CN112539831B - Calibration method and system of area array detector and integrating sphere uniformity calibration method - Google Patents
Calibration method and system of area array detector and integrating sphere uniformity calibration method Download PDFInfo
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Abstract
The invention provides a calibration method and a calibration system of an area array detector and an integrating sphere uniformity calibration method, which solve the problem of test errors caused by time variation of integrating sphere light source brightness and spatial non-uniformity of output light. The system comprises a light source, an integrating sphere, a data acquisition control system, a time synchronization system, a photoelectric detector A, a photoelectric detector B and a calibration coordinate plate; the light source and the photoelectric detector A are arranged on the integrating sphere; the photoelectric detector A, the photoelectric detector B and the time synchronization system are connected with the data acquisition control system; the time synchronization system is connected with the calibrated area array detector; the calibration coordinate plate and the photoelectric detector B are positioned at the light outlet of the integrating sphere; the invention can reduce the test error caused by time and space influence.
Description
Technical Field
The invention belongs to the field of optical testing, and relates to a calibration method and a calibration system for an area array detector.
Technical Field
The integrating sphere is a hollow sphere whose inner wall is coated with white diffuse reflection material, also called photometric sphere, light flux sphere. The light source is placed in the integrating sphere, light emitted by the light source is subjected to diffuse reflection on the inner wall of the integrating sphere for countless times, and after full integration, light spots on the plane of the light outlet of the integrating sphere are uniform diffused light. The calibration method is mainly used for calibrating and correcting imaging systems and devices in laboratories.
The integrating sphere light source is generally considered to have high time stability and spatial uniformity, the time stability of the integrating sphere light source can reach 98%, and the spatial uniformity of the integrating sphere light source can reach 98%. However, with the higher calibration accuracy requirements for imaging systems and devices, the light source time stability error of the integrating sphere light source itself and the spatial non-uniformity error of the output light of the integrating sphere cannot meet the high-accuracy calibration requirements.
Disclosure of Invention
The invention aims to solve the problem of test errors caused by time-dependent change of light source brightness of an integrating sphere and nonuniform space of output light, provides a calibration method and a calibration system of an area array detector, and the method can also be applied to calibration of output uniformity of the integrating sphere.
The basic principle is as follows: designing a uniform light source device which consists of an integrating sphere, a light source and an electric diaphragm, ensuring that the uniform light source device can output stable and energy-adjustable uniform light and meeting the test requirements of a calibrated area array detector; designing a time stability calibration module which consists of a data acquisition control system, a time synchronization system and a photoelectric detector and provides an accurate time stability correction coefficient for the calibrated area array detector; and designing a spatial uniformity calibration module, which consists of a data acquisition control system, a time synchronization system, a photoelectric detector, a two-dimensional translation stage and a calibration coordinate plate and provides an accurate spatial uniformity correction coefficient for the calibrated area array detector. And correcting the test data of the calibrated area array detector by using the time stability correction coefficient and the space uniformity correction coefficient.
The technical solution of the invention is as follows:
the calibration method of the area array detector is characterized by comprising the following steps:
step 1, building a calibration system;
installing a photoelectric detector A in an integrating sphere; a calibration coordinate plate and a photoelectric detector B are arranged at a light outlet of an integrating sphere and are positioned between the integrating sphere and a calibrated area array detector;
step 2, obtaining a spatial uniformity correction coefficient;
simultaneously acquiring output values of a photoelectric detector A and a photoelectric detector B aiming at different calibration points on a calibration coordinate plate, and calculating to obtain a spatial uniformity correction coefficient corresponding to each calibration point according to the output values; comparing the image of the calibration coordinate plate shot by the calibrated area array detector with the coordinates of the calibration point of the calibration coordinate plate to obtain a spatial uniformity correction coefficient;
the calibrated area array detector starts to collect images and collects the output value of the photoelectric detector A at the same time, and the collected data is processed to obtain a time stability correction coefficient;
and 4, substituting the spatial uniformity correction coefficient and the time stability correction coefficient into the data collected by the calibrated area array detector to obtain calibrated data.
