CN112542763A - Indicating device for laser - Google Patents
Indicating device for laser Download PDFInfo
- Publication number
- CN112542763A CN112542763A CN201910894500.7A CN201910894500A CN112542763A CN 112542763 A CN112542763 A CN 112542763A CN 201910894500 A CN201910894500 A CN 201910894500A CN 112542763 A CN112542763 A CN 112542763A
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- laser
- iron core
- light
- movable iron
- main body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
Abstract
The invention discloses an indicating device for a laser, which comprises a laser chip main body, a laser emitting assembly and an optical shutter assembly, wherein the laser emitting assembly is arranged on one side of the laser chip main body, and the laser emitting assembly focuses and collects laser generated by the laser chip main body and then emits the laser through an optical fiber; the optical gate component is arranged beside the laser emission component and is used for switching an optical path of the laser emission component in a shielding mode. The optical gate component and the laser chip main body are controlled electrically in a unified mode, and the optical gate component is moved on the optical path of the laser emitting component and is shielded to correspond to the operation and the shutdown of the laser chip main body. The optical gate component comprises a shell, an inductance coil, an end block, a movable iron core, a light blocking rod and an elastic body, wherein a rod penetrating hole is formed in the outer wall of the laser emission component; the inductance coil is arranged in the shell, the axis of the inductance coil is perpendicular to and intersected with the axis of the optical path of the laser emission component, and the center of the inductance coil is provided with the movable iron core.
Description
Technical Field
The invention relates to the field of lasers, in particular to an indicating device for a laser.
Background
High-power fiber lasers are increasingly commonly applied in the fields of welding, cutting and the like. Since most of the light emitted by many high-power lasers is invisible light or has extremely high power density, it is required that the working part of the high-power laser is calibrated by visible indicating light during application, and then the high-power laser works, and most of the indicating light is emitted by a red light semiconductor laser.
In the working process of the high-power laser, high-energy light emitted by the high-power laser through the optical fiber returns to a part of a processed workpiece, and the returned light carrying large energy is irradiated back to the laser for indication through the optical fiber, so that the red-light semiconductor laser is damaged, the red-light semiconductor laser cannot work normally or even is directly scrapped, the use of the whole machine is influenced, and customer complaints and high after-sale cost are caused.
In the prior art, the common method is as follows: an isolation optical device is arranged in an optical path of the red light semiconductor laser, the indication light is transmitted, but returned high-energy infrared light is isolated, and the damage risk of a semiconductor chip is reduced. However, the isolation degree of the optical isolation method can only be about 30 DB, red light damage is still a common phenomenon, the situation that the isolator is damaged can even occur when the return power is high, and even if the optical isolation is increased to a higher level, the obvious damage of the red light chip can still be observed when the pulse operation is performed. Therefore, the damage rate of the indicating device matched with a high-power optical fiber laser for welding and cutting is high.
Disclosure of Invention
The present invention is directed to an indicating device for a laser to solve the problems of the prior art.
In order to achieve the purpose, the invention provides the following technical scheme:
an indicating device for a laser comprises a laser chip main body, a laser emitting assembly and an optical shutter assembly, wherein the laser emitting assembly is arranged on one side of the laser chip main body, and the laser emitting assembly focuses and collects laser generated by the laser chip main body and then emits the laser through an optical fiber; the optical gate component is arranged beside the laser emission component and is used for switching an optical path of the laser emission component in a shielding mode.
The optical gate component replaces the traditional optical isolation method, is in a mechanical isolation mode, the optical isolation degree of the optical gate can approach, the working mode of the optical gate component is that when an indicating device needs to emit indicating light outwards, the optical gate component moves away from the light path of a laser emitting component to enable the indicating light to pass through and reach a required position along an optical fiber, when an external high-power laser starts to work for welding or cutting, the indicating light of a laser chip main body is not needed any more, the optical gate component shields the light path of the laser emitting component, the high-power laser reflected from the optical fiber cannot reach the laser chip main body, and the laser chip main body is prevented from being damaged.
Further, the optical gate component and the laser chip main body are controlled electrically in a unified mode, and the optical gate component is moved on the optical path of the laser emitting component and is shielded to correspond to the operation and the shutdown of the laser chip main body. The optical gate component and the laser chip main body are synchronously driven, and the stop of the operation of the indicating device is controlled only by simultaneously controlling the on-off of the optical gate component and the laser chip main body by the same control switch.
