CN112503278A - Ultrahigh vacuum copper flange sealing type assembly - Google Patents

Ultrahigh vacuum copper flange sealing type assembly Download PDF

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Publication number
CN112503278A
CN112503278A CN202011533501.8A CN202011533501A CN112503278A CN 112503278 A CN112503278 A CN 112503278A CN 202011533501 A CN202011533501 A CN 202011533501A CN 112503278 A CN112503278 A CN 112503278A
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CN
China
Prior art keywords
flange
quick
release
ring
reinforced metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011533501.8A
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Chinese (zh)
Inventor
卞抱元
王勇
尉伟
洪远志
王思慧
范乐
朱邦乐
方键威
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University of Science and Technology of China USTC
Original Assignee
University of Science and Technology of China USTC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Science and Technology of China USTC filed Critical University of Science and Technology of China USTC
Priority to CN202011533501.8A priority Critical patent/CN112503278A/en
Publication of CN112503278A publication Critical patent/CN112503278A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00Flanged joints
    • F16L23/006Attachments
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00Flanged joints
    • F16L23/02Flanged joints the flanges being connected by members tensioned axially
    • F16L23/024Flanged joints the flanges being connected by members tensioned axially characterised by how the flanges are joined to, or form an extension of, the pipes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D5/00Protection or supervision of installations
    • F17D5/02Preventing, monitoring, or locating loss

Abstract

The invention discloses an ultrahigh vacuum copper flange sealing type assembly which is used for an ultrahigh vacuum system and comprises a bolt connection structure flange assembly and a quick-release connection structure flange assembly; the bolted structural flange assembly comprises a pair of bolted flanges, a spring reinforced metal C-shaped ring and a plurality of bolt fasteners; the quick-release type connecting structure flange assembly comprises a pair of quick-release flanges, a spring reinforced metal C-shaped ring and a compression ring chain; the flange part is made of copper material, so that the problem that the traditional stainless steel flange part and a diffraction limit storage ring copper vacuum chamber are difficult to weld can be solved; meanwhile, the spring reinforced metal C-shaped ring realizes sealing by means of designed compression deformation, and the two flange surfaces can be attached by using the deformation, so that the problem that the beam quality is influenced by the impedance of a vacuum component on the diffraction limit storage ring is solved; the sealing structure is simple, the processing difficulty is greatly reduced, and the cost is reduced.