Further, step 2 specifically comprises:
step 21, selecting n calibration points on a calibration coordinate plate, wherein n is a natural number more than or equal to 2; sequentially controlling the photoelectric detector B to move to each calibration point, and synchronously acquiring the output value a of the photoelectric detector A when the photoelectric detector B reaches each calibration pointiAnd the output value B of the photodetector Bi(ii) a Wherein i represents the serial number of the index point and is a natural number from 1 to n;
step 22, calculating the output value a of the photoelectric detector A according to the formula 1iAverage value a of (a);
calculating the time stability correction coefficient t corresponding to each calibration point according to formula 2i；
Step 23, calculating to obtain the output value B of the photoelectric detector B without time influence at each calibration point according to the formula 3i′；
Calculating the photodetection according to equation 4The B output value Bi' average value b;
step 24, calculating the space uniformity correction coefficient s corresponding to each calibration point according to the formula 5i；
Step 25, shooting the calibration coordinate plate by using the calibrated area array detector, comparing the shot image with the coordinates of the calibration point of the calibration coordinate plate, and obtaining the spatial uniformity correction coefficient s of each pixel or area of the detector corresponding to the coordinates of the calibration pointi；
The step 3 specifically comprises the following steps:
step 31, controlling the acquisition time of the photoelectric detector A to be synchronous with the exposure time of the calibrated area array detector;
respectively collecting output values of a photoelectric detector A in different exposure times of a calibrated area array detector, wherein the photoelectric detector A has a plurality of output values in each exposure time; calculating the average value a of multiple output values of the photoelectric detector A in each exposure timej' taking the average value as the output value of the photoelectric detector A in the corresponding exposure time; wherein j represents the exposure time sequence number of the calibrated area array detector and is a natural number from 1 to m;
step 32, calculating the average value of the output values of the photoelectric detector A in all the exposure time of the calibrated area array detector according to the formula 6
Step 33, calculating the time stability of the calibrated area array detector within the j exposure time according to the formula 7Coefficient of sexual correction tj；
The step 4 specifically comprises the following steps:
calculating a corrected test value eta of the ith pixel or area of the jth exposure of the calibrated area array detector according to a formula 8ij correction；
Wherein etaij practiceThe actual test value of the ith pixel or area of the jth exposure of the calibrated area array detector is obtained.
Further, in step 21, the two-dimensional translation stage is controlled to move the photodetector B to each calibration point.
The invention also provides a calibration system of the area array detector, which is characterized in that: the system comprises a light source, an integrating sphere, a data acquisition control system, a time synchronization system, a photoelectric detector A, a photoelectric detector B and a calibration coordinate plate;
the light source and the photoelectric detector A are arranged on the integrating sphere; the photoelectric detector A, the photoelectric detector B and the time synchronization system are connected with the data acquisition control system; the time synchronization system is connected with the calibrated area array detector; the calibration coordinate plate and the photoelectric detector B are positioned at the light outlet of the integrating sphere;
the light source is used for providing stable light energy for the integrating sphere; the integrating sphere is used for homogenizing light energy; the photoelectric detector A is used for measuring the light energy in the integrating sphere; the time synchronization system is used for sending a synchronous acquisition control instruction to the data acquisition control system; the photoelectric detector B is used for collecting light energy at the light outlet of the integrating sphere at each calibration point on the calibration coordinate plate; the data acquisition control system comprises a memory and a processor, wherein a computer program is stored in the memory, and when the computer program is executed by the processor, the data acquisition control system executes the following steps:
step a, obtaining a spatial uniformity correction coefficient;
receiving a synchronous acquisition control instruction sent by a time synchronization system, simultaneously acquiring output values of a photoelectric detector A and a photoelectric detector B aiming at different calibration points, and calculating to obtain a spatial uniformity correction coefficient corresponding to each calibration point according to the output values; comparing the image of the calibration coordinate plate shot by the calibrated area array detector with the coordinates of the calibration point of the calibration coordinate plate to obtain a spatial uniformity correction coefficient;
step b, obtaining a time stability correction coefficient;
receiving a synchronous acquisition control instruction sent by a time synchronization system, starting to acquire an image by a calibrated area array detector, acquiring an output value of a photoelectric detector A, and processing acquired data to obtain a time stability correction coefficient;
and c, substituting the spatial uniformity correction coefficient and the time stability correction coefficient into the image data collected by the calibrated area array detector to obtain corrected data.
