CN112481606A - Gas source and system for PECVD deposition of solar cell doping layer - Google Patents
Gas source and system for PECVD deposition of solar cell doping layer Download PDFInfo
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- 238000000151 deposition Methods 0.000 title claims abstract description 22
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 title claims abstract description 19
- 230000008021 deposition Effects 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 42
- 238000010438 heat treatment Methods 0.000 claims abstract description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 18
- 239000010703 silicon Substances 0.000 claims abstract description 18
- 238000002360 preparation method Methods 0.000 claims abstract description 9
- 150000004756 silanes Chemical class 0.000 claims abstract description 8
- 238000002161 passivation Methods 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 7
- 238000011065 in-situ storage Methods 0.000 claims description 3
- 238000004093 laser heating Methods 0.000 claims description 3
- 230000008016 vaporization Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 abstract description 24
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract description 14
- 229910000077 silane Inorganic materials 0.000 abstract description 14
- 239000010408 film Substances 0.000 abstract description 7
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 abstract description 6
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 abstract description 6
- 238000005187 foaming Methods 0.000 abstract description 6
- 229910052736 halogen Inorganic materials 0.000 abstract description 5
- 150000002367 halogens Chemical class 0.000 abstract description 5
- 229910000085 borane Inorganic materials 0.000 abstract description 3
- 239000002360 explosive Substances 0.000 abstract description 3
- 239000012495 reaction gas Substances 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 abstract description 3
- 229910000073 phosphorus hydride Inorganic materials 0.000 abstract description 2
- 230000005587 bubbling Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 239000005922 Phosphane Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910000064 phosphane Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 1
- PKPBCVSCCPTDIU-UHFFFAOYSA-N B.P Chemical compound B.P PKPBCVSCCPTDIU-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 1
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910003910 SiCl4 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- JBANFLSTOJPTFW-UHFFFAOYSA-N azane;boron Chemical compound [B].N JBANFLSTOJPTFW-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- H01L31/02—Details
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- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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Abstract
The invention discloses a preparation method of a PECVD (plasma enhanced chemical vapor deposition) deposited solar cell doping layer, which comprises the following steps of: s1, conveying a silicon wafer placed on a carrier into a process chamber; s2, vacuumizing the process cavity; and S3, introducing mixed gas of halogenated silane and doping gas into the process cavity, starting a power supply to excite plasma to discharge, simultaneously heating the process cavity to a reaction temperature, reacting the mixed gas of halogenated silane and doping gas in a low-pressure vacuum environment, and generating a doped silicon film on the surface of the silicon wafer. According to the invention, the halogen silane without H is used for replacing flammable, explosive and high-risk silane as the reaction gas for PECVD deposition of the doping layer, so that the use safety is higher, and because the halogen silane does not contain H and can provide Si element required for deposition of a thin film layer, and the foaming phenomenon cannot be caused by the fact that the content of H in phosphine or borane is less, the problem of foaming of the deposition doping layer caused by silane is solved, and the yield of the solar cell is greatly improved.
Description
Technical Field
The invention relates to the technical field of solar cell preparation, in particular to a gas source and a system for depositing a solar cell doping layer by PECVD.
Background
In recent years, with the research and development of crystalline silicon solar cells, theories and practices prove that surface passivation is the necessary way for improving the cell efficiency, and the passivation of an alumina thin layer is widely popularized on a PERC cell. With the continuous reduction of the thickness of the silicon wafer of the crystalline silicon cell, and for the cell with a certain thickness, when the diffusion length of minority carriers is greater than the thickness of the silicon wafer, the recombination rate of the surface will bring adverse effects to the efficiency of the solar cell, and the preparation of the doping layer can provide field passivation, form a good passivation contact effect with the silicon substrate, reduce the recombination loss and improve the efficiency of the solar cell.
The passivation contact of tunneling oxide (TOPCon) technology is one of the key research directions of the current industrialized high-efficiency solar cell, and is a passivation contact cell structure which can reduce surface recombination and does not need to open pores.
At present, when a TOPCon solar cell prepares a doped layer by using a PECVD method, silane and phosphane (or borane) are generally used as reaction gases, the silane and the phosphane (or borane) enter a reaction chamber and are excited by a radio frequency or other kinds of power supplies to discharge to form a plasma state, and gas molecules are excited to form active ions which mutually collide and react in a vacuum environment. However, a large amount of H ions from silane in the plasma enter the film during the CVD process and are treated with H in the subsequent high temperature annealing process2Overflow of the film, resulting in rupture and chipping of the film in the overflow area, a phenomenon known as H2The final phosphorus (or boron) doped layer has a greatly reduced passivation effect due to the bubbling problem, and thus the ideal effect cannot be achieved. The foaming phenomenon is more serious when the thickness of the film is increased, and the thickness of the passivation doping layer is generally required to be 20-200nm, so the foaming problem seriously influences the yield of the solar cell.
Disclosure of Invention
In order to solve the technical problem, the invention provides a gas source for PECVD deposition of a doping layer of a solar cell, wherein the gas source adopts a mixed gas of halogenated silane and a doping gas.
The invention also provides a preparation method of the PECVD deposition solar cell doping layer, which comprises the following steps:
s1, conveying the silicon wafer placed on a carrier into a process chamber, wherein the conveying mode can be plate type, chain type, tube type and the like, and is not specifically limited;
s2, vacuumizing the process cavity;
and S3, introducing mixed gas of halogenated silane and doping gas into the process cavity, starting a power supply to excite plasma to discharge, heating the process cavity, and generating a doped silicon film on the surface of the silicon wafer in a reaction region in a low-pressure vacuum environment so as to obtain an in-situ doping layer to realize a passivation effect.
