CN112577986B - EDX method - Google Patents
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- CN112577986B CN112577986B CN202011036541.1A CN202011036541A CN112577986B CN 112577986 B CN112577986 B CN 112577986B CN 202011036541 A CN202011036541 A CN 202011036541A CN 112577986 B CN112577986 B CN 112577986B
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- 238000000034 method Methods 0.000 title claims abstract description 29
- 229910052729 chemical element Inorganic materials 0.000 claims abstract description 64
- 230000005855 radiation Effects 0.000 claims abstract description 20
- 238000001914 filtration Methods 0.000 claims abstract description 8
- 239000002245 particle Substances 0.000 claims description 34
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 10
- 238000004458 analytical method Methods 0.000 description 8
- 238000002083 X-ray spectrum Methods 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 5
- 239000003086 colorant Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 230000005686 electrostatic field Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000000441 X-ray spectroscopy Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012804 iterative process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
- G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
An EDX method comprising: generating an image having a plurality of image elements based on an output of the x-ray radiation detector; assigning at least one set of chemical elements and the relative proportions of these chemical elements to each image element; determining two subsets of image elements; determining two filters, the filters selecting a predetermined subset from the set of chemical elements of the image element; filtering the chemical elements of the image element with the first filter and the second filter, respectively; determining representative features of the image elements based on the filtered subset of chemical elements; and representing the image element on a display device using the representative features.
Description
Technical Field
The present invention relates to a method for performing energy-dispersive x-ray spectroscopy (EDX), wherein a particle beam is scanned over a certain area of an object and an energy-dispersive x-ray radiation detector is used to detect an x-ray beam generated by the particle beam on the object.
Background
In conventional methods of this type, an image is generated from the output of an x-ray radiation detector, the picture elements (picture elements) of which correspond to positions on the object to which the particle beam is directed in order to generate the detected x-ray radiation assigned to the corresponding picture elements. The data thus assigned to the picture elements is then analyzed. These data represent an x-ray spectrum whose peaks have the characteristics of chemical elements. Thus, the relative proportions of chemical elements and chemical elements present at the object locations assigned to the image elements can be calculated based on the x-ray spectra.
A representation may then be generated from such an image, which representation may be viewable by a user on a display device, such as a screen. For example, a representation may be generated by assigning a corresponding color to each chemical element, selecting, for each image element, the chemical element of the image element having the greatest relative proportion, and then displaying that image element on the display device in the color assigned to the selected element. By viewing the displayed image, a skilled user is typically able to draw conclusions about the characteristics of the scanned object from the same colored region and the different colored regions and their geometries.
However, this is difficult in the case of objects with very non-uniform chemical composition. If only a few adjacent image elements have the same or similar chemical composition, the adjacent image elements are typically displayed in different colors. This results in that in this case the user's eyes will recognize the mixed color and identify the assumed continuous area of the mixed color as a special structure of the object with a certain chemical composition, since the displayed mixed color will lead to the conclusion that the chemical element is not actually present in the object.
Disclosure of Invention
It is therefore an object of the present invention to propose an EDX method which produces an EDX image representation that is easier to interpret.
According to an exemplary embodiment, an EDX method includes: the particle beam is scanned over a certain area of the object and during said scanning the x-ray radiation generated by the particle beam is detected with an energy-dispersive x-ray radiation detector.
The method further includes generating an image having a plurality of image elements based on an output of the x-ray detector. The image may be a data structure that assigns outputs generated by the energy-dispersive x-ray radiation detector when directing the particle beam towards the same location of the object to the image elements and stores them as the same location to which the image elements may be assigned. It is not necessary to generate a visual representation of the image.
According to an embodiment of the invention, generating the image comprises: a set of chemical elements and relative proportions of the chemical elements are assigned to each of the image elements based on the output of the x-ray radiation detector. Since the output of the x-ray radiation detector assigned to an image element represents the x-ray spectrum, it is possible, for example, to identify peak energy in the x-ray spectrum and assign the energy to a chemical element using a suitable database. Further, the relative proportions may be assigned based on peak heights of the identified chemical elements.
According to an embodiment, the method further comprises: a first subset of image elements of the plurality of image elements and a second subset of image elements of the plurality of image elements are determined. In addition to the first subset and the second subset, even more subsets of image elements may be determined. The purpose of determining the respective subset of image elements is to represent the image elements of the respective subset differently. This may allow the user to set the type of representation of the image element. Visual comparison of the image element representations of the respective subsets then allows the user to find a type of representation for at least a portion of the respective portions that is advantageous for their purpose, and draw conclusions about the object from the representation of that portion.
