CN112553574A - Preparation method of nano manganese oxide powder by PVD (physical vapor deposition) method - Google Patents

Preparation method of nano manganese oxide powder by PVD (physical vapor deposition) method Download PDF

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CN112553574A
CN112553574A CN202011346946.5A CN202011346946A CN112553574A CN 112553574 A CN112553574 A CN 112553574A CN 202011346946 A CN202011346946 A CN 202011346946A CN 112553574 A CN112553574 A CN 112553574A
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manganese
particles
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condenser
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柴立新
汪艳春
马仁友
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Ningbo Guangxin Nano Mat Co ltd
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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Abstract

The invention discloses a preparation method of nanometer manganese oxide powder by a PVD method, relating to the technical field of nanometer powder preparation, and the key points of the technical scheme comprise the following steps: step 1, screening metal manganese particles, and filling the metal manganese particles into a graphite pot of a reactor; step 2, filling nitrogen into the reactor, and controlling the pressure in the reactor to be 70-100 kPa; step 3, igniting and arcing to enable the electric arc to be burnt between the plasma gun and the manganese metal particles, controlling the current of the plasma gun to be 500-600A and the temperature to be more than 1500 ℃, and continuing the step 4 after the manganese metal particles are completely melted; step 4, increasing the current of the plasma gun, and controlling the current of the plasma gun to be more than 600A; and 5, gradually evaporating the metal manganese particles into manganese particles, introducing the manganese particles into a condenser, and introducing nitrogen-oxygen mixed gas into the condenser to react the evaporated manganese particles with oxygen to form MnO2Powder; step 6, collecting formed MnO by a collector connected with a condenser2And (3) powder. The invention has a displayThe effect of reducing the production difficulty and cost is remarkable.