Further, the step a specifically comprises:
step a1, sequentially controlling the photoelectric detector B to move to each calibration point, and synchronously acquiring the output value a of the photoelectric detector A according to the instruction sent by the time synchronization system when the photoelectric detector B reaches each calibration pointiAnd the output value B of the photodetector Bi(ii) a Wherein i represents the serial number of the index point and is a natural number from 1 to n,
step a2, calculating the output value a of the photoelectric detector A according to formula 1iAverage value a of (a);
calculating the time correction coefficient t corresponding to each calibration point according to formula 2i；
Step a3, rootCalculating to obtain the output value B of the photoelectric detector B without time influence at each calibration point according to the formula 3i′；
Calculating the output value B of the photoelectric detector B according to the formula 4i' average value b;
step a4, calculating the space uniformity correction coefficient s corresponding to each calibration point according to formula 5i；
Step a5, comparing the image of the calibration coordinate board shot by the calibrated area array detector with the coordinate of the calibration point of the calibration coordinate board, and obtaining the space uniformity correction coefficient s of each pixel or area of the detector corresponding to the coordinate of the calibration pointi；
The step b is specifically as follows:
b1, according to the instruction sent by the time synchronization system, synchronizing the acquisition time of the photoelectric detector A with the exposure time of the calibrated area array detector;
respectively collecting output values of a photoelectric detector A in different exposure times of a calibrated area array detector, wherein the photoelectric detector A has a plurality of output values in each exposure time; calculating the average value a of multiple output values of the photoelectric detector A in each exposure timej' taking the average value as the output value of the photoelectric detector A in the corresponding exposure time; wherein j represents the exposure time sequence number of the calibrated area array detector and is a natural number from 1 to m;
step b2, calculating the average value of the output values of the photoelectric detector A in all the exposure time of the calibrated area array detector according to the formula 6
Step b3, calculating the time stability correction coefficient t in the jth exposure time of the calibrated area array detector according to the formula 7j；
The step c is specifically as follows:
calculating a corrected test value eta of the ith pixel or area of the jth exposure of the calibrated area array detector according to a formula 8ij correction；
Wherein etaij practiceThe actual test value of the ith pixel or area of the jth exposure of the calibrated area array detector is obtained.
Furthermore, in order to adjust the output light energy and the position of the photoelectric detector B, the calibration system also comprises a two-dimensional translation table and an electric diaphragm which are connected with the data acquisition control system; the two-dimensional translation table and the electric diaphragm move according to a control instruction of the data acquisition control system; the two-dimensional translation stage is arranged at the light outlet of the integrating sphere, and the photoelectric detector B is arranged on an object stage of the two-dimensional translation stage; the calibration coordinate plate is arranged on the front surface of the two-dimensional translation table and is opposite to the surface of the calibrated area array detector;
the electric diaphragm is arranged at the light inlet of the integrating sphere and positioned between the light source and the integrating sphere, and the output light brightness of the integrating sphere is adjusted by controlling the electric diaphragm.
Further, the light source is monochromatic light or polychromatic light.
Further, the size of the calibration coordinate plate is larger than the area of a light outlet of the integrating sphere.
The invention also provides an integrating sphere output uniformity calibration method, which is characterized by comprising the following steps:
step 1, building a calibration system;
installing a photoelectric detector A in an integrating sphere; installing a calibration coordinate plate and a photoelectric detector B at a light outlet of an integrating sphere;
step 2, selecting n calibration points on the calibration coordinate plate, wherein n is a natural number more than or equal to 2; sequentially controlling the photoelectric detector B to move to each calibration point, and synchronously acquiring the output value a of the photoelectric detector A when the photoelectric detector B reaches each calibration pointiAnd the output value B of the photodetector Bi(ii) a Wherein i represents the serial number of the index point and is a natural number from 1 to n;
calculating the time stability correction coefficient t corresponding to each calibration point according to formula 2i；
Step 4, calculating to obtain the output value B of the photoelectric detector B without time influence at each calibration point according to the formula 3i′；
Calculating the output value B of the photoelectric detector B according to the formula 4i' average value b;
The invention has the beneficial effects that:
1. according to the invention, the time stability and the spatial uniformity of the output light of the integrating sphere are calibrated, so that the test errors caused by the time stability of a light source and the spatial non-uniformity of the output light of the integrating sphere are reduced.
