged on the Y-direction fine adjustment platform, second slide bars are arranged in the X-direction slide rails and are in sliding connection with the X-direction fine adjustment platform through second slide blocks, and X-direction adjustment mechanisms are arranged on the left side of the X-direction fine adjustment platform and positioned on the surface of the Y-direction fine adjustment platform, x is to adjustment mechanism's both ends through second fixed block fixed connection Y to the fine setting platform on the surface, X is to adjustment mechanism's left side and lie in Y to the fine setting platform on the surface symmetry be equipped with X to photoelectricity pottery, X is to fine setting platform be equipped with micromirror every single move adjustment mechanism on the surface.
Preferably, the Y-direction adjusting mechanism includes first fixed support rods, the number of the first fixed support rods is 2, the two first fixed blocks are respectively and fixedly connected with one ends of the two first fixed support rods, the other ends of the first fixed support rods are fixedly connected with the first connecting block through first elastic rods, the opposite ends of the two first connecting blocks are rotatably connected with the first moving block through first hinge pins, the upper surface of the first moving block is fixedly connected with one end of a Y-direction flexible push rod, the other end of the Y-direction flexible push rod is fixedly connected with the Y-direction fine adjustment platform, and the lower surfaces of the two first fixed support rods are symmetrically provided with Y-direction piezoelectric film drivers.
Preferably, the Y-direction photoelectric ceramic is electrically connected with the Y-direction piezoelectric thin film driver.
Preferably, the X-direction adjusting mechanism includes second fixed support rods, the number of the second fixed support rods is 2, the two second fixed blocks are respectively and fixedly connected with one ends of the two second fixed support rods, the other ends of the second fixed support rods are fixedly connected with a second connecting block through second elastic rods, the opposite ends of the two second connecting blocks are rotatably connected with a second moving block through second hinge pins, the right side surface of the second moving block is fixedly connected with one end of an X-direction flexible push rod, the other end of the X-direction flexible push rod is fixedly connected with an X-direction fine adjustment platform, and the left side surfaces of the two second fixed support rods are symmetrically provided with X-direction piezoelectric thin film drivers.
Preferably, the X-direction photoelectric ceramic is electrically connected with the X-direction piezoelectric thin film driver.
Preferably, micro mirror every single move adjustment mechanism includes the speculum, the rear surface fixedly connected with pivot of speculum, the both ends of pivot are rotated through the third fixed block and are connected on X is to finely tuning the platform, the upper and lower both ends of speculum are located X and are equipped with electrode one and electrode two respectively to finely tuning the front surface of platform, the below of speculum is located X and is equipped with every single move to adjust photoelectric ceramic on finely tuning the front surface of platform, every single move is adjusted photoelectric ceramic's one end electrode and electrode two, the speculum electricity is connected, every single move is adjusted photoelectric ceramic's the other end electrode and is connected with electrode one electricity.
Compared with the prior art, the invention has the beneficial effects that: a photoelectric piezoelectric and electrostatic composite driving micro-mirror fine adjustment device has the following advantages: the photoelectric ceramic is connected with the second electrode and the reflector at one end thereof, so that the photoelectric ceramic is provided with the same charge, and the other end of the photoelectric ceramic is connected with the first electrode, so that the photoelectric ceramic is provided with different charges.
Drawings
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic front view of the coarse motion stage of the present invention;
fig. 3 is a schematic front view of the Y-direction fine adjustment platform according to the present invention.
