CN112484507A - Vacuum furnace device and working method thereof - Google Patents
Vacuum furnace device and working method thereof Download PDFInfo
- Publication number
- CN112484507A CN112484507A CN202011459763.4A CN202011459763A CN112484507A CN 112484507 A CN112484507 A CN 112484507A CN 202011459763 A CN202011459763 A CN 202011459763A CN 112484507 A CN112484507 A CN 112484507A
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- Prior art keywords
- graphite boat
- oven
- vacuum
- products
- vacuum furnace
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Links
- 238000000034 method Methods 0.000 title claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 61
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 61
- 239000010439 graphite Substances 0.000 claims abstract description 61
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 23
- 238000003466 welding Methods 0.000 claims abstract description 10
- 238000001816 cooling Methods 0.000 claims abstract description 4
- 238000007789 sealing Methods 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 5
- 239000011800 void material Substances 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000001174 ascending effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
- F27D2007/066—Vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The invention discloses a vacuum furnace device, and belongs to the field of mechanical design. The vacuum furnace device includes: the device comprises a vacuum cavity mechanism, an upper cover, a transfer structure and an oven; the oven is a dual-channel independent working structure, the oven is used for capacity guarantee and non-stop work, the upper cover is positioned above the oven, and the oven is filled with N2(ii) a The product at the graphite boat enters from the feeding port, and the transfer structure is used for transferring the product at the graphite boat to a preheating zone of the oven, and then transferring the product to a heating zone of the oven through the preheating zone; the vacuum cavity mechanism is used for performing pressing-down work and lifting work when products at the graphite boat are transferred to a heating area, the transfer structure is also used for transferring the products at the graphite boat to a cooling area of the oven, and finally the products at the graphite boat are transferred to a discharge hole and are circulated in sequence. The invention can realize a vacuum furnace mechanism and a vacuum cavity mechanism for stably and effectively welding the cavity through the vacuum furnace device, thereby replacing an operation mechanism under the assembly of multiple components in the related technology, and greatly improving the quality of the welded cavityThe working efficiency is improved.
Description
Technical Field
The invention relates to the field of mechanical design, in particular to a vacuum furnace device and a working method thereof.
Background
In the related art, the vacuum furnace is simple and easy, and the graphite boat product transportation process needs a plurality of scattered equipment for transmission and synthesis.
The invention can realize a vacuum furnace mechanism and a vacuum cavity mechanism for stably and effectively welding cavities through the vacuum furnace device.
Disclosure of Invention
The invention provides a vacuum furnace device and a working method thereof, and the technical scheme is as follows:
in one aspect of the present invention, there is provided a vacuum furnace apparatus including: the device comprises a vacuum cavity mechanism A, an upper cover B, a transfer structure C and an oven D;
oven D is binary channels independent work structure, oven D is used for the productivity to guarantee and does not shut down the work, upper cover B is located oven D top, oven D is inside to be full of N2；
The product at the graphite boat enters from the feeding port, and the transfer structure C is used for transferring the product at the graphite boat to the preheating zone of the oven D and transferring the product to the heating zone of the oven D through the preheating zone;
the vacuum cavity mechanism A is used for carrying products at the position of the graphite boat to the heating area for pressing down and lifting, the carrying structure C is also used for carrying the products at the position of the graphite boat to the cooling area of the oven D, and finally the products at the position of the graphite boat are carried to the discharge hole for circulation in sequence.
Optionally, the vacuum chamber mechanism a includes: the device comprises a vacuum pump 01, a motor 02, a graphite boat 03, a heating block 04, a high-temperature-resistant sealing ring 05, a vacuum cavity 06, a high-temperature-resistant linear guide sleeve 07, a guide rod 08, a spur rack 09, a gear 10 and a fan 11, wherein the maximum temperature resistance of the high-temperature-resistant linear guide sleeve 07 is 600 ℃, and the stable temperature resistance is 400 ℃.
Optionally, the vacuum chamber 06 and the heating block 04 are located at N2Environment, said N2The environment is used for preventing the products at the graphite boat from being rapidly oxidized or scrapped in a high-temperature state.
Optionally, the temperature of the heating block 04 is stabilized at 300-400 ℃.
Optionally, the fan 11 is always in an operating state to prevent the motor 02 from being too hot to operate normally.
In another aspect of the present invention, there is provided a method for operating a vacuum furnace apparatus, the method being applied to the vacuum furnace apparatus, the method including:
the products at the graphite boat enter from the feeding port, and the transfer structure C ascends and supports the products at the graphite boat;
the transfer structure C supports the products at the graphite boat to move forwards;
the product at the graphite boat is put down by the transferring structure C;
and the shifting structure C is shifted back to the initial transportation position and sequentially circulates.