2. The calibration system has simple structure, is easy to realize engineering, and reduces the design difficulty of the integrating sphere light source with high time stability and high space uniformity.
3. The method for acquiring the spatial uniformity correction coefficient for testing can be used for calibrating the output uniformity of other integrating spheres.
Drawings
FIG. 1 is a schematic diagram of an exemplary calibration system;
the reference numbers in the figures are: the method comprises the following steps of 1-a light source, 2-an electric diaphragm, 3-an integrating sphere, 4-a photoelectric detector A, 5-a data acquisition control system, 6-a two-dimensional translation table, 7-a photoelectric detector B, 8-a time synchronization system, 9-a calibrated area array detector and 10-a calibration coordinate plate.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
As shown in fig. 1, the calibration system of the present embodiment is composed of a uniform light source device, a temporal stability calibration module, and a spatial uniformity calibration module. And a time stability calibration module is used for collecting energy of the integrating sphere in real time and providing a time stability correction coefficient for the test data of the calibrated area array detector. The space uniformity calibration module is used for calibrating the surface uniformity of an output port of the integrating sphere. And determining the spatial stability correction coefficient by shooting the calibration coordinate plate by the calibrated area array detector.
The uniform light source device comprises a light source 1, an electric diaphragm 2 and an integrating sphere 3, wherein the light source 1 and the electric diaphragm 2 are fixed at a light inlet of the integrating sphere 3, the light source 1 provides stable light energy output which can be monochromatic light or polychromatic light, and the light energy input to the integrating sphere 3 is adjusted by controlling the electric diaphragm 2. The light energy enters the integrating sphere 3, is homogenized and then is output.
The time stability calibration module comprises a photoelectric detector A4, a data acquisition control system 5 and a time synchronization system 8; the photodetector a4 and the time synchronization system 8 are both connected with the data acquisition control system 5. The calibrated area array detector 9 is connected with the time synchronization system 8. A photodetector a4 is mounted on integrating sphere 3 for detecting the light energy inside integrating sphere 3. The time synchronization system 8 can send a synchronization signal to the data acquisition control system 5 for time synchronization of the photodetector a4 and the calibrated area array detector 9; the data acquisition control system 5 is configured to receive a synchronous acquisition control instruction sent by the time synchronization system 8, start to acquire an image by the calibrated area array detector 9, acquire an output value of the photodetector a4, process the acquired data, and obtain a time stability correction coefficient.
The spatial uniformity calibration module comprises a photoelectric detector A4, a data acquisition control system 5, a time synchronization system 8, a photoelectric detector B7, a calibration coordinate plate 10 and a two-dimensional translation table 6; the photoelectric detector A4, the data acquisition control system 5, the time synchronization system 8 and the time stability calibration module are shared. The photoelectric detector A4, the photoelectric detector B7, the time synchronization system 8 and the two-dimensional translation stage 6 are all connected with the data acquisition control system 5. The two-dimensional translation stage 6 is arranged at a fixed position of a light outlet of the integrating sphere 3, and the electric detector B is arranged on an object stage of the two-dimensional translation stage 6; the calibration coordinate plate 10 is arranged on the front surface of the two-dimensional translation table 6 and is opposite to the surface of the calibrated area array detector 9; the data acquisition control system 5 can control the electric diaphragm 2 and the two-dimensional translation stage 6 to move. The two-dimensional translation stage 6 is used for moving the photodetector B7 to each calibration point of the calibration coordinate board 10. The photoelectric detector B7 is used for collecting light energy at the light outlet of the integrating sphere 3 at each calibration point on the calibration coordinate board 10; the time synchronization system 8 can send a synchronization signal to the data acquisition control system 5 for time synchronization of the photodetector a4 and the photodetector B7; the data acquisition control system 5 is used for receiving a synchronous acquisition control instruction sent by the time synchronization system 8, simultaneously acquiring output values of the photoelectric detector A4 and the photoelectric detector B7 aiming at different calibration points, and calculating to obtain a spatial uniformity correction coefficient corresponding to each calibration point according to the output values; and comparing the image of the calibration coordinate plate 10 shot by the calibrated area array detector 9 with the coordinates of the calibration point of the calibration coordinate plate 10 to obtain a spatial uniformity correction coefficient.