Description

Preparation method of nano manganese oxide powder by PVD (physical vapor deposition) method
Technical Field
The invention relates to the technical field of nano powder preparation, in particular to a preparation method of nano manganese oxide powder by a PVD method.
Background
With the development of times and science and technology, people have more deep understanding on the energy storage mechanism of the super capacitor, and the super capacitor is found to have higher power density compared with a lithium ion battery, and has the advantages of high charging and discharging speed, long cycle stability and high specific capacitance, so that the super capacitor becomes a research hotspot of a new energy storage device, and the super capacitor can be roughly divided into a double electric layer capacitor and a pseudo capacitor according to the energy storage mechanism.
To date, transition metal oxide pseudocapacitors have gained much commercial interest because they have higher capacitance values than double layer capacitors, and transition metal oxides such as Mno2,Co3o4Nio, and VOxWhen the compound is used as an electrode material, the redox reaction has the characteristics of high speed, high reversibility and the like, but the current research mainly focuses on simple binary transition metal oxides, probably because a simple method for synthesizing a multi-element metal transition oxide composite material which is particularly effective is lacked. Moreover, the phenomenon of rapid attenuation of capacitance of some binary transition metal oxide nano-grade materials is also a common fault of the materials. Mixed Transition Metal Oxides (MTMO)s) Generally comprising two different metal ions, has received increasing attention due to potential applications in a variety of energy-related fields. Because in MTMOsThe middle paired metal ions have more abundant redox reaction types, and are beneficial to the application of the metal ions in the electrochemical field. In addition, the presence of multiple cations and the controllable stoichiometric/non-stoichiometric composition is MTMOsProvides a larger control space for the physical and chemical properties of the material.
Noble metal oxides such as ruthenium dioxide are successfully applied to electrode materials of supercapacitors due to their excellent electrochemical properties. But its widespread use is limited by expensive cost and toxic properties. Therefore, people are devoted to research and develop other cheap metal oxides, such as nickel oxide, cobalt oxide, manganese oxide and the like, and the manganese oxide is taken as a superior super capacitor electrode material with higher cost performance, wherein the manganese oxide is expected to be a transition metal oxide for replacing ruthenium dioxide due to the advantages of low cost, greenness, no pollution, higher theoretical specific capacitance, wider working potential window and the like. The currently known methods for preparing manganese oxide include the following:
1) thermal decomposition method, 2) liquid-phase coprecipitation method.
The manganese sulfate is prepared by further oxidizing or reducing metal manganese oxide or heating divalent manganese salt in air at 600-800 ℃, but manganese sulfate is not thermally decomposed at 900 ℃. The simplest method is to use manganese nitrate hexahydrate or pure beta-MnO2Heated to constant weight in air at 650 ℃. When manganese nitrate hexahydrate is used as raw material, it is preheated at 190 deg.C to obtain solid (equivalent to beta-MnO)2) The manganese oxide powder was pulverized and then dried by heating at 650 ℃.
With potassium permanganate (KMnO)4) Taking natural graphite powder as a reducing agent as a starting material, and reacting under a hydrothermal condition to generate a manganese dioxide nanowire material precursor; then the manganese oxide powder is prepared by washing and vacuum drying.
However, the two methods for producing manganese oxide powder produce a large amount of waste water and waste liquid in the production process and have the defect of difficult treatment; the manganese oxide powder needs to be heated and dried during preparation, and the problems of complicated production steps, high production cost and inconvenience for large-scale production due to poor powder agglomeration and dispersibility in the drying process need to be improved.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a preparation method of nano manganese oxide powder by a PVD (physical vapor deposition) method, which has the effect of remarkably reducing the production difficulty and cost.
In order to achieve the purpose, the invention provides the following technical scheme:
a preparation method of nanometer manganese oxide powder by a PVD method comprises the following steps:
step 1, screening metal manganese particles, and filling the metal manganese particles into a graphite pot of a reactor;
step 2, filling nitrogen into the reactor, and controlling the pressure in the reactor to be 70-100 kPa;
step 3, igniting and arcing to enable the electric arc to be burnt between the plasma gun and the manganese metal particles, controlling the current of the plasma gun to be 500-600A and the temperature to be more than 1500 ℃, and continuing the step 4 after the manganese metal particles are completely melted;
step 4, increasing the current of the plasma gun, and controlling the current of the plasma gun to be more than 600A;
and 5, gradually evaporating the metal manganese particles into manganese particles, introducing the manganese particles into a condenser, and introducing nitrogen-oxygen mixed gas into the condenser to react the evaporated manganese particles with oxygen to form MnO2Powder;
step 6, collecting formed MnO by a collector connected with a condenser2And (3) powder.
The invention is further configured to: in step 5, the nitrogen-oxygen mixed gas is fed from the tail part of the condenser, cooled and crystallized and nucleated in the condenser of the evaporated manganese particles, and then reacts with oxygen to form MnO2And (3) powder.