Description

Ultrahigh vacuum copper flange sealing type assembly
Technical Field
The invention relates to a flange, in particular to an ultrahigh vacuum copper flange sealing type assembly.
Background
At present, the sealing connection of an ultrahigh vacuum system is commonly used by a national standard ultrahigh vacuum flange (GB/T6071) 2003), and the ultrahigh vacuum sealing can be met by adopting a knife edge sealing structure and an oxygen-free copper flat gasket, so that the application technology is mature. The ultrahigh vacuum flange is generally made of stainless steel, the strength and hardness of the ultrahigh vacuum flange can meet the sealing requirements, and the stainless steel is mature in production and manufacturing technology and wide in application.
In recent years, diffraction limit storage rings become the development direction of most fourth generation synchrotron radiation light source electronic storage rings, according to physical design requirements and actual working conditions of accelerators, stainless steel used traditionally is difficult to meet various requirements of the diffraction limit storage rings, and copper materials are high in electric conductivity and good in heat conductivity, so that the resistance of beam current is favorably reduced, heat can be rapidly sent away by matching with a water cooling system, a vacuum chamber is prevented from being damaged by synchrotron radiation light sources, and therefore the vacuum chamber of the diffraction limit storage rings is generally made of all copper materials. However, the traditional ultrahigh vacuum flange is made of stainless steel, and is difficult to weld with a copper vacuum chamber, so that a plurality of technical problems can be caused, such as rough weld surface, difficulty in one-step forming of a smooth inner surface of a beam pipeline, high-temperature annealing and softening of brazed copper materials and the like. Electron beam welding can achieve a good welding structure, but is expensive and difficult to meet requirements. The copper flange can avoid the problem of difficult welding of dissimilar metals, can be realized by using electron beam welding or argon arc welding and laser welding with lower cost, and the materials seen by the beam are copper materials which are uniform and can also reduce the coupling impedance of flange parts.
In addition, diffraction limit storage ring is for improving the device utilization ratio, need increase the length proportion of straightway in order to increase the quantity of inserts as far as possible, leads to the lattice structure of curved section to be greatly compressed, and the space is narrow and small between the focusing magnet, though the mature performance of traditional bolted flange is stable, but axial dimension and installation space are big, are difficult to satisfy the requirement, and quick-release flange axial dimension and installation space all are less, can satisfy the requirement of compact overall arrangement. In a diffraction limit storage ring vacuum system, a quick-release flange applied to a narrow space region is required, and a traditional bolt connecting flange with mature technology is also required.
Disclosure of Invention
The invention provides an ultrahigh vacuum copper flange sealing type assembly for an accelerator ultrahigh vacuum system, and aims to solve the problem that a copper vacuum chamber of a diffraction limit storage ring ultrahigh vacuum system and a stainless steel ultrahigh vacuum flange are difficult to weld and the problem of design of a low coupling impedance vacuum flange of the diffraction limit storage ring ultrahigh vacuum system. The invention relates to an ultrahigh vacuum copper flange sealing type assembly, which has the innovation points that: the flange parts are made of chromium, zirconium and copper materials, so that the flange parts can be conveniently welded with a copper vacuum chamber of an accelerator storage ring, and the difficulty in constructing the accelerator is reduced; the sealing ring of the metal C-shaped ring is enhanced by using the spring, the sealing is achieved by using the elastic deformation of the spring inside the sealing ring and the plastic deformation of the soft metal layer, and the joint of a pair of flange surfaces can be realized, so that the gap between the flange parts is reduced, and the coupling impedance of the vacuum system of the accelerator storage ring is reduced; the method is applied to a fourth generation light source diffraction limit storage ring, and solves the problem that the copper vacuum chamber and the stainless steel of the accelerator storage ring are difficult to weld and the problem of the design of a low-coupling-impedance vacuum flange.
The technical scheme adopted by the invention is as follows: an ultrahigh vacuum copper flange sealing type assembly is used for an ultrahigh vacuum system and comprises a bolt connection structure flange assembly and a quick-release connection structure flange assembly; the bolted structural flange assembly comprises a pair of bolted flanges, a spring reinforced metal C-shaped ring and a plurality of bolt fasteners; the quick-release type connecting structure flange assembly comprises a pair of quick-release flanges, a spring reinforced metal C-shaped ring and a compression ring chain;
and the center of each bolt connecting flange is provided with a socket hole for welding with a vacuum pipeline.
The end faces of a pair of bolted flanges are attached, two attached end faces are respectively provided with a plane groove sealing structure and four exhaust grooves with semicircular sections, and a spring reinforced metal C-shaped ring is arranged between the two plane groove sealing structures;
a pair of bolt connecting flanges are fixedly connected together through bolt fasteners;
each quick-release flange is provided with a circle of conical inclined plane which is matched with the compression ring chain;