The working principle of the invention is as follows:
area array detector calibration typically uses an integrating sphere light source to simulate a stable, uniform light source. The integrating sphere light source is used for calibration and its main error sources: temporal stability of the light source and spatial non-uniformity of the output light of the integrating sphere.
A detector is arranged on the inner wall of the integrating sphere to measure the change of the energy of the light source in the integrating sphere along with the time, and the simultaneous acquisition of the detector and the calibrated area array detector is realized by using a time synchronization technology. And calculating to obtain a time stability correction coefficient, and further eliminating measurement errors caused by light energy change at each moment. And establishing a coordinate system for spatial distribution of output light of the integrating sphere, accurately measuring, and determining the spatial coordinate of the output integrating sphere corresponding to the light energy received by each pixel or area of the calibrated area array detector by using a photographing coordinate plate of the calibrated area array detector. And calculating to obtain a spatial uniformity correction coefficient, and further eliminating a measurement error caused by spatial non-uniformity at the moment.
The specific working process of the invention is as follows:
firstly, calibrating the space uniformity of an output port of an integrating sphere:
selecting n calibration points on the calibration coordinate plate 10, wherein n is a natural number greater than or equal to 2;
a two-dimensional translation stage 6 is placed at a fixed position at the light exit of the integrating sphere 3. The two-dimensional translation table 6 is controlled to move the photoelectric detector B7 to each calibration point step by step according to the coordinates of the calibration coordinate plate 10, and when the photoelectric detector B7 reaches each calibration point, the time synchronization system 8 and the data acquisition control system 5 synchronously acquire the output values a of the photoelectric detectors A4 and B7iAnd bi. Wherein i represents the serial number of the index point and is a natural number from 1 to n;
after the acquisition is finished, the output value a of the photoelectric detector A4 is calculatediAverage value of a:
calculating the time correction coefficient t corresponding to each calibration point according to formula 2i；
Calculating to obtain the output value B of the photoelectric detector B7 without time influence at each calibration point according to the formula 3i′；
Calculating the output value B of the photoelectric detector B7 according to formula 4i' average value b;
calculating the spatial uniformity correction coefficient s corresponding to each calibration point according to formula 5i；
And placing the calibrated area array detector 9 at a proper test position to ensure that the field of view of the calibrated area array detector 9 is not larger than the calibration coordinate plate 10. Using a calibrated area array detector 9 to shoot a calibration coordinate plate 10, comparing the shot image with the coordinates of the calibration coordinate plate 10 to obtain a spatial uniformity correction coefficient s of each pixel or area of the detector corresponding to the coordinates of the calibration pointi。
Obtaining the time stability correction coefficient t for testingi′：
The time synchronization system 8 is used to realize the synchronization of the exposure time of the calibrated area array detector 9 and the acquisition time of the photoelectric detector A4.
Respectively collecting output values of a photoelectric detector A4 in different exposure times of a calibrated area array detector 9, wherein the photoelectric detector A4 has a plurality of output values in each exposure time; calculating the average value a of multiple output values of the photodetector A4 in each exposure timej' this average value is taken as the output value of the photodetector a4 for the corresponding exposure time; wherein j represents the exposure time sequence number of the calibrated area array detector 9 and is a natural number from 1 to m;
calculating the average value of the output values of the photodetector A4 in all the exposure time of the calibrated area array detector 9 according to the formula 6
Calculating the time stability correction coefficient t in the jth exposure time of the calibrated area array detector 9 according to the formula 7j；
Acquiring test data: the corrected test value of the ith pixel or area of the jth exposure of the calibrated area array detector 9 is equal to the actual test value divided by the space uniformity correction coefficient siAnd a time stability correction coefficient tjNamely:
wherein etaij practiceThe actual test value of the ith pixel or area of the jth exposure of the calibrated area array detector 9 is obtained.