Optionally, the method further includes:
the gear 10 and the spur rack 09 convert the rotary motion of the motor 02 into the up-and-down motion of the vacuum cavity 06;
the guide sleeve 07 is lifted and pressed down through the high-temperature resistant linear guide sleeve 07, wherein the straight teeth 09 are connected with the two guide rods 08;
the graphite boat 03 carrying the products at the graphite boat is conveyed to the heating block 04, the motor 02 rotates to drive the vacuum cavity 06 to be pressed downwards, wherein when the vacuum cavity 06 is pressed downwards to a lower limit, the motor 02 is in an overload state, and the high-temperature-resistant sealing ring 05 on the vacuum cavity 06 and the heating block 04 are in a pressing state;
in a high-temperature environment, air overflows from the welding position of the product at the graphite boat, the vacuum pump 01 pumps the gas in the vacuum cavity 06, and the void ratio of the welding position of the product at the graphite boat is reduced;
the motor 02 acts to drive the vacuum cavity 06 to rise, the graphite boat product is conveyed away from the graphite boat 03, and the next graphite boat D enters, and the circulation is performed in sequence.
The vacuum furnace device can realize a vacuum furnace mechanism and a vacuum cavity mechanism for stably and effectively welding the cavity, thereby replacing an operation mechanism assembled by a plurality of components in the related technology and greatly improving the operation efficiency.
Drawings
FIG. 1 is a schematic view showing a structure of a vacuum furnace apparatus in the related art;
fig. 2 is a schematic structural view of a vacuum chamber mechanism a provided in an exemplary embodiment of the present invention;
fig. 3 is a schematic diagram illustrating an operation principle of the transfer structure C according to an exemplary embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Reference herein to "a plurality" means two or more. "and/or" describes the association relationship of the associated objects, meaning that there may be three relationships, e.g., a and/or B, which may mean: a exists alone, A and B exist simultaneously, and B exists alone. The character "/" generally indicates that the former and latter associated objects are in an "or" relationship.
Fig. 1 is a schematic structural view illustrating a vacuum furnace apparatus according to an exemplary embodiment of the present invention. The vacuum furnace device includes: the device comprises a vacuum cavity mechanism A, an upper cover B, a transfer structure C and an oven D.
As shown in FIG. 1, the vacuum furnace apparatus comprises a passage 1 and a passage 2, an oven D is a double-passage independent working structure, the oven D is used for capacity guarantee and non-stop work, an upper cover B is positioned above the oven D, and the inside of the oven D is filled with N2。
The graphite boat product enters from the feeding port, and the transfer structure C is used for transferring the graphite boat product to the preheating zone of the oven D, and then transferring the graphite boat product to the heating zone of the oven D through the preheating zone.
The vacuum cavity mechanism A is used for performing pressing-down work and lifting work when products at the graphite boat are transferred to a heating area, the transfer structure C is also used for transferring the products at the graphite boat to a cooling area of the oven D, and finally, the products at the graphite boat are transferred to a discharge hole and are circulated in sequence.
The vacuum furnace device can realize a vacuum furnace mechanism and a vacuum cavity mechanism for stably and effectively welding the cavity, thereby replacing an operation mechanism assembled by a plurality of components in the related technology and greatly improving the operation efficiency.
Fig. 2 shows a schematic structural diagram of a vacuum chamber mechanism a provided in an exemplary embodiment of the present invention.
Wherein, vacuum cavity mechanism A includes: the device comprises a vacuum pump 01, a motor 02, a graphite boat 03, a heating block 04, a high-temperature-resistant sealing ring 05, a vacuum cavity 06, a high-temperature-resistant linear guide sleeve 07, a guide rod 08, a spur rack 09, a gear 10 and a fan 11, wherein the maximum temperature resistance of the high-temperature-resistant linear guide sleeve 07 is 600 ℃, and the stable temperature resistance is 400 ℃.
Further, the vacuum cavity 06 and the heating block 04 are positioned at N2Environment, N2The environment is used for preventing the products at the graphite boat from being rapidly oxidized or scrapped under a high-temperature state.
Optionally, the temperature of the heating block 04 is stabilized at 300-400 ℃.
Optionally, the fan 11 is always in operation to prevent the motor 02 from being too hot to operate properly.
Fig. 3 is a schematic diagram illustrating an operation principle of the transfer structure C according to an exemplary embodiment of the present invention.
Step 1, feeding products at the graphite boat from a feeding port, ascending a transfer structure C, and supporting the products at the graphite boat;
and 4, moving the transferring structure C back to the initial transportation position, and circulating in sequence.
Further, the working method of the vacuum furnace device further comprises the following steps:
and step 9, the motor 02 acts to drive the vacuum cavity 06 to rise, the product at the graphite boat is conveyed away from the graphite boat 03, and the next graphite boat D enters, and the steps are sequentially circulated.
The invention is not to be considered as limited to the particular embodiments shown and described, but is to be understood that various modifications, equivalents, improvements and the like can be made without departing from the spirit and scope of the invention.
Claims (7)
1. A vacuum furnace apparatus, characterized in that the vacuum furnace apparatus comprises: the device comprises a vacuum cavity mechanism A, an upper cover B, a transfer structure C and an oven D;
oven D is binary channels independent work structure, oven D is used for the productivity to guarantee and does not shut down the work, upper cover B is located oven D top, oven D is inside to be full of N2；
The product at the graphite boat enters from the feeding port, and the transfer structure C is used for transferring the product at the graphite boat to the preheating zone of the oven D and transferring the product to the heating zone of the oven D through the preheating zone;
the vacuum cavity mechanism A is used for carrying products at the position of the graphite boat to the heating area for pressing down and lifting, the carrying structure C is also used for carrying the products at the position of the graphite boat to the cooling area of the oven D, and finally the products at the position of the graphite boat are carried to the discharge hole for circulation in sequence.