In the figure: 1-coarse motion table, 2-Y-direction slide rail, 3-first slide bar, 4-first slide block, 5-Y-direction fine adjustment platform, 6-first fixed block, 7-Y-direction photoelectric ceramic, 8-X-direction slide rail, 9-second slide bar, 10-second slide block, 11-X-direction fine adjustment platform, 12-second fixed block, 13-X-direction photoelectric ceramic, 14-first fixed support bar, 15-first elastic bar, 16-first connecting block, 17-first pin shaft, 18-first movable block, 19-Y-direction flexible push rod, 20-Y-direction piezoelectric film driver, 21-second fixed support bar, 22-second elastic bar, 23-second connecting block, 24-second pin shaft, 25-second movable block, 26-X-direction flexible push rod, 27-X direction piezoelectric film driver, 28-reflector, 29-rotating shaft, 30-third fixed block, 31-electrode I, 32-electrode II and 33-pitching adjusting photoelectric ceramic.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a micro-adjusting device of a photoelectric piezoelectric and electrostatic compound drive micro-mirror comprises a coarse movement platform 1, wherein a Y-direction slide rail 2 is symmetrically arranged on the coarse movement platform 1, a first slide bar 3 is arranged in the Y-direction slide rail 2, the first slide bar 3 is in sliding connection with a Y-direction fine adjustment platform 5 through a first slide block 4, a Y-direction adjusting mechanism is arranged below the Y-direction fine adjustment platform 5 and on the surface of the coarse movement platform 1, two ends of the Y-direction adjusting mechanism are fixedly connected on the surface of the coarse movement platform 1 through a first fixed block 6, Y-direction photoelectric ceramics 7 are symmetrically arranged below the Y-direction adjusting mechanism and on the surface of the coarse movement platform 1, an X-direction slide rail 8 is symmetrically arranged on the Y-direction fine adjustment platform 5, a second slide bar 9 is arranged in the X-direction slide rail 8, the second slide bar 9 is in sliding connection with an X-direction fine adjustment platform 11 through a second slide block 10, an X-direction fine adjustment mechanism is arranged on the left side of the X-direction fine adjustment platform 11 and on, x passes through 12 fixed connection at the both ends of second fixed block to adjustment mechanism and is on the surface to Y to fine setting platform 5, X is to adjustment mechanism's left side and lie in Y to fine setting platform 5 the symmetry on the surface be equipped with X to photoelectric ceramic 13, X is to fine setting platform 11 be equipped with micromirror every single move adjustment mechanism on the surface, through being equipped with Y to adjustment mechanism and X to adjustment mechanism, makes the Y of device better to displacement and X to displacement effect, through the photovoltage effect that utilizes photoelectric ceramic, makes the light energy turn into the electric energy, through the converse piezoelectric effect who utilizes piezoelectric film on the piezoelectric film driver among the adjustment mechanism, makes the electric energy transform into mechanical energy, can realize displacement regulation, and the mechanism is simple compact, and response speed is faster.
Specifically, the Y-direction adjusting mechanism includes first fixed support rods 14, the number of the first fixed support rods 14 is 2, the two first fixed blocks 6 are respectively and fixedly connected with one end of each of the two first fixed support rods 14, the other end of each of the first fixed support rods 14 is fixedly connected with a first connecting block 16 through a first elastic rod 15, the opposite end of each of the two first connecting blocks 16 is rotatably connected with a first moving block 18 through a first pin 17, the upper surface of each of the first moving blocks 18 is fixedly connected with one end of a Y-direction flexible push rod 19, the other end of the Y-direction flexible push rod 19 is fixedly connected with the Y-direction fine adjustment platform 5, and Y-direction piezoelectric thin film drivers 20 are symmetrically arranged on the lower surfaces of the two first fixed support rods 14.
Specifically, the Y-direction optoelectric ceramic 7 is electrically connected to the Y-direction piezoelectric thin film driver 20.
Specifically, the X-direction adjusting mechanism includes second fixed support rods 21, the number of the second fixed support rods 21 is 2, two second fixed blocks 12 are respectively and fixedly connected with one ends of the two second fixed support rods 21, the other end of the second fixed support rods 21 is fixedly connected with a second connecting block 23 through a second elastic rod 22, the opposite ends of the two second connecting blocks 23 are rotatably connected with a second moving block 25 through a second pin shaft 24, one end of an X-direction flexible push rod 26 is fixedly connected to the right side surface of the second moving block 25, the other end of the X-direction flexible push rod 26 is fixedly connected with the X-direction fine adjustment platform 11, and X-direction piezoelectric thin film drivers 27 are symmetrically arranged on the left side surfaces of the two second fixed support rods 21.
Specifically, the X-direction photoelectric ceramic 13 is electrically connected to the X-direction piezoelectric thin film driver 27.
Specifically, the micro-mirror pitching adjustment mechanism comprises a reflecting mirror 28, a rotating shaft 29 is fixedly connected to the rear surface of the reflecting mirror 28, two ends of the rotating shaft 29 are rotatably connected to an X-direction fine adjustment platform 11 through a third fixing block 30, a first electrode 31 and a second electrode 32 are respectively arranged at the upper end and the lower end of the reflecting mirror 28 and positioned on the front surface of the X-direction fine adjustment platform 11, a pitching adjustment photoelectric ceramic 33 is arranged below the reflecting mirror 28 and positioned on the front surface of the X-direction fine adjustment platform 11, one end electrode of the pitching adjustment photoelectric ceramic 33 is electrically connected with the second electrode 32 and the reflecting mirror 28, the other end electrode of the pitching adjustment photoelectric ceramic 33 is electrically connected with the first electrode 31, the two electrodes 32 and the reflecting mirror 28 in the pitching adjustment mechanism have the same charge, the first electrode 31 has different charges, and under the electrostatic adsorption effect, the pitching adjustment of the reflector 28 is realized, and the photoelectric ceramic is arranged, so that the light-operated non-contact driving can be realized, and the device is suitable for various medium environments.