The method for obtaining the spatial uniformity correction coefficient for testing can be used for calibrating the output uniformity of other integrating spheres, and specifically comprises the following steps:
step 1, building a calibration system;
mounting a photodetector a4 within the integrating sphere; a calibration coordinate board 10 and a photoelectric detector B7 are arranged at the light outlet of the integrating sphere 3;
step 2, selecting n calibration points on the calibration coordinate plate 10, wherein n is a natural number more than or equal to 2; sequentially controlling the photoelectric detector B7 to move to each calibration point, and synchronously acquiring the output value a of the photoelectric detector A4 when the photoelectric detector B7 reaches each calibration pointiAnd the output value B of the photodetector B7i(ii) a Wherein i represents the serial number of the index point and is a natural number from 1 to n;
calculating the time stability correction coefficient t corresponding to each calibration point according to formula 2i；
Step 4, calculating to obtain the output value B of the photoelectric detector B7 without time influence at each calibration point according to the formula 3i′；
Calculating the output value B of the photoelectric detector B7 according to formula 4i' average value b;
Claims (9)
1. The calibration method of the area array detector is characterized by comprising the following steps:
step 1, building a calibration system;
a photoelectric detector A (4) is arranged in an integrating sphere (3); a calibration coordinate plate (10) and a photoelectric detector B (7) are arranged at a light outlet of an integrating sphere (3) and are positioned between the integrating sphere (3) and a calibrated area array detector (9);
step 2, obtaining a spatial uniformity correction coefficient;
aiming at different calibration points on a calibration coordinate plate (10), simultaneously acquiring output values of a photoelectric detector A (4) and a photoelectric detector B (7), and calculating according to the output values to obtain a spatial uniformity correction coefficient corresponding to each calibration point; comparing the image of the calibration coordinate plate (10) shot by the calibrated area array detector (9) with the coordinates of the calibration point of the calibration coordinate plate (10) to obtain a spatial uniformity correction coefficient;
step 3, obtaining a time stability correction coefficient;
the calibrated area array detector (9) starts to collect images and simultaneously collects the output value of the photoelectric detector A (4), and the collected data is processed to obtain a time stability correction coefficient;
and step 4, substituting the spatial uniformity correction coefficient and the time stability correction coefficient into the data collected by the calibrated area array detector (9) to obtain calibrated data.
2. The method for calibrating an area array detector as claimed in claim 1, wherein:
the step 2 specifically comprises the following steps:
step 21, selecting n calibration points on the calibration coordinate plate (10), wherein n is a natural number more than or equal to 2; sequentially controlling the photoelectric detector B (7) to move to each calibration point, and synchronously acquiring the output value a of the photoelectric detector A (4) when the photoelectric detector B (7) reaches each calibration pointiAnd the output value B of the photodetector B (7)i(ii) a Wherein i represents the serial number of the index point and is a natural number from 1 to n;
step 22, calculating light according to equation 1The electric detector A (4) outputs a value aiAverage value a of (a);
calculating the time stability correction coefficient t corresponding to each calibration point according to formula 2i；
Step 23, calculating to obtain the output value B of the photoelectric detector B (7) without time influence at each calibration point according to the formula 3i′；
Calculating the output value B of the photoelectric detector B (7) according to the formula 4i' average value b;
step 24, calculating the space uniformity correction coefficient s corresponding to each calibration point according to the formula 5i；
Step 25, shooting the calibration coordinate plate (10) by using the calibrated area array detector (9), comparing the shot image with the coordinates of the calibration point of the calibration coordinate plate (10), and obtaining the space uniformity correction coefficient s of each pixel or area of the detector corresponding to the coordinates of the calibration pointi；
The step 3 specifically comprises the following steps:
step 31, controlling the acquisition time of the photoelectric detector A (4) to be synchronous with the exposure time of the calibrated area array detector (9);
respectively collecting output values of a photoelectric detector A (4) in different exposure times of a calibrated area array detector (9), wherein the photoelectric detector A (4) has a plurality of output values in each exposure time; calculating the average value a of multiple output values of the photoelectric detector A (4) in each exposure timej', taking the average value as the output value of the photodetector A (4) in the corresponding exposure time; wherein j represents the exposure time sequence number of the calibrated area array detector (9), and is a natural number from 1 to m;
step 32, calculating the average value of the output values of the photoelectric detector A (4) in all the exposure time of the calibrated area array detector (9) according to the formula 6
Step 33, calculating a time stability correction coefficient t in the jth exposure time of the calibrated area array detector (9) according to the formula 7j；
The step 4 specifically comprises the following steps:
calculating a corrected test value eta of the ith pixel or area of the jth exposure of the calibrated area array detector (9) according to a formula 8ij correction；
Wherein etaij practiceThe actual test value of the ith pixel or area is exposed for the jth time of the calibrated area array detector (9).