The invention is further configured to: the MnO2The diameter of the powder is 10-200 nm.
The invention is further configured to: in step 5, the temperature of the evaporated manganese particles in the condenser is 500-1000 ℃.
The invention is further configured to: in step 6, the manganese oxide collected and formed by the collector is collected by the powder collector after passing through the back flushing device.
The invention is further configured to: the metal manganese particles are blocky metal manganese, and in the graphite pot, the metal manganese particles are used as a negative electrode, and a plasma gun is used as a positive electrode.
In conclusion, the invention has the following beneficial effects:
1. the metal manganese blocks are used as raw materials, the nitrogen is used as protective gas, and the nitrogen is in a fully-closed recycling state, so that no wastewater or waste gas is discharged in the production process, and the safety of the production process is high;
2. by controlling the entering speed of the nitrogen-oxygen mixed gas, the MnO is further controlled2The growth and cooling speed of the powder are controlled, and finally the formed MnO is controlled2The particle size of the powder;
3. MnO to be obtained2The powder has regular spherical appearance, uniform particle size, large specific surface area, good dispersibility, large specific capacity, multiple cycle times and high purity.
Drawings
Fig. 1 is a schematic structural diagram of a PVD-process nano manganese oxide powder preparation apparatus according to this embodiment.
Description of reference numerals: 1. a graphite pot; 2. a reactor; 3. a condenser; 4. a collector; 5. a powder collector.
Detailed Description
In order to make the technical solution and advantages of the present invention more clear, the present invention will be further described in detail with reference to the accompanying drawings.
As shown in fig. 1, a PVD-process apparatus for preparing nano manganese oxide powder comprises a reactor 2, a condenser 3 and a collector 4. A graphite pot 1 and a plasma gun are provided in the reactor 2. The graphite pot 1 is used for placing the manganese metal particles, and the plasma gun is used for heating the manganese metal particles in the graphite pot. Meanwhile, nitrogen is filled in the reactor 2, so that the nitrogen is used as protective gas to avoid oxidation reaction of the manganese metal particles in the reactor 2; the manganese metal particles form manganese particles after evaporation and enter the condenser 3 for condensation, nitrogen-oxygen mixed gas is introduced into one end of the condenser 3 connected with the collector 4, and then the manganese particles moving from the condenser 3 to the collector 4 react with oxygen to form MnO2And (3) powder. It should be mentioned that a powder collector 5 is arranged at the bottom of the collector 4, and MnO is arranged in the collector2The powder enters the powder collector 5 to be collected after passing through a back-blowing device at the mouth of the powder collector 5.
A preparation method of nanometer manganese oxide powder by a PVD method comprises the following steps:
step 1, screening metal manganese particles, and filling the metal manganese particles into a graphite pot of a reactor;
step 2, filling nitrogen into the reactor, and controlling the pressure in the reactor to be 70-100 kPa;
step 3, igniting and arcing to enable the electric arc to be burnt between the plasma gun and the manganese metal particles, controlling the current of the plasma gun to be 500-600A and the temperature to be more than 1500 ℃, and continuing the step 4 after the manganese metal particles are completely melted;
step 4, increasing the current of the plasma gun, and controlling the current of the plasma gun to be more than 600A;
step 5, gradually evaporating the manganese metal particlesGenerating manganese particles and feeding the manganese particles into a condenser, introducing nitrogen-oxygen mixed gas into the condenser at the same time, and controlling the temperature of the evaporated manganese particles to be 500-; reacting the evaporated manganese particles with oxygen to form MnO2Powder;
step 6, collecting formed MnO by a collector connected with a condenser2Powder;
step 7, MnO in collector2The powder is collected by a powder collector after passing through a back flushing device.
In step 5, the nitrogen-oxygen mixture gas is fed from the tail of the condenser, so that the evaporated manganese particles are cooled in the condenser, crystallized and nucleated, and then react with oxygen to form MnO2Powder of MnO2The diameter of the powder is 10-200 nm. Meanwhile, the manganese metal particles are blocky manganese metal, and in the graphite pot, the manganese metal particles are used as a negative electrode, and the plasma gun is used as a positive electrode.
Example one
A preparation method of nanometer manganese oxide powder by a PVD method comprises the following steps:
step 1, screening metal manganese particles, and filling the metal manganese particles into a graphite pot of a reactor;
step 2, filling nitrogen into the reactor, and controlling the pressure in the reactor to be 70 kPa;
step 3, igniting and arcing, so that the electric arc is combusted between the plasma gun and the manganese metal particles, controlling the current of the plasma gun to be 500A and the temperature to be 1550 ℃, and continuing the step 4 after the manganese metal particles are completely melted;
step 4, increasing the current of the plasma gun, and controlling the current of the plasma gun to be 620A;
step 5, gradually evaporating the manganese metal particles into manganese particles, feeding the manganese particles into a condenser, and introducing nitrogen-oxygen mixed gas into the condenser at the same time, wherein the temperature of the evaporated manganese particles is controlled to be 500 ℃; reacting the evaporated manganese particles with oxygen to form MnO2Powder;