Further, the optical gate component comprises a shell, an inductance coil, an end block, a movable iron core, a light blocking rod and an elastic body, wherein a rod penetrating hole is formed in the outer wall of the laser emission component; the inductance coil is arranged in the shell, the axis of the inductance coil is perpendicular to and intersected with the optical path axis of the laser emission assembly, a movable iron core is arranged in the center of the inductance coil, an end block is arranged at one end, far away from the laser emission assembly, of the inductance coil, the light blocking rod is arranged on the movable iron core, the light blocking rod penetrates through the shell and faces the laser emission assembly, the rod penetrating hole and the light blocking rod are arranged on the same straight line, the elastic body is arranged on at least one side, in the light blocking rod axial direction, of the movable iron core, one end of the elastic body abuts against the movable iron core, and.
The shell is used for providing a mounting position for other components, when the inductance coil is electrified, a magnetic field is established in the space around the inductance coil, the magnetic field in the inductance coil is the most dense place, after the magnetic field is established by the inductance coil, the movable iron core is magnetized and moves along the axis, the movable iron core is abutted and stopped when moving to the end block, the movable iron core after moving is also moved with the light blocking rod, the light blocking rod leaves from the channel of the laser emission assembly, and light of the laser emission assembly can pass through the light blocking rod. The light-blocking rod is a component made of opaque material. When outside high power laser instrument during operation, this indicating device need be shut down, at this moment with laser chip main part and inductance coils outage, the elastomer will move the iron core and reset, let the pole that is in the light reinsert in wearing the pole hole, shelter from the light of the high power laser instrument that returns through optic fibre reflection, if the elastomer sets up between moving iron core and end block, then the elastomer is that the extension is kick-backed and is reset, if the elastomer setting is moving between iron core and the shell, after inductance coils outage, the elastomer can draw back the shrink and get back to the primary position.
As optimization, the inner wall of the position where the light blocking rod passes through on the shell is provided with a limiting block. The stopper is used for the restriction to move the motion of iron core towards laser instrument transmission subassembly, moves the iron core and moves towards laser instrument transmission subassembly and stop moving when leaning on the stopper promptly, becomes to moving the both ends position limit of iron core on the moving direction jointly with end block and confirms, if make the stopper with the shell detachable, just so can change the stroke length of moving the iron core through changing the stopper, adapt to the not laser instrument transmission subassembly inner diameter of equidimension.
The end block is a fixed iron core, a demagnetizing gasket is arranged between the end block and the movable iron core, the elastic body is only arranged on one side of the movable iron core far away from the end block, and two ends of the elastic body are respectively fixed with the movable iron core and the shell. The fixed iron core can also be magnetized after the inductance coil is electrified, the attraction of a magnetic field to the movable iron core is further enhanced by the magnetized end block, the opening action of the movable iron core is quicker, the working timeliness of the indicating device is improved, the demagnetizing gasket between the end block and the movable iron core prevents the end block and the movable iron core from being adsorbed to each other too tightly and difficult to separate, the elastic body is arranged on one side of the movable iron core far away from the end block, and when the inductance coil is electrified, the end block and the movable iron core can be closer.
Preferably, a reflection light sensor and an indication light sensor are arranged at the end part, far away from the movable iron core, of the light blocking rod, the indication light sensor faces the laser chip main body, and the reflection light sensor faces the optical fiber. The reflected light sensor and the indicating light sensor are both photoelectric sensors, one is used for detecting the intensity of the reflected light, the other is used for detecting whether indicating light irradiates on the light blocking rod, when the light blocking rod is inserted into the rod penetrating hole to block a light path in the laser emission assembly, if the indicating light emitted by the laser chip main body irradiates on the indicating light sensor, the operation of the movable iron core in the inductance coil is not smooth, the light path cannot be opened, and an indication is sent to the outside through the indicating light sensor to prompt the failure of the optical gate assembly; when the light blocking rod is inserted into the rod penetrating hole to normally block the work, the reflected light sensor detects light from the optical fiber, the beam of light is reflected light of the high-power laser on the workpiece, the intensity and the power of the beam of light are detected, parameter data are fed back, and the light blocking device is beneficial for operators to know the welding or cutting state of the workpiece.