According to an exemplary embodiment, the method further comprises: a first filter and a second filter are determined, wherein the first filter and the second filter each select a predetermined subset from the set of chemical elements assigned to an image element. The method then further comprises: the first filter is used to filter the image elements of the first subset and the second filter is used to filter the image elements of the second subset. The filtering comprises the following steps: the method further includes filtering the chemical elements assigned to the corresponding image element, and assigning a filtered subset of the chemical elements assigned to the image element to the corresponding image element. The filter may be user configurable. For example, a user may select from among the elements of the periodic table of elements the individual elements that should appear in the subset of chemical elements assigned to these image elements. Further, the user may select a group of chemical elements (e.g., metals) that should appear in the subset of chemical elements assigned to the corresponding image element after filtering.
According to an exemplary embodiment, the method further comprises: the representative feature of the image element is determined based on the chemical elements in the filtered subset of chemical elements assigned to the image element, the relative proportions of the chemical elements, and the representative features assigned to the chemical elements. The method then further comprises: these image elements are represented on the display device using the representative features of the corresponding image elements.
Representative features may be color, saturation, brightness, or other representative features such as texture, pattern, and shading, among others.
By visual comparison of the image elements in the first subset with the image elements in the second subset and by changing the characteristics of the filters for the image elements in the first subset and the second subset, the user can make the structures of the object visible within the scope of the iterative process due to the specific chemical elements contained in these structures.
According to an exemplary embodiment, the first subset of image elements and/or the second subset of image elements is determined based on an input of a user. For example, the user's input may include input with a mouse, wherein the user marks an area such as a rectangle or a circle in the representation of the image by a mouse operation.
According to an exemplary embodiment, the first subset of image elements and/or the second subset of image elements is determined based on an analysis of chemical elements assigned to the image elements and the relative proportions of the chemical elements. For example, an analysis may be performed to determine image elements containing a relative proportion of metal above a threshold and add those image elements to a subset of image elements. After appropriate filtering of the image elements of the subset, the image elements containing a large proportion of metal are then represented in a visually distinguishable manner from the other image elements.
According to an exemplary embodiment, the method further comprises: detecting electrons generated by the particle beam with an electron detector while scanning over the region of the object; and assigning the output of the electron detector to the picture elements. The first subset of image elements and/or the second subset of image elements may then be determined based on the output of the electronic detector assigned to the corresponding image element. For example, image elements with an output of the electron detector less than a threshold are assigned to a first subset, while image elements with an output of the electron detector greater than or equal to the threshold are assigned to a second subset.
The division of the image elements into the first subset and the second subset or possibly other subsets may also be based on external data. For example, an image recorded with a light microscope may be obtained for a scanned region of an object. Further, the object may be an object generated according to a structural design, and thus the scanned area may obtain a corresponding structural design. The external data may be geometrically assigned to the image elements of the image and the image elements may be subdivided into subsets again by threshold comparison or by applying appropriate rules.
The representative characteristics of an image element may be determined in various ways based on the chemical elements in the filtered subset of chemical elements assigned to the image element and the relative proportions of these chemical elements. For example, the filter may select the chemical element in the subset whose relative proportion is highest among the chemical elements of the subset. The representative feature assigned to the chemical element may then be used for the representation of the image element.
Drawings
Embodiments of the present invention will be described in more detail below with reference to the drawings. In detail:
FIG. 1 shows an analysis system that can be used to perform the EDX method;
FIG. 2 shows a flow chart for elucidating the EDX method;
FIG. 3 shows a schematic representation of a display of an image having a plurality of portions; and
Fig. 4 shows a schematic representation of another display of an image having a plurality of portions.
Detailed Description
FIG. 1 is a schematic representation of an exemplary embodiment of an analysis system for performing an EDX method. The analysis system comprises an electron microscope 1 comprising an electron optical unit. The electron optical unit comprises an electron beam source 5 with a cathode 7 and extraction and suppression electrodes 9 for generating a particle beam 13 with electrons as particles. The particle beam 13 passes through a beam focusing lens 11 of the electron optical unit, a stop 15 arranged in the electron detector 17, and an objective lens 19 of the electron optical unit for focusing the primary particle beam 13 at a position 21 in an object plane 23. The surface of the object 25 to be inspected is arranged in the object plane 23.
The objective lens 19 includes a coil 27 disposed in an annular yoke having an annular upper magnetic pole element 31 and an annular lower magnetic pole element 32 such that an annular gap is formed between the upper magnetic pole element 31 and the lower magnetic pole element 32. In this gap a magnetic field is generated for focusing the particle beam 13.