step 6, collecting formed MnO by a collector connected with a condenser2Powder;
step 7, MnO in collector2The powder is collected by a powder collector after passing through a back flushing device.
In step 5, the nitrogen-oxygen mixture gas is fed from the tail of the condenser, so that the evaporated manganese particles are cooled in the condenser, crystallized and nucleated, and then react with oxygen to form MnO2Powder of MnO2The diameter of the powder was 36 nm. Meanwhile, the manganese metal particles are blocky manganese metal, and in the graphite pot, the manganese metal particles are used as a negative electrode, and the plasma gun is used as a positive electrode.
Example two
A preparation method of nanometer manganese oxide powder by a PVD method comprises the following steps:
step 1, screening metal manganese particles, and filling the metal manganese particles into a graphite pot of a reactor;
step 2, filling nitrogen into the reactor, and controlling the pressure in the reactor to be 75 kPa;
step 3, igniting and arcing, burning the electric arc between the plasma gun and the manganese metal particles, controlling the current of the plasma gun to be 550A and the temperature to be 1600 ℃, and continuing the step 4 after the manganese metal particles are completely melted;
step 4, increasing the current of the plasma gun, and controlling the current of the plasma gun to be 650A;
step 5, gradually evaporating the manganese metal particles into manganese particles, feeding the manganese particles into a condenser, introducing nitrogen-oxygen mixed gas into the condenser, and controlling the temperature of the evaporated manganese particles to be 750 ℃; reacting the evaporated manganese particles with oxygen to form MnO2Powder;
step 6, collecting formed MnO by a collector connected with a condenser2Powder;
step 7, MnO in collector2The powder is collected by a powder collector after passing through a back flushing device.
In step 5, the nitrogen-oxygen mixture gas is fed from the tail of the condenser, so that the evaporated manganese particles are cooled in the condenser, crystallized and nucleated, and then react with oxygen to form MnO2Powder of MnO2The diameter of the powder was 132 nm. Meanwhile, the manganese metal particles are blocky manganese metal, and in the graphite pot, the manganese metal particles are used as a negative electrode, and the plasma gun is used as a positive electrode.
EXAMPLE III
A preparation method of nanometer manganese oxide powder by a PVD method comprises the following steps:
step 1, screening metal manganese particles, and filling the metal manganese particles into a graphite pot of a reactor;
step 2, filling nitrogen into the reactor, and controlling the pressure in the reactor to be 100 kPa;
step 3, igniting and arcing, burning the electric arc between the plasma gun and the manganese metal particles, controlling the current of the plasma gun to be 600A and the temperature to be 1540 ℃, and continuing the step 4 after the manganese metal particles are completely melted;
step 4, increasing the current of the plasma gun, and controlling the current of the plasma gun to be 750A;
step 5, gradually evaporating the manganese metal particles into manganese particles, feeding the manganese particles into a condenser, and introducing nitrogen-oxygen mixed gas into the condenser at the same time, wherein the temperature of the evaporated manganese particles is controlled to be 1000 ℃; reacting the evaporated manganese particles with oxygen to form MnO2Powder;
step 6, collecting formed MnO by a collector connected with a condenser2Powder;
step 7, MnO in collector2The powder is collected by a powder collector after passing through a back flushing device.
In step 5, the nitrogen-oxygen mixture gas is fed from the tail of the condenser, so that the evaporated manganese particles are cooled in the condenser, crystallized and nucleated, and then react with oxygen to form MnO2Powder of MnO2The diameter of the powder was 186 nm. Meanwhile, the manganese metal particles are blocky manganese metal, and in the graphite pot, the manganese metal particles are used as a negative electrode, and the plasma gun is used as a positive electrode.
Comparative example 1
Comparative example one preparation of MnO by liquid Co-precipitation2And (3) powder.
Comparative example No. two
Comparative example II preparation of MnO by thermal decomposition2And (3) powder.
The test results were as follows:
table one test result table
BET(m2/g) Specific capacity F/G Number of charging cycles
Example one 207 239.1 1350
Example two 202 232.8 1300
EXAMPLE III 200 235.6 1300
Comparative example 1 160.7 203.4 1000
Comparative example No. two 180 166 950
In summary, MnO obtained by the preparation method of the present application2The powder has the effects of increasing the specific surface area by more than 35 percent, increasing the specific capacity by more than 10 percent and increasing the charging cycle times by more than 30 percent. Meanwhile, the metal manganese blocks are used as raw materials, the nitrogen is used as protective gas, and the nitrogen is in a fully-closed recycling state, so that no wastewater or waste gas is discharged in the production process, and the safety of the production process is high; and MnO is controlled by controlling the entering speed of the nitrogen-oxygen mixed gas2The growth and cooling speed of the powder are controlled, and finally the formed MnO is controlled2The particle size of the powder. Thus, MnO was obtained2The powder has regular spherical appearance, and has the effects of uniform particle size, large specific surface area, good dispersibility, large specific capacity, multiple cycle times and high purity.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiment, but all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the present invention may occur to those skilled in the art without departing from the principle of the present invention, and such modifications and embellishments should also be considered as within the scope of the present invention.