2. The vacuum furnace apparatus according to claim 1, wherein the vacuum chamber mechanism a comprises: the device comprises a vacuum pump 01, a motor 02, a graphite boat 03, a heating block 04, a high-temperature-resistant sealing ring 05, a vacuum cavity 06, a high-temperature-resistant linear guide sleeve 07, a guide rod 08, a spur rack 09, a gear 10 and a fan 11, wherein the maximum temperature resistance of the high-temperature-resistant linear guide sleeve 07 is 600 ℃, and the stable temperature resistance is 400 ℃.
3. Vacuum furnace device according to claim 1 or 2, characterized in that the vacuum chamber 06Is at N with the heating block 042Environment, said N2The environment is used for preventing the products at the graphite boat from being rapidly oxidized or scrapped in a high-temperature state.
4. The vacuum furnace device according to claim 1 or 2, wherein the temperature of the heating block 04 is stabilized at 300-400 ℃.
5. The vacuum furnace apparatus as claimed in claim 1 or 2, wherein the fan 11 is always in operation for preventing the motor 02 from being too hot to operate normally.
6. A method for operating a vacuum furnace apparatus, the method being adapted for use with the vacuum furnace apparatus of any of claims 1 to 5, the method comprising:
the products at the graphite boat enter from the feeding port, and the transfer structure C ascends and supports the products at the graphite boat;
the transfer structure C supports the products at the graphite boat to move forwards;
the product at the graphite boat is put down by the transferring structure C;
and the shifting structure C is shifted back to the initial transportation position and sequentially circulates.
7. The method of operating a vacuum furnace apparatus of claim 6, further comprising:
the gear 10 and the spur rack 09 convert the rotary motion of the motor 02 into the up-and-down motion of the vacuum cavity 06;
the guide sleeve 07 is lifted and pressed down through the high-temperature resistant linear guide sleeve 07, wherein the straight teeth 09 are connected with the two guide rods 08;
the graphite boat 03 carrying the products at the graphite boat is conveyed to the heating block 04, the motor 02 rotates to drive the vacuum cavity 06 to be pressed downwards, wherein when the vacuum cavity 06 is pressed downwards to a lower limit, the motor 02 is in an overload state, and the high-temperature-resistant sealing ring 05 on the vacuum cavity 06 and the heating block 04 are in a pressing state;
in a high-temperature environment, air overflows from the welding position of the product at the graphite boat, the vacuum pump 01 pumps the gas in the vacuum cavity 06, and the void ratio of the welding position of the product at the graphite boat is reduced;
the motor 02 acts to drive the vacuum cavity 06 to rise, the graphite boat product is conveyed away from the graphite boat 03, and the next graphite boat D enters, and the circulation is performed in sequence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011459763.4A CN112484507A (en) | 2020-12-11 | 2020-12-11 | Vacuum furnace device and working method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011459763.4A CN112484507A (en) | 2020-12-11 | 2020-12-11 | Vacuum furnace device and working method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN112484507A true CN112484507A (en) | 2021-03-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011459763.4A Pending CN112484507A (en) | 2020-12-11 | 2020-12-11 | Vacuum furnace device and working method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112484507A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113245654A (en) * | 2021-06-22 | 2021-08-13 | 广东钜兴电子科技有限公司 | Automatic chip welding process and welding device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200439608Y1 (en) * | 2006-11-22 | 2008-04-25 | 주식회사 에스에이씨 | Vacuum heat treatment furnace |
| CN110732744A (en) * | 2019-09-19 | 2020-01-31 | 无锡昌鼎电子有限公司 | vacuum welding furnace |
| CN111958078A (en) * | 2020-09-27 | 2020-11-20 | 淄博晨启电子有限公司 | Welding process of high-reliability high-surge impact capability semiconductor protection device |
| CN215002956U (en) * | 2020-12-11 | 2021-12-03 | 无锡昌鼎电子有限公司 | Vacuum furnace device |
-
2020
- 2020-12-11 CN CN202011459763.4A patent/CN112484507A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200439608Y1 (en) * | 2006-11-22 | 2008-04-25 | 주식회사 에스에이씨 | Vacuum heat treatment furnace |
| CN110732744A (en) * | 2019-09-19 | 2020-01-31 | 无锡昌鼎电子有限公司 | vacuum welding furnace |
| CN111958078A (en) * | 2020-09-27 | 2020-11-20 | 淄博晨启电子有限公司 | Welding process of high-reliability high-surge impact capability semiconductor protection device |
| CN215002956U (en) * | 2020-12-11 | 2021-12-03 | 无锡昌鼎电子有限公司 | Vacuum furnace device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113245654A (en) * | 2021-06-22 | 2021-08-13 | 广东钜兴电子科技有限公司 | Automatic chip welding process and welding device |
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