The electron beam microscope 1 further comprises a beam tube 35 which extends into the objective lens 19 and partly through the objective lens. The end electrode 37 is provided at the lower end of the bundle tube 35. The terminating electrode 36 is arranged between the terminating electrode 37 and the object plane, wherein an electrostatic field generated between the terminating electrode 36 and the terminating electrode 37 provides a focusing effect on the particle beam 13. The focusing action provided by the electrostatic field between electrode 36 and electrode 37 and the focusing action provided by the magnetic field between magnetic pole element 31 and magnetic pole element 32 together provide the focusing action of the objective lens 19 of the electron beam microscope 1.
A controller 39 is provided for supplying appropriate voltages to the terminating electrode 36, the terminating electrode 37, the cathode 7, and the extraction and suppression electrodes 9 such that a beam focus of the particle beam 13 is formed at the object plane.
These voltages may be chosen such that the electrons of the primary electron beam have a predetermined kinetic energy when they are incident on the object 25 at the location 21.
The electron optical unit further comprises deflectors 41, which are also controlled by the controller 39, in order to deflect the particle beam 13 and to change the position 21 at which the particle beam 13 impinges the object 25 on the object plane 23. By deflecting the particle beam 13, the surface area of the object 25 can be scanned systematically, in particular using the particle beam 13.
The incidence of the particle beam 13 on the object 25 results in the generation of a signal emanating from the object 25. These signals include, inter alia, electrons. Some of these electrons may enter beam tube 35 so that they are detected by electron detector 17. The signal emitted from the object as electrons comprises, in particular, backscattered electrons whose kinetic energy corresponds approximately to or is slightly smaller than the kinetic energy of the electrons incident on the object. Further, the electrons comprise secondary electrons having a kinetic energy when emitted from the surface of the object that is significantly smaller than the kinetic energy of electrons of the particle beam 13 incident on the object. Fig. 1 schematically shows the trajectories of secondary electrons striking the electron detector 17 by reference numeral 43.
The electron beam microscope 1 further comprises energy dispersion detectors 47 and 48 arranged between the objective lens 19 and the object plane 23. In the illustrated embodiment, the energy dispersion detectors 47, 48 are Silicon Drift Diodes (SDDs). In other embodiments, different types of energy sensitive detectors may be used as well, such as PIN diodes, schottky diodes, or avalanche diodes.
A window 51 made of a material through which electrons generated as signals by the particle beam 13 on the object 23 are not allowed to pass is arranged in front of the energy dispersion detector 47; however, x-ray radiation generated as a signal on the object 23 by the particle beam 13 passes through the window such that this x-ray radiation can be detected by the energy-dispersive detector 47. An exemplary trajectory of the x-ray beam resulting from the incidence of the particle beam 13 at position 21 and impinging on the detector 47 is indicated in fig. 1 by reference numeral 53. Thus, the detector 47 is configured to essentially detect x-ray radiation during operation of the analysis system and thus form an energy-dispersive x-ray radiation detector of the electron beam microscope 1.
The window corresponding to the window 51 is not mounted in front of the detector 48, which is why the detector 48 is able to detect both electrons generated as signals by the particle beam 13 on the object 23 and x-ray radiation generated as signals by the particle beam 13 on the object 23. However, the number of electrons generated by the particle beam and detected by the detector 48 is much greater than the number of detection events triggered by the x-ray radiation. Further, due to the geometrical arrangement of the detector with respect to the object 23, the electrons striking the detector 48 are mainly backscattered electrons, and only to a small extent secondary electrons. An exemplary trajectory of backscattered electrons resulting from the incidence of the particle beam 13 at position 21 and striking the detector 48 is denoted in fig. 1 by reference numeral 54. Thus, the detector 48 is configured to essentially detect backscattered electrons during operation of the analysis system and thus form a backscattered electron detector of the electron beam microscope 1.
The EDX method that can be performed using the analysis system shown in fig. 1 is explained below based on the flowchart shown in fig. 2.
In step 81, the particle beam 13 is caused to be scanned over the object 25 by means of the controller 39 which controls the deflector 41 such that the deflector deflects the particle beam such that its focus is scanned line by line over a rectangular area of the object 25. During scanning, the controller 39 periodically reads the outputs of the detectors 17, 47 and 48. At each readout, an image element is assigned to the output of the detector, which in turn may be assigned to a position on or a region of the object to which the particle beam is directed, or to a position swept by the particle beam when generating a signal that results in the output of the detector.