the end surfaces of the pair of quick-release flanges are jointed, the two jointed end surfaces are respectively provided with a plane groove sealing structure and four exhaust grooves with semicircular sections, and a spring reinforced metal C-shaped ring is arranged between the two plane groove sealing structures;
the compression ring chain comprises a plurality of connecting compression rings, connecting strips, pin shafts, a screw rod, a nut, a cushion block and a small gasket, the connecting compression rings are hinged to the connecting strips through the pin shafts, the screw rod is hinged to the connecting compression rings through the pin shafts, and the cushion block and the small gasket are both provided with holes which can be sleeved on the screw rod.
Further, the bolt connecting flange and the quick-release flange are made of chromium-zirconium-copper and are C18150 in the trademark.
Furthermore, the hardness of the chromium-zirconium-copper material used for the bolt connecting flange and the quick-release flange is not less than 150HV because the hardness of the material is improved by a cold-work hardening pretreatment process;
furthermore, chromium plating or hard alloy can be selected to improve the hardness of the plane of the bolt connecting flange in contact with the bolt and the conical inclined plane of the quick-release flange in contact with the pressure ring chain, so that the influence of overlarge torque on the flange surface to influence the stress balance is avoided during sealing.
Furthermore, the corner of each pressure ring connecting the conical inclined plane contact part of the pressure ring and the quick-release flange needs to be rounded, and the radius of the fillet is not less than 1 mm.
Furthermore, the thickness value of the spring reinforced metal C-shaped ring is determined according to the groove depth of the plane groove sealing structure and the actual requirement, and the thickness of the common spring reinforced metal C-shaped ring is larger than the groove depth of the plane groove sealing structure so as to ensure that enough compression amount is reserved for realizing sealing; the inner diameter value of the small ring of the spring reinforced metal C-shaped ring is determined according to the diameter of the inner ring of the planar groove sealing structure, and is generally 0.5mm larger than the diameter of the inner ring of the planar groove sealing structure; the surface of the spring reinforced metal C-shaped ring is plated with silver or tin, so that the sealing performance is improved.
Furthermore, the surface processing of the plane groove sealing structure of the quick-release flange needs finish machining such as grinding.
Furthermore, when the surface of the plane groove sealing structure of the quick-release flange is subjected to a polishing roughness process, the surface needs to be polished along the circumferential direction, radial and penetrating scratches cannot occur, and the surface roughness value is comprehensively determined according to the size of the spring reinforced metal C-shaped ring and the surface coating.
Compared with the prior art, the invention has the advantages and positive effects that:
the invention provides a bolt connecting structure flange assembly consisting of a pair of bolt connecting flanges, a spring reinforced metal C-shaped ring and a plurality of bolt fasteners and a quick-release connecting structure flange assembly consisting of a pair of quick-release flanges, a spring reinforced metal C-shaped ring and a pair of compression ring chains; the bolt connecting flange and the quick-release flange are both made of chromium-zirconium-copper (C18150) materials, the mechanical properties such as hardness, yield strength and the like of the bolt connecting flange and the quick-release flange are better than those of common copper materials, the sealing requirement can be met, and the problem that a diffraction limit storage ring copper vacuum chamber and a stainless steel flange piece are difficult to weld can be solved; the spring reinforced metal C-shaped ring is used as a metal sealing washer, and the sealing structure on the flange is a plane groove sealing structure, so that the processing difficulty is greatly reduced, and the cost is reduced; meanwhile, the spring reinforced metal C-shaped ring realizes sealing by means of designed compression deformation, and two flange surfaces can be attached by means of the deformation, so that the problem that the beam quality is influenced by the impedance of a vacuum component in an accelerator storage ring is solved.
Drawings
FIG. 1 is a schematic three-dimensional view of a bolted structural flange assembly;
FIG. 2 is a cross-sectional view of a bolted structural flange assembly;
FIG. 3 is an enlarged view of a portion of FIG. 2;
FIG. 4 is a cross-sectional view of a bolted flange;
FIG. 5 is a side view of FIG. 4;
FIG. 6 is a schematic three-dimensional view of a quick release structural flange assembly;
FIG. 7 is a cross-sectional view of a quick release flange assembly;
FIG. 8 is an enlarged view of a portion of FIG. 7;
FIG. 9 is a cross-sectional view of a quick release flange;
the reference numbers are as follows:
1-bolt connection structure flange assembly and 2-quick-release connection structure flange assembly;
3-bolt connecting flange, 5-socket hole, 9-quick-release flange, 4-exhaust groove and 7-plane groove sealing structure; 18-a tapered ramp;
6-bolt fasteners;
8-spring reinforced metal C-rings;
10-pressing ring chains, 11-connecting strips, 12-connecting pressing rings, 13-pin shafts, 14-nuts, 15-small washers, 16-cushion blocks, 17-screws and 19-pressing ring corners;
Detailed Description