Claims (6)

1. A preparation method of nanometer manganese oxide powder by a PVD method is characterized by comprising the following steps:
step 1, screening metal manganese particles, and filling the metal manganese particles into a graphite pot of a reactor;
step 2, filling nitrogen into the reactor, and controlling the pressure in the reactor to be 70-100 kPa;
step 3, igniting and arcing to enable the electric arc to be burnt between the plasma gun and the manganese metal particles, controlling the current of the plasma gun to be 500-600A and the temperature to be more than 1500 ℃, and continuing the step 4 after the manganese metal particles are completely melted;
step 4, increasing the current of the plasma gun, and controlling the current of the plasma gun to be more than 600A;
step 5, gradually evaporating the metal manganese particles into manganese particles, feeding the manganese particles into a condenser, and meanwhile, feeding the manganese particles into the condenserIntroducing mixed nitrogen-oxygen gas to react the evaporated manganese particles with oxygen to form MnO2Powder;
step 6, collecting formed MnO by a collector connected with a condenser2And (3) powder.
2. The PVD method for preparing nanometer manganese oxide powder according to claim 1, characterized in that: in step 5, the nitrogen-oxygen mixed gas is fed from the tail part of the condenser, cooled and crystallized and nucleated in the condenser of the evaporated manganese particles, and then reacts with oxygen to form MnO2And (3) powder.
3. The PVD method for preparing nanometer manganese oxide powder according to claim 2, characterized in that: the MnO2The diameter of the powder is 10-200 nm.
4. The PVD method for preparing nanometer manganese oxide powder according to claim 1, characterized in that: in step 5, the temperature of the evaporated manganese particles in the condenser is 500-1000 ℃.
5. The PVD method for preparing nanometer manganese oxide powder according to claim 1, characterized in that: in step 6, the manganese oxide collected and formed by the collector is collected by the powder collector after passing through the back flushing device.
6. The PVD method for preparing nanometer manganese oxide powder according to claim 1, characterized in that: the metal manganese particles are blocky metal manganese, and in the graphite pot, the metal manganese particles are used as a negative electrode, and a plasma gun is used as a positive electrode.
CN202011346946.5A 2020-11-26 2020-11-26 Preparation method of nano manganese oxide powder by PVD (physical vapor deposition) method Pending CN112553574A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4365137A1 (en) * 2022-11-02 2024-05-08 Basf Se Process for making an oxide of manganese

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07247122A (en) * 1994-03-10 1995-09-26 Japan Metals & Chem Co Ltd Activated manganese dioxide and method for producing the same
KR20070066545A (en) * 2005-12-22 2007-06-27 주식회사 포스코 Method of making nano mpp powder using rf plasma combustion
CN102950289A (en) * 2012-10-15 2013-03-06 宁波广博纳米新材料股份有限公司 Method for producing nanoscale copper-manganese alloy powder
CN102950290A (en) * 2012-10-15 2013-03-06 宁波广博纳米新材料股份有限公司 Method for producing nanoscale nickel-manganese alloy powder
CN109648093A (en) * 2018-12-18 2019-04-19 江苏博迁新材料股份有限公司 A kind of superfine metal nickel powder surface treatment method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07247122A (en) * 1994-03-10 1995-09-26 Japan Metals & Chem Co Ltd Activated manganese dioxide and method for producing the same
KR20070066545A (en) * 2005-12-22 2007-06-27 주식회사 포스코 Method of making nano mpp powder using rf plasma combustion
CN102950289A (en) * 2012-10-15 2013-03-06 宁波广博纳米新材料股份有限公司 Method for producing nanoscale copper-manganese alloy powder
CN102950290A (en) * 2012-10-15 2013-03-06 宁波广博纳米新材料股份有限公司 Method for producing nanoscale nickel-manganese alloy powder
CN109648093A (en) * 2018-12-18 2019-04-19 江苏博迁新材料股份有限公司 A kind of superfine metal nickel powder surface treatment method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4365137A1 (en) * 2022-11-02 2024-05-08 Basf Se Process for making an oxide of manganese

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Application publication date: 20210326