Preferably, the emission light of the laser chip body is blue visible light. The light emitted by the laser chip main body is mainly used for station positioning before the high-power laser works, visible light such as red light, green light, yellow light, blue light and the like can be used, in the visible light, the blue light is shorter in wavelength and weaker in volatility than other light, so that the characteristics such as diffraction and the like are weaker, the light can be conveniently focused and concentrated on one position, light spots are clear, and the positioning performance is better.
Preferably, the elastic body is a corrugated spring. The elasticity of the wave spring is more uniform in the circumferential direction than that of a conventional cylindrical spring, and the axial length space is small.
Compared with the prior art, the invention has the beneficial effects that: the invention switches on and off the light path between the laser chip main body and the optical fiber through the mechanical optical gate structure, directly avoids the damage of the return light of the high-power laser to the semiconductor red laser, and simultaneously, a sensor can be arranged on the mechanical optical gate light blocking rod, and the stability of the laser and the high-power laser is fed back by detecting the power of the return light through the sensor. In addition, the electromagnet optical gate has the advantages of high reaction speed, high reliability, small size, convenience in installation, no need of a complex driving circuit and low cost. The synchronous driving with the red laser can be realized, when the indicating light works, the electromagnet is electrified to work, the light blocking rod is pulled out, the light path is conducted, the indicating light can smoothly enter the optical fiber, when the indicating light is closed, the electromagnet is also closed, and the light blocking rod rebounds to block the light path.
Drawings
In order that the present invention may be more readily and clearly understood, a more particular description of the invention briefly described above will be rendered by reference to specific embodiments that are illustrated in the appended drawings.
FIG. 1 is a schematic structural diagram of a laser emitting assembly according to the present invention when the optical path is blocked;
FIG. 2 is a schematic structural diagram of the laser emitting assembly of the present invention when the optical path is unobstructed;
FIG. 3 is a diagram showing the appearance of a laser chip body and a laser emitting assembly according to the present invention;
fig. 4 is a view showing an end structure of the light-blocking rod according to the present invention.
In the figure: 101-laser chip main body, 102-laser emitting component, 103-rod penetrating hole, 104-optical fiber, 105-outer shell, 106-inductance coil, 107-end block, 108-degaussing gasket, 109-movable iron core, 110-light blocking rod, 111-elastic body, 112-limiting block, 113-reflection light sensor, 114-indication light sensor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, an indicating device for a laser includes a laser chip main body 101, a laser emitting assembly 102 and a shutter assembly, wherein the laser emitting assembly 102 is disposed on one side of the laser chip main body 101, and the laser emitting assembly 102 focuses and collects laser generated by the laser chip main body 101 and emits the laser through an optical fiber 104; a shutter assembly is disposed alongside the laser emitting assembly 102 and switches the laser emitting assembly 102 beam path in a blocking manner.
The optical gate component replaces the traditional optical isolation method, is in a mechanical isolation mode, the optical isolation degree of the optical gate can be close to 100%, the working mode of the optical gate component is that when an indicating device needs to emit indicating light to the outside, the optical gate component moves away from the light path of the laser emitting component 102, the indicating light rays can pass through the optical gate component and reach a required position along the optical fiber 104, when an external high-power laser starts to work for welding or cutting, the indicating light of the laser chip main body 101 is not needed any more, the optical gate component shields the light path of the laser emitting component 102, the high-power laser reflected from the optical fiber 104 cannot reach the laser chip main body 101, and the laser chip main body 101 is prevented from being damaged. The shutter component can be switched on and off by an electromagnet, an electric push rod, a pneumatic valve rod and the like.
The optical shutter component and the laser chip main body 101 are controlled electrically in a unified mode, and the optical shutter component moves and shields the laser emitting component 102 on the optical path and corresponds to the operation and stop of the laser chip main body 101. The shutter assembly and the laser chip main body 101 are driven synchronously, and the stop of the operation of the indicating device is controlled only by simultaneously controlling the on-off of the shutter assembly and the laser chip main body 101 through the same control switch.