The working principle is as follows: the invention converts light energy into electric energy by utilizing the photoproduction voltage effect of the photoelectric ceramic, the fixed supporting rod is deformed by utilizing the inverse piezoelectric effect of the piezoelectric film on the piezoelectric film driver in the adjusting mechanism, the moving block is moved towards the fine adjustment platform by the elastic column, the connecting block and the pin shaft, the fine adjustment platform is pushed by the flexible push rod on the moving block, the fine adjustment platform slides on the sliding rod in the sliding rail by the sliding block, the electric energy is converted into mechanical energy, the displacement adjustment of the device is realized, the mechanism is simple and compact, the response speed is higher, the Y-direction displacement and the X-direction displacement of the device are better by arranging the Y-direction adjusting mechanism and the X-direction adjusting mechanism, and one end of the pitching adjusting photoelectric ceramic 33 in the pitching adjusting mechanism is connected with the second electrode 32 and the reflecting mirror 28 by arranging the micromirror pitching adjusting mechanism, the other end of the pitching adjusting photoelectric ceramic 33 is connected with the first electrode 31, so that the pitching adjusting photoelectric ceramic has different charges, the pitching adjustment of the reflector 28 is realized under the action of electrostatic adsorption, and the photoelectric ceramic is arranged, so that the light-operated non-contact driving can be realized, and the pitching adjusting photoelectric ceramic is suitable for working in various medium environments.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The standard parts used in the invention can be purchased from the market, the special-shaped parts can be customized according to the description of the specification and the accompanying drawings, the specific connection mode of each part adopts conventional means such as bolts, rivets, welding and the like mature in the prior art, the machines, the parts and equipment adopt conventional models in the prior art, and the circuit connection adopts the conventional connection mode in the prior art, so that the detailed description is omitted.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a photoelectricity piezoelectricity static combined drive micro-mirror fine adjustment device, includes coarse motion platform (1), its characterized in that: the coarse motion platform is characterized in that a Y-direction sliding rail (2) is symmetrically arranged on the coarse motion platform (1), a first sliding rod (3) is arranged in the Y-direction sliding rail (2), the first sliding rod (3) is connected with the Y-direction fine tuning platform (5) in a sliding manner through a first sliding block (4), a Y-direction adjusting mechanism is arranged on the surface of the coarse motion platform (1) below the Y-direction fine tuning platform (5) and positioned at the coarse motion platform (1), two ends of the Y-direction adjusting mechanism are fixedly connected on the surface of the coarse motion platform (1) through a first fixing block (6), Y-direction photoelectric ceramics (7) are symmetrically arranged on the surface of the coarse motion platform (1) below the Y-direction adjusting mechanism and positioned at the Y-direction fine tuning platform (5), an X-direction sliding rail (8) is symmetrically arranged on the Y-direction fine tuning platform (5), a second sliding rod (9) is arranged in the X-direction sliding rail (8), and the second sliding rod (9) is connected with, x is to the left side of fine setting platform (11) and be located Y to fine setting platform (5) be equipped with X to adjustment mechanism on the surface, X passes through second fixed block (12) fixed connection at Y to fine setting platform (5) at the both ends of adjustment mechanism on the surface, X is to adjustment mechanism's left side and be located Y to fine setting platform (5) the symmetry on the surface be equipped with X to photoelectricity pottery (13), X is to the last micro-mirror every single move adjustment mechanism that is equipped with of fine setting platform (11) on the surface.
2. The electro-optical piezoelectric electro-static composite driven micro-mirror micro-adjustment device according to claim 1, wherein: the Y-direction adjusting mechanism comprises first fixed supporting rods (14), the number of the first fixed supporting rods (14) is 2, the two first fixed blocks (6) are fixedly connected with one ends of the two first fixed supporting rods (14) respectively, the other ends of the first fixed supporting rods (14) are fixedly connected with first connecting blocks (16) through first elastic rods (15), the opposite ends of the two first connecting blocks (16) are rotatably connected with first moving blocks (18) through first pin shafts (17), the upper surface of each first moving block (18) is fixedly connected with one end of a Y-direction flexible push rod (19), the other end of the Y-direction flexible push rod (19) is fixedly connected with a Y-direction fine adjustment platform (5), and Y-direction piezoelectric film drivers (20) are symmetrically arranged on the lower surfaces of the two first fixed supporting rods (14).