In step S2, the vacuum pressure in the process chamber is 1-30 Pa; in step S3, the heating temperature in the process chamber is 100-700 ℃.
The invention also provides a system for depositing the solar cell doping layer by PECVD, which comprises a conveying system and a reaction system;
the conveying system comprises a conveying line and a carrier arranged on the conveying line, and the silicon wafer is placed on the carrier;
the reaction system comprises a process cavity, vacuum equipment for vacuumizing the process cavity, gas supply equipment for introducing process gas into the process cavity, and a heating device arranged in the process cavity.
Wherein the gas supply equipment comprises doping gas supply equipment and halogenated silane supply equipment; the halosilane supply device is provided with a heating mechanism for heating and gasifying halosilane to form a gaseous source and introducing the gaseous source into the process chamber.
The heating device is used for heating the glass substrate by using infrared heating, microwave heating and laser heating.
The invention also provides a solar cell doping layer prepared by the system and the method, which is used for preparing the TOPCon solar cell.
By the technical scheme, the invention adopts the halogen silane (such as SiCl) without H4And the like) to replace flammable, explosive and high-risk silane as a reaction gas for PECVD deposition doping layer, the use safety is higher, and because the halogenated silane does not contain H and can provide Si element required by deposition of a thin film layer, and the H content in the phosphine (borane) is less, the bubbling phenomenon can not be caused, thereby solving the bubbling problem of the deposition doping layer caused by the silane and greatly improving the yield of the solar cell.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below.
FIG. 1 is a schematic view of a manufacturing system according to an embodiment of the present invention.
The figures in the drawings represent: 10. a silicon wafer; 20. a process chamber; 30. a vacuum device; 40. a gas supply device; 50. a heating device; 60. a reaction zone.
Detailed Description
Example 1:
referring to the preparation system for depositing the solar cell doping layer by PECVD shown in fig. 1, the preparation method for depositing the solar cell doping layer by PECVD provided by the invention comprises the following steps:
s1, conveying the silicon wafer 10 placed on a carrier into a process chamber 20 through a conveying line, wherein the conveying mode can be plate type, chain type, pipe type and the like, and is not particularly limited;
s2, vacuumizing the process cavity 20 to 1-30Pa by adopting vacuum equipment 30;
s3, introducing mixed gas of halogenated silane and doping gas into the process cavity 20 through the gas supply equipment 40, starting a power supply to excite plasma discharge, simultaneously heating the temperature in the process cavity 20 to 700 ℃ by adopting one or more of infrared heating, microwave heating and laser heating through the heating device 50, and generating a doped silicon film on the surface of the silicon wafer 10 in the reaction region 60 in the low-pressure vacuum environment so as to obtain an in-situ doping layer to realize the passivation effect.
Wherein the gas supply apparatus 40 includes a dopant gas supply apparatus and a halosilane supply apparatus; the halosilane supply apparatus has a heating mechanism for heating and vaporizing halosilane to form a gaseous source and passing it into the process chamber 20, for example, SiCl4Generally, heating above 58 ℃ will vaporize the vapor to form a gaseous source.
The following table shows comparative examples of 2 sets of different process parameters of this example 1:
based on the 2 groups of comparative examples in the table above, it can be known that the invention adopts halogen silane without H to replace flammable, explosive and high-risk silane as the reaction gas for PECVD deposition doping layer, the use safety is higher, and the halogen silane does not contain H and can provide Si element required for deposition of thin film layer, while the H content in phosphine (borazane) is less and does not cause foaming phenomenon, thereby solving the problem of foaming of deposition doping layer caused by silane and greatly improving the yield of solar cell.
Example 2:
the solar cell doping layer prepared based on the system and method of example 1 above was used for TOPCon solar cell preparation.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to the above-described embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. The gas source for PECVD deposition of the solar cell doping layer is characterized in that the gas source adopts a mixed gas of halogenated silane and a doping gas.
2. A preparation method of a solar cell doping layer through PECVD deposition is characterized by comprising the following steps:
s1, conveying a silicon wafer (10) placed on a carrier into a process chamber (20);
s2, vacuumizing the process cavity (20);
s3, introducing the mixed gas of the halosilane and the doping gas according to the claim 1 into the process cavity (20), starting a power supply to excite plasma discharge, heating the process cavity (20), reacting in a low-pressure vacuum environment, and generating a doped silicon film on the surface of the silicon wafer (10), so that an in-situ doping layer is obtained to realize a passivation effect.
3. A method according to claim 2, wherein in step S2, the vacuum pressure in the process chamber (20) is 1-30 Pa; in step S3, the heating temperature in the process chamber (20) is 100-700 ℃.
4. A system for depositing a solar cell doping layer by PECVD is characterized by comprising a conveying system and a reaction system;
the conveying system comprises a conveying line and a carrier arranged on the conveying line, and a silicon wafer (10) is placed on the carrier;
the reaction system comprises a process chamber (20), a vacuum device (30) for vacuumizing the process chamber (20), a gas supply device (40) for introducing process gas into the process chamber (20), and a heating device (50) arranged in the process chamber (20).
5. A PECVD deposition solar cell doping layer preparation system according to claim 4, wherein the gas supply device (40) comprises a doping gas supply device and a halosilane supply device; the halosilane supply apparatus has a heating mechanism for heating and vaporizing halosilane to form a gaseous source and passing into the process chamber (20).
6. A PECVD deposition solar cell doping layer system according to claim 4, wherein the heating device (50) is heated by one or more of infrared heating, microwave heating and laser heating.
7. A solar cell doped layer, characterized by being prepared using the system of claim 4 and the method of claim 2.
8. A TOPCon solar cell comprising the doped layer of claim 7.
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