As shown in fig. 1 to 3, the shutter assembly includes a housing 105, an inductance coil 106, an end block 107, a movable iron core 109, a light blocking rod 110 and an elastic body 111, wherein a rod penetrating hole 103 is formed in an outer wall of the laser emission assembly 102; the inductance coil 106 is arranged in the outer shell 105, the axis of the inductance coil 106 is perpendicular to and intersects with the optical path axis of the laser emission assembly 102, a movable iron core 109 is arranged in the center of the inductance coil 106, an end block 107 is arranged at one end, far away from the laser emission assembly 102, of the inductance coil 106, a light blocking rod 110 is arranged on the movable iron core 109, the light blocking rod 110 penetrates through the outer shell 105 and faces the laser emission assembly 102, the rod penetrating hole 103 and the light blocking rod 110 are arranged on the same straight line, an elastic body 111 is arranged on at least one side, in the axial direction, of the light blocking rod 110, of the movable iron core 109, one end of the elastic body 111 abuts against the movable iron core 109.
The housing 105 is used to provide a mounting location for other components, when the inductor 106 is energized, a magnetic field is established in the space around the inductor 106, where the magnetic field in the inductor 106 is the most dense, after the inductor 106 establishes the magnetic field, the movable core 109 is magnetized and moved along the axis, the movable core 109 stops when moving to the end block 107, and the moved movable core 109 moves along with the light blocking rod 110, the light blocking rod 110 moves away from the laser emitting assembly 102, and the light of the laser emitting assembly 102 is passed through. The light blocking rod 110 is a component made of opaque material, such as metal, e.g., stainless steel, aluminum, copper, etc., and black plastic can also be used to make the light blocking rod 110 as long as it can effectively block light. When an external high-power laser works, the indicating device needs to be stopped, at the moment, the laser chip main body 101 and the inductance coil 106 are powered off, the movable iron core 109 is reset by the elastic body 111, the light blocking rod 110 is reinserted into the rod penetrating hole 103, light of the high-power laser reflected back through the optical fiber 104 is blocked, if the elastic body 111 is arranged between the movable iron core 109 and the end block 107, the elastic body 111 is in extension rebound reset, if the elastic body 111 is arranged between the movable iron core 109 and the outer shell 105, as shown in fig. 1 and 2, fig. 1 shows an original state of the elastic body 111, fig. 2 shows a stretching state, and after the inductance coil 106 is powered off, the elastic body 111 can be pulled back to the position shown in fig. 1.
As shown in fig. 1 and 2, a limiting block 112 is disposed on an inner wall of the housing 105 where the light blocking rod 110 passes through. The limiting block 112 is used for limiting the movement of the movable iron core 109 towards the laser emitting assembly 102, the movable iron core 109 stops moving when moving towards the laser emitting assembly 102 and abuts against the limiting block 112, the movable iron core 109 and the end block 107 jointly form a limit for the positions of two ends of the movable iron core 109 in the moving direction, and if the limiting block 112 is made to be detachable with the shell 105, the stroke length of the movable iron core 109 can be changed by replacing the limiting block 112, so that the laser emitting assembly 102 is suitable for the inner diameters of laser emitting assemblies 102 with different sizes.
As shown in fig. 1 and 2, the end block 107 is a fixed iron core, a demagnetizing spacer 108 is disposed between the end block 107 and the movable iron core 109, the elastic body 111 is disposed only on one side of the movable iron core 109 away from the end block 107, and both ends of the elastic body 111 are respectively fixed to the movable iron core 109 and the housing 105. The fixed iron core is also magnetized after the inductance coil 106 is electrified, the attraction force of a magnetic field to the movable iron core 109 is further enhanced by the magnetized end block 107, the opening action of the movable iron core 109 is enabled to be faster, the working timeliness of the indicating device is improved, the demagnetizing gasket 108 positioned between the end block 107 and the movable iron core 109 prevents the end block 107 and the movable iron core 109 from being difficult to detach due to the fact that the end block 107 and the movable iron core 109 are adsorbed tightly, the elastic body 111 is arranged on one side, far away from the end block 107, of the movable iron core 109, and the end block 107 and the movable iron core 109 can be closer to each other when the inductance coil 106.