In step 83, the outputs of the energy-dispersive x-ray detector 47 assigned to the individual image elements are analyzed. The output of the energy-dispersive x-ray detector assigned to the picture element represents the x-ray spectrum of the x-ray radiation produced by the incidence of electrons of the particle beam 13 on the object 25. Analyzing the output of the energy-dispersive x-ray detector 47 assigned to the image element includes: identifying peaks in the corresponding x-ray spectrum, determining the energy of each identified peak, and determining the relative heights of the identified peaks. The chemical elements present on the object at the locations assigned to the individual image elements and their relative proportions can be deduced from the energy and the relative heights of the peaks. For this purpose, databases which are generally used for this purpose in the field of x-ray spectroscopy can be used. The set of chemical elements C o identified in the x-ray spectrum is assigned to the image element along with the relative proportions of these chemical elements. This process is performed in step 83 for all image elements of the image.
In step 85, the image elements are divided into at least a first subset M 1 and a second subset M 2. The image elements may be divided in many different ways. Fig. 3 shows a schematic representation of a display of an image 87 based on the output of one or more of the detectors 17, 47 and 48. An image 87 is displayed on the screen 84. The user selects a first subset M 1 of image elements using mouse 80. The graphical user interface operated by controller 39 indicates the position of mouse 80 in image 87 via arrow 89. The set M 1 of selected image elements is represented by rectangle 91, and double-headed arrow 93 indicates that the size of rectangle 91 can be increased and decreased by moving position 89 of mouse 80. By pressing the button of the mouse 80, the user can start and end this selection process.
Fig. 4 shows a schematic representation of a display of an image 95 based on the output of the backscattered electron detector 48. In this example, the object 25 is an electronic circuit with printed conductors 97 made of copper on a background made of plastic 99. In the image in which the backscattered electrons are detected, the printed conductor 97 is brighter than the plastic 99. The division into parts may then be implemented based on the output of the backscattered electron detector 48 assigned to the image elements, and thus the image elements that are part of the representation of the printed conductor 97 are assigned to the first subset M 1 and the remaining image elements are assigned to the second subset M 2.
In the method shown in fig. 2, a loop is run that traverses all image elements of the image after dividing the image elements into subsets M 1 and M 2 and, where applicable, other subsets. In this loop, first the next picture element is selected in step 101. In step 103 it is determined whether the selected image element is in subset M 1. If this is the case, set C o is filtered with filter f 1 in step 105 to generate filtered subset C f. Here, the filter f 1 is designed such that it selects a subset from the set of chemical elements C o assigned to the image element. Here, the filter f 1 is user-adjustable and editable. For example, a user interface on screen 84 operated by controller 39 may present a menu from which the user may select, by means of mouse 80, a chemical element intended to be selected by filter f 1.
If it is determined in step 103 that the image element does not belong to the subset M 1, it is determined in step 107 whether the image element belongs to the subset M 2. If this is the case, the chemical elements in the set C o assigned to the image elements are filtered with a filter f 2 to generate a filtered subset C f. Filter f 2 is also editable by the user, as described above for filter f 1.
If the image element is determined in step 107 not to belong to the subset M 2, no filtering is performed. If the image element belongs to a subset other than the partitioned subsets M 1 and M 2, the series of queries 103 and 107 in the flowchart of FIG. 2 may be supplemented with other queries to find out if the image element belongs to the other subset and then use other filters to filter the set of chemical elements assigned to the image element.
In step 111, following steps 105 and 109, the color F of the image element is determined by applying a function g to the filtered subset of chemical elements C f assigned to the image element. The function g represents the assignment of a representative feature to a chemical element. In the illustrated example, the color F is a representative feature, and the function g represents the color assigned to each chemical element. Again, the assignment may be edited by the user by means of the function g using a color selection tool represented by a graphical user interface on the screen 84 to select colors and assign these colors to the individual chemical elements.
In addition to color F, function g may also assign other representative features to image elements, such as brightness, saturation, etc.
For image elements that do not belong to the subsets M 1 and M 2 and for which no filtered subset of chemical elements is determined, in step 112, the color is determined by applying a function g to the unfiltered set of chemical elements C o assigned to the image elements.
In step 115 it is determined whether all image elements have been processed. If this is not the case, the process continues to step 101, where the next image element is selected.
If it is determined in step 115 that all image elements have been processed, then the color determined in step 111 is used in step 117 to represent the image elements.
The user may then choose to alter the division of the image elements into subsets M 1 and M 2 in step 85, edit the filters f 1 and f 2 used in steps 105 and 109, and edit the allocation of representative features by function g in order to alter the representation of the image elements generated in step 117 so that the structure of the object becomes better visible in the representation, thereby concluding about the characteristics of the object.