The invention provides a concrete implementation structure of an ultrahigh vacuum copper flange sealing type assembly for an ultrahigh vacuum system, which comprises two types, namely a bolted connection structure flange assembly 1 and a quick-release connection structure flange assembly 2, as shown in figures 1, 2, 6 and 7; the bolted structural flange assembly 1 comprises a pair of bolted flanges 3, a spring reinforced metal C-shaped ring 8 and a plurality of bolt fasteners 6; the quick-release type connecting structure flange assembly 2 comprises a pair of quick-release flanges 9, a spring reinforced metal C-shaped ring 8 and a compression ring chain 10;
as shown in fig. 4, each bolt-connecting flange 3 has a socket hole 5 at the center for welding with a vacuum pipe.
The end faces of a pair of bolted flanges 3 are attached, the two attached end faces are respectively provided with a plane groove sealing structure 7 and four exhaust grooves 4 with semicircular sections, and a spring reinforced metal C-shaped ring 8 is arranged between the two plane groove sealing structures 7;
a pair of bolt connecting flanges 3 are fixedly connected together through bolt fasteners 6;
as shown in fig. 9, each quick release flange 9 has a circle of conical inclined surfaces 18 to cooperate with the compression ring chains;
the end faces of a pair of quick-release flanges 9 are jointed, the two jointed end faces are respectively provided with a plane groove sealing structure 7 and four exhaust grooves 4 with semicircular sections, and a spring reinforced metal C-shaped ring 8 is arranged between the two plane groove sealing structures 7;
the press ring chain 10 comprises a plurality of connecting press rings 12, connecting strips 11, pin shafts 13, a screw rod 17, a nut 14, a cushion block 16 and a small washer 15. The connecting compression ring 12 is hinged with the connecting strip 11 through a pin shaft 13, the screw rod 17 is hinged with the connecting compression ring 12 through the pin shaft 13, and the cushion block 16 and the small washer 15 are provided with holes which can be sleeved on the screw rod 17.
Further, the bolt connecting flange 3 and the quick-release flange 9 are made of chromium zirconium copper and have the mark of C18150.
Further, the chromium zirconium copper material used for connecting the bolt flange 3 and the quick-release flange 9 needs a cold-work hardening pretreatment process to improve the hardness of the material to be not less than 150 HV;
furthermore, chromium plating or hard alloy can be selected to improve the hardness of the plane of the bolt connecting flange 3 in contact with the bolt and the conical inclined plane 18 of the quick-release flange 9 in contact with the pressure ring chain 10, so that the influence of overlarge torque on the flange surface to influence the stress balance is avoided during sealing.
Further, each corner 20 of the pressure ring connecting the contact surface of the pressure ring 12 and the quick release flange 9 needs to be rounded, and the radius of the fillet is not less than 1 mm.
Further, the thickness value of the spring reinforced metal C-shaped ring 8 is determined according to the groove depth of the plane groove sealing structure 7 and actual requirements, and the thickness of the common spring reinforced metal C-shaped ring is larger than the groove depth of the plane groove sealing structure so as to ensure that enough compression is reserved to realize sealing; the inner diameter value of the small ring of the spring reinforced metal C-shaped ring is determined according to the diameter of the inner ring of the planar groove sealing structure, and is generally 0.5mm larger than the diameter of the inner ring of the planar groove sealing structure; the surface of the spring reinforced metal C-shaped ring is plated with silver or tin, so that the sealing performance is improved.
Further, the surface processing of the plane groove sealing structure 7 of the quick-release flange 9 needs to adopt finish processing such as grinding.
Further, when the surface of the plane groove sealing structure 7 of the quick-release flange 9 is subjected to a grinding roughness process, the surface needs to be ground along the circumferential direction, radial and penetrating scratches cannot occur, and the surface roughness value is comprehensively determined according to the size of the spring reinforced metal C-shaped ring 8 and a surface coating.
The embodiment also performs a test experiment on the sealing leakage rate of the flange assembly, and the specific implementation process is as follows:
connecting a flange component with the diameter of DN40 with one end of a corrugated pipe, connecting the other end of the corrugated pipe with a helium leak detector, starting the leak detector in a room temperature environment, after the leak rate index of the leak detector to be detected is lower than 1E-10 mabr/s, using a helium needle to face a pair of quick-release flange joint gaps at the joint of each connecting compression ring for spray detection from top to bottom, and screwing the bolts when the leak rate is higher than 1E-10 mabr/s until the vacuum leak rate of all the joints finally reaches the requirement of being less than or equal to 1E-10 mabr/s;
wrapping the flange assembly with a heating baking belt, wrapping an aluminum foil for heat preservation, heating and baking, wherein the highest baking temperature is 230 ℃, the heat preservation is 4 hours, the temperature rise is 1 ℃ per minute, the temperature drop is 1 ℃ per minute, fifteen baking cycle series are implemented totally, the flange assembly is cooled to the room temperature when each baking cycle is finished, the leakage detection is performed at the highest temperature of 230 ℃ and the room temperature environment in each baking cycle, a helium needle is used for carrying out spray detection on a pair of quick-release flange joint gaps at the joint of each connecting compression ring from top to bottom, and the indication number of a helium leakage detector is observed to meet the requirement that the indication number is less than or equal to 1E-10 mabr/s;
the above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (8)