As shown in fig. 2 and 4, a reflective optical sensor 113 and an indicating optical sensor 114 are disposed on the end of the light blocking rod 110 away from the plunger 109, the indicating optical sensor 114 faces the laser chip main body 101, and the reflective optical sensor 113 faces the optical fiber 104. The reflected light sensor 113 and the indication light sensor 114 are all photoelectric sensors, one is used for detecting the intensity of reflected light, the other is used for detecting whether indication light irradiates on the light blocking rod 110, when the light blocking rod 110 is inserted into the rod penetrating hole 103 to block a light path in the laser emission assembly 102, if the indication light emitted by the laser chip main body 101 irradiates on the indication light sensor 114, the operation of the movable iron core 109 in the inductance coil 106 is not smooth, the light path cannot be opened, and an indication should be given to the outside through the indication light sensor 114 to prompt the failure of the optical shutter assembly; when the light blocking rod 110 is inserted into the rod penetrating hole 103 to perform normal blocking operation, the reflected light sensor 113 detects light from the optical fiber 104, the light is reflected light of the high-power laser on a workpiece, the intensity and the power of the light are detected, parameter data are fed back, and the operator can know the welding or cutting state of the workpiece conveniently.
The emitted light of the laser chip body 101 is blue visible light. The light emitted by the laser chip main body 101 is mainly used for station positioning before the high-power laser works, so that only visible light is needed, such as red light, green light, yellow light, blue light and the like, in the visible light, the blue light has shorter wavelength and weaker volatility than other light, so that the characteristics of diffraction and the like are weaker, the light can be more conveniently focused and concentrated on one position, light spots are clear, the positioning performance is better, and purple light with lower volatility is lower than the blue light in visual identification performance due to purple, so that the positioning effect is inferior to that of the blue light.
The elastic body 111 is a wave spring. The elasticity of the wave spring is more uniform in the circumferential direction than that of a conventional cylindrical spring, and the axial length space is small.
The main use process of the device is as follows: when the laser chip main body 101 works, the inductance coil 106 is electrified to generate a magnetic field, the end block 107 and the movable iron core 109 are magnetized under the action of the magnetic field force, the end block 107 and the movable iron core 109 are formed together and adsorbed to each other, the movable iron core 109 moves downwards under the action of the adsorption force until the demagnetizing gasket 108 is contacted with the end block 107, the light blocking rod 110 moves downwards along with the movable iron core and moves out of the rod penetrating hole 103, and light emitted by the laser chip main body 101 passes through the laser emitting assembly 102 and is output through the optical fiber 104 to position a workpiece;
when an external high-power laser works, the laser chip main body 101 stops working, the inductance coil 106 is powered off, a gap exists between the end block 107 and the movable iron core 109 due to the design of the demagnetizing gasket 108, namely, magnetic lines of force between the end block 107 and the movable iron core 109 are incomplete, magnetism of the end block 107 and the movable iron core 109 disappears rapidly, the elastic body 111 enables the movable iron core 109 to move upwards under the action of restoring force, the light blocking rod 110 moves upwards along with the movable iron core 109 and stops moving after the movable iron core 109 moves to be in contact with the limiting block 112 through the rod penetrating hole 103, and the reflected light sensor 113 can monitor the optical power returned by the high-power laser through the optical fiber 104 at any time.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (8)
1. An indicating device for a laser, characterized by: the indicating device comprises a laser chip main body (101), a laser emitting assembly (102) and a shutter assembly, wherein the laser emitting assembly (102) is arranged on one side of the laser chip main body (101), and the laser emitting assembly (102) focuses and gathers laser generated by the laser chip main body (101) and then emits the laser through an optical fiber (104); the optical shutter component is arranged beside the laser emission component (102) and is used for switching an optical path of the laser emission component (102) in a shielding mode.
2. An indicating device for a laser according to claim 1, wherein: the optical shutter component and the laser chip main body (101) are controlled electrically in a unified mode, and the optical shutter component moves and shields the laser emitting component (102) on the optical path and corresponds to the operation and stop of the laser chip main body (101).