3. The method for calibrating an area array detector as claimed in claim 2, wherein: in step 21, the two-dimensional translation stage (6) is controlled to move the photodetector B (7) to each calibration point.
4. A calibration system of an area array detector is characterized in that: the system comprises a light source (1), an integrating sphere (3), a data acquisition control system (5), a time synchronization system (8), a photoelectric detector A (4), a photoelectric detector B (7) and a calibration coordinate plate (10);
the light source (1) and the photoelectric detector A (4) are arranged on the integrating sphere (3); the photoelectric detector A (4), the photoelectric detector B (7) and the time synchronization system (8) are connected with the data acquisition control system (5); the time synchronization system (8) is connected with a calibrated area array detector (9); the calibration coordinate plate (10) and the photoelectric detector B (7) are positioned at the light outlet of the integrating sphere (3);
the light source (1) is used for providing stable light energy for the integrating sphere (3); the integrating sphere (3) is used for homogenizing light energy; the photoelectric detector A (4) is used for measuring the light energy in the integrating sphere (3); the time synchronization system (8) is used for sending a synchronous acquisition control instruction to the data acquisition control system (5); the photoelectric detector B (7) is used for collecting light energy at the light outlet of the integrating sphere (3) at each calibration point on the calibration coordinate plate (10); the data acquisition control system (5) comprises a memory and a processor, wherein a computer program is stored in the memory, and when the computer program is executed by the processor, the following steps are executed:
step a, obtaining a spatial uniformity correction coefficient;
receiving a synchronous acquisition control instruction sent by a time synchronization system (8), simultaneously acquiring output values of a photoelectric detector A (4) and a photoelectric detector B (7) aiming at different calibration points, and calculating according to the output values to obtain a spatial uniformity correction coefficient corresponding to each calibration point; comparing the image of the calibration coordinate plate (10) shot by the calibrated area array detector (9) with the coordinates of the calibration point of the calibration coordinate plate (10) to obtain a spatial uniformity correction coefficient;
step b, obtaining a time stability correction coefficient;
receiving a synchronous acquisition control instruction sent by a time synchronization system (8), starting to acquire an image by a calibrated area array detector (9), acquiring an output value of a photoelectric detector A (4), processing acquired data, and obtaining a time stability correction coefficient;
and c, substituting the spatial uniformity correction coefficient and the time stability correction coefficient into the image data collected by the calibrated area array detector (9) to obtain corrected data.
5. The system for calibrating an area array detector according to claim 4, wherein:
the step a is specifically as follows:
step a1, sequentially controlling the photoelectric detector B (7) to move to each calibration point, and synchronously acquiring the output value a of the photoelectric detector A (4) according to the instruction sent by the time synchronization system (8) when the photoelectric detector B (7) reaches each calibration pointiAnd the output value B of the photodetector B (7)i(ii) a Wherein i represents the serial number of the index point and is a natural number from 1 to n,
step a2, calculating the output value a of the photoelectric detector A (4) according to formula 1iAverage value a of (a);
calculating the time correction coefficient t corresponding to each calibration point according to formula 2i；
Step a3, calculating to obtain the output value B of the photoelectric detector B (7) without time influence at each calibration point according to the formula 3i′；
Calculating the output value B of the photoelectric detector B (7) according to the formula 4i' average value b;
step a4, calculating the space uniformity correction coefficient s corresponding to each calibration point according to formula 5i；
Step a5, comparing the image of the calibration coordinate board (10) shot by the calibrated area array detector (9) with the coordinates of the calibration point of the calibration coordinate board (10) to obtain the space uniformity correction coefficient s of each pixel or area of the detector corresponding to the coordinates of the calibration pointi；
The step b is specifically as follows:
b1, according to the instruction sent by the time synchronization system (8), synchronizing the acquisition time of the photoelectric detector A (4) with the exposure time of the calibrated area array detector (9);
respectively collecting output values of a photoelectric detector A (4) in different exposure times of a calibrated area array detector (9), wherein the photoelectric detector A (4) has a plurality of output values in each exposure time; calculating the average value a of multiple output values of the photoelectric detector A (4) in each exposure timej', taking the average value as the output value of the photodetector A (4) in the corresponding exposure time; wherein j represents the exposure time sequence number of the calibrated area array detector (9), and is a natural number from 1 to m;
step b2, calculating the average value of the output values of the photoelectric detector A (4) in all the exposure time of the calibrated area array detector (9) according to the formula 6
Step b3, according to the disclosureEquation 7 calculates the time stability correction coefficient t in the jth exposure time of the calibrated area array detector (9)j；
The step c is specifically as follows:
calculating a corrected test value eta of the ith pixel or area of the jth exposure of the calibrated area array detector (9) according to a formula 8ij correction；
Wherein etaij practiceThe actual test value of the ith pixel or area is exposed for the jth time of the calibrated area array detector (9).