3. The electro-optical piezoelectric electro-static composite driven micro-mirror micro-adjustment device according to claim 2, wherein: the Y-direction photoelectric ceramic (7) is electrically connected with the Y-direction piezoelectric thin film driver (20).
4. The electro-optical piezoelectric electro-static composite driven micro-mirror micro-adjustment device according to claim 1, wherein: the X-direction adjusting mechanism comprises second fixed supporting rods (21), the number of the second fixed supporting rods (21) is 2, the two second fixed blocks (12) are fixedly connected with one ends of the two second fixed supporting rods (21) respectively, the other ends of the second fixed supporting rods (21) are fixedly connected with a second connecting block (23) through second elastic rods (22), the opposite ends of the two second connecting blocks (23) are rotatably connected with a second moving block (25) through second pin shafts (24), the right side surface of the second moving block (25) is fixedly connected with one end of an X-direction flexible push rod (26), the other end of the X-direction flexible push rod (26) is fixedly connected with the X-direction fine tuning platform (11), and X-direction piezoelectric thin film drivers (27) are symmetrically arranged on the left side surfaces of the two second fixed supporting rods (21).
5. The electro-optical piezoelectric electro-static composite driven micro-mirror micro-adjustment device according to claim 4, wherein: the X-direction photoelectric ceramic (13) is electrically connected with an X-direction piezoelectric thin film driver (27).
6. The electro-optical piezoelectric electro-static composite driven micro-mirror micro-adjustment device according to claim 1, wherein: micromirror every single move adjustment mechanism includes speculum (28), the back surface fixedly connected with pivot (29) of speculum (28), the both ends of pivot (29) are passed through third fixed block (30) and are rotated and connect on X is to fine setting platform (11), the upper and lower both ends of speculum (28) are located X and are equipped with electrode one (31) and electrode two (32) respectively on the front surface of fine setting platform (11), the below of speculum (28) is located X and is equipped with every single move and adjust photoelectricity pottery (33) on the front surface of fine setting platform (11), the one end electrode and electrode two (32), speculum (28) electricity of every single move regulation photoelectricity pottery (33) are connected, the other end electrode and electrode one (31) electricity of every single move regulation photoelectricity pottery (33) are connected.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011472915.4A CN112578553A (en) | 2020-12-15 | 2020-12-15 | Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011472915.4A CN112578553A (en) | 2020-12-15 | 2020-12-15 | Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror |
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| CN112578553A true CN112578553A (en) | 2021-03-30 |
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| CN202011472915.4A Pending CN112578553A (en) | 2020-12-15 | 2020-12-15 | Micro-adjusting device of photoelectric piezoelectric and electrostatic composite driving micro-mirror |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113189737A (en) * | 2021-04-27 | 2021-07-30 | 重庆大学 | Slide rail assembled composite control type quick reflector |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103487934A (en) * | 2013-09-25 | 2014-01-01 | 南京理工大学 | Micro-mirror fine adjusting device driven by photoelectric ceramic |
| CN106066536A (en) * | 2016-06-28 | 2016-11-02 | 南京理工大学 | A kind of micro mirror fine regulating device of photoelectricity piezoelectricity electrostatic drive |
| CN106842555A (en) * | 2017-01-18 | 2017-06-13 | 南京理工大学 | A kind of three-dimensional piezoelectric drives micro mirror adjusting means |
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2020
- 2020-12-15 CN CN202011472915.4A patent/CN112578553A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103487934A (en) * | 2013-09-25 | 2014-01-01 | 南京理工大学 | Micro-mirror fine adjusting device driven by photoelectric ceramic |
| CN106066536A (en) * | 2016-06-28 | 2016-11-02 | 南京理工大学 | A kind of micro mirror fine regulating device of photoelectricity piezoelectricity electrostatic drive |
| CN106842555A (en) * | 2017-01-18 | 2017-06-13 | 南京理工大学 | A kind of three-dimensional piezoelectric drives micro mirror adjusting means |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113189737A (en) * | 2021-04-27 | 2021-07-30 | 重庆大学 | Slide rail assembled composite control type quick reflector |
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Application publication date: 20210330 |