3. An indicating device for a laser according to claim 1, wherein: the optical shutter assembly comprises a shell (105), an inductance coil (106), an end block (107), a movable iron core (109), a light blocking rod (110) and an elastic body (111), wherein a rod penetrating hole (103) is formed in the outer wall of the laser emission assembly (102); the laser emission device comprises an inductance coil (106) and a laser emission assembly (102), wherein the inductance coil (106) is arranged in a shell (105), the axis of the inductance coil (106) is perpendicular to and intersected with the optical path axis of the laser emission assembly (102), a movable iron core (109) is arranged in the center of the inductance coil (106), an end block (107) is arranged at one end, far away from the laser emission assembly (102), of the inductance coil (106), a light blocking rod (110) is arranged on the movable iron core (109), the light blocking rod (110) penetrates through the shell (105) and faces the laser emission assembly (102), a rod penetrating hole (103) and a light blocking rod (110) are arranged on the same straight line, an elastic body (111) is arranged on at least one side, in the axial direction, of the light blocking rod (110) of the movable iron core (109), one end of the elastic body (111) abuts against the movable.
4. An indicating device for a laser according to claim 3, wherein: and the inner wall of the position, where the light blocking rod (110) passes, on the shell (105) is provided with a limiting block (112).
5. An indicating device for a laser according to claim 3, wherein: the end block (107) is a fixed iron core, a demagnetizing gasket (108) is arranged between the end block (107) and the movable iron core (109), the elastic body (111) is only arranged on one side of the movable iron core (109) far away from the end block (107), and two ends of the elastic body (111) are respectively fixed with the movable iron core (109) and the shell (105).
6. An indicating device for a laser according to claim 3, wherein: the end part, far away from the movable iron core (109), of the light blocking rod (110) is provided with a reflection light sensor (113) and an indication light sensor (114), the indication light sensor (114) faces the laser chip main body (101), and the reflection light sensor (113) faces the optical fiber (104).
7. An indicating device for a laser according to claim 1, wherein: the emitted light of the laser chip body (101) is blue visible light.
8. An indicating device for a laser according to claim 3, wherein: the elastic body (111) is a corrugated spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910894500.7A CN112542763A (en) | 2019-09-20 | 2019-09-20 | Indicating device for laser |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910894500.7A CN112542763A (en) | 2019-09-20 | 2019-09-20 | Indicating device for laser |
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| CN112542763A true CN112542763A (en) | 2021-03-23 |
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| CN201910894500.7A Pending CN112542763A (en) | 2019-09-20 | 2019-09-20 | Indicating device for laser |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1572049A (en) * | 2001-10-16 | 2005-01-26 | 株式会社片冈制作所 | Pulse oscillation solid-sate laser apparatus and laser machining apparatus |
| CN102510006A (en) * | 2011-11-21 | 2012-06-20 | 中国科学院半导体研究所 | Optical shutter device for high-power laser |
| US20130094529A1 (en) * | 2011-03-29 | 2013-04-18 | Gigaphoton Inc. | Laser apparatus, method for generating laser beam, and extreme ultraviolet light generation system |
| CN206180374U (en) * | 2016-08-03 | 2017-05-17 | 深圳市广盛浩科技有限公司 | Coaxial encapsulation semiconductor laser focuses |
| CN207183011U (en) * | 2017-06-06 | 2018-04-03 | 北京京唐德信轨道设备有限公司 | A kind of electromagnet |
| CN109755851A (en) * | 2017-11-07 | 2019-05-14 | 核工业理化工程研究院 | Internal cutting off light path type laser and control method |
-
2019
- 2019-09-20 CN CN201910894500.7A patent/CN112542763A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1572049A (en) * | 2001-10-16 | 2005-01-26 | 株式会社片冈制作所 | Pulse oscillation solid-sate laser apparatus and laser machining apparatus |
| US20130094529A1 (en) * | 2011-03-29 | 2013-04-18 | Gigaphoton Inc. | Laser apparatus, method for generating laser beam, and extreme ultraviolet light generation system |
| CN102510006A (en) * | 2011-11-21 | 2012-06-20 | 中国科学院半导体研究所 | Optical shutter device for high-power laser |
| CN206180374U (en) * | 2016-08-03 | 2017-05-17 | 深圳市广盛浩科技有限公司 | Coaxial encapsulation semiconductor laser focuses |
| CN207183011U (en) * | 2017-06-06 | 2018-04-03 | 北京京唐德信轨道设备有限公司 | A kind of electromagnet |
| CN109755851A (en) * | 2017-11-07 | 2019-05-14 | 核工业理化工程研究院 | Internal cutting off light path type laser and control method |
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