6. The system for calibrating an area array detector according to claim 5, wherein: the device also comprises a two-dimensional translation table (6) and an electric diaphragm (2) which are connected with the data acquisition control system (5); the two-dimensional translation table (6) and the electric diaphragm (2) move according to a control instruction of the data acquisition control system (5); the two-dimensional translation stage (6) is arranged at a light outlet of the integrating sphere (3), and the photoelectric detector B (7) is arranged on an object stage of the two-dimensional translation stage (6); the calibration coordinate plate (10) is arranged on the front surface of the two-dimensional translation table (6) and is opposite to the surface of the calibrated area array detector (9);
the electric diaphragm (2) is arranged at a light inlet of the integrating sphere (3) and is positioned between the light source (1) and the integrating sphere (3), and the output light brightness of the integrating sphere (3) is adjusted by controlling the electric diaphragm (2).
7. The system for calibrating an area array detector according to claim 6, wherein: the light source (1) is monochromatic light or polychromatic light.
8. The system for calibrating an area array detector according to any one of claims 4-7, wherein: the size of the calibration coordinate plate (10) is larger than the area of a light outlet of the integrating sphere (3).
9. The integrating sphere uniformity calibration method of the calibration system based on the area array detector as claimed in any one of claims 4 to 8, characterized by comprising the following steps:
step 1, building a calibration system;
a photoelectric detector A (4) is arranged in an integrating sphere (3); a calibration coordinate plate (10) and a photoelectric detector B (7) are arranged at a light outlet of the integrating sphere (3);
step 2, selecting n calibration points on the calibration coordinate plate (10), wherein n is a natural number more than or equal to 2; sequentially controlling the photoelectric detector B (7) to move to each calibration point, and synchronously acquiring the output value a of the photoelectric detector A (4) when the photoelectric detector B (7) reaches each calibration pointiAnd the output value B of the photodetector B (7)i(ii) a Wherein i represents the serial number of the index point and is a natural number from 1 to n;
step 3, calculating the output value a of the photoelectric detector A (4) according to the formula 1iAverage value a of (a);
calculating the time stability correction coefficient t corresponding to each calibration point according to formula 2i；
Step 4, calculating to obtain the output value B of the photoelectric detector B (7) without time influence at each calibration point according to the formula 3i′；
Calculating the output value B of the photoelectric detector B (7) according to the formula 4i' average value b;
step 5, calculating the space uniformity correction coefficient s corresponding to each calibration point according to the formula 5i；
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| EP0673149A1 (en) * | 1994-03-15 | 1995-09-20 | Bayer Corporation | Method and apparatus for correcting dark-signal non-uniformity of a photo-sensor |
| JP2003214945A (en) * | 2002-01-24 | 2003-07-30 | National Institute Of Advanced Industrial & Technology | Method and device for measuring external quantum efficiency for luminescent element |
| CN101532948A (en) * | 2009-04-24 | 2009-09-16 | 西安电子科技大学 | Calibration method for CCD camera imaging application |
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