1. An ultra-high vacuum copper flange sealing type assembly, the assembly is used for an ultra-high vacuum system, and is characterized in that: the assembly comprises a bolt connection structure flange assembly (1) and a quick-release connection structure flange assembly (2); the bolt connecting structure flange component (1) comprises a pair of bolt connecting flanges (3), a spring reinforced metal C-shaped ring (8) and a plurality of bolt fasteners (6); the quick-release type connecting structure flange assembly (2) comprises a pair of quick-release flanges (9), a spring reinforced metal C-shaped ring (8) and a compression ring chain (10);
the center of each bolt connecting flange (3) is provided with a socket hole (5) for welding with a vacuum pipeline;
the end faces of a pair of bolted flanges (3) are attached, two attached end faces are respectively provided with a plane groove sealing structure (7) and four exhaust grooves (4) with semicircular sections, and a spring reinforced metal C-shaped ring (8) is arranged between the two plane groove sealing structures (7);
a pair of bolt connecting flanges (3) are connected and fixed together through bolt fasteners (6);
each quick-release flange (9) is provided with a circle of conical inclined plane (18) which is matched with the compression ring chain (10);
the end faces of a pair of quick-release flanges (9) are jointed, the two jointed end faces are respectively provided with a plane groove sealing structure (7) and four exhaust grooves (4) with semicircular sections, and a spring reinforced metal C-shaped ring (8) is arranged between the two plane groove sealing structures (7);
the compression ring chain (10) comprises a plurality of connection compression rings (12), connection strips (11), pin shafts (13), a screw rod (17), a nut (14), a cushion block (16) and a small gasket (15), the connection compression rings (12) and the connection strips (11) are hinged through the pin shafts (13), the screw rod (17) is hinged with the connection compression rings (12) through the pin shafts (13), and the cushion block (16) and the small gasket (15) are all provided with holes and can be sleeved on the screw rod (17).
2. The ultra-high vacuum copper flange seal type assembly of claim 1, wherein: the bolt connecting flange (3) and the quick-release flange (9) are made of chromium, zirconium and copper and are marked with C18150.
3. The ultra-high vacuum copper flange seal type assembly of claim 1, wherein: the chromium zirconium copper material used for the bolt connecting flange (3) and the quick-release flange (9) needs a cold-work hardening pretreatment procedure to improve the hardness of the material to be not less than 150 HV.
4. The ultra-high vacuum copper flange seal type assembly of claim 1, wherein: chromium plating or hard alloy can be selected to improve the hardness of the plane of the bolt connecting flange (3) contacted with the bolt and the conical inclined plane (18) of the quick-release flange (9) contacted with the pressure ring chain (10), thereby avoiding the influence of overlarge torque on the flange surface to influence the stress balance during sealing.
5. The ultra-high vacuum copper flange seal type assembly of claim 1, wherein: and the corner (19) of the pressure ring, which is connected with the contact part of the conical inclined plane (18) of the pressure ring (12) and the quick-release flange (9), needs to be rounded, and the radius of the rounded corner is not less than 1 mm.
6. The ultra-high vacuum copper flange seal type assembly of claim 1, wherein: the thickness value of the spring reinforced metal C-shaped ring (8) is determined according to the groove depth of the plane groove sealing structure (7) and the actual requirement, and the thickness of the common spring reinforced metal C-shaped ring (8) is larger than the groove depth of the plane groove sealing structure (7) so as to ensure that enough compression amount is reserved for realizing sealing; the inner diameter of the small ring of the spring reinforced metal C-shaped ring (8) is determined according to the diameter of the inner ring of the plane groove sealing structure (7), and is generally 0.5mm larger than the diameter of the inner ring of the plane groove sealing structure (7); the surface of the spring reinforced metal C-shaped ring (8) is plated with silver or tin, so that the sealing performance is improved.
7. The ultra-high vacuum copper flange seal type assembly of claim 1, wherein: the surface processing of the plane groove sealing structure (7) of the quick-release flange (9) needs to adopt grinding finish machining.
8. The ultra-high vacuum copper flange seal type assembly of claim 1, wherein: when the surface of the plane groove sealing structure (7) of the quick-release flange (9) is subjected to a polishing roughness process, polishing is required to be carried out along the circumferential direction, radial and penetrating scratches cannot occur, and the surface roughness value is comprehensively determined according to the size of the spring reinforced metal C-shaped ring (8) and a surface coating.
CN202011533501.8A 2020-12-23 2020-12-23 Ultrahigh vacuum copper flange sealing type assembly Pending CN112503278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011533501.8A CN112503278A (en) 2020-12-23 2020-12-23 Ultrahigh vacuum copper flange sealing type assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011533501.8A CN112503278A (en) 2020-12-23 2020-12-23 Ultrahigh vacuum copper flange sealing type assembly

Publications (1)

Publication Number Publication Date
CN112503278A true CN112503278A (en) 2021-03-16

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ID=74921911

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011533501.8A Pending CN112503278A (en) 2020-12-23 2020-12-23 Ultrahigh vacuum copper flange sealing type assembly

Country Status (1)

Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116201968A (en) * 2023-05-05 2023-06-02 山西省安装集团股份有限公司 Building water supply and drainage pipeline structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116201968A (en) * 2023-05-05 2023-06-02 山西省安装集团股份有限公司 Building water supply and drainage pipeline structure
CN116201968B (en) * 2023-05-05 2023-07-07 山西省安装集团股份有限公司 Building water supply and drainage pipeline structure

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