Claims (7)
1. An EDX method comprising:
scanning a particle beam over a region of an object and detecting x-ray radiation generated by the particle beam during said scanning with an energy-dispersive x-ray radiation detector;
Generating an image having a plurality of image elements based on an output of the x-ray radiation detector, wherein generating the image comprises:
Assigning at least one set of chemical elements and relative proportions of the chemical elements to each of the image elements based on the output of the x-ray radiation detector;
Assigning a representative characteristic to the chemical elements;
determining a first subset of image elements of the plurality of image elements and a second subset of image elements of the plurality of image elements;
determining a first filter and a second filter, wherein the first filter and the second filter each select a predetermined subset from the set of chemical elements assigned to an image element;
filtering the chemical elements assigned to the image elements using the first filter and assigning a filtered subset of chemical elements to the image elements, specifically for each image element in the first subset of image elements;
Filtering the chemical elements assigned to the image elements using the second filter and assigning a filtered subset of the chemical elements to the image elements, specifically for each image element in the second subset of image elements;
Determining a representative feature of an image element based on the chemical elements in the filtered subset of chemical elements assigned to the image element, the relative proportions of the chemical elements, and the representative features assigned to the chemical elements, specifically for each image element in the first subset of image elements and the second subset of image elements; and
The image element is represented on a display device using a representative feature of the image element, specifically for the image elements in the first subset of image elements and the second subset of image elements.
2. The EDX method according to claim 1,
Among these representative features are color, saturation, and/or brightness.
3. The EDX method according to claim 1 or 2, further comprising:
the user input is captured and the user input is captured,
Wherein the determination of the first subset of image elements and/or the second subset of image elements is based on the user input.
4. The EDX method according to any of the claims 1-3,
Wherein the determination of the first subset of image elements and/or the second subset of image elements is based on the chemical elements assigned to the image elements and the relative proportions of the chemical elements.
5. The EDX method according to any of claims 1-4, further comprising:
Detecting electrons generated by the particle beam with an electron detector while scanning over the region of the object; and
Assigning the output of the electron detector to the picture elements;
Wherein the determination of the first subset of image elements and/or the second subset of image elements is based on the output of the electron detector assigned to the image elements.
6. The EDX method according to any of claims 1-5, further comprising:
capturing external data; and
Assigning selected ones of the external data to the image elements;
Wherein the determination of the first subset of image elements and/or the second subset of image elements is based on external data assigned to the image elements.
7. The EDX method according to any of the claims 1-6,
Wherein determining the representative feature of the image element comprises:
determining the representative feature of the image element as such representative feature: the representative feature is the representative feature assigned to the chemical element having the highest relative proportion of the chemical elements in the filtered subset of chemical elements assigned to the image element.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102019126200.3A DE102019126200A1 (en) | 2019-09-27 | 2019-09-27 | EDX process |
| DE102019126200.3 | 2019-09-27 |
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| CN112577986A CN112577986A (en) | 2021-03-30 |
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| CN115064011A (en) * | 2022-03-02 | 2022-09-16 | 上海广为电器工具有限公司 | Element period display system and display method |
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| US20030085350A1 (en) * | 2001-11-02 | 2003-05-08 | Kazutoshi Kaji | Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method |
| EP2450936B1 (en) * | 2010-11-03 | 2013-03-13 | Carl Zeiss NTS Ltd. | Microscope system, method for operating a charged-particle microscope |
| GB201102614D0 (en) * | 2011-02-15 | 2011-03-30 | Oxford Instr Nanotechnology Tools Ltd | Material identification using multiple images |
| EP2881972B1 (en) * | 2013-08-09 | 2017-03-22 | Carl Zeiss Microscopy Ltd. | Method and data analysis system for semi-automated particle analysis using a charged particle beam |
| US9714908B2 (en) * | 2013-11-06 | 2017-07-25 | Fei Company | Sub-pixel analysis and display of fine grained mineral samples |
| US9791390B2 (en) * | 2015-01-22 | 2017-10-17 | EDAX, Incorporated | Devices and systems for spatial averaging of electron backscatter diffraction patterns |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102072913A (en) * | 2009-08-07 | 2011-05-25 | 卡尔蔡司Nts有限责任公司 | Inspection method, particle beam system and manufacturing method |
| CN104048979A (en) * | 2013-03-15 | 2014-09-17 | Fei公司 | Multiple image metrology |
| CN106796188A (en) * | 2014-10-27 | 2017-05-31 | 科磊股份有限公司 | Energy Dispersive X-ray method and apparatus based on automated decision-making |
| WO2019016559A1 (en) * | 2017-07-19 | 2019-01-24 | Oxford Instruments Nanotechnology Tools Limited | Improved navigation for electron